Adjustable support mechanism and wafer polishing apparatus

Abstract

This application discloses an adjustable support mechanism and a wafer polishing equipment, relating to the field of semiconductor manufacturing technology. The mechanism includes an adjustable support portion, a support portion, and a carrier portion. The support portion has a support position, a first operating position, and a second operating position. The support position is located at the connection between the support portion and the carrier portion. The first operating position is located at the connection between the support portion and the adjustable component. The second operating position is the position where the adjustable support portion applies an adjusting action to the support portion. The first and second operating positions are located on the same side of the support position, and the distance between the first operating position and the support position is less than the distance between the second operating position and the support position. The adjustable support portion is disposed on the carrier portion and acts on the second operating position, thereby driving the first operating position to generate an adjusting displacement through the support portion. This adjustable support mechanism and wafer polishing equipment can effectively solve the problems of insufficient support stiffness and easy deformation under polishing load in the worktable tilt adjustment mechanism.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically, to an adjustable support mechanism and a wafer grinding device. Background Technology

[0002] With the development of semiconductor manufacturing technology, wafer grinding equipment is widely used in the thinning and planarization of wafers such as silicon and silicon carbide. Among them, hard wafers such as silicon carbide have high material hardness, which puts higher requirements on the overall support rigidity of the equipment during the grinding process. As an important component that supports the wafer and works with the grinding parts to complete the processing, the stability of the worktable directly affects the processing thickness and processing consistency of the wafer.

[0003] To meet the tilt adjustment requirements during wafer grinding, existing wafer grinding equipment typically uses a combination of fixed and adjustable supports to support the worktable. The height of the adjustable support is changed by a drive mechanism, thereby adjusting the tilt of the worktable relative to the grinding components. However, due to limitations in the internal installation space and the structural dimensions of the adjustment mechanism, the structural rigidity of the adjustable support is often limited, making it prone to elastic deformation when subjected to large processing loads during wafer grinding.

[0004] When the rigidity of the adjustable support structure of the worktable is insufficient, the grinding load may cause the worktable to be compressed or shifted during processing. After processing is completed and the grinding load is released, the adjustable support structure will elastically recover, which may cause the wafer and the grinding component to not separate in a timely and stable manner. This will cause the wafer to be subjected to additional grinding after the scheduled processing is completed, thus affecting the final thickness of the wafer and the consistency of batch processing.

[0005] In summary, how to solve the problem of insufficient support rigidity of the worktable tilt adjustment mechanism in wafer grinding equipment, which is prone to deformation under grinding load, is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] In view of this, the purpose of this application is to provide an adjustable support mechanism and a wafer grinding equipment, which can effectively solve the problem of insufficient support rigidity of the worktable tilt adjustment mechanism in wafer grinding equipment and easy deformation under grinding load.

[0007] To achieve the above objectives, this application provides the following technical solution: An adjustable support mechanism includes an adjustable support part, a support part, and a load-bearing part; The support has a support position, a first working position, and a second working position. The support position is located at the connection between the support and the bearing part. The first working position is located at the connection between the support and the adjustable member. The second working position is the position where the adjusting support applies an adjusting action to the support. The first action position and the second action position are located on the same side of the support position, and the distance between the first action position and the support position is less than the distance between the second action position and the support position; The adjusting support is disposed on the bearing portion and acts on the second acting position, so as to drive the first acting position to generate an adjusting displacement through the support.

[0008] In some technical solutions, the adjusting support includes a linear drive member, the output end of which is connected to the support in the second operating position to drive the second operating position to move along the adjusting direction.

[0009] In some technical solutions, the adjusting support includes a rotary drive and a transmission assembly. The rotary drive is connected to the transmission assembly, and the transmission assembly is used to convert the rotational motion output by the rotary drive into linear motion that drives the second working position to move.

[0010] In some technical solutions, the transmission assembly includes an adjusting screw and a screw nut. The adjusting screw is rotatably supported on the bearing portion, and the screw nut is threadedly engaged with the adjusting screw and is connected to the second operating position of the support portion.

[0011] In some technical solutions, the adjusting screw is a ball screw, and the screw nut is a ball screw nut that cooperates with the ball screw.

[0012] In some technical solutions, the rotary drive component includes a drive motor, and the adjusting support further includes a coupling. The output end of the drive motor is connected to the adjusting screw via the coupling.

[0013] In some technical solutions, the adjusting support also includes a support base and a nut fixing base; The support base is disposed on the bearing part, and the adjusting screw is rotatably disposed on the support base; The lead screw nut is connected to the second working position of the support part through the nut fixing seat.

[0014] In some technical solutions, the adjustment support mechanism further includes an adjustment part, which is disposed at a first working position of the support part and is used to connect with the adjustable member.

[0015] A wafer grinding apparatus includes a worktable, a fixed support, and an adjustable support mechanism as described in any one of the above. The fixed support and the adjusting support mechanism support the worktable at different positions respectively. The support part of the adjusting support mechanism is connected to the worktable at a first working position so as to adjust the tilt angle of the worktable by changing the position of the first working position.

[0016] In some technical solutions, two adjustment support mechanisms are provided. The fixed support part and the two adjustment support mechanisms are arranged at intervals along the circumference of the worktable and together form a three-point support for the worktable.

[0017] The adjustment support mechanism provided in this application has at least the following advantages compared with the prior art: 1. The support part is connected to the bearing part at the support position, and the first action position and the second action position are located on the same side of the support position, and the distance from the first action position to the support position is less than the distance from the second action position to the support position, thereby forming a lever force transmission relationship in the support part; when the load of the adjustable member acting on the first action position is transmitted to the second action position through the support part, the longer action arm can be used to reduce the force borne by the adjusting support part, thereby reducing the deformation of the adjusting support part under load, which is beneficial to improving the support stiffness and bearing stability of the adjusting support mechanism.

[0018] 2. The adjustment support acts on the second action position, which is far from the support position, and through the support, drives the first action position, which is closer to the support position, to produce an adjustment displacement. This allows the displacement of the second action position to be converted into a smaller displacement of the first action position through a lever relationship, which is beneficial for more precise adjustment of the position of the adjusted part.

[0019] The wafer grinding equipment provided in this application, including the aforementioned adjustment support mechanism, has the same beneficial effects. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0021] Figure 1 This is a structural schematic diagram of the adjustment support mechanism provided in this application; Figure 2 A schematic diagram of the support structure arrangement for the wafer grinding equipment provided in this application; Figure 3This is a schematic diagram of the lever force transmission principle of the adjustment support mechanism provided in this application.

[0022] Explanation of reference numerals in the attached figures: 1 Adjustable support; 11 Drive motor; 12 Coupling; 13 Adjustable lead screw; 14 Support base; 15 Lead screw nut; 16 Nut fixing base; 2. Fixed support section; 3. Worktable; 4. Adjustment section; 5. Support section; 6. Bearing section; 100 Support position; 200 First action position; 300 Second action position. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] Wafer grinding equipment requires high rigidity of the worktable support. Existing tilt adjustment mechanisms are limited by installation space and structure, resulting in insufficient support rigidity. They are prone to deformation under grinding loads, which affects the final processed thickness and consistency of the wafer.

[0025] In view of the above issues, refer to Figures 1-3 This application provides an adjustable support mechanism and a wafer grinding equipment, which can effectively solve the problem of insufficient support rigidity of the worktable tilt adjustment mechanism in wafer grinding equipment and easy deformation under grinding load.

[0026] Specifically, an adjustment support mechanism is provided, including an adjustment support part 1, a support part 5, and a load-bearing part 6; The support part 5 has a support position 100, a first working position 200 and a second working position 300. The support position 100 is located at the connection between the support part 5 and the bearing part 6. The first working position 200 is located at the connection between the support part 5 and the adjustable member. The second working position 300 is the position where the adjusting support part 1 applies an adjusting action to the support part 5. The first action position 200 and the second action position 300 are located on the same side of the support position 100, and the distance between the first action position 200 and the support position 100 is less than the distance between the second action position 300 and the support position 100. The adjustment support 1 is disposed on the bearing part 6 and acts on the second action position 300, so as to drive the first action position 200 to generate an adjustment displacement through the support 5.

[0027] The adjustment support mechanism includes an adjustment support part 1, a support part 5, and a bearing part 6. The support part 5 forms a support position 100, a first operating position 200, and a second operating position 300. The support part 5 is connected to the bearing part 6 at the support position 100, enabling the bearing part 6 to provide a stable support reference for the support part 5. The first operating position 200 is used to connect the adjusted component, and the second operating position 300 is used to receive the adjustment action applied by the adjustment support part 1. Since the first operating position 200 and the second operating position 300 are located on the same side of the support position 100, and the first operating position 200 is adjacent to the support part 6... The distance from position 100 is less than the distance from the second action position 300 to the support position 100. Therefore, the support part 5 can form a lever force transmission relationship with the support position 100 as the force reference. When the adjusting support part 1 applies an adjusting action to the second action position 300, the movement and force of the second action position 300 are transmitted to the first action position 200 through the support part 5. Thus, while adjusting the position of the adjusted part, the longer action arm of the second action position 300 is used to reduce the force borne by the adjusting support part 1, which helps to reduce the load on the adjusting support part 1 and improve the overall support stability.

[0028] In this embodiment, the distance from the support position 100 to the first action position 200 can be denoted as 'a', and the distance from the support position 100 to the second action position 300 can be denoted as 'b', where 'a' is less than 'b'. Let the force at the first action position 200 be F1, and the force at the second action position 300 be F2. According to the torque balance relationship, F1 × a = F2 × b, thus F2 = F1 × a / b. Since a / b is less than 1, the force transmitted to the second action position 300 and the adjusting support part 1 is less than the force at the first action position 200, thus ensuring that the relevant parts of the load-bearing adjusting structure are supported. The load on the component is reduced; correspondingly, if the adjustment displacement of the second action position 300 is S2 and the displacement of the first action position 200 is S1, a displacement relationship of S1=S2×a / b can be formed, so that the larger input displacement is converted into a smaller output displacement, thereby taking into account both load reduction and micro-position adjustment; since the actual tilt angle adjustment is on the order of micrometers, even if the bearing part 6, the support part 5 and the components connected to them are rigidly connected, the support part 5 and the related connection area are allowed to produce small elastic deformation during the adjustment process. This deformation is within an acceptable range and will not have a substantial impact on normal wafer processing.

[0029] In some cases, the support 5 can be a plate-like member, beam-like member, arm-like member, or an integrated support component with local elastic deformation capability. As long as a stable force reference can be formed at the support position 100 and the first action position 200 is located between the support position 100 and the second action position 300, a corresponding lever force transmission relationship can be established. The support position 100 can be formed by a rigid fixed connection or by a connection structure that can limit large-range displacement while allowing small elastic deformation. The first action position 200 and the second action position 300 are not required to form independent bosses or holes, and can be formed by the connection area, force-bearing area, or installation area on the support 5. By designing the ratio of a to b, the force level of the adjustment support 1 and the displacement resolution of the first action position 200 can be matched according to the load and target adjustment accuracy of different adjustable parts.

[0030] In some embodiments, the adjusting support 1 includes a linear drive member, the output end of which is connected to the support 5 at a second operating position 300 to drive the second operating position 300 to move along the adjusting direction.

[0031] Furthermore, the adjusting support 1 can be a linear drive that can directly output linear motion, and its output end can establish a transmission relationship with the support 5 at the second working position 300. The axial displacement generated by the linear drive does not need to go through rotational motion conversion first, and can directly push or pull the second working position 300. The motion of the second working position 300 is then transmitted by the support 5 to the first working position 200 according to the aforementioned distance relationship. This structure can reduce the motion conversion links, make the transmission path of the adjusting action more direct, and at the same time, it can still use the lever relationship of the support 5 to reduce the reaction force borne by the adjusting support 1 and reduce the actual adjusting displacement of the first working position 200.

[0032] Specifically, the linear drive can be arranged along the predetermined adjustment direction of the second operating position 300. Its fixed end is connected to the bearing part 6 or a structure that is fixed relative to the bearing part 6, and its moving output end is connected to the second operating position 300 of the support part 5. When the output end extends along the adjustment direction, the second operating position 300 can move slightly to one side, and the support part 5 drives the first operating position 200 to produce a corresponding position change. When the output end retracts in the opposite direction, the second operating position 300 moves in the opposite direction, and the first operating position 200 is restored or adjusted in the opposite direction. By controlling the output stroke of the linear drive, the adjustment amount of the support part 5 can be controlled. At the same time, since the distance between the first operating position 200 and the support position 100 is smaller than the distance between the second operating position 300 and the support position 100, the actual change of the first operating position 200 can be smaller than the output change of the linear drive.

[0033] In some cases, the linear drive can be a linear motor, electric actuator, piezoelectric actuator, electromagnetic linear actuator, or other drive structure capable of outputting controllable linear displacement. For micron-level adjustment requirements, a piezoelectric actuator or a linear actuator with precision displacement control capability can be used to further improve the fineness of adjustment by utilizing its high displacement resolution. The linear drive and the second operating position 300 can also use a push rod, connecting block, flexible connector, or ball joint connection structure to transmit motion, so that the output end can adapt to the small posture changes generated by the support part 5 while maintaining linear drive, thereby reducing additional lateral loads.

[0034] In some embodiments, the adjusting support 1 includes a rotary drive and a transmission assembly. The rotary drive is connected to the transmission assembly, and the transmission assembly is used to convert the rotational motion output by the rotary drive into linear motion that drives the second operating position 300 to move.

[0035] Furthermore, the adjustment support 1 may include a rotary drive and a transmission assembly. The rotary drive provides rotational power, and the transmission assembly converts the rotational motion into linear motion that drives the second operating position 300 to move. By having the driving power and position adjustment function handled by two separate levels of structure, the rotary drive can be positioned in a more suitable location for installation, while the output rotational motion is converted into the linear adjustment motion required by the second operating position 300 via the transmission assembly. After the second operating position 300 moves, the lever transmission relationship of the support 5 drives the first operating position 200 to produce a small adjustment displacement, thereby forming a continuous transmission path of rotary input, linear conversion, and micro-output.

[0036] In this embodiment, the rotary drive can be arranged near the bearing part 6, and its output shaft rotation direction corresponds to the input direction of the transmission assembly. One end of the transmission assembly receives the rotational motion output by the rotary drive, and the other end forms an output structure that moves along the adjustment direction of the worktable. This output structure establishes a transmission relationship with the second operating position 300. When the rotary drive rotates in the forward direction, the transmission assembly drives the second operating position 300 to move in one direction. When the rotary drive rotates in the reverse direction, the second operating position 300 moves in the opposite direction, thereby realizing bidirectional adjustment. The rotary drive form also facilitates the quantification of the input motion by controlling the rotation angle or number of revolutions, and obtains a smaller adjustment amount of the first operating position 200 by combining the displacement reduction relationship of the support part 5.

[0037] In some cases, in addition to using a helical transmission structure, the transmission assembly can also use a cam and follower mating structure, an eccentric wheel transmission structure, a gear and rack transmission structure, or other mechanisms that can convert rotary motion into linear motion. For example, when the cam rotates, it can push the follower connected to the second operating position 300 to produce linear displacement through contour changes. The gear and rack structure can drive the rack to move in a linear direction through gear rotation. For applications requiring a smaller adjustment stroke and higher resolution, a reduction mechanism can be set between the rotary drive and the transmission assembly to reduce the speed and increase the torque of the motion output by the rotary drive before converting it into a small linear motion at the second operating position 300.

[0038] In some embodiments, the transmission assembly includes an adjusting screw 13 and a screw nut 15. The adjusting screw 13 is rotatably supported on the bearing portion 6, and the screw nut 15 is threadedly engaged with the adjusting screw 13 and is connected to the second operating position 300 of the support portion 5.

[0039] Furthermore, the transmission assembly can form a helical transmission pair using an adjusting screw 13 and a screw nut 15. The adjusting screw 13 can rotate relative to the bearing part 6, and the screw nut 15 is threadedly engaged with the adjusting screw 13 and establishes a transmission relationship with the second working position 300 of the support part 5. When the adjusting screw 13 rotates, its rotational motion is converted into the axial motion of the screw nut 15 through thread engagement, and the screw nut 15 further drives the second working position 300 to produce a linear displacement. Since the threaded transmission can convert continuous rotational motion into a small and continuous axial displacement, it is suitable for making minute adjustments required for the tilt angle of the worktable.

[0040] In this embodiment, the adjusting screw 13 is arranged along the adjusting direction of the second operating position 300 and is provided with rotational support by the bearing part 6; the screw nut 15 is sleeved on the adjusting screw 13 and is restricted to rotate synchronously with the adjusting screw 13, so that the screw nut 15 can move along its axial direction when the adjusting screw 13 rotates; the axial movement of the screw nut 15 is transmitted to the second operating position 300 of the support part 5 through the connecting structure, thereby causing the support part 5 to produce a slight elastic deformation and position change; the support part 5 then transmits the movement of the second operating position 300 to the first operating position 200 according to the corresponding lever arm relationship, thereby forming a transmission chain from rotational input to slight displacement output on the worktable side.

[0041] In some cases, the adjusting screw 13 can adopt different leads and different thread forms to change the axial displacement of the screw nut 15 per revolution of the adjusting screw 13. For applications requiring higher resolution, a precision screw with a smaller lead can be used to achieve a smaller axial displacement for the same rotation angle. The screw nut 15 can be directly connected to the second operating position 300, or force can be transmitted through an intermediate connector. At the same time, an anti-rotation guide structure can be set to limit the rotational freedom of the screw nut 15, making its movement more stable and reducing the additional load caused by circumferential deflection.

[0042] In some embodiments, the adjusting screw 13 is a ball screw, and the screw nut 15 is a ball screw nut that cooperates with the ball screw.

[0043] The adjusting screw 13 can be a ball screw, and the screw nut 15 can be a corresponding ball screw nut, so that the adjusting screw 13 and the screw nut 15 form a rolling transmission through rolling elements. Compared with the transmission form of direct sliding contact of the thread surface, the rolling transmission can reduce contact friction and reduce the gap change during reverse movement through reasonable matching and preload. When it is necessary to reciprocate to adjust the tilt angle of the worktable, it can reduce the impact of forward and reverse switching on the repeatability of the adjustment position, so that the movement of the second operating position 300 and the rotation input of the adjusting screw 13 maintain a relatively stable correspondence.

[0044] In this embodiment, the ball screw is set along the adjustment direction, and the ball screw nut cooperates with the ball screw and moves axially. When the adjustment direction needs to be changed, the driving direction is reversed accordingly, and the ball screw nut changes its moving direction accordingly. After adopting ball transmission, the idle stroke caused by the fit clearance during the direction switching process of ordinary triangular thread pairs can be reduced, so that the adjustment action can be transmitted to the second action position 300 more quickly. Since the worktable tilt angle adjustment itself is a micro-adjustment, the reverse transmission error will be directly reflected as the uncertainty of the support position change. Therefore, reducing this error is beneficial to improving the repeatability and positioning stability of the tilt angle adjustment.

[0045] In some cases, single-nut preloaded, double-nut preloaded, or other ball screw structures with backlash compensation capabilities can be selected according to load and accuracy requirements. In addition to ball screws, precision trapezoidal screws with backlash-eliminating nuts, roller screws, or other helical drive structures that can reduce backlash can also be used. For applications that require both load-bearing capacity and fine displacement control, a smaller lead and a preload structure can be selected to ensure that the transmission pair maintains good axial stiffness and consistency of forward and reverse motion when bearing table loads.

[0046] In some embodiments, the rotary drive includes a drive motor 11, and the adjusting support 1 further includes a coupling 12. The output end of the drive motor 11 is connected to the adjusting screw 13 via the coupling 12.

[0047] Furthermore, the rotary drive component can be a drive motor 11, and a coupling 12 is provided between the drive motor 11 and the adjusting screw 13; the drive motor 11 is used to provide controllable rotational power, and the coupling 12 is used to transmit the output torque of the drive motor 11 to the adjusting screw 13, so that the adjusting screw 13 rotates in a set direction and rotation amount; by connecting the power source and the adjusting screw 13 through the coupling 12, the influence of the installation error of the two shafts on the transmission stability can be reduced while maintaining the continuity of transmission, and it is convenient to install, disassemble and maintain the drive motor 11 and the adjusting screw 13 separately.

[0048] In this embodiment, the drive motor 11, coupling 12, and adjusting screw 13 are arranged sequentially along the transmission direction. One end of the coupling 12 is connected to the output shaft of the drive motor 11, and the other end is connected to the adjusting screw 13. When the drive motor 11 rotates, it drives the adjusting screw 13 to rotate synchronously via the coupling 12. The adjusting screw 13 then drives the screw nut 15 to move axially, thereby converting the rotational output of the motor into a minute position change of the support part 5 step by step. By controlling the forward and reverse rotation and the amount of rotation of the drive motor 11, the direction and amount of movement of the first working position 200 can be changed, realizing bidirectional fine adjustment of the worktable tilt angle.

[0049] In some cases, the drive motor 11 can be a servo motor, a stepper motor, or other motors with controllable rotation angle. The servo motor can achieve closed-loop adjustment by combining position feedback, while the stepper motor can control the number of rotation steps by the number of pulses. The coupling 12 can be a flexible coupling, a diaphragm coupling, a bellows coupling, or other connection structure that can transmit torque and compensate for a certain coaxiality error. When the installation space allows, a reduction assembly can also be set between the drive motor 11 and the adjusting screw 13 to increase the output torque and reduce the screw angle corresponding to the unit control quantity, thereby further meeting the micro-position adjustment requirements.

[0050] In some embodiments, the adjusting support 1 further includes a support base 14 and a nut fixing base 16; Support base 14 is provided on bearing part 6, and adjusting screw 13 is rotatably provided on support base 14; The lead screw nut 15 is connected to the second working position 300 of the support part 5 via the nut fixing seat 16.

[0051] Furthermore, the adjusting support part 1 can also be provided with a support seat 14 and a nut fixing seat 16. The support seat 14 is installed on the bearing part 6 to provide a stable rotational support for the adjusting screw 13. The nut fixing seat 16 is used to establish a connection between the screw nut 15 and the second operating position 300 of the support part 5. With this arrangement, the rotational movement of the adjusting screw 13 and the linear movement of the screw nut 15 can be supported and transmitted by different structures, making the transmission hierarchy clearer. The support seat 14 undertakes the positioning and rotational support functions of the adjusting screw 13, and the nut fixing seat 16 undertakes the motion output function of the screw nut 15, thereby stably transmitting the axial movement of the screw nut 15 to the second operating position 300.

[0052] In this embodiment, the support base 14 is fixed on the bearing part 6, and the adjusting screw 13 passes through and is rotatably supported on the support base 14; the screw nut 15 cooperates with the adjusting screw 13, and the nut fixing seat 16 is fixed to the screw nut 15 and connected to the second working position 300 of the support part 5; when the adjusting screw 13 rotates, the screw nut 15 drives the nut fixing seat 16 to move along the axial direction of the adjusting screw 13, and the nut fixing seat 16 further applies an adjustment action to the second working position 300; since the force borne by the adjusting support part 1 has been reduced through the lever force transmission relationship of the support part 5, the axial load borne by the rotating support structure inside the support base 14 can be reduced, which is beneficial to balance the structural size and support rigidity within the limited installation space.

[0053] In some cases, the support seat 14 can be an integral or split seat, and an angular contact bearing, thrust bearing or other rotating support suitable for bearing axial loads can be installed inside; the nut fixing seat 16 can be a sleeve type, block type or flange type structure, as long as it can reliably restrict the circumferential rotation of the lead screw nut 15 and transmit axial movement to the second working position 300; the nut fixing seat 16 and the support part 5 can also be connected by bolts, pins, spherical surfaces or flexible connections that allow for slight angle compensation, so that the lead screw nut 15 maintains axial movement while reducing the additional off-center load caused by slight deformation of the support part 5.

[0054] In some embodiments, the adjusting support mechanism further includes an adjusting part 4, which is disposed at a first working position 200 of the support part 5 and is used to connect with the adjustable member.

[0055] Furthermore, the adjustment support mechanism may also include an adjustment part 4, which is arranged at the first working position 200 of the support part 5 to establish the connection between the support part 5 and the adjusted part; after the second working position 300 is adjusted, the support part 5 transmits its movement to the first working position 200, and the first working position 200 then drives the adjusted part to change position through the adjustment part 4; by setting the adjustment part 4, the installation interface of the support part 5, which bears the lever force transmission function, and the adjusted part can be relatively independent, so that the two can be structurally designed according to their respective force and assembly requirements.

[0056] In this embodiment, the adjustment part 4 can be correspondingly disposed on the connecting plate below the worktable 3 and fixedly connected to the worktable 3. The first working position 200 of the support part 5 is fixedly connected to the adjustment part 4. Thus, the slight displacement generated by the support part 5 at the first working position 200 can be transmitted to the worktable 3 through the adjustment part 4, causing a height change in the corresponding area of ​​the worktable 3. At the same time, the adjustment part 4 can expand the connection area, so that the load from the worktable 3 can be transmitted to the support part 5 more evenly, reducing stress concentration at local connection positions. Since the actual adjustment amount is at the micrometer level, even if a rigid connection is adopted between the adjustment part 4, the support part 5 and the worktable 3, the slight displacement required for adjustment can be achieved through the elastic deformation allowed by the structure itself. Deformation within this range will not affect normal processing.

[0057] In some cases, the adjusting part 4 can be an independent connecting plate, connecting seat, connecting block, or a connecting structure with an installation interface, or it can be directly integrated with the adjusted part. When the adjusting part 4 is integrated with the worktable 3, a local connection area for connecting with the first working position 200 can be directly formed on the worktable 3, thereby reducing independent parts and connection interfaces. The adjusting part 4 and the support part 5 can be fixed by bolts, a combination of positioning pins and bolts, or other rigid connection forms. For occasions where it is necessary to reduce assembly errors, a positioning surface or mating structure can also be set to ensure the stability of the positional relationship between the first working position 200 and the adjusted part.

[0058] This application also provides a wafer grinding apparatus, including a worktable 3, a fixed support 2, and an adjustment support mechanism of any one of the above. The fixed support 2 and the adjusting support mechanism support different positions of the worktable 3 respectively. The support part 5 of the adjusting support mechanism is connected to the worktable 3 at the first working position 200 so as to adjust the tilt angle of the worktable 3 by changing the position of the first working position 200.

[0059] The wafer grinding equipment includes a worktable 3, a fixed support 2, and at least one of the aforementioned adjustable support mechanisms. The fixed support 2 and the adjustable support mechanism act on different areas of the worktable 3, respectively. The support part 5 of the adjustable support mechanism is connected to the worktable 3 at a first operating position 200. The fixed support 2 is used to form a relatively stable support reference, while the adjustable support mechanism changes the height of the corresponding area of ​​the worktable 3 by changing the position of the first operating position 200, causing the worktable 3 to change angle relative to the fixed support position. At the same time, the grinding load transmitted from the worktable 3 to the adjustable support mechanism can reduce the force transmitted to the adjustable support 1 side through the lever relationship of the support part 5, thereby reducing the degree of compression deformation of the adjustable structure under the processing load and improving the support stability of the worktable 3.

[0060] In this embodiment, the worktable 3 can be used as a wafer carrier platform. During wafer processing, the wafer is fixed by a corresponding carrier structure and cooperates with the grinding component. The fixed support part 2 supports one position of the worktable 3, and the adjustable support mechanism supports other positions of the worktable 3. When it is necessary to adjust the tilt state of the worktable 3 relative to the grinding component, the second action position 300 is changed by adjusting the support part 1. The support part 5 converts the movement of the second action position 300 into a smaller position change of the first action position 200 according to the distance relationship between the support position 100, the first action position 200 and the second action position 300. The first action position 200 then drives the corresponding area of ​​the worktable 3 to perform micron-level height adjustment. When the processing load is applied to the worktable 3, the lever transmission relationship of the support part 5 can also reduce the load borne by the adjustable support part 1 and its rotating support part, thereby reducing the possibility of excessive position changes of the worktable 3 due to insufficient rigidity of the adjustment structure.

[0061] In some cases, the worktable 3 can be an air-floating worktable or other work platforms suitable for wafer carrying and grinding. The fixed support 2 can be a fixed seat, a fixed fulcrum, or other support structure that can establish a stable height reference. The adjustable support mechanism can be arranged in the peripheral area of ​​the worktable 3 or other appropriate positions according to the size, mass, and grinding load of the worktable 3. For wafers of different sizes and hardness, the distance ratio between the support position 100 and the first action position 200 and the second action position 300 can be adjusted to make the adjustable support mechanism have the force transmission characteristics and displacement ratio that match the corresponding processing load, thereby taking into account both the support rigidity and tilt angle adjustment accuracy of the worktable 3.

[0062] In some embodiments, two adjustment support mechanisms are provided, with the fixed support 2 and the two adjustment support mechanisms arranged at intervals along the circumference of the worktable 3, and together forming a three-point support for the worktable 3.

[0063] The workbench 3 can be supported by a fixed support 2 and two adjustable support mechanisms to form a three-point support, with the fixed support 2 and the two adjustable support mechanisms arranged at intervals along the circumference of the workbench 3. The three mutually separated support positions can determine the support plane of the workbench 3, with the fixed support 2 forming a basic height reference, and the two adjustable support mechanisms changing the height of the other two positions of the workbench 3 respectively. By adjusting the two adjustable support mechanisms respectively, the spatial orientation of the plane determined by the three support points can be changed, thereby realizing the adjustment of the tilt angle of the workbench 3 and avoiding the complexity of support constraints caused by using too many rigid support points.

[0064] In this embodiment, the fixed support 2 is located at a position around the worktable 3, and two sets of adjustable support mechanisms are respectively located at positions spaced apart from the fixed support 2, so that the three support positions form a distributed support around the worktable 3. When any one of the adjustable support mechanisms is activated, its first action position 200 causes a slight height change in the corresponding support area of ​​the worktable 3, so that the worktable 3 forms a corresponding tilt angle change around the other support areas. When the two sets of adjustable support mechanisms work together, the overall tilt state of the worktable 3 can be changed by different adjustment amounts to meet the angle requirements of the worktable 3 relative to the grinding component. By adopting a support form with one fixed point and two adjustable points, two adjustable degrees of freedom can be provided while maintaining a clear reference, thereby realizing effective adjustment of the spatial posture of the worktable 3.

[0065] In some cases, the fixed support 2 and the two adjusting support mechanisms can adopt approximately uniform or non-uniform circumferential intervals according to the contour and force distribution of the worktable 3, as long as the three support positions are not located on the same straight line and can form a stable support plane; the two adjusting support mechanisms can adopt the same structure and adjustment range for easy control and maintenance, or different lever arm ratios or drive specifications can be adopted according to the load distribution of different support areas; the two adjusting support mechanisms can also be zero-position calibrated separately during installation or maintenance, so that the fixed support 2 serves as a common reference, thereby facilitating the establishment of the initial posture of the worktable 3 and the adjustment of the tilt angle during subsequent processing.

[0066] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0067] The adjustment support mechanism and wafer grinding equipment provided in this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. An adjustable support mechanism, characterized in that, It includes an adjustment support (1), a support (5), and a load-bearing part (6); The support part (5) has a support position (100), a first working position (200), and a second working position (300). The support position (100) is located at the connection between the support part (5) and the bearing part (6). The first working position (200) is located at the connection between the support part (5) and the adjustable member. The second working position (300) is the position where the adjusting support part (1) applies an adjusting action to the support part (5). The first action position (200) and the second action position (300) are located on the same side of the support position (100), and the distance between the first action position (200) and the support position (100) is less than the distance between the second action position (300) and the support position (100); The adjustment support (1) is disposed on the bearing part (6) and acts on the second working position (300) so as to drive the first working position (200) to generate an adjustment displacement through the support (5).

2. The adjusting support mechanism according to claim 1, characterized in that, The adjustment support (1) includes a linear drive member, the output end of which is connected to the support (5) at the second working position (300) to drive the second working position (300) to move along the adjustment direction.

3. The adjusting support mechanism according to claim 1, characterized in that, The adjusting support (1) includes a rotary drive and a transmission assembly. The rotary drive is connected to the transmission assembly, and the transmission assembly is used to convert the rotational motion output by the rotary drive into linear motion that drives the second working position (300) to move.

4. The adjusting support mechanism according to claim 3, characterized in that, The transmission assembly includes an adjusting screw (13) and a screw nut (15). The adjusting screw (13) is rotatably supported on the bearing part (6). The screw nut (15) is threadedly engaged with the adjusting screw (13) and is connected to the second working position (300) of the support part (5).

5. The adjusting support mechanism according to claim 4, characterized in that, The adjusting screw (13) is a ball screw, and the screw nut (15) is a ball screw nut that cooperates with the ball screw.

6. The adjusting support mechanism according to claim 5, characterized in that, The rotary drive component includes a drive motor (11), and the adjustment support part (1) also includes a coupling (12). The output end of the drive motor (11) is connected to the adjustment screw (13) through the coupling (12).

7. The adjusting support mechanism according to claim 4, characterized in that, The adjustment support (1) also includes a support base (14) and a nut fixing base (16). The support base (14) is disposed on the bearing part (6), and the adjusting screw (13) is rotatably disposed on the support base (14). The lead screw nut (15) is connected to the second working position (300) of the support part (5) through the nut fixing seat (16).

8. The adjusting support mechanism according to claim 1, characterized in that, It also includes an adjustment part (4), which is disposed at the first working position (200) of the support part (5) and is used to connect with the adjustable member.

9. A wafer grinding apparatus, characterized in that, It includes a worktable (3), a fixed support (2), and an adjustable support mechanism as described in any one of claims 1 to 8; The fixed support (2) and the adjusting support mechanism support the worktable (3) at different positions respectively. The support part (5) of the adjusting support mechanism is connected to the worktable (3) at the first working position (200) so as to adjust the tilt angle of the worktable (3) by changing the position of the first working position (200).

10. The wafer grinding equipment according to claim 9, characterized in that, Two adjustment support mechanisms are provided. The fixed support part (2) and the two adjustment support mechanisms are arranged at intervals along the circumference of the worktable (3) and together form a three-point support for the worktable (3).

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