An adjustable semiconductor diffusion furnace furnace lifting vehicle

Abstract

This invention discloses an adjustable semiconductor diffusion furnace lining lifting vehicle, specifically relating to the field of diffusion furnace lining maintenance technology. It includes a lifting assembly, an adjusting assembly inside the lifting assembly, a driving assembly at the end of the lifting assembly, a fixing assembly on the upper part of the lifting assembly, a swinging assembly on the end face of the adjusting assembly, several sets of central assemblies at the end of the adjusting assembly, and a pipe assembly at the end of the adjusting assembly. This adjustable semiconductor diffusion furnace lining lifting vehicle, through the coordinated operation of the lifting assembly, adjusting assembly, driving assembly, fixing assembly, and swinging assembly, achieves efficient and safe maintenance of the diffusion furnace lining. Firstly, the electric lifting rod in the lifting assembly can flexibly adjust the worktable height, and with the universal wheels, it facilitates movement, meeting the operational needs of different operators and reducing labor intensity.

Description

Technical Field

[0001] This invention relates to the field of diffusion furnace maintenance technology, and in particular to an adjustable semiconductor diffusion furnace lifting vehicle. Background Technology

[0002] In semiconductor manufacturing, the diffusion furnace is one of the core process equipment. Its furnace chamber is constantly exposed to high temperatures and oxidizing or diffusion atmospheres, making it prone to accumulating process residues such as quartz particles, oxide dust, and unreacted chemicals. Additionally, condensation can occur inside the furnace chamber due to water vapor condensation during process gas cooling or furnace cooling. If these impurities and condensate are not cleaned promptly, they will affect the temperature uniformity and process stability within the furnace chamber, and may even cause short circuits in heating elements or damage to quartz devices. Therefore, cleaning the internal impurities and condensate is an important and necessary step during furnace maintenance or routine upkeep.

[0003] Existing devices still have shortcomings in use. Common furnace maintenance auxiliary devices are mostly fixed support frames or simple lifting vehicles, whose main functions are limited to supporting the furnace, adjusting the height, or moving horizontally. In actual maintenance operations, workers usually need to manually turn the furnace over or knock on its outer wall to make the internal debris and condensate drain out. This method is not only cumbersome and inefficient, but also easy to cause secondary damage to the furnace structure. Therefore, we propose an adjustable semiconductor diffusion furnace lifting vehicle to solve the above problems. Summary of the Invention

[0004] The main objective of this invention is to provide an adjustable semiconductor diffusion furnace lifting vehicle, which can effectively solve the problems mentioned above.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: An adjustable semiconductor diffusion furnace lifting trolley includes a lifting assembly, an adjustment assembly inside the lifting assembly, a drive assembly at the end of the lifting assembly, a fixing assembly on the upper part of the lifting assembly, a swing assembly on the end face of the adjustment assembly, several sets of central assemblies at the end of the adjustment assembly, and a pipe assembly at the end of the adjustment assembly. The adjustment assembly includes an electric push rod, which is disposed at the lower part of the lifting assembly. A bracket is disposed at the lower part of the lifting assembly and is connected to the electric push rod to support the electric push rod. A connecting plate is disposed at the output end of the electric push rod. Two sliding plates are disposed at the end of the connecting plate. Two circular grooves are opened inside each of the two sliding plates, and extension rods slide inside each of the four circular grooves. Sliding blocks are disposed at the lower part of each of the four extension rods. The swing assembly includes a second mounting frame, which is disposed at the end of the adjustment assembly. A second drive motor is disposed on the upper part of the second mounting frame. A worm gear is disposed at the output end of the second drive motor via a coupling. A worm wheel meshes with the surface of the worm gear. Three pulleys are disposed at the end of the adjustment assembly. The pulley located in the middle is connected to the worm wheel via a connecting shaft. A mating post is disposed on a part of the pulley located in the middle near the center. A belt is wound around the surface of all three pulleys. Preferably, each of the two pulleys located on both sides is provided with a cam at a portion away from the center, each of the two cams is provided with a mating rod, each of the two mating rods is provided with a sliding groove, and each of the two sliding grooves is provided with a sliding frame, each of the two sliding frames is provided with a ball at a portion away from each other, and each of the two sliding frames is provided with a push plate at a portion close to the adjustment component. Preferably, the two push plates extend from the left to the right of the sliding plate located on the left, and both cams are provided with U-shaped grooves, and the two sliders slide in the two U-shaped grooves respectively.

[0006] Preferably, the lifting assembly includes a base plate, with electric lifting rods provided at the four upper corners of the base plate and casters provided at the four lower corners of the base plate. A worktable is provided on the upper part of the four electric lifting rods. Two T-shaped sliding grooves are provided on the upper part of the worktable, and a through groove extending from the upper part to the lower part is provided in the middle of the worktable.

[0007] Preferably, the drive assembly includes a mounting frame 1, which is disposed on the right side of the workbench. A drive motor 1 is disposed on the upper part of the mounting frame 1. A threaded screw is disposed at the output end of the drive motor 1 via a coupling. The threaded screw and the guide rod are respectively disposed in the two T-shaped sliding grooves. The threaded screw and the guide rod are designed to face each other. Four sliding blocks are threadedly connected to the surfaces of the threaded screw and the guide rod and move accordingly.

[0008] Preferably, the fixing component includes a housing, which is placed on the upper part of the worktable. The housing is connected together by a hinge and is divided into upper and lower layers. Airbags are provided on both sides of the inner surface of the housing near the end face. The upper and lower layers of the housing are provided with grooves, and two grooves together form an insertion port. Connecting posts are provided on the right side of the upper and lower layers of the housing, and two connecting posts together form a complete cylinder. Several springs are provided inside the upper and lower layers of the housing. A contact plate is provided on a part of each spring near the center of the housing. The sliding plate on the right side is provided with a circular hole, and the diameter of the circular hole matches the diameter of the cylinder formed.

[0009] Preferably, the plurality of central components include a plurality of springs, the plurality of springs being respectively disposed on a portion of the two sliding plates that are close to each other, the plurality of springs being divided into two groups, with the group located on the same side being one group, the portion of the two groups of springs close to the outer shell being provided with a contact plate, the portion of the two groups of contact plates away from the outer shell being provided with a sliding rod, and the sliding plate located on the right side having two central components disposed at the central axis position.

[0010] Preferably, the right side of the sliding plate located on the right side is provided with a mounting bracket three, the upper part of the mounting bracket three is provided with a fixed shell, the fixed shell is provided with a rotating shell, and the rotating shell has four holes that extend from the left side to the right side. Each of the four holes contains a connecting pipe, and the diameter of the four holes matches the diameter of the four connecting pipes.

[0011] This invention provides an adjustable semiconductor diffusion furnace lining lifting vehicle. It offers the following advantages: through the coordinated operation of the lifting assembly, adjusting assembly, driving assembly, fixing assembly, and swing assembly, efficient and safe maintenance of the diffusion furnace lining is achieved. Firstly, the electric lifting rod in the lifting assembly allows for flexible adjustment of the worktable height, and the casters facilitate movement, meeting the operational needs of different operators and reducing labor intensity. Secondly, the fixing assembly, employing a layered shell, airbag cushion, spring, and contact plate, stably encloses and fixes the furnace lining, preventing displacement or damage during tilting or shaking. Simultaneously, the inflatable airbag cushion can adapt to furnace linings of different diameters, offering strong versatility. The oscillating assembly, through a drive motor, worm gear, pulley, and cam structure, drives the furnace to reciprocate at a small angle, simultaneously causing the pusher plate to reciprocate horizontally. This creates multiple compound oscillations, effectively promoting the rapid discharge of accumulated quartz particles, oxide dust, condensate, and other impurities from inside the furnace. No manual knocking or turning is required, avoiding secondary damage and significantly improving cleaning efficiency and process stability. Furthermore, the spring and contact plate in the central assembly can adjust the outer shell position in real time, ensuring the furnace remains centered and providing stable pusher plate operation. The rotating shell in the pipe assembly rotates with the furnace, keeping the connecting pipes straight and taut, preventing entanglement or breakage and enhancing system reliability. The threaded screw and guide rod in the drive assembly precisely control the opening and closing of the sliding plate, enabling rapid locking and unlocking of the fixed components.

[0012] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0013] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a complete disclosure of the full scope or all features of the disclosed technology. Attached Figure Description Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall structure of the present invention from another perspective; Figure 3 This is a schematic diagram of the overall structure of the swing assembly of the present invention; Figure 4 This is a schematic diagram of the overall structure of the fixing component of the present invention; Figure 5 This is a cross-sectional schematic diagram of the fixing component of the present invention; Figure 6 This is a schematic diagram of the overall structure of the central component of the present invention; Figure 7 This is a schematic diagram of the overall structure of the pipe assembly of the present invention; Figure 8 This is a schematic diagram of the overall structure of the adjustment component of the present invention; Figure 9 For the present invention Figure 3 Enlarged view of point A in the middle; Figure 10 For the present invention Figure 5 Enlarged diagram of point B in the middle.

[0014] In the diagram: 1. Lifting assembly; 2. Adjustment assembly; 3. Drive assembly; 4. Fixing assembly; 5. Swing assembly; 6. Center assembly; 7. Pipe assembly; 11. Base plate; 12. Electric lifting rod; 13. Casters; 21. Electric push rod; 22. Connecting plate; 23. Sliding plate; 24. Sliding block; 25. Extension rod; 31. Mounting bracket one; 32. Drive motor one; 33. Threaded screw; 34. Guide rod; 41. Housing; 42. Airbag cushion; 43. Insert 44. Connecting post; 45. Spring 1; 46. Contact plate 1; 51. Mounting bracket 2; 52. Drive motor 2; 53. Worm; 54. Worm wheel; 55. Matching post; 56. Pulley; 561. Cam; 562. Matching rod; 563. Sliding frame; 564. Sliding ball; 565. Push plate; 57. Belt; 61. Spring 2; 62. Sliding rod; 63. Contact plate 2; 71. Mounting bracket 3; 72. Fixed shell; 73. Rotating shell; 74. Connecting pipe. Detailed Implementation

[0015] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0016] Example 1, as Figure 1 - Figure 10As shown, an adjustable semiconductor diffusion furnace lifting vehicle includes a lifting assembly 1, an adjusting assembly 2 inside the lifting assembly 1, a driving assembly 3 at the end of the lifting assembly 1, a fixing assembly 4 on the upper part of the lifting assembly 1, a swinging assembly 5 on the end face of the adjusting assembly 2, several sets of central assemblies 6 at the end of the adjusting assembly 2, and a pipe assembly 7 at the end of the adjusting assembly 2. The adjustment component 2 includes an electric push rod 21, which is located at the lower part of the lifting component 1. A bracket is provided at the lower part of the lifting component 1, and the bracket is connected to the electric push rod 21 to support the electric push rod 21. A connecting plate 22 is provided at the output end of the electric push rod 21. Two sliding plates 23 are provided at the end of the connecting plate 22. Two circular grooves are opened inside each of the two sliding plates 23, and extension rods 25 slide inside each of the four circular grooves. Sliding blocks 24 are provided at the lower part of each of the four extension rods 25. The swing assembly 5 includes a second mounting bracket 51, which is located at the end of the adjustment assembly 2. A second drive motor 52 is located on the upper part of the second mounting bracket 51. A worm gear 53 is located at the output end of the second drive motor 52 through a coupling. A worm wheel 54 meshes with the surface of the worm gear 53. Three pulleys 56 are located at the end of the adjustment assembly 2. The pulley 56 located in the middle is connected to the worm wheel 54 through a connecting shaft. A mating post 55 is located near the center of the pulley 56. A belt 57 is wound around the surface of all three pulleys 56. Specifically, in order to turn and shake the furnace, such as Figure 3 and Figure 9 As shown, in this scheme, the two pulleys 56 on both sides are provided with cams 561 at the part away from the center. The two cams 561 are provided with mating rods 562 inside. The two mating rods 562 are provided with sliding grooves inside. Sliding brackets 563 slide in the two sliding grooves. The two sliding brackets 563 are provided with ball bearings 564 at the part away from each other. The two sliding brackets 563 are provided with push plates 565 at the part close to the adjustment component 2. For further details, please refer to [link / reference]. Figure 3 and Figure 9 Two push plates 565 pass through the left and right sides of the sliding plate 23 located on the left. Both cams 561 are provided with U-shaped grooves, and the two sliders 564 slide in the two U-shaped grooves respectively.

[0017] For further details, please refer to [link / reference]. Figure 2 As shown, in this solution, the lifting assembly 1 includes a base plate 11, with electric lifting rods 12 installed at the four corners of the upper part of the base plate 11, and casters 13 installed at the four corners of the lower part of the base plate 11. A worktable is installed on the upper part of the four electric lifting rods 12, with two T-shaped sliding grooves on the upper part of the worktable and a through groove running from the upper part to the lower part in the middle of the worktable.

[0018] For further details, please refer to [link / reference]. Figure 8The drive assembly 3 includes a mounting bracket 31, which is located on the right side of the worktable. A drive motor 32 is mounted on the upper part of the mounting bracket 31. A threaded screw 33 is mounted on the output end of the drive motor 32 via a coupling. The threaded screw 33 and the guide rod 34 are respectively mounted in two T-shaped slides, and the threaded screw 33 and the guide rod 34 are designed to face each other. Four sliding blocks 24 are threadedly connected to the surfaces of the threaded screw 33 and the guide rod 34 and move accordingly.

[0019] For further details, please refer to [link / reference]. Figure 4 , Figure 5 and Figure 10 The fixing component 4 includes a housing 41, which is placed on the upper part of the workbench. The housings 41 are connected together by hinges and are divided into upper and lower layers. Airbags 42 are provided on both sides of the inner surface of the housing 41 near the end face. The upper and lower housings 41 are provided with grooves, and the two grooves together form an insertion port 43. The right side of the upper and lower housings 41 is provided with a connecting post 44, and the two connecting posts 44 together form a complete cylinder. The inner surface of the upper and lower housings 41 is provided with several springs 45. The part of the several springs 45 near the center of the housing 41 is provided with a contact plate 46. The sliding plate 23 located on the right side is provided with a circular hole, and the diameter of the circular hole matches the diameter of the cylinder formed.

[0020] When implementing this solution, before maintenance, the operator starts the electric lifting rod 12 to raise the worktable to a suitable height for the operator. Then, the operator lifts out the diffusion furnace chamber and places it into the outer shell 41. The operator then covers the upper outer shell 41, so that the upper and lower outer shells 41 overlap. Then, the operator injects gas into the connecting pipe 74, causing the connecting pipe 74 to expand and fix the outer wall of the furnace chamber. At the same time, when the furnace chamber is placed in the outer shell 41, the accessories on the surface of the furnace chamber will press the contact plate 46, which will cause the spring 45 to contract, allowing the airbag cushion 42 to fix the furnace chamber and prevent the furnace chamber from tilting. When repairing the furnace, if maintenance needs to be carried out on the other side of the furnace, the operator first starts the drive motor 32, which drives the threaded screw 33 to rotate. This causes the sliding block 24 and the extension rod 25 to slide the sliding plate 23 toward the center, allowing the connecting post 44 to enter the round hole and the mating post 55 to enter the socket 43 for matching. At this time, the outer shell 41 is restricted by the socket 43 and the round hole, achieving the effect of sealing the outer shell 41. Then the operator starts the electric push rod 21, which pushes the connecting plate 22 and the sliding plate 23 to rise. During the rise, the circular groove inside the sliding plate 23 will slide on the surface of the extension rod 25, thereby driving the outer shell 41 to rise as a whole. At this time, the operator can start the second drive motor 52, which drives the worm 53, worm wheel 54 and mating column 55 to rotate. At the same time, when the mating column 55 rotates, it can also rotate the entire fixed component 4 and the furnace. When the furnace rotates to 90°, the operator makes the second drive motor 52 reciprocate at a small angle, which causes the furnace to shake. Furthermore, when the column 55 rotates, it also drives the pulley 56 and belt 57 to rotate, thus enabling the cam 561 to rotate. When the cam 561 rotates, the groove of the cam 561 drives the ball 564 to slide in the groove of the rod 562, so that the sliding frame 563 drives the push plate 565 to slide back and forth, and the push plate 565 pushes the outer shell 41 to translate. Thus, the back-and-forth swaying process is followed by translational swaying, achieving a multi-swaying effect, so as to effectively discharge the debris and condensate in the furnace. Before repairing the furnace, operators need to remove vulnerable parts such as quartz tubes and loose heating wires from the furnace before proceeding with subsequent steps to prevent damage to the items. Meanwhile, the connecting plate 22 is divided into two sections, and the two vertical sections of the connecting plate 22 slide inside the connecting plate 22 in the parallel section.

[0021] Example 2, based on Example 1, allows the outer shell 41 to always be centered.

[0022] Specifically, in order to ensure that the outer casing 41 is always aligned, such as Figure 6 As shown, in this scheme, several sets of central components 6 include several springs 61. Several springs 61 are respectively arranged in a part close to each other on two sliding plates 23. Several springs 61 are divided into two groups, with the group located on the same side. Both groups of springs 61 are provided with contact plates 63 in the part close to the outer shell 41. Both groups of contact plates 63 are provided with sliding rods 62 in the part away from the outer shell 41. The sliding plate 23 located on the right side is provided with two sets of central components 6 at the central axis position.

[0023] For further details, please refer to [link / reference]. Figure 7 The right side of the sliding plate 23 is provided with a mounting bracket 3 71. The upper part of the mounting bracket 3 71 is provided with a fixed shell 72. The fixed shell 72 is provided with a rotating shell 73. The rotating shell 73 has four holes that run from the left to the right. Each of the four holes contains a connecting pipe 74, and the diameter of the four holes matches the diameter of the four connecting pipes 74.

[0024] When this solution is implemented, while the push plate 565 pushes the outer shell 41, the second spring 61 will stretch and contract according to the distance of the outer shell 41, so that the second contact plate 63 always contacts the surface of the outer shell 41. This allows the second contact plate 63 to push the outer shell 41 back to the center when the outer shell 41 changes position, so that the outer shell 41 is always in the center, and the subsequent push of the push plate 565 can stably push the outer shell 41. When the outer shell 41 is flipped, the connecting tube 74 will be pulled to the rotating shell 73 to rotate, allowing the connecting tube 74 to move according to the angle of the outer shell 41, thus preventing the connecting tube 74 from getting tangled. After the outer shell 41 is flipped 180°, the lower connecting tube 74 will appear on the upper part, and the upper connecting tube 74 will appear on the lower part. At the same time, when the position of the connecting tube 74 changes, the length of the connecting tube 74 will also change. For example, when the lower connecting tube 74 is flipped to the upper part, the lower connecting tube 74 will shorten, and when the upper connecting tube 74 is flipped to the lower part, the connecting tube 74 will lengthen, keeping the connecting tube 74 in a straight and taut state at all times, thus preventing the connecting tube 74 from getting tangled. Operators can add a collection structure above the workbench to remove debris from the furnace after it is turned and shaken. Furthermore, after the furnace chamber is rotated 180°, the outer shell 41 has no distinction between front and back, and the outer shell 41 can be used to place and fix the furnace chamber.

[0025] In summary, the implementation process of this invention is as follows: The operator first moves the lifting vehicle to the working position using the casters 13, and then starts the electric lifting rod 12 to adjust the worktable to a suitable height. The diffusion furnace chamber is then lifted out and placed into the outer shell 41. The upper and lower outer shells are closed, and air is injected into the airbag 42 through the connecting pipe 74, causing the airbag to expand and fix the outer wall of the furnace chamber. At the same time, the furnace accessories press the contact plate 46, and the spring 45 contracts to achieve stable fixation.

[0026] When the furnace chamber needs to be tilted, start the drive motor 32 to rotate the threaded screw 33, which in turn drives the sliding block 24 and the extension rod 25 to bring the two sliding plates 23 closer together. The connecting column 44 is inserted into the round hole, and the mating column 55 is inserted into the socket 43 to complete the sealing and locking of the outer shell 41. Then, start the electric push rod 21 to push the connecting plate 22 and the sliding plate 23 up, so that the outer shell 41 is removed from the worktable.

[0027] The second drive motor 52 is started, which drives the mating column 55 to rotate via the worm gear 53 and worm wheel 54, causing the fixed assembly 4 and the furnace chamber to rotate as a whole. When the rotation reaches 90°, the second drive motor 52 rotates back and forth at a small angle, causing the furnace chamber to shake. At the same time, the pulley 56 and belt 57 drive the cam 561 to rotate. The cam 561 drives the push plate 565 to move back and forth via the slider 564 and sliding frame 563. The push plate 565 pushes the outer shell 41 to translate, realizing the translational vibration of the furnace chamber during shaking, which promotes the discharge of internal debris and condensate.

[0028] Throughout the process, spring 61 and contact plate 63 of the central component 6 ensure that the outer casing 41 remains centered. The rotating shell 73 of the pipe assembly 7 rotates as the outer casing flips, preventing the connecting pipe 74 from becoming entangled. After maintenance is completed, reverse the operation of each component to remove the furnace chamber.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. An adjustable semiconductor diffusion furnace lifting trolley, comprising a lifting assembly (1), characterized in that: The lifting component (1) is provided with an adjustment component (2) inside, a drive component (3) is provided at the end of the lifting component (1), a fixing component (4) is placed on the upper part of the lifting component (1), a swing component (5) is provided on the end face of the adjustment component (2), a number of central components (6) are provided at the end of the adjustment component (2), and a pipe component (7) is provided at the end of the adjustment component (2). The adjustment component (2) includes an electric push rod (21), which is located at the lower part of the lifting component (1). The lower part of the lifting component (1) is provided with a bracket, which is connected to the electric push rod (21) to support the electric push rod (21). The output end of the electric push rod (21) is provided with a connecting plate (22), and the end of the connecting plate (22) is provided with two sliding plates (23). Each of the two sliding plates (23) has two circular grooves, and each of the four circular grooves has an extension rod (25) sliding inside. Each of the four extension rods (25) has a sliding block (24) at the lower part. The swing assembly (5) includes a second mounting bracket (51), which is located at the end of the adjustment assembly (2). A second drive motor (52) is located on the upper part of the second mounting bracket (51). A worm gear (53) is located at the output end of the second drive motor (52) via a coupling. A worm wheel (54) meshes with the surface of the worm gear (53). Three pulleys (56) are located at the end of the adjustment assembly (2). The pulley (56) located in the middle is connected to the worm wheel (54) via a connecting shaft. A mating post (55) is located near the center of the pulley (56). A belt (57) is wound around the surface of all three pulleys (56).

2. The adjustable semiconductor diffusion furnace lifting trolley according to claim 1, characterized in that: The two pulleys (56) located on both sides are provided with cams (561) on the part away from the center. The two cams (561) are provided with mating rods (562) inside. The two mating rods (562) are provided with sliding grooves inside. Sliding brackets (563) slide in the two sliding grooves. The two sliding brackets (563) are provided with ball bearings (564) on the part away from each other. The two sliding brackets (563) are provided with push plates (565) on the part close to the adjustment component (2).

3. The adjustable semiconductor diffusion furnace lifting trolley according to claim 2, characterized in that: The two push plates (565) pass through the left and right sides of the sliding plate (23) located on the left side. Both cams (561) are provided with U-shaped grooves, and the two sliders (564) slide in the two U-shaped grooves respectively.

4. The adjustable semiconductor diffusion furnace lifting trolley according to claim 1, characterized in that: The lifting assembly (1) includes a base plate (11), with electric lifting rods (12) provided at the four upper corners of the base plate (11) and casters (13) provided at the four lower corners of the base plate (11). A worktable is provided on the upper part of the four electric lifting rods (12), with two T-shaped grooves on the upper part of the worktable and a through groove running from the upper part to the lower part in the middle of the worktable.

5. The adjustable semiconductor diffusion furnace lifting trolley according to claim 4, characterized in that: The drive assembly (3) includes a mounting bracket (31), which is located on the right side of the workbench. A drive motor (32) is located on the upper part of the mounting bracket (31). A threaded screw (33) is provided at the output end of the drive motor (32) through a coupling. The threaded screw (33) and a guide rod (34) are respectively provided in the two T-shaped slides. The threaded screw (33) and the guide rod (34) are designed opposite to each other. Four sliding blocks (24) are threadedly connected to the surfaces of the threaded screw (33) and the guide rod (34) and move accordingly.

6. The adjustable semiconductor diffusion furnace lifting trolley according to claim 4, characterized in that: The fixing component (4) includes a housing (41), which is placed on the upper part of the workbench. The housing (41) is connected together by a hinge and is divided into upper and lower layers. Airbags (42) are provided on both sides of the inner surface of the housing (41) near the end face. The upper and lower layers of the housing (41) are provided with grooves, and the two grooves together form an insertion port (43). The right side of the upper and lower layers of the housing (41) is provided with a connecting post (44), and the two connecting posts (44) together form a complete cylinder. The inner surface of the upper and lower layers of the housing (41) is provided with a number of springs (45). A contact plate (46) is provided on a part of the springs (45) near the center of the housing (41). The sliding plate (23) on the right side is provided with a circular hole, and the diameter of the circular hole matches the diameter of the cylinder.

7. The adjustable semiconductor diffusion furnace lifting trolley according to claim 6, characterized in that: The central components (6) of the plurality of groups include springs (61), and the springs (61) are respectively disposed on the part of the two sliding plates (23) close to each other. The springs (61) are divided into two groups, with the group located on the same side. The part of the two groups of springs (61) close to the outer shell (41) is provided with contact plate (63), and the part of the two groups of contact plate (63) away from the outer shell (41) is provided with sliding rod (62). The sliding plate (23) on the right side is provided with two central components (6) at the central axis position.

8. The adjustable semiconductor diffusion furnace lifting trolley according to claim 1, characterized in that: The sliding plate (23) located on the right side is provided with a mounting bracket three (71). The mounting bracket three (71) is provided with a fixed shell (72) on the upper part. The fixed shell (72) is provided with a rotating shell (73) inside. The rotating shell (73) has four holes that run from the left to the right. Each of the four holes contains a connecting pipe (74), and the diameter of the four holes matches the diameter of the four connecting pipes (74).

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