A light weight conforming assembly

Abstract

This application belongs to the technical field of precision bonding equipment and discloses a small-weight bonding component, including a servo motor. A force control transmission assembly is located at the lower end of the servo motor. The force control transmission assembly includes a coupling fixedly connected to the bottom output shaft of the servo motor. A buffer spring is coaxially arranged below the coupling. Two sets of bearings are mounted inside the buffer spring, forming a sealed vacuum cavity between the two sets of bearings. A bent joint is provided through the side wall of the sealed vacuum cavity, and sealing rings are embedded at both the upper and lower ends of the inner wall of the sealed vacuum cavity. This invention relies on a direct-connection pressure transmission structure combined with an independent dual negative pressure air path and a synthetic stone heat insulation structure to stably output small pressure, avoiding pressure detection drift and airflow crosstalk. It integrates negative pressure sealing, rotary constant temperature heating, and small pressure acquisition functions, resulting in high overall integration. The detection accuracy is stable during long-term continuous operation, and the wear of precision transmission components is lower, making it suitable for the high-precision thermal bonding processing needs of various micro and ultra-thin components.

Description

Technical Field

[0001] This application relates to the field of precision bonding equipment technology, and more specifically, to a low-weight bonding component. Background Technology

[0002] The bonding component is the core execution unit of the bonding machine, which integrates pressure sensing, constant temperature heating, and negative pressure adsorption. Its core function is to achieve precise and controllable output of minute pressure in the micron-level precision bonding process.

[0003] Existing bonding machines generally maintain a high minimum controllable pressure limit for their force control units. The force control structure relies on springs to transmit pressure signals, and spring deformation can introduce pressure detection interference. Furthermore, the lack of an efficient heat insulation barrier between the heating nozzle and the pressure sensor allows heat from the heating plate to be directly conducted to the sensor, causing zero-point drift. Traditional structures only have a single negative pressure channel, with the cavity sealing negative pressure and the workpiece adsorption negative pressure sharing the same air path. This leads to crosstalk between the two airflows, and precision components such as bearings and sensors are susceptible to corrosion from dust and high-temperature airflow. The pressure acquisition accuracy, component lifespan, and adaptability to various working conditions all have inherent shortcomings, failing to meet the long-term stable low-gram force-controlled bonding production requirements for ultra-thin and miniature workpieces. Therefore, this application proposes a low-gram weight bonding assembly to solve the aforementioned problems.

[0004] Application content

[0005] To address the aforementioned issues, this application provides a low-weight bonding component.

[0006] The low-weight bonding component provided in this application adopts the following technical solution:

[0007] A low-weight bonding component includes a servo motor. A force-controlled transmission assembly is located at the lower end of the servo motor. The force-controlled transmission assembly includes a coupling fixedly connected to the bottom output shaft of the servo motor. A buffer spring is coaxially arranged below the coupling. Two sets of bearings are mounted inside the buffer spring, forming a sealed vacuum cavity. A bent joint is provided through the side wall of the sealed vacuum cavity. Sealing rings are embedded at both the upper and lower ends of the inner wall of the sealed vacuum cavity. An electric slip ring is fixedly connected below the sealed vacuum cavity. A ball spline passes through the center of the electric slip ring. A straight head is connected to the lower side wall of the ball spline. A pressure sensor is fixedly connected to the bottom of the ball spline. A heat insulation plate is attached to the bottom of the pressure sensor. A heating plate is fixedly connected to the lower end of the heat insulation plate. A suction nozzle is fixedly installed at the bottom of the heating plate.

[0008] Furthermore, the two sets of bearings are respectively limited and fitted onto the upper outer wall of the ball spline. The two sets of bearings and the sealing ring together with the outer shell of the cavity to seal the vacuum cavity. The elbow joint is connected to the internal space of the sealed vacuum cavity and is used to connect to the negative pressure gas source.

[0009] Through the above technical solution, two sets of bearing limiting sleeves are installed on the upper outer wall of the ball spline. The bearings, together with the sealing rings and the outer shell of the cavity, enclose and seal the vacuum cavity. The elbow joint connects to the inside of the sealed vacuum cavity and connects to the negative pressure air source. The negative pressure continuously acts on the sealing mating surface, improving the tightness of the fit between the sealing rings and the outer wall of the ball spline. A stable negative pressure can be formed inside the cavity to isolate external dust, cutting chips, and high-temperature airflow from intruding into the transmission area. The wear of precision moving parts such as bearings and couplings is lower during long-term operation, and the smoothness of the transmission structure is maintained for a longer period of time.

[0010] Furthermore, the buffer spring is vertically sleeved on the outer wall of the ball spline between the coupling and the upper bearing. The upper and lower ends of the buffer spring abut against the lower end face of the coupling and the upper end face of the upper bearing, respectively, providing only vertical floating buffer and not participating in pressure transmission.

[0011] With the above technical solution, when there is a slight deviation in the workpiece thickness, the buffer spring can generate elastic deformation to absorb the downward impact. There is no spring deformation interference in the pressure transmission path, the pressure transmission link is single and direct, the pressure acquisition value fluctuation is smaller, and the force control output stability is continuously maintained.

[0012] Furthermore, the electric slip ring is coaxially fitted onto the outer wall of the middle part of the ball spline, the upper end of the electric slip ring is connected to the bottom shell of the sealed vacuum chamber, and the lower end of the electric slip ring extends downward to wrap around the middle section of the ball spline, which is used to realize the rotation power supply of the heating plate.

[0013] With the above technical solution, the power supply line of the heating plate does not twist or entangle under rotating conditions, the constant temperature output of the heating plate is not affected by the rotation, and the preset heating temperature can be stably maintained at any rotation angle.

[0014] Furthermore, the direct head extends laterally through the side wall of the ball spline, and the internal channel of the direct head is connected to the central through hole of the ball spline. The central through hole of the ball spline extends downward to the nozzle, which is used to realize the negative pressure air supply passage of the nozzle.

[0015] With the above technical solution, the air path is integrated inside the ball spline body and there is no need for an external independent air pipe. During the lifting and rotation process, the air path is not pulled or bent, and the negative pressure adsorption force output is uniform and has no attenuation.

[0016] Furthermore, the upper and lower ends of the pressure sensor are fully attached to the bottom end of the ball spline and the upper surface of the heat insulation plate, respectively. The pressure sensor is coaxially arranged on the central axis of the ball spline, the heat insulation plate, the heating plate, and the nozzle, and is used to collect the minute contact pressure of the nozzle pressing down in real time.

[0017] Through the above technical solution, the contact pressure generated by the nozzle pressing down can be completely and without loss to the pressure sensor; there is no radial offset loss when the pressure is applied, the response speed of the acquisition of small pressure signals is faster, and the completeness of the acquisition of 50g-level small pressure values ​​is higher.

[0018] Furthermore, the heat insulation plate is sandwiched between the pressure sensor and the heating plate, with its upper and lower ends respectively attached to the bottom of the pressure sensor and the top of the heating plate, to block the high temperature of the heating plate from being conducted to the pressure sensor.

[0019] Through the above technical solution, the pressure sensor is in a stable working environment with minimal temperature fluctuations for a long time. High temperatures will not cause problems such as zero-point drift or sensitivity decay of the sensor. The pressure detection accuracy can remain consistent for a long time under continuous operation of the equipment, without the need for frequent shutdowns to calibrate the sensor zero point.

[0020] Furthermore, a heat insulation plate is fixedly attached to the top of the heating plate, and a suction nozzle is detachably and fixedly installed at the bottom of the heating plate. The heating plate is electrically connected to an electric slip ring, which continuously supplies heating power.

[0021] Through the above technical solution, the constant temperature heat generated by the heating plate is stably and evenly transferred to the working surface of the suction nozzle. Various sizes of small workpieces can be matched with the corresponding suction nozzle to complete constant temperature hot pressing and bonding. There is no need to replace the entire heating assembly. The equipment can be adapted to process a wider range of workpieces, and the time spent on workpiece changeover and debugging is significantly shortened.

[0022] Furthermore, a fixing plate is fixedly connected to the outer wall of one end of the force control transmission assembly. The fixing plate uses aluminum instead of sheet metal, and the corners of the fixing plate are rounded. The heat insulation plate is made of synthetic stone.

[0023] Through the above technical solutions, the aluminum fixing plate has a stronger overall structural rigidity and a lower weight. When the components move up and down at high speed, the vibration amplitude of the whole machine is smaller. The rounded corner structure can avoid long-term friction damage to the internal wiring of the equipment, and at the same time avoid the operator being scratched by sharp edges during maintenance. The synthetic stone insulation board has an extremely low thermal conductivity coefficient, and the high temperature barrier and heat insulation effect is stable and continuous. There will be no decay of heat insulation performance under long-term high temperature conditions.

[0024] Furthermore, the elbow joint and the straight head are each provided with two independent air paths. The elbow joint supplies the sealing vacuum chamber with negative pressure, and the straight head supplies the suction nozzle with negative pressure to pick up the workpiece and adsorb it. The two negative pressure air paths are independent of each other and do not interfere with each other.

[0025] Through the above technical solution, the negative pressure of the cavity sealing and the negative pressure airflow of the workpiece adsorption will not cross-flow or interfere with each other. The two functions of dustproof sealing protection inside the cavity and workpiece negative pressure adsorption and pickup can operate simultaneously and independently and stably. The pressure parameters of the two negative pressures can be adjusted separately without limiting the adjustment range of each other, which can adapt to different sealing requirements and different workpiece adsorption forces in processing conditions.

[0026] In summary, this application includes at least one of the following beneficial technical effects:

[0027] (1) This device eliminates the structural coordination method of spring participating in pressure transmission, and only retains the buffer spring to achieve simple floating buffer. It is paired with a pressure sensor, heat insulation plate, heating plate and suction nozzle arranged in a coaxial manner to form a direct pressure transmission link. Compared with the traditional force control structure that relies on spring to transmit pressure, there is no pressure value deviation interference caused by spring deformation. At the same time, the synthetic stone heat insulation plate is sandwiched between the pressure sensor and the heating plate to block the high temperature conduction, avoiding the sensor zero point drift problem caused by the lack of efficient heat insulation structure in traditional equipment. The entire set of coordination structure can stably achieve a small pressure output of 50g±30g. The pressure transmission path is simple and there is no redundant component interference. The small pressure acquisition response speed is faster and the value fluctuation is smaller. There is no need to frequently calibrate the sensor during long-term continuous hot bonding operation. There will be no process defects such as pressure loss and bonding misalignment when bonding precision micro workpieces, and the stability of high-precision small force control processing will be continuously guaranteed.

[0028] (2) This device uses two independent negative pressure pipelines to supply air to the sealed vacuum chamber and the nozzle. The elbow provides sealing negative pressure to the chamber, and the direct head is integrated into the ball spline to form a dedicated suction air path for the nozzle. The negative pressure sealed chamber structure is formed by bearings and sealing rings. Compared with the traditional force control module with a single shared negative pressure air path, it completely eliminates the problem of crosstalk between the dustproof negative pressure of the chamber and the suction negative pressure of the workpiece. The sealed chamber relies on the negative pressure to seal the sealing ring to isolate dust and high temperature airflow from entering the internal precision transmission components, effectively reducing the wear rate of couplings and bearings. At the same time, the electric slip ring and the heating plate are electrically coordinated to achieve continuous constant temperature power supply in the rotating state. The aluminum rounded corner fixing plate is combined with the ball spline to integrate the wiring hole to optimize the circuit layout. It not only solves the defects of the external winding of the air pipe and the easy cutting of the line in the traditional equipment, but also can simultaneously complete multiple functions such as chamber protection, workpiece suction and rotation heating. The functions do not interfere with each other under multiple working conditions. The equipment is compatible with a wider range of workpiece specifications and the service life of precision components is significantly extended. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of this application;

[0030] Figure 2 This is a schematic diagram of the upper cross-sectional structure of this application;

[0031] Figure 3 This is a schematic diagram of the lower cross-sectional structure of this application.

[0032] The following are the labels in the diagram: 1. Servo motor; 2. Force control transmission assembly; 3. Coupling; 4. Buffer spring; 5. Bearing; 6. Sealed vacuum chamber; 7. Elbow joint; 8. Sealing ring; 9. Slip ring; 10. Ball spline; 11. Straight head; 12. Pressure sensor; 13. Heat insulation plate; 14. Heating plate; 15. Nozzle; 16. Fixing plate. Detailed Implementation

[0033] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0034] In the description of this application, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0035] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0036] Example:

[0037] The following is in conjunction with the appendix Figure 1 -3 provides further detailed description of this application.

[0038] This application discloses a low-weight bonding component, including a servo motor 1. A force control transmission assembly 2 is provided at the lower end of the servo motor 1. The force control transmission assembly 2 includes a coupling 3 fixedly connected to the bottom output shaft of the servo motor 1. A buffer spring 4 is coaxially provided below the coupling 3. Two sets of bearings 5 ​​are assembled inside the buffer spring 4. The two sets of bearings 5 ​​enclose a sealed vacuum cavity 6. An elbow joint 7 is provided through the side wall of the sealed vacuum cavity 6. Sealing rings 8 are embedded at both the upper and lower ends of the inner wall of the sealed vacuum cavity 6. An electric slip ring 9 is fixedly connected below the sealed vacuum cavity 6. A ball spline 10 is provided through the center of the electric slip ring 9. A direct head 11 is connected to the lower side wall of the ball spline 10. A pressure sensor 12 is fixedly connected to the bottom of the ball spline 10. A heat insulation plate 13 is attached to the bottom of the pressure sensor 12. A heating plate 14 is fixedly connected to the lower end of the heat insulation plate 13. A suction nozzle 15 is fixedly installed at the bottom of the heating plate 14.

[0039] See Figure 2 and Figure 3 Two sets of bearings 5 ​​are respectively limited and fitted on the upper outer wall of the ball spline 10. The two sets of bearings 5 ​​and the sealing ring 8 together with the outer shell of the cavity enclose and seal the vacuum cavity 6. The elbow joint 7 is connected to the internal space of the sealed vacuum cavity 6 and is used to connect to the negative pressure gas source.

[0040] See Figure 2 and Figure 3 The buffer spring 4 is vertically sleeved on the outer wall of the ball spline 10 between the coupling 3 and the upper bearing 5. The upper and lower ends of the buffer spring 4 abut against the lower end face of the coupling 3 and the upper end face of the upper bearing 5, respectively. It only provides vertical floating buffer and does not participate in pressure transmission.

[0041] See Figure 2 and Figure 3 The electric slip ring 9 is coaxially mounted on the outer wall of the middle part of the ball spline 10. The upper end of the electric slip ring 9 is connected to the bottom shell of the sealed vacuum chamber 6, and the lower end of the electric slip ring 9 extends downward to wrap around the middle section of the ball spline 10, which is used to realize the rotation power supply of the heating plate 14.

[0042] See Figure 2 and Figure 3 The direct head 11 extends laterally through the side wall of the ball spline 10. The internal channel of the direct head 11 is connected to the central through hole of the ball spline 10. The central through hole of the ball spline 10 extends downward to the suction nozzle 15 to realize the negative pressure air supply passage of the suction nozzle 15.

[0043] See Figure 2 and Figure 3 The upper and lower ends of the pressure sensor 12 are fully attached to the bottom end of the ball spline 10 and the upper end of the heat insulation plate 13, respectively. The pressure sensor 12 is coaxially arranged on the central axis of the ball spline 10, the heat insulation plate 13, the heating plate 14, and the nozzle 15, and is used to collect the small contact pressure of the nozzle 15 in real time.

[0044] See Figure 2 and Figure 3 The heat insulation plate 13 is sandwiched between the pressure sensor 12 and the heating plate 14. The upper and lower ends of the heat insulation plate 13 are respectively attached to the bottom of the pressure sensor 12 and the top of the heating plate 14 to block the high temperature of the heating plate 14 from being conducted to the pressure sensor 12.

[0045] See Figure 2 and Figure 3 The top of the heating plate 14 is fixedly attached to the heat insulation plate 13, and the bottom of the heating plate 14 is detachably fixedly installed with the suction nozzle 15. The heating plate 14 is electrically connected to the electric slip ring 9, and the electric slip ring 9 continuously supplies heating power.

[0046] See Figure 1 and Figure 3 The force control transmission assembly 2 has a fixed plate 16 fixedly connected to one end of its outer wall. The fixed plate 16 uses aluminum instead of sheet metal and the corners of the fixed plate 16 are rounded. The heat insulation plate 13 is made of synthetic stone.

[0047] See Figure 2 and Figure 3 The elbow joint 7 and the straight head 11 are each provided with two independent air paths. The elbow joint 7 supplies the sealing vacuum chamber 6 with sealing negative pressure, and the straight head 11 supplies the suction nozzle 15 with suction negative pressure to pick up the workpiece. The two negative pressure air paths are independent of each other and do not interfere with each other.

[0048] The implementation principle of a low-weight bonding component in this application embodiment is as follows:

[0049] In the initial stage of the device operation, the servo motor 1 first outputs power to drive the coupling 3 to synchronously transmit the ball spline 10 along the vertical axis to complete the lifting and feeding. This drives the pressure sensor 12, heat insulation plate 13, heating plate 14 and suction nozzle 15 mounted at the bottom of the ball spline 10 to move down synchronously as a whole, providing a linear feeding action basis for the workpiece to adhere and apply pressure. At the same time, the direct head 11 connects to the external negative pressure air source to drive the ball spline 10 through the central through hole to the suction nozzle 15, continuously outputting negative pressure to adsorb the workpiece. With the elbow 7 connected to the independent negative pressure linkage sealed vacuum chamber 6, a closed negative pressure space is formed inside, which forms a dustproof seal to protect the precision transmission components such as bearings 5 ​​and coupling 3 inside the chamber, realizing the simultaneous adsorption and material handling and chamber sealing.

[0050] During the feed pressure buffering stage, a vertical floating buffer structure is formed by the buffer spring 4 and the ball spline 10 connected between the coupling 3 and the upper bearing 5. The upper and lower ends of the buffer spring 4 abut against the lower end face of the coupling 3 and the upper end face of the upper bearing 5, respectively. When the suction nozzle 15 presses down and contacts the workpiece, generating an instantaneous impact, the elastic deformation of the buffer spring 4 absorbs the impact load. It only undertakes the buffering function and does not participate in pressure transmission throughout the process, avoiding pressure detection distortion caused by rigid direct pressure. The upper and lower sets of bearings 5 ​​are limited and fitted on the upper outer wall of the ball spline 10, and the sealing ring 8 and the cavity shell surround and seal the vacuum cavity 6. The bearings 5 ​​form radial limit support for the lifting and rotating movements of the ball spline 10. The sealing ring 8 fits against the outer wall of the ball spline 10 to prevent external dust and heat sources from entering the cavity, ensuring the long-term stable operation of the transmission components.

[0051] In the workpiece heating and insulation operation, the electric slip ring 9 is coaxially mounted on the outer wall of the middle section of the ball spline 10 to continuously power the bottom heating plate 14 for rotation. The upper end of the electric slip ring 9 is connected to the bottom shell of the sealed vacuum chamber 6. When the ball spline 10 drives the heating plate 14 and the suction nozzle 15 to rotate synchronously, the internal conductive structure of the electric slip ring 9 continuously conducts the power supply circuit to ensure that the heating plate 14 operates at a constant temperature. The pressure sensor 12 is attached to the heat insulation plate 13 at the lower end, and the heat insulation plate 13 is attached to the heating plate 14 at the lower end to form a sandwich insulation structure. The heat insulation plate 13 is made of synthetic stone and is sandwiched between the pressure sensor 12 and the heating plate 14 to reduce the high temperature generated by the heating plate 14 from being conducted upward to the pressure sensor 12, stabilize the detection working environment of the pressure sensor 12, and avoid the detection zero point offset problem caused by high temperature.

[0052] In the micro-pressure acquisition and control stage, the contact pressure generated by the pressure sensor 12 attached to the bottom of the ball spline 10 and the suction nozzle 15 being pressed down is completely transmitted to the pressure sensor 12. The pressure sensor 12 is arranged coaxially along the center of the entire assembly, and collects the micro-contact pressure in the range of 50g±30g in real time and feeds it back to the control system. The control system adjusts the feed stroke and output torque of the servo motor 1 in reverse according to the pressure value, forming a force control closed-loop regulation. The bottom of the ball spline 10 has an M4 thread and the side has an M3 vent hole. Multiple sets of wiring holes are reserved on the side wall. Heating rods, thermocouples and air tubes are synchronously passed through the wiring holes. The linkage of each pipeline is synchronized with the ball spline 10 to rise, fall and rotate synchronously, avoiding the pipeline from getting tangled and interfering with the movement.

[0053] In the overall assembly and protection process, the entire set of components is linked by the fixed plate 16 fixedly connected to the outer wall of the force control transmission assembly 2 to complete the installation and fixation of the equipment frame. The fixed plate 16 uses aluminum parts instead of sheet metal and the edges and corners are rounded. When the components reciprocate, lift, and rotate, the hidden dangers of sharp edges of sheet metal cutting lines and scratching operators are eliminated. The elbow joint 7 corresponds to the sealed air passage of the sealed vacuum chamber 6, and the straight head 11 corresponds to the workpiece adsorption air passage of the suction nozzle 15. The two pipelines are laid out independently. The elbow joint 7 and the straight head 11 are respectively connected to the two negative pressure air sources to link the sealed vacuum chamber 6 and the suction nozzle 15 to complete the negative pressure operation. The negative pressure of the chamber sealing and the negative pressure of workpiece adsorption will not cause airflow interference, and the sealing protection effect inside the chamber and the stable adsorption and pickup effect of the workpiece are guaranteed simultaneously.

[0054] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A light weight conforming assembly, characterized by, include: A servo motor (1) is provided at the lower end of the servo motor (1), and the force control transmission assembly (2) includes a coupling (3) fixedly connected to the bottom output shaft of the servo motor (1). A buffer spring (4) is coaxially provided below the coupling (3). Two sets of bearings (5) are assembled inside the buffer spring (4). The two sets of bearings (5) enclose a sealed vacuum cavity (6). A bent joint (7) is provided through the side wall of the sealed vacuum cavity (6). The upper and lower sides of the inner wall of the sealed vacuum cavity (6) are connected. Each end is fitted with a sealing ring (8). An electric slip ring (9) is fixedly connected to the bottom of the sealed vacuum cavity (6). A ball spline (10) is passed through the center of the electric slip ring (9). A direct head (11) is connected to the lower side wall of the ball spline (10). A pressure sensor (12) is fixedly connected to the bottom of the ball spline (10). A heat insulation plate (13) is attached to the bottom of the pressure sensor (12). A heating plate (14) is fixedly connected to the lower end of the heat insulation plate (13). A suction nozzle (15) is fixedly installed at the bottom of the heating plate (14).

2. The low-weight bonding component according to claim 1, characterized in that: The two sets of bearings (5) are respectively limited and fitted on the upper outer wall of the ball spline (10). The two sets of bearings (5) and the sealing ring (8) together with the outer shell of the cavity enclose and seal the vacuum cavity (6). The elbow joint (7) is connected to the internal space of the sealed vacuum cavity (6) and is used to connect to the negative pressure gas source.

3. The low-weight bonding component according to claim 1, characterized in that: The buffer spring (4) is vertically sleeved on the outer wall of the ball spline (10) between the coupling (3) and the upper bearing (5). The upper and lower ends of the buffer spring (4) abut against the lower end face of the coupling (3) and the upper end face of the bearing (5) respectively, providing only vertical floating buffer and not participating in pressure transmission.

4. A low-weight bonding component according to claim 1, characterized in that: The electric slip ring (9) is coaxially fitted on the outer wall of the middle part of the ball spline (10). The upper end of the electric slip ring (9) is connected to the bottom shell of the sealed vacuum cavity (6). The lower end of the electric slip ring (9) extends downward to wrap around the middle section of the ball spline (10) to realize the rotation power supply of the heating plate (14).

5. A low-weight bonding component according to claim 1, characterized in that: The direct head (11) extends laterally through the side wall of the ball spline (10). The internal channel of the direct head (11) is connected to the central through hole of the ball spline (10). The central through hole of the ball spline (10) extends downward to the nozzle (15) to realize the negative pressure air supply passage of the nozzle (15).

6. A low-weight bonding component according to claim 1, characterized in that: The pressure sensor (12) is fully attached to the bottom end of the ball spline (10) and the upper end of the heat insulation plate (13) at its upper and lower ends respectively. The pressure sensor (12) is coaxially arranged on the central axis of the ball spline (10), the heat insulation plate (13), the heating plate (14), and the nozzle (15) to collect the small contact pressure of the nozzle (15) in real time.

7. A low-weight bonding component according to claim 1, characterized in that: The heat insulation plate (13) is sandwiched between the pressure sensor (12) and the heating plate (14). The upper and lower ends of the heat insulation plate (13) are respectively attached to the bottom of the pressure sensor (12) and the top of the heating plate (14) to block the high temperature of the heating plate (14) from being conducted to the pressure sensor (12).

8. A low-weight bonding component according to claim 1, characterized in that: The top of the heating plate (14) is fixedly attached to the heat insulation plate (13), and the bottom of the heating plate (14) is detachably fixedly installed with the suction nozzle (15). The heating plate (14) is electrically connected to the electric slip ring (9), and the electric slip ring (9) continuously supplies heating power.

9. A low-weight bonding component according to claim 1, characterized in that: The force control transmission assembly (2) has a fixed plate (16) fixedly connected to one end of its outer wall. The fixed plate (16) is made of aluminum instead of sheet metal. The corners of the fixed plate (16) are rounded. The heat insulation plate (13) is made of synthetic stone.

10. A low-weight bonding component according to claim 1, characterized in that: The elbow joint (7) and the straight head (11) are each provided with two independent air paths. The elbow joint (7) supplies the sealed vacuum cavity (6) with sealing negative pressure, and the straight head (11) supplies the suction nozzle (15) with suction negative pressure to pick up the workpiece. The two negative pressure air paths are independent of each other and do not interfere with each other.

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