A furnace chamber air injection dust removal device

Abstract

This invention belongs to the field of single crystal furnace technology, specifically a furnace chamber gas filling and dust removal device comprising: a furnace body, a sealing component, a fixing component, a cleaning component, and an adjusting component; the sealing component includes: an annular groove formed on the inner side of the furnace body, and two sealing rings, both of which are embedded in the annular groove; a fixing component for connecting the sealing rings on both sides; and a cleaning component with multiple through grooves formed on the surface of the furnace body; that is, by setting an adjustable air pump, only two air pumps are needed to blow and suck air into the through grooves at different positions on the furnace body surface, ensuring the dust removal stability of the device while reducing the use of air pumps and lowering the production cost of the device. Furthermore, sealing the through grooves only requires two sealing rings with their air grooves and through grooves staggered, eliminating the need for a complex sealing structure, further improving the reliability of the seal during use and reducing the complexity of the sealing process.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace technology, specifically a furnace chamber gas filling and dust removal device. Background Technology

[0002] After existing single crystal furnaces are used for production, a large amount of dust and impurities often adhere to their inner side. Therefore, it is necessary to carry out dust removal treatment on the inner side of the single crystal furnace in order to remove impurities and ensure the purity during subsequent single crystal production. Chinese patent CN117721516B discloses a furnace chamber gas filling and dust removal device, including a furnace body. A support frame is provided on the side of the furnace body. A first connecting member is provided between the support frame and the furnace body. Multiple air pumps are evenly installed around the furnace body on the top surface of the support frame. The input end of the air pump is vertically upward and the output end is connected to a transition box. A conduit is connected to the top of the transition box. In this type of furnace, a corresponding air pump structure is set up to blow away the dust inside the furnace body, causing it to fall off. Then, the air pump structure draws air outward to expel the dust from the inside of the furnace body, completing the dust removal operation of the furnace body. However, in use, the air pump structure is fixed and complex. Therefore, in order to ensure comprehensive air intake or blowing to the inside of the furnace body, corresponding air pump structures need to be set in multiple locations, resulting in higher production costs. Furthermore, the fixed location of the air pump also means that its air inlet is always connected to the inside of the furnace body. In order to ensure long-term reliable sealing at the opening, an additional complex sealing mechanism is required, further increasing the complexity and manufacturing cost of the device. Therefore, to address the above problems, a furnace chamber air-filling dust removal device is proposed. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0004] The technical solution adopted by the present invention to solve its technical problem is: a furnace chamber gas filling and dust removal device according to the present invention, comprising: a furnace body, a sealing component, a fixing component, a cleaning component, and an adjusting component; The sealing assembly includes: an annular groove formed inside the furnace body, and two sealing rings, both of which are embedded inside the annular groove; A fixing component is used to connect the sealing rings on both sides; The cleaning components include multiple through slots on the furnace body surface and two air slots on the sealing ring surface. Air pumps are fixedly connected to the outer sides of both sealing rings, and the air inlets on one side of each air pump are located inside the two air slots. Adjustment assembly for driving the sealing ring.

[0005] Preferably, the fixing component includes: two threaded sleeves, which are fixedly connected to both ends of one side of the sealing ring; and two connecting bolts, which are rotatably assembled to both ends of the other side of the sealing ring. The threaded sleeves and the connecting bolts are threadedly connected.

[0006] Preferably, the adjustment assembly includes: a rotating ring rotatably mounted on the outside of the furnace body, and two sets of insert plates, the two sets of insert plates being fixedly mounted on the outside of two sealing rings respectively, the insert plates and the rotating ring being slidably connected, and the rotating ring being driven to rotate by a power source.

[0007] Preferably, the adjustment component further includes: a motor, which is fixedly installed on the outside of the furnace body, and a gear is fixedly connected to the output end of the motor. A gear ring meshes with the outside of the gear, and the gear ring is fixedly installed on the upper side of the rotating ring.

[0008] Preferably, the adjustment component further includes: a support frame disposed on the outside of the furnace body, a connecting plate fixedly connected to the upper side of the support frame, a connecting block fixedly connected to the outside of the furnace body, the connecting plate and the connecting block working together, the gear and the gear ring being rotatably assembled on the inside of the support frame, and the gear ring and the support frame being sealed together.

[0009] Preferably, a guide rod is fixedly connected to the outer side of the sealing ring, and the guide rod and the two ends of the sealing ring are slidably connected.

[0010] Preferably, an marking groove is provided on the inner side of the furnace body, and the marking groove and the through groove are used together.

[0011] Preferably, an identification plate is fixedly connected to the lower side of the rotating ring, and the identification plate and the identification groove are used in conjunction.

[0012] The advantages of this invention are: 1. The furnace chamber air-filling dust removal device of the present invention, by setting an adjustable air pump, allows only two air pumps to blow and suck air into the through grooves at different positions on the furnace body surface, ensuring the dust removal stability of the device while reducing the use of air pumps and lowering the production cost of the device. Furthermore, the sealing of the through grooves only requires two sealing rings with their air grooves and through grooves staggered, eliminating the need for complex sealing structures, further improving the reliability of the seal during device use and reducing the complexity of the device's sealing.

[0013] 2. The furnace chamber gas filling and dust removal device of the present invention, when in use, adjusts the connection between the connecting bolt and the threaded sleeve by turning the connecting bolt, thereby adjusting the distance between the sealing rings on both sides. After adjustment, the self-locking of the connection between the connecting bolt and the threaded sleeve ensures that the sealing rings on both sides remain in a relatively fixed position, making the separation between them and the ring groove more stable and improving the stability of the device in use. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the three-dimensional structure from another perspective in this invention; Figure 3 This is a schematic diagram of the furnace body in this invention; Figure 4 This is a schematic diagram of the gear ring structure in this invention; Figure 5 This is a schematic diagram of the gear ring structure from another perspective in this invention; Figure 6 This is a schematic diagram of the support frame structure in this invention; Figure 7 This is a schematic diagram of the threaded sleeve in this invention; Figure 8 This is a schematic diagram of the connecting bolt in this invention; Figure 9 This is a schematic diagram of the rotating ring in this invention.

[0016] In the diagram: 1. Furnace body; 2. Annular groove; 3. Sealing ring; 4. Through groove; 5. Gas groove; 6. Air pump; 7. Threaded sleeve; 8. Connecting bolt; 9. Rotary ring; 10. Insert plate; 11. Motor; 12. Gear; 13. Gear ring; 14. Support frame; 15. Connecting plate; 16. Connecting block; 17. Guide rod; 18. Marking groove; 19. Marking plate. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Specific implementation examples are given below.

[0019] Please see Figures 1 to 9 As shown in the figure, a furnace chamber gas filling and dust removal device according to an embodiment of the present invention includes: a furnace body 1, a sealing component, a fixing component, a cleaning component, and an adjusting component; The sealing assembly includes: an annular groove 2, which is formed inside the furnace body 1, and two sealing rings 3, both of which are embedded inside the annular groove 2; A fixing component is used to connect the two sealing rings 3; The cleaning components include multiple through grooves 4 on the surface of the furnace body 1 and two air grooves 5 on the surface of the sealing ring 3. Air pumps 6 are fixedly connected to the outer side of the two sealing rings 3, and the air ports on one side of the two air pumps 6 are located inside the two air grooves 5 respectively. An adjustment component is used to drive the sealing ring 3; Before implementing this invention, the two sealing rings 3 should be made of sealing material so that after being embedded in the inner side of the ring groove 2, one side can be pressed against the through groove 4 to complete the sealing of the furnace body 1. During sealing, the air groove 5 should be staggered from the through groove 4 to prevent them from communicating, thus making the sealing of the furnace body more stable. One of the two air pumps 6 should be set to blowing mode, and the other to suction mode. In actual use, each drive structure described in this device should be connected to a controller, either individually or jointly, to facilitate operation by the operator. The model of the air pump 6 is not limited, but it should be a sufficiently powerful dust-collecting type so that one side of the air pump 6 can stably suck in the dust discharged from the through groove 4 of the furnace body 1 and discharge it through its outlet. The air pump 6 on this side should have an additional filter bag connected to its outlet via a connector to facilitate dust collection. During use, the two sealing rings 3 should be moved out of the ring groove 2. Then, the adjusting component should drive the sealing ring 3 to rotate, which will move its air groove 5 to align with the two corresponding through grooves 4. This will allow one side air pump 6 to blow air into the through groove 4 and the inside of the furnace body 1 to blow away the dust inside the furnace body 1. Meanwhile, the corresponding air pump 6 on the other side will draw air out to collect the dust. When the sealing ring 3 rotates, it has already moved out of the ring groove 2, so there will be no unnecessary friction between it and the ring groove 2 during rotation. This will prevent excessive friction between the two during the rotation of the sealing ring 3 and the resulting seal failure. That is, by setting an adjustable air pump 6, only two air pumps 6 are needed to blow and suck air through the grooves 4 at different positions on the surface of the furnace body 1. This ensures the stability of the dust removal of the device while reducing the use of air pumps 6 and lowering the production cost of the device. Furthermore, the sealing of the grooves 4 only requires two sealing rings 3, with their air grooves 5 and grooves 4 staggered. There is no need to set up a complex sealing structure, which further improves the reliability of the sealing during the use of the device and reduces the complexity of the sealing of the device.

[0020] Please see Figure 7 and Figure 8As shown, the fixing assembly includes: two threaded sleeves 7, which are fixedly connected to both ends of one side sealing ring 3; and two connecting bolts 8, which are rotatably assembled to both ends of the other side sealing ring 3. The threaded sleeves 7 and the connecting bolts 8 are threadedly connected. Before implementation, it should be ensured that the length of the threaded sleeve 7 and the connecting bolt 8 is such that after the two sealing rings 3 are separated from each other and separated from the ring groove 2, a part of the connecting bolt 8 is still located inside the threaded sleeve 7, so that the two sealing rings 3 are still connected together. After the two sealing rings 3 are pressed together and completely embedded inside the ring groove 2, the threaded part of the connecting bolt 8 should be completely retracted into the threaded sleeve 7, so as to achieve sealing of the threaded part of the connecting bolt 8 after the sealing rings 3 are pressed together. That is, during use, the connection between the connecting bolt 8 and the threaded sleeve 7 is adjusted by turning the connecting bolt 8, thereby adjusting the distance between the two sealing rings 3. After adjustment, the self-locking of the connection between the connecting bolt 8 and the threaded sleeve 7 keeps the two sealing rings 3 in a relatively fixed position, making the separation between them and the ring groove 2 more stable and improving the stability of the device.

[0021] Please see Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 9 As shown, the adjustment assembly includes: a rotating ring 9, which is rotatably mounted on the outside of the furnace body 1; and two sets of insert plates 10. The two sets of insert plates 10 are respectively fixedly installed on the outside of two sealing rings 3. The insert plates 10 and the rotating ring 9 are slidably connected. The rotating ring 9 is driven to rotate by a power source. In specific implementation, the rotating ring 9 can be connected to the outer side of the bearing by setting a bearing, while the inner side of the bearing is fixed to the outside of the furnace body 1, so that it can be stably installed on the outside of the furnace body 1 for rotation. When the two sealing rings 3 are far apart to the maximum position, it should be ensured that their outer side is close to the inner side of the rotating ring 9, so that the two maintain a more stable relative fixation and prevent the two from sliding on the inside of the rotating ring 9. When in use, the rotating ring 9 is driven by a power source to rotate, and the insert plate 10 inserted on its inner side rotates synchronously with it. Then the insert plate 10 drives the sealing ring 3 connected to it to move, so that the sealing ring 3 rotates around the furnace body 1 after moving away from the ring groove 2. That is, during use, by moving the two sealing rings 3 to the same distance and making their outer surfaces press against the inner surface of the rotating ring 9, the two are kept in a fixed position inside the rotating ring 9 and will not slide. This prevents the sealing rings 3 from sliding and causing unnecessary contact friction with the furnace body 1 when rotating, thus improving the stability of the device operation.

[0022] Please see Figures 4 to 6As shown, the adjustment assembly also includes: a motor 11, which is fixedly installed on the outside of the furnace body 1, and a gear 12 is fixedly connected to the output end of the motor 11. A gear ring 13 meshes with the outside of the gear 12, and the gear ring 13 is fixedly installed on the upper side of the rotating ring 9. Before implementation, whether the motor 11 is set with a separate controller or connected to the same controller as other drive devices, the rotation amplitude of the motor 11 should be limited each time. The rotation amplitude of the motor 11 should be set according to the spacing angle between the specific number of through slots 4. The air groove 5 of the sealing ring 3 is staggered with the through slot 4, and the diameter of the air groove 5 should be larger than that of the through slot 4 to leave a certain redundancy. This ensures that when it is aligned with the through slot 4, it can fully cover the through slot 4. In use, the motor 11 drives the gear 12 to rotate a fixed number of times each time, so that the gear ring 13 rotates a fixed distance, thereby causing the rotating ring 9, the sealing ring 3 and the structure connected to it to rotate. When the air groove 5 of the sealing ring 3 is staggered with the through slot 4, it moves to the corresponding through slot 4 so that the air pump 6 can perform dust removal. After a period of time, the motor 11 drives the gear 12 to rotate the same number of times again so that the sealing ring 3 continues to rotate, so that the air pump 6 can perform dust removal on the remaining through slots 4 until it rotates a full circle and returns to its original position, so that the air groove 5 and the through slot 4 are staggered again. That is, by setting up the motor 11 and limiting the number of rotations of the motor 11 each time through the controller, the movement of the air pump 6 is made more stable and controllable, and it is more stably aligned with the through slot 4, thereby improving the stability of the device.

[0023] Please see Figure 2 and Figure 3 As shown, the adjustment assembly also includes: a support frame 14, which is disposed on the outside of the furnace body 1. A connecting plate 15 is fixedly connected to the upper side of the support frame 14, and a connecting block 16 is fixedly connected to the outside of the furnace body 1. The connecting plate 15 and the connecting block 16 are used in cooperation. The gear 12 and the gear ring 13 are rotatably assembled on the inside of the support frame 14, and a sealing treatment is performed between the gear ring 13 and the support frame 14. Before implementation, the support frame 14 should be installed by opening holes and slots on the surface of the connecting plate 15 and the inner side of the connecting block 16 so that workers can use bolts to connect the two to achieve the installation and fixation of the support frame 14. The opening of the inner ring of the support frame 14 and the contact part of the gear ring 13 should be provided with elastic sealing material so that after the gear ring 13 rotates, the elastic sealing material will tightly seal the opening of the inner ring of the support frame 14 and the contact part of the gear ring 13, so that the teeth of the gear ring 13 and the gear 12 can be kept away from the external environment. In other words, during use, the toothed portion of the gear ring 13 and the gear 12 are shielded by the support frame 14, so that they are kept away from the external environment during long-term operation of the device, thus making them less likely to be contaminated with unnecessary dust and impurities, thereby improving the stability of the device during long-term operation.

[0024] Please see Figure 1 and Figure 2 As shown, a guide rod 17 is fixedly connected to the outer side of the sealing ring 3, and the guide rod 17 and the two ends of the sealing ring 3 are slidably connected. When the two sealing rings 3 move away from each other, the guide rod 17 passes through both ends of the two sealing rings 3 to cooperate with the insert plate 10 to further guide the movement trajectory of the sealing rings 3, so as to make the movement of the sealing rings 3 more stable. That is, by further connecting the guide rod 17 and the sealing ring 3, the connection between the sealing ring 3 and the rotating ring 9 is made more stable, and its movement trajectory away from the ring groove 2 is also more stable, thereby improving the stability of the device.

[0025] Please see Figure 1 and Figure 2 As shown, an marking groove 18 is provided on the inner side of the furnace body 1, and the marking groove 18 and the through groove 4 are used together; Before implementation, the number and position of the marking slots 18 should be aligned with the actual number and position of the through slots 4 set on the surface of the furnace body 1, so that when in use, the staff can easily identify whether the air pump 6 is aligned with the corresponding marking slot 18 by observing whether it is aligned with the through slot 4. In other words, during use, by observing whether the air pump 6 is aligned with the marking groove 18, the staff can easily determine whether the air pump 6 is aligned with the through groove 4. This helps to determine whether the air pump 6 has deviated from the through groove 4 after long-term operation of the device, so that the staff can determine whether the position needs to be recalibrated, thus improving the stability of the device.

[0026] Please see Figure 1 and Figure 2 As shown, a label plate 19 is fixedly connected to the lower side of the rotating ring 9, and the label plate 19 and the label groove 18 are used together; Before implementation, there are two signboards 19, which are respectively aligned with the two air pumps 6, and one end of each signboard should be aligned with the sign slot 18. This allows staff to directly observe whether one end of the signboard 19 is aligned with the sign slot 18 when judging whether the air pump 6 is aligned with the sign slot 18, thus aiding in the judgment. In other words, by setting up the label plate 19, staff can more intuitively and accurately judge whether the air pump 6 is excessively misaligned with the label slot 18, thus improving the stability of the device.

[0027] Working principle: S1: Initial sealing state In the initial state, the sealing rings 3 on both sides are tightly embedded inside the ring grooves 2, the air grooves 5 and the through grooves 4 are completely offset, and the solid part of the sealing rings 3 is pressed against the through grooves 4 to complete the seal of the furnace body 1. The connecting bolts 8 are locked with the threaded sleeves 7, the sealing rings 3 on both sides remain in a closed state, and the furnace body 1 is in a closed operation mode. S2: Release the seal and separate the sealing ring When dust removal is required, the operator tightens the connecting bolt 8, gradually unscrewing it from the threaded sleeve 7, pushing the two sealing rings 3 away from each other along the guide rod 17 until the sealing rings 3 are completely detached from the ring groove 2. At this time, the outer side of the sealing ring 3 is pressed against the inner side of the rotating ring 9, the insert plate 10 slides inside the rotating ring 9, and the connecting bolt 8 remains partially connected to the threaded sleeve 7, ensuring that the two sealing rings 3 are still connected together.

[0028] S3: Initial air tank alignment and dust removal operation Motor 11 drives gear 12 to rotate, which in turn drives gear ring 13 and rotating ring 9 to rotate at a fixed angle (the angle is determined by the distance between the through slots 4). The rotating ring 9 drives the sealing rings 3 on both sides to rotate synchronously via insert plate 10, aligning the air slot 5 with the corresponding two through slots 4 (one slot corresponds to blowing air, the other to suction air). The air pumps 6 on both sides are activated—one pump blows air into the furnace body 1, dislodging the dust adhering to the inner wall; the other pump suctions air outwards, drawing the dislodged dust through the through slots 4 and air slot 5, and collecting and filtering it through the filter bag connected to the outlet. One end of the marking plate 19 is aligned with the corresponding marking slot 18 to help confirm that the air slot 5 and through slot 4 are accurately aligned.

[0029] S4: Through-slot switching and multi-location coverage Once the air groove 5 is aligned with the current position of the channel 4 and dust removal is complete, the air pump 6 is turned off. Then, the motor 11 drives the gear 12 and gear ring 13 to rotate by the same fixed angle, causing the rotating ring 9 to drive the sealing ring 3 to continue rotating to the next set of channel 4 positions, and the air groove 5 is aligned with another set of channel 4. The blowing and suction dust removal operation of S3 is repeated. This step is repeated until the sealing ring 3 completes a full rotation, and the air groove 5 sequentially completes the dust removal operation for all channel 4.

[0030] S5: Reset and restore seal After all channels 4 are dust-cleaned, motor 11 drives gear 12 and gear ring 13 to rotate, causing rotating ring 9 to rotate sealing ring 3 to the initial angle where air groove 5 is completely offset from channel 4. The connecting bolt 8 is then tightened in the opposite direction, causing the two sealing rings 3 to move closer together along guide rod 17 and re-embed into the inner side of ring groove 2. The solid part of sealing ring 3 is once again pressed tightly against channel 4, completing the seal of furnace body 1. Insert plate 10 remains connected to rotating ring 9, ensuring the sealing ring 3 is locked in place. Furnace body 1 is now fully sealed and ready for normal production use.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A furnace chamber gas filling and dust removal device, characterized in that: include: Furnace body (1), sealing assembly, fixing assembly, cleaning assembly and adjusting assembly; The sealing assembly includes: an annular groove (2) which is opened inside the furnace body (1), and two sealing rings (3), both of which are embedded inside the annular groove (2); A fixing component is used to connect the two sealing rings (3); Cleaning components, through grooves (4), multiple locations, are opened on the surface of the furnace body (1), air grooves (5), two locations, are opened on the surface of the sealing rings (3), and air pumps (6) are fixedly connected to the outer side of the two sealing rings (3), and the air ports on one side of the two air pumps (6) are respectively located inside the two air grooves (5); An adjustment component is used to drive the sealing ring (3).

2. The furnace chamber gas filling and dust removal device according to claim 1, characterized in that: The fixing components include: two threaded sleeves (7), which are fixedly connected to both ends of a sealing ring (3) on one side; and two connecting bolts (8), which are rotatably assembled to both ends of a sealing ring (3) on the other side. The threaded sleeves (7) and the connecting bolts (8) are threadedly connected.

3. The furnace chamber gas filling and dust removal device according to claim 1, characterized in that: The adjustment assembly includes: a rotating ring (9) which is rotatably mounted on the outside of the furnace body (1), and two sets of insert plates (10). The two sets of insert plates (10) are respectively fixedly installed on the outside of two sealing rings (3). The insert plates (10) and the rotating ring (9) are slidably connected. The rotating ring (9) is driven to rotate by a power source.

4. The furnace chamber gas filling and dust removal device according to claim 3, characterized in that: The adjustment assembly also includes a motor (11), which is fixedly installed on the outside of the furnace body (1). A gear (12) is fixedly connected to the output end of the motor (11). A gear ring (13) meshes on the outside of the gear (12). The gear ring (13) is fixedly installed on the upper side of the rotating ring (9).

5. The furnace chamber gas filling and dust removal device according to claim 4, characterized in that: The adjustment assembly also includes: a support frame (14), which is located on the outside of the furnace body (1). A connecting plate (15) is fixedly connected to the upper side of the support frame (14), and a connecting block (16) is fixedly connected to the outside of the furnace body (1). The connecting plate (15) and the connecting block (16) are used in conjunction. The gear (12) and the gear ring (13) are rotatably assembled on the inside of the support frame (14). The gear ring (13) and the support frame (14) are sealed together.

6. The furnace chamber gas filling and dust removal device according to claim 5, characterized in that: A guide rod (17) is fixedly connected to the outside of the sealing ring (3), and the guide rod (17) and the sealing ring (3) are slidably connected at both ends.

7. The furnace chamber gas filling and dust removal device according to claim 6, characterized in that: The furnace body (1) has an marking groove (18) on its inner side, and the marking groove (18) and the through groove (4) are used together.

8. The furnace chamber gas filling and dust removal device according to claim 7, characterized in that: A label plate (19) is fixedly connected to the lower side of the rotating ring (9), and the label plate (19) and the label groove (18) are used together.

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