An ultra-high vacuum pneumatic gate valve based on active metal seal

Abstract

This invention discloses an ultra-high vacuum pneumatic slide gate valve based on a movable metal pad, comprising a valve body, a valve flange mounted on one side of the valve body, the interior of the valve body communicating with the valve flange, a sealing assembly adapted to the valve flange being movably disposed within the valve body, a transmission assembly mounted on the side of the valve body away from the valve flange, the sealing assembly being mounted and connected to the transmission assembly near the valve flange via a bracket, and a cylinder cooperating with the transmission assembly being mounted on one side of the valve body. In this invention, when the sealing plate is sealing within the valve flange, it can also move in conjunction with the valve plate, further improving the sealing effect through compression contact within the valve flange.

Description

Technical Field

[0001] This invention relates to the field of slide gate valve technology, specifically an ultra-high vacuum pneumatic slide gate valve based on a movable metal pad. Background Technology

[0002] The ultra-high vacuum gate valve, specifically designed for the semiconductor industry, is a core fluid control component for isolating vacuum chambers from non-vacuum chambers and precisely regulating the vacuum environment in advanced semiconductor applications. This valve employs a double-acting cylinder actuator with a built-in displacement feedback module, enabling precise control of the airflow path via commands from a host computer. It achieves stable positioning of the valve plate at fully closed, fully open, and in the intermediate MID position, with high-precision MID position repeatability, meeting the requirements for flexible process control. This type of valve has a wide range of applications in the semiconductor valve manufacturing field, and is commonly used in semiconductor vacuum control systems as a key core component. Its applications also extend to high vacuum equipment, aerospace, new energy photovoltaic equipment, nuclear facilities, and medical and pharmaceutical fields, providing comprehensive solutions for multiple sectors including semiconductors, new energy, and scientific research.

[0003] Chinese Patent Publication No. CN216112269U discloses a pneumatic high-vacuum slide gate valve. A cylinder seat is installed at the top of the valve body, and a cylinder barrel is installed at the top of the cylinder seat. An air intake mechanism is installed on the right side of the cylinder barrel and is connected to the cylinder barrel. A sensor device is installed on the left side of the cylinder barrel. A piston is provided inside the cylinder barrel. The piston rod is connected to the piston, and the piston is connected to the piston rod. The piston rod is movably connected to the push plate through a first push rod, a connecting piece, and a second push rod. A steel ball is installed on the push plate. The bottom end of the push plate is movably connected to a spring plate through a limiting piece. Valve plates are symmetrically provided on both sides of the spring plate. A steel ball groove is provided on the inner side of the valve plate. A first pulley is installed at the four corners of the front of the push plate, and a second pulley is installed on both sides of the push plate. Similarly, the simplified high-vacuum pneumatic slide gate valve disclosed in Chinese Patent Publication No. CN208295160U and the high-vacuum pneumatic slide gate valve disclosed in Chinese Patent Publication No. CN117489808A both disclose slide gate valves that can achieve the effect of active sealing.

[0004] However, the rigid contact during the sealing process will reduce the service life of all components. Summary of the Invention

[0005] The purpose of this invention is to provide an ultra-high vacuum pneumatic slide gate valve based on a movable metal pad, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: An ultra-high vacuum pneumatic slide gate valve based on a movable metal pad includes a valve body. A valve flange is mounted and connected to one side of the valve body, and the interior of the valve body communicates with the valve flange. A sealing assembly adapted to the valve flange is movably disposed in the valve body. A transmission assembly is installed on the side of the valve body away from the valve flange. The sealing assembly is mounted and connected to the side of the transmission assembly near the valve flange via a bracket. A cylinder that drives and cooperates with the transmission assembly is installed on one side of the valve body. When the sealing assembly moves from the valve body into the valve flange, the sealing assembly squeezes and seals the valve flange. When the sealing assembly moves from the valve flange into the valve body, the sealing assembly disengages from squeezing the valve flange.

[0007] As a further aspect of the present invention: the output end of the cylinder faces the valve body, the transmission assembly includes a main connecting rod and a secondary connecting rod, the output end of the cylinder is rotatably connected to the main connecting rod, the secondary connecting rod is rotatably connected to the inside of the valve body, the secondary connecting rod is rotatably connected to the end of the main connecting rod, the secondary connecting rod rotates around a fixed fulcrum, and the end of the secondary connecting rod away from the main connecting rod is hinged to the bracket.

[0008] As a further embodiment of the present invention: the sealing assembly and the bracket are slidably connected in the valve body, the bracket includes symmetrically arranged trusses, the two ends of the trusses are slidably adapted in the valve body, the trusses are connected to each other by connecting rods, one side of the truss is hinged to the end of the auxiliary connecting rod in the transmission assembly, the middle of the other side of the truss is provided with a first guide hole, and the sealing assembly is assembled and connected to the truss on that side.

[0009] As a further aspect of the present invention: the sealing assembly is slidably sleeved on the truss and is connected in conjunction with the first guide hole.

[0010] As a further embodiment of the present invention: the sealing assembly includes a valve plate and a sealing plate. The valve plate is slidably sleeved on the periphery of a truss on one side. Connecting holes are provided through the trusses on both sides of the valve plate. Connecting parts are slidably fitted in the connecting holes. Sealing plates corresponding to and adapted to the valve flange are symmetrically arranged on both sides of the valve plate. The sealing plates are respectively connected to the two ends of the connecting parts on both sides.

[0011] As a further aspect of the present invention: the valve flange is provided with a channel communicating with the interior of the valve body, the sealing plate and the channel in the valve flange are slidably adapted, and the opening size of the valve flange is smaller than the size of the channel.

[0012] As a further aspect of the present invention: the upper opening at the connection between the valve flange and the valve body has the same width as the sealing plate, the lower opening at the connection between the valve flange and the valve body has the same width as the valve plate, the valve plate and the sealing plate are concentrically arranged, and the diameter of the valve plate is smaller than the diameter of the sealing plate.

[0013] As a further aspect of the present invention: a second guide hole is provided transversely through the valve plate, the second guide hole and the truss are slidably adapted, and a spring is connected between the inner wall of the second guide hole and the truss.

[0014] As a further aspect of the present invention: multiple sets of limiting holes are embedded on both sides of the valve plate, the limiting holes are arranged in a circular array around the center of the valve plate surface, and a ball bearing is rolled and embedded on the side of the sealing plate facing the valve plate, the part of the ball bearing extending out of the sealing plate surface and correspondingly adapted to the limiting holes.

[0015] As a further aspect of the present invention: a spring is connected between the connector and the connecting hole, and the connector is located in the connecting hole on the side near the valve flange. The connector includes a sleeve that is slidably connected in the connecting hole. An elastic slide rod is slidably connected in the sleeve. A spring is connected between the sleeve and the elastic slide rod. The relatively far ends of the sleeve and the elastic slide rod are respectively connected to opposite sealing plates.

[0016] As a further embodiment of the present invention: the valve body is provided with a first mounting groove, a second mounting groove and a third mounting groove connected in sequence; the transmission component is assembled and connected in the first mounting groove; the truss and connecting rod, as well as the valve plate and the sealing plate are slidably connected in the second mounting groove; the edge of the sealing plate is adapted to the edge of the second mounting groove; the third mounting groove and the valve plate are adapted in size and arranged opposite to each other; and an assembly groove is provided on one side of the first mounting groove to allow the output end of the cylinder to move.

[0017] Compared with the prior art, the beneficial effects of this invention are as follows: When the cylinder drives the truss and connecting rod to move towards the valve flange in the valve body via the transmission assembly, it can simultaneously drive the valve plate and sealing plate to move towards the valve flange. When the valve plate and sealing plate move to be aligned with the valve flange, the sealing plate can no longer move. At this point, when the cylinder continues to drive the truss and connecting rod to move via the transmission assembly, the valve plate can drive the sealing plate to move relatively away from the valve flange, thereby using the sealing plate to squeeze the valve flange, thus achieving a better sealing effect. During sealing, the combined cooperation of multiple elastic connections can reduce the risk of wear and tear associated with rigid contact, effectively improving service life. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a perspective view of the present invention; Figure 3 This is a schematic diagram of the structure of the bracket and sealing assembly in this invention; Figure 4 This is a schematic diagram of the support structure in this invention; Figure 5 This is a schematic diagram of the structure of the bracket and valve plate in this invention; Figure 6 This is a schematic diagram of the sealing plate in this invention; Figure 7 This is a schematic diagram of the connector structure in this invention; Figure 8 This is a schematic diagram of the valve body in this invention.

[0019] In the diagram: 1-valve body, 11-first mounting slot, 12-second mounting slot, 13-third mounting slot, 14-assembly slot, 2-valve flange, 3-cylinder, 4-transmission assembly, 5-bracket, 51-truss, 52-connecting rod, 53-first guide hole, 54-connecting hole, 55-connector, 5501-sleeve, 5502-elastic slide bar, 6-sealing assembly, 61-valve plate, 62-second guide hole, 63-limiting hole, 64-sealing plate, 65-ball bearing. Detailed Implementation

[0020] Please see Figures 1-3 In this embodiment of the invention, an ultra-high vacuum pneumatic slide gate valve based on a movable metal pad includes a valve body 1. A valve flange 2 is mounted and connected to one side of the valve body 1, and the interior of the valve body 1 communicates with the valve flange 2. A sealing component 6 adapted to the valve flange 2 is movably disposed in the valve body 1. A transmission component 4 is installed on the side of the valve body 1 away from the valve flange 2. The sealing component 6 is mounted and connected to the side of the transmission component 4 near the valve flange 2 via a bracket 5. A cylinder 3 that drives and cooperates with the transmission component 4 is installed on one side of the valve body 1. When the sealing component 6 moves from inside the valve body 1 into the valve flange 2, the sealing component 6 squeezes and seals the valve flange 2. When the sealing component 6 moves from the valve flange 2 into the valve body 1, the sealing component 6 disengages from squeezing the valve flange 2.

[0021] The output end of the cylinder 3 faces into the valve body 1. The transmission assembly 4 includes a main connecting rod and a secondary connecting rod. The output end of the cylinder 3 is rotatably connected to the main connecting rod, and the secondary connecting rod is rotatably connected to the inside of the valve body 1. The secondary connecting rod is rotatably connected to the end of the main connecting rod. When the cylinder 3 pushes the main connecting rod, the main connecting rod drives the secondary connecting rod to rotate around a fixed fulcrum. The end of the secondary connecting rod away from the main connecting rod is hinged to the bracket 5. The sealing assembly 6 and the bracket 5 are slidably connected in the valve body 1. Preferably, a guide bearing can be provided at the contact position of the slidable connection, so that linear movement can be conveniently and flexibly made during movement, facilitating the conversion of the drive of the cylinder 3 into the movement and sealing of the bracket 5 and the sealing assembly 6. The mechanism ensures the straightness and parallelism of the movement of the bracket 5 and the sealing assembly 6 through strict geometric design and the guiding effect of guide bearings in multiple directions, avoiding uneven wear. When in the middle MID position (the sealing assembly 6 is fitted in the center of the valve flange 2), the sealing assembly 6 is stably stopped by the pressure holding function of the cylinder 3 and the synergistic effect of the mechanical limit structure, achieving the repeatability accuracy of the MID position.

[0022] The cylinder 3, as an actuator, has a built-in displacement feedback signal module. It can control the air passage opening and closing of different cylinder chambers and feed back the position signal according to the control command of the host computer. It can realize full-open stroke, full-close stroke and adjustable MID position control.

[0023] In this scheme, such as Figure 4 As shown, the support 5 includes symmetrically arranged trusses 51. The two ends of each truss 51 are slidably fitted into the valve body 1. The trusses 51 are connected by connecting rods 52. One side of the truss 51 is hinged to the end of a secondary connecting rod in the transmission assembly 4. A first guide hole 53 is provided through the middle of the other side of the truss 51, and the sealing assembly 6 is assembled and connected to the truss 51 on that side. Preferably, the sealing assembly 6 is slidably sleeved on the truss 51 and engages with the first guide hole 53. The transmission assembly 4 is driven by the cylinder 3, which can move the support 5 and the sealing assembly 6 within the valve body 1 relative to the valve flange 2.

[0024] like Figures 3-6As shown, the sealing assembly 6 includes a valve plate 61 and a sealing plate 64. The valve plate 61 is slidably sleeved on the periphery of the truss 51 on one side. Connecting holes 54 are provided through the trusses 51 on both sides of the valve plate 61. Connecting parts 55 are slidably fitted in the connecting holes 54. Sealing plates 64 corresponding to and adapted to the valve flange 2 are symmetrically arranged on both sides of the valve plate 61. The sealing plates 64 are respectively connected to the two ends of the connecting parts 55 on both sides. When cylinder 3 drives truss 51 and connecting rod 52 to move in valve body 1 toward valve flange 2 via transmission assembly 4, it can simultaneously drive valve plate 61 and sealing plate 64 to move in the direction of valve flange 2. When valve plate 61 and sealing plate 64 move to be aligned with valve flange 2, sealing plate 64 can no longer move. At this time, when cylinder 3 continues to drive truss 51 and connecting rod 52 to move via transmission assembly 4, valve plate 61 can drive sealing plate 64 to move relatively away from valve flange 2, thereby using sealing plate 64 to squeeze valve flange 2, thus achieving a better sealing effect.

[0025] Preferably, the valve flange 2 has a channel communicating with the interior of the valve body 1. The sealing plate 64 and the channel in the valve flange 2 are slidably adapted, and the opening size of the valve flange 2 is smaller than the size of the channel. This allows the sealing plate 64 to compress the opening of the valve flange 2, resulting in a better sealing effect when the sealing plate 64 and the valve flange 2 are in contact. When the output end of the cylinder 3 drives the transmission assembly 4 away from the valve flange 2, the truss 51 and connecting rod 52 drive the valve plate 61 to move towards the transmission assembly 4. As the valve plate 61 passes through the valve flange 2, the sealing plate 64 can be released from the compression of the opening of the valve flange 2 and moves away from the valve flange 2 along with the valve plate 61. This facilitates control and adjustment and provides a better sealing effect. The upper opening at the connection between the valve flange 2 and the valve body 1 has the same width as the sealing plate 64, and the lower opening at the connection between the valve flange 2 and the valve body 1 has the same width as the valve plate 61. The valve plate 61 and the sealing plate 64 are concentrically arranged, and the diameter of the valve plate 61 is smaller than the diameter of the sealing plate 64. This allows the sealing plate 64 to be easily locked into the valve flange 2 during movement, while the valve plate 61 can continue to move.

[0026] The valve plate 61 has a transversely extending second guide hole 62, which is slidably adapted to the truss 51. A spring connects the inner wall of the second guide hole 62 and the truss 51. This arrangement avoids rigid impacts. When the truss 51 and connecting rod 52 move the valve plate 61 and sealing plate 64, the sealing plate 64 is jammed after entering the valve flange 2. The truss 51 can continue to move and compress the spring, which in turn moves the valve plate 61, creating a misalignment with the sealing plate 64 and driving it to move. When the truss 51 and connecting rod 52 move in opposite directions, the valve plate 61 can also move in the opposite direction. The elastic cushioning of the spring avoids rigid impacts and reduces hard collisions.

[0027] The valve plate 61 has multiple sets of limiting holes 63 embedded on both sides of its surface. These limiting holes 63 are arranged in a circular array around the center of the valve plate 61 surface. A ball bearing 65 is rolled into the sealing plate 64 on the side facing the valve plate 61. The portion of the ball bearing 65 extending beyond the surface of the sealing plate 64 corresponds to and fits into the limiting holes 63. When the truss 51 and connecting rod 52 synchronously move the valve plate 61 and sealing plate 64 to the valve flange 2, the sealing plate 64 can be moved by the connecting piece 55 and also by the engagement between the ball bearing 65 and the limiting holes 63. After the sealing plate 64 and valve flange 2 are engaged, it cannot move further downwards. When the valve plate 61 continues to move downwards, the ball bearing 65 can roll out from the limiting holes 63 and press against the surface of the sealing plate 64, allowing the sealing plate 64 to achieve a further sealing effect within the valve flange 2. To improve stability and compression effect during sealing, the ball bearing 65 can elastically roll within the surface of the sealing plate 64, which can be achieved through spring elastic engagement.

[0028] And among them, such as Figures 5-7 As shown, a spring connects the connector 55 and the connecting hole 54, and the connector 55 is located in the connecting hole 54 on the side closer to the valve flange 2. The connector 55 includes a sleeve 5501 that is slidably connected in the connecting hole 54. An elastic slide rod 5502 is slidably connected in the sleeve 5501. A spring connects the sleeve 5501 and the elastic slide rod 5502. The relatively far ends of the sleeve 5501 and the elastic slide rod 5502 are respectively connected to the opposite sealing plates 64. When the truss 51 and the connecting rod 52 move, they can drive the sealing plate 64 to move, and the elastic buffering mechanism ensures that the relative movement of the sealing plate 64 in the valve flange 2 to complete the sealing is not affected, and the synchronous movement of the sealing plate 64 and the valve plate 61 is not affected.

[0029] To achieve the movement effect, the valve body 1 is provided with a first mounting groove 11, a second mounting groove 12, and a third mounting groove 13 connected in sequence. The transmission assembly 4 is assembled and connected in the first mounting groove 11. The truss 51, the connecting rod 52, the valve plate 61, and the sealing plate 64 are all slidably connected in the second mounting groove 12. The edge of the sealing plate 64 is adapted to the edge of the second mounting groove 12. The third mounting groove 13 and the valve plate 61 are adapted in size and arranged opposite to each other. An assembly groove 14 is provided on one side of the first mounting groove 11 to allow the output end of the cylinder 3 to move. The output end of cylinder 3 moves in the assembly slot 14, which drives the transmission component 4 to move, thereby causing the truss 51 and connecting rod 52 to move synchronously in the second mounting slot 12. When the sealing plate 64 moves downward to the connection point with the third mounting slot 13, the sealing plate 64 can no longer move downward, and the valve flange 2 is connected to the bottom of the second mounting slot 12. At this time, the valve plate 61 can continue to move downward into the third mounting slot 13, thus pushing the sealing plate 64 relatively away from the valve flange 2, achieving a better sealing effect. During sealing, the combined action of multiple elastic connections can reduce the risk of wear and tear from rigid contact, effectively improving service life.

Claims

1. A high-vacuum pneumatic slide gate valve based on a movable metal pad, comprising a valve body, wherein a valve flange is mounted and connected to one side of the valve body, the interior of the valve body communicates with the valve flange, and a sealing assembly adapted to the valve flange is movably disposed within the valve body, characterized in that, A transmission assembly is installed on the side of the valve body away from the valve flange. The sealing assembly is connected to the transmission assembly near the valve flange via a bracket. A cylinder that drives and cooperates with the transmission assembly is installed on one side of the valve body. When the sealing assembly moves from the valve body into the valve flange, the sealing assembly squeezes and seals the valve flange. When the sealing assembly moves from the valve flange into the valve body, the sealing assembly disengages from squeezing the valve flange.

2. The ultra-high vacuum pneumatic slide gate valve based on a movable metal pad according to claim 1, characterized in that, The output end of the cylinder faces the valve body. The transmission assembly includes a main connecting rod and a secondary connecting rod. The output end of the cylinder is rotatably connected to the main connecting rod, and the secondary connecting rod is rotatably connected to the inside of the valve body. The secondary connecting rod is rotatably connected to the end of the main connecting rod. The secondary connecting rod rotates around a fixed fulcrum. The end of the secondary connecting rod away from the main connecting rod is hinged to the bracket.

3. The ultra-high vacuum pneumatic slide gate valve based on a movable metal pad according to claim 1, characterized in that, The sealing assembly and the bracket are slidably connected in the valve body. The bracket includes symmetrically arranged trusses. The two ends of the trusses are slidably adapted in the valve body. The trusses are connected to each other by connecting rods. The end of the auxiliary connecting rod in the transmission assembly is hinged to one side of the truss. A first guide hole is provided through the middle of the other side of the truss, and the sealing assembly is assembled and connected to the truss on that side.

4. The ultra-high vacuum pneumatic slide gate valve based on a movable metal pad according to claim 3, characterized in that, The sealing assembly includes a valve plate and a sealing plate. The valve plate is slidably sleeved on the periphery of a truss on one side. Connecting holes are provided through the trusses on both sides of the valve plate. Connecting parts are slidably fitted in the connecting holes. Sealing plates corresponding to and adapted to the valve flange are symmetrically arranged on both sides of the valve plate. The sealing plates are respectively connected to the two ends of the connecting parts on both sides.

5. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 4, characterized in that, The valve flange has a channel that communicates with the inside of the valve body. The sealing plate and the channel in the valve flange are slidably adapted to each other, and the opening size of the valve flange is smaller than the size of the channel.

6. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 5, characterized in that, The upper opening at the connection between the valve flange and the valve body has the same width as the sealing plate, and the lower opening at the connection between the valve flange and the valve body has the same width as the valve plate. The valve plate and the sealing plate are concentrically arranged, and the diameter of the valve plate is smaller than the diameter of the sealing plate.

7. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 4 or 6, characterized in that, A second guide hole is provided transversely through the valve plate. The second guide hole and the truss are slidably adapted, and a spring is connected between the inner wall of the second guide hole and the truss.

8. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 7, characterized in that, Multiple sets of limiting holes are embedded on both sides of the valve plate. The limiting holes are arranged in a circular array around the center of the valve plate surface. A ball bearing is rolled and embedded on the side of the sealing plate facing the valve plate. The part of the ball bearing extending out of the sealing plate surface corresponds to and is adapted to the limiting hole.

9. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 8, characterized in that, A spring is connected between the connector and the connecting hole, and the connector is located in the connecting hole on the side closer to the valve flange. The connector includes a sleeve that is slidably connected in the connecting hole. An elastic slide rod is slidably connected in the sleeve. A spring is connected between the sleeve and the elastic slide rod. The relatively far ends of the sleeve and the elastic slide rod are respectively connected to opposite sealing plates.

10. A high-vacuum pneumatic slide gate valve based on a movable metal pad according to claim 9, characterized in that, The valve body is provided with a first mounting groove, a second mounting groove and a third mounting groove connected in sequence. The transmission component is assembled and connected in the first mounting groove. The truss and connecting rod, as well as the valve plate and the sealing plate, are slidably connected in the second mounting groove. The edge of the sealing plate is adapted to the edge of the second mounting groove. The third mounting groove is adapted to the size of the valve plate and is arranged opposite to it. An assembly groove is provided on one side of the first mounting groove to allow the output end of the cylinder to move.

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