Water nozzle hole sealing groove position detection tool and detection method for semiconductor vacuum cavity

Abstract

This invention discloses a fixture and method for detecting the position of a water tap orifice sealing groove in a semiconductor vacuum cavity. The aim is to provide a method for manually measuring the position of the water tap orifice sealing groove, which is simple and convenient to operate, effectively improving detection efficiency and reducing detection costs. Furthermore, it eliminates the need for hoisting the vacuum cavity product, ensuring safe and reliable operation. It includes: a fixture body; a detection head, located at one end of the fixture body and extending into the water tap orifice. A detection reference surface is provided at the end of the detection head facing away from the fixture body. An annular detection protrusion adapted to the water tap orifice sealing groove is provided on the side of the detection head. The two end faces of the annular detection protrusion are parallel to the detection reference surface. The distance between the detection reference surface and the annular detection protrusion is consistent with the distance between the bottom surface of the water tap orifice and the water tap orifice sealing groove.

Description

Technical Field

[0001] This invention relates to the field of water nozzle sealing groove position detection technology for semiconductor vacuum cavities, and specifically to a tool and method for detecting the position of water nozzle sealing grooves in semiconductor vacuum cavities. Background Technology

[0002] With the rapid development of the semiconductor industry, vacuum chambers play a crucial role, and their applications and technological innovations are driving industry growth. Vacuum chambers are key equipment in semiconductor manufacturing, mainly used in precision processes such as photolithography and thin film deposition. By maintaining an ultra-vacuum environment, they effectively isolate impurities such as oxygen and water vapor in the air, preventing oxidation or contamination of semiconductor materials and ensuring the precision and stability of chip production.

[0003] A vacuum chamber is a sealed container capable of withstanding pressure differences and maintaining a low or ultra-high vacuum state. As a core component of a vacuum system, it provides the necessary process environment for many high-tech fields such as semiconductor manufacturing, materials science, and particle physics. The position and dimensions of the water nozzle sealing groove within the vacuum chamber are crucial. Currently, the position of the water nozzle sealing groove in a vacuum chamber is mainly detected by using a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument to determine whether the position of the water nozzle sealing groove is qualified. For example, Chinese Patent Publication No. CN206258087U, entitled "A Non-Contact Three-Dimensional Measuring Instrument," describes a non-contact three-dimensional measuring instrument that can accurately measure micro-sized products. However, current methods for detecting the position of the water nozzle sealing groove in a vacuum chamber have the following shortcomings. Firstly, the measuring equipment is expensive, requiring dial gauges or three-dimensional measuring instruments on machine tools, and cannot be measured manually, resulting in high measurement costs.

[0004] Secondly, it requires high professional skills from the surveyors. The measurement needs to be done through machine tools or three-dimensional measuring instruments, so the surveyors must be proficient in operating machine tools or three-dimensional measuring instruments.

[0005] Third, the measurement efficiency is low: the product needs to be hoisted onto the machine tool or three-dimensional measuring equipment during measurement, which adds a lot of extra workload to the inspection.

[0006] Fourth, there are certain safety hazards. Due to the large size of the vacuum chamber product, it is prone to collisions, slippage, and other risks during hoisting. Summary of the Invention

[0007] The purpose of this invention is to provide a tool and method for manually measuring the position of a water tap hole sealing groove, which is simple and convenient to operate, can effectively improve detection efficiency and reduce detection costs, and does not require hoisting the vacuum chamber product, making the operation safe and reliable.

[0008] The technical solution of this invention is: A fixture for detecting the position of a water nozzle sealing groove in a semiconductor vacuum cavity, comprising: Checking tool body; A detection head, located at one end of the fixture body and extending into the water nozzle orifice, has a detection reference surface at its opposite end. An annular detection protrusion, adapted to the sealing groove of the water nozzle orifice, is located on the side of the detection head. The two end faces of the annular detection protrusion are parallel to the detection reference surface. The distance between the detection reference surface and the annular detection protrusion is the same as the distance between the bottom surface of the water nozzle orifice and the sealing groove of the water nozzle orifice. The specific use of this semiconductor vacuum cavity water nozzle orifice sealing groove position detection fixture is as follows. The inspector holds the inspection tool body and inserts the inspection head into the water tap hole, so that the inspection reference surface is in close contact with the bottom surface of the water tap hole; Next, keeping the testing reference surface firmly against the bottom surface of the faucet hole, the testing head is moved horizontally towards the side wall of the faucet hole. If the annular testing protrusion cannot enter the faucet hole sealing groove, the faucet hole sealing groove position is unqualified. If the annular testing protrusion can enter the faucet hole sealing groove, it will drive the testing head to move circumferentially along the faucet hole sealing groove. During this process, if the testing head can move smoothly along the faucet hole sealing groove, the faucet hole sealing groove position is qualified. If the testing head gets stuck while moving circumferentially along the faucet hole sealing groove, the faucet hole sealing groove position is unqualified. Compared with the existing technology of judging whether the faucet hole sealing groove position is qualified by using a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument, this solution can quickly and conveniently judge whether the faucet hole sealing groove position is qualified by using a testing fixture. Its operation is simple and convenient, without the need to use a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum cavity product onto a machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the testing efficiency, reduce the testing cost, and ensure safe and reliable operation.

[0009] As a preferred option, it also includes: A guide hole is located inside the fixture body, with its axis perpendicular to the detection reference surface. The guide hole extends into the detection head and communicates with the detection reference surface. The sliding rod is slidably disposed in the guide hole, and a moving reference surface is provided at one end of the sliding rod near the detection reference surface. The moving reference surface is parallel to the detection reference surface. The elastic element drives the sliding rod to move, causing the moving reference surface to move to the outside of the detection head; The sensor detects or senses the position of the sliding rod. During the process of checking whether the faucet orifice sealing groove position is qualified, when the annular detection protrusion can enter the faucet orifice sealing groove, it drives the detection head to move circumferentially along the faucet orifice sealing groove. If the detection head can move smoothly circumferentially along the faucet orifice sealing groove, it is judged that the faucet orifice sealing groove position is qualified, but this is a possibility of misjudgment. Specifically, during the circumferential movement of the detection head along the faucet orifice sealing groove, the inspector cannot guarantee, nor can they easily identify, whether the detection reference surface remains in close contact with the bottom surface of the faucet orifice. If the distance between the faucet orifice sealing groove and the bottom surface of the faucet orifice is inconsistent in different parts of the circumferential direction, the detection reference surface will separate from the bottom surface of the faucet orifice during the circumferential movement of the detection head along the faucet orifice sealing groove. Thus, even if the detection head can move smoothly circumferentially along the faucet orifice sealing groove, the faucet orifice sealing groove position is not qualified. To solve this problem and improve the accuracy of judgment, this solution improves the faucet orifice sealing groove position detection fixture. Specifically… When the detection reference surface is in close contact with the bottom surface of the faucet hole, the moving reference surface on the sliding rod is also in close contact with the bottom surface of the faucet hole, and the moving reference surface and the detection reference surface are on the same plane. If the detection reference surface remains in close contact with the bottom surface of the faucet hole during the circumferential movement of the detection head along the faucet hole sealing groove, the position of the sliding rod will not change. Therefore, if the detection head can move smoothly along the faucet hole sealing groove and the position of the sliding rod does not change, it indicates that the faucet hole sealing groove is in a qualified position. If the sensor detects or senses a change in the position of the sliding rod, it indicates that the detection reference surface has separated from the bottom surface of the faucet hole, and the faucet hole sealing groove is in an unqualified position. In this way, it is possible to determine whether the distance between the faucet hole sealing groove and the bottom surface of the faucet hole is consistent in the circumferential direction, further effectively improving the accuracy of determining whether the faucet hole sealing groove is in a qualified position.

[0010] Preferably, an enlarged head is provided at one end of the sliding rod near the detection reference surface. The end face of the enlarged head facing away from the sliding rod constitutes the moving reference surface. An enlarged head receiving groove is provided on the detection reference surface. The guide hole is connected to the bottom surface of the enlarged head receiving groove, and the enlarged head can be accommodated in the enlarged head receiving groove.

[0011] Preferably, the sensor is located at the bottom of the enlarged head receiving groove. When the moving reference surface and the detection reference surface are on the same plane, the enlarged head presses against the sensor. When the moving reference surface moves to the outside of the detection head, the enlarged head separates from the sensor. Thus, during the circumferential movement of the detection head along the faucet hole sealing groove, if the detection reference surface always remains in close contact with the bottom surface of the faucet hole, the moving reference surface and the detection reference surface will always be on the same plane, and the enlarged head will remain in close contact with the sensor. Therefore, during the circumferential movement of the detection head along the faucet hole sealing groove, if the sensor always senses the enlarged head pressing against the sensor, it indicates that during the circumferential movement of the detection head along the faucet hole sealing groove, the detection reference surface always remains in close contact with the bottom surface of the faucet hole. During the circular movement of the detection head along the sealing groove of the faucet hole, if the detection reference surface separates from the bottom surface of the faucet hole, the sliding rod will remain against the bottom surface of the faucet hole under the action of the elastic element, thereby separating the enlarged head from the sensor. Therefore, when the sensor always senses the separation between the enlarged head and the sensor, it indicates that the detection reference surface and the bottom surface of the faucet hole have separated during the circular movement of the detection head along the sealing groove of the faucet hole.

[0012] Preferably, the guide hole is open at both ends, and an annular stop is provided inside the guide hole. A guide rod is provided at one end of the sliding rod opposite to the moving reference surface. The guide rod is parallel or coaxial with the sliding rod and passes through the annular stop. A limiting block is provided on the guide rod. The sliding rod and the limiting block are located on opposite sides of the annular stop. The elastic element is located between the sliding rod and the annular stop. The limiting block abuts against the annular stop under the action of the elastic element.

[0013] Preferably, the sensor is a displacement sensor, which detects the displacement stroke of the sliding rod along the direction of the guide hole.

[0014] During the circumferential movement of the detection head along the faucet hole sealing groove, if the detection reference surface remains in close contact with the bottom surface of the faucet hole, the moving reference surface and the detection reference surface will always be on the same plane. The displacement sensor can detect that the position of the sliding rod does not change (i.e., the displacement stroke of the sliding rod along the guide hole direction is zero). Therefore, if the displacement sensor detects zero displacement stroke of the sliding rod along the guide hole direction during the circumferential movement of the detection head along the faucet hole sealing groove, it indicates that the detection reference surface remains in close contact with the bottom surface of the faucet hole during the circumferential movement of the detection head along the faucet hole sealing groove. If the detection reference surface separates from the bottom surface of the faucet hole during the circumferential movement of the detection head along the faucet hole sealing groove, the sliding rod will remain against the bottom surface of the faucet hole under the action of the elastic element. In this case, the displacement sensor will detect the displacement stroke of the sliding rod along the guide hole direction, thereby determining the distance at which the detection reference surface separates from the bottom surface of the faucet hole during the circumferential movement of the detection head along the faucet hole sealing groove.

[0015] Preferably, the detection head is cylindrical, and the annular detection bump is coaxial with the detection head.

[0016] Preferably, the gauge body is rod-shaped, and the detection head and the gauge body are integrally formed.

[0017] A detection method for a water tap orifice sealing groove position detection fixture using a semiconductor vacuum cavity includes the following steps: First, insert the testing head into the faucet hole so that the testing reference surface is in close contact with the bottom surface of the faucet hole; Second, keep the test reference surface close to the bottom surface of the faucet hole, and move the test head horizontally towards the side wall of the faucet hole. If the annular test protrusion cannot enter the faucet hole sealing groove, the position of the faucet hole sealing groove is unqualified. If the annular detection protrusion can enter the water tap hole sealing groove, it will drive the detection head to move circumferentially along the water tap hole sealing groove. During this process, if the detection head can move smoothly along the water tap hole sealing groove, the water tap hole sealing groove position is qualified; if the detection head is stuck while moving circumferentially along the water tap hole sealing groove, the water tap hole sealing groove position is unqualified. Compared with the existing technology of judging whether the water tap hole sealing groove position is qualified by using a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument, this solution can quickly and conveniently judge whether the water tap hole sealing groove position is qualified by using a detection fixture. Its operation is simple and convenient, without the need to use a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum cavity product onto a machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the detection efficiency, reduce the detection cost, and ensure safe and reliable operation.

[0018] Preferably, in the first step, when the detection reference surface is in close contact with the bottom surface of the water nozzle hole, the moving reference surface on the sliding rod is also in close contact with the bottom surface of the water nozzle hole, and the moving reference surface and the detection reference surface are on the same plane. In the second step, if the annular detection protrusion can enter the faucet hole sealing groove, the detection head will move circumferentially along the faucet hole sealing groove. During this process, the sensor will detect or sense the position of the sliding rod. If the sensor detects or senses a change in the position of the sliding rod, it indicates that the faucet hole sealing groove position is unqualified; if the sensor detects or senses no change in the position of the sliding rod, it indicates that the faucet hole sealing groove position is qualified. During the circumferential movement of the detection head along the faucet hole sealing groove, the inspector cannot guarantee or identify whether the detection reference surface remains tightly attached to the bottom surface of the faucet hole. If the distance between the faucet hole sealing groove and the bottom surface of the faucet hole is inconsistent in different parts of the circumferential direction, the detection reference surface will separate from the bottom surface of the faucet hole during the circumferential movement of the detection head. Therefore, even if the detection head can move smoothly along the faucet hole sealing groove, the faucet hole sealing groove position will still be unqualified. To solve this problem and improve the accuracy of judgment, this solution improves the faucet hole sealing groove position detection fixture. Specifically… When the detection reference surface is in close contact with the bottom surface of the faucet hole, the moving reference surface on the sliding rod is also in close contact with the bottom surface of the faucet hole, and the moving reference surface and the detection reference surface are on the same plane. If the detection reference surface remains in close contact with the bottom surface of the faucet hole during the circumferential movement of the detection head along the faucet hole sealing groove, the position of the sliding rod will not change. Therefore, if the detection head can move smoothly along the faucet hole sealing groove and the position of the sliding rod does not change, it indicates that the faucet hole sealing groove is in a qualified position. If the sensor detects or senses a change in the position of the sliding rod, it indicates that the detection reference surface has separated from the bottom surface of the faucet hole, and the faucet hole sealing groove is in an unqualified position. In this way, it is possible to determine whether the distance between the faucet hole sealing groove and the bottom surface of the faucet hole is consistent in the circumferential direction, further effectively improving the accuracy of determining whether the faucet hole sealing groove is in a qualified position.

[0019] The beneficial effects of this invention are: Firstly, the position of the water nozzle sealing groove can be quickly and conveniently determined using a measuring tool for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity. The operation is simple and convenient.

[0020] Secondly, it eliminates the need for machine tools to print dial gauges or to use a three-dimensional measuring instrument, thus reducing testing costs and lowering the professional skill requirements for testing personnel.

[0021] Third, during measurement, there is no need to hoist the semiconductor vacuum chamber product onto a machine tool or three-dimensional measuring device, which can effectively improve the detection efficiency and ensure safe and reliable operation. Attached Figure Description

[0022] Figure 1 This is a cross-sectional structural schematic diagram of a water nozzle sealing groove position detection fixture for a semiconductor vacuum cavity according to the present invention.

[0023] Figure 2 This is a partial structural diagram of the nozzle hole sealing groove position detection fixture of the semiconductor vacuum cavity of the present invention during actual testing.

[0024] Figure 3 This is a schematic diagram of another partial structure of the water nozzle sealing groove position detection fixture of the semiconductor vacuum cavity of the present invention during the actual detection process.

[0025] Figure 4 This is a schematic diagram of the third partial structure of the water nozzle sealing groove position detection fixture of the semiconductor vacuum cavity of the present invention during the actual detection process.

[0026] In the picture: Checking tool body 1; Detection head 2, detection reference surface 2.1, annular detection bump 2.2; Guide hole 3; Sliding rod 4; Sensor 5; Enlarge head 6, move reference plane 6.1; Enlarged head receiving slot 7; Elastic element 8; Circular stop 9; Limit block 10; Guide rod 11; Semiconductor vacuum chamber 12; Water tap hole 13; Water tap hole sealing groove 14; Connecting hole 15. Detailed Implementation

[0027] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments: Specific Implementation Example 1, such as Figure 1 As shown, a fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity includes a fixture body 1 and a detection head 2.

[0028] The detection head 2 is located at one end of the fixture body 1 and can extend into the faucet hole 13. A detection reference surface 2.1 is provided on the end of the detection head 2 facing away from the fixture body 1. An annular detection protrusion 2.2, adapted to the faucet hole sealing groove 14, is provided on the side of the detection head 2. The two end faces of the annular detection protrusion 2.2 are parallel to the detection reference surface 2.1. The distance between the two end faces of the annular detection protrusion 2.2 is consistent with the groove width of the faucet hole sealing groove 14. The distance between the detection reference surface 2.1 and the annular detection protrusion 2.2 is consistent with the distance between the bottom surface of the faucet hole 13 and the faucet hole sealing groove 14.

[0029] In this text, the distance between the detection reference surface 2.1 and the annular detection bump 2.2 refers to the distance between the detection reference surface 2.1 and one end face of the annular detection bump 2.2 that is close to the detection reference surface 2.1.

[0030] The specific use of the water nozzle sealing groove position detection fixture for the semiconductor vacuum cavity in this embodiment is as follows. like Figure 1 , Figure 2 As shown, the inspector holds the inspection tool body 1 and inserts the inspection head 2 into the water tap hole 13, so that the inspection reference surface 2.1 is in close contact with the bottom surface of the water tap hole 13; Next, keeping the testing reference surface 2.1 in close contact with the bottom surface of the faucet hole 13, move the testing head 2 horizontally towards the side wall of the faucet hole 13, as follows. Figure 3 , Figure 4 As shown, if the annular detection protrusion 2.2 cannot enter the faucet hole sealing groove 14, then the position of the faucet hole sealing groove 14 is unqualified; if Figure 2As shown, if the annular detection protrusion 2.2 can enter the water nozzle sealing groove 14, it will drive the detection head 2 to move circumferentially along the water nozzle sealing groove 14. During this process, if the detection head 2 can move smoothly along the water nozzle sealing groove 14, the position of the water nozzle sealing groove 14 is qualified; if the detection head 2 is stuck while moving circumferentially along the water nozzle sealing groove 14, the position of the water nozzle sealing groove 14 is unqualified. Compared with the prior art of judging whether the position of the water nozzle sealing groove 14 is qualified by using a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument, this embodiment can quickly and conveniently judge whether the position of the water nozzle sealing groove 14 is qualified by using a detection fixture. Its operation is simple and convenient, without the need to use a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum cavity product onto a machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the detection efficiency, reduce the detection cost, and ensure safe and reliable operation.

[0031] Specific embodiment two, such as Figure 1 As shown, a fixture for detecting the position of a water nozzle sealing groove in a semiconductor vacuum cavity includes a fixture body 1, a guide hole 3, a sliding rod 4, an elastic element 8, a sensor 5, and a detection head 2. In this embodiment, the fixture body 1 is rod-shaped, and the detection head 2 is integrally formed with the fixture body 1.

[0032] The detection head 2 is located at one end of the fixture body 1 and can extend into the faucet hole 13. In this embodiment, the detection head 2 is cylindrical, and the annular detection protrusion 2.2 is coaxial with the detection head 2. The detection head 2 is coaxial with the fixture body 1.

[0033] The end of the detection head 2 facing away from the fixture body 1 is provided with a detection reference surface 2.1. The side of the detection head 2 is provided with an annular detection protrusion 2.2 that matches the water tap orifice sealing groove 14. The two end faces of the annular detection protrusion 2.2 are parallel to the detection reference surface 2.1. The distance between the two end faces of the annular detection protrusion 2.2 is consistent with the groove width of the water tap orifice sealing groove 14. The distance between the detection reference surface 2.1 and the annular detection protrusion 2.2 is consistent with the distance between the bottom surface of the water tap orifice 13 and the water tap orifice sealing groove 14.

[0034] In this text, the distance between the detection reference surface 2.1 and the annular detection bump 2.2 refers to the distance between the detection reference surface 2.1 and one end face of the annular detection bump 2.2 that is close to the detection reference surface 2.1.

[0035] A guide hole 3 is located inside the fixture body 1, and the axis of the guide hole 3 is perpendicular to the detection reference surface 2.1. The guide hole 3 extends into the detection head 2 and communicates with the detection reference surface 2.1. In this embodiment, the guide hole 3 is coaxial with the fixture body 1.

[0036] The sliding rod 4 is slidably disposed within the guide hole 3. A moving reference surface 6.1 is provided at one end of the sliding rod 4 near the detection reference surface 2.1. The moving reference surface is parallel to the detection reference surface 2.1.

[0037] The elastic element 8 drives the sliding rod 4 to move, so that the moving reference surface moves to the outside of the detection head 2.

[0038] Sensor 5 is used to detect or sense the position of sliding rod 4. In this text, "sensor 5 is used to detect or sense the position of sliding rod 4" means that sensor 5 is used to detect or sense the position of sliding rod 4 in the direction of guide hole 3.

[0039] The specific use of the water nozzle sealing groove position detection fixture for the semiconductor vacuum cavity in this embodiment is as follows. like Figure 1 , Figure 2 As shown, the inspector holds the inspection tool body 1 and inserts the inspection head 2 into the water tap hole 13, so that the inspection reference surface 2.1 is in close contact with the bottom surface of the water tap hole 13; Next, as Figure 2 As shown, keep the detection reference surface 2.1 close to the bottom surface of the water nozzle hole 13, and move the detection head 2 towards the side wall of the water nozzle hole 13, as follows. Figure 3 , Figure 4 As shown, if the annular detection protrusion 2.2 cannot enter the faucet hole sealing groove 14, then the position of the faucet hole sealing groove 14 is unqualified; if Figure 2 As shown, if the annular detection protrusion 2.2 can enter the water nozzle sealing groove 14, it will drive the detection head 2 to move circumferentially along the water nozzle sealing groove 14. During this process, if the detection head 2 can move smoothly along the water nozzle sealing groove 14, the position of the water nozzle sealing groove 14 is qualified; if the detection head 2 is stuck while moving circumferentially along the water nozzle sealing groove 14, the position of the water nozzle sealing groove 14 is unqualified. Compared with the prior art of judging whether the position of the water nozzle sealing groove 14 is qualified by using a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument, this embodiment can quickly and conveniently judge whether the position of the water nozzle sealing groove 14 is qualified by using a detection fixture. Its operation is simple and convenient, without the need to use a dial indicator on a machine tool or by measuring with a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum cavity product onto a machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the detection efficiency, reduce the detection cost, and ensure safe and reliable operation.

[0040] Furthermore, during the process of checking whether the position of the faucet hole sealing groove 14 is qualified, when the annular detection protrusion 2.2 can enter the faucet hole sealing groove 14, the detection head 2 will move in a ring along the faucet hole sealing groove 14. If the detection head 2 can move smoothly in a ring along the faucet hole sealing groove 14, it is possible to misjudge the position of the faucet hole sealing groove 14. Specifically, during the process of the detection head 2 moving in a ring along the faucet hole sealing groove 14, the inspector cannot guarantee or identify whether the detection reference surface 2.1 is always in close contact with the bottom surface of the faucet hole 13. If the distance between the faucet hole sealing groove 14 and the bottom surface of the faucet hole 13 is inconsistent in different parts of the circumferential direction, the detection reference surface 2.1 will separate from the bottom surface of the faucet hole 13 during the process of the detection head 2 moving in a ring along the faucet hole sealing groove 14. Thus, even if the detection head 2 can move smoothly in a ring along the faucet hole sealing groove 14, the position of the faucet hole sealing groove 14 is not qualified. To address this issue and improve accuracy, this embodiment improves the detection fixture for the water tap orifice sealing groove 14 position. Specifically, When the detection reference surface 2.1 is in close contact with the bottom surface of the faucet hole 13, the moving reference surface on the sliding rod 4 is also in close contact with the bottom surface of the faucet hole 13, and the moving reference surface and the detection reference surface 2.1 are on the same plane. If the detection reference surface 2.1 remains in close contact with the bottom surface of the faucet hole 13 during the circular movement of the detection head 2 along the faucet hole sealing groove 14, the position of the sliding rod 4 will not change (in this text, "the position of the sliding rod 4 will not change" means that the position of the sliding rod 4 in the direction of the guide hole 3 will not change). Therefore, if the detection head 2 can move smoothly along the faucet hole sealing groove 14 and the position of the sliding rod 4 does not change, it means that the position of the faucet hole sealing groove 14 is qualified. If the sensor 5 detects or senses a change in the position of the sliding rod 4 (in this text, "the sensor 5 detects or senses a change in the position of the sliding rod 4" means that the sensor 5 detects or senses a change in the position of the sliding rod 4 in the direction of the guide hole 3), it means that the detection reference surface 2.1 is separated from the bottom surface of the faucet hole 13, and the position of the faucet hole sealing groove 14 is unqualified. In this way, it is possible to determine whether the distance between the various parts of the water nozzle sealing groove 14 in the circumferential direction and the bottom surface of the water nozzle 13 is consistent, thereby further improving the accuracy of determining whether the position of the water nozzle sealing groove 14 is qualified.

[0041] In this embodiment, as Figure 1 , Figure 2 As shown, an enlarged head 6 is provided at one end of the sliding rod 4 near the detection reference surface 2.1. The enlarged head 6 is in the shape of a circular plate and is coaxial with the sliding rod 4. The end face of the enlarged head 6 facing away from the sliding rod 4 constitutes the moving reference surface 6.1. An enlarged head receiving groove 7 is provided on the detection reference surface 2.1, and the guide hole 3 is connected to the bottom surface of the enlarged head receiving groove, so that the enlarged head 6 can be accommodated in the enlarged head receiving groove 7.

[0042] like Figure 2As shown, the sidewall of the semiconductor vacuum chamber 12 has several water nozzle holes 13, and the inner surface of each water nozzle hole 13 is provided with a water nozzle hole sealing groove 14. The bottom surface of the water nozzle hole 13 has a connecting hole 15 that connects to the inner cavity of the semiconductor vacuum chamber. In this embodiment, the outer diameter of the enlarged head 6 is larger than the inner diameter of the connecting hole. Thus, when the detection reference surface 2.1 is in close contact with the bottom surface of the water nozzle hole 13, the sliding rod can be prevented from being inserted into the connecting hole 15.

[0043] In this embodiment, sensor 5 is used to detect or sense the position of sliding rod 4. Specifically, In one embodiment, sensor 5 is disposed at the bottom of the enlarged head receiving groove 7. Sensor 5 is a pressure sensor. When the moving reference surface and the detection reference surface 2.1 are on the same plane, the enlarged head 6 presses against the sensor 5. When the moving reference surface moves to the outside of the detection head 2, the enlarged head 6 separates from the sensor 5. During the circumferential movement of the detection head 2 along the faucet hole sealing groove 14, if the detection reference surface 2.1 always remains in close contact with the bottom surface of the faucet hole 13, then the moving reference surface and the detection reference surface 2.1 are always on the same plane, and the enlarged head 6 remains in close contact with the sensor 5; therefore, during the circumferential movement of the detection head 2 along the faucet hole sealing groove 14, if the sensor 5 always senses the enlarged head 6 pressing against the sensor 5, it indicates that during the circumferential movement of the detection head 2 along the faucet hole sealing groove 14, the detection reference surface 2.1 always remains in close contact with the bottom surface of the faucet hole 13. During the circular movement of the detection head 2 along the water nozzle sealing groove 14, if the detection reference surface 2.1 separates from the bottom surface of the water nozzle 13, the sliding rod 4 will remain against the bottom surface of the water nozzle 13 under the action of the elastic element 8, thereby separating the enlarged head 6 from the sensor 5. Therefore, when the sensor 5 always senses the separation between the enlarged head 6 and the sensor 5, it indicates that the detection reference surface 2.1 separates from the bottom surface of the water nozzle 13 during the circular movement of the detection head 2 along the water nozzle sealing groove 14.

[0044] In another implementation, such as Figure 1As shown, sensor 5 is a displacement sensor. Displacement sensor 5 detects the displacement stroke of sliding rod 4 along the direction of guide hole 3. For example, displacement sensor 5 detects the displacement stroke of enlarged head 6 along the direction of guide hole 3, or displacement sensor 5 detects the displacement stroke of sliding rod 4 itself along the direction of guide hole 3. During the annular movement of detection head 2 along water nozzle sealing groove 14, if detection reference surface 2.1 always remains in close contact with the bottom surface of water nozzle 13, then the moving reference surface and detection reference surface 2.1 are always on the same plane, and displacement sensor 5 can detect that the position of sliding rod 4 does not change (i.e., the displacement stroke of sliding rod 4 along the direction of guide hole 3 is zero). Therefore, during the annular movement of detection head 2 along water nozzle sealing groove 14, if displacement sensor 5 detects that the displacement stroke of sliding rod 4 along the direction of guide hole 3 is zero, it indicates that during the annular movement of detection head 2 along water nozzle sealing groove 14, detection reference surface 2.1 always remains in close contact with the bottom surface of water nozzle 13. During the circular movement of the detection head 2 along the water nozzle sealing groove 14, if the detection reference surface 2.1 separates from the bottom surface of the water nozzle 13, the sliding rod 4 will remain against the bottom surface of the water nozzle 13 under the action of the elastic element 8. In this way, the displacement sensor 5 will detect the displacement stroke of the sliding rod 4 along the direction of the guide hole 3, thereby determining the distance at which the detection reference surface 2.1 separates from the bottom surface of the water nozzle 13 during the circular movement of the detection head 2 along the water nozzle sealing groove 14.

[0045] Furthermore, such as Figure 1 As shown, the guide hole 3 is open at both ends. An annular stop block 9 is provided inside the guide hole 3. A guide rod 11 is provided at one end of the sliding rod 4 opposite to the moving reference surface. The guide rod 11 is parallel to or coaxial with the sliding rod 4, passes through the annular stop block 9, and has a limiting block 10. The sliding rod 4 and the limiting block 10 are located on opposite sides of the annular stop block 9. An elastic element 8 is located between the sliding rod 4 and the annular stop block 9. The limiting block 10 abuts against the annular stop block 9 under the action of the elastic element 8. In this embodiment, the elastic element 8 is a spring, which is sleeved on the guide rod 11.

[0046] Specific embodiment three: a detection method using a locator for detecting the position of a water tap hole sealing groove in a semiconductor vacuum cavity. The specific structure of the locator for detecting the position of a water tap hole sealing groove in the semiconductor vacuum cavity in this method is as described in specific embodiment one or specific embodiment two.

[0047] A detection method for a water tap orifice sealing groove position detection fixture using a semiconductor vacuum cavity includes the following steps: First, such as Figure 2 As shown, the detection head 2 is inserted into the water nozzle hole 13 on the side wall of the semiconductor vacuum cavity, so that the detection reference surface 2.1 is in close contact with the bottom surface of the water nozzle hole 13.

[0048] Second, such as Figure 2As shown, keep the detection reference surface 2.1 close to the bottom surface of the water nozzle hole 13, and move the detection head 2 towards the side wall of the water nozzle hole 13, as follows. Figure 3 , Figure 4 As shown, if the annular detection protrusion 2.2 cannot enter the water tap hole sealing groove 14, it indicates that the position of the water tap hole sealing groove 14 is unqualified. Figure 3 The distance between the sealing groove 14 of the water faucet hole and the bottom surface of the water faucet hole is greater than the set value. Figure 4 The distance between the sealing groove 14 of the water faucet hole and the bottom surface of the water faucet hole is less than the set value.

[0049] like Figure 2 As shown, if the annular detection protrusion 2.2 can enter the water faucet hole sealing groove 14, it will drive the detection head 2 to move in annularly along the water faucet hole sealing groove 14. During this process, if the detection head 2 can move smoothly along the water faucet hole sealing groove 14, the position of the water faucet hole sealing groove 14 is qualified; if the detection head 2 is stuck when moving in annularly along the water faucet hole sealing groove 14, the position of the water faucet hole sealing groove 14 is unqualified.

[0050] Compared with the existing technology of determining whether the position of the water nozzle orifice sealing groove 14 is qualified by using a machine tool dial indicator or a three-dimensional measuring instrument, this embodiment can quickly and conveniently determine whether the position of the water nozzle orifice sealing groove 14 is qualified by using a testing fixture. The operation is simple and convenient, and there is no need to use a machine tool dial indicator or a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum chamber product onto the machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the testing efficiency, reduce the testing cost, and ensure safe and reliable operation.

[0051] Specific embodiment four: a detection method using a locator for detecting the position of a water nozzle sealing groove in a semiconductor vacuum cavity. The specific structure of the locator for detecting the position of a water nozzle sealing groove in a semiconductor vacuum cavity in this method is as described in specific embodiment two.

[0052] A detection method for a water tap orifice sealing groove position detection fixture using a semiconductor vacuum cavity includes the following steps: First, such as Figure 2 As shown, the detection head 2 is inserted into the faucet hole 13, so that the detection reference surface 2.1 is in close contact with the bottom surface of the faucet hole 13. When the detection reference surface 2.1 is in close contact with the bottom surface of the faucet hole 13, the moving reference surface on the sliding rod 4 is also in close contact with the bottom surface of the faucet hole 13, and the moving reference surface and the detection reference surface 2.1 are on the same plane.

[0053] Second, keeping the testing reference surface 2.1 in close contact with the bottom surface of the faucet hole 13, move the testing head 2 horizontally towards the side wall of the faucet hole 13, such as... Figure 3 , Figure 4 As shown, if the annular detection protrusion 2.2 cannot enter the faucet hole sealing groove 14, it indicates that the position of the faucet hole sealing groove 14 is unqualified. Figure 3The distance between the sealing groove 14 of the water faucet hole and the bottom surface of the water faucet hole is greater than the set value. Figure 4 The distance between the sealing groove 14 of the water faucet hole and the bottom surface of the water faucet hole is less than the set value.

[0054] like Figure 2 As shown, if the annular detection protrusion 2.2 can enter the water faucet hole sealing groove 14, it will drive the detection head 2 to move in annularly along the water faucet hole sealing groove 14. During this process, the position of the sliding rod 4 is detected or sensed by the sensor 5. If the detection head 2 can move smoothly along the water faucet hole sealing groove 14, and the sensor 5 detects or senses that the position of the sliding rod 4 has not changed (in the text, the sensor 5 detects or senses that the position of the sliding rod 4 has not changed, which means that the sensor 5 detects or senses that the position of the sliding rod 4 in the direction of the guide hole 3 has not changed), then it is indicated that the position of the water faucet hole sealing groove 14 is qualified.

[0055] If sensor 5 detects or senses a change in the position of sliding rod 4 (in this text, "sensor 5 detects or senses a change in the position of sliding rod 4" means that sensor 5 detects or senses a change in the position of sliding rod 4 in the direction of guide hole 3), it indicates that the position of faucet hole sealing groove 14 is unqualified. (Even if the detection head 2 can move smoothly along faucet hole sealing groove 14, as long as sensor 5 detects or senses a change in the position of sliding rod 4, it indicates that the position of faucet hole sealing groove 14 is unqualified). In this embodiment, the specific method by which sensor 5 detects or senses the position of sliding rod 4 is as described in Specific Embodiment Two.

[0056] Compared with the existing technology of determining whether the position of the water nozzle orifice sealing groove 14 is qualified by using a machine tool dial indicator or a three-dimensional measuring instrument, this embodiment can quickly and conveniently determine whether the position of the water nozzle orifice sealing groove 14 is qualified by using a testing fixture. The operation is simple and convenient, and there is no need to use a machine tool dial indicator or a three-dimensional measuring instrument. Therefore, it is not necessary to hoist the semiconductor vacuum chamber product onto the machine tool or three-dimensional measuring equipment during measurement, which can effectively improve the testing efficiency, reduce the testing cost, and ensure safe and reliable operation.

[0057] On the other hand, during the circumferential movement of the detection head 2 along the faucet hole sealing groove 14, the inspector cannot guarantee, nor can they easily identify, whether the detection reference surface 2.1 remains in close contact with the bottom surface of the faucet hole 13. If the distance between the faucet hole sealing groove 14 and the bottom surface of the faucet hole 13 is inconsistent in different parts of the circumference, the detection reference surface 2.1 will separate from the bottom surface of the faucet hole 13 during the circumferential movement of the detection head 2 along the faucet hole sealing groove 14. Thus, even if the detection head 2 can move smoothly along the faucet hole sealing groove 14, the position of the faucet hole sealing groove 14 will be unqualified. To solve this problem and improve the accuracy of judgment, this embodiment improves the faucet hole sealing groove 14 position detection fixture. Specifically, When the detection reference surface 2.1 is in close contact with the bottom surface of the faucet hole 13, the moving reference surface on the sliding rod 4 is also in close contact with the bottom surface of the faucet hole 13, and the moving reference surface and the detection reference surface 2.1 are on the same plane. If the detection reference surface 2.1 remains in close contact with the bottom surface of the faucet hole 13 during the circumferential movement of the detection head 2 along the faucet hole sealing groove 14, the position of the sliding rod 4 will not change. Therefore, if the detection head 2 can move smoothly along the faucet hole sealing groove 14 and the position of the sliding rod 4 does not change, it indicates that the position of the faucet hole sealing groove 14 is qualified. If the sensor 5 detects or senses a change in the position of the sliding rod 4, it indicates that the detection reference surface 2.1 is separated from the bottom surface of the faucet hole 13, and the position of the faucet hole sealing groove 14 is unqualified. In this way, it is possible to determine whether the distance between the various parts of the faucet hole sealing groove 14 in the circumferential direction and the bottom surface of the faucet hole 13 is consistent, further effectively improving the accuracy of determining whether the position of the faucet hole sealing groove 14 is qualified.

[0058] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any simple modifications, alterations, and equivalent transformations made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A fixture for detecting the position of a sealing groove in a water nozzle of a semiconductor vacuum cavity, characterized in that, include: Checking tool body; The detection head is located at one end of the fixture body and can extend into the faucet hole. The end of the detection head facing away from the fixture body is provided with a detection reference surface. The side of the detection head is provided with an annular detection protrusion that is adapted to the sealing groove of the faucet hole. The two end faces of the annular detection protrusion are parallel to the detection reference surface. The distance between the detection reference surface and the annular detection protrusion is the same as the distance between the bottom surface of the faucet hole and the sealing groove of the faucet hole.

2. The water nozzle sealing groove position detection fixture for a semiconductor vacuum cavity according to claim 1, characterized in that it further includes... include: A guide hole is located inside the fixture body, with its axis perpendicular to the detection reference surface. The guide hole extends into the detection head and communicates with the detection reference surface. The sliding rod is slidably disposed in the guide hole, and a moving reference surface is provided at one end of the sliding rod near the detection reference surface. The moving reference surface is parallel to the detection reference surface. The elastic element drives the sliding rod to move, causing the moving reference surface to move to the outside of the detection head; The sensor detects or senses the position of the sliding rod.

3. The fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity according to claim 2, characterized in that, An enlarged head is provided at one end of the sliding rod near the detection reference surface. The end face of the enlarged head facing away from the sliding rod constitutes the moving reference surface. An enlarged head receiving groove is provided on the detection reference surface. The guide hole is connected to the bottom surface of the enlarged head receiving groove, and the enlarged head can be accommodated in the enlarged head receiving groove.

4. The water nozzle sealing groove position detection fixture for a semiconductor vacuum cavity according to claim 3, characterized in that, The sensor is located at the bottom of the enlarged head receiving groove; When the moving reference plane and the detection reference plane are on the same plane, the enlarged head presses against the sensor; when the moving reference plane moves to the outside of the detection head, the enlarged head separates from the sensor.

5. The fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity according to claim 2, 3, or 4, characterized in that, The guide hole is open at both ends and has an annular stop block inside. A guide rod is provided at one end of the sliding rod opposite to the moving reference surface. The guide rod is parallel or coaxial with the sliding rod and passes through the annular stop block. A limiting block is provided on the guide rod. The sliding rod and the limiting block are located on opposite sides of the annular stop block. The elastic element is located between the sliding rod and the annular stop block. The limiting block abuts against the annular stop block under the action of the elastic element.

6. The fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity according to claim 2 or 3, characterized in that, The sensor is a displacement sensor, which detects the displacement stroke of the sliding rod along the direction of the guide hole.

7. The fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity according to claim 1, 2, or 3, characterized in that, The detection head is cylindrical, and the annular detection protrusion is coaxial with the detection head.

8. The fixture for detecting the position of the water nozzle sealing groove in a semiconductor vacuum cavity according to claim 1, 2, or 3, characterized in that, The inspection fixture body is rod-shaped, and the detection head and the inspection fixture body are integrally formed.

9. A detection method using a water nozzle sealing groove position detection fixture of any one of claims 1-8 in a semiconductor vacuum cavity, characterized in that, Includes the following steps, First, insert the testing head into the faucet hole so that the testing reference surface is in close contact with the bottom surface of the faucet hole; Second, keep the test reference surface close to the bottom surface of the faucet hole, and move the test head horizontally towards the side wall of the faucet hole. If the annular test protrusion cannot enter the faucet hole sealing groove, the position of the faucet hole sealing groove is unqualified. If the annular detection protrusion can enter the faucet hole sealing groove, it will drive the detection head to move in annularly along the faucet hole sealing groove. During this process, if the detection head can move smoothly along the faucet hole sealing groove, the position of the faucet hole sealing groove is qualified; if the detection head is stuck when moving in annularly along the faucet hole sealing groove, the position of the faucet hole sealing groove is unqualified.

10. The detection method of the water nozzle sealing groove position detection fixture using a semiconductor vacuum cavity according to claim 9, characterized in that, In the first step, when the detection reference surface is in close contact with the bottom surface of the water nozzle hole, the moving reference surface on the sliding rod is also in close contact with the bottom surface of the water nozzle hole, and the moving reference surface and the detection reference surface are on the same plane; In the second step, if the annular detection protrusion can enter the faucet hole sealing groove, the detection head will move in annularly along the faucet hole sealing groove. During this process, the sensor will detect or sense the position of the sliding rod. If the sensor detects or senses a change in the position of the sliding rod, it indicates that the position of the faucet hole sealing groove is unqualified; if the sensor detects or senses no change in the position of the sliding rod, it indicates that the position of the faucet hole sealing groove is qualified.

Images