A device for measuring the rotatable amount of warping of a large-size thin film product

Abstract

The application provides a device for measuring the rotatable amount of warping of a large-size thin film product, which is fast and efficient, ensures accurate and reliable measurement, and ensures that the surface of the large-size thin film product is not scratched. The device comprises an optical glass plate, a carrier plate, a toothless rotary bearing comprising an inner ring, an outer ring, and a bottom plate. The optical glass plate is square in shape, is laid flat on the upper surface of the carrier plate, and is centrally positioned. The lower surface of the carrier plate is fixedly connected to the inner ring at the central position, and the lower surface of the outer ring is fixedly connected to the upper surface of the bottom plate at the corresponding position of the central region.

Description

Technical Field

[0001] The present invention relates to the technical field of warpage measurement of thin film products, specifically to a device for rotatable measurement of warpage of large-size thin film products. Background Technology

[0002] Before large-size thin-film products are manufactured or put into the next process, their warpage needs to be tested. The existing measurement method is to position the large-size thin-film product by adsorption using an optical glass plate, and then manually measure the warpage of each of the four sides of the thin-film product by using a gauge. In practice, because the optical glass plate is fixed in position, manual measurement of warpage is required around the four sides of the large-size thin-film product. During the process, the manual movement of the gauge can easily cause the gauge to touch the thin-film product, which can scratch it. Furthermore, the manual movement of the gauge can lead to inaccurate measurements. Moreover, because the product is large, the overall measurement efficiency is relatively low. Therefore, there is an urgent need to develop a device for measuring the warpage of large-size thin-film products. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a device for measuring the warpage of large-size thin-film products by rotation. This device enables rapid and efficient measurement while ensuring accurate and reliable measurement, and also prevents scratches on the surface of large-size thin-film products.

[0004] A device for measuring the warpage and rotatability of large-size thin-film products, characterized in that it comprises: Optical glass plate; Carrier plate; A gearless slewing bearing, comprising an inner ring and an outer ring; And the base plate; The optical glass plate is square in shape and is laid flat on the upper surface of the carrier plate with its center aligned. The inner ring is fixed to the center of the lower surface of the carrier plate, and the lower surface of the outer ring is fixed to the corresponding position of the center area of ​​the upper surface of the base plate.

[0005] Its further features are: The carrier plate is a square shape that expands outward from the four sides of the optical glass plate. At least two sets of upward convex positioning posts are provided on the inner side of each side of the upper surface of the carrier plate. The inner area of ​​the carrier plate after all the upward convex positioning posts are combined is the optical glass plate placement area. The optical glass plate is placed in the optical glass plate placement area, and the corresponding side of the optical glass plate is arranged close to the upward convex positioning posts, which ensures that the positioning of the optical glass plate is quick and convenient. The apex of the convex positioning post is lower than the upper surface of the optical glass plate, ensuring that large-size thin film products are reliably placed on the upper surface of the optical glass plate; Two sets of upwardly protruding positioning posts are provided on the inner side of each side of the upper surface of the carrier plate. Each set of upwardly protruding positioning posts is located in the middle area of ​​each side of the corresponding side, which makes the positioning of the optical glass plate accurate and reliable. Preferably, the carrier plate extends outward by 5-10 mm on each side relative to the optical glass plate; The apex of the convex positioning post is 2-3 mm lower than the upper surface of the optical glass plate; The optical glass plate has an array of suction holes arranged in a specific pattern. The suction holes penetrate the thickness of the optical glass plate. The upper surface of the carrier plate has several concave suction grooves arranged in a specific pattern. The concave suction grooves are used to connect with the suction holes. In the working state, one end of the concave suction groove is used to draw air, thereby enabling the suction holes to complete the adsorption and positioning of large-size thin film products placed on the upper surface of the optical glass plate. The position of the convex positioning post is set to avoid the concave air intake groove; The four corners of the optical glass plate and the carrier plate are all rounded. The base plate is equipped with foot pads at the four corners of its bottom, which makes the entire device easy to transport.

[0006] With this invention, a linear drive device is set on one side of the device, with the travel direction of the linear drive device parallel to the corresponding side of the device. The plug gauge is fixed to the output end of the linear drive device. After the large-size film product is placed on the optical glass plate and adsorption positioning is completed, the detection end of the plug gauge is adjusted to correspond to the starting end of one side of the large-size film product. Then, the linear drive device drives the plug gauge to move and complete the warp measurement on both sides of one side of the product. After that, the plug gauge leaves the detection area, and then the optical glass plate is rotated 90° to measure the warp on the other side. This process continues until the warp of all four sides of the large-size film product is measured. In the entire measurement process, only the optical glass plate and the carrier plate need to be rotated, without the need for manual movement of the plug gauge, which improves the measurement efficiency. Moreover, during the measurement, the measurement can be completed by the reciprocating linear movement of the linear drive device. The plug gauge will not deviate from the path, which ensures accurate and reliable measurement and also ensures that the surface of the large-size film product is not scratched. Attached Figure Description

[0007] Figure 1 This is a perspective view of the present invention; Figure 2 is an exploded perspective view of the present invention; The names corresponding to the serial numbers in the diagram are as follows: Upper convex positioning post 1; Optical glass plate 10, air intake hole 11, carrier plate 20, concave air intake groove 21, toothless rotary bearing 30, inner ring 31, outer ring 32, base plate 40, foot pad 50. Detailed Implementation

[0008] A device for measuring the warpage of large-size thin film products, characterized in that it comprises an optical glass plate 10, a carrier plate 20, a toothless rotary bearing 30, and a base plate 40. The gearless slewing bearing 30 includes an inner ring 31 and an outer ring 32; The optical glass plate 10 is square in shape. The optical glass plate 10 is laid flat on the upper surface of the carrier plate 20 and centered. The inner ring 31 is fixed to the center of the lower surface of the carrier plate 20, and the lower surface of the outer ring 32 is fixed to the corresponding position of the center area of ​​the upper surface of the base plate 40.

[0009] In specific implementation, the carrier plate 20 is a square shape that expands outward from the four sides of the optical glass plate 10. Two sets of upward convex positioning posts 1 are provided on the inner side of each side of the upper surface of the carrier plate 20. Each set of upward convex positioning posts 1 is located in the middle area of ​​each side of the corresponding side. The inner area of ​​the carrier plate after all the upward convex positioning posts 1 are combined is the optical glass plate placement area. The optical glass plate 10 is placed in the optical glass plate placement area, and the corresponding side of the optical glass plate 10 is arranged close to the upward convex positioning posts 1, which ensures that the positioning of the optical glass plate 10 is quick and convenient.

[0010] In a specific embodiment, the vertex of the convex positioning post 1 is 2-3 mm lower than the upper surface of the optical glass plate 10, ensuring that the large-size thin film product is reliably placed on the upper surface of the optical glass plate 10. The carrier plate 20 is extended outward by 5-10 mm on each side relative to the optical glass plate 10.

[0011] To ensure the adsorption function, an array of suction holes 11 are arranged on the optical glass plate 10. The suction holes 11 penetrate the thickness of the optical glass plate 10, and the diameter of each suction hole 11 is 3mm. Several concave suction grooves 21 are arranged on the upper surface of the carrier plate 20. The concave suction grooves 21 are used to connect the suction holes 11. In the working state, air is drawn from one end of the concave suction groove 21, so that the suction holes 11 can complete the adsorption and positioning of large-sized thin film products placed on the upper surface of the optical glass plate 10. It is not necessary for each suction hole 11 to connect to the concave suction groove; it is only necessary to ensure that each concave suction groove 21 connects to the suction hole 11 in the corresponding area.

[0012] In practice, the position of the convex positioning post 1 is set to avoid the concave suction groove 21.

[0013] In practice, the four corners of the optical glass plate 10, the carrier plate 20, and the base plate 40 are all rounded.

[0014] In practice, foot pads 50 are provided at the four corners of the bottom of the base plate 40, which makes the entire device easy to transport.

[0015] During operation, a linear drive device is installed on one side of the device, with its travel direction parallel to the corresponding side of the device. The plug gauge is fixed to the output end of the linear drive device. After the large-size film product is placed on the optical glass plate and adsorbed and positioned, the detection end of the plug gauge is adjusted to correspond to the starting end of one side of the large-size film product. Then, the linear drive device drives the plug gauge to move and complete the measurement of the warp on both sides of one side of the product. After that, the plug gauge leaves the detection area, and then the optical glass plate is rotated 90° to measure the warp on the other side. This process continues until the warp on all four sides of the large-size film product is measured. Throughout the measurement process, only the optical glass plate and the carrier plate need to be rotated, without the need for manual movement of the plug gauge, which improves the measurement efficiency. During measurement, the measurement can be completed by the reciprocating linear movement of the linear drive device, and the plug gauge will not deviate from the path, ensuring accurate and reliable measurement while preventing scratches on the surface of the large-size film product.

[0016] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0017] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A device for measuring the warpage of large-size thin-film products by rotation, characterized in that, It includes: Optical glass plate; Carrier plate; A gearless slewing bearing, comprising an inner ring and an outer ring; And the base plate; The optical glass plate is square in shape and is laid flat on the upper surface of the carrier plate with its center aligned. The inner ring is fixed to the center of the lower surface of the carrier plate, and the lower surface of the outer ring is fixed to the corresponding position of the center area of ​​the upper surface of the base plate.

2. The device for measuring the warpage of large-size thin-film products according to claim 1, characterized in that: The carrier plate is a square shape that expands outward from the four sides of the optical glass plate. At least two sets of upward convex positioning posts are provided on the inner side of each side of the upper surface of the carrier plate. The inner area of ​​the carrier plate after all the upward convex positioning posts are combined is the optical glass plate placement area. The optical glass plate is placed in the optical glass plate placement area, and the corresponding side of the optical glass plate is arranged close to the upward convex positioning posts.

3. The device for measuring the warpage of large-size thin-film products according to claim 2, characterized in that: The apex of the convex positioning post is lower than the upper surface of the optical glass plate.

4. The device for measuring the warpage of large-size thin-film products according to claim 2, characterized in that: Two sets of upwardly protruding positioning posts are provided on the inner side of each side of the upper surface of the carrier plate, and each set of upwardly protruding positioning posts is located in the middle area of ​​each side of the corresponding side.

5. The device for measuring the warpage of large-size thin-film products according to claim 2, characterized in that: The carrier plate extends outward by 5-10 mm on each side relative to the optical glass plate.

6. The device for measuring the warpage of large-size thin-film products according to claim 3, characterized in that: The apex of the convex positioning post is 2-3 mm lower than the upper surface of the optical glass plate.

7. The device for measuring the warpage of large-size thin-film products according to claim 2, characterized in that: The optical glass plate has an array of suction holes arranged in a specific pattern, and the suction holes penetrate the thickness of the optical glass plate. The upper surface of the carrier plate has several concave suction grooves arranged in a specific pattern, which are used to connect with the suction holes. In the working state, one end of the concave suction groove is used to draw air.

8. The device for measuring the warpage of large-size thin-film products according to claim 7, characterized in that: The position of the convex positioning post is set to avoid the concave air intake groove.

9. The device for measuring the warpage of large-size thin-film products according to claim 1, characterized in that: The four corners of the optical glass plate and the carrier plate are all rounded.

10. The device for measuring the warpage of large-size thin film products according to claim 1, characterized in that: Foot pads are provided at the four corners of the bottom of the base plate.

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