An online detection device for infrared heating deformation of quartz tubes used in semiconductors

Abstract

This invention relates to the field of semiconductor quartz product testing technology, and discloses an online infrared heating deformation detection device for semiconductor quartz tubes. The device includes a base, on which a detection slide is slidably mounted. The quartz tube to be tested is positioned transversely above the base and can rotate around its own axis. The direction of movement of the detection slide is consistent with the axial direction of the quartz tube. An infrared heating assembly and a detection mounting bracket are mounted on the detection slide. This online infrared heating deformation detection device for semiconductor quartz tubes, by moving the detection slide along the axial direction of the quartz tube and cooperating with the rotation of the quartz tube, allows the detection light to sequentially correspond to different axial positions and circumferential areas, verifying abnormal changes in the surface detection lines. This improves the stability, identification ability, and verifiability of deformation detection results for transparent quartz tubes during infrared heating.

Description

Technical Field

[0001] This invention relates to the field of semiconductor quartz product testing technology, and in particular to an online detection device for infrared heating deformation of semiconductor quartz tubes. Background Technology

[0002] Quartz tubes used in semiconductor manufacturing typically possess high purity and light transmittance. During high-temperature processing, thermal handling, or performance testing, a certain heat load needs to be applied to the quartz tubes to observe whether they undergo localized sagging, bending, radial dimensional changes, or other geometrical transformations under heat. Existing testing methods usually involve dimensional measurements before and after heating the quartz tube, or using non-contact testing equipment such as cameras or laser rangefinders to capture the external contour of the quartz tube, and then determining the thermal deformation of the quartz tube based on the differences in the contour before and after heating.

[0003] However, because semiconductor quartz tubes have transparent walls, when detection light shines on the surface of the quartz tube, it is easy to generate reflection, transmission and refraction simultaneously. The equipment structure behind the quartz tube, ambient light and stray light generated by the heating area may also enter the detection field of view through the tube wall, reducing the distinction between the detection light formed on the surface of the quartz tube and the background. At the same time, during the continuous rotation and infrared heating of the quartz tube, it is necessary to continuously detect the deformation state of different circumferential areas and different axial positions. Contour detection in a single direction or at a single position is difficult to stably reflect the generation and change of local deformation during the heating process of the quartz tube, which can easily cause unstable detection line extraction and reduced accuracy of thermal deformation judgment. Summary of the Invention

[0004] The technical problem to be solved by the present invention is that the existing technology has the disadvantage of insufficient stability in online detection of heat deformation of transparent quartz tubes. To this end, we propose an online detection device for infrared heating deformation of semiconductor quartz tubes.

[0005] To achieve the above objectives, this application adopts the following technical solution: an online infrared heating deformation detection device for semiconductor quartz tubes, comprising a base, a detection slide slidably disposed on the base, a quartz tube to be detected being laterally disposed above the base and capable of rotating around its own axis, the movement direction of the detection slide being consistent with the axial direction of the quartz tube to be detected; an infrared heating component and a detection mounting frame are disposed on the detection slide, the infrared heating component being disposed towards the quartz tube to be detected and used to infrared heat the quartz tube to be detected during rotation; a detection light source and a beam shaping component located on the light-emitting side of the detection light source are disposed on the detection mounting frame, the beam shaping component being used to shape the detection light output from the detection light source into a detection line that intersects with the outer surface of the quartz tube to be detected. The light-measuring plane; the detection mounting bracket is also provided with a positioning ring corresponding to the detection line, and a vision sensor is provided on the positioning ring. Light-shielding rings are respectively provided on both sides of the positioning ring. The acquisition area of ​​the vision sensor is located between the two light-shielding rings, used to acquire the morphological changes of the detection line during the rotation of the quartz tube under test; an end-face annular auxiliary light source is correspondingly provided at the end of the quartz tube under test. The end-face annular auxiliary light source is used to couple auxiliary light with distinguishable spectral characteristics to the tube wall of the quartz tube under test, so as to form an auxiliary optical background for the vision sensor to identify the effective area of ​​the quartz tube under test; the detection slide moves along the axial direction of the quartz tube under test, so that the infrared heating component and the detection light plane sequentially correspond to different axial detection positions of the quartz tube under test.

[0006] Preferably, the infrared heating assembly includes two infrared heating parts arranged facing different circumferential regions of the quartz tube to be tested, so as to perform infrared heating on different circumferential regions of the quartz tube to be tested during rotation.

[0007] Preferably, the beam shaping component includes a collimating optics section and a linear beam shaping section. The collimating optics section is used to reduce the divergence of the detection light, and the linear beam shaping section is used to spread the detection light along a predetermined direction to form the detection light plane.

[0008] Preferably, the two light-shielding rings are disposed on both sides of the detection line and spaced apart from the quartz tube to be tested, and the field of view of the visual sensor is directed toward the area of ​​the detection line between the two light-shielding rings.

[0009] Preferably, the annular auxiliary light source on the end face corresponds to and is spaced apart from the annular end face of the quartz tube to be tested, so that the auxiliary light is coupled into the quartz tube wall from the annular end face.

[0010] Preferably, the detection slide is provided with multiple axial detection positions corresponding to the quartz tube to be tested, and the vision sensor is used to collect the detection lines before and after infrared heating at the same axial detection position, so as to characterize thermal deformation according to the positional or linear changes of the detection lines.

[0011] Preferably, a prism is provided inside the cavity of the quartz tube to be tested. The prism is connected to an adjusting rod that extends into the cavity along the axial direction of the quartz tube to be tested and is spaced apart from the inner wall of the quartz tube to be tested.

[0012] Preferably, the prism has a refractive working surface and a light-blocking surface, and the adjusting rod is used to drive the prism to rotate, so that the prism switches between a refractive state that changes the propagation direction of the transmitted detection light and a light-blocking state that blocks the transmitted detection light.

[0013] Preferably, one side of the positioning ring is provided with a light spot position scale located on the light path of the prism, and a light spot receiver is provided facing the light spot position scale.

[0014] Preferably, the detection light passing through the wall of the quartz tube to be tested is projected onto the light spot position scale after the propagation direction is changed by the prism. The light spot receiver is used to obtain the change in the landing point of the detection light relative to the predetermined reference position, so as to verify the change in the detection line obtained by the vision sensor.

[0015] The technical effects and advantages of this invention are as follows: In this invention, by moving the detection slide along the axial direction of the quartz tube to be tested, and cooperating with the rotation of the quartz tube itself, the detection light can sequentially correspond to different axial positions and circumferential areas, continuously acquiring the deformation state of the quartz tube during infrared heating. The detection light source forms a detection light plane through a beam shaping component, and forms detection lines on the surface of the quartz tube that can be recognized by a visual sensor. The thermal deformation of the quartz tube is characterized by the position and shape changes of the detection lines. An end-face ring auxiliary light source couples auxiliary light with distinguishable spectral characteristics from the detection light from the end of the quartz tube to the tube wall, improving the distinction between the corresponding area of ​​the transparent quartz tube and the external background. Combined with a light-shielding ring, the influence of ambient light and stray light on visual acquisition is reduced. Furthermore, the changes in the landing point of the transmitted detection light are acquired through a prism, a light spot position scale, and a light spot receiver to verify the abnormal changes of the surface detection lines, thereby improving the deformation detection stability, identification ability, and verifiability of the transparent quartz tube for semiconductors during infrared heating. Attached Figure Description

[0016] The disclosure of this invention is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this invention. In the drawings, the same reference numerals are used to refer to the same parts: Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a three-dimensional structural diagram of the present invention; Figure 3 This is a schematic diagram of the structure of the detection slide and the quartz tube to be tested according to the present invention; Figure 4 This is a schematic diagram of the structure of the quartz tube to be tested and the annular auxiliary light source at the end face in this invention; Figure 5 This is a schematic diagram of the positioning ring and vision sensor of the present invention; Figure 6 This is a schematic diagram of the structure of the light spot receiver and the light spot position scale of the present invention; Figure 7 This is a schematic diagram of the light refraction state according to the present invention.

[0017] Legend: 1. Base; 2. Detection slide; 3. Quartz tube to be tested; 4. Infrared heating assembly; 5. End face ring auxiliary light source; 6. Detection mounting bracket; 7. Detection light source; 8. Beam shaping component; 9. Positioning ring; 10. Vision sensor; 11. Light shielding ring; 12. Spot receiver; 13. Spot position scale; 14. Prism; 15. Adjustment rod. Detailed Implementation

[0018] It is readily understood that, based on the technical solution of this invention, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of the invention. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this invention and should not be considered as the entirety of the invention or as limitations or restrictions on the technical solution of this invention.

[0019] Reference Figures 1 to 7 As shown, this embodiment provides an online infrared heating deformation detection device for semiconductor quartz tubes, including a base 1. The base 1 is used to support the various functional components of the detection device and form an installation reference during the detection process. A detection slide 2 is provided above the base 1. The detection slide 2 is slidably connected to the base 1. The sliding direction of the detection slide 2 is consistent with the axial direction of the quartz tube 3 to be detected, so that the heating structure and detection structure provided on the detection slide 2 can change position along the length direction of the quartz tube 3 to be detected, so as to correspond to different axial detection areas of the quartz tube 3 to be detected in sequence.

[0020] The quartz tube 3 to be tested is arranged transversely above the base 1, with one end connected to an external clamping mechanism. The external clamping mechanism can drive the quartz tube 3 to rotate continuously around its own axis. During the testing process, the quartz tube 3 maintains a stable axial position and, through its own rotation, causes different circumferential regions of the current axial testing section to pass through the testing position in sequence. Thus, without the testing structure needing to move circumferentially around the quartz tube 3, the morphological change information of the entire circumference of the current section can be continuously acquired using a detection light set at a fixed circumferential position.

[0021] An infrared heating component 4 is provided on the detection slide 2. The infrared heating component 4 and the quartz tube 3 to be tested maintain the distance required for infrared radiation. The infrared heating component 4 includes two heating areas facing the quartz tube 3 to be tested. One heating area faces the upper area of ​​the quartz tube 3 to be tested, and the other heating area is deflected relative to the aforementioned heating area, so that the two heating areas can apply infrared radiation to the quartz tube 3 to be tested from different directions.

[0022] While the quartz tube 3 under test is continuously rotating, it periodically passes through the infrared heating area at different circumferential positions, so that infrared radiation can act on different circumferential positions of the quartz tube 3 under test, reducing the excessive concentration of local temperature difference caused by fixed unilateral heating. At the same time, by controlling the working time, output power, or a combination of the two of the infrared heating component 4, the current detection area can be made to reach the predetermined heating state.

[0023] In order to have a corresponding comparison benchmark for the test results before and after heating, an initial benchmark acquisition can be performed before the formal heating test. Specifically, when the infrared heating component 4 does not apply the target heating effect to the quartz tube 3 to be tested, the detection slide 2 is moved sequentially along the base 1 to multiple predetermined axial detection positions, and the quartz tube 3 to be tested completes a predetermined rotation cycle at each axial detection position. At the same time, the initial detection line state of the corresponding detection position is acquired, thereby obtaining the initial detection benchmark corresponding to different axial detection positions.

[0024] After the initial detection benchmark acquisition is completed, the infrared heating component 4 enters the heating detection state. The detection slide 2 moves to the corresponding axial detection position, and the infrared heating component 4 performs infrared heating on the quartz tube 3 to be detected near that position. When the preset detection conditions are met, deformation detection is performed on the current axial detection position. The preset detection conditions can be determined based on the heating time, the temperature of the detection area, or a combination of the two, so that different detection positions can be detected under the conditions of corresponding heating states.

[0025] After the quartz tube 3 under test absorbs infrared radiation, its temperature rises. As the thermal state of the quartz material changes, under the combined effects of its own gravity, original residual stress, and local temperature distribution differences, the quartz tube 3 under test may experience radial dimension changes, local sagging, local depressions, changes in cross-sectional roundness, or axial bending. By continuously acquiring the geometric morphology information of the quartz tube 3 under test during the infrared heating process, the state of thermal deformation generated and developed during the heating process can be obtained, providing a basis for judging the dimensional stability of the quartz tube under high temperature conditions.

[0026] The detection slide 2 is also equipped with a detection mounting bracket 6, which is positioned around the outer periphery of the quartz tube 3 to be detected and maintains a distance between it and the quartz tube 3 to allow for free rotation. The detection mounting bracket 6 is used to support the detection light source 7, the beam shaping component 8, the positioning ring 9, the vision sensor 10, and the light shielding ring 11, forming a stable spatial position relative to the current detection cross section.

[0027] The detection light source 7 is mounted on the detection mounting frame 6, with its light emission direction facing the quartz tube 3 to be tested. A beam shaping component 8 is provided on the light emission side of the detection light source 7. The beam shaping component 8 is used to collimate, expand and adjust the light intensity distribution of the beam output by the detection light source 7, so that the detection light forms a detection light plane with a predetermined extension direction and a predetermined width.

[0028] The beam shaping component 8 includes a collimating optical part for reducing the divergence of the detection light and a linear beam shaping part for spreading the collimated beam along a predetermined direction. The linear beam shaping part can be a cylindrical lens, a lens or other optical structure that can form a sheet-like detection light plane. After the detection light plane is projected onto the cylindrical outer surface of the quartz tube 3 to be tested, it intersects with the outer surface of the quartz tube 3 to be tested to form a detection line.

[0029] The detection light plane represents the sheet-like detection beam formed in space by the detection light source 7 after passing through the beam shaping component 8. The detection line represents the observable linear area formed after the detection light plane intersects with the outer surface of the quartz tube 3 to be tested. Subsequently, the visual sensor 10 acquires the image formed by the detection line and judges the thermal deformation state of the quartz tube 3 to be tested based on the position and shape changes of the detection line.

[0030] The detection light source 7 and the beam shaping component 8 remain in a stable position during the detection of the current axial section. The quartz tube 3 under test continues to rotate around its own axis. The detection line corresponds to a fixed spatial position of the current axial detection section. As the quartz tube 3 under test rotates, different circumferential regions of the section pass through the region where the detection line is located in sequence. Therefore, during the period when the quartz tube 3 under test completes a full rotation cycle, the vision sensor 10 can continuously collect the detection line change information within the entire circumference range of the current axial section.

[0031] The device does not require a one-to-one correspondence between each acquired image and a specific rotation angle. It can determine the overall deformation state of the current axial section by completing a predetermined full rotation cycle of the quartz tube 3 under test. When the external rotation mechanism can provide rotation cycle or speed information, the detection duration of the current section can be determined based on the rotation cycle, thus avoiding the situation where there are circumferential areas of the current section that have not passed the detection position.

[0032] A positioning ring 9 is provided on the outer side of the beam shaping component 8. The positioning ring 9 is used to maintain the relative position between the detection light source 7, the beam shaping component 8, the vision sensor 10 and the area to be detected. The positioning ring 9 is set at the position of the detection line so that the detection line formation area is kept within the effective field of view of the vision sensor 10.

[0033] Two light-shielding rings 11 are respectively set on both sides of the positioning ring 9. The two light-shielding rings 11 are located on both sides of the detection line and are set around the local outer periphery of the quartz tube 3 to be tested. The two light-shielding rings 11 form a relatively limited visual acquisition space, so that the ambient light entering the detection area from the side, the stray radiation generated by the infrared heating component 4, and other light sources around the equipment are blocked to a certain extent, thereby increasing the brightness difference between the detection line and the surrounding background.

[0034] The vision sensor 10 is set at the detection position corresponding to the positioning ring 9, and its acquisition direction is towards the projection area of ​​the detection line on the surface of the quartz tube 3 to be detected. The vision sensor 10 is used to continuously acquire the detection line image and obtain the center position, continuous state, local bending state and degree of change relative to the initial detection line from the detection line image.

[0035] For the same axial detection position, the initial detection line acquired before infrared heating is used to form the initial detection reference for that position. During infrared heating, the current detection line is reacquired and compared with the initial detection reference corresponding to that axial detection position. When the quartz tube 3 under test does not undergo significant thermal deformation in the current region, the current detection line remains basically consistent with the initial detection line. When the quartz tube 3 under test undergoes radial dimensional changes, local sagging, surface depression, or local bending, the intersection position of the detection light plane and the outer surface of the quartz tube changes accordingly, causing the detection line to shift, locally bend, change curvature, or change its continuous shape. By comparing the positional and linear differences between the current and initial detection lines, the influence of the original dimensional deviation, initial roundness deviation, and original surface morphology of the quartz tube 3 under test on the judgment of thermal deformation can be reduced, so that the obtained change information mainly corresponds to the newly added geometric shape changes during infrared heating.

[0036] After the current axial section completes one full rotation cycle of detection, the detection slide 2 moves along the base 1 to the next predetermined axial detection position, causing the infrared heating assembly 4, the detection mounting bracket 6, and the corresponding detection structure to change their axial positions relative to the quartz tube 3 to be tested. After reaching the next detection position, heating detection is performed according to the initial detection reference corresponding to that position.

[0037] After completing the detection at multiple axial detection positions in sequence, multiple sets of cross-sectional detection results distributed along the length of the quartz tube 3 to be tested can be obtained. Based on the degree of change of the detection lines at multiple axial detection positions, it can be determined that the thermal deformation is mainly concentrated in a single local area, or continuously distributed along the axial direction of the quartz tube 3 to be tested, and thus determine the local sagging area, the local radial dimension change area, and the continuous bending area.

[0038] Since the quartz tube 3 to be tested is made of transparent quartz material, after the detection light shines on its outer surface, part of the detection light may be reflected at the interface between quartz and air, and another part of the detection light may enter the quartz material and produce transmission and refraction. The structure behind the quartz tube 3 to be tested, the infrared heating area, or other bright backgrounds may enter the image collected by the vision sensor 10 through the transparent quartz material, which reduces the degree of distinction between the detection line and the background of the transparent tube.

[0039] In order to improve the recognizability of the corresponding area of ​​the quartz tube 3 under test in the visual image, an end face ring auxiliary light source 5 is provided on one side of the quartz tube 3 under test. The end face ring auxiliary light source 5 is set to correspond to the ring end face of the quartz tube 3 under test, so that the auxiliary light generated by the end face ring auxiliary light source 5 is coupled into the interior of the quartz tube wall from the end of the quartz tube 3 under test.

[0040] The end-face ring auxiliary light source 5 uses auxiliary light with distinguishable spectral characteristics from the detection light source 7. The end-face ring auxiliary light source 5 can use blue auxiliary light, while the detection light source 7 uses detection light with a significant spectral difference from the blue auxiliary light. After entering the quartz tube wall, the auxiliary light propagates along the interior of the quartz material and generates transmission, reflection, and scattering at the interface between the quartz material and the surrounding medium, creating a recognizable spectral difference between the corresponding area of ​​the quartz tube 3 to be tested and the external environmental background.

[0041] When the vision sensor 10 acquires images, it determines the effective detection area corresponding to the quartz tube 3 to be detected based on the auxiliary light information generated by the end-face ring auxiliary light source 5. Then, it extracts the detection line formed by the detection light source 7 within the effective detection area. By distinguishing between the auxiliary light information and the detection line information, it can reduce the influence of the structure behind the quartz tube 3, ambient light, and other bright areas on the detection line recognition after passing through the transparent quartz material, and improve the recognition degree of local offset and bending state of the detection line.

[0042] To further verify the abnormal changes generated by the detection lines on the surface of the quartz tube 3 under test, a prism 14 is installed inside the quartz tube 3. The prism 14 is connected to an adjusting rod 15, which extends axially along the quartz tube 3 and enters the cavity from one end of the tube. This positions the prism 14 near the transmitted light path corresponding to the detection light source 7. A gap is maintained between the prism 14 and the inner wall of the quartz tube 3, allowing the quartz tube 3 to rotate around its own axis without contacting the prism 14. The adjusting rod 15 can independently maintain or change its position relative to the quartz tube 3 and can adjust the orientation of the prism 14, giving it both a refractive state for receiving transmitted detection light and a light-blocking state for blocking transmitted detection light.

[0043] A spot position scale 13 is set on one side of the positioning ring 9, and the spot position scale 13 is located on the outgoing light path corresponding to the prism 14. The spot receiver 12 is set facing the spot position scale 13 to collect the spot position formed on the spot position scale 13 after the detection light changes its propagation direction through the prism 14. Before performing the transmission light path verification, the position and angle of the prism 14 are adjusted by the adjusting rod 15 so that when the quartz tube 3 to be tested is in the initial state, the detection light passing through the quartz tube 3 to be tested changes its propagation direction through the prism 14 and falls on the predetermined reference position of the spot position scale 13, thereby establishing the transmission light path reference state of the current detection position.

[0044] During infrared heating, when the local wall thickness, curvature, spatial orientation, or local contour of the quartz tube 3 to be tested changes, the propagation direction of the detection light as it enters the quartz material from the air and from the quartz material into the tube cavity may change accordingly. After the detection light with the changed propagation direction reaches the prism 14, the propagation direction is changed again by the prism 14, so that the final landing point of the detection light on the light spot position scale 13 changes relative to the initial reference position.

[0045] The spot receiver 12 acquires the position of the detection light on the spot position scale 13 and compares the current position with the initial reference position, thereby forming verification information corresponding to the change in the transmitted light path. When the vision sensor 10 detects a continuous shift or bending of the detection line on the surface of the quartz tube 3 under test, and the spot receiver 12 detects a corresponding change in the point of the transmitted light relative to the initial reference position, the changes in the surface detection line and the changes in the transmitted light path can be used to jointly determine that there is a continuous geometric change in the current detection area. When the vision sensor 10 detects a short-term oscillation of the detection line, but the point of the transmitted light obtained by the spot receiver 12 does not form a corresponding continuous shift, the difference between the two detection results can be used as an auxiliary basis for identifying instantaneous optical disturbances or image fluctuations, thereby reducing the risk of misjudgment caused by relying solely on a single surface detection line. One working surface of the prism 14 is used to refract the detection light passing through the quartz tube 3 under test. The prism 14 is also provided with a light-absorbing shielding surface, which can be formed by coating with a black light-absorbing material, a low-reflection material, or by setting other light-absorbing structures. When the prism 14 is in a refractive state, the detection light that passes through the quartz tube 3 to be tested enters the cavity and enters the prism 14. After the prism 14 changes the propagation direction, it is projected onto the light spot position scale 13 for performing transmission light path verification.

[0046] When a verification of the surface detection line under another optical state is required, the prism 14 is rotated by the adjusting rod 15, so that the light-shielding surface enters the propagation path of the detection light inside the tube cavity. At this time, part of the detection light entering the tube cavity through the quartz tube 3 under test is absorbed or blocked by the light-shielding surface, thereby reducing the secondary reflection, refracted light spots and other internal stray light generated inside the quartz tube 3 under test. After the prism 14 switches to the light-shielding state, the vision sensor 10 re-acquires the detection line image at the current detection position. When the main offset position and bending shape of the detection line before and after light shielding remain basically consistent, this change can be used as a further verification basis for the geometric shape change of the quartz tube 3 under test. When the original local ghosting, additional bright spots or abnormal light patterns are significantly weakened after light shielding, it can be determined that the original detection image contains optical interference formed by transmission, refraction or reflection inside the tube. Thus, the prism 14 can switch between the transmission light path verification state and the internal light-shielding verification state under the action of the adjusting rod 15, so that the same detection position can obtain corresponding detection information under different optical conditions.

[0047] In a complete testing process, before the infrared heating component 4 applies target heating to the quartz tube 3 to be tested, the testing slide 2 is moved to multiple axial testing positions in sequence, and the initial testing reference of each position is collected.

[0048] After the initial detection benchmark is established, the detection slide 2 moves to the first target detection position, the infrared heating component 4 is activated, and the quartz tube 3 to be detected is kept rotating continuously. When the current detection position reaches the preset detection conditions, the vision sensor 10 continuously acquires the detection line image within one complete rotation cycle of the quartz tube 3 to be detected, and compares the current detection line with the initial detection benchmark corresponding to the axial position.

[0049] The end-face ring auxiliary light source 5 provides auxiliary light with predetermined spectral characteristics to the quartz tube 3 under test during the detection process, thereby improving the distinction between the corresponding area of ​​the quartz tube 3 under test and the environmental background. When changes that require further confirmation appear on the surface detection line, the prism 14 is adjusted by the adjustment rod 15. The prism 14, the light spot position scale 13, and the light spot receiver 12 are used to obtain information on changes in the transmitted light path. If necessary, the light can be switched to a light-blocking state to re-verify the surface detection line.

[0050] After completing the detection at the current axial detection position, the detection slide 2 moves along the base 1 to the next target detection position and performs infrared heating, rotation detection and anomaly verification in the same way until multiple axial detection positions within the predetermined length range of the quartz tube 3 to be tested are completed.

[0051] The detection method utilizes the self-rotation of the quartz tube 3 to achieve circumferential coverage of the current axial cross-section. The axial movement of the detection slide 2 along the base 1 enables switching between different axial detection positions. This allows the detection structure to obtain full-circumferential detection information of multiple axial cross-sections without performing complex circumferential movements around the quartz tube 3. Simultaneously, by pre-establishing initial detection benchmarks for each axial detection position, the detection results during infrared heating can be compared with the initial state at the same position. The end-face ring auxiliary light source 5 enhances the spectral distinction between the transparent quartz tube and the background. A transmission light path verification is formed by the prism 14, the light spot position scale 13, and the light spot receiver 12, and the light-blocking state of the prism 14 suppresses stray light within the tube, thereby improving the stability and verification capability of the transparent quartz tube thermal deformation detection results during infrared heating.

[0052] The technical scope of this invention is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. An online detection device for infrared heating deformation of a semiconductor quartz tube, characterized in that, The system includes a base, on which a detection slide is slidably mounted. A quartz tube to be tested is positioned laterally above the base and can rotate around its own axis. The direction of movement of the detection slide is consistent with the axial direction of the quartz tube. An infrared heating assembly and a detection mounting frame are mounted on the detection slide. The infrared heating assembly faces the quartz tube and is used to infrared heat it during rotation. A detection light source and a beam shaper located on the light-emitting side of the detection light source are mounted on the detection mounting frame. The beam shaper shapes the detection light output from the detection light source into a detection light plane that intersects with the outer surface of the quartz tube to form a detection line. The detection mounting frame also includes a corresponding detection... The test line has a positioning ring, on which a vision sensor is mounted. Two light-shielding rings are positioned on either side of the positioning ring, and the acquisition area of ​​the vision sensor is located between the two light-shielding rings. This sensor is used to acquire the morphological changes of the test line during the rotation of the quartz tube under test. A ring-shaped auxiliary light source is correspondingly positioned at the end of the quartz tube under test. This ring-shaped auxiliary light source couples auxiliary light with distinguishable spectral characteristics to the tube wall of the quartz tube under test, forming an auxiliary optical background for the vision sensor to identify the effective area of ​​the quartz tube under test. The detection slide moves along the axial direction of the quartz tube under test, causing the infrared heating component and the detection light plane to sequentially correspond to different axial detection positions of the quartz tube under test.

2. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, The infrared heating assembly includes two infrared heating parts arranged facing different circumferential regions of the quartz tube to be tested, so as to perform infrared heating on different circumferential regions of the quartz tube to be tested during rotation.

3. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, The beam shaping component includes a collimating optics section and a linear beam shaping section. The collimating optics section is used to reduce the divergence of the detection light, and the linear beam shaping section is used to spread the detection light along a predetermined direction to form the detection light plane.

4. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, The two light-shielding rings are respectively disposed on both sides of the detection line and spaced apart from the quartz tube to be tested, and the field of view of the visual sensor is oriented towards the area where the detection line is located between the two light-shielding rings.

5. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, The annular auxiliary light source on the end face corresponds to and is spaced apart from the annular end face of the quartz tube to be tested, so that the auxiliary light is coupled into the quartz tube wall from the annular end face.

6. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, The detection slide has multiple axial detection positions corresponding to the quartz tube to be tested. The vision sensor is used to collect the detection lines before and after infrared heating at the same axial detection position, so as to characterize thermal deformation based on the positional or linear changes of the detection lines.

7. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 1, characterized in that, A prism is installed inside the cavity of the quartz tube to be tested. The prism is connected to an adjusting rod that extends into the cavity along the axial direction of the quartz tube to be tested and is spaced apart from the inner wall of the quartz tube to be tested.

8. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 7, characterized in that, The prism has a refractive working surface and a light-blocking surface. The adjusting rod is used to drive the prism to rotate, so that the prism switches between a refractive state that changes the propagation direction of the transmitted detection light and a light-blocking state that blocks the transmitted detection light.

9. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 7, characterized in that, One side of the positioning ring is provided with a light spot position scale located on the light path of the prism, and a light spot receiver is provided facing the light spot position scale.

10. The online detection device for infrared heating deformation of quartz tubes for semiconductors according to claim 9, characterized in that, The detection light passing through the wall of the quartz tube to be tested is projected onto the light spot position scale after the propagation direction is changed by the prism. The light spot receiver is used to obtain the change in the landing point of the detection light relative to the predetermined reference position, so as to verify the change in the detection line obtained by the vision sensor.

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