A high-precision pressure core with a titanium alloy double-seal structure

Abstract

This invention relates to the field of pressure measurement technology, specifically a high-precision pressure core with a titanium alloy double-seal structure. A pressure chip is installed inside the upper groove of the base; a ceramic pad is also placed inside the upper groove of the base; a pressure-sensing diaphragm is disposed on the upper surface of the ceramic pad; the pressure-sensing diaphragm is clamped and installed at the upper opening of the upper groove of the base by a pressure ring; a glass insulator is disposed on the connecting tube; pins are disposed inside the lower groove of the base; the terminals of the pressure chip are connected to the pins by gold wires; a steel ball is disposed in the middle section of the connecting tube; the lower groove of the base is filled with potting compound and a compensation plate is installed in the middle; the pins connect the pressure chip through the compensation plate and then transmit the data to an external device; the upper groove of the base is filled with silicone oil. This invention provides a high-precision pressure core with a titanium alloy double-seal structure that is not prone to leakage, has high sealing safety, is adaptable to a wide range of complex working conditions, and has high operational stability.

Description

Technical Field

[0001] This invention belongs to the field of pressure measurement technology, specifically relating to a high-precision pressure core with a titanium alloy double-seal structure. Background Technology

[0002] To achieve high accuracy in pressure measurement, pressure sensing cores require a stable structure; therefore, improving the stability of the pressure sensing core is crucial. Traditional cores, relying solely on single-layer seals, are not compact enough. If issues arise such as aging of the rubber ring, surface scratches, media swelling, or assembly misalignment, media leakage will occur directly, corroding the internal sensing chip and leading to equipment failure. Furthermore, ordinary cores suffer from industry pain points such as susceptibility to corrosion, leakage, rapid seal failure, and short service life, making them unsuitable for pressure detection environments in complex conditions such as marine and maritime applications, seawater desalination, chlor-alkali chemical industries, wastewater treatment, and offshore oil and gas. Summary of the Invention

[0003] The purpose of this invention is to provide a high-precision pressure core with a titanium alloy double-seal structure that is structurally sound, leak-proof, has high sealing safety, is adaptable to a wide range of complex working conditions, and has high operational stability.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a high-precision pressure core with a titanium alloy double-seal structure, comprising a compensation plate, steel balls, a sintered base, a base, a glass insulator, pins, a pressure ring, a pressure-sensitive diaphragm, a ceramic pad, silicone oil, a pressure chip, gold wire, potting compound, and a connecting tube; the sintered base includes a base, a glass insulator, and pins; the upper and lower surfaces of the base are respectively provided with an upper groove and a lower groove; a pressure chip is installed inside the upper groove of the base; a ceramic pad is also mounted inside the upper groove of the base; a pressure-sensitive diaphragm is provided on the upper surface of the ceramic pad; The pressure-sensitive diaphragm is clamped and installed at the upper opening of the groove on the base by a pressure ring; a connecting tube is provided between the upper and lower grooves of the base; a glass insulator is provided on the connecting tube; pins are provided inside the lower groove of the base; the terminals of the pressure chip are connected to the pins by gold wires; a steel ball is provided in the middle section of the connecting tube; the lower groove of the base is filled with potting compound and a compensation plate is installed in the middle; the pins are connected to the pressure chip through the compensation plate and then transmitted to an external device; the upper groove of the base is filled with silicone oil.

[0005] As a further improvement of the present invention, the bottom of the pressure chip is provided with chip adhesive, and the pressure chip is bonded and fixed to the inner surface of the groove on the base by the chip adhesive.

[0006] As a further improvement of the present invention, the edge gap between the pressure ring and the groove on the base is reinforced by sealing welding.

[0007] As a further improvement of the present invention, a sealing groove is provided on the outer side wall of the base; a sealing ring is installed in the sealing groove.

[0008] As a further improvement of the present invention, the sealing grooves on the base are arranged in pairs with the sealing rings, and there are two or more of them.

[0009] As a further improvement of the present invention, the sealing ring is made of fluororubber or perfluoroether O-ring.

[0010] As a further improvement of the present invention, the base is made of an integrated titanium alloy substrate.

[0011] As a further improvement of the present invention, both the pressure-sensitive diaphragm and the steel ball are made of titanium alloy.

[0012] As a further improvement of the present invention, the ceramic pad is made of alumina ceramic.

[0013] As a further improvement of the present invention, the pressure chip is a silicon piezoresistive sensing chip.

[0014] Compared with existing technologies, the advantages of this invention are as follows: This technical solution utilizes a high-precision pressure core made of titanium alloy and a double FKM fluororubber O-ring sealing structure. It employs an integrated titanium alloy pressure-bearing substrate, a double independent sealing groove design, and a redundant sealing structure with two full-specification sealing rings. The product is specifically developed for harsh industrial conditions involving high corrosion, high salt spray, pressure pulses, and continuous vibration, completely solving the industry pain points of ordinary stainless steel single O-ring cores, such as easy corrosion, easy leakage, rapid seal failure, and short service life. The titanium alloy substrate of this technical solution possesses excellent resistance to chloride ions, seawater, weak acids and alkalis, and salt spray corrosion; it is non-magnetic, fatigue-resistant, and has high strength. The double FKM double seal forms a primary and secondary double protection system, with sealing safety, operational adaptability, and operational stability far exceeding that of traditional single O-ring cores. It is widely applicable to pressure testing in complex conditions such as marine and maritime applications, seawater desalination, chlor-alkali chemical industry, wastewater environmental protection, and offshore oil and gas. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0016] Figure 2 This is a schematic diagram of the internal structure of the present invention.

[0017] In the diagram: 1. Compensation plate; 2. Steel ball; 3. Sealing ring; 4. Sintered base; 401. Base; 402. Glass insulator; 403. Pin; 5. Pressure ring; 6. Pressure-sensitive diaphragm; 7. Ceramic pad; 8. Silicone oil; 9. Pressure chip; 10. Gold wire; 11. Chip adhesive; 12. Encapsulating adhesive; 13. Sealing weld; 14. Connecting pipe; 15. Sealing groove. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1 to 2 This invention provides a technical solution: a high-precision pressure core with a titanium alloy double-seal structure, comprising a compensation plate 1, steel balls 2, a sintered base 4, a base 401, a glass insulator 402, pins 403, a pressure ring 5, a pressure-sensitive diaphragm 6, a ceramic pad 7, silicone oil 8, a pressure chip 9, gold wire 10, potting compound 12, and a connecting tube 14; the sintered base 4 includes a base 401, a glass insulator 402, and pins 403; the upper and lower surfaces of the base 401 are respectively provided with an upper groove and a lower groove; the pressure chip 9 is installed inside the upper groove of the base 401; a ceramic pad 7 is also mounted inside the upper groove of the base 401; a pressure-sensitive diaphragm 6 is provided on the upper surface of the ceramic pad 7; the pressure-sensitive diaphragm 6 is clamped and installed at the upper opening of the upper groove of the base 401 by the pressure ring 5.

[0020] A connecting tube 14 is provided through the upper and lower grooves of the base 401; a glass insulator 402 is provided on the connecting tube 14; a pin 403 is provided inside the lower groove of the base 401; the terminal of the pressure chip 9 is connected to the pin 403 by a gold wire 10; a steel ball 2 is provided in the middle section of the connecting tube 14; the lower groove of the base 401 is filled with potting compound 12 and a compensation plate 1 is installed in the middle; the pin 403 connects the pressure chip 9 through the compensation plate 1 and then transmits the data to an external device; the upper groove of the base 401 is filled with silicone oil 8.

[0021] A chip adhesive 11 is provided at the bottom of the pressure chip 9, and the pressure chip 9 is bonded and fixed to the inner surface of the groove on the base 401 by the chip adhesive 11. The edge gap between the pressure ring 5 and the groove on the base 401 is reinforced and connected together by a sealing weld 13.

[0022] A sealing groove 15 is provided on the outer side wall of the base 401; a sealing ring 3 is installed in the sealing groove 15; the sealing groove 15 and the sealing ring 3 on the base 401 are arranged in pairs and there are more than two of them; the sealing ring 3 is a fluororubber or perfluoroether O-ring.

[0023] The base 401 is made of an integrated titanium alloy substrate; the pressure-sensitive diaphragm 6 and the steel ball 2 are both made of titanium alloy; the ceramic pad 7 is made of alumina ceramic; and the pressure chip 9 is a silicon piezoresistive sensitive chip.

[0024] I. Implementation Example (Partial Component Settings and Functions) 1. Compensation plate This component is an internal insulated circuit board, not involved in pressure bearing or sealing welding. The "compensation" in its name specifically refers to electrical temperature drift calibration. Its structure and function are as follows: The core carrier board for electrical compensation has copper foil circuitry, which can be used to mount NTC thermistors, precision thin-film resistors, and matching voltage dividers. Together with the pressure chip and Wheatstone bridge, it forms a hardware compensation network: it can collect the temperature of the silicone oil in the cavity in real time, dynamically correct zero-point temperature drift and sensitivity temperature drift, and the factory-calibrated resistor can eliminate the chip's inherent zero-point offset error and complete the primary nonlinear correction.

[0025] The low thermal conductivity buffer has a thermal conductivity much lower than that of titanium alloy, which can prevent sudden temperature changes on the outside of the sintering base from being directly conducted to the silicon chip, reduce the temperature gradient on the chip surface, and suppress additional measurement drift induced by thermal stress; the thermal expansion coefficient of the plate is between that of silicon and titanium alloy, which can alleviate the shear stress of the gold wire and bonding interface under temperature cycling.

[0026] It exhibits excellent resistance to media stability, withstands long-term immersion in silicone oil and high / low temperature cycling, and will not dissolve and release conductive ions that contaminate the pressure-transmitting medium, thus maintaining a stable dielectric environment inside the cavity.

[0027] Within the confined space of the cavity, signal wiring, insulation, and temperature electrical compensation are integrated, making it a standard substrate for miniaturized conditioning circuits in MEMS oil-filled cores.

[0028] 2. Steel balls (TC4 titanium alloy) Before the cavity is filled with silicone oil, the steel ball is pre-placed in the fitting gap. After the filling is completed and the entire laser sealing welding is completed, the steel ball is permanently sealed in the cavity interlayer and immersed in silicone oil throughout the process.

[0029] TC4 titanium alloy steel balls are selected, which are made of the same material as the base and pressure ring. The coefficient of thermal expansion is perfectly matched, so there will be no additional compressive stress due to the expansion difference of different materials at high and low temperatures. At the same time, it has the characteristics of being resistant to silicone oil corrosion and having high strength without deformation.

[0030] 3. Sealing rings (O-rings) Externally mounted sealing elements: End face medium seal: It is assembled between the sensor mounting base and the TC4 base, flexibly filling the gap to prevent the measured corrosive fluid from leaking out.

[0031] Installation stress buffer: Absorbs the rigid compressive stress generated by bolt tightening, and avoids micro-deformation of the titanium alloy base, which would introduce measurement zero-point error.

[0032] FKM fluororubber O-rings possess excellent chloride ion barrier capabilities and compatibility with seawater-mineral oil composite media. In typical marine pressure measurement conditions ranging from 0 to 60°C, when fitted with an external sealing structure on the titanium alloy oil-filled pressure core, they effectively resist seawater corrosion and prevent media leakage. However, their high-temperature pure water immersion performance is limited, requiring flexible matching of sealing materials based on the medium temperature and whether hydraulic oil is present.

[0033] Media compatibility: This dual FKM configuration is prohibited from use in extreme conditions such as strong concentrated nitric acid, strong oxidants, and pure ketone solvents. In such cases, the FFKM perfluoroether sealing configuration must be replaced.

[0034] 4.1 Base (TC4 titanium alloy base) The core supports the substrate, and all internal components are assembled on the reference carrier.

[0035] Pressure-bearing body: Laser-welded with the compensation plate to form a sealed oil-filled cavity, which can withstand the pressure of the medium throughout the entire range.

[0036] Expansion matching: The thermal expansion coefficient of TC4 titanium alloy is compatible with TA1 diaphragm and 4J50 pins, making it less prone to micro-cracks at the welding interface under high temperature, thus ensuring long-term sealing.

[0037] Integrated sintering tank: A sintering station for glass insulators is reserved to achieve integrated insulation and sealing between conductive pins and metal base.

[0038] 4.2 Glass Insulators An airtight, insulated sintered component is encapsulated within the through-hole of the TC4 base.

[0039] Electrical insulation: isolates the metal base from the 4J50 conductive pins to prevent signal short circuits and leakage current interference.

[0040] Vacuum sealing: Glass and metal are fused and sintered to form an airtight interface with no micro-leakage, locking in the silicone oil inside the cavity and preventing oil and gas leakage in the long term.

[0041] Temperature stability matching: The glass expansion coefficient matches that of 4J50 Kovar alloy and TC4 titanium alloy, eliminating the risk of desealing and leakage over a wide temperature range.

[0042] 4.3 Pins (4J50 Kovar alloy) As a channel for transmitting electrical signals.

[0043] Lead carrier: One end extends inward to the chip area, connects to the pressure chip Wheatstone bridge through gold wire, and extends outward to the external acquisition circuit.

[0044] Sintering compatibility: The expansion coefficient of 4J50 is highly matched with that of the sealing glass, and no gaps or air leakage are generated at the sintering interface under high and low temperature cycling.

[0045] Stable conductivity: Low resistivity reduces excitation voltage and output signal transmission loss.

[0046] 5. Pressure ring (TC4 titanium alloy) Diaphragm clamping and positioning: The annular step clamps the outer edge of the TA1 diaphragm, which is fixed in place with the base and outer shell, leaving only the central area of ​​the diaphragm to be able to deform freely.

[0047] Medium partitioning isolation: Separating the measured medium side (outer side of the diaphragm) from the silicone oil-filled cavity (inner side of the diaphragm) to construct a physical separation barrier between the medium and the sensing unit.

[0048] Welded transition structure: The inner and outer rings are welded to the base and the outer shell respectively to form a multi-layer annular sealing structure, which prevents silicone oil leakage and external media from seeping into the cavity.

[0049] 6. Pressure-sensitive diaphragm (TA1 pure titanium insulating diaphragm) The core dielectric isolation element completely isolates the tested medium from the internal silicone oil and chip.

[0050] Pressure transmission: The pressure of the measured medium acts on the outer surface of the diaphragm, and the pressure deformation is uniformly transmitted to the pressure chip through the internal silicone oil.

[0051] Media compatibility: Pure titanium is corrosion resistant and can be used with acids, alkalis, seawater, and chlorine-containing industrial fluids, avoiding direct corrosion of silicon chips by the media.

[0052] Elastic deformation: Ultra-thin precision rolled titanium foil has linear elastic deformation characteristics, leaving no plastic residue after unloading, ensuring measurement repeatability.

[0053] Sealing barrier: It is clamped and welded to the pressure ring and base to prevent the medium from entering the internal sensing circuit.

[0054] 7. Ceramic pad (alumina ceramic substrate) As a substrate supporting the pressure chip. Insulating bearing: The ceramic has high insulation and low thermal conductivity, which isolates the heat from the metal base from direct conduction to the silicon chip, reducing the zero-point drift caused by the temperature gradient.

[0055] Stress buffering: The ceramic has moderate rigidity, which disperses the concentrated load of silicone oil pressure on the back of the chip and avoids brittle fracture of the silicon wafer.

[0056] Planar reference: Provides a highly flat assembly base surface to ensure uniform force distribution on the back of the pressure chip.

[0057] 8. Silicone oil (high-purity filling pressure transmission fluid) The pressure transmission intermediate medium is sealed and filled in the cavity between the diaphragm and the chip. Equal pressure conduction: External pressure received by the titanium diaphragm is transmitted uniformly and in all directions to the sensitive membrane area of ​​the silicon chip without loss.

[0058] Damping buffer: Smooths pressure input and suppresses measurement spike noise in response to instantaneous impacts and pulsating pressure on the filter media.

[0059] Temperature and pressure adaptability: low compressibility, stable viscosity over a wide temperature range, controllable volume change at high and low temperatures, and reduced zero-point drift.

[0060] Protective isolation: Completely encapsulates the chip, isolates it from air oxidation, buffers thermal shock, and protects the silicon microstructure.

[0061] 9. Pressure chip (silicon piezoresistive sensing chip) The core sensing element for measurement is a Wheatstone bridge fabricated using MEMS micromachining. Force-to-electric conversion: A piezoresistive resistor is formed by doping a thin silicon film region at the center of the chip. Silicon oil pressure causes deformation of the silicon film, and the piezoresistive resistance changes proportionally to the strain.

[0062] Signal output: When an external constant excitation voltage is applied, the bridge outputs a differential voltage signal that is linearly corresponding to the measured pressure.

[0063] Microscale high precision: Micrometer-level sensitive structure enables high-precision resolution of minute pressures in the kPa~MPa range.

[0064] 10. Gold wire (bonding gold wire) As interconnecting wires for microelectronic signals. Bridge leads: ultrasonically bonded to the pressure chip pads and the top of the 4J50 pins, transmitting the chip's differential pressure signal and excitation power supply.

[0065] Flexible buffer: The gold wire has a small deformation margin to offset the relative displacement between the chip and the pin caused by temperature and vibration, and to prevent the lead wire from breaking.

[0066] Low impedance and low noise: High-purity gold has excellent conductivity, no oxide layer, and lossless transmission of weak signals.

[0067] 11. Chip adhesive (highly elastic thermally conductive and insulating adhesive) Adhesive layer between the pressure chip and the ceramic pad. Secure bonding: firmly attaches the silicon chip to the surface of the ceramic pad, preventing chip displacement caused by the flow of silicone oil.

[0068] Stress relief: The elastic colloid buffers the pressure of silicone oil and the shear stress caused by thermal expansion, preventing additional stress drift of the silicon chip due to rigid bonding.

[0069] Thermal conductivity and temperature uniformity: Moderate thermal conductivity balances the overall temperature distribution of the chip and reduces temperature nonlinearity error.

[0070] 12. Potting compound Insulation protection: Isolates external moisture, dust, and corrosive gases, and prevents short circuits between pins.

[0071] Stress buffering: buffers the mechanical stress caused by pin vibration and insertion / removal, protecting the sintering interface of the glass insulator from cracking.

[0072] Moisture-proof and weather-resistant: Prevents moisture from seeping into the oil-filled cavity along the pin gaps, avoiding silicone oil emulsification failure.

[0073] II. Implementation Examples (Core Configuration and Technical Parameters) 1. Main Material The sintered base, pressure-sensitive diaphragm, and sealing groove are all made of titanium alloy, which is different from 316L and 304 stainless steel. It can effectively resist pitting corrosion and intergranular corrosion from seawater, brine, sodium hypochlorite, saline wastewater, and weak acid and weak alkali media, and prevent media penetration from damaging the internal sensing chip.

[0074] 2. Sealing configuration Sealing structure: Double-layer independent O-ring redundant seal (main seal + backup seal).

[0075] Sealing material: FKM fluororubber (industrial grade, corrosion resistant and high temperature resistant).

[0076] Material parameters: Applicable temperature -20℃~200℃, ozone resistant, oil resistant, chlorine resistant, high and low temperature aging resistant, excellent resistance to media swelling and compression deformation.

[0077] 3. Overall core technical parameters Pressure range: 100kPa~25MPa (customized micro pressure, medium and high pressure ranges are supported).

[0078] Accuracy class: 0.1%FS, 0.25%FS (high-precision sensor adapter).

[0079] Operating temperature: -20℃~180℃ (long-term stable operating range).

[0080] Overload capacity: 150%FS, instantaneous resistance to pressure pulse and water hammer impact.

[0081] Protection rating: IP68 (double-sealed full protection, dustproof, waterproof, and impermeable to media).

[0082] Applicable media: seawater, concentrated brine, sodium hypochlorite solution, chlorine-containing industrial wastewater, dilute acids and alkalis, hydraulic oil, oil and gas produced fluids, salt spray environment gases and other corrosive media.

[0083] III. Example (Comparison with ordinary single O-ring core body, the core technical advantages of double sealing ring structure) 1. Double redundant seals eliminate the risk of leakage. Traditional single O-ring cores rely on a single layer of seal. If the O-ring ages, gets scratched, swells due to media, or misaligns during assembly, it can directly cause media leakage, corroding the internal sensor chip and leading to equipment failure. This product adopts a dual-seal independent structure. The first primary O-ring handles the main pressure sealing, while the second secondary O-ring serves as backup protection. When the primary seal experiences minor leakage or fatigue deformation, the secondary seal can immediately intercept the media, completely preventing corrosive media from penetrating the core components and achieving zero-leakage protection.

[0084] 2. Adaptable to harsh working conditions, with stronger impact and aging resistance. For common operating conditions such as pressure pulses, water hammer impacts, continuous equipment vibration, and high and low temperature cycles in scenarios like ships, offshore platforms, chemical pipelines, and sewage treatment, the dual FKM sealing structure can evenly distribute pressure stress, preventing localized overload, displacement, and detachment of a single rubber ring. Simultaneously, FKM fluororubber itself possesses extremely strong resistance to media corrosion and aging, and combined with the dual structure, it can effectively resist seawater chloride ion corrosion, chemical media swelling, and alternating high and low temperature aging, significantly improving the stability of continuous equipment operation.

[0085] 3. Titanium alloy + dual FKM combination, suitable for highly corrosive environments. The titanium alloy matrix is ​​designed for chlorine-containing and high-salt corrosion environments. Paired with FKM fluororubber with matching corrosion resistance, it solves the compatibility problem of ordinary cores where "metal is corrosion resistant but the rubber ring fails first" or "the rubber ring is durable but the metal corrodes." The performance of the metal and sealing materials is highly unified, and the service life of the entire equipment is 2 to 3 times longer than that of stainless steel single O-ring cores.

[0086] 4. Reduce operation and maintenance costs and adapt to long-term continuous operation. The double-sealed redundant structure has a higher fault tolerance rate, which can effectively avoid sudden failures caused by fluctuations in operating conditions, reduce downtime for maintenance and parts replacement frequency, and is especially suitable for scenarios with extremely high requirements for stability and continuity, such as unattended offshore equipment, continuous chemical production lines, and fully automatic water treatment equipment.

[0087] IV. Implementation Examples (Applicable Industries and Operating Conditions for Selection) This configuration (titanium alloy + double O-ring seals) is a special configuration for high corrosion, high reliability, and long service life. It is standardly adapted to the following scenarios and must not be used in non-corrosive ordinary working conditions.

[0088] 1. Maritime and Ocean Affairs Offshore drilling platforms, ship ballast water systems, seawater cooling pipelines, underwater robots, seabed monitoring equipment, and pressure testing for nearshore wind power, adaptable to seawater, salt spray, and high-humidity corrosive environments.

[0089] 2. Water treatment and seawater desalination Seawater desalination RO high-pressure system, concentrated brine pipeline, municipal sewage disinfection system, sodium hypochlorite dosing system, and chlorine-containing wastewater treatment equipment.

[0090] 3. Chemical and Environmental Protection Fields Pressure monitoring of salt and chlorine-containing media, dilute acid and alkali reaction vessels and conveying pipelines, and industrial pickling wastewater in chlor-alkali chemical, fine chemical, and electroplating industries.

[0091] 4. Oil and gas extraction sector Pressure testing of produced fluids from offshore and near-shore oilfields, high-mineralization formation water, and saline- and chlorine-containing oil and gas pipelines.

[0092] V. Use Environmental requirements: The installation environment must be kept clean and free of hard impurities, iron filings, and dust to avoid scratching the O-ring sealing surface and affecting the sealing accuracy.

[0093] Assembly requirements: The double O-rings must be fully embedded in the dedicated sealing groove; twisting, stretching, or misalignment is strictly prohibited. The two O-rings must be parallel and aligned to ensure uniform sealing preload; forceful squeezing or prying during assembly is prohibited.

[0094] Tool requirements: Soft tools must be used for assembly. Sharp metal tools must not come into contact with the rubber ring and titanium alloy pressure-sensitive diaphragm to prevent irreversible damage.

[0095] Pressure adaptation: The actual working pressure must not exceed the rated overload pressure to avoid overpressure causing seal deformation and core damage.

[0096] Media compatibility: This dual FKM configuration is prohibited from use in extreme conditions such as strong concentrated nitric acid, strong oxidants, and pure ketone solvents. In such cases, the FFKM perfluoroether sealing configuration must be replaced.

[0097] During operation, this equipment operates on the following principle: pressure of the measured medium, elastic deformation of the pressure-sensing diaphragm, uniform pressure transmission via silicone oil, strain of the pressure chip diaphragm region, output voltage signal from the piezoresistive bridge of the pressure chip, gold wire, pins, and compensation plate, finally transmitted outwards. This technical solution employs an all-titanium alloy structure and glass sintering to achieve permanent airtightness. Silicone oil and the titanium diaphragm isolate corrosive media. A ceramic substrate, elastic bonding structure, and expansion-matching metal components collectively suppress measurement errors introduced by temperature, vibration, and overload, achieving long-term stable and high-precision pressure measurement.

Claims

1. A high-precision pressure core with a titanium alloy double-seal structure, characterized in that, The system includes a compensation plate (1), steel balls (2), a sintered base (4), a base (401), a glass insulator (402), pins (403), a pressure ring (5), a pressure-sensitive diaphragm (6), a ceramic pad (7), silicone oil (8), a pressure chip (9), gold wire (10), potting compound (12), and a connecting tube (14). The sintered base (4) includes a base (401), a glass insulator (402), and pins (403). The upper and lower surfaces of the base (401) are respectively provided with an upper groove and a lower groove. A pressure chip (9) is installed inside the upper groove of the base (401). A ceramic pad (7) is also installed inside the upper groove of the base (401). A pressure-sensitive diaphragm (6) is provided on the upper surface of the ceramic pad (7). The pressure-sensitive diaphragm (6) is connected to the pressure ring (5). The clamp is installed at the upper opening of the groove on the base (401); a connecting tube (14) is provided between the upper and lower grooves of the base (401); a glass insulator (402) is provided on the connecting tube (14); a pin (403) is provided inside the lower groove of the base (401); the terminal of the pressure chip (9) is connected to the pin (403) by a gold wire (10); a steel ball (2) is provided in the middle section of the connecting tube (14); the lower groove of the base (401) is filled with potting compound (12) and a compensation plate (1) is installed in the middle; the pin (403) connects the pressure chip (9) through the compensation plate (1) and then transmits it to the external device; the upper groove of the base (401) is filled with silicone oil (8).

2. The high-precision pressure core with a double-seal structure of titanium alloy according to claim 1, characterized in that: The pressure chip (9) is provided with a chip adhesive (11) at its bottom, and the pressure chip (9) is bonded and fixed to the inner surface of the groove on the base (401) by the chip adhesive (11).

3. The high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: The edge gap between the pressure ring (5) and the groove on the base (401) is reinforced by sealing weld (13).

4. The high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: A sealing groove (15) is provided on the outer side wall of the base (401); a sealing ring (3) is installed in the sealing groove (15).

5. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 4, characterized in that: The sealing groove (15) on the base (401) is provided in pairs with the sealing ring (3), and there are more than two of them.

6. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 4, characterized in that: The sealing ring (3) is made of fluororubber or perfluoroether O-ring.

7. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: The base (401) is made of an integrated titanium alloy substrate.

8. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: The pressure-sensitive diaphragm (6) and the steel ball (2) are both made of titanium alloy.

9. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: The ceramic pad (7) is made of alumina ceramic.

10. A high-precision pressure core with a double-seal structure made of titanium alloy according to claim 1, characterized in that: The pressure chip (9) is a silicon piezoresistive sensitive chip.

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