A full field of view optical on-line detection device for internal defects of a quartz product

Abstract

This invention relates to the field of visual inspection technology, and in particular to a full-field optical online inspection device for internal defects in quartz products. The device includes an operating table, a clamping unit fixedly mounted on the operating table, and a detection unit fixedly mounted on the operating table. The invention utilizes the operating table, clamping unit, and detection unit to collaboratively complete the inspection. The clamping unit, driven by a motor, rotates a rotating disk, causing a clamping rod to slide along an arc-shaped groove and a limiting groove, achieving three-jaw centering and clamping of the quartz glass and driving the workpiece to rotate. Light emitted from the detection unit's light source is shaped into a collimated beam by a rotatable beam splitter, an adjustable collimating objective lens, and a focusing objective lens. When the workpiece is defect-free, the light passes directly through; when it encounters an internal defect interface, it is reflected and refracted, forming deflected light. The defect signal is collected by a sensor. The reflected light from the workpiece surface returns along its original path, achieving self-collimation and centering verification. This effectively solves the problems of stray light, false defects, and low signal-to-noise ratio associated with traditional equipment.

Description

Technical Field

[0001] This invention relates to the field of visual inspection technology, and in particular to a full-field optical online inspection device for internal defects in quartz products. Background Technology

[0002] Quartz glass is a special industrial glass made of silicon dioxide. It is a high-performance basic material and is widely used in electric light sources, semiconductors, optical communications, and environmental protection. The surface flatness, cleanliness, wall thickness, and crack defects of quartz glass after processing directly affect the quality and performance of the product. Therefore, quartz glass testing equipment is crucial in the production of quartz products.

[0003] Traditional quartz glass internal defect detection devices mostly use ordinary array LED light sources, which have a large beam divergence angle and are prone to generating stray light after incident on the workpiece. This causes unstable defect reflection and refraction signals and forms false defects, reducing the imaging signal-to-noise ratio. At the same time, they lack the centering and calibration capabilities of rotating clamping devices, and multiple frames of images are prone to displacement, affecting the accuracy of image registration and fusion and defect recognition. Furthermore, the internal bubbles, microcracks, and interlayers of quartz are three-dimensional structures, and under fixed lighting, some tilted defects cannot generate effective light signals, resulting in blind spots in detection orientation and a high rate of missed detection. Summary of the Invention

[0004] In view of the problems existing in the current full-field optical online inspection device for internal defects of quartz products, the present invention is proposed.

[0005] Therefore, the present invention provides a full-field optical online inspection device for internal defects of quartz products. Its purpose is to solve the problems of ordinary light sources, which are prone to generating stray light and false defects and reducing the signal-to-noise ratio; rotating clamping without centering calibration, which easily causes image shift; and fixed illumination, which is difficult to capture defects with complex spatial orientation, resulting in blind spots and high missed detection rates.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a full-field optical online inspection device for internal defects of quartz products, comprising an operating table, a clamping unit fixedly mounted on the operating table, and a detection unit fixedly mounted on the operating table; the clamping unit includes a placement component fixedly mounted on the operating table and a clamping assembly fixedly mounted on the operating table; the detection unit includes a driving assembly fixedly mounted on the operating table and a detection assembly fixedly mounted on the driving assembly; the detection assembly includes a guide component fixedly mounted on an adjusting rod, an eyepiece fixedly mounted on the guide component, a connector fixedly mounted on the guide component, and a reflector fixedly mounted on the connector. The device comprises a reflector, an adjustment component fixedly mounted on the reflector, a detection component fixedly mounted on the adjustment component, and a light source component fixedly mounted on the reflector, wherein the light source component is fixedly connected to the adjustment rod; the adjustment component includes a fixed sleeve fixedly mounted on the bottom of the adjustment housing, a limiting groove fixedly mounted on the fixed sleeve, a sliding rod slidably mounted on the inner wall of the fixed sleeve, a collimating objective lens fixedly mounted on the sliding rod, and a focusing objective lens fixedly mounted on the inner wall of the fixed sleeve; a rotating sleeve rotatably mounted on the outer wall of the fixed sleeve, a sliding groove fixedly mounted on the rotating sleeve, a rotating shaft fixedly mounted on the rotating sleeve, and a protective shell rotatably mounted on the rotating shaft, wherein the sliding groove is slidably connected to the sliding rod.

[0007] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, the clamping assembly includes a motor fixedly installed on the operating table, a buffer fixedly installed on the output end of the motor, a positioning block fixedly installed on the buffer, a rotating disk fixedly installed on the output end of the motor, and an arc-shaped groove fixedly installed on the rotating disk.

[0008] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, a clamping rod is slidably installed inside the arc groove, a connecting shell is fixedly installed on the operating table, a limiting plate is fixedly installed on the connecting shell, a limiting groove is fixedly installed on the limiting plate, and the clamping rod is slidably connected to the limiting groove and the arc groove respectively.

[0009] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, the driving component includes a support frame fixedly installed on the operating table, an auxiliary light fixedly installed on the support frame, and an adjustment rod slidably installed on the inner wall of the support frame.

[0010] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, the reflector includes an adjustment shell fixedly mounted on a connector, a rotating rod rotatably mounted on the adjustment shell, a beam splitter fixedly mounted on the rotating rod, and a rotating button fixedly mounted on the rotating rod, wherein the rotating button, the rotating rod, and the beam splitter are all rotatably connected to the adjustment shell.

[0011] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, the light source component includes a connecting tube fixedly installed on the adjustment shell, and a light source fixedly installed on the connecting tube, wherein the light source is fixedly connected to the adjustment rod.

[0012] As a preferred embodiment of the full-field optical online inspection device for internal defects of quartz products of the present invention, the inspection component includes a recycling plate fixedly installed on a protective shell, and a sensing component fixedly installed on the recycling plate.

[0013] The beneficial effects of this invention are as follows: This invention uses an operating table, a clamping unit, and a detection unit to collaboratively complete the detection. The clamping unit drives a rotating disk via a motor, causing the clamping rod to slide along the arc-shaped groove and the limiting groove, thereby achieving three-jaw centering and clamping of the quartz glass and driving the workpiece to rotate. The light emitted from the light source of the detection unit is shaped into a collimated beam by a rotatable beam splitter, an adjustable collimating objective lens, and a focusing objective lens. When the workpiece is defect-free, the light passes directly through. When it encounters an internal defect interface, it is reflected and refracted to form deflected light. The defect signal is collected by the sensing element. The reflected light from the workpiece surface returns along the original path to achieve self-collimation and centering verification, effectively solving the problem of light source emission in traditional equipment. The previous method was prone to stray light, false defects, and low signal-to-noise ratio. Rotation clamping lacked centering calibration, resulting in image shift and poor registration. Fixed illumination had orientation blind spots and high false negative rates for three-dimensional defects. This method can ensure that the workpiece rotation center coincides with the optical axis to suppress imaging errors. It relies on an adjustable collimating objective lens to optimize beam quality, eliminates defect detection blind spots by rotating the workpiece, and uses optical path multiplexing to take into account both centering and defect detection. The position of optical components is adjustable to adapt to various workpiece specifications. The non-contact detection method will not damage the product, effectively improving defect identification accuracy and meeting the industrial application needs of full-field online inspection of quartz products. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of the full-field optical online inspection device for internal defects in quartz products according to the present invention.

[0016] Figure 2 This is a side view schematic diagram of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0017] Figure 3 This is a schematic diagram of the detection unit structure of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0018] Figure 4 This is a schematic diagram of the clamping unit structure of the full-field optical online detection device for internal defects of quartz products according to the present invention.

[0019] Figure 5 This is an exploded view of the clamping assembly of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0020] Figure 6 This is an exploded cross-sectional view of the clamping assembly of the full-field optical online inspection device for internal defects in quartz products according to the present invention.

[0021] Figure 7 This is a schematic diagram of the detection component structure of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0022] Figure 8 This is a schematic cross-sectional view of the detection component of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0023] Figure 9 This is a schematic diagram of the detection process of the detection components of the full-field optical online detection device for internal defects of quartz products according to the present invention.

[0024] Figure 10 This is an exploded view of the detection component of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0025] Figure 11 This is an exploded view of the adjustment component of the online optical full-field optical detection device for internal defects in quartz products according to the present invention.

[0026] Figure 12 This is a schematic diagram of the detection components of the full-field optical online detection device for internal defects in quartz products according to the present invention.

[0027] Explanation of reference numerals in the attached drawings: 1. Operating table; 2. Clamping unit; 21. Placement component; 22. Clamping assembly; 221. Motor; 222. Rotary disk; 223. Arc groove; 224. Clamping rod; 225. Buffer component; 226. Positioning block; 227. Connecting housing; 228. Limiting disk; 229. Limiting groove; 3. Detection unit; 31. Drive assembly; 311. Support frame; 312. Adjusting rod; 313. Auxiliary light; 32. Detection assembly; 321. Guide component; 322. Eyepiece component; 323. Connecting component; 324. Reflector Components; 3241, Adjustment housing; 3242, Rotating rod; 3243, Beam splitter; 3244, Rotating button; 325, Light source component; 3251, Connecting tube; 3252, Light source; 326, Adjustment component; 3261, Protective housing; 3262, Rotating sleeve; 3263, Sliding groove; 3264, Rotating shaft; 3265, Fixing sleeve; 3266, Limiting slot; 3267, Sliding rod; 3268, Collimating objective lens; 3269, Focusing objective lens; 327, Detection component; 3271, Recovery plate; 3272, Sensing component. Detailed Implementation

[0028] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0029] Example 1, referring to Figure 1 - Figure 2 The first embodiment of the present invention provides a full-field optical online inspection device for internal defects of quartz products. The device includes an operating table 1, and also includes a clamping unit 2 and a detection unit 3 fixedly installed on the operating table 1.

[0030] The clamping unit 2 includes a placement component 21 and a clamping assembly 22 fixedly installed on the operating table 1. The placement component 21 is used to support the quartz glass workpiece to be inspected and complete the workpiece loading and positioning. The clamping assembly 22 can perform three-jaw centering clamping on the quartz glass to align the workpiece rotation center with the system optical axis.

[0031] Furthermore, the detection unit 3 includes a drive assembly 31 fixedly mounted on the operating table 1, and a detection assembly 32 fixedly mounted on the drive assembly 31. The drive assembly 31 is used to drive the detection assembly 32 to rise and fall, adjusting the optical components to a suitable working height. The detection assembly 32 can complete beam shaping and output a high-quality collimated beam, reducing stray light and false defect interference, and improving the imaging signal-to-noise ratio.

[0032] During use, the quartz glass workpiece to be inspected is first placed on the placement part 21 of the clamping unit 2 on the operating table 1. The clamping component 22 of the clamping unit 2 is then activated to perform three-jaw centering clamping on the quartz glass, aligning the workpiece's rotation center with the system's optical axis. This effectively avoids eccentric offset during rotation and ensures the accuracy of subsequent image registration. Subsequently, the driving component 31 of the detection unit 3 on the operating table 1 drives the detection component 32 to adjust to a suitable working height. The internal optical elements of the detection component 32 are then adjusted to complete beam shaping and output a high-quality collimated beam, which can reduce stray light and false defect interference and improve the imaging signal-to-noise ratio.

[0033] After the light beam illuminates the quartz workpiece, it relies on the reflected light from the upper surface of the workpiece to return along the original path to complete the self-collimation and centering verification. After confirming that the workpiece is not eccentric, the clamping assembly 22 drives the quartz workpiece to rotate around the optical axis, dynamically changing the relative angle between the defect interface and the light beam, eliminating the blind zone of the three-dimensional defect detection orientation. The collimated light beam continuously illuminates the workpiece. When the workpiece is defect-free, the light beam penetrates the workpiece directly downwards. When there are bubbles, microcracks, or interlayer defects inside the workpiece, the light is reflected and refracted at the defect interface, producing upward deflected and scattered light. The deflected and scattered light propagates upwards along the optical path to the detection element 327. The sensor 3272, carried by the recovery plate 3271, collects the distorted light signal to realize defect imaging and recognition. During the rotation of the workpiece driven by the clamping assembly 22, the sensor 3272... By continuously acquiring multi-view images and compensating for the weak energy and directional dispersion of scattered light through multi-frame image fusion, the signal-to-noise ratio for defect identification is improved. The entire optical system achieves optical path multiplexing, enabling centering calibration and defect detection to be completed on the same device. The machine has a high degree of integration, and the detection process is non-contact, so it will not damage the workpiece. After the detection is completed, the clamping component 22 releases the workpiece, removes the tested workpiece, and resets all mechanisms, ready to prepare for the detection of the next workpiece. It can meet the needs of industrial full-field online inspection of quartz products.

[0034] Example 2, refer to Figure 1 - Figure 6 This is the second embodiment of the present invention, which differs from the first embodiment in that: the clamping assembly 22 includes a motor 221 fixedly mounted on the operating table 1, a buffer 225 fixedly mounted on the output end of the motor 221, a positioning block 226 fixedly mounted on the buffer 225, a rotating disk 222 fixedly mounted on the output end of the motor 221, and an arc-shaped groove 223 formed on the rotating disk 222; the positioning block 226 is used to perform preliminary placement and positioning of the quartz glass workpiece to be inspected; the motor 221 serves as a power source, driving the rotating disk 222 and the buffer 225 to rotate synchronously; the buffer 225 can absorb the impact generated by the clamping action, buffer the clamping force, and avoid excessive pressure damaging the brittle quartz workpiece; the rotating disk 222 transmits motion through the arc-shaped groove 223, providing driving force for the opening and closing action of the clamping rod 224.

[0035] Compared to Embodiment 1, further, a clamping rod 224 is slidably installed inside the arc-shaped groove 223, a connecting shell 227 is fixedly installed on the operating table 1, a limiting plate 228 is fixedly installed on the connecting shell 227, a limiting groove 229 is formed on the limiting plate 228, and the clamping rod 224 is slidably connected to the limiting groove 229 and the arc-shaped groove 223 respectively; the connecting shell 227 provides stable installation support for the limiting plate 228, ensuring that the position of the limiting groove 229 is fixed; the limiting groove 229 constrains the clamping rod 224 to only open and close radially. The sliding mechanism, in conjunction with the arc-shaped groove 223, enables multiple clamping rods 224 to synchronously converge towards the center, automatically correcting the workpiece position, completing centering and clamping, ensuring that the workpiece rotation center coincides with the system optical axis, eliminating clamping eccentricity, and improving the accuracy of subsequent multi-view image registration and fusion; when the motor 221 runs continuously, it can drive the clamped quartz workpiece to rotate around the optical axis, changing the relative angle between the defect interface and the incident beam, eliminating the blind zone of three-dimensional defect detection orientation; after the detection is completed, the motor 221 reverses, the clamping rods 224 slide radially outward to release the workpiece, and the mechanism resets.

[0036] The remaining structure is the same as that in Example 1.

[0037] Example 3, referring to Figure 1 - Figure 12 This is the third embodiment of the present invention, which differs from the second embodiment in that: the driving component 31 includes a support frame 311 fixedly installed on the operating table 1, an auxiliary light 313 fixedly installed on the support frame 311, and an adjusting rod 312 slidably installed on the inner wall of the support frame 311; the support frame 311 serves as a support base, providing a mounting and positioning foundation for the auxiliary light 313 and the adjusting rod 312; the adjusting rod 312 can slide up and down along the inner wall of the support frame 311, driving the entire detection component 32 to rise and fall as a whole, adjusting the working distance between the optical system and the quartz workpiece, and adapting to quartz products of different thicknesses and sizes; the auxiliary light 313 is used for supplementary lighting in the work area, making it easier for operators to visually observe the on-site working conditions.

[0038] Compared to Embodiment 2, the detection assembly 32 further includes a guide 321 fixedly mounted on the adjustment rod 312, an eyepiece 322 fixedly mounted on the guide 321, a connector 323 fixedly mounted on the guide 321, a reflector 324 fixedly mounted on the connector 323, an adjustment 326 fixedly mounted on the reflector 324, a detection 327 fixedly mounted on the adjustment 326, and a light source 325 fixedly mounted on the reflector 324, with the light source 325 fixedly connected to the adjustment rod 312. The guide 321 provides an installation guide reference for the eyepiece 322 and the connector 323. The eyepiece 322 receives the reflected light returned from the workpiece surface to achieve workpiece self-collimation and centering verification. The connector 323 realizes the structural connection between the reflector 324 and the guide 321, so that the entire detection assembly 32 can synchronously complete the height position adjustment along with the adjustment rod 312.

[0039] Furthermore, the reflector 324 includes an adjustment housing 3241 fixedly mounted on the connector 323, a rotating rod 3242 rotatably mounted on the adjustment housing 3241, a beam splitter 3243 fixedly mounted on the rotating rod 3242, and a rotary button 3244 fixedly mounted on the rotating rod 3242. The rotary button 3244, the rotating rod 3242, and the beam splitter 3243 are all rotatably connected to the adjustment housing 3241. When the operator rotates the rotary button 3244, the beam splitter 3243 can be rotated inside the adjustment housing 3241 via the rotating rod 3242, thereby adjusting the tilt angle of the beam splitter 3243 to complete the beam splitting and refraction of the incident beam from the light source 3252, guiding the beam downward into the adjustment housing 326, and simultaneously guiding the reflected light returned from the workpiece upward into the eyepiece 322, thus realizing optical path multiplexing.

[0040] Furthermore, the light source 325 includes a connecting tube 3251 fixedly mounted on the adjustment housing 3241, and a light source 3252 fixedly mounted on the connecting tube 3251, and the light source 3252 is fixedly connected to the adjustment rod 312; the light source 3252 outputs detection light, and the light is introduced into the interior of the adjustment housing 3241 through the connecting tube 3251, providing the incident light source 3252 for the entire defect detection.

[0041] Furthermore, the adjustment component 326 includes a fixed sleeve 3265 fixedly installed at the bottom of the adjustment housing 3241, a limiting groove 3266 fixedly installed on the fixed sleeve 3265, a sliding rod 3267 slidably installed on the inner wall of the fixed sleeve 3265, a collimating objective lens 3268 fixedly installed on the sliding rod 3267, and a focusing objective lens 3269 fixedly installed on the inner wall of the fixed sleeve 3265. The limiting groove 3266 limits the travel of the sliding rod 3267, restricting the sliding range of the sliding rod 3267 and preventing it from overtraveling out of the fixed sleeve 3265. Under the drive of external force, the sliding rod 3267 can slide axially along the limiting groove 3266 on the inner wall of the fixed sleeve 3265, driving the collimating objective lens 3268 to move synchronously. During the displacement process, the collimating objective lens 3268 and the focusing objective lens 3269 cooperate to complete beam shaping, which can output a detection beam with high collimation.

[0042] Furthermore, it also includes a rotating sleeve 3262 rotatably mounted on the outer wall of the fixed sleeve 3265, a sliding groove 3263 fixedly mounted on the rotating sleeve 3262, a rotating shaft 3264 fixedly mounted on the rotating sleeve 3262, and a protective shell 3261 rotatably mounted on the rotating shaft 3264, wherein the sliding groove 3263 is slidably connected to the sliding rod 3267; rotating the rotating sleeve 3262 can drive the sliding rod 3267 to generate axial displacement through the sliding groove 3263; the protective shell 3261 can achieve small angle adjustment by means of the rotating shaft 3264, and at the same time plays a role in dust protection for the internal precision optical components.

[0043] Furthermore, the detection component 327 includes a recovery plate 3271 fixedly mounted on the protective shell 3261, and a sensor 3272 fixedly mounted on the recovery plate 3271; when the workpiece is defect-free, the sensor 3272 collects normal transmitted light; when there are bubbles, microcracks, or interlayer defects inside the quartz workpiece, the sensor 3272 collects the reflected, refracted, and distorted light signals generated by the defect interface to complete defect imaging and identification; during the rotation of the workpiece driven by the clamping assembly 22, the sensor 3272 continuously collects multi-view images to provide raw detection data for subsequent image registration and fusion.

[0044] During use, firstly, after the clamping assembly 22 completes the centering and clamping of the quartz workpiece, the drive assembly 31 starts. The support frame 311 serves as the support base for the entire machine, providing installation and positioning for the auxiliary light 313 and the adjustment rod 312. The adjustment rod 312, which is slidably installed on the inner wall of the support frame 311, slides up and down, driving the entire detection assembly 32 to rise and fall as a whole, thereby adjusting the working distance between the optical system and the quartz workpiece to adapt to quartz products of different thicknesses and sizes. The auxiliary light 313 provides ambient lighting, making it convenient for operators to intuitively observe the working conditions at the workstation.

[0045] The detection component 32 is adjusted to the target working position by the adjusting rod 312. The guide component 321 provides an installation guide reference for the eyepiece component 322 and the connecting component 323. The light source 3252 in the light source component 325 outputs detection light, which is sent into the interior of the reflector 324 through the connecting tube 3251. The operator turns the rotary button 3244, which drives the rotary rod 3242 to rotate the beam splitter 3243 inside the adjusting housing 3241, adjusting the tilt angle of the beam splitter 3243 to complete the beam splitting and refraction, so that the beam is incident downwards onto the adjusting component 32. 6; Rotating the rotating sleeve 3262, the sliding rod 3267 is driven by the sliding groove 3263 to move along the axis of the fixed sleeve 3265, which drives the collimating objective lens 3268 to change its position, and cooperates with the focusing objective lens 3269 inside the fixed sleeve 3265 to complete the beam shaping, outputting a detection beam with excellent collimation, effectively suppressing stray light, reducing false defect interference, and improving the imaging signal-to-noise ratio; the protective shell 3261 can be adjusted slightly by means of the rotating shaft 3264, and at the same time plays a role in dust protection for the internal precision optical components.

[0046] The collimated beam, after being shaped, illuminates the surface of the quartz workpiece. The reflected light from the upper surface of the workpiece travels back along the original optical path, passing through the adjustment component 326 and the beam splitter 3243 before being transmitted upwards to the eyepiece 322, completing the self-collimation and centering verification to check for any eccentricity in the workpiece. If there are no defects inside the workpiece, the beam penetrates directly through it, and the sensor 3272 only collects the normal transmitted light. When there are bubbles, microcracks, or interlayer defects inside the workpiece, the light is reflected and refracted at the defect interface, producing upward-deflected and scattered light. This deflected and scattered light travels upwards along the optical path to the detection component 327, where it is carried by the sensor 3272 on the recovery plate 3271. The system collects distorted light signals to achieve defect imaging and identification. When the workpiece is defect-free, the light beam penetrates the quartz product directly downwards and does not return to the sensor 3272, so the sensor 3272 has no effective light signal output. This optical path is multiplexed, and the same optical mechanism can simultaneously complete centering verification and defect detection. The equipment has a high degree of integration. When the clamping component 22 drives the workpiece to rotate, the sensor 3272 continuously collects multi-view images to provide raw data for subsequent image registration and fusion. After all the detections are completed, the adjusting rod 312 drives the detection component 32 to reset, and each optical component maintains its current parameters or returns to its initial position to prepare for the detection of the next workpiece.

[0047] The remaining structure is the same as that in Example 2.

[0048] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A full-field optical online inspection device for internal defects in quartz products, characterized in that: It includes an operating table (1), a clamping unit (2) fixedly installed on the operating table (1), and a detection unit (3) fixedly installed on the operating table (1). The clamping unit (2) includes a placement member (21) fixedly mounted on the operating table (1) and a clamping assembly (22) fixedly mounted on the operating table (1). The detection unit (3) includes a drive assembly (31) fixedly installed on the operating table (1) and a detection assembly (32) fixedly installed on the drive assembly (31). The detection assembly (32) includes a guide (321) fixedly mounted on the adjustment rod (312), an eyepiece (322) fixedly mounted on the guide (321), a connector (323) fixedly mounted on the guide (321), a reflector (324) fixedly mounted on the connector (323), an adjustment (326) fixedly mounted on the reflector (324), a detection component (327) fixedly mounted on the adjustment (326), and a light source (325) fixedly mounted on the reflector (324), wherein the light source (325) is fixedly connected to the adjustment rod (312); The adjustment component (326) includes a fixed sleeve (3265) fixedly installed at the bottom of the adjustment housing (3241), a limiting groove (3266) fixedly installed on the fixed sleeve (3265), a sliding rod (3267) slidably installed on the inner wall of the fixed sleeve (3265), a collimating objective lens (3268) fixedly installed on the sliding rod (3267), and a focusing objective lens (3269) fixedly installed on the inner wall of the fixed sleeve (3265). A rotating sleeve (3262) is rotatably mounted on the outer wall of a fixed sleeve (3265), a sliding groove (3263) is fixedly mounted on the rotating sleeve (3262), a rotating shaft (3264) is fixedly mounted on the rotating sleeve (3262), and a protective shell (3261) is rotatably mounted on the rotating shaft (3264), and the sliding groove (3263) is slidably connected to the sliding rod (3267).

2. The full-field optical online inspection device for internal defects of quartz products according to claim 1, characterized in that: The clamping assembly (22) includes a motor (221) fixedly mounted on the operating table (1), a buffer (225) fixedly mounted on the output end of the motor (221), a positioning block (226) fixedly mounted on the buffer (225), a rotating disk (222) fixedly mounted on the output end of the motor (221), and an arc groove (223) fixedly mounted on the rotating disk (222).

3. The full-field optical online inspection device for internal defects of quartz products according to claim 2, characterized in that: A clamping rod (224) is slidably installed inside the arc groove (223). A connecting shell (227) is fixedly installed on the operating table (1). A limiting plate (228) is fixedly installed on the connecting shell (227). A limiting groove (229) is fixedly installed on the limiting plate (228). The clamping rod (224) is slidably connected to the limiting groove (229) and the arc groove (223) respectively.

4. The full-field optical online inspection device for internal defects of quartz products according to claim 3, characterized in that: The drive assembly (31) includes a support frame (311) fixedly mounted on the operating table (1), an auxiliary light (313) fixedly mounted on the support frame (311), and an adjustment rod (312) slidably mounted on the inner wall of the support frame (311).

5. The full-field optical online inspection device for internal defects of quartz products according to claim 4, characterized in that: The reflector (324) includes an adjustment housing (3241) fixedly mounted on the connector (323), a rotating rod (3242) rotatably mounted on the adjustment housing (3241), a beam splitter (3243) fixedly mounted on the rotating rod (3242), and a rotary button (3244) fixedly mounted on the rotating rod (3242). The rotary button (3244), the rotating rod (3242), and the beam splitter (3243) are all rotatably connected to the adjustment housing (3241).

6. The full-field optical online inspection device for internal defects of quartz products according to claim 5, characterized in that: The light source component (325) includes a connecting tube (3251) fixedly mounted on the adjusting housing (3241) and a light source (3252) fixedly mounted on the connecting tube (3251), and the light source (3252) is fixedly connected to the adjusting rod (312).

7. The full-field optical online inspection device for internal defects of quartz products according to claim 6, characterized in that: The detection component (327) includes a recovery plate (3271) fixedly mounted on a protective housing (3261) and a sensor (3272) fixedly mounted on the recovery plate (3271).

Images