A method, apparatus and device for calibrating mechanical errors

Abstract

This invention discloses a method, apparatus, and device for calibrating mechanical errors. The calibration method includes: acquiring a single-axis movement distance and controlling a drive unit to move the single-axis movement distance from a starting point to an ending point; acquiring the theoretical distance between the ending point and the zero point and controlling the drive unit to move the theoretical distance between the ending point and the zero point to a first position; acquiring the voltage at the first position and recording the first position voltage as the trigger voltage for zeroing. The technical solution of this invention utilizes the characteristics of a starting point photoelectric switch, a zero point photoelectric switch, and an ending point photoelectric switch to achieve a multi-point analog quantity calibration of the zero point. Compared with existing single-point origin establishment methods, this eliminates the influence of installation errors and individual mechanical differences on the zero point, improving the accuracy of scanning electron microscopes.

Description

Technical Field

[0001] This invention relates to the field of error calibration technology, and in particular to a method, apparatus and equipment for calibrating mechanical errors. Background Technology

[0002] Existing scanning electron microscope sample stages or similar single-axis actuators typically use stepper motors or other motors to drive lead screws, guide rails, or slides to achieve linear motion. During operation, the controller usually operates based on a preset number of pulses, direction signals, or in an open-loop manner, establishing an initial zero position through a home sensor or a single reference stop.

[0003] However, when relying solely on open-loop pulse counting, the controller can only know the theoretical number of steps that should have been taken, but cannot confirm whether the actuator has actually completed the corresponding displacement. When sudden load changes, increased friction, resonance, jamming, or instantaneous stall occur, the system may lose steps, but the count value still appears to be correct, thus causing the problem of zero position offset. Summary of the Invention

[0004] This invention provides a method, apparatus, and device for calibrating mechanical errors, thereby solving the problem that scanning electron microscopes in the prior art cannot identify and calibrate zero-position offset.

[0005] According to a first aspect of the present invention, a method for calibrating mechanical errors is provided, applied in a scanning electron microscope; the scanning electron microscope includes: a sample stage, a moving axis, a drive unit, a photoelectric switch group, and a controller; the drive unit is drivenly connected to the sample stage and is used to drive the sample stage to move on the moving axis; each moving axis corresponds to a photoelectric switch group; the photoelectric switch group includes at least a start photoelectric switch, a zero-point photoelectric switch, and an end photoelectric switch arranged along the moving direction of the moving axis; the zero-point photoelectric switch is located between the start photoelectric switch and the end photoelectric switch; the controller is electrically connected to the drive unit and the photoelectric switches respectively; Calibration methods include: S10. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the ending point; wherein, the detection window of the starting point photoelectric switch covers the starting point, and the detection window of the ending point photoelectric switch covers the ending point; S11. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point; wherein, the detection window of the zero-point photoelectric switch covers the first position; S12. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero; wherein, the first position voltage is the voltage value output by the zero-point photoelectric switch when the device moves to the first position.

[0006] Optionally, before obtaining the theoretical distance from the endpoint to the zero point, the following steps are also included: Obtain the initial starting voltage output by the starting photoelectric switch; After recording the trigger voltage at the first position where the voltage is zero, the following is also included: The theoretical distance between the zero point and the starting point is obtained, and the drive unit is controlled to move from the zero point to the second position by the theoretical distance between the zero point and the starting point; wherein, the detection window of the starting point photoelectric switch covers the second position; The second position voltage is obtained and it is determined whether the second position voltage is the same as the initial starting voltage; wherein, the second position voltage is the voltage value output by the starting photoelectric switch when the device moves to the second position; When the voltage at the second position is the same as the voltage at the initial starting point, the second position is determined as the starting point.

[0007] Optionally, after determining whether the voltage at the second position is the same as the initial starting voltage, the method further includes: When the voltage at the second position is different from the initial starting voltage, the control drive unit moves from the second position until it receives the trigger voltage; The control drive unit moves from the zero point to the theoretical distance between the zero point and the starting point to the third position; wherein, the detection window of the starting point photoelectric switch covers the third position; The third position voltage is obtained, and when the third position voltage is the same as the second position voltage, the third position is determined as the calibration start position; wherein, the third position voltage is the voltage value output by the starting photoelectric switch when moving to the third position.

[0008] Optionally, before obtaining the theoretical distance from the endpoint to the zero point, the following steps are also included: Obtain the initial endpoint voltage output by the endpoint photoelectric switch; After recording the trigger voltage at the first position where the voltage is zero, the following is also included: The theoretical distance between the zero point and the endpoint is obtained, and the drive unit is controlled to move from the zero point to the fourth position. The detection window of the endpoint photoelectric switch covers the fourth position. Obtain the voltage at the fourth position and determine whether the voltage at the fourth position is the same as the initial endpoint voltage; wherein, the voltage at the fourth position is the voltage value output by the endpoint photoelectric switch when the device moves to the fourth position; When the voltage at the fourth position is the same as the initial end-point voltage, the fourth position is determined as the end point.

[0009] Optionally, after determining whether the voltage at the fourth position is the same as the initial and final voltages, the method further includes: When the voltage at the fourth position is different from the initial end voltage, the control drive unit moves from the fourth position until it receives the trigger voltage; The control drive unit moves from the zero point to the theoretical distance between the zero point and the end point to the fifth position; wherein, the detection window of the end point photoelectric switch covers the fifth position; The fifth position voltage is obtained, and when the fifth position voltage is the same as the fourth position voltage, the fifth position is determined as the calibration endpoint position; wherein, the fifth position voltage is the voltage value output by the endpoint photoelectric switch when moving to the fifth position.

[0010] Optionally, after recording the trigger voltage at the first position where the voltage is zero, the method further includes: The system acquires the imaging zero-point signal and controls the drive unit to move to the imaging zero-point position; wherein, the detection window of the zero-point photoelectric switch covers the imaging zero-point position; the imaging zero-point position is the zero-point position determined manually. Obtain the imaging zero-point voltage and determine it as the trigger voltage for the zero point.

[0011] Optionally, after acquiring the imaging zero-point voltage and determining it as the trigger voltage for the zero point, the method further includes: When the imaging zero-point voltage differs from the first position voltage, the theoretical distance between the endpoint and the zero point is updated to the distance between the endpoint and the imaging zero-point position, and the theoretical distance between the zero point and the starting point is updated to the distance between the starting point and the imaging zero-point position.

[0012] Optionally, the moving axes include an X-axis moving axis, a Y-axis moving axis, a Z-axis moving axis, and a T-axis moving axis; Steps S10 to S12 are executed for each moving axis according to the preset execution order; wherein, in the preset execution order, the execution order of the X-direction moving axis and the T-direction moving axis is before the execution order of the Z-direction moving axis and the Y-direction moving axis.

[0013] According to a second aspect of the present invention, a mechanical error calibration apparatus is provided for performing a mechanical error calibration method. The mechanical error calibration apparatus includes: The first moving module is used to acquire the single-axis moving distance and control the drive unit to move the single-axis moving distance from the starting point to the ending point; wherein, the detection window of the starting point photoelectric switch covers the starting point, and the detection window of the ending point photoelectric switch covers the ending point; The second moving module is used to obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the theoretical distance between the endpoint and the zero point to the first position; wherein, the detection window of the zero point photoelectric switch covers the first position; The zero-point calibration module is used to acquire the first position voltage and record the trigger voltage when the first position voltage is zero; wherein, the first position voltage is the voltage value output by the zero-point photoelectric switch when the device moves to the first position.

[0014] According to a third aspect of the present invention, a computer device is provided, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement a method for calibrating mechanical errors.

[0015] The technical solution of this invention realizes a multi-point analog quantity calibration zero point scheme by utilizing the characteristics of the starting point photoelectric switch, the zero point photoelectric switch and the ending point photoelectric switch. Compared with the existing single-point origin establishment method, it eliminates the influence of installation error and mechanical individual differences on the zero point and improves the accuracy of scanning electron microscope.

[0016] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the internal structure of a scanning electron microscope according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the structural position of a photoelectric switch assembly according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the electrical connections of a scanning electron microscope according to an embodiment of the present invention; Figure 4 This is a flowchart of a first mechanical error calibration method provided according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the first mechanical error calibration method provided according to an embodiment of the present invention; Figure 6 This is a flowchart of a second mechanical error calibration method provided according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of a second mechanical error calibration method provided according to an embodiment of the present invention; Figure 8 This is a flowchart of a third mechanical error calibration method provided according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the structure of the third mechanical error calibration method provided according to an embodiment of the present invention; Figure 10 This is a flowchart of a fourth mechanical error calibration method provided according to an embodiment of the present invention; Figure 11 This is a schematic diagram of the structure of the fourth mechanical error calibration method provided according to an embodiment of the present invention; Figure 12 This is a flowchart of a fifth method for calibrating mechanical errors according to an embodiment of the present invention; Figure 13 This is a schematic diagram of the fifth mechanical error calibration method provided according to an embodiment of the present invention; Figure 14 This is a flowchart of a sixth mechanical error calibration method provided according to an embodiment of the present invention; Figure 15 This is a schematic diagram of the sixth mechanical error calibration method provided according to an embodiment of the present invention; Figure 16 This is a flowchart of a seventh mechanical error calibration method provided according to an embodiment of the present invention; Figure 17 This is a schematic diagram of the internal structure of another scanning electron microscope provided according to an embodiment of the present invention; Figure 18 This is a schematic diagram of the structure of a mechanical error calibration device provided according to an embodiment of the present invention; Figure 19 This is a schematic diagram of a computer device structure according to an embodiment of the present invention, which is used for a calibration method for mechanical errors. Detailed Implementation

[0019] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0020] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0021] Existing scanning electron microscopes, when establishing a reference using a single-point origin, are susceptible to installation tolerances, machining errors, lead screw backlash, sensor hysteresis, and component aging, leading to inconsistencies in zero points between different devices; even if they return to the same theoretical position, it does not necessarily mean they have returned to the same actual mechanical position. Therefore, this invention provides a... In a scanning electron microscope. Figure 1 This is a schematic diagram of the internal structure of a scanning electron microscope according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the structural position of a photoelectric switch assembly according to an embodiment of the present invention. Figure 3 This is a schematic diagram of the electrical connections of a scanning electron microscope according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 and Figure 3 As shown, the scanning electron microscope in this embodiment of the invention includes: a sample stage 1, a moving shaft 2, a drive unit 3, a photoelectric switch group 4, and a controller 5; the drive unit 3 is connected to the sample stage 1 for driving the sample stage 1 to move on the moving shaft 2; each moving shaft 2 corresponds to a group of photoelectric switches 4; the photoelectric switch group 4 includes at least a starting photoelectric switch 41, a zero-point photoelectric switch 42, and an ending photoelectric switch 43 arranged along the moving direction of the moving shaft 2; the zero-point photoelectric switch 42 is located between the starting photoelectric switch 41 and the ending photoelectric switch 43; the controller 5 is electrically connected to the drive unit 3 and the photoelectric switches respectively. The sample stage 1 can be used to carry the sample, and the sample stage 1 is arranged on the moving shaft 2, and the sample stage 1 can move along the extension direction of the moving shaft 2. The scanning electron microscope may include multiple moving shafts 2 with different extension directions, and each moving shaft 2 is connected to the drive unit 3 at one end. Figure 1 Only the X and Y axes are shown in the diagram. The controller 5 controls the drive unit 3 to operate, thereby moving the sample stage 1 in the corresponding extension directions. For example, a scanning electron microscope includes X-axis, Y-axis, Z-axis, R-axis, and T-axis movements. Figure 1 (The Z-axis, R-axis, and T-axis are not shown in the diagram). The controller 5 is electrically connected to the drive unit 3 corresponding to each of the different movement axes 2, thereby controlling the movement of the sample stage 1 in space. Each movement axis 2 is equipped with a photoelectric switch group 4, and each photoelectric switch group 4 includes at least a start photoelectric switch 41, a zero-point photoelectric switch 42, and an end photoelectric switch 43. The start photoelectric switch 41, the zero-point photoelectric switch 42, and the end photoelectric switch 43 must be set parallel to the extension direction of the movement axis 2. For example, as shown... Figure 2As shown, the moving axis 2 extends along the X direction, so the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 are arranged sequentially along the X direction. The photoelectric switches in the photoelectric switch group 4 can be set on a support parallel to the extension direction, or at other positions on the scanning electron microscope, but must be parallel to the extension direction of the corresponding moving axis 2, thereby detecting the movement position of the reaction sample stage 1 through the photoelectric switches. In some embodiments, the photoelectric switches can be triggered by a baffle 6 set on the sample stage 1; that is, the movement of the sample stage 1 drives the baffle 6 to move. When the baffle 6 blocks the corresponding photoelectric switch, the photoelectric switch trigger controller 5 receives the voltage signal from the photoelectric switch. It is understood that the photoelectric switches in this embodiment are analog photoelectric switches, meaning that the output voltage value varies depending on the area of ​​the photoelectric switch detection area blocked by the baffle 6. For example, the output voltage range of the photoelectric switch is 0 to 3.3V; when the photoelectric switch is not blocked, it outputs 0V, and when the baffle 6 completely blocks the detection area, it outputs 3.3V. Therefore, this embodiment of the invention uses the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 to achieve zero-point error calibration. Figure 4 This is a flowchart of a first mechanical error calibration method provided according to an embodiment of the present invention. Figure 5 This is a schematic diagram of the structure of the first mechanical error calibration method provided according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, this embodiment of the invention provides a method for calibrating mechanical errors. This calibration method can be mainly used to calibrate the zero-point position of the sample stage 1, i.e., the initial zero position of the scanning electron beam. The calibration method includes: S10. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the ending point. The detection window w of the starting point photoelectric switch 41 covers the starting point a, and the detection window w of the ending point photoelectric switch 43 covers the ending point b.

[0022] The detection window w can be the detection area of ​​the photoelectric switch. The single-axis movement distance L0 can be the theoretical distance between the starting point a and the ending point b of the pre-set moving axis 2. The starting point a and the ending point b can be the starting point a and the ending point b of the movement of the baffle 6, or they can represent the starting point a and the ending point b of the sample stage 1 on the moving axis 2. The detection window w of the starting point photoelectric switch 41 covers the starting point a, so that the controller 5 can receive the voltage signal of the starting point photoelectric switch 41; the detection window w of the ending point photoelectric switch 43 covers the ending point b, so that the controller 5 can receive the voltage signal of the ending point photoelectric switch 43. It can be determined whether the baffle 6 has moved from the starting point a to the ending point b by receiving the voltage signals of the starting point photoelectric switch 41 and the ending point photoelectric switch 43.

[0023] It is understandable that the sample stage 1 is driven by the drive unit 3 to move the moving shaft 2, which in turn moves the baffle 6. The starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 are actually set on the moving path of the baffle 6, and the movement of the sample stage 1 is inferred by the triggering of the baffle 6. The single-axis movement distance L0 can represent both the movement distance of the baffle 6 and the movement distance of the sample stage 1.

[0024] In this embodiment of the invention, the single-axis movement distance L0 is known (a pre-set standard distance), that is, the distance between the starting point a and the ending point b is fixed. Therefore, this embodiment of the invention obtains the single-axis movement distance L0 and controls the drive unit 3 to move the single-axis movement distance L0 from the starting point a to the ending point b. The positions of the starting point a and the ending point b are defined by the voltage output by the starting point photoelectric switch 41 and the ending point photoelectric switch 43.

[0025] S11. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position. The detection window w of the zero-point photoelectric switch 42 covers the first position d.

[0026] The theoretical distance L1 between the endpoint and the zero point can be the theoretical distance between the endpoint b and the zero point c, which is also known. Once the position of the endpoint b is determined, the position of the zero point c can be deduced from the theoretical distance L1 between the endpoint and the zero point. That is, the control drive unit 3 moves from the endpoint b to the first position d, which is the actual position of the zero point c.

[0027] S12. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero. The first position voltage is the voltage value output by the zero-point photoelectric switch 42 when the device moves to the first position d.

[0028] When the baffle 6 moves to the first position d, the controller 5 receives the first position voltage. Since the first position d is the actual zero point c, the controller 5 adjusts the first position voltage to the trigger voltage of the zero point c. That is, after the controller 5 receives the first position voltage, the sample stage 1 moves to the zero point c position by default.

[0029] It is understood that each photoelectric switch is assumed to have an output voltage range of 0 to 3.3V. Ideally, the starting photoelectric switch 41, the zero-point photoelectric switch 42, and the ending photoelectric switch 43 are respectively positioned at the starting point a, the zero point c, and the ending point b. At this time, the voltage received by the controller 5 is 3.3V, meaning that at the starting point a, the zero point c, and the ending point b, the baffle 6 completely blocks the detection window w. In this case, the controller 5 uses 3.3V as the trigger voltage for the zero point c. However, due to installation errors and other reasons, the installation of the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 may be offset. Therefore, this embodiment of the invention utilizes the characteristics of the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 to achieve the calibration of the zero point c.

[0030] For example, the single-axis movement distance L0 is obtained as 200mm, and the drive unit 3 is controlled to move 200mm from the starting point a to the ending point b. Due to installation errors, the voltage output by the starting point photoelectric switch 41 and the ending point photoelectric switch 43 may not be 3.3V. Assuming that the starting point photoelectric switch 41 outputs 1.7V and the ending point photoelectric switch 43 outputs 2.5V, then the position of the baffle 6 corresponding to 1.7V is defined as the starting point a, and the position of the baffle 6 corresponding to 2.5V is defined as the ending point b. The theoretical distance L1 between the ending point b and the zero point c is obtained as 80mm, and the drive unit 3 is controlled to move 80mm from the ending point b to the first position d. The first position d is the actual position of the zero point c. The voltage of 2.3V at the first position is received and adjusted to the actual trigger voltage of the zero point c. In subsequent operations, the sample stage 1 can only be determined to be at the position of the zero point c if and only if the output voltage of the zero point photoelectric switch 42 is 2.3V.

[0031] It is understood that the embodiments of the present invention use the trigger voltage of the photoelectric switch as a reference to determine the zero point c. This method avoids the problem of missing steps in open-loop pulse counting, which leads to zero position offset, and also eliminates the installation error of the photoelectric switch.

[0032] It should be noted that the calibration method of this embodiment assumes that the installation error range of the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 does not exceed the detection window w. This limitation is also consistent with the actual situation of scanning electron microscopes.

[0033] The technical solution of this invention realizes a scheme for calibrating the zero point c of a multi-point analog quantity by utilizing the characteristics of the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43. Compared with the existing single-point origin establishment method, it eliminates the influence of installation error and mechanical individual differences on the zero point c and improves the accuracy of the scanning electron microscope.

[0034] Based on the above embodiments, Figure 6This is a flowchart of a second mechanical error calibration method provided according to an embodiment of the present invention. Figure 7 This is a schematic diagram of the structure of the second mechanical error calibration method provided according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 6 and Figure 7 As shown, the calibration method includes: S20. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the end point.

[0035] S21. Obtain the initial starting voltage output by the starting photoelectric switch.

[0036] The initial starting voltage can be the voltage value output when the baffle 6 is located at the starting point a.

[0037] S22. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point.

[0038] S23. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0039] S24. Obtain the theoretical distance between the zero point and the starting point and control the drive unit to move from the zero point to the second position by the theoretical distance between the zero point and the starting point. The detection window w of the starting point photoelectric switch 41 covers the second position e.

[0040] Among them, after zero-point c calibration, the starting point a can be automatically calibrated during operation by using the position of zero-point c.

[0041] Wherein, the theoretical distance L2 between the zero point and the starting point can be the distance between the zero point c and the starting point a under theoretical conditions. The sum of the theoretical distance L2 between the zero point and the starting point and the theoretical distance L1 between the ending point and the zero point is equal to the single-axis movement distance L0. In an ideal situation, when moving from the zero point to the second position e by the theoretical distance L2 between the zero point and the starting point, the second position e is the starting point a position; however, if the drive unit 3 has abnormalities such as step loss or stalling, the second position e may be deviated.

[0042] S25. Obtain the second position voltage and determine whether the second position voltage is the same as the initial starting voltage. The second position voltage is the voltage value output by the starting photoelectric switch 41 when the device moves to the second position e.

[0043] Specifically, by obtaining the voltage at the second position and combining it with whether the voltage at the initial starting point is the same, it is determined whether the second position e is the same position as the starting point.

[0044] S26. When the voltage at the second position is the same as the voltage at the initial starting point, the second position is determined as the starting point.

[0045] When the voltage at the second position is the same as the voltage at the initial starting point, it indicates that the driving unit 3 is operating normally. In this case, the second position is the starting point a position.

[0046] For example, the initial starting voltage output by the starting photoelectric switch 41 is obtained as 1.7V. The theoretical distance L2 between the zero point and the starting point is obtained as 120mm. The control drive unit 3 is moved 120mm from the zero point to the second position e. The voltage at the second position is obtained as 1.7V. At this time, the voltage at the second position is the same as the initial starting voltage, so the second position e is determined to be the starting position a.

[0047] The technical solution of this invention can automatically calibrate the starting point position during the operation of the scanning electron microscope after the zero point is calibrated, and automatically identify abnormalities in the drive unit 3 to ensure the normal operation of the scanning electron microscope.

[0048] Based on the above embodiments, Figure 8 This is a flowchart of a third mechanical error calibration method provided according to an embodiment of the present invention. Figure 9 This is a schematic diagram of the structure of the third mechanical error calibration method provided in the embodiments of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 8 and Figure 9 As shown, the calibration method includes: S30. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the end point.

[0049] S31. Obtain the initial starting voltage output by the starting photoelectric switch.

[0050] S32. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point.

[0051] S33. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0052] S34. Obtain the theoretical distance between the zero point and the starting point and control the drive unit to move the theoretical distance between the zero point and the starting point to the second position.

[0053] S35. Obtain the second position voltage and determine whether the second position voltage is the same as the initial starting voltage.

[0054] S36. When the voltage at the second position is the same as the voltage at the initial starting point, the second position is determined as the starting point.

[0055] S37. When the voltage at the second position is different from the voltage at the initial starting point, the control drive unit moves from the second position until it receives the trigger voltage.

[0056] When the voltage at the second position is different from the initial starting voltage, it indicates that the drive unit 3 may have abnormalities such as step loss or stall. Therefore, it is necessary to further verify whether the abnormality is occasional or caused by the aging of the mechanical structure. At this time, the purpose of controlling the drive unit 3 to move from the second position e until the trigger voltage is received is to return to the zero point c position so as to continue repeating the journey from the zero point c to the second position e.

[0057] S38. The control drive unit moves from the zero point to the theoretical distance between the zero point and the starting point to the third position. The detection window w of the starting point photoelectric switch 41 covers the third position f.

[0058] The drive unit 3 continues to move from the zero point to the theoretical distance between the zero point and the starting point to the third position f. It is understandable that, due to potential issues such as step loss or component aging in the drive unit 3, it cannot be guaranteed that the third position f is the same as the second position e, nor can it be guaranteed that the third position f is the same as the starting point a.

[0059] S39. Obtain the voltage at the third position and, when the voltage at the third position is the same as the voltage at the second position, determine the third position as the calibration starting point. The voltage at the third position is the voltage value output by the starting photoelectric switch 41 when the device moves to the third position f.

[0060] When the voltage at the third position is the same as the voltage at the second position, it means that the results of the two strokes are the same. This may be due to irreversible reasons such as the aging of the components of the drive unit 3. Therefore, the position of the starting point a is calibrated to the third position f.

[0061] The calibration starting point position is the starting point a position, which is corrected based on the irreversible change of the driving unit 3.

[0062] For example, the drive unit 3 is controlled to move 120mm from the zero point to the third position f. The voltage at the third position is obtained as 1.6V. At this time, the voltage at the third position is the same as the voltage at the second position. It is determined that the abnormality generated by the drive unit 3 is permanent and irreversible. Therefore, the third position f is corrected to the calibration starting position.

[0063] Based on the above embodiments, Figure 10 This is a flowchart of a fourth mechanical error calibration method provided according to an embodiment of the present invention. Figure 11 This is a schematic diagram of the structure of the fourth mechanical error calibration method provided in the embodiments of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 10 and Figure 11 As shown, the calibration method includes: S40. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the end point.

[0064] S41. Obtain the initial endpoint voltage output by the endpoint photoelectric switch.

[0065] The initial endpoint voltage can be the voltage value output when the baffle 6 is located at endpoint b.

[0066] S42. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point.

[0067] S43. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0068] S44. Obtain the theoretical distance between the zero point and the endpoint and control the drive unit to move from the zero point to the fourth position. The detection window w of the endpoint photoelectric switch 43 covers the fourth position g.

[0069] Among them, after zero-point c calibration, the endpoint b can be automatically calibrated during operation by using the position of zero-point c.

[0070] The theoretical distance between zero and endpoint can be the distance between zero point c and endpoint b under theoretical conditions. The sum of the theoretical distance between zero and endpoint and the theoretical distance between endpoint and zero L1 equals the single-axis movement distance L0. Ideally, when moving the theoretical distance between zero and endpoint from zero point c to the fourth position g, the fourth position g is the position of endpoint b; however, if the drive unit 3 has abnormalities such as step loss or stalling, the endpoint b may be deviated.

[0071] S45. Obtain the voltage at the fourth position and determine whether the voltage at the fourth position is the same as the initial endpoint voltage. The voltage at the fourth position is the voltage value output by the endpoint photoelectric switch 43 when the device moves to the fourth position g.

[0072] Specifically, by obtaining the voltage at the fourth position and combining it with whether the voltage at the initial endpoint b is the same, it is determined whether the fourth position g and the endpoint b are the same position.

[0073] S46. When the voltage at the fourth position is the same as the initial end voltage, the fourth position is determined as the end point.

[0074] When the voltage at the fourth position is the same as the voltage at the initial endpoint b, it indicates that the drive unit 3 is operating normally at this time, and the fourth position is the endpoint b position.

[0075] For example, the initial endpoint voltage (b) output by the endpoint photoelectric switch 43 is 2.5V. The theoretical distance between the zero point and the endpoint is 80mm. The control drive unit 3 moves 80mm from the zero point (c) to the fourth position (g). The voltage at the fourth position is 2.5V. Since the voltage at the fourth position is the same as the initial endpoint voltage (b), the fourth position (g) is determined to be the endpoint (b).

[0076] The technical solution of this invention can automatically calibrate the endpoint b position during the operation of the scanning electron microscope after the zero point c is calibrated, automatically identify abnormalities in the drive unit 3, and ensure the normal operation of the scanning electron microscope.

[0077] Based on the above embodiments, Figure 12 This is a flowchart of the fifth mechanical error calibration method provided by an embodiment of the present invention. Figure 13 This is a structural schematic diagram of the fifth mechanical error calibration method provided according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 12 and 13 As shown, the calibration method includes: S50: Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the end point.

[0078] S51. Obtain the initial endpoint voltage output by the endpoint photoelectric switch.

[0079] S52, Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point.

[0080] S53. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0081] S54. Obtain the theoretical distance between the zero point and the endpoint and control the drive unit to move from the zero point to the fourth position.

[0082] S55. Obtain the voltage at the fourth position and determine whether the voltage at the fourth position is the same as the initial and final voltages.

[0083] S56. When the voltage at the fourth position is the same as the initial end voltage, the fourth position is determined as the end point.

[0084] S57. When the voltage at the fourth position is different from the initial end voltage, the control drive unit moves from the fourth position until it receives the trigger voltage.

[0085] When the voltage at the fourth position is different from the voltage at the initial endpoint b, it indicates that the drive unit 3 may have abnormalities such as step loss, stalling, or aging. Therefore, it is necessary to further verify whether the abnormality is occasional or caused by the aging of the mechanical structure. At this time, the purpose of controlling the drive unit 3 to move from the fourth position g until the trigger voltage is received is to return to the zero point c position so as to continue repeating the journey from the zero point c to the fourth position g.

[0086] S58, the control drive unit moves from the zero point to the theoretical distance between the zero point and the endpoint to the fifth position. The detection window w of the endpoint photoelectric switch 43 covers the fifth position.

[0087] Specifically, the drive unit 3 continues to move from zero point c to the theoretical distance between zero point and the endpoint to the fifth position h. It is understandable that, due to possible step loss, component aging, or other reasons, it cannot be guaranteed that the fifth position h and the fourth position g are the same position, nor can it be guaranteed that the fifth position h and the endpoint b are the same position.

[0088] S59. Obtain the voltage at the fifth position and, when the voltage at the fifth position is the same as the voltage at the fourth position, determine the fifth position as the calibration endpoint. The voltage at the fifth position is the voltage value output by the endpoint photoelectric switch 43 when the device moves to the fifth position h.

[0089] When the voltage at the fifth position is the same as the voltage at the fourth position, it means that the results of the two strokes are the same. This may be due to irreversible reasons such as the aging of the components of the drive unit 3. Therefore, the position of the endpoint b should be calibrated to the fifth position h.

[0090] The calibration endpoint position is the endpoint b position corrected based on the irreversible change of the driving unit 3.

[0091] For example, the drive unit 3 continues to move 80mm from zero point c to the fifth position h. The voltage at the fifth position is obtained as 2.4V. At this time, the voltage at the fifth position is the same as the voltage at the fourth position. Therefore, it is determined that the abnormality generated by the drive unit 3 is permanent and irreversible. So, the fifth position h is corrected to the calibration endpoint position.

[0092] Based on the above embodiments, Figure 14 This is a flowchart of the sixth mechanical error calibration method provided by an embodiment of the present invention. Figure 15 This is a structural schematic diagram of the sixth mechanical error calibration method provided according to an embodiment of the present invention, combined with... Figure 14 and Figure 15 As shown, the calibration method includes: S60. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the endpoint.

[0093] S61. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move the theoretical distance between the endpoint and the zero point to the first position.

[0094] S62. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0095] S63. Acquire the imaging zero-point signal and control the drive unit to move to the imaging zero-point position. The detection window w of the zero-point photoelectric switch 42 covers the imaging zero-point position i; the imaging zero-point position i is a manually determined zero-point position.

[0096] The method of calibrating the zero point using the starting point photoelectric switch 41, the zero point photoelectric switch 42, and the ending point photoelectric switch 43 is mechanical calibration. However, to further enhance the user experience, the zero point can be further calibrated by combining human judgment.

[0097] The imaging zero-point position i can be the zero-point position determined by the user's naked eye. The imaging zero-point signal can be a movement signal input by the user to control the drive unit 3 to move to the imaging zero-point position i. In some embodiments, the imaging zero-point position i can also be a zero-point position identified by artificial intelligence, and after identification, the drive unit 3 is controlled to move to the imaging zero-point position i.

[0098] S64. Obtain the imaging zero-point voltage and determine the imaging zero-point voltage as the trigger voltage of the zero point.

[0099] In order to ensure a good user experience, the scanning electron microscope is calibrated at the factory based on the user's visual judgment, so the imaging zero-point voltage is determined to be the trigger voltage of the zero point.

[0100] The technical solution of this invention acquires the imaging zero-point signal and controls the driving unit 3 to move to the imaging zero-point position i, and determines the imaging zero-point voltage as the trigger voltage of the zero point, which fully considers the user experience and improves the user experience.

[0101] Based on the above embodiments, Figure 15 This is a schematic diagram of the sixth mechanical error calibration method provided in the embodiments of the present invention. Figure 16 This is a flowchart of the seventh mechanical error calibration method provided according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 , Figure 3 , Figure 15 and Figure 16 As shown, the calibration method includes: S70. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the endpoint.

[0102] S71. Obtain the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position by the theoretical distance between the endpoint and the zero point.

[0103] S72. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero.

[0104] S73. Acquire the imaging zero-point signal and control the drive unit to move to the imaging zero-point position.

[0105] S74. Obtain the imaging zero-point voltage and determine the imaging zero-point voltage as the trigger voltage of the zero point.

[0106] S75. When the imaging zero-point voltage is different from the first position voltage, update the endpoint-zero point theoretical distance to the distance between the endpoint and the imaging zero-point position, and update the zero point-start point theoretical distance to the distance between the start point and the imaging zero-point position.

[0107] When the imaging zero-point voltage is different from the first position voltage, it indicates that there is a deviation between the mechanical calibration and the user's visual calibration. However, in order to ensure the user experience, the imaging zero-point voltage is used as the trigger voltage, and the distance L1' between the end point and the imaging zero-point position and the distance L2' between the starting point and the imaging zero-point position are updated according to the calibrated zero-point position.

[0108] Optional, Figure 17 This is a schematic diagram of the internal structure of another scanning electron microscope provided according to an embodiment of the present invention, combined with... Figure 1 , Figure 2 and Figure 17 As shown, the moving axis 2 includes an X-direction moving axis, a Y-direction moving axis, a Z-direction moving axis, and a T-direction moving axis (wherein, the Z-direction moving axis and the T-direction moving axis are not shown in the figure); Steps S10 to S12 are executed for each moving axis 2 according to the preset execution order; wherein, in the preset execution order, the execution order of the X-direction moving axis and the T-direction moving axis is before the execution order of the Z-direction moving axis and the Y-direction moving axis.

[0109] In some embodiments, an R-direction movement axis is also included, and only one photoelectric switch may be installed on the R-direction movement axis. The X-direction, Y-direction, Z-direction, R-direction, and T-direction movement axes represent the movement of the sample stage 1 along the X, Y, Z, R, and T directions, respectively. In the actual operation of the scanning electron microscope, due to the direction of movement, the movement axis 2 with the lower risk of movement is preferentially selected as the object to be calibrated first. Therefore, in the preset execution order, the execution order of the X-direction, Y-direction, and R-direction movement axes is before the execution order of the Z-direction and T-direction movement axes. The movement methods in the embodiments of the present invention include, but are not limited to, linear movement, rotational movement, and tilting movement. For example, the Z-axis is responsible for adjusting the height of the sample in the vertical direction; the Y-axis is responsible for adjusting the position of the sample in the first horizontal direction; the X-axis is responsible for adjusting the position of the sample in the second horizontal direction; the T-axis is responsible for adjusting the tilt angle of the sample; and the R-axis is responsible for adjusting the circumferential rotation of the sample.

[0110] In some embodiments, the zero points of the X-axis, Y-axis, and R-axis can be calibrated simultaneously, as can the Z-axis and T-axis, thereby improving the calibration efficiency of the scanning electron microscope.

[0111] In some embodiments, the execution order of the X-axis, Y-axis, and R-axis can be set before that of the Z-axis and T-axis. Compared with existing single-point origin establishment methods, the technical solution of this invention can utilize multi-point analog quantities from photoelectric switches to establish a more stable reference model, thereby reducing the impact of installation errors and individual mechanical differences on the origin position. Furthermore, the technical solution of this invention can characterize the hysteresis of the moving axis 2 and the sensor hysteresis, making the runtime compensation closer to the actual motion error. It can also identify step loss trends, abnormal phase currents, and stall conditions, thereby improving the reliability and safety of the sample stage 1's movement. It is understood that directly introducing an encoder in this solution would increase the volume of the vacuum chamber and affect the vacuuming efficiency, and the magnetic field might cause the electron beam to deflect, shifting the overall image and affecting the imaging effect. Therefore, high-precision calibration of the scanning electron microscope is achieved without introducing an encoder.

[0112] Based on the same inventive concept. Figure 18 This is a schematic diagram of the structure of a mechanical error calibration device provided according to an embodiment of the present invention, as shown below. Figure 18 As shown, this embodiment of the invention also provides a mechanical error calibration device for performing a mechanical error calibration method. The mechanical error calibration device includes: The first moving module 100 is used to acquire the single-axis moving distance and control the drive unit to move the single-axis moving distance from the starting point to the ending point. The detection window of the starting point photoelectric switch covers the starting point, and the detection window of the ending point photoelectric switch covers the ending point.

[0113] The second moving module 200 is used to acquire the theoretical distance between the endpoint and the zero point and control the drive unit to move from the endpoint to the first position. The detection window of the zero-point photoelectric switch covers the first position.

[0114] The zero-point calibration module 300 is used to acquire the first position voltage and record the trigger voltage when the first position voltage is zero. The first position voltage is the voltage value output by the zero-point photoelectric switch when the device moves to the first position.

[0115] The mechanical error calibration device provided in this embodiment of the invention can be used to perform any of the mechanical error calibration methods provided in the above embodiments, has corresponding functional modules, and has the same technical effect.

[0116] Based on the same inventive concept, embodiments of the present invention also provide a computer device. Figure 19 This is a schematic diagram of a computer device structure according to an embodiment of the present invention, which is used for a calibration method for mechanical errors. Figure 19 As shown, it includes a memory, a processor, and a computer program stored in the memory and capable of running on the processor. When the processor executes the program, it implements a method for calibrating mechanical errors.

[0117] The term "computer equipment" is intended to refer to various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. Computer equipment can also refer to various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0118] like Figure 19As shown, the computer device 50 includes at least one processor 51 and a memory, such as a read-only memory 52 and a random access memory 53, communicatively connected to the at least one processor 51. The memory stores computer programs executable by the at least one processor. The processor 51 can perform various appropriate actions and processes based on the computer program stored in the read-only memory 52 or loaded from storage unit 58 into the random access memory 53. The random access memory 53 may also store various programs and data required for the operation of the computer device 50. The processor 51, read-only memory 52, and random access memory 53 are interconnected via a bus 54. An I / O interface 55 is also connected to the bus 54.

[0119] Multiple components in computer device 50 are connected to I / O interface 55, including: input unit 56, such as keyboard, mouse, etc.; output unit 57, such as various types of monitors, speakers, etc.; storage unit 58, such as disk, optical disk, etc.; and communication unit 59, such as network card, modem, wireless transceiver, etc. Communication unit 59 allows computer device 50 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0120] Processor 51 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 51 include, but are not limited to, central processing units, graphics processing units, various special-purpose artificial intelligence computing chips, various processors running machine learning model algorithms, digital signal processors, and any suitable processor, controller, microcontroller, etc. Processor 51 performs the various methods and processes described above, such as calibration methods applied to mechanical errors.

[0121] Based on the same inventive concept, embodiments of the present invention also provide a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements a method for calibrating mechanical errors.

[0122] Of course, the computer-readable storage medium provided in the embodiments of the present invention has computer-executable instructions that are not limited to the method operations described above, but can also perform related operations in the mechanical error calibration method provided in any embodiment of the present invention. (Continue referring to...) Figure 19As shown, it is tangibly contained in a computer-readable storage medium, such as storage unit 58. In some embodiments, part or all of the computer program may be loaded and / or installed on the computer device 50 via read-only memory 52 and / or communication unit 59. When the computer program is loaded into random access memory 53 and executed by processor 51, one or more steps of the calibration method for mechanical errors described above may be performed. Alternatively, in other embodiments, processor 51 may be configured by any other suitable means (e.g., by means of firmware) to perform the calibration method for mechanical errors.

[0123] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays, application-specific integrated circuits (ASICs), application-specific standard products (ASICs), systems-on-a-chip (SoCs), payload programmable logic devices, computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0124] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0125] In the context of embodiments of the present invention, a computer-readable storage medium may be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory, read-only memory, erasable programmable read-only memory, optical fibers, portable compact disk read-only memory, optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0126] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0127] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A method for calibrating mechanical errors, characterized in that, This invention is used in scanning electron microscopes. The scanning electron microscope includes a sample stage, a moving axis, a drive unit, a photoelectric switch group, and a controller. The drive unit is connected to the sample stage and drives the sample stage to move along the moving axis. Each moving axis corresponds to a set of photoelectric switches. Each photoelectric switch group includes at least a start photoelectric switch, a zero-point photoelectric switch, and an end photoelectric switch arranged along the moving direction of the moving axis. The zero-point photoelectric switch is located between the start and end photoelectric switches. The controller is electrically connected to both the drive unit and the photoelectric switches. The calibration method includes: S10. Obtain the single-axis movement distance and control the drive unit to move the single-axis movement distance from the starting point to the ending point; wherein, the detection window of the starting point photoelectric switch covers the starting point, and the detection window of the ending point photoelectric switch covers the ending point; S11. Obtain the theoretical distance between the endpoint and the zero point and control the driving unit to move the theoretical distance between the endpoint and the zero point from the endpoint to a first position; wherein, the detection window of the zero-point photoelectric switch covers the first position; S12. Obtain the first position voltage and record the trigger voltage when the first position voltage is zero; wherein, the first position voltage is the voltage value output by the zero-point photoelectric switch when the device moves to the first position.

2. The calibration method according to claim 1, characterized in that, Before obtaining the theoretical distance from the endpoint to the zero point, the following steps are also included: Obtain the initial starting voltage output by the starting photoelectric switch; After recording the trigger voltage at the first position where the voltage is zero, the process also includes: The theoretical distance between the zero point and the starting point is obtained, and the driving unit is controlled to move from the zero point to the second position by the theoretical distance between the zero point and the starting point; wherein the detection window of the starting point photoelectric switch covers the second position; Acquire the second position voltage and determine whether the second position voltage is the same as the initial starting voltage; wherein, the second position voltage is the voltage value output by the starting photoelectric switch when the device moves to the second position; When the voltage at the second position is the same as the initial starting voltage, the second position is determined to be the starting point.

3. The calibration method according to claim 2, characterized in that, After determining whether the second position voltage is the same as the initial starting voltage, the method further includes: When the voltage at the second position is different from the initial starting voltage, the driving unit is controlled to move from the second position until the trigger voltage is received; The drive unit is controlled to move from the zero point to the theoretical distance between the zero point and the starting point to the third position; wherein the detection window of the starting point photoelectric switch covers the third position; The third position voltage is obtained, and when the third position voltage is the same as the second position voltage, the third position is determined as the calibration start position; wherein, the third position voltage is the voltage value output by the starting photoelectric switch when the device moves to the third position.

4. The calibration method according to claim 1, characterized in that, Before obtaining the theoretical distance from the endpoint to the zero point, the following steps are also included: Obtain the initial endpoint voltage output by the endpoint photoelectric switch; After recording the trigger voltage at the first position where the voltage is zero, the process also includes: The theoretical distance from zero to endpoint is obtained, and the driving unit is controlled to move from the zero point to the fourth position by the theoretical distance from zero to endpoint; wherein the detection window of the endpoint photoelectric switch covers the fourth position; The fourth position voltage is obtained and it is determined whether the fourth position voltage is the same as the initial endpoint voltage; wherein, the fourth position voltage is the voltage value output by the endpoint photoelectric switch when the device moves to the fourth position; When the voltage at the fourth position is the same as the voltage at the initial endpoint, the fourth position is determined to be the endpoint.

5. The calibration method according to claim 4, characterized in that, After determining whether the fourth position voltage is the same as the initial endpoint voltage, the method further includes: When the voltage at the fourth position is different from the initial end voltage, the driving unit is controlled to move from the fourth position until the trigger voltage is received. The drive unit is controlled to move from the zero point to the theoretical distance between the zero point and the endpoint to the fifth position; wherein the detection window of the endpoint photoelectric switch covers the fifth position; The fifth position voltage is obtained, and when the fifth position voltage is the same as the fourth position voltage, the fifth position is determined as the calibration endpoint position; wherein, the fifth position voltage is the voltage value output by the endpoint photoelectric switch when the device moves to the fifth position.

6. The calibration method according to claim 1, characterized in that, After recording the trigger voltage at the first position where the voltage is zero, the process also includes: The system acquires the imaging zero-point signal and controls the drive unit to move to the imaging zero-point position; wherein, the detection window of the zero-point photoelectric switch covers the imaging zero-point position; the imaging zero-point position is a zero-point position determined manually. The imaging zero-point voltage is obtained and determined as the trigger voltage of the zero point.

7. The calibration method according to claim 6, characterized in that, After acquiring the imaging zero-point voltage and determining the imaging zero-point voltage as the trigger voltage of the zero point, the method further includes: When the imaging zero-point voltage is different from the first position voltage, the endpoint-zero point theoretical distance is updated to the distance between the endpoint and the imaging zero-point position, and the zero-point-starting point theoretical distance is updated to the distance between the starting point and the imaging zero-point position.

8. The calibration method according to claim 1, characterized in that, The moving axes include an X-direction moving axis, a Y-direction moving axis, a Z-direction moving axis, and a T-direction moving axis; Steps S10 to S12 are performed on each of the moving axes according to a preset execution order; wherein, in the preset execution order, the execution order of the X-direction moving axis and the T-direction moving axis is before the execution order of the Z-direction moving axis and the Y-direction moving axis.

9. A calibration device for mechanical errors, characterized in that, A calibration method for performing mechanical errors according to any one of claims 1-8, wherein the calibration apparatus for mechanical errors comprises: The first moving module is used to acquire the single-axis moving distance and control the drive unit to move the single-axis moving distance from the starting point to the ending point; wherein, the detection window of the starting point photoelectric switch covers the starting point, and the detection window of the ending point photoelectric switch covers the ending point; The second moving module is used to obtain the theoretical distance between the endpoint and the zero point and control the driving unit to move the theoretical distance between the endpoint and the zero point from the endpoint to the first position; wherein the detection window of the zero point photoelectric switch covers the first position; A zero-point calibration module is used to acquire a first position voltage and record the trigger voltage at which the first position voltage is zero; wherein, the first position voltage is the voltage value output by the zero-point photoelectric switch when the device moves to the first position.

10. A computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the calibration method as described in any one of claims 1-8.

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