Ultrafast angle-resolved photoelectron spectrometer based on x-ray free electron laser

Abstract

The present application relates to the technical field of photoelectron spectroscopy, and particularly relates to an ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser, which comprises a beam combining cavity, a main analysis cavity, an upper analysis cavity, a sample manipulation platform and an energy analyzer; the beam combining cavity is used for superimposing a hard X-ray free electron laser beam line and an ultrafast pump laser to form a combined beam; the main analysis cavity is provided with an optical path, the beam combining cavity is connected with the main analysis cavity at the incident end of the optical path and controls vacuum communication or isolation through an entrance valve; the bottom end of the upper analysis cavity is connected with the top end of the main analysis cavity and controls vacuum communication or isolation through an upper valve; the sample manipulation platform is arranged at the top end of the upper analysis cavity, the lower end of the sample manipulation platform is used for placing a sample and is lifted between the upper analysis cavity and the main analysis cavity to convey the sample and adjust the sample to cooperate with the optical path; the energy analyzer is connected with the main analysis cavity and is used for analyzing photoelectrons excited on the surface of the sample. The overall detection precision and operation stability can be improved.

Description

Technical Field

[0001] This invention relates to the field of photoelectron spectroscopy measurement technology, and in particular to an ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser. Background Technology

[0002] Ultrafast angle-resolved photoelectron spectroscopy (UAST) is an advanced characterization instrument that combines pump-probe technology for studying electron dynamics on ultrashort timescales, capable of operating at femtosecond (10⁻¹⁰) wavelengths. -15 s) Acquiring band structure and electronic momentum information of materials on a timescale. This device can perform in-situ measurements of the electronic band structure, Fermi surface distribution, electronic momentum information, and ultrafast evolution processes in local regions of materials, achieving joint detection of multi-dimensional information on the energy, momentum, and time of electronic states. Compared to traditional angle-resolved photoelectron spectroscopy (ARPS) devices, which are mainly used to measure the equilibrium band dispersion of materials, ultrafast ARPS devices further possess the ability to study ultrafast electronic dynamics processes and transient unoccupied states above the Fermi level, thus significantly improving the research level on the working mechanisms of complex quantum materials, heterostructures, and micro / nano functional devices. However, ultra-high time-resolution experiments place higher demands on system performance, requiring higher overall detection accuracy and operational stability. Currently, there is a lack of domestic research and application of ultrafast ARPS devices based on X-ray free-electron lasers, therefore, targeted research and design are urgently needed. Summary of the Invention

[0003] In view of the above-mentioned deficiencies of the prior art, the technical problem to be solved by the present invention is to provide an ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser, which can improve the overall detection accuracy and operational stability, and meet the higher requirements of ultra-high time resolution experiments for system performance.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] This invention provides an ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser, comprising a beam combiner, a main analysis cavity, an upper analysis cavity, a sample manipulation platform, and an energy analyzer. A vacuum environment is formed inside the beam combiner, the main analysis cavity, and the upper analysis cavity. The beam combiner is used to combine a hard X-ray free-electron laser beamline and an ultrafast pump laser to form a combined beam. The main analysis cavity has an optical path for transmitting the combined beam. The beam combiner is connected to the main analysis cavity at the incident end of the optical path, and the vacuum connection or isolation is controlled by an incident light valve. The bottom end of the upper analysis cavity is connected to the top end of the main analysis cavity, and the vacuum connection or isolation is controlled by an upper valve. The sample manipulation platform is located at the top of the upper analysis cavity. The lower end of the sample manipulation platform is used to place the sample and move it up and down between the upper and main analysis cavities to transfer the sample and adjust its alignment with the optical path. The energy analyzer is connected to the main analysis cavity and is used to analyze the photoelectrons excited on the sample surface.

[0006] Preferably, the bottom end of the main analytical cavity is provided with a bottom viewing window, which is used to observe the position of the sample in real time.

[0007] Preferably, a main analysis chamber molecular pump for evacuating the main analysis chamber is connected to the main analysis chamber, and an upper analysis chamber molecular pump for evacuating the upper analysis chamber is connected to the upper analysis chamber.

[0008] Preferably, the upper analysis cavity is provided with a detection connection port, which is used to install auxiliary detection equipment that does not require beam irradiation.

[0009] Preferably, it further includes: a transfer chamber, which forms a vacuum environment inside, and a horizontal sample transfer path running straight through the transfer chamber. The upper analysis chamber is connected to the transfer chamber at one end of the horizontal sample transfer path and the vacuum connection or isolation is controlled by a sample transfer valve. A sample transfer rod is connected to the other end of the horizontal sample transfer path on the transfer chamber. One end of the sample transfer rod is used to place the sample and move along the horizontal sample transfer path between the transfer chamber and the upper analysis chamber to transfer the sample to the lower end of the sample manipulation platform. A sample injection chamber, which forms a vacuum environment inside, is connected to the top of the transfer chamber at the bottom end and the vacuum connection or isolation is controlled by a sample injection valve. A displacement stage is provided at the top end of the sample injection chamber. The lower end of the displacement stage is used to place the sample and move up and down between the sample injection chamber and the transfer chamber to transfer the sample to one end of the sample transfer rod. The sample injection chamber is provided with an injection gate for picking up and placing samples to the lower end of the displacement stage.

[0010] Preferably, a transfer chamber molecular pump for evacuating the transfer chamber is connected to the transfer chamber, and an injection chamber molecular pump for evacuating the injection chamber is connected to the injection chamber.

[0011] Preferably, it also includes a preparation growth chamber, which forms a vacuum environment inside. The preparation growth chamber is provided with a horizontal sample delivery path that runs straight through it. The transfer chamber is connected to the preparation growth chamber at one end of the horizontal sample delivery path and the vacuum connection or isolation is controlled by a sample delivery valve. The preparation growth chamber is connected to a sample delivery rod at the other end of the horizontal sample delivery path. One end of the sample delivery rod is used to place the sample and move along the horizontal sample delivery path between the preparation growth chamber and the transfer chamber to transfer the sample.

[0012] Preferably, it further includes a mounting bracket, which includes: a lower bracket with main analysis chamber support feet for mounting and leveling the main analysis chamber and an energy analyzer support frame for mounting and leveling the energy analyzer; and an upper bracket located above the lower bracket, which has mounting frames for mounting and leveling the transfer chamber, sample injection chamber and preparation growth chamber.

[0013] Preferably, the main analysis cavity support foot and the energy analyzer support frame are provided with target positioning and survey holes for laser tracker measurements during the installation of the main analysis cavity and the energy analyzer.

[0014] Compared with the prior art, the present invention has significant progress:

[0015] This invention employs a dual-analyte chamber structure design consisting of an upper analysis chamber and a main analysis chamber, which has the following advantages:

[0016] (1) The main analysis cavity sets up the optical path and connects to the beam combiner and the energy analyzer, which can be used to conduct ultrafast angle-resolved photoelectron experiments based on X-ray free electron lasers. The upper analysis cavity can be used for auxiliary experiments that do not require beam irradiation and can expand the functions of the experimental terminal. For example, an alkali metal evaporation source can be installed to achieve in-situ control of the Fermi level, or a low-energy electron diffractometer can be installed to characterize the surface structure of single crystal materials.

[0017] (2) By arranging the upper and main analysis cavities vertically and interconnecting them, the overall spatial arrangement of the device is optimized while meeting the optical path position requirements of the main analysis cavity. This allows for the rational integration and compact installation of experimental equipment on the upper and main analysis cavities. Since some auxiliary experimental equipment can be installed on the upper analysis cavity, compared with the single analysis cavity structure of traditional angle-resolved photoelectron spectroscopy equipment, the dual analysis cavity design can effectively reduce the number of flanges on the main analysis cavity that are matched with the experimental equipment, thereby improving the magnetic shielding effect of the main analysis cavity and reducing the influence of the outside on the ultra-high vacuum environment inside the main analysis cavity.

[0018] (3) During the sample transfer process, the upper valve can be closed first to isolate the upper analysis chamber from the main analysis chamber under vacuum. The sample is then sent into the upper analysis chamber and placed on the lower end of the sample manipulation platform located in the upper analysis chamber. After the upper analysis chamber is made into an ultra-high vacuum state, the upper valve is opened to connect the upper analysis chamber with the main analysis chamber under vacuum. The sample is then lowered into the main analysis chamber by the lower end of the sample manipulation platform and the sample is combined with the optical path to perform photoelectronic experiments. This can reduce the contamination of the vacuum level of the main analysis chamber during the sample transfer process.

[0019] Therefore, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser of the present invention can realize high-performance ultra-high vacuum experiments, improve the overall detection accuracy and operational stability, and meet the higher requirements of ultra-high time-resolved experiments for system performance. Attached Figure Description

[0020] Figure 1 This is a side view of the overall structure of the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to an embodiment of the present invention.

[0021] Figure 2 This is a top view of the overall structure of the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to an embodiment of the present invention.

[0022] Figure 3 This is a left-side view of the overall assembly of the main analysis cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0023] Figure 4 This is a right-side view of the overall assembly of the main analysis cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0024] Figure 5 This is a bottom view of the main analysis cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0025] Figure 6 This is a structural diagram of the bottom flange cover of the main analysis cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0026] Figure 7 This is a three-dimensional view of the overall assembly of the upper analysis cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0027] Figure 8 This is a perspective view of the overall assembly of the transfer cavity and the sample introduction cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0028] Figure 9 This is a three-dimensional view of the overall assembly of the sample inlet chamber in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0029] Figure 10 This is a three-dimensional view of the fabrication and overall assembly of the growth cavity in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0030] Figure 11 This is a top view of the mounting bracket in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0031] Figure 12 This is a side view of the mounting bracket in the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser according to an embodiment of the present invention.

[0032] The reference numerals in the attached figures are explained as follows:

[0033] 1. Bundle chamber; 2. Main analysis chamber; 201-223, #1-#23 flanges; 22. Manual valve; 23. Residual gas analyzer; 24. Vacuum valve; 25. Main analysis chamber molecular pump; 26. Bellows; 27. Vacuum gauge; 28. Bottom flange cover; 281. Flange blind plate cover; 282. Viewing window flange; 29. ​​Fixing block; 3. Upper analysis chamber; 301. Upper analysis chamber top flange; 302. Upper analysis chamber vacuum interface flange; 303. Transfer chamber connection flange; 304. Upper analysis chamber observation flange; 31. Control valve; 32. Upper analysis chamber molecular pump; 33. Flange connector; 34. First gate valve; 4. Sample manipulation platform; 5. Energy analyzer; 6. Transfer chamber; 601. Upper analysis chamber connection flange; 602. Preparation and growth chamber connection flange; 61. Sample transfer rod; 62. Extension tube; 63. T-junction structure; 64. Transfer chamber molecular pump; 65. Flange blind plate; 7. Sample inlet chamber; 701. Transfer chamber connecting flange; 702. Sample inlet chamber observation flange; 71. Second gate valve; 72. Displacement stage; 73. Sample inlet gate; 74. Sample inlet chamber molecular pump; 8. Preparation and growth chamber; 801. Transfer chamber connecting flange; 802. Preparation and growth chamber top flange; 803. Functional flange; 81. Third gate valve; 82. Sample delivery rod; 83. High and low temperature sample control table; 84. Vacuum pump; 85. Ion pump; 9. Mounting bracket; 91. Lower bracket; 911. Main analysis chamber support foot; 912. Energy analyzer support frame; 913. Target positioning and exploration hole; 92. Upper bracket; 93. Foot; 94. Analyzer power cabinet bracket; 95. Liquid nitrogen lifting and transport vehicle; 96. Climbing ladder. Detailed Implementation

[0034] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. These embodiments are for illustrative purposes only and are not intended to limit the scope of the invention.

[0035] In the description of this invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] Furthermore, in the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0038] like Figures 1 to 12 The image shows an embodiment of the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser provided by the present invention.

[0039] like Figure 1 and Figure 2 As shown, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser in this embodiment includes a beam combining cavity 1, a main analysis cavity 2, an upper analysis cavity 3, a sample manipulation platform 4, and an energy analyzer 5.

[0040] The internal environments of the beam combining cavity 1, the main analysis cavity 2, and the upper analysis cavity 3 are all vacuum environments with ultra-high vacuum levels.

[0041] The beam combiner 1 is used to combine the hard X-ray free-electron laser beamline and the ultrafast pump laser to form a combined beam, and then emits the combined beam. The structure of the beam combiner 1 adopts existing technology, which will not be described in detail here.

[0042] The main analysis cavity 2 is located at the first focal point (lens focal point) of the hard X-ray free electron laser beamline of the beam combiner 1, and is used for ultrafast angle-resolved photoelectron experiments on the sample. The main analysis cavity 2 has an optical path for transmitting the combined beam. The beam combiner 1 is connected to the main analysis cavity 2 at the incident end of the optical path, and vacuum connectivity or isolation is controlled by an input valve. The input valve controls the vacuum connectivity or isolation between the main analysis cavity 2 and the beam combiner 1: when the input valve is open, the internal vacuum environments of the beam combiner 1 and the main analysis cavity 2 are interconnected, and the combined beam from the beam combiner 1 can enter the main analysis cavity 2; when the input valve is closed, the internal vacuum environments of the beam combiner 1 and the main analysis cavity 2 are isolated and not interconnected, and the combined beam from the beam combiner 1 cannot enter the main analysis cavity 2.

[0043] The upper analysis chamber 3 is located above the main analysis chamber 2. The bottom end of the upper analysis chamber 3 is connected to the top end of the main analysis chamber 2, and the vacuum connection or isolation is controlled by an upper valve. The upper valve is used to control the vacuum connection or isolation between the upper analysis chamber 3 and the main analysis chamber 2: when the upper valve is open, the internal vacuum environments of the upper analysis chamber 3 and the main analysis chamber 2 are interconnected, and the sample can be transferred between the upper analysis chamber 3 and the main analysis chamber 2; when the upper valve is closed, the internal vacuum environments of the upper analysis chamber 3 and the main analysis chamber 2 are isolated from each other and are not interconnected, and the sample cannot be transferred between the upper analysis chamber 3 and the main analysis chamber 2.

[0044] The sample manipulation platform 4 is located at the top of the upper analysis cavity 3. The lower end of the sample manipulation platform 4 is used to place the sample. The lower end of the sample manipulation platform 4 moves up and down between the upper analysis cavity 3 and the main analysis cavity 2 to transfer the sample and adjust the optical path alignment between the sample and the main analysis cavity 2. The sample manipulation platform 4 is preferably a low-temperature multi-dimensional sample manipulation platform. Preferably, an optical diagnostic mechanism can be integrated into the lower end of the sample manipulation platform 4 within the main analysis cavity 2 to perform functions such as spatial overlap diagnosis, spot size diagnosis, and temporal overlap diagnosis of the ultrafast pump laser and hard X-ray free electron laser beamlines. This optical diagnostic mechanism uses existing technology and will not be described in detail here.

[0045] Energy analyzer 5 is connected to main analysis cavity 2 and is used to analyze photoelectrons excited on the sample surface. The combined beam formed by beam combiner 1 enters the main analysis cavity 2 along the optical path and is positioned on the sample that has been transported to the main analysis cavity 2. The sample surface is excited with photoelectrons under the illumination of the combined beam, and the photoelectrons are collected and analyzed by energy analyzer 5.

[0046] The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser in this embodiment adopts a dual-analytical cavity structure design with an upper analytical cavity 3 and a main analytical cavity 2, which has the following advantages.

[0047] (1) The main analysis cavity 2 is equipped with an optical path and is connected to the beam combiner cavity 1 and the energy analyzer 5. It can be used to conduct ultrafast angle-resolved photoelectron experiments based on X-ray free electron lasers. The upper analysis cavity 3 can be used to conduct auxiliary experiments that do not require beam irradiation and can expand the functions of the experimental terminal. For example, an alkali metal evaporation source can be installed to achieve in-situ control of the Fermi level, or a low-energy electron diffractometer can be installed to characterize the surface structure of single crystal materials.

[0048] (2) By arranging the upper analysis cavity 3 and the main analysis cavity 2 vertically and interconnecting them, the spatial arrangement of the overall device is optimized while meeting the optical path position requirements of the main analysis cavity 2. This allows for the reasonable integration and compact installation of experimental equipment on the upper analysis cavity 3 and the main analysis cavity 2. Since some auxiliary experimental equipment can be installed on the upper analysis cavity 3, compared with the single analysis cavity structure of traditional angle-resolved photoelectron spectroscopy equipment, the dual analysis cavity design can effectively reduce the number of flanges on the main analysis cavity 2 that are matched with the experimental equipment, thereby improving the magnetic shielding effect of the main analysis cavity 2 and reducing the influence of the outside on the ultra-high vacuum environment inside the main analysis cavity 2.

[0049] (3) During the sample transfer process, the upper valve can be closed first to isolate the upper analysis chamber 3 from the main analysis chamber 2 under vacuum. The sample is then sent into the upper analysis chamber 3 and placed on the lower end of the sample manipulation platform 4 located in the upper analysis chamber 3. After the upper analysis chamber 3 is made into an ultra-high vacuum state, the upper valve is opened to connect the upper analysis chamber 3 with the main analysis chamber 2 under vacuum. The sample is then lowered from the lower end of the sample manipulation platform 4 into the main analysis chamber 2 and the sample is combined with the optical path to perform photoelectronic experiments. This can reduce the contamination of the vacuum level of the main analysis chamber 2 during the sample transfer process.

[0050] Therefore, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser in this embodiment can realize high-performance ultra-high vacuum experiments, improve the overall detection accuracy and operational stability, and meet the higher requirements of ultra-high time-resolved experiments for system performance.

[0051] In this embodiment, preferably, the upper analysis cavity 3 is provided with a detection connection port, which is used to install auxiliary detection equipment that does not require beam irradiation.

[0052] In this embodiment, the connection and assembly between the main analysis cavity 2 and the beam combining cavity 1, the upper analysis cavity 3 and the energy analyzer 5, and the connection and assembly between the upper analysis cavity 3 and the sample manipulation platform 4 are all achieved through a flange structure.

[0053] Specifically, such as Figure 3 and Figure 4As shown, a #1 flange 201 is provided on the upper side of the main analysis cavity 2 for connecting to the beam combining cavity 1. The #1 flange 201 is a light incident window, serving as the incident end of the optical path, allowing the combined beam to enter the main analysis cavity 2. A light valve is connected to the outside of the #1 flange 201, preferably a pneumatic valve. The preferred model of the #1 flange 201 is CF63.

[0054] A #17 flange 217 is provided on the upper side of the main analysis cavity 2. The #17 flange 217 is a light exit window, serving as the exit end of the optical path for the combined beam to exit the main analysis cavity 2. The #17 flange 217 and the #1 flange 201 are located on the same straight line and are positioned opposite each other, thus forming a light-passing optical path. The #17 flange 217 is preferably of model CF63. The #17 flange 217 can be used to connect to a downstream vacuum device, thereby providing the required beam to the downstream vacuum device. The downstream vacuum device can be existing experimental equipment, its interior also being a vacuum environment with an ultra-high vacuum degree. An exit valve is externally connected to the #17 flange 217. The exit valve is preferably a pneumatic valve, used to control the vacuum connection or isolation between the main analysis cavity 2 and the downstream vacuum device: when the exit valve is open, the internal vacuum environments of the main analysis cavity 2 and the downstream vacuum device are interconnected; when the exit valve is closed, the internal vacuum environments of the main analysis cavity 2 and the downstream vacuum device are isolated and not interconnected. When photoelectronic experiments are performed in the main analysis cavity 2, both the input and output valves are open. When no photoelectronic experiments are being performed in the main analysis cavity 2, the light inlet valve and the light outlet valve are closed.

[0055] A #2 flange 202 is provided on the upper side of the main analysis chamber 2 for connecting the energy analyzer 5. The #2 flange 202 is preferably a CF200 type, with its connecting neck gradually tapering from 200mm to 164mm. The #1 flange 201, the #2 flange 202, and the #17 flange 217 are located on the same circumference.

[0056] The top of the main analysis chamber 2 is equipped with a #8 flange 208 for connecting to the upper analysis chamber 3. A manual valve 22 is externally connected to the #8 flange 208, serving as the upper valve. The preferred model for the #8 flange 208 is CF150.

[0057] In addition, the upper side of the main analysis chamber 2 is provided with flanges #3 203, #4 204, #5 205, #6 206, #7 207, #9 209, #14 214, #18 218, #19 219 and #23 223, all of which are used to connect external viewing windows to observe the internal conditions of the main analysis chamber 2.

[0058] Flanges #3 (203), #4 (204), #5 (205), #6 (206), and #7 (207) are located on the same circumference and above the circumferences of flanges #1 (201), #2 (202), and #17 (217). Flanges #9 (209), #14 (214), #18 (218), #19 (219), and #23 (223) are all located on the circumferences of flanges #2 (202), #1 (201), and #17 (217).

[0059] Among them, flanges #3 (203), #4 (204), #5 (205), #6 (206), and #7 (207) are preferably CF35, with external CF35 windows for observing the sample state at the light incident window and lens focal point, the multi-dimensional displacement of the sample, and the sample introduction process at the lower end of the sample manipulation platform 4. Flanges #9 (209), #18 (218), and #19 (219) are preferably CF63, with external CF63 windows for observing the sample state at the lens focal point, the multi-dimensional displacement of the sample, and the sample introduction process at the lower end of the sample manipulation platform 4. Flange #14 (214) is preferably CF100, with external CF100 windows for observing the multi-dimensional displacement of the sample and the sample introduction process at the lower end of the sample manipulation platform 4. Flange #23 (223) is preferably CF35, serving as the observation window flange for the main analytical cavity 2, used for observing sample points.

[0060] The main analysis chamber 2 is equipped with a #10 flange 210 for mounting a residual gas analyzer 23 to detect the types and relative contents of gases in the main analysis chamber 2. The #10 flange 210 is preferably of model CF40, and its connecting neck is of the same diameter as the flange.

[0061] A main analysis chamber molecular pump 25 for evacuating the main analysis chamber 2 is connected to the main analysis chamber 2. A #11 flange 211 is located on the lower side of the main analysis chamber 2, used to connect the vacuum valve 24 and the main analysis chamber molecular pump 25; it is a crucial interface for achieving the evacuation function of the main analysis chamber 2. The #11 flange 211 is preferably of model CF200.

[0062] A #20 flange 220 is provided on the lower side of the main analysis chamber 2 for connecting an external bellows 26. The bellows 26 is connected to the vacuum port of the energy analyzer 5 to help the main analysis chamber 2 obtain a higher vacuum. The #20 flange 220 is preferably a CF100 model.

[0063] A #15 flange 215 is provided on the lower side of the main analysis chamber 2 for mounting a vacuum gauge 27 to check the vacuum level inside the main analysis chamber 2. The #15 flange 215 is preferably of model CF40.

[0064] The lower side of the main analysis chamber 2 is equipped with flanges #12 212, #16 216, #21 221, and #22 222, all serving as spare flange interfaces for the main analysis chamber 2. Flanges #12 212 and #22 222 are preferably CF150 models, used to install more vacuum pumps to achieve a better vacuum level in the main analysis chamber 2. Flange #16 216 is preferably CF100 model, used for subsequent introduction of the gas required for experimental analysis. Flange #21 221 is preferably CF40 model, with its connecting neck having the same diameter as the flange, used to install a spare vacuum gauge or a spare residual gas analyzer.

[0065] The bottom end of the main analysis chamber 2 is equipped with flange #13 213, such as Figure 5 and Figure 6 As shown, flange #13 213 is used to connect to bottom flange cover 28. Bottom flange cover 28 and main analysis chamber 2 together form a complete ultra-high vacuum chamber. The preferred model of flange #13 213 is CF300.

[0066] To facilitate the installation of the main analysis chamber 2, preferably, as follows: Figure 5 As shown, the outer peripheral side of the #13 flange 213 is provided with multiple (e.g., four) outwardly protruding fixing blocks 29. Each fixing block 29 is provided with two M20 threaded holes for the installation, fixing and alignment of the main analysis chamber 2.

[0067] A bottom viewing window is provided at the bottom end of the main analysis chamber 2. This window is used for real-time observation of the sample position on the lower end of the sample manipulation platform 4. The bottom viewing window can be a camera mounted on the bottom end of the main analysis chamber 2. Preferably, the bottom viewing window is located on the bottom flange cover 28. Figure 6 As shown, the bottom flange cover 28 has two ultra-high vacuum flange interfaces, namely a flange blind plate cover 281 and a viewing window flange 282. The viewing window flange 282 is located in the middle of the flange blind plate cover 281 and is used to connect to the bottom viewing window. The flange blind plate cover 281 is preferably of model CF300, and the viewing window flange 282 is preferably of model CF100.

[0068] like Figure 7 As shown, the bottom end of the upper analytical chamber 3 is connected to the #8 flange 208 on the top end of the main analytical chamber 2. The top end of the upper analytical chamber 3 is provided with an upper analytical chamber top flange 301 for connecting and fixing the sample manipulation platform 4. The preferred model of the upper analytical chamber top flange 301 is CF150.

[0069] An upper analysis chamber molecular pump 32 for evacuating the upper analysis chamber 3 is connected to the upper analysis chamber 3. An upper analysis chamber vacuum interface flange 302 is provided on the side of the upper analysis chamber 3 for connecting the control valve 31 and the upper analysis chamber molecular pump 32, serving as the interface for the upper analysis chamber 3 to perform the vacuum function. The preferred model of the upper analysis chamber vacuum interface flange 302 is CF150.

[0070] Considering that sample characterization under X-ray free electron laser conditions has high requirements for experimental environment, sample state and operation procedures, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free electron laser in this embodiment is also equipped with a complete sample transmission and storage system to ensure the efficient, orderly and stable conduct of the experiment.

[0071] like Figure 1 and Figure 2 As shown, preferably, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser of this embodiment further includes a transfer cavity 6 and a sample introduction cavity 7. Both the transfer cavity 6 and the sample introduction cavity 7 form a vacuum environment with ultra-high vacuum levels. Preferably, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser of this embodiment further includes a preparation and growth cavity 8, the interior of which forms a vacuum environment with ultra-high vacuum levels. In a direction parallel to the optical path, the transfer cavity 6 is located downstream of the upper analysis cavity 3. The transfer cavity 6 is interconnected with the upper analysis cavity 3, the sample introduction cavity 7, and the preparation and growth cavity 8, serving as a pivotal cavity for sample transport and transfer.

[0072] like Figure 8 As shown, the transfer chamber 6 has a straight, horizontal sample transfer path. The upper analysis chamber 3 is connected to the transfer chamber 6 at one end of the horizontal sample transfer path, and the vacuum connection or isolation is controlled by a sample transfer valve. The sample transfer valve is used to control the vacuum connection or isolation between the upper analysis chamber 3 and the transfer chamber 6: when the sample transfer valve is open, the internal vacuum environments of the upper analysis chamber 3 and the transfer chamber 6 are interconnected, and the sample can be transferred between the upper analysis chamber 3 and the transfer chamber 6; when the sample transfer valve is closed, the internal vacuum environments of the upper analysis chamber 3 and the transfer chamber 6 are isolated from each other and are not interconnected, and the sample cannot be transferred between the upper analysis chamber 3 and the transfer chamber 6.

[0073] like Figure 7As shown, a transfer chamber connecting flange 303 is provided on the side of the upper analysis chamber 3 for connecting to the transfer chamber 6, thereby enabling sample transfer between the transfer chamber 6 and the upper analysis chamber 3. The transfer chamber connecting flange 303 is externally connected to a flange connector 33 and a first slide gate valve 34. The flange connector 33 is used to achieve a collimated connection between the upper analysis chamber 3 and the transfer chamber 6 in the connection direction. The first slide gate valve 34 is an ultra-high vacuum slide gate valve, serving as a sample transfer valve. The preferred model of the transfer chamber connecting flange 303 is CF63. The transfer chamber connecting flange 303 is the sample transfer inlet of the upper analysis chamber 3. The installation direction of this flange determines the basic direction of the sample transfer path and further affects the relative installation position between the upper analysis chamber 3 and the main analysis chamber 2, as well as the subsequent layout of the transfer chamber 6 and the sample inlet chamber 7. Preferably, during the assembly process of the upper analysis chamber 3 and the main analysis chamber 2, the transfer chamber connecting flange 303 of the upper analysis chamber 3 is installed at 35° to the #17 flange 217 on the main analysis chamber 2, which serves as the light emission window.

[0074] like Figure 8 As shown, the transfer chamber 6 has an upper analysis chamber connecting flange 601 on its side, serving as one end of the horizontal sample transfer path of the transfer chamber 6, and is connected to the transfer chamber connecting flange 303 of the upper analysis chamber 3. A sample transfer rod 61 is connected to the other end of the horizontal sample transfer path on the transfer chamber 6. One end of the sample transfer rod 61 is used to place the sample and move along the horizontal sample transfer path between the transfer chamber 6 and the upper analysis chamber 3 to transfer the sample to the lower end of the sample manipulation platform 4. Specifically, the transfer chamber 6 has a horizontally protruding extension tube 62 on its side. The axis of the extension tube 62 and the axis of the upper analysis chamber connecting flange 601 are on the same horizontal straight line, thus forming a straight horizontal sample transfer path. The end of the extension tube 62 away from the transfer chamber 6 is equipped with a sample transfer rod 61 with a long stroke. The sample transfer rod 61 can be moved along the horizontal sample transfer path. The sample is placed on the end of the sample transfer rod 61 that extends into the transfer chamber 6, so that the sample can be transferred from the transfer chamber 6 to the upper analysis chamber 3 by the sample transfer rod 61, and the sample is loaded onto the lower end of the sample manipulation platform 4 located in the upper analysis chamber 3.

[0075] Preferably, such as Figure 7 As shown, an upper analysis chamber observation flange 304 is provided on the side of the upper analysis chamber 3 for connecting an external vacuum window to observe the process of sample transfer into the upper analysis chamber 3 and the process of sample transfer to the lower end of the sample manipulation platform 4 located inside the upper analysis chamber 3 and completing the fixation operation. The preferred model of the upper analysis chamber observation flange 304 is CF100. The design of the upper analysis chamber observation flange 304 allows it not only to be used to observe the internal state of the upper analysis chamber 3 during normal experiments, but also to be used for quick maintenance of the sample manipulation platform 4.

[0076] like Figure 8As shown, a transfer chamber molecular pump 64 for evacuating the transfer chamber 6 is connected to the transfer chamber 6. A three-way structure 63 is provided at the lower end of the transfer chamber 6, which is connected to the transfer chamber molecular pump 64 and the flange blind plate 65, which can realize the evacuation and vacuum maintenance of the transfer chamber 6. The flange blind plate 65 is preferably a CF150.

[0077] In addition, the transfer chamber 6 can be equipped with multiple sample storage platforms, which have sample storage functions and can facilitate the rapid transfer of samples between the transfer chamber 6, the upper analysis chamber 3, the sample injection chamber 7 and the preparation and growth chamber 8.

[0078] like Figure 8 As shown, the bottom of the injection chamber 7 is connected to the top of the transfer chamber 6, and the vacuum connection or isolation is controlled by the injection valve. The injection valve is used to control the vacuum connection or isolation between the injection chamber 7 and the transfer chamber 6: when the injection valve is open, the internal vacuum environments of the injection chamber 7 and the transfer chamber 6 are interconnected, and the sample can be transferred between the injection chamber 7 and the transfer chamber 6; when the injection valve is closed, the internal vacuum environments of the injection chamber 7 and the transfer chamber 6 are isolated from each other and are not interconnected, and the sample cannot be transferred between the injection chamber 7 and the transfer chamber 6.

[0079] like Figure 9 As shown, a transfer chamber connecting flange 701 is provided at the bottom of the sample injection chamber 7 for connecting to the transfer chamber 6, thereby enabling sample transfer between the transfer chamber 6 and the sample injection chamber 7. The transfer chamber connecting flange 701 of the sample injection chamber 7 is connected to the extension tube 62 of the transfer chamber 6, so that the sample injection chamber 7 is located on the side and above the transfer chamber 6. A second slide gate valve 71 is externally connected to the transfer chamber connecting flange 701. The second slide gate valve 71 is an ultra-high vacuum slide gate valve and serves as the sample injection valve.

[0080] The top of the sample injection chamber 7 is equipped with a displacement stage 72, preferably a triaxial displacement stage. The lower end of the displacement stage 72 is used to place the sample and move it up and down between the sample injection chamber 7 and the transfer chamber 6 to transfer the sample to one end of the sample transfer rod 61, thereby achieving rapid sample transfer. The sample injection chamber 7 is equipped with a sample injection door 73 for picking up and placing samples at the lower end of the displacement stage 72, which is used to achieve rapid sample picking and placing and rapid sealing of the vacuum environment of the sample injection chamber 7. Specifically, the sample is quickly put into the sample injection chamber 7 through the open sample injection door 73 and loaded onto the lower end of the displacement stage 72. After placement, the sample injection door 73 is quickly closed. Then, the displacement stage 72 can transfer the sample from the sample injection chamber 7 to the transfer chamber 6, and then load the sample onto one end of the sample transfer rod 61 located in the transfer chamber 6. The sample transfer rod 61 can then transfer the sample from the transfer chamber 6 to the upper analysis chamber 3, and load the sample onto the lower end of the sample manipulation platform 4 located in the upper analysis chamber 3.

[0081] The sample inlet chamber 7 is connected to a sample inlet molecular pump 74 for evacuating the sample inlet chamber 7. The sample inlet molecular pump 74 is used for rapid evacuation, which can reduce the contamination of the vacuum environment of the transfer chamber 6 when the sample inlet chamber 7 is connected to the transfer chamber 6.

[0082] The main body of the sample inlet chamber 7 is a section of CF63 ultra-high vacuum pipeline. Several sample inlet chamber observation flanges 702 are installed on the side of this pipeline for connecting external viewing windows to enable functions such as sample observation, vacuuming, and vacuum detection within the sample inlet chamber 7. The preferred model of the sample inlet chamber observation flange 702 is CF35.

[0083] In this embodiment, the transfer chamber 6 is located between the sample injection chamber 7 and the upper analysis chamber 3, and can serve as an effective buffer chamber for maintaining the ultra-high vacuum environment. The arrangement of the transfer chamber 6 and the upper analysis chamber 3 helps to improve the vacuum isolation capability of the main analysis chamber 2, reduce the impact of sample storage and transfer processes on the vacuum level of the main analysis chamber 2, and thus better protect the ultra-high vacuum environment of the main analysis chamber 2.

[0084] like Figure 10 As shown, the preparation and growth chamber 8 constitutes a complete experimental system and is connected to the transfer chamber 6. The preparation and growth chamber 8 has a straight, horizontal sample delivery path. The transfer chamber 6 is connected to the preparation and growth chamber 8 at one end of the horizontal sample delivery path, and the vacuum connection or isolation between the transfer chamber 6 and the preparation and growth chamber 8 is controlled by a sample delivery valve. The sample delivery valve controls the vacuum connection or isolation between the transfer chamber 6 and the preparation and growth chamber 8: when the sample delivery valve is open, the internal vacuum environments of the transfer chamber 6 and the preparation and growth chamber 8 are interconnected, and the sample can be transferred between them; when the sample delivery valve is closed, the internal vacuum environments of the transfer chamber 6 and the preparation and growth chamber 8 are isolated and not interconnected, and the sample cannot be transferred between them.

[0085] A transfer chamber connecting flange 801 is provided on the side of the preparation growth chamber 8 for connecting to the transfer chamber 6, thereby enabling sample transfer between the transfer chamber 6 and the preparation growth chamber 8. A third slide gate valve 81 is externally connected to the transfer chamber connecting flange 801. The third slide gate valve 81 is an ultra-high vacuum slide gate valve and serves as a sample delivery valve. A preparation growth chamber connecting flange 602 is provided on the side of the transfer chamber 6 (e.g., ...). Figure 8 As shown in the figure, it is used to connect with the transfer cavity connecting flange 801 of the preparation growth cavity 8.

[0086] The intermediate chamber connecting flange 801 of the preparation growth chamber 8 serves as one end of the horizontal sample delivery path. A sample delivery rod 82 is connected to the other end of the horizontal sample delivery path on the preparation growth chamber 8. One end of the sample delivery rod 82 is used to place the sample and move along the horizontal sample delivery path between the preparation growth chamber 8 and the intermediate chamber 6 to transfer the sample. When special processing of the sample is required, the sample in the intermediate chamber 6 can be transferred to the preparation growth chamber 8 for processing via the sample delivery rod 82. After processing, the sample can be returned to the intermediate chamber 6 via the sample delivery rod 82.

[0087] The top of the growth chamber 8 is equipped with a top flange 802, preferably a CF150 type, for mounting and fixing a high-low temperature sample manipulation stage 83. The high-low temperature sample manipulation stage 83 is preferably a four-axis displacement stage. The lower end of the high-low temperature sample manipulation stage 83 is connected to a sample manipulation lever and a sample placement stage capable of accommodating multiple samples, for the transfer and transport of samples within the growth chamber 8. By controlling the movement of the sample manipulation lever through the high-low temperature sample manipulation stage 83, the sample placement stage can be placed or removed from one end of the sample delivery rod 82 located within the growth chamber 8. The sample delivery rod 82 then facilitates the back-and-forth transport of the sample placement stage between the growth chamber 8 and the transfer chamber 6. During the transport of the sample placement stage to the transfer chamber 6, a rotation mechanism can also achieve a 90° directional change to meet the sample transport direction requirements between different chambers.

[0088] The bottom of the growth chamber 8 is connected to a vacuum pump 84 and an ion pump 85 for evacuating the growth chamber 8. Multiple functional flanges 803 are provided on the side of the growth chamber 8, which can be used to install components such as a non-alkali metal evaporation source, crystal oscillator, argon ion sputtering gun, high-energy electron diffractometer, and its fluorescent screen.

[0089] like Figure 1 , Figure 2 , Figure 11 and Figure 12 As shown, preferably, the ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser in this embodiment further includes a mounting bracket 9 for mounting the aforementioned cavities. To ensure the stability and reliability of the overall device during operation, the mounting bracket 9 adopts an integrated bracket structure.

[0090] like Figure 11 and Figure 12As shown, the mounting bracket 9 adopts a double-layer structure design, including a lower bracket 91 and an upper bracket 92. The lower bracket 91 is preferably 696mm high and is constructed from a welded square frame structure. A 20mm thick steel plate is laid on top of the lower bracket to enhance the rigidity and stability of the overall fixing structure. The upper bracket 92 is located above the lower bracket 91 and is installed and fixed to it. The upper bracket 92 also adopts a welded square frame structure, and a 15mm thick stainless steel plate is laid on top of the upper bracket 92 to further improve the load-bearing capacity of the mounting bracket 9 and ensure the stability of the overall device after the various cavities are installed.

[0091] The lower support 91 is equipped with a main analysis chamber support foot 911 and an energy analyzer support frame 912. The main analysis chamber support foot 911 is used for the installation and leveling of the main analysis chamber 2 to ensure that the sample is in a good horizontal state, thereby improving the accuracy of sample detection results. The energy analyzer support frame 912 is used for the installation and leveling of the energy analyzer 5, thereby ensuring the positional accuracy between the energy analyzer 5 and the preset detection point of the main analysis chamber 2, and improving the precision of sample detection.

[0092] To ensure the overall installation accuracy of the device, especially the installation accuracy of key components such as the axis of the main analysis cavity 2 and the installation position of the energy analyzer 5 to be better than 0.1 mm, preferably, the main analysis cavity support foot 911 and the energy analyzer support frame 912 are provided with target positioning survey holes 913 for laser tracker measurements during the installation of the main analysis cavity 2 and the energy analyzer 5, thereby providing a reliable guarantee for high-precision positioning and calibration during the overall installation process of the device. The target positioning survey holes 913 are preferably located at the four corners of the main analysis cavity support foot 911 and the four corners of the energy analyzer support frame 912.

[0093] The upper support 92 is equipped with a mounting bracket for installing and leveling the transfer chamber 6, the sample injection chamber 7 and the preparation growth chamber 8, so as to ensure the overall level and structural stability of the transfer chamber 6, the sample injection chamber 7 and the preparation growth chamber 8 after installation.

[0094] like Figure 12 As shown, the bottom of the mounting bracket 9 is provided with multiple feet 93, which are used to position and level the mounting bracket 9 as a whole. By adjusting the feet 93, the level of the mounting bracket 9 can be precisely adjusted.

[0095] In addition, one side of the mounting bracket 9 is also equipped with an analyzer power cabinet bracket 94 and a liquid nitrogen lifting and transport vehicle 95.

[0096] Considering the overall height of the device, climbing stairs 96 were added to the personnel operation area to facilitate operation by the experimenters, so as to ensure that the operators can complete the experimental procedures in a suitable position and improve the safety and comfort of the operation process.

[0097] The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser in this embodiment is built in the shed of the Electron Structure of Matter (SES) experimental station in the No. 4 tunnel of the hard X-ray free-electron laser device. It is the first ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser in China, filling the gap in the construction and application of related experimental devices in this field in China.

[0098] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. An ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser, characterized in that, It includes a beam combining cavity (1), a main analysis cavity (2), an upper analysis cavity (3), a sample manipulation platform (4), and an energy analyzer (5); The interiors of the beam combining cavity (1), the main analysis cavity (2), and the upper analysis cavity (3) are all formed in a vacuum environment; The beam combining cavity (1) is used to combine the hard X-ray free electron laser beamline and the ultrafast pump laser to form a combined beam. The main analysis cavity (2) is provided with an optical path for the transmission of the combined beam. The beam combining cavity (1) is connected to the main analysis cavity (2) at the incident end of the optical path and the vacuum connection or isolation is controlled by the light inlet valve. The bottom end of the upper analysis chamber (3) is connected to the top end of the main analysis chamber (2) and the vacuum connection or isolation is controlled by the upper valve; The sample manipulation platform (4) is located at the top of the upper analysis cavity (3). The lower end of the sample manipulation platform (4) is used to place the sample and move it up and down between the upper analysis cavity (3) and the main analysis cavity (2) to transfer the sample and adjust the sample to match the optical path. The energy analyzer (5) is connected to the main analysis cavity (2) and is used to analyze the photoelectrons excited on the sample surface.

2. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 1, characterized in that, The bottom end of the main analysis cavity (2) is provided with a bottom viewing window, which is used to observe the position of the sample in real time.

3. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 1, characterized in that, The main analysis chamber (2) is connected to a main analysis chamber molecular pump (25) for evacuating the main analysis chamber (2), and the upper analysis chamber (3) is connected to an upper analysis chamber molecular pump (32) for evacuating the upper analysis chamber (3).

4. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 1, characterized in that, The upper analysis cavity (3) is provided with a detection connection port, which is used to install auxiliary detection equipment that does not require beam irradiation.

5. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 1, characterized in that, Also includes: The transfer chamber (6) forms a vacuum environment inside. A straight horizontal sample transfer path is provided on the transfer chamber (6). The upper analysis chamber (3) is connected to the transfer chamber (6) at one end of the horizontal sample transfer path and the vacuum connection or isolation is controlled by the sample transfer valve. A sample transfer rod (61) is connected to the other end of the horizontal sample transfer path on the transfer chamber (6). One end of the sample transfer rod (61) is used to place the sample and move along the horizontal sample transfer path between the transfer chamber (6) and the upper analysis chamber (3) to transfer the sample to the lower end of the sample manipulation platform (4). The sample injection chamber (7) forms a vacuum environment inside. The bottom end of the sample injection chamber (7) is connected to the top of the transfer chamber (6) and the vacuum connection or isolation is controlled by the sample injection valve. The top end of the sample injection chamber (7) is provided with a displacement stage. The lower end of the displacement stage is used to place the sample and move it up and down between the sample injection chamber (7) and the transfer chamber (6) to transfer the sample to one end of the transfer rod (61). The sample injection chamber (7) is provided with a sample injection door for taking the sample to the lower end of the displacement stage.

6. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 5, characterized in that, The transfer chamber (6) is connected to a transfer chamber molecular pump (64) for evacuating the transfer chamber (6), and the injection chamber (7) is connected to an injection chamber molecular pump (74) for evacuating the injection chamber (7).

7. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 5, characterized in that, It also includes a preparation growth chamber (8) with a vacuum environment inside. The preparation growth chamber (8) is provided with a horizontal sample delivery path that runs straight through it. The transfer chamber (6) is connected to the preparation growth chamber (8) at one end of the horizontal sample delivery path and the vacuum connection or isolation is controlled by a sample delivery valve. The preparation growth chamber (8) is connected to a sample delivery rod (82) at the other end of the horizontal sample delivery path. One end of the sample delivery rod (82) is used to place the sample and move along the horizontal sample delivery path between the preparation growth chamber (8) and the transfer chamber (6) to deliver the sample.

8. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 7, characterized in that, It also includes a mounting bracket (9), which comprises: The lower support (91) is provided with a main analysis cavity support foot (911) for mounting and leveling the main analysis cavity (2) and an energy analyzer support frame (912) for mounting and leveling the energy analyzer (5). The upper support (92) is located above the lower support (91). The upper support (92) is provided with a mounting bracket for mounting and leveling the transfer chamber (6), the sample injection chamber (7) and the preparation growth chamber (8).

9. The ultrafast angle-resolved photoelectron spectroscopy device based on X-ray free-electron laser according to claim 8, characterized in that, The main analysis cavity support foot (911) and the energy analyzer support frame (912) are provided with target positioning and survey holes (913) for laser tracker measurement when the main analysis cavity (2) and the energy analyzer (5) are installed.

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