Optical switch and optical switch module

Abstract

This application discloses an optical switch and an optical switch module. The optical switch includes a base, a fixed waveguide, and a switching waveguide. The base includes a first bearing surface and a second bearing surface with a height difference. The fixed waveguide is located on the first bearing surface. The switching waveguide includes a coupled portion and a conductive portion connected together. The optical switch also includes a connecting portion and an elastic portion disposed at least on one side of the coupled portion. The connecting portion is connected to the second bearing surface, and the elastic portion is connected to the connecting portion and the coupled portion. When the connecting portion and the elastic portion drive the coupled portion to move towards the fixed waveguide, the elastic portion deforms. This application connects the connecting portion and the coupled portion through the elastic portion, which can assist in the release of residual stress and prevent bending deformation of the connecting portion or the coupled portion. This application allows the residual stress of the coupled portion to be released, reduces the deformation of the coupled portion, and thus improves the coupling efficiency between the coupled portion and the fixed waveguide.

Description

Technical Field

[0001] This application relates to the field of optical communication component manufacturing technology, and in particular to an optical switch and an optical switch module. Background Technology

[0002] Optical switches are key devices in optical communication and optical computing systems for routing and switching optical signals. They mainly achieve the coupling and transmission of optical signals between different waveguides by driving the top-level moving waveguide to move closer to or further away from the bottom-level fixed waveguide, ultimately realizing the optical switching function.

[0003] The optical switch includes a connector and a driver. The connector is connected to a movable waveguide, and the connector moves the movable waveguide closer to the fixed waveguide under the action of the driver. During the movement, the connector and the movable waveguide release residual stress, which can easily cause bending deformation of the connector or the movable waveguide. Summary of the Invention

[0004] This application discloses an optical switch, including a base, a fixed waveguide, and a switching waveguide. The base includes a first bearing surface and a second bearing surface with a height difference. The fixed waveguide is located on the first bearing surface. The switching waveguide includes a coupled portion and a conductive portion connected together.

[0005] The optical switch further includes a connecting portion and an elastic portion disposed on at least one side of the coupling portion. The connecting portion is connected to the second bearing surface, and the elastic portion is connected to the connecting portion and the coupling portion. When the connecting portion and the elastic portion drive the coupling portion to move toward the fixed waveguide, the elastic portion deforms.

[0006] In one embodiment, the connecting portion and the coupling portion are formed of different materials.

[0007] In one embodiment, the elastic portion and the connecting portion are formed of the same material, or the elastic portion and the coupling portion are formed of the same material.

[0008] In one embodiment, the optical switch further includes a driver for driving the connection portion to move relative to the second bearing surface. When the driver is not in operation, the connection portion and the coupling portion are located on different layers.

[0009] In one embodiment, the coupling portion includes a coupling arm and a frame connecting the coupling arm, the frame being rigidly connected to the coupling arm, and the elastic portion being connected to the frame.

[0010] In one embodiment, the elastic portion has a first stiffness along a first direction and a second stiffness along a second direction, the first stiffness being no greater than the second stiffness, the first direction being parallel to the extension direction of the coupling portion, and the second direction being perpendicular to the first direction.

[0011] In one embodiment, the connection portion is formed of silicon, and the coupling portion is formed of silicon nitride or aluminum nitride.

[0012] In one embodiment, the optical switch includes two connecting portions and two elastic portions disposed on both sides of the coupling portion.

[0013] In one embodiment, the optical switch further includes a driver for driving the connecting portion to rotate relative to the second bearing surface. The rotation of the connecting portion relative to the second bearing surface can be achieved by the connecting portion rotating relative to the second bearing surface via a first rotating shaft, or by the connecting portion being fixed to the second bearing surface and the connecting portion deforming to rotate relative to the second bearing surface.

[0014] In one embodiment, the optical switch further includes a driver, the connecting part includes a fixed part, a moving part and a deformable part connecting the fixed part and the moving part, the fixed part is connected to the second bearing surface, the elastic part is connected to the moving part, the driver acts on the moving part and causes the deformable part to deform, and the deformable part drives the moving part to move towards the first bearing surface.

[0015] In one embodiment, the optical switch further includes a driver, a first limiting structure, and two connecting portions and two elastic portions disposed on both sides of the coupling portion. The driver is used to drive the two connecting portions to rotate relative to the second bearing surface. Under the action of the driver, the two connecting portions drive the coupling portion to move closer to the fixed waveguide. The first limiting structure is used to limit the distance between the coupling portion and the fixed waveguide. The distance makes the coupling portion and the fixed waveguide in a preset optical coupling state.

[0016] In one embodiment, the optical switch includes two independent fixed waveguides, and the switching waveguide includes two coupling parts that respectively cooperate with the two fixed waveguides, and the conducting part connects the two coupling parts.

[0017] This application discloses an optical switch module, including multiple optical switches as described in any of the above technical solutions, wherein the multiple optical switches are arranged in an array.

[0018] Compared with the prior art, the technical solution of this application connects the connecting part and the coupling part through an elastic part. The elastic part can help release residual stress and avoid bending deformation of the connecting part or the coupling part.

[0019] Compared to a rigid connection between the connecting part and the coupling part, the elastic part in this application achieves an elastic connection between the connecting part and the coupling part. The elastic part has relatively low stiffness, which allows the residual stress in the coupling part to be released, reduces the deformation of the coupling part, and thus improves the coupling efficiency between the coupling part and the fixed waveguide. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the optical switch in Embodiment 1 of this application;

[0021] Figure 2 This is a schematic diagram of the optical switch in the off state according to Embodiment 1 of this application;

[0022] Figure 3 This is a cross-sectional view of the optical switch in the off state according to Embodiment 1 of this application;

[0023] Figure 4 This is a schematic diagram of the bending displacement of the coupling part in Embodiment 1 of this application;

[0024] Figure 5 This is a schematic diagram of a rigidly connected optical switch in the off state;

[0025] Figure 6 This is a schematic diagram of the bending displacement of the coupling part in a rigidly connected optical switch.

[0026] Figure 7 This is a schematic diagram of the optical switch in the off state in Embodiment 2 of this application;

[0027] Figure 8 This is a perspective view of the optical switch in the on state of Embodiment 3 of this application;

[0028] Figure 9 This is a cross-sectional view of the optical switch in the off state of Embodiment 3 of this application;

[0029] Figure 10 This is a cross-sectional view of the optical switch in the on state of Embodiment 3 of this application;

[0030] Figure 11 This is a cross-sectional view of the optical switch in the off state of Embodiment 4 of this application;

[0031] Figure 12 This is a cross-sectional view of the optical switch in the on state of Embodiment 4 of this application;

[0032] Figure 13 This is a schematic diagram of the optical switch module according to an embodiment of this application. Specific Implementation

[0033] The present application will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present application, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of this application.

[0034] In the various figures of this application, for ease of illustration, certain dimensions of structures or parts may be exaggerated relative to other structures or parts; therefore, they are only used to illustrate the basic structure of the subject matter of this application.

[0035] Furthermore, terms such as “above,” “over,” “below,” and “under,” used herein to indicate spatial relative position, are for illustrative purposes to describe the relationship of one unit or feature relative to another unit or feature as shown in the accompanying drawings. The terms of spatial relative position may be intended to include different orientations of the device in use or operation other than those shown in the figures. For example, if the device in the figures is flipped, a unit described as being “below” other units or features would be “above” other units or features. Therefore, the exemplary term “below” can encompass both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or otherwise), and the spatially related descriptive terms used herein will be interpreted accordingly.

[0036] Figures 1 to 5 This is a schematic diagram of the optical switch 100 provided in Embodiment 1 of this application.

[0037] The optical switch 100 includes a base 10, a fixed waveguide 11, and a switching waveguide 12.

[0038] The base 10 includes a first bearing surface 101 and a second bearing surface 102 having a height difference.

[0039] This section will use the example of the second bearing surface 102 being located above the first bearing surface 101 as an example.

[0040] The first bearing surface 101 and the second bearing surface 102 can be formed by etching a portion of the material of the base 10. For example, steps can be etched on the base 10 to form the first bearing surface 101 and the second bearing surface 102, respectively.

[0041] The fixed waveguide 11 is located on the first bearing surface 101 and is used to transmit optical signals.

[0042] The switching waveguide 12 includes a coupled part 121 and a conductive part 122 connected together.

[0043] The coupling part 121 is used to perform optical coupling with the fixed waveguide 11 to realize the transmission of optical signals.

[0044] The conductive part 122 is used to transmit optical signals that have been coupled or need to be coupled.

[0045] The optical switch 100 also includes a connecting portion 14 and an elastic portion 15 disposed on at least one side of the coupling portion 121.

[0046] The connecting part 14 connects to the second bearing surface 102.

[0047] The elastic part 15 connects the connecting part 14 and the coupling part 121, and the elastic part 15 provides appropriate elastic support for the coupling part 121.

[0048] The elastic part 15 may be a spring or other structure with elastic deformation capability.

[0049] When the connecting part 14 and the elastic part 15 drive the coupling part 121 to move closer to the fixed waveguide 11, the elastic part 15 deforms.

[0050] In this embodiment, the connecting part 14 and the coupling part 121 are connected by the elastic part 15. The elastic part 15 can help release residual stress and prevent the connecting part 14 or the coupling part 121 from bending and deforming.

[0051] Compared to a rigid connection between the connecting part and the coupling part, the elastic part 15 in this embodiment achieves an elastic connection between the connecting part 14 and the coupling part 121. The elastic part 15 has relatively low stiffness, which allows the residual stress of the coupling part 121 to be released after the stress is released, reducing the deformation of the coupling part 121 and thus improving the coupling efficiency between the coupling part 121 and the fixed waveguide 11.

[0052] In this embodiment, the connecting part 14 and the coupling part 121 are made of different materials.

[0053] When the connecting part 14 and the coupling part 121 are made of different materials, the residual stresses of the connecting part 14 and the coupling part 121 are different. The overlap of different residual stresses can cause bending deformation of the connecting part 14 or the coupling part 121.

[0054] In this embodiment, the connecting part 14 and the coupling part 121 are connected by an elastic part 15. The elastic part 15 can effectively release the different residual stresses generated by the connecting part 14 and the coupling part 121, and avoid bending deformation of the connecting part 14 or the coupling part 121.

[0055] In this embodiment, the optical switch 100 further includes a driver 13. The driver 13 is used to drive the connection portion 14 to move relative to the second bearing surface 102.

[0056] The elastic part 15 and the connecting part 14 are formed of the same material, or the elastic part 15 and the coupling part 121 are formed of the same material.

[0057] For example, when the elastic part 15 and the connecting part 14 are formed of the same material, the elastic part 15 and the connecting part 14 can be located in the same layer. During manufacturing, the connecting part 14 and the elastic part 15 can be formed in the same layer by etching, which simplifies the molding process.

[0058] The connecting portion 14 and the coupling portion 121 are formed of different materials. When the driver 13 is not working, the connecting portion 14 and the coupling portion 121 are located on different layers. During manufacturing, the connecting portion 14 and the coupling portion 121 can be formed on different layers by etching, which reduces the molding difficulty.

[0059] Optionally, the connecting portion 14 is formed of silicon, and the coupling portion 121 is formed of silicon nitride or aluminum nitride.

[0060] Assume that the residual stress of the silicon-based connection 14 is 30 MPa and the residual stress of the silicon-based coupling 121 is 100 MPa.

[0061] Combination Figure 5 and Figure 6 When the connection part 14' and the coupling part 121' are rigidly connected, the coupling part 121' undergoes bending deformation, resulting in a maximum height difference of up to 160nm at different positions, which seriously affects the coupling efficiency between the coupling part 121' and the fixed waveguide.

[0062] Combination Figure 4 When the connecting part 14 and the coupling part 121 are elastically connected by the elastic member 15, the maximum height difference at different positions of the coupling part 121 is approximately 50 nm due to bending deformation.

[0063] The bending deformation of the coupling part 121 under the condition of elastic connection is approximately 1 / 3 of that under the condition of rigid connection. The elastic connection between the connecting part 14 and the coupling part 121 can greatly reduce the bending deformation of the coupling part 121, thereby greatly improving the coupling efficiency between the coupling part 121 and the fixed waveguide 11.

[0064] Optionally, the bending deformation of the coupling part 121 can be adjusted by adjusting the materials of the connecting part 14, the coupling part 121 and the elastic member 15, as well as the rigidity of the elastic part 15. The specific adjustment can be made according to actual needs.

[0065] Optional, combined Figure 2 The elastic part 15 has a first stiffness along the first direction X and a second stiffness along the second direction Y, wherein the first stiffness is not greater than the second stiffness.

[0066] The first direction X is parallel to the extension direction of the coupling part 121, and the second direction Y is perpendicular to the first direction X. The first direction X is defined as the left-right direction, and the second direction Y can be the up-down direction Y1 or the front-back direction Y2 perpendicular to the plane of the paper.

[0067] The coupling portion 121 has a first length along the first direction X. The coupling portion 121 has a first width along the vertical direction Y1. The coupling portion 121 has a first thickness along the front-back direction Y2. The first length is greater than the first width, and the first length is greater than the first thickness.

[0068] For example, when the connecting portion 14 is stretched along the first direction X and the second direction Y under residual stress, the connecting portion 14 undergoes overall bending deformation. The bending deformation of the connecting portion 14 is transmitted to the coupling portion 121, which also stretches along the first direction X and the second direction Y, causing the coupling portion 121 to undergo overall bending deformation.

[0069] Since the first length is greater than the first width and the first thickness, the stretching degree of the coupling part 121 along the first direction X is greater than the stretching degree of the coupling part 121 along the second direction Y, that is, the coupling part 121 is more likely to deform along the first direction X.

[0070] In this embodiment, the elastic part 15 has a relatively small first stiffness along the first direction X, which can release more of the residual stress of the coupling part 121 along the first direction X, thereby achieving a better overall stress release effect.

[0071] Optionally, the coupling portion 121 includes a front end 1213 away from the conductive portion 122, and the elastic portion 15 extends from the front end 1213 toward the conductive portion 122.

[0072] The area of ​​the coupling portion 121 near the front end 1213 is more prone to deformation. In this embodiment, the elastic portion 15 is extended to the front end 1213, which can further reduce the deformation of the coupling portion 121.

[0073] Optionally, the coupling part 121 includes a coupling arm 1211 and a frame 1212 that connects the coupling arm 1211.

[0074] The coupling arm 1211 refers to the part that is optically coupled to the fixed waveguide 11.

[0075] Frame 1212 refers to the part that supports the coupling arm 1211. Frame 1212 is located on the left and right sides of the coupling arm 1211.

[0076] The frame 1212 is rigidly connected to the coupling arm 1211.

[0077] "Rigid connection" means that the elastic deformation between frame 1212 and coupling arm 1211 is smaller than that between elastic connection, and does not mean that frame 1212 and coupling arm 1211 are absolutely fixed.

[0078] The elastic part 15 is connected to the frame 1212, which can prevent the elastic part 15 from directly contacting the coupling arm 1211 and affecting the optical coupling.

[0079] Optionally, in this embodiment, the optical switch 100 includes two independent fixed waveguides 11, but is not limited thereto.

[0080] Two independent fixed waveguides 11 refer to two fixed waveguides 11 that do not have an optical connection.

[0081] Both fixed waveguides 11 can be located on the first bearing surface 101. The two fixed waveguides 11 are located on the same layer, and during fabrication, two independent fixed waveguides 11 can be formed on the same layer by etching.

[0082] Alternatively, the two fixed waveguides 11 may be located on different layers. One fixed waveguide 11 may be located on the first bearing surface 101, and the other fixed waveguide 11 may be located elsewhere.

[0083] The two fixed waveguides 11 are the input waveguide 11a and the output waveguide 11b, respectively, and the two fixed waveguides 11 are immovable relative to the base 10.

[0084] In this embodiment, the two fixed waveguides 11 are located on different layers and are arranged crosswise. In other embodiments, the two fixed waveguides 11 can also be arranged parallel to each other.

[0085] The switching waveguide 12 includes two coupling sections 121 that respectively cooperate with two fixed waveguides 11. A conducting section 122 connects the two coupling sections 121, and a portion of the conducting section 122 is fixedly connected to the base 10.

[0086] The two coupling parts 121 are a first coupling part 121a and a second coupling part 121b, respectively. The first coupling part 121a cooperates with the input waveguide 11a, and the second coupling part 121b cooperates with the output waveguide 11b.

[0087] In this embodiment, the input waveguide 11a is located below the first coupling part 121a, and the output waveguide 11b is located below the second coupling part 121b, but this is not a limitation and other arrangements are also possible.

[0088] The first coupling part 121a is provided with a connecting part 14 and an elastic part 15 on its left and right sides, and the second coupling part 121b is also provided with a connecting part 14 and an elastic part 15 on its left and right sides.

[0089] When the driver 13 drives the connecting part 14 to rotate relative to the second bearing surface 102, the connecting part 14 drives the coupling part 121 to move towards the fixed waveguide 11 to achieve optical coupling.

[0090] Specifically, when the driving force generated by the driver 13 acts on the connecting part 14, the connecting part 14 rotates relative to the second bearing surface 102, and the connecting part 14 drives the first coupling part 121a to approach the input waveguide 11a to achieve optical coupling between the first coupling part 121a and the input waveguide 11a.

[0091] The connecting part 14 also drives the second coupling part 121b to move closer to the output waveguide 11b, thereby realizing the optical coupling between the second coupling part 121b and the output waveguide 11b.

[0092] At this time, the optical switch 100 is in the open state, and the optical connection between the input waveguide 11a and the output waveguide 11b is realized through the first coupling part 121a, the conduction part 122 and the second coupling part 121b connected in sequence.

[0093] The optical signal in the input waveguide 11a is coupled into the first coupling part 121a, and then guided into the output waveguide 11b through the conduction part 122 and the second coupling part 121b, thereby switching the optical signal from the input waveguide 11a to the output waveguide 11b and realizing the optical switching function.

[0094] When the driver 13 is not working, the connector 14 is reset. The connector 14 drives the coupling part 121 to move away from the fixed waveguide 11 to achieve optical decoupling.

[0095] Specifically, when the driver 13 is not working and does not generate a driving force applied to the connector 14, the connector 14 is reset. The connector 14 drives the first coupling part 121a to move away from the input waveguide 11a, thereby realizing the optical decoupling of the first coupling part 121a from the input waveguide 11a.

[0096] The connecting part 14 also drives the second coupling part 121b to move away from the output waveguide 11b, thereby realizing the optical decoupling of the second coupling part 121b and the output waveguide 11b.

[0097] At this time, the optical switch 100 is in the off state, the input waveguide 11a and the output waveguide 11b are not connected, and the optical signal is transmitted along the original fixed waveguide.

[0098] Continue to combine Figures 1 to 4 In Embodiment 1, the optical switch 100 includes two connecting portions 14 and two elastic portions 15 disposed on both sides of the coupling portion 121.

[0099] The connecting part 14 includes a fixed part 141, a movable part 142, and a deformable part 143 connecting the fixed part 141 and the movable part 142. The fixed part 141 is connected to the second bearing surface 102, and the elastic part 15 is connected to the movable part 142. The driver 13 acts on the movable part 142 and causes the deformable part 143 to deform, and the deformable part 143 drives the movable part 142 to move closer to the first bearing surface 101.

[0100] Specifically, the base 10 also includes a third bearing surface 103 located between the first bearing surface 101 and the second bearing surface 102. The third bearing surface 103 and the second bearing surface 102 are located on the same side of the first bearing surface 101. The third bearing surface 103 is higher than the first bearing surface 101 and lower than the second bearing surface 102.

[0101] Optionally, in this embodiment, the optical switch 100 is a microelectromechanical system (MEMS) optical switch, and the driver 13 is one of an electrostatic driver, a piezoelectric driver, an electrothermal driver, or an electromagnetic driver.

[0102] This embodiment uses driver 13 as an example of an electrostatic driver.

[0103] The driver 13 includes a first electrode 131 and a second electrode 132. The first electrode 131 is located on the connecting part 14, and the second electrode 132 is located on the base 10.

[0104] The electrostatic force generated between the first electrode 131 and the second electrode 132 can be used as a driving force to drive the moving part 142 to move vertically downward.

[0105] Specifically, the first electrode 131 is located on the moving part 142, and the second electrode 132 is located on the third bearing surface 103.

[0106] The movable part 142 can be directly used as the first electrode 131, or the movable part 142 can be used as a support structure, with the first electrode 131 disposed on one side of the movable part 142.

[0107] The second electrode 132 is located on the third bearing surface 103, which can reduce the distance between the first electrode 131 and the second electrode 132.

[0108] When the distance between the first electrode 131 and the second electrode 132 is small, under a small driving voltage, the first electrode 131 and the second electrode 132 can generate a sufficiently large electrostatic force to drive the moving part 142 to move vertically downward relative to the fixed part 141, thereby reducing power consumption.

[0109] When the driving force generated by the driver 13 acts on the moving part 142, the moving part 142 moves vertically downward relative to the fixed part 141. The deformable part 143 deforms to assist the moving part 142 in moving vertically downward, and the moving part 142 drives the coupling part 121 to move closer to the fixed waveguide 11 to achieve optical coupling. The presence of the deformable part 143 enables the vertical movement of the moving part 142, instead of the rotational movement of the moving part 142 as in other embodiments. Of course, in other embodiments, the vertical movement of the moving part 142 can also be achieved in other ways.

[0110] Both sides of the coupling part 121 are provided with connecting parts 14 and elastic parts 15, which can assist the coupling part 121 to move vertically downward smoothly.

[0111] In this embodiment, the fixing part 141 is fixedly connected to the second bearing surface 102.

[0112] When the driver 13 is not working, the fixed part 141, the moving part 142, and the deformable part 143 are located on the same layer. The fixed part 141, the moving part 142, and the deformable part 143 are suspended above the fixed waveguide 11.

[0113] At this time, the coupling part 121 is in a decoupled state from the fixed waveguide 11.

[0114] "Decoupling state" means that the coupling part 121 is in a position with a large distance from the fixed waveguide 11, so that the coupling part 121 and the fixed waveguide 11 have extremely low coupling efficiency or no optical coupling at all, such as less than 10% coupling efficiency.

[0115] When the driver 13 is working, the fixed part 141 remains stationary, and the moving part 142 moves vertically downward in sync with the fixed part 141, driving the coupling part 121 to move vertically downward.

[0116] At this time, the coupling part 121 is in a coupled state with the fixed waveguide 11.

[0117] "Coupling state" refers to the appropriate coupling efficiency between the coupling part 121 and the fixed waveguide 11. For example, the coupling efficiency between the coupling part 121 and the fixed waveguide 11 is greater than 80%, or greater than or equal to 90%.

[0118] In this embodiment, the deformable part 143 and the driver 13 constitute a first-stage drive. In other embodiments, the optical switch 100 may include a two-stage drive, in which case the fixed part 141 can move vertically downward relative to the second bearing surface 102.

[0119] Combination Figure 7 This is a schematic diagram of the optical switch 100 provided in Embodiment 2 of this application.

[0120] For ease of explanation, the same or similar components in Embodiment 2 and Embodiment 1 are numbered the same or similarly, and so on.

[0121] The main difference between Embodiment 2 and Embodiment 1 is that the coupling part 121 in Embodiment 2 is connected to the elastic part 15 and the connecting part 14 only on one side.

[0122] Combination Figures 8 to 10 This is a schematic diagram of the optical switch 100 provided in Embodiment 3 of this application.

[0123] The main difference between Embodiment 3 and Embodiment 1 is that the connecting part 14 in Embodiment 1 moves vertically downward, while the connecting part 14 in Embodiment 3 is rotatably connected to the second bearing surface 102.

[0124] Specifically, in embodiment 3, the driver 13 is used to drive the connecting portion 14 to rotate relative to the second bearing surface 102. The optical switch 100 includes two connecting portions 14 and two elastic portions 15 disposed on both sides of the coupling portion 121.

[0125] The connecting part 14 can rotate relative to the second bearing surface 102 by means of a first rotating shaft 16.

[0126] The end of the connecting part 14 near the second bearing surface 102 is rotatably connected to the second bearing surface 102 via the first rotating shaft 16.

[0127] The first rotating shaft 16 can be a pivot beam, a torsion beam, etc. In this embodiment, the first rotating shaft 16 is a torsion beam as an example.

[0128] When the driving force generated by the driver 13 acts on the connecting part 14, the connecting part 14 rotates around the first rotating shaft 16, causing the coupling part 121 to move closer to the fixed waveguide 11.

[0129] When the driver 13 is not working and does not generate a driving force applied to the connection part 14, the connection part 14 can be automatically reset under the action of the first rotating shaft 16, and the connection part 14 drives the coupling part 121 to move away from the fixed waveguide 11.

[0130] Alternatively, the connection portion 14 may be configured to rotate relative to the second bearing surface 102 such that the connection portion 14 is fixed to the second bearing surface 102, and the connection portion 14 deforms and rotates relative to the second bearing surface 102.

[0131] The end of the connecting part 14 away from the coupling part 121 is fixedly connected to the second bearing surface 102, and the connecting part 14 itself is a deformable structure.

[0132] When the driving force generated by the driver 13 acts on the connecting part 14, the connecting part 14 deforms and causes the end of the connecting part 14 away from the second bearing surface 102 to deflect downward, and the connecting part 14 drives the coupling part 121 to move closer to the fixed waveguide 11.

[0133] The driver 13 includes an interacting first electrode 131 and a second electrode 132, with the first electrode 131 located on the connection portion 14 and the second electrode 132 located on the base 10.

[0134] This embodiment takes the second electrode 132 located on the first bearing surface 101 as an example.

[0135] The electrostatic force generated between the first electrode 131 and the second electrode 132 can be used as a driving force to drive the connecting part 14 to rotate relative to the second bearing surface 102.

[0136] The connecting part 14 can be directly used as the first electrode 131.

[0137] Alternatively, the connecting part 14 can be a load-bearing structure, with the first electrode 131 disposed on one side of the connecting part 14.

[0138] In this embodiment, the connecting part 14 is designed to rotate relative to the second bearing surface 102. Compared to connecting parts that move vertically or horizontally, this embodiment can drive the coupling part 121 to generate a larger displacement with a smaller driving force, which can effectively reduce the driving force required by the driver 13 and improve driving efficiency.

[0139] The elastic part 15 reduces the overall rigidity, and the driver 13 can drive the connecting part 14 to rotate relative to the second bearing surface 102 with a small driving force, which can further reduce the driving force.

[0140] Combination Figure 11 and Figure 12 This is a schematic diagram of the optical switch 100 provided in Embodiment 4 of this application.

[0141] The main difference between Embodiment 4 and Embodiment 3 is that the optical switch 100 in Embodiment 5 also includes a first limiting structure 17.

[0142] Specifically, the optical switch 100 also includes a first limiting structure 17 and two connecting portions 14 and two elastic portions 15 disposed on both sides of the coupling portion 121.

[0143] The driver 13 is used to drive the two connecting parts 14 to rotate relative to the second bearing surface 102. Under the action of the driver 13, the two connecting parts 14 drive the coupling part 121 to move closer to the fixed waveguide 11.

[0144] The first limiting structure 17 is used to limit the distance between the coupling part 121 and the fixed waveguide 11, and the distance is such that the coupling part 121 and the fixed waveguide 11 are in a preset optical coupling state.

[0145] "Preset optical coupling state" means maintaining the distance between the coupling part 121 and the fixed waveguide 11 at a preset value or within a preset range so that the coupling part 121 and the fixed waveguide 11 have a suitable coupling efficiency.

[0146] In this embodiment, the connecting part 14 and the coupling part 121 are connected by an elastic part 15. The force generated by the rotation of the connecting part 14 relative to the second bearing surface 102 can be effectively absorbed by the elastic part 15 in all directions, thereby effectively reducing the force transmitted to the coupling part 121 and avoiding damage to the coupling part 121.

[0147] The elastic part 15 effectively prevents the coupling part 121 from shifting position due to bending of the connecting part 14. Combined with the first limiting structure 17, the coupling part 121 and the fixed waveguide 11 can be stably maintained in a preset optical coupling state, which can effectively improve the optical coupling efficiency.

[0148] The advantage of setting the first limiting structure 17 is that if the actual rotation angle of the connecting part 14 relative to the second bearing surface 102 deviates from the expected rotation angle, for example, if the actual rotation angle is too large, the first limiting structure 14 can still limit the coupling part 121 to the expected position, which can greatly improve the tolerance of the entire optical switch 100 to manufacturing and assembly errors.

[0149] In this embodiment, the optical switch 100 may further include a second limiting structure 18.

[0150] When the connecting part 14 stops rotating, the second limiting structure 18 simultaneously abuts against the connecting part 14 and the first bearing surface 101.

[0151] The second limiting structure 18 can prevent the connecting part 14 from directly contacting or colliding with the first bearing surface 101.

[0152] Combination Figure 13 The present application also provides an optical switch module 200, which includes a plurality of optical switches 100 arranged in an array.

[0153] The input waveguides 11a of each optical switch 100 in the same column are connected end to end in sequence, and the output waveguides 11b of each optical switch 100 in the same row are connected end to end in sequence. In this way, multi-channel transmission and switching of optical signals can be realized.

[0154] In summary, in this embodiment, the connecting part 14 and the coupling part 121 are connected by the elastic part 15. The elastic part 15 can help release residual stress and prevent the connecting part 14 or the coupling part 121 from bending and deforming.

[0155] Compared to the rigid connection between the connecting part and the coupling part, the elastic part 15 in this embodiment realizes the elastic connection between the connecting part 14 and the coupling part 121. The elastic part 15 has relatively low stiffness, which releases the residual stress of the coupling part 121, reduces the deformation of the coupling part 121, and thus improves the coupling efficiency between the coupling part 121 and the fixed waveguide 11.

[0156] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0157] The detailed descriptions listed above are merely specific illustrations of feasible embodiments of this application and are not intended to limit the scope of protection of this application. All equivalent embodiments or modifications made without departing from the spirit of the art of this application should be included within the scope of protection of this application.

Claims

1. An optical switch, characterized in that, The device includes a base, a fixed waveguide, and a switching waveguide. The base includes a first bearing surface and a second bearing surface with a height difference. The fixed waveguide is located on the first bearing surface. The switching waveguide includes a coupled part and a conductive part connected together. The optical switch further includes a connecting portion and an elastic portion disposed on at least one side of the coupling portion. The connecting portion is connected to the second bearing surface, and the elastic portion is connected to the connecting portion and the coupling portion. When the connecting portion and the elastic portion drive the coupling portion to move toward the fixed waveguide, the elastic portion deforms.

2. The optical switch according to claim 1, characterized in that, The connecting part and the coupling part are made of different materials.

3. The optical switch according to claim 1, characterized in that, The elastic part and the connecting part are formed of the same material, or the elastic part and the coupling part are formed of the same material.

4. The optical switch according to claim 1, characterized in that, The optical switch also includes a driver for driving the connection portion to move relative to the second bearing surface. When the driver is not working, the connection portion and the coupling portion are located on different layers.

5. The optical switch according to claim 1, characterized in that, The coupling part includes a coupling arm and a frame connecting the coupling arm. The frame is rigidly connected to the coupling arm, and the elastic part is connected to the frame.

6. The optical switch according to claim 1, characterized in that, The elastic part has a first stiffness along a first direction and a second stiffness along a second direction. The first stiffness is not greater than the second stiffness. The first direction is parallel to the extension direction of the coupling part, and the second direction is perpendicular to the first direction.

7. The optical switch according to claim 1, characterized in that, The connecting portion is formed of silicon, and the coupling portion is formed of silicon nitride or aluminum nitride.

8. The optical switch according to claim 1, characterized in that, The optical switch includes two connecting portions and two elastic portions disposed on both sides of the coupling portion.

9. The optical switch according to claim 1, characterized in that, The optical switch further includes a driver, which is used to drive the connecting part to rotate relative to the second bearing surface. The rotation of the connecting part relative to the second bearing surface can be achieved by the connecting part rotating relative to the second bearing surface via a first rotating shaft, or by the connecting part being fixed to the second bearing surface and the connecting part deforming to rotate relative to the second bearing surface.

10. The optical switch according to claim 1, characterized in that, The optical switch further includes a driver. The connecting part includes a fixed part, a moving part, and a deformable part connecting the fixed part and the moving part. The fixed part is connected to the second bearing surface. The elastic part is connected to the moving part. The driver acts on the moving part and causes the deformable part to deform. The deformable part drives the moving part to move closer to the first bearing surface.

11. The optical switch according to claim 1, characterized in that, The optical switch further includes a driver, a first limiting structure, two connecting parts and two elastic parts disposed on both sides of the coupling part. The driver is used to drive the two connecting parts to rotate relative to the second bearing surface. Under the action of the driver, the two connecting parts drive the coupling part to move closer to the fixed waveguide. The first limiting structure is used to limit the distance between the coupling part and the fixed waveguide. The distance makes the coupling part and the fixed waveguide in a preset optical coupling state.

12. The optical switch according to claim 1, characterized in that, The optical switch includes two independent fixed waveguides, and the switching waveguide includes two coupling parts that respectively cooperate with the two fixed waveguides. The conductive part connects the two coupling parts.

13. An optical switch module, characterized in that, It includes a plurality of optical switches as described in any one of claims 1 to 12, wherein the plurality of optical switches are arranged in an array.

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