Systems, methods, and apparatuses for non-mechanical optics and photonic beam steering

Abstract

An example system includes a high-side electrode layer having a first plurality of electrical members alternating with and electrically coupled to adjacent electrical members of a second plurality of electrical members, where either the first plurality of electrical members or the second plurality of electrical members are discrete electrodes, and the other of the first or second plurality of electrical members are resistors. Thus, the high-side electrode layer is formed of alternating discrete electrodes and resistors. The example system further includes a low-side electrode layer and an electro-optic (EO) layer having an EO active material at least partially between the high-side electrode layer and the low-side electrode layer, forming a plurality of active cells of the EO layer.

Description

[0001] This case is a divisional application. The parent application is PCT application number 202180053110.2, which has entered the national phase and is entitled "System, method and apparatus for non-mechanical optics and photonic beam steering". The application date is April 19, 2021.

[0002] Cross-references to related applications This application claims priority to U.S. Application 16 / 999,815 (EXCT-0003-U01-G), filed August 21, 2020, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING,” and is a partial continuation thereof. This application also claims priority to U.S. Application 16 / 916,731 (EXCT-0004-U01), filed June 30, 2020, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING,” and is a partial continuation thereof. This application claims priority to international application No. PCT / US2020 / 064071 (EXCT-0006-WO), filed on December 9, 2020, entitled “SYSTEM, METHOD, ANDAPPARATUS TO STEER AN ELECTROMAGNETIC BEAM UTILIZING STAGED STEERING”, and is a partial continuation thereof.

[0003] U.S. Application 16 / 999,815 (EXCT-0003-U01-G), filed August 21, 2020, is a continuation of International Application PCT / US2019 / 023915, filed March 25, 2019, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0003-WO). PCT / US2019 / 023915 (EXCT-0003-WO) claims priority to U.S. Provisional Patent Application No. 62 / 749,487, filed October 23, 2018, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAMSTEERING” (EXCT-0002-P01). PCT / US2019 / 023915 (EXCT-0003-WO) also claims priority to U.S. Patent Application No. 15 / 796,055, filed on October 27, 2017, entitled “SYSTEM, METHODAND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0001-U01), and is a partial continuation thereof.

[0004] U.S. Application 16 / 916,731 (EXCT-0004-U01), filed June 30, 2020, is a continuation of International Application PCT / US2019 / 57616, filed October 23, 2019, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0004-WO). PCT / US2019 / 57616 (EXCT-0004-WO) claims priority to U.S. Provisional Patent Application No. 62 / 868,286, filed June 28, 2019, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0005-P01). PCT / US2019 / 57616 (EXCT-0004-WO) also claims priority to U.S. Provisional Patent Application No. 62 / 749,487, filed October 23, 2018, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0002-P01). PCT / US2019 / 57616 (EXCT-0004-WO) also claims priority to PCT / US2019 / 023915, filed March 25, 2019, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING” (EXCT-0003-WO), and is a partial continuation thereof.

[0005] PCT / US2020 / 064071 (EXCT-0006-WO) claims priority to U.S. Provisional Application 62 / 945,720, filed December 9, 2019, entitled “ELECTRO-OPTICAL (EO) BEAM STEERING TO A VERY WIDE ANGLE (>+ / - 60°)” (EXCT-0006-P01). PCT / US2020 / 064071 (EXCT-0006-WO) also claims priority to US 16 / 999,815 (EXCT-0003-U01-G), filed August 21, 2020, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING,” and is a partial continuation thereof. PCT / US2020 / 064071 (EXCT-0006-WO) also claims priority to US 16 / 916,731 (EXCT-0004-U01), filed on June 30, 2020, entitled “SYSTEM, METHOD AND APPARATUS FOR NON-MECHANICAL OPTICAL AND PHOTONIC BEAM STEERING,” and is a partial continuation thereof.

[0006] Each of the aforementioned applications is incorporated herein by reference in its entirety for all purposes. Background Technology

[0007] Previously known beam steering systems and methods suffer from numerous drawbacks. Mechanically steering systems have many moving parts, manufacturing costs and complexity, and limitations in system response time, thus affecting beam steering changes. Additionally, mechanical systems suffer from reliability issues associated with mechanical failures. Previously known beam steering systems without mechanical steering additionally suffer from numerous drawbacks, including limited steering capability, limited steering efficiency, and high voltage differentials occurring within the equipment.

[0008] The operation of a typical previously known beam steering system is described below. A previously known beam steering system comprises a thin film of optically active material positioned between a ground electrode and discrete electrodes having an applied voltage. The voltage starts at zero, increases to a design voltage across multiple electrodes, and is then reset to zero. The discrete electrodes are separated by a spacing distance that can be uniform throughout the aperture (i.e., across the entire film). The design voltage will be V_lambda, or a voltage sufficient to provide one optical path difference (OPD) for one wavelength, and will depend on the properties of the film and the incident wavelength being redirected. The voltage applied between adjacent discrete electrodes will be asymptotic, depending on how many discrete electrodes, besides the reset electrodes, are used to asymptotically from zero voltage to V_lambda. At the reset electrode, the voltage difference will be approximately V_lambda—with a V_lambda voltage on the last discrete electrode in one stage, and an approximately zero voltage on the first discrete electrode in the next stage, where the interval before and after the reset is 2πn. The applied electric field is not confined between each discrete electrode and the ground electrode, and further, the applied electric field is not parallel to the interval between each discrete electrode and the ground electrode. Therefore, previously known beam steering systems experience edge effects and a diffuse field, resulting in a large steering efficiency loss at the reset position, where the voltage cannot be abruptly reset to 0V. The distance required to reset to zero is the retrace distance, which can be large in previously known beam steering systems and can extend across several electrode widths.

[0009] Therefore, improvements in beam steering systems—including systems with limited or no mechanical moving parts—are desirable. Summary of the Invention

[0010] The example system includes a high-side electrode layer having a first plurality of electrical components that alternate with and are electrically coupled to adjacent electrical components in a second plurality of electrical components, wherein either the first plurality of electrical components or the second plurality of electrical components is a discrete electrode, and the other of the first or second plurality of electrical components is a resistor. Thus, the high-side electrode layer is formed by alternating discrete electrodes and resistors. The example system further includes a low-side electrode layer and an electro-optic (EO) layer having an EO active material at least partially located between the high-side electrode layer and the low-side electrode layer, thereby forming a plurality of active units in the EO layer.

[0011] The following describes certain additional aspects of the example system, and any one or more of these aspects may be present in some embodiments. The example system includes a resistor wherein a high-side electrode layer terminates at one or both ends of the layer, and / or electrodes wherein the high-side electrode layer terminates at one or both ends of the layer. The example system includes a controller having: steering request circuitry that interprets a steering request value; and steering configuration circuitry that determines a plurality of EO command values ​​in response to the steering request value, wherein the plurality of EO command values ​​correspond to a half-wave voltage profile. The example controller further includes steering implementation circuitry that provides a plurality of voltage commands in response to the plurality of EO command values. The example system includes electrodes in the high-side electrode layer in response to the plurality of voltage commands. The example half-wave voltage profile includes a first voltage value of the last electrode of a first phase delay stage and a second voltage value of the first electrode of a second phase delay stage, wherein the first voltage value and the second voltage value have opposite signs. In another embodiment, the first voltage value and the second voltage value have equal magnitudes. In some embodiments, voltage values ​​having equal magnitudes include voltage values ​​differing within a noise voltage value by a voltage difference corresponding to a π phase delay and / or an nπ phase delay. The example nπ phase delay includes n, where n has an integer value between 1 and 4 (inclusive). The example system includes voltage values ​​with opposite signs relative to the nominal voltage. The example system includes a first voltage value and a second voltage value symmetrically distributed about the 0π phase shift. The example low-side electrode layer includes multiple discrete electrodes. The example low-side electrode layer includes continuous electrodes. The example low-side electrode layer includes a reflective layer—formed, for example, using reflective electrodes and / or using a reflective layer coupled to the low-side electrode layer.

[0012] An example device includes a thin beam steering device having a high-side electrode layer, the high-side electrode layer comprising a first plurality of electrical components alternating with and electrically coupled to adjacent electrical components in a second plurality of electrical components. One of the first plurality of electrical components or the second plurality of electrical components is a discrete electrode, and the other of the first plurality of electrical components or the second plurality of electrical components is a resistor. The thin beam steering device further includes a low-side electrode layer and an EO layer, the EO layer having an EO active material at least partially positioned between the high-side electrode layer and the low-side electrode layer, thereby forming a plurality of active units in the EO layer. The example device includes a convex lens portion optically coupled to the thin beam steering device on a first side, and a concave lens portion optically coupled to the thin beam steering device on a second side.

[0013] The following describes certain further aspects of the example device, and any one or more of these aspects may be present in some embodiments. One example device includes a controller having: steering request circuitry that interprets a steering request value; and steering configuration circuitry that determines a plurality of EO command values ​​in response to the steering request value, wherein the plurality of EO command values ​​correspond to a half-wave voltage profile. The example controller further includes steering implementation circuitry that provides a plurality of voltage commands in response to the plurality of EO command values. The example thin beam steering device includes a high-side electrode in response to the plurality of voltage commands. The example half-wave voltage profile includes a first voltage value of the last electrode of a first phase delay stage and a second voltage value of the first electrode of a second phase delay stage, wherein the first voltage value and the second voltage value have opposite signs. In another embodiment, the first voltage value and the second voltage value have equal magnitudes. In some embodiments, voltage values ​​having equal magnitudes include voltage values ​​differing within noise voltage values ​​by a voltage difference corresponding to a π phase delay and / or an nπ phase delay. The example nπ phase delay includes n, where n has an integer value between 1 and 4 (inclusive). The example system includes voltage values ​​with opposite signs relative to the nominal voltage. The example system includes a first voltage value and a second voltage value symmetrically distributed about the 0π phase shift. The example low-side electrode layer includes multiple discrete electrodes. The example low-side electrode layer includes continuous electrodes. The example low-side electrode layer includes a reflective layer—formed, for example, using reflective electrodes and / or using a reflective layer coupled to the low-side electrode layer. An example device including a thin beam steering device coupled to a fishtail intensifier is capable of steering an incident EM beam to a range of at least + / -20 degrees in a given axis, and / or to a range of at least + / -30 degrees in a given axis. In some embodiments, the convex lens portion and the concave lens portion are formed from separate substrates, and / or formed using manufacturing techniques with similar tolerance values. In some embodiments, the convex lens portion and the concave lens portion are formed from a shared substrate.

[0014] The example system includes a polarized birefringent grating (PBG) positioned between an electromagnetic (EM) source and a first volumetric hologram, a first volumetric hologram positioned between the PBG and a second volumetric hologram, and a second volumetric hologram interposed between the first volumetric hologram and a continuous steering element. The example system includes a continuous steering element provided as an alternating resistor embodiment, such as as described in the preceding example systems and apparatuses, or otherwise as described throughout this disclosure. The example PBG responds to the polarization of an incident beam from the EM source to selectively steering the incident beam to a first selected angle or a second selected angle, wherein the first volumetric hologram responds to the first selected angle, and wherein the second volumetric hologram responds to the second selected angle. Each volumetric hologram increases the steering angle of the incident EM beam in response to each respective selected angle. In some embodiments, the PBG is replaced with discrete or continuous steering elements. In some embodiments, the PBG and one or both volumetric holograms are replaced with one or more discrete or continuous steering elements.

[0015] The following describes certain additional aspects of the example system, and any one or more of these aspects may be present in some embodiments. The example system includes a controller having: steering request circuitry that interprets steering request values; and steering configuration circuitry that determines a plurality of EO command values ​​in response to the steering request values, wherein the plurality of EO command values ​​correspond to a half-wave voltage profile. The example controller further includes steering implementation circuitry that provides a plurality of voltage commands in response to the plurality of EO command values. The example system includes electrodes in a high-side electrode layer in response to the plurality of voltage commands. The example steering configuration circuitry further determines a polarization orientation in response to the steering request values, and selectively polarizes an EM source to provide an incident beam to the PBG (and / or the first steering layer) with a selected first polarization corresponding to a first selected angle or a selected second polarization corresponding to a second selected angle. The example selectively polarized EM source responds to the polarization orientation.

[0016] An example half-wave voltage profile includes a first voltage value of the last electrode of a first phase delay order and a second voltage value of the first electrode of a second phase delay order, wherein the first and second voltage values ​​have opposite signs. In another embodiment, the first and second voltage values ​​have equal magnitudes. In some embodiments, voltage values ​​with equal magnitudes include voltage values ​​that differ within a noise voltage value by a voltage difference corresponding to a π phase delay and / or an nπ phase delay. An example nπ phase delay includes n, where n has an integer value between 1 and 4 (inclusive). An example system includes voltage values ​​with opposite signs relative to the nominal voltage. An example system includes first and second voltage values ​​symmetrically distributed about a 0π phase shift. An example low-side electrode layer includes multiple discrete electrodes. An example low-side electrode layer includes continuous electrodes. An example low-side electrode layer includes a reflective layer—formed, for example, using reflective electrodes and / or using a reflective layer coupled to the low-side electrode layer. An example system includes a fishtail enhancer associated with a continuous steering element as a second steering layer of the beam steering system. An example second steering layer of a beam steering system can provide a combined steering capability greater than + / -25 degrees (e.g., continuous steering elements and a fishtail enhancer together). Example beam steering systems that include a first steering layer (e.g., a PBG and a volumetric hologram, or other steering arrangement) and a second steering layer (e.g., continuous steering elements and a fishtail enhancer) include a final steering capability greater than + / -30 degrees, greater than + / -45 degrees, between + / -45 degrees and + / -60 degrees, and / or greater than + / -60 degrees.

[0017] An example optical steering device includes a first steering layer that adjusts the incident angle of an EM beam on a second steering layer, wherein the first steering layer is positioned between the EM source and the second steering layer. An example second steering layer is provided as an alternating resistor embodiment of a thin-beam scanning device, such as as illustrated in the preceding examples, or otherwise as set forth throughout this disclosure.

[0018] The following describes certain additional aspects of an example optical steering device, and any one or more of these aspects may be present in some embodiments. An example first steering layer includes discrete steering elements that selectively steering an incident EM beam and a selected first angle or a second angle. The example first steering layer further includes a first volumetric hologram that increases the selected first angle to an increased first angle in response to the selected first angle, and a second volumetric hologram that increases the selected second angle to an increased second angle in response to a selected second angle. The example first steering layer includes, for example, a PBG that provides the selected first angle or second angle in response to the polarization of the incident EM beam. The example optical steering device further includes a selectively polarized EM source that provides an incident EM beam to the first steering layer with a selected polarization to select the first angle or the second angle.

[0019] Example optical steering devices include a first steering layer with a thin beam steering device. This example thin beam steering device is capable of providing an incident EM beam at a selected angle—for example, to activate a first or second volumetric hologram, and / or to bypass the volumetric hologram and provide a selected angle of incidence onto a second steering layer. In some embodiments, the first steering layer includes a thin beam steering device, where no volumetric hologram is present, and / or no volumetric hologram is present for a given steering axis. Example optical steering devices include thin beam steering devices included in the first and / or second steering layers, operating a half-wave voltage profile. Example optical steering devices include thin beam steering devices in a second steering layer with an associated fishtail intensifier. Example thin beam steering devices include thin beam steering devices having arrangements such as: castle arrangement; castle pro arrangement; chessboard arrangement; chess pro arrangement; and / or alternating resistor arrangement. Attached Figure Description

[0020] Figure 1 A diagram depicting the mode 2π phase shift to create beam steering is shown.

[0021] Figure 2 A diagram depicting the diffuse field effect on the phase profile associated with a previously known electro-optic thin-film scanner is shown.

[0022] Figure 3 This is a plan view of a previously known volume beam steering system.

[0023] Figure 4 It is a planar diagram of a previously known 2D volume beam steering system.

[0024] Figure 5 This is a planar diagram of a single-layer active EO material and an insulating material to reduce the diffuse field effect.

[0025] Figure 6 It is a graph depicting the step increments of two phase delay stages with reset between the use of conductive electrodes.

[0026] Figure 7 This is a plan view of an embodiment with tilted electrodes and insulators to reduce diffuse field effects.

[0027] Figure 8 It is a graph depicting the step increments of two phase delay stages with reset between the use of resistive or tilted electrodes.

[0028] Figure 9 It is a planar diagram of a single-layer active EO material with a reflective layer and an insulating material.

[0029] Figure 10 This is a plan view of an embodiment having a tilted electrode with a reflective layer and an insulator.

[0030] Figure 11 This is a schematic drawing of an EO active layer having multiple active units, each having a discrete low-side electrode.

[0031] Figure 12 An embodiment of a two-layer configuration having a common or continuous low-side electrode is depicted.

[0032] Figure 13 An embodiment of a four-layer configuration with a common or continuous low-side electrode is described.

[0033] Figure 14 An embodiment of a two-layer configuration with a shared common or continuous low-side electrode is described.

[0034] Figure 15 An embodiment of a four-layer configuration with a shared common or continuous low-side electrode is described.

[0035] Figure 16 Two-layer embodiments with a common or continuous low-side electrode are depicted.

[0036] Figure 17 Two-layer embodiments with shared common or continuous low-side electrodes are depicted.

[0037] Figure 18 Monolayer active EO materials with common or continuous low-side electrodes and active units of varying thicknesses are depicted.

[0038] Figure 19 This is a schematic diagram of a controller used to steer the incident EM beam.

[0039] Figure 20 This is a schematic diagram of another embodiment of a controller used to provide EM beam steering commands.

[0040] Figure 21 It is a schematic flowchart of the process for redirecting incident EM beams with different wavelength values.

[0041] Figure 22 It is a schematic flowchart of the process for redirecting an incident EM beam on more than one axis or polarity.

[0042] Figure 23 This is a schematic flowchart illustrating the process of redirecting the incident EM beam.

[0043] Figure 24 This is a schematic flowchart of the process for manufacturing and using EM beam steering devices.

[0044] Figure 25 This is a schematic flowchart illustrating the process of operating an EM beam steering device.

[0045] Figure 26 This is a schematic diagram of a beam steering device.

[0046] Figure 27 An embodiment of a single active layer of a beam steering device is depicted.

[0047] Figure 28 Another embodiment of a single active layer of a beam steering device is depicted.

[0048] Figure 29 This is a schematic diagram of a controller used to steer the incident EM beam.

[0049] Figure 30 This is a diagram depicting an example phase profile using a half-wave voltage profile.

[0050] Figure 31 This is a schematic flowchart illustrating the process of operating an EM beam steering device.

[0051] Figure 32 This is a schematic diagram of a beam steering device that utilizes a zero-power meniscus lens.

[0052] Figure 33 This is a schematic diagram of a beam steering device that utilizes a zero-power meniscus lens.

[0053] Figure 34 This is a schematic depiction of a system used to steer EM beams.

[0054] Figures 35-37 It is a schematic depiction of the steering capability of a continuous steering element.

[0055] Figure 38 This is a schematic depiction of a thin beam steering device associated with a fishtail intensifier.

[0056] Figure 39 This is a schematic depiction of a system used to steer EM beams.

[0057] Figure 40 It is a schematic depiction of the steering capability of the continuous steering element associated with the fishtail reinforcement.

[0058] Figure 41 Illustrative data on reflection loss at high steering angles are presented.

[0059] Figure 42 This is a schematic block diagram of a controller used to steer the EM beam.

[0060] Figure 43 This is a schematic flowchart of the process for redirecting EM beams.

[0061] Figure 44 This is a schematic flowchart of the process for redirecting EM beams.

[0062] Figure 45 An embodiment of a single active layer of a beam steering device is depicted.

[0063] Figure 46 It is a graph depicting the step increments of multiple phase delay stages with resets using alternating resistor-electrode elements.

[0064] Figure 47 This is an illustrative description of the steering capability of the steering system according to this disclosure. Detailed Implementation

[0065] For the purpose of promoting an understanding of the principles of this disclosure, reference will now be made to embodiments illustrated in the accompanying drawings and described in the following written description. It should be understood that this is not intended to limit the scope of the disclosure. It should be further understood that this disclosure includes any changes and modifications to the illustrated embodiments, and includes further applications of the principles disclosed herein that would normally occur to those skilled in the art to which this disclosure pertains.

[0066] This disclosure relates to the field of optical beam steering and, in some embodiments, includes modulo 2πn and bulk active layer beam steering methods with a reduced number of moving parts and / or no moving parts. More specifically, this disclosure teaches a unique, novel, diffraction-based beam steering device made of electro-optic crystals, liquid crystals, quantum dot materials, or any other material whose refractive index can be dynamically changed. Example devices will have no moving parts. In some embodiments, molecular movement occurs in the electroactive material, such as in nematic liquid crystals.

[0067] Directing an optical beam without moving parts requires the ability to change the phase front leaving the optics compared to the phase front entering the device. The direction in which the beam is traveling can be perpendicular to the phase front of the beam. Traditionally, the phase front and the direction in which the beam is traveling are changed by moving mirrors or transparent optical elements with a refractive index different from that of air. This paper describes two basic non-mechanical methods for creating a phase difference across an optical beam to produce a redirected beam. One method is to create an optical path delay (“OPD”), which is equivalent to a phase delay over a given wavelength, and the other method is to directly create the phase delay. An example of the direct phase method is presented by S. Pancharatnam in his paper Proceedings of the Indian Academy of Sciences (vol XLI, no. 4, sec. A, 137, 1955). Some background to this disclosure is discussed in “A review of phased array steering for narrow-band electro-optical systems” by Paul F. McManamon, Philip J. Bos, Michael J. Escuti, Jason Heikenfeld, Steve Serati, Huikai Xie, and Edward A. Watson. These techniques are discussed in the Pancharatnam paper, which may be referred to as “Reference 1” below, and is incorporated herein by reference in its entirety for all purposes.

[0068] Another example method for redirecting light without mechanical movement involves writing a prism. Some challenges with this method include the difficulty in creating an OPD (Optical Displacement) that would be required for a fairly wide full prism. For example, a 10cm wide aperture that redirects light by 30 degrees would require an OPD of >5cm on the thick side of the prism. However, for narrow wavelengths, it is advantageous that the light is sinusoidal.

[0069] For a sine wave, the presence of 0, 2π, 4π, or 2nπ phase shifts is irrelevant. The unfolded phase profile is the same. Therefore, as the width across the prism shifts, an OPD can be created, which, whenever the phase reaches 2π, is subtracted by 2π of the phase or a wavelength, resulting in a sawtooth OPD and a sawtooth phase profile. When the phase profile unfolds, it is the same for the design wavelength as the profile produced by the light traveling through the prism. Unfolding the phase before the phase shift means adding phase or resetting the OPD back into the prism. Resetting can be done using any multiple of 2π or any multiple of a wavelength. If the reset is created perfectly, the unfolded phase at the design wavelength looks like the phase profile produced by propagation through the prism and redirects the light in the same way as the phase shift produced by the light traveling through the prism.

[0070] The mode 2π phase profile should be interpreted as meaning a 2πn phase profile, a reset of any multiple of the wavelength of the OPD. Discrete incremental mode 2π beam steering, as... Figure 1 As shown. In Figure 1 In the example shown, off-step lengths are used to construct phase shifts up to one wavelength (or multiples of that wavelength, 2πn) or 2π. For example, off-step lengths of 0, 30, 60, 90, 120, 150, 180, 210, 240, 270, 300, and 330 degrees can be used, and then reset (e.g., at position 108) back to 0 degrees instead of going to 360 degrees, since 0 and 360 degrees are the same in a sine wave. This is the result of applying a refractive index change to the material with individual electrodes while ignoring any diffuse field effects. The advantage of using a 2π-mode phase profile is that the required OPD can be very small, on the order of a single wavelength (or a small multiple of that wavelength). Figure 1In the example, multiple phase delay stages (e.g., group 102) are used to construct a 2πn phase shift, and a reset 108 is performed between each phase delay stage 102. An expanded phase profile 104 is depicted, which is the equivalent phase shift of the incoming, undisturbed phase front 106 (defined by the EM beam and co-located with the position axis). It will be understood that any number of phase delay stages 102, each having any number of discrete step lengths, can be used to construct them. Additionally, the phase delay stages 102 may not be discrete, but may be continuous or partially continuous as described throughout this disclosure. Additionally, each phase delay stage 102 may differ from one or more other phase delay stages 102, for example, where the first stage 102 provides a 2π phase shift, and where the second stage 102 provides a 4π phase shift (e.g., using twice the distance along the position axis, thus providing the designed expanded phase profile 104). Additionally or alternatively, the phase delay order 102 does not need to be in the same plane—for example, where the incident EM beam encounters one of the phase delay orders 102 in a first plane and the second in a second plane (e.g., refer to...). Figure 12 ).

[0071] For mode 2πn beam steering, the maximum required OPD (i.e., the minimum thickness of the electro-optic (EO) material at the position of maximum phase shift) is approximately equal to the wavelength of the light being steering. In some embodiments, a thicker EO material, such as a multiple of the wavelength of the light being steering, can be used. The mode 2π steering method makes the beam steering susceptible to wavelength dependence, or dispersion. Wavelength dependence results in a change in wavelength due to the angle of steering. This wavelength dependence is discussed in: P.McManamon, E.A. Watson, T.A. Dorschner, L.J. Barnes, “Nonmechanical beamsteering for active and passive sensors” (SPIE 1417, 110, 1991, p194). McManamon’s paper “Nonmechanical beam steering…”, which may be referred to as “Reference 2” below, is incorporated herein by reference in its entirety for all purposes. Wavelength dependence is further discussed in: P.P. McManamon, J. Shi, and P. Bos, “Broadband optical phased-array beam steering” (Opt. Eng. 44, 128004, 2005). McManamon’s paper “Broadband optical phased-array beam steering”, which may be referred to as “Reference 3”, is incorporated herein by reference in its entirety for all purposes.

[0072] Throughout this disclosure, wherever a wavelength (e.g., the wavelength of light, EM radiation, and / or optical or photonic beams) is described and / or wherever λ is described, it will be understood that the wavelength (or λ) can be a nominal wavelength, a specific wavelength, and / or an effective wavelength. For example, a nominal wavelength can be the wavelength of a target or considered EM radiation frequency in a vacuum, in air, or under selected conditions. In another example, a specific wavelength can be the wavelength of a target or considered EM radiation frequency under specific conditions—such as passing through an EO active material at a selected voltage value (e.g., thus at a selected refractive index for that EM radiation frequency). In another example, an effective wavelength can be the in-situ wavelength of the EM radiation frequency in the EO active material, an average of certain values ​​(e.g., an average of high and low phase retardation values ​​in a given active cell, etc.), and / or one or more active cells can be configured for different λ values, or even for a specific frequency of EM radiation (e.g., depending on the current, intended, or designed optical conditions of one or more active cells). Therefore, throughout this disclosure, λ should be understood to indicate any of these uses. Those skilled in the art, benefiting from this disclosure and information generally available in conceiving a particular system and / or an aspect thereof, can readily determine which use of λ is relevant to that particular system and / or aspect thereof. Certain considerations for determining which one or more uses of λ are appropriate for a particular system or aspect thereof include, but are not limited to: the optical properties of one or more EO active materials of the system; the planned phase delay order for the system; the voltage profile and / or optical property profile of the system; system efficiency considerations including power cost, risks associated with sidelobes, and / or costs associated with undesirable heat generation in relevant parts of the system; duty cycles of operating conditions (e.g., power throughput, steering direction and magnitude and / or turn-on time); and / or steering capabilities to be supported by said system (e.g., degree of steering, number of steering axes and / or number of steering polarities).

[0073] A key parameter of beam steering is steering efficiency. As used herein, the term steering efficiency should be understood broadly. Various options and configurations throughout the description of this disclosure affect different aspects of steering efficiency, and therefore, those skilled in the art who benefit from this disclosure will understand how to determine which aspects of this disclosure are important for varied embodiments. Without limitation, steering efficiency can be understood to include energy transport considerations, cost considerations, risk considerations, and / or capability considerations. Without limitations, steering efficiency can be understood as any one or more of the following: the amount of incident energy of the EM on the beam steering device reaching the target location; the similarity of the phase profile of the EM beam steering relative to the incident EM beam and / or relative to an idealized prism upon reaching the target; the amount of energy of the incident EM beam that does not reach the target location (e.g., sidelobes and / or heating losses); the amount of energy of the incident EM beam that creates undesirable effects (e.g., concentrated sidelobes); the amount of energy of the incident EM beam as heat dissipation and / or the location of heat dissipation; the number of electro-optic (EO) layers used to achieve a given steering capability; the manufacturing cost of a particular design (e.g., materials, assembly, testing, etc.); the opportunity cost of lower system capability (e.g., steering amount, supported wavelengths, profile consistency, etc.); the capital and / or operating cost of higher system capability; and / or the risk cost of a particular steering device (e.g., due to the specific arrangement of sidelobes and / or the risk of wavelength selection that may vary, and / or the system reliability or power consumption that may put certain applications at risk).

[0074] Certain considerations for determining which beam steering efficiency factors are important for a particular application include, but are not limited to: the utilization environment of the beam steering device, including robustness to sidelobes; the EM wavelength value to be utilized; capital cost sensitivity; operating cost sensitivity; power cost and availability of the beam steering device in use; cost and availability of computing power for the beam steering device in use; cost, availability, and capability for manufacturing, including materials and assembly; similarity of mission-critical aspects for the particular application, such as aiming capability, response time, and phase profile requirements; and / or the sensitivity of the components of the beam steering device and / or the utilization environment heating and / or sidelobe energy from beam steering operation. Those skilled in the art, benefiting from the disclosure herein and the information generally available when conceiving a particular system, can readily determine which beam steering efficiency factors are important for a particular embodiment, and further determine which features throughout the systems and / or techniques described herein are relevant to those beam steering efficiency factors. Examples of certain considerations for certain systems have been set forth above, and any other considerations set forth throughout this disclosure may also be used to configure specific embodiments of this disclosure.

[0075] The terms optical light, optics, EM radiation, EM beam, light, photon beam, and other similar terms used throughout this disclosure should be broadly understood. This disclosure contemplates the redirection of any type of EM radiation depending on the application and available materials. In some embodiments, the EM radiation utilized herein contemplates optical light or light within the visible spectrum. In some embodiments, light additionally includes at least a portion of the ultraviolet spectrum and / or at least a portion of the infrared spectrum. In some embodiments, optical light and / or EM radiation includes one or more contemplated wavelengths and / or portions of the EM spectrum, and excludes portions of the EM spectrum that may otherwise be considered “optical light” outside the specific system context. It should be understood that various electromagnetic wavelengths of interest are contemplated herein, including invisible and / or wavelengths that are typically not described as optical wavelengths or “light.” Without limitation, the terms “optical” and “light” as used herein include at least infrared, visible, and ultraviolet frequencies, and in some embodiments may include frequencies of the electromagnetic spectrum outside these ranges. Those skilled in the art, benefiting from this disclosure and the information generally available in contemplating a particular system, can readily determine the EM radiation, optical light, light, and / or EM beam parameters of a system. Some considerations in determining the EM radiation, optical beam, and / or EM beam parameters of the system include, but are not limited to: the available materials for mounting the EM layer, substrate, reflective material, and / or electrodes; the transmittance and / or optical alteration properties of the materials at the frequencies of interest; the EM frequency requirements of the application (e.g., eye safety, resolution requirements, and / or available EM sources); and / or the available thickness of the mounted materials (e.g., limiting the steerable wavelength of the EM radiation, such as at longer wavelengths).

[0076] One problem affecting steering efficiency in any 2π-beam steering system is "backsweep," which refers to the spatial distance required to reduce the OPD by 2πn wavelengths (e.g., "reset," such as from approximately a multiple of one wavelength or a 2πn phase shift to near zero). Reducing the OPD from a value that results in a 2πn phase shift to zero means reducing it from approximately 2πn to approximately zero. Various embodiments and techniques exist for specifying the precise OPD level from which the reset is performed. While each of these techniques reduces the OPD by 2πn phase for the design wavelength, they do not all start precisely at an OPD equal to a 2πn phase shift, but may start at a value slightly higher or lower than 2πn and may end at a value slightly higher or lower than zero. For example, see Reference Figure 2 The phase shift curve 200 depicts the example reset section 202. An ideal reset 202 would show the phase shift curve 200 descending vertically from a phase shift profile following the ideal prism profile to a value offset by 2πn from the selected reset state (which could be a non-zero voltage value), and then asymptotically again at the ideal prism angle in the next stage. However, previously known mode 2π beam steering systems have... Figure 2The significant retracement effect described in the paper refers to the pre-reset profile deviating from the ideal prism profile before reaching the reset portion and not consistently falling back to the designed reset value before returning to the prism curve. The retracement effect leads to a loss of steering efficiency, where a portion of the incident EM beam is not steered to the desired position, and may further result in heating, sidelobes, or other undesirable effects as the energy from the incorrect steering of the EM beam dissipates in another part of the system or environment.

[0077] Some embodiments described herein utilize polarized birefringent gratings (PBGs). A PBG selectively deflects an incident beam to the left or right by a selected fixed angle, where the direction depends on the polarization of the incoming light. A PBG as used herein can refer to a birefringent grating (e.g., a sawtooth birefringent grating), but can also refer to a birefringent prism. A PBG can respond to circular / elliptical polarization or linear polarization. A PBG adjusts the deflection angle by a fixed amount and is typically capable of deflection by several degrees. PBGs that deflect larger angles (without other elements as described herein) require multiple stages, and therefore accumulate efficiency losses per stage. Furthermore, for prism-based PBGs, the thickness requirement of the birefringent prism may be sufficiently large (e.g., 8 cm thick for a 20° deflection and a 5 cm aperture at a birefringence of 0.2), which, in addition to walk-off complexity (e.g., where the deflected beam at least partially impacts the sidewalls of the optical path, deflection device, etc.), can also drive size, cost, and weight issues. Additionally, the use of multiple stages of a PBG and more than one steering direction (e.g., azimuth and elevation) may result in additional stages for polarization management (e.g., half-wave plates, etc.), leading to additional efficiency losses. A PBG is capable of steering a normal beam (e.g., the initial incident EM beam, and / or received EM radiation from the target observation position) and / or additionally steering a beam that has already been steered to some extent. Therefore, as set forth throughout this disclosure, a PBG has features that provide benefits to certain embodiments and is included in some embodiments of this disclosure for at least some steering layers. In some embodiments, the high-capacity and high-efficiency beam steering device of this disclosure does not include a PBG.

[0078] Some embodiments of this document utilize volume holograms. Volume holograms can be implemented in any material known in the art, but one example includes optical-thermal glass. A volume hologram is created using one or more reference beams, thereby providing the steering of a signal beam (e.g., an incident beam from an EM source and / or received EM radiation from an observation location) at discrete angles. The volume hologram responds to an incident EM beam at a specific angle (and / or multiple specific angles) and steering the incident EM beam received at a specific angle at discrete selected angles. Thus, the volume hologram provides a convenient discrete steering step size for the incident EM beam—for example, receiving the incident EM beam at a first angle (e.g., 2 degrees off-center) and steering it at a second angle (e.g., 5 degrees off-center in this example, or 7 degrees off-center). The volume hologram does not provide steering action for incident EM radiation that is not at one of the selected angles (e.g., a normally (perpendicular) incident EM beam). Therefore, volume holograms support embodiments where the beam incident on the volume hologram is controllably positioned at one or more selected angles, or not at selected angles, and where discrete steering angles are desired at the volume hologram levels. Volume holograms are generally efficient, exceeding 99% efficiency in the case of a single hologram written into a monolithic glass, and still approximately 98% efficiency in the case of two holograms written into a monolithic glass. Volume holograms are able to maintain high power throughput. However, limitations of volume holograms (including diffracting only light of appropriate wavelengths and incident angles, and emitting light at fixed steering angles) introduce complexity that can lead to increased losses, costs, etc. For example, steering at high angles in multiple levels, steering on two axes (e.g., elevation and azimuth), and steering in multiple directions (e.g., 40° left and right) can result in a large number of volume hologram levels to provide sufficient steering capability for the application. Each level is efficient from a diffraction perspective, but introduces scattering, reflection, and absorption losses, and many levels together can lead to significant losses. Additionally, in the case of multiple levels of volume holograms, walk-off considerations may limit some applications and / or lead to increases in size, weight, etc., for beam steering devices. Furthermore, the requirements for volume holograms with specific incident angles and the discrete steering nature of volume holograms may result in additional overhead in managing these capabilities, such as using sequential steering devices before (e.g., providing a selected incident angle for the volume hologram) and after (e.g., providing steering to the desired location) the volume hologram. Therefore, as set forth throughout this disclosure, volume holograms have features that provide benefits for certain embodiments and are included in some embodiments of this disclosure for at least some steering layers. In some embodiments, the high-capacity and high-efficiency beam steering devices of this disclosure do not include volume holograms.

[0079] For clarity of this disclosure, the embodiments herein relate to the steering of the incident EM beam. Throughout the embodiments described herein, the steering of the optical guidance path (e.g., "beam steering device," "optical steering apparatus," "optical steering mechanism," and / or other terms) from the observation area (e.g., target area, object, scan area, etc.) to the target location (e.g., photon array, sensor, camera, and / or other optical observation device) is additionally contemplated. For clarity and convenience of description, the embodiments steering the EM beam provided by the EM source.

[0080] The embodiments described herein relate to “thin” beam steering devices. Certain examples further include mode 2πn steering devices, devices with a chessboard arrangement, devices with a castle arrangement, devices with a chess pro arrangement, devices with a castle pro arrangement, and / or devices utilizing half-wave voltage profiles. Without limiting any other aspect of this disclosure, any description of these terms as set forth in U.S. PCT application PCT / US2019 / 023915 (which is incorporated herein by reference, and this disclosure claims priority thereto) is contemplated herein. The embodiments described herein may be referred to as thin beam steering devices, thin beam steering scanners, and / or other similar terms.

[0081] The embodiments described herein relate to "body" steering devices, including body steering devices having convex launch surfaces. Without limiting any other aspect of this disclosure, any description of these terms as set forth in U.S. PCT application PCT / US19 / 57616 (which is incorporated herein by reference and to which this disclosure claims priority), including at least as in Figure 33-5 3, 59-61, 64, 66-69 and 74, and those referred to in the relevant descriptions.

[0082] Without limiting any other aspect of this disclosure, example thin beam steering devices include alternating resistor-electrode embodiments, such as utilizing alternating resistors and electrodes on the high-side layer of the electrodes. The alternating resistor-electrode embodiments provide a linearized phase delay order across the width of the beam steering device (e.g., perpendicular to the incident EM beam), thereby improving steering efficiency, faithfully reconstructing the wavefront after steering operations, and reducing the loss of steering energy to undesirable locations (e.g., beam energy steering to an unintended location, and / or impacts to the sidewalls or components of the steering device that could cause heating or other undesirable interactions).

[0083] The embodiments herein refer to the terms “fishtail enhancer,” “meniscus lens,” and / or similar terms. Without limiting any other aspect of this disclosure, any description as set forth in U.S. PCT application PCT / US19 / 57616 is contemplated herein, including those represented in at least Figures 62-63 and the related descriptions.

[0084] Figure 1 The example depicts an idealized modulo 2πn system without a backflush effect, while... Figure 2 The examples depict previously known modulo 2πn systems with a nominal flyback effect. Various features throughout this disclosure have been found to significantly reduce the flyback effect, including but not limited to the use of insulators, adjacent phase delays of several orders (e.g., reference...). Figure 12 and Figure 18 The vertical spatial change between the components, the enhanced insulation at the reset position, and / or the control or modulation of the electrodes. In some embodiments, the systems and / or methods for performing mode 2πn beam steering described throughout this disclosure can be approximated. Figure 1 The unfolded phase profile 104 is depicted in the figure.

[0085] Figure 6 This is an example depiction of a true phase profile 602, which, based on modeling and calculations, is believed to be achievable using various aspects of this disclosure. Figure 6 The example utilizes conductive electrodes. Figure 6 The representation is non-restrictive: some systems can have more than Figure 6 The less ideal phase profile 602 depicted in the diagram still achieves some of the benefits of this disclosure, and some systems can have a more desirable phase profile than... Figure 6 The more ideal phase profile 602 described herein is achieved, for example, by combining aspects of the present disclosure, utilizing more powerful materials, thinner electrode configurations, controllable electrodes, tilted or wavy electrodes, and / or by increasing the number of steps in one or more of the phase delay stages.

[0086] Figure 8 This is an example depiction of a true phase profile 802, which, based on modeling and calculations, is believed to be achievable using various aspects of this disclosure. Figure 8 The example utilizes resistive electrodes. Figure 8 The representation is non-restrictive: some systems can have more than Figure 8 The less-than-ideal phase profile 802 depicted in the diagram still achieves some of the benefits of this disclosure, and some systems can have a more... Figure 8The more ideal phase profile 802 depicted herein may be achieved, for example, by combining aspects of this disclosure, utilizing more powerful materials, thinner electrode configurations, controllable electrodes, tilted or wavy electrodes, and / or by increasing the number of steps in one or more of the phase delay stages.

[0087] This document discloses exemplary mode 2πn active material beam steering methods, wherein the thickness of the mode 2πn active material ranges from submicron to tens or even hundreds of micrometers. Some of the taught exemplary mode 2πn active material beam steering methods use resetting to limit the thickness of the active layer. One exemplary embodiment utilizes an active monolayer with a thin insulator between electrodes passing through the active material. Certain features described herein, such as the use of insulators, optically active materials, and / or substrates that are transparent to incoming light and / or configured to have a corresponding refractive index (such as a similar refractive index), improve efficiency throughput. The insulator between the electrodes may or may not run through the active layer. In some embodiments, the insulator may be opaque to incoming light.

[0088] As used herein, the term "transparent" should be interpreted broadly and includes at least materials that allow electromagnetic radiation of a selected wavelength to pass through to a selected degree, substantially completely, above a threshold level, and / or sufficiently to perform the underlying task. Those skilled in the art who benefit from this disclosure will understand that a transparent amount of transmission, for example, is sufficient to perform the underlying task. Without limitation, certain considerations for determining the amount of transparent transmission include: the cost and availability of manufacturing materials; the cost of assembling a given device; the utilization of the device, including the required resolution, detection threshold, and the like; the criticality of the device relative to the system or application of the device; the thermal constraints and / or considerations of the device; and / or the availability of processing resources to enhance the device's capabilities while reducing electromagnetic radiation transmission through the transparent components of the device. A level of transmission that is transparent to one embodiment in the entire context of a particular device or system may be considered opaque in the entire context of another device or system—for example, the same insulating component that is transparent to one device may be reflective or opaque in the context of another device.

[0089] In some embodiments, materials throughout this disclosure are described as having close optical values ​​or properties (and / or similar optical values ​​or properties), such as birefringence and / or refractive index. The close optical values ​​depend on the specific system. In some embodiments, optical values ​​that provide sufficient light transmission through them without interfering with the EM beam such that target steering capability and / or steering efficiency can be satisfied are within the range of close optical values ​​as understood herein. In some embodiments, the EO active material has varying optical properties, while the insulator, substrate, and / or electrode materials have constant (or unintentionally varying) optical properties, and thus the static optical properties match (“close”) the varying optical properties. In some embodiments, the static optical values ​​are selected as values ​​between a range of varying optical properties. In some embodiments, the static optical values ​​are selected as values ​​near a more significant portion of the range of varying optical properties, such as close to a non-steering value, close to a maximum steering value, and / or close to a frequently occurring steering value. In some embodiments, the static optical values ​​may be outside the range of varying optical properties, but still close to varying optical properties as contemplated herein. In some embodiments, materials may be considered to have near or similar optical properties at the EM frequency of interest, even if they do not have near or similar optical properties at frequencies far from the EM frequency of interest. In some embodiments, as described throughout this disclosure, antireflective materials may be utilized, in addition to or as an alternative to materials having near-matching optical properties. Examples and non-limiting ranges of materials having near-matching optical properties include: the same material (e.g., although one may consider the applied variant as an EO material), and / or materials having selected optical properties at a selected wavelength or wavelength range (e.g., a refractive index of 9.4 μm) within a specified range (e.g., sufficient to support a steering efficiency target) under specified conditions (e.g., during a selected steering operation). Those skilled in the art, benefiting from this disclosure and the information generally available when conceiving a particular system, can readily determine materials having near-matching optical properties for that system. Certain considerations for determining whether a material has near-optical properties include, but are not limited to: the cost and availability of suitable materials (including material cost and / or assembly considerations); the frequency(s) of interest of the EM beam(s) to be steered; the target steer efficiency value; the target steer capability; the duty cycle of the steer for the application (e.g., the range of expected steer values, and / or the time or power throughput at each steer value); and / or the availability of system mitigation techniques to compensate for optical differences (e.g., electrode configurations for restoring steer efficiency, the number of layers of active elements, the thickness of active and inactive elements, and / or the use of “chessboard,” “castle,” or other configurations).

[0090] One design consideration is the thinness of the insulator between the active materials. Thicker insulators typically provide improved isolation between phase delay stages and reduce retracement at reset positions. Thinner insulators typically provide enhanced active fill. Depending on the materials used for the active materials, insulators, and substrate, thinner or thicker insulators can increase the overall cost of the beam steering device, including the impact on material costs and / or assembly costs.

[0091] In some embodiments, the ground (or low-side) electrode may be continuous (e.g., refer to...). Figure 9 , Figure 10 or Figure 12 The electrodes can be reflective or transparent to incoming light. In some embodiments, the heating electrodes (or high-side electrodes) are discrete. In some embodiments, the heating electrodes are transparent to incoming light. Alternatively or additionally, one or more discrete electrodes may be embedded with or behind a reflective layer. In some embodiments, the discrete electrodes are conductive.

[0092] Example second embodiment includes resistive discrete electrodes. Some embodiments reduce diffuse field effects. Embodiments with conductive electrodes (at least without further modifications as described herein) will typically suffer from quantization loss. In some embodiments, quantization loss can be reduced or eliminated by utilizing tilted and / or contoured electrodes, with or without resistive electrodes. In some embodiments, resistive electrodes can reduce or eliminate quantization loss. In some embodiments, the combination of tilted and / or contoured electrodes with conductive and / or resistive electrodes can be used to support the reduction or elimination of quantization loss, other system losses such as electrical losses, and / or support various assembly techniques. In example embodiments with resistive electrodes, two voltages are applied to the resistive electrodes, resulting in a tilted (or asymptotic) electric field and a tilted (or asymptotic) exponential change. Example embodiments with resistive electrodes reduce quantization loss, for example, by implementing a phase delay series 102 with fewer electrodes or even a single electrode. In some embodiments, two or more voltages are applied across the electrodes at selected locations (e.g., using solid-state devices with various locations electrically coupled to the electrodes). The use of multiple voltages can achieve nonlinear voltage slopes, for example, to achieve linear OPD changes across EO materials or in response to nonlinear electrode resistivity profiles.

[0093] Another example embodiment includes at least two optically active rows 630 inserted between two substrates 600, 605, such as Figure 12 As shown. Figure 12Examples utilize two layers or multiples thereof, alternating between transparent insulators and transparent active layers, thereby providing a 100% fill factor (or arbitrarily close to 100%, if desired) for active electro-optic (EO) materials capable of inducing OPD changes in radiation. This can be achieved using... Figure 12 Examples or similar arrangements to avoid such Figure 6 Or the profile gap in the unfolded phase profile depicted in 8, which contributes to the steering efficiency loss (e.g., by having an increased active layer fill factor). Figure 13 The examples depict multiples of two layers, although any number of layers can be used. It should be understood that in cases where the incident EM beam has portions intersecting with different numbers of layers (e.g., embodiments with an odd number of active layers with alternating units, where the first portion intersects with two active layers and the second portion intersects with three active layers), the OPD in one or more layers can be manipulated (e.g., using varying voltage and / or electrode configurations) to ensure that all redirected portions of the incident EM beam are redirected to the same degree. Figure 12 Examples can utilize conductive electrodes or resistive electrodes. Figure 12 The example reduces the loss caused by diffuse fields.

[0094] Another example embodiment includes resistive electrodes and two or more voltages (and / or voltage levels) on one side to reduce or eliminate quantization loss. This other example embodiment includes an effective 100% fill factor, negligible diffuse field loss, and negligible quantization loss. For example, refer to... Figure 12 and 13 Resistive electrodes can be used to reduce or eliminate quantization loss in active cells. Figure 13 The example shows four device layers, but in some embodiments, more device layers may be used.

[0095] Figure 7The example illustrates a tilted electrode 50. By creating a voltage variation across the active cell, the tilted electrode 50 can have effects similar to a resistive electrode. In some embodiments, the tilted electrode 50 may be more difficult to assemble, and the tilt amount of the tilted electrode 50 may be non-adjustable during operation. However, in some embodiments, constructing the tilted electrode 50 can provide field variation, which more reliably implements design changes than resistive electrode embodiments, and / or provides improved operation when wear and aging affect the resistance profile of the electrode. Additionally or alternatively, the example embodiments include adjustments to the tilted electrode 50, such as providing more than one tilted electrode 50 for each active cell, wherein the selection of the active electrode in the tilted electrode 50 provides runtime adjustment of the electric field. The tilted electrode 50 is depicted as linearly tilted, but the asymmetry of the electrode and the spacing between the high-side and low-side electrodes can be of any shape, for example, to account for the nonlinear EO active material response and / or nonlinear resistance in the electrode. In some embodiments, a given active cell may include a tilted electrode 50 and / or a resistive electrode. In some embodiments, the first active unit may have a first tilted electrode 50 and / or a resistive electrode configuration, and the second active unit may have a second tilted electrode 50 and / or a resistive electrode configuration. In some embodiments, the tilted electrode 50 can generate a... Figure 8 The similar phase profile 802 depicted in the figure.

[0096] Figure 7 The example depicts a tilted electrode 50 passing through the EO active material 10 along a selected trajectory. It will be understood that the tilted electrode 50 may be on a first side of the EO active material 10, for example, having shaped active units, rather than having the tilted electrode 50 passing through the EO active material 10. Figure 7 The example depicts an insulator 20 between active cells in a reset position, which can be configured to run through any insulator described herein, including fully partitioned active cells, partially partitioned active cells, and / or an insulator 20 that is part of a substrate. Figure 7 (Not shown in the image). Figure 7 The example depicts a common ground electrode 40, although any ground electrode configuration described throughout this disclosure can be used in conjunction with a tilted electrode 50.

[0097] Another example embodiment includes at least two optically active rows separated by a continuous ground electrode, such as with Figure 14 The description of the two optically active rows is consistent with, and is consistent with Figure 15 The description of more than two optically active rows is consistent. Example embodiments include each active layer having an array of active cells. In the example, the active cells are EO active materials located between continuous ground electrodes and discrete electrodes, and insulator cells are located between every two active cells.

[0098] refer to Figure 11 The EO active layer 3 is located between a row of discrete low-side electrodes 4 and a corresponding row of discrete high-side electrodes 2, and is located within the substrate 1. Figure 11 The example utilizes EO active material as an insulating gap between active units and substrate 1 as an insulating gap between high-side electrodes, wherein the active unit is the portion of EO active layer 3 between electrode pairs 4 and 2. It can be seen that... Figure 11 While the embodiments are not necessarily depicted to scale, they may have relatively low activity fill factors, where a significant portion of the incident EM beam does not penetrate the active element. In some embodiments, such as Figure 11 The steering efficiency loss in the embodiments depicted is still acceptable. In some embodiments, such as Figure 11 The embodiments described herein may additionally include another switching layer having an EO active material, a high-side electrode, and a low-side electrode (which may be shared with different switching layers). Figure 11 The high-side electrode 2 can be conductive or resistive. In some embodiments, such as Figure 11 The configuration described is insufficient to provide EM beam steering with acceptable steering efficiency for certain applications.

[0099] refer to Figure 12 The example beam steering device includes multiple active units 630, each active unit being located between discrete high-side electrodes 660 and low-side electrodes 650, 670. Figure 12 In the example, the low-side electrodes 650 and 670 are common ground electrodes, and each active layer 610 and 620 has one common ground electrode 650 and 670. Figure 12 In the example, an upper substrate 600 and a lower substrate 605 are provided, which can structurally define a beam steering device. In some embodiments, one of the substrates 600, 605 may be reflective and / or include a reflective layer. In some embodiments, a ground electrode 670 may be reflective and / or include a reflective layer. The example beam steering device further includes a plurality of insulators 640 located between each adjacent active cell 630. The insulators 640 may be a transparent material and / or may have optical properties approximating those of the active cells 630. In some embodiments, the insulators 640 may be air. In some embodiments, the active cells 630 are arranged to apply a progressive phase delay to the incident EM beam, for example within the cell 630 (e.g., by using resistive electrodes or other means to apply a voltage gradient across the cell), and / or across several active cells 630, wherein the active cells 630 form a phase delay order. It can be seen that the phase delay series can start from the active unit 630 in the first active layer 610 and continue to the active unit 630 in the second active layer 620. Figure 12In the examples, the reset can occur at each active cell 630 (e.g., the next cell resets the phase delay by 2πn), or between adjacent cells 630 at the boundary of several active cells 630 forming a series of phase delay levels. In some embodiments, the geometry of the active cells 630 creating the distance between the high-side electrodes 660 and the insulator 640 of the beam steering device both cooperate to provide a sharp reset, which greatly reduces the retrace effect and subsequent steering efficiency loss.

[0100] refer to Figure 13 An example beam steering device having multiple active layers 680, 685, 690, 695 is described. Each active layer 680, 685, 690, 695 includes an active unit 740, which includes EO active material located between discrete high-side electrodes 760 and low-side electrodes. Figure 13 In the example, the low-side electrode 730 is a common ground electrode, providing a common ground electrode for each active layer 680, 685, 690, 695. The example beam steering device further includes substrates 710, 720 and an insulator 750. Figure 13 The example beam steering device depicts multiple stacked active layers 680, 685, 690, 695, thereby allowing the device to have greater steering capability and / or greater steering efficiency.

[0101] refer to Figure 14 An example beam steering device with two active layers 770, 775 is depicted. Each active layer 770, 775 includes an active unit 790, which includes EO active material located between discrete high-side electrode 810 and low-side electrode. Figure 14 In the example, the low-side electrode 1402 is a common ground electrode, wherein the two active layers 770, 775 share the common ground electrode. The example beam steering device includes a first substrate 805 on the incident side of the beam steering device and a reflective layer 820 on the opposite side of the beam steering device. The use of the reflective layer 820 provides additional steering capability, substantially doubling the effective steering capability of the active layers 770, 775.

[0102] refer to Figure 15 An example beam steering device with four active layers 830, 840, 850, and 860 is depicted. Each active layer 830, 840, 850, and 860 includes an active unit 790, which includes EO active material located between discrete high-side electrodes 810 and low-side electrodes. Figure 15In the example, the low-side electrodes 1502 and 1504 are common ground electrodes, wherein the two active layers (830, 840 and 850, 860, respectively) each share a common ground electrode. The example beam steering device includes a first substrate 870 on the incident side of the beam steering device and a reflective layer 890 on a second substrate 875 on the opposite side of the beam steering device.

[0103] Another example embodiment includes at least two optically active rows (or active layers) separated by consecutive ground electrodes, having high-resistivity side electrodes and two or more voltages (and / or voltage gradients) provided across the active cells. Certain embodiments having at least two optically active rows separated by consecutive ground electrodes have an effective fill factor of 100% (e.g., the amount of incident EM beam directed into the active cells in at least one active layer), and / or any effective fill factor close to 100%, including greater than 90%, greater than 95%, greater than 97%, or greater than 99%. In some embodiments, there is negligible diffusion field loss and / or negligible quantization loss. In some embodiments, there is an even number of active rows, each active row comprising an array of active cells, with insulator cells located between every two active cells. Additionally or alternatively, those skilled in the art who benefit from this disclosure will understand that an odd number of rows may exist in some embodiments. Example embodiments include the positions of opposing active cells and insulator cells in adjacent rows. In some embodiments, the size and position of each active cell are selected in response to the size of the corresponding insulator cell in the next row—e.g., designed to be the same size and aligned. In some embodiments, the active units within a layer and / or the active units in different layers may vary in size and / or thickness.

[0104] In some embodiments, the active element, the thickness of the active element, the electrodes, and the applied voltage are configured such that the incident EM beam of the selected wavelength (or frequency) experiences the same or sufficiently similar (e.g., consistent with the design steering efficiency of the beam steering device) phase delay order across the region of the EM beam, such that the EM beam is steering to the desired degree with the selected steering efficiency. In some embodiments, the active element, the thickness of the active element, the electrodes, and the applied voltage are configured such that the steering portion of the EM beam (e.g., the portion not lost due to an effective fill factor of less than 100%) experiences the same or sufficiently similar (e.g., consistent with the design steering efficiency of the beam steering device) phase delay order across the region of the EM beam. In some embodiments, the active element, the thickness of the active element, the electrodes, and the applied voltage are configured such that the incident EM beam of one of a plurality of selected wavelengths (or frequencies) and / or the steering portion of such incident EM beam experiences the same or sufficiently similar (e.g., consistent with the design steering efficiency of the beam steering device) phase delay order at each selected frequency. For example, but not limited to, an example beam steering device includes one or more active layers configured to steering a first selected frequency and transparent (or sufficiently transparent) to other selected frequencies, and further includes one or more other active layers configured to steering a second selected frequency and transparent (or sufficiently transparent) to the first selected frequency. In some embodiments, the active layers may be configured to steering more than one frequency, for example, when the steered frequency is a multiple of the same wavelength, such as when the thickness of the active element is the same as that of a higher wavelength and is, for example, twice the thickness of a lower wavelength.

[0105] In some embodiments throughout this disclosure, active units in adjacent layers are offset from each other in an alternating pattern (e.g., see reference). Figure 12-15 For the purposes of this disclosure, such an arrangement may be referred to as a chess scanner or a chess pattern. Certain embodiments of the chess pattern arrangement with resistively discrete high-side electrodes may be referred to as a chess scanner Pro (or a chess pattern Pro). Figures 12 to 15 The embodiments depict two active layers cooperating to provide an active filling area for the beam steering device in a chess pattern; however, it will be understood that three or more layers and / or randomized or pseudo-randomized layers may be arranged to provide an effective filling area for the beam steering device. The terminology of the chess scanner or chess scanner Pro embodiments is used for convenience and clarity of description herein. It will be understood that in some embodiments, the size, alignment, and / or arrangement of the cells may vary such that the arrangement of the active and insulator cells does not resemble a chessboard. Without limitation, variations in size, alignment, and / or arrangement may include incomplete coverage of the optical area of ​​the cells, tilted, curved, or other non-perpendicular cell arrangements, and / or cells with non-square shapes and / or varying shapes and sizes.

[0106] In some embodiments, the substrate, active material, and / or insulator are transparent to the incoming light waves to be deflected by the scanner, and / or have similar refractive indices between the two materials. It will be understood that similarity in transparency and / or refractive index can improve the throughput of the device. In some embodiments, the material can be opaque, transparent at a selected wavelength, etc. Example embodiments include an optional added reflective layer, which may be the last layer of the scanner (and / or the last optical active layer of the scanner). The reflective layer may be the last layer, and / or may be after the transparent last layer of the beam-directing device. In some embodiments, the continuous ground electrode in some embodiments and / or the last ground electrode in some embodiments may be reflective. Including a reflective layer allows light waves to pass through the scanner a second time, effectively doubling the thickness of the active layer and increasing the deflection capability and / or deflection efficiency.

[0107] Each optically active row comprises a series of units made of electro-optically active materials, such as EO crystals (which may be KTN, PMN-PT, BaTiO3, SBN, or some other crystalline material), quantum dot materials, liquid crystals, and / or any other optically active materials. In some embodiments, different layers and / or different units within a layer may comprise different materials from other layers or units in the device. Each material, whose refractive index can be dynamically changed, is sandwiched between two electrode layers. One layer may be grounded, and another layer may be subjected to a voltage other than ground. Alternatively, both layers may be subjected to a voltage other than zero. In some embodiments, it may be advantageous to use more than one type of active material.

[0108] Example electrodes are transparent to the incoming wave and can be conductive using only one applied voltage, or resistive using two or more applied voltages, creating a linear or non-linear voltage ramp between the locations where two voltages are applied. The resistive layer will provide varying voltages, from the lowest voltage applied to the electrode to the highest voltage. In some embodiments, portions of the high-side electrode can be resistive, while other portions can be conductive. In some embodiments, the resistance of the high-side electrode can be controllable—for example, utilizing multiple resistive elements provided across the high-side electrode, where a controller can configure the resistive arrangement during operation of the beam steering device. In other examples, solid-state switches, Zener diodes, operational amplifiers, and / or other solid-state devices can be used to provide appropriate control over the resistance of the high-side electrode, with response times configured to meet the functionality of the beam steering device.

[0109] In some embodiments, the electrodes are made of a transparent conductive material, such as indium tin oxide or an indium tin alloy. If a reflective layer is used on one side, that side can be made of a conductor that is opaque to light radiation. The conductivity level can be any of a variety of levels. The ground (or low-side) electrode can be continuous or discrete, but the high-side electrode to which the spatially varying voltage is applied is discrete and / or separated by insulating units and / or geometrical spacing that provides insulation. In some embodiments, the insulating units are made of the same material as the substrate, or of some other material having a similar refractive index to the substrate. Alternatively, the insulating material can be air.

[0110] In some embodiments, the substrate, active material, and / or insulator have similar optical properties in their refractive indices, and / or anti-reflective coatings can be used where material discontinuities occur. Utilizing similar optical properties in the materials can improve the throughput of the beam steering device. Using anti-reflective coatings can improve steering efficiency. In some embodiments, insulator units are located between each optical active unit. In one embodiment, the arrangement of the EO units and insulators is reversed in each row. In some embodiments, active units whose refractive indices can be electronically modified have the same size as the corresponding insulator in the next row. Alternatively, multiple active units can be used such that the sum of the unit widths is the same as the width of the insulator. In some embodiments, the insulator and substrate are made of the same material, such as SrTiO3 or infrared glass, to separate the electrodes not only at different voltages but also to transmit incoming EM waves. Alternatively, one or more or all of the insulators can be air. In some embodiments, the upper or lower transparent insulators and active regions are the same size, and the next pair of insulator / active region materials are different in size.

[0111] To improve throughput, the refractive indices of the substrate, active, and insulator units should be similar, and / or an anti-reflective coating can be used at any edges where material discontinuities occur to improve beam steering efficiency. An ideal beam steering device will redirect 100% of the incident light. In one embodiment, high-efficiency beam steering can redirect >90% of the light incident on the device at a steering angle. Various beam steering applications can utilize different levels of steering efficiency. In one embodiment, the light wave can be in the visible to long-wave infrared range. In one embodiment, the surface profile of the substrate, insulator, and electrodes should be at least 1 / 50th of the incident wave wavelength; in UV, optical, or infrared embodiments, the incident wave wavelength can be from 0.25 to 12 micrometers. In some embodiments, the optical active unit provides a phase delay of at least approximately one wavelength and therefore has a depth or layer thickness of at least one wavelength divided by the rate of change of refractive index. In some embodiments, a beam steering device with a reflective layer includes an optical active unit that provides a phase delay of at least approximately half a wavelength and therefore has a depth or layer thickness of at least half a wavelength divided by the rate of change of refractive index. In some embodiments, the thickness of the optical active cells is progressively increased with the phase transition delay, and / or may further include features that ensure steering in a single direction across the active cell array (e.g., through mechanical control of the array orientation, and / or, where such control is possible, control of the incident EM beam). The width of each active cell can be selected to adjust the scanner's deflection angle, and further depends on the phase delay order scheme of the particular beam steering device.

[0112] In one embodiment, if the scanner is designed to deflect light at an angle of up to 30 degrees using light with a wavelength of 1.5 micrometers, then the width of each EO unit (or active unit) will be 3 micrometers or less. If the EO units have varying sizes, then the largest unit will have a width of 3 micrometers. In this example, the size of the insulator unit between every two EO units is the same as the corresponding active unit in the next row.

[0113] One example includes a second optically active row in the scanner, similar to the first row except that the active and insulator units are reversed. The alignment of the electrodes and insulators in both rows is crucial for providing optimal phase delay for the entire incoming wave. After the incoming light wave or photon wave passes through both layers, the complete wave will have undergone phase delay, resulting in a discrete phase shift based on the total shift of the two layers. Layer 1 will shift the light wave or photon wave in its active region, and then, with Layer 1 having an insulator, Layer 2 will shift the wave in its active region, and this shift will continue across the beam-directing device in this manner.

[0114] Those active refractive index changing layers that use resistors instead of conductors can vary the voltage across the active cells in a way that matches the waveform tilt caused by applying a series of discrete refractive index changing steps. In this way, as explained in references 1 and 2, quantization loss can be reduced or eliminated, and an approximately one-wavelength OPD can be provided within a single resistive electrode width to deflect incoming light to the maximum angle.

[0115] In one embodiment, each electrode layer may have thousands of discrete electrodes in a row, and each phase reset may contain one or more electrodes. Larger deflection angles require fewer electrodes of a specific width between resets because the space period between resets is smaller. In the case of resistive electrodes, the reset period can be as small as the width of a resistive electrode. In the case of conductive electrodes, for one embodiment, the reset period may include a discrete number of conductive electrodes for the largest angle, and more electrodes for smaller angles. As explained in Reference 1, an eight-cell configuration will limit the loss due to quantization to 5%. Depending on the desired steering efficiency, some embodiments may have a configuration of as few as three cells, although any number of cells may be provided before each reset period, including six, eight, ten, fifteen, or twenty cells. Since the modulation of light waves or photon waves by the optically active cells is cumulative, an optional reflective layer may be added as the last layer of the scanner to provide a larger deflection angle or a smaller cell thickness by causing the light waves or photon waves to pass through the phase delay region a second time.

[0116] One example embodiment includes a scanner made of at least two optically active layers inserted between two substrates. Each optically active row contains an array of cells whose refractive index can be varied under one or both polarizations, such as liquid crystals, quantum dots, or EO crystals such as SBN, PMN-PT, KTN, and / or BaTiO3. One example embodiment includes each active cell sandwiched between conductive or resistive electrodes. In the example embodiment, an insulator cell exists between each optically active cell in each row, and the arrangement of the optically active cells and insulator cells is reversed in each row. In one embodiment, any corresponding cells in different rows have the same width, so for each pair of active layer / insulator segments, light experiences an OPD associated with one active layer. The corresponding cells are aligned, so in one cell pair, one layer provides OPD corresponding to a given phase shift for a given wavelength, and in a second cell pair, a second layer provides OPD or a phase shift.

[0117] In some embodiments, the insulator unit and substrate are made of materials with the same or similar refractive indices and are transparent (or sufficiently transparent) to the incoming light waves. In one embodiment, all layers of the scanner are planarized to a surface flatness of one-fifteenth (1 / 15) of the incident EM wavelength or better. It is advantageous that the refractive indices of the substrate, active material, and insulator unit are similar, or that an anti-reflective coating is applied at each discontinuity between materials to increase steering efficiency. Transmission optics or photon beam scanners can be made reflective if the last electrode is reflective, or if a reflective layer is coated on a substrate. In some embodiments, for example, where accurate optical quality for steering the EM beam is not required for a particular application, the insulator unit, substrate, and / or active unit may have dissimilar or significantly different optical properties.

[0118] In another embodiment of this disclosure, the scanner may consist of two or any even number of optically active rows. In an example embodiment, every two optically active rows are inserted between two substrates, and / or multiple optically active rows are defined by two substrate layers at opposite ends of the beam steering device. Each pair of rows is separated from each other by a common, continuous transparent ground electrode. Each row includes an array of optically active cells sandwiched between two conductive or resistive electrodes, and insulator cells are located between adjacent EO cells. In an example embodiment, the arrangement of the EO cells and insulators is reversed in each row, and the size of the active cells in each row will be the same as the size of the corresponding insulator cells in the next row.

[0119] In some embodiments, the insulator unit and the substrate are made of materials with the same refractive index and are transparent to incoming light waves or photon waves, such as IR glass or SrTiO3. The EO unit is made of any material whose refractive index can be electronically altered under one or both polarizations, such as liquid crystal, quantum dots, or EO crystals, such as SBN, PMN-PT, KTN, BaTiO3. In some embodiments, the scanner layers are planarized to a selected surface flatness to achieve the desired optical quality and / or steering efficiency. Example and non-limiting surface flatness values ​​include one-tenth, one-twentieth, one-fortieth, and / or one-fiftieth or better of the target wavelength. The refractive indices of the substrate, active, and insulator units are close; otherwise, an anti-reflective coating may be required at each edge where material discontinuities occur. If a reflective layer is coated on a substrate and / or a common ground electrode, the flexible transmission optics or photon wave scanner can be implemented as reflective.

[0120] A method for determining the value from which to subtract the OPD (e.g., for resetting) is given in “Speeding up liquid crystal SLMs using overdrive with phase change reduction” by Gregor Thalhammer, Richard W. Bowman, Gordon D. Love, Miles J. Padgett, and Monika Ritsch-Marte (28 January 2013 / Vol. 21, No. 2 / OPTICS EXPRESS p 1779-1797). Thalhammer’s paper is incorporated herein by reference in its entirety for various purposes. Fine-tuned angular beam steering can also result in a value from which the resetting is not exactly the increment of the 2πn phase shift. Burrell R. Hatcher's article "Granularity of beam positions in digital phased arrays" (Proceedings of the IEEE (Volume: 56, Issue: 11, Nov. 1968) teaches the use of phased arrays for very fine angular steering, but begins by subtracting a multiple of the OPD wavelength from a value that is not an integer multiple of the OPD wavelength or 2πn of the phase. Hatcher's article—hereinafter referred to as "Reference 5"—is incorporated herein by reference in its entirety for all purposes. The flyback effect is a consequence of the device's inability to instantaneously change its voltage profile between two sets of electrodes, which in Figure 2 As shown in the image. Figure 2 The retrace region in the text refers to the region where the OPD or phase decreases with increasing distance.

[0121] Many modulus 2π-straightening embodiments (such as liquid crystals or electro-optic crystals) create a polarization-dependent refractive index change due to the application of an electric field or E-field within the device, such as... Figure 11As shown in the diagram. Other materials (such as quantum dots) can change their refractive index under two polarizations when a voltage is applied. By applying a voltage to those electrodes, an external electric field is applied to the medium. The external electric field manipulates the refractive index of the medium under one or more polarizations. The medium must be transparent (or sufficiently transparent) to the incoming light and can be a liquid crystal, electro-optic crystal, quantum dot material, or any other material whose refractive index can be manipulated by applying an external electric field. Monochromatic light can be deflected if a sawtooth phase profile is provided. The inability to precisely control those electric fields due to diffusion effects results in a similar inability to rapidly change the phase shift and to create abrupt changes in refractive index and OPD, thus hindering rapid changes in OPD. The retrace region reduces the fill factor of the grating, where the fill factor is defined as the percentage of the beam that is deflected in the desired direction.

[0122] The diffuse field is the main reason why the retrace region is greater than zero. For liquid crystals, there may also be situations where the liquid crystal cannot change its orientation quickly, but the diffuse field usually has a more restrictive effect. Figure 2 This illustrates that the beam deflects in the wrong direction during the retrace portion of the phase profile. The following equation gives the efficiency due to the retrace effect: Equation 1. .

[0123] In Equation 1, η is the efficiency, and Λ F Λ is the width of the retrace region, and Λ is the width between resets. Equation 1 is taken from PF McManamon, TA Dorschner, DC Corkum, LJ Friedman, DS Hobbs, MKO Holz, S. Liberman, H. Nguyen, DP Resler, RC Sharp, and EA Watson, “Optical Phased Array Technology” (Proc. IEEE 84(2), 268-298, 1996). McManamon’s reference “Optical Phased Array Technology”—hereinafter referred to as “Reference 4”—is incorporated herein by reference in its entirety. This is the steering efficiency of the diffuse field constraint.

[0124] The following equation provides a comparison of sweepback distance with steering efficiency, since steering efficiency is limited by sweepback distance. Equation 2. .

[0125] Figure 2This demonstrates how a diffuse field makes it impossible to apply an electric field that results in a wide resetting distance, even with a single electrode or less, in conventional thin-film steering devices, while using small electrodes and utilizing commercially available materials with normal refractive index changes to steering large angles. Empirically, the narrowest width of the resetting distance is approximately the thickness of the device layer between the electrode and the ground plane, as discussed in X. Wang, B. Wang, PF McManamon, JJ Pouch, FA Miranda, JE Anderson, PJ Bos, “Spatial resolution limitation of liquid crystal spatial lightmodulator” (Liquid Crystal Conference, Great Lakes Photonics Symposium, Cleveland, OH June 7-11, 2004). Wang’s reference “Spatial resolution limitation…” is incorporated herein by reference in its entirety.

[0126] The diffuse field has a significant limiting effect on currently known mode 2π beam steering devices. For transmission beam steering, the element must be at least approximately one wavelength of OPD or as thick as required to generate a 2π phase. A birefringence of 0.3 means that the element must be approximately 3.3 times the thickness of one wavelength. Table 1 shows the diffuse field effect on steering efficiency with a refractive index change of 0.35 using transmission beam steering. For electro-optically active materials with refractive index changes below 0.35, the steering efficiency values ​​will be lower than those depicted in Table 1.

[0127] Table 1. Efficiency comparison of angles limited by dispersion field effects for previously known mode 2π beam steering devices. .

[0128] Table 1 shows that for previously known mode 2π beam steering, efficiency drops rapidly at significant steering angles. If high efficiency is desired, the steering angle used in previously known mode 2π beam steering devices must be limited to very small angles. The loss of diffuse field efficiency occurs in each steering event—for example, if a 1-degree steering is performed in both the azimuth and elevation directions, the achieved efficiency would be (.905)^2, or approximately 82% of the final efficiency. An example mode 2π beam steering device conforming to this disclosure utilizes reflected beam steering, where light enters the device, is ejected from the reflecting surface, and returns. As a result, the thickness of the active device layer is halved, and the width of the retrace zone is halved, thereby increasing steering efficiency.

[0129] In some embodiments, nonmechanical beam steering of an optical phased array (OPA) includes the ability to point very precisely to a spot size smaller than 1 / 100th of the diffraction-limited angle. This ability to steering at a desired angle is crucial for many applications, including high-energy applications and / or operations performed in sensitive regions. Mode 2π beam steering using OPA technology can achieve very precise steering, as explained, for example, in Reference 5.

[0130] Another factor is the turning efficiency due to quantization, which is described in the following equation from reference 3: Equation 3. .

[0131] In Equation 3, η is the steering efficiency, and q is the number of steps per 2π phase shift stage of the steering device. Therefore, eight (8) steps result in 95% steering efficiency from quantization, and ten (10) steps result in 96.8%. Any quantization loss is an additional loss compared to the loss from the diffuse field. The actual losses due to quantization of some selected step values ​​will be shown in Table 2.

[0132] Table 2, Quantified Loss Steps efficiency 2 41% 3 68% 5 88% 6 91% 8 95% 10 96.8% 12 97.7% 16 98.7% 20 99.2% .

[0133] Another background issue is the effect of magnification. When magnified, a small beam passing through its beam deflector will reduce the steering angle, as shown in the following equation: Equation 4. .

[0134] In equation 4, It is the final steering angle, and M is the magnification factor. This is the initial steering angle. For example, a 5mm wide beam passing through a crystal and being magnified to a 100mm wide beam requires a magnification factor of 20. Therefore, for this example where the beam is magnified 20 times, a 10-degree steering angle is reduced to half a degree.

[0135] refer to Figure 3 This describes a previously known volume beam steering device to illustrate certain differences from the various systems and methods described in this disclosure. In volume beam steering, light passes through an EO crystal and is deflected. In current practice, incident light with linear polarization in the correct direction is deflected by applying an electric field, and the deflection angle is varied. The deflection angle of a conventional volume beam deflector is calculated as follows: Equation 5. .

[0136] In equation 5, It's the deflection angle. The change in refractive index is caused by the applied voltage, and L and W are the length and width of the rectangular beam deflector.

[0137] Previously known volume beam steering devices suffer from several drawbacks. For example, when the beam is larger than the crystal, the beam is focused into the crystal and then spread. This requires a large amplification, which reduces the effective steering angle discussed earlier. Additionally, previously known volume beam steering devices require the generation of considerable voltage within the crystal, potentially reaching thousands of volts. These high voltages are undesirable and introduce numerous challenges in terms of operating equipment management, material selection and device design, as well as potential safety issues. Figure 3 The beam that the body beam steering device in the middle can be collimated as it passes through the crystal.

[0138] Figure 4 A previously known volume beam steering device is described, which uses two volume crystals and a half-wave plate between them to perform two-dimensional beam steering. In addition to the half-wave plate being needed to rotate the polarization direction of the incident light by 90 degrees, some lenses may also be needed between the two crystals to ensure that the beam enters the second crystal.

[0139] like Figure 4 As seen, it is possible for the beam to first deflect in one dimension within a crystal, and then potentially in another dimension within a second crystal. Linearly polarized light deflected in one dimension travels through the second crystal, its polarization direction rotated by a half-wave plate, and is then deflected in another dimension. Thus, when the beam leaves the first crystal, it is deflected at a certain angle. This beam direction is maintained within the second crystal. One difficulty with this geometry is that the deflection angle must be kept small, otherwise the beam will hit the sidewalls of the second crystal. The deflection of the beam within the crystal—leading to the possibility of impact with the wall—is commonly referred to by those skilled in the art as beam walk-off.

[0140] refer to Figure 11An example 2πn scanner includes an active row made of an EO layer 3 (e.g., an EO active layer whose optical properties change in response to an applied voltage) sandwiched between two sets of transparent discrete electrodes. The EO material can be any type of material whose optical properties change in response to an applied voltage, including at least EO crystals, crystal layers, multiple crystal layers, EO crystal layers, multiple EO crystal layers, liquid crystals, polymers, quantum dot devices, crystals with a linear refractive index change in response to an applied electric field, and / or crystals with a quadratic refractive index change in response to an applied electric field. The optical properties changed in response to an applied voltage include birefringence and / or a change in refractive index in response to an applied electric field. In some embodiments, this change may depend on the wavelength, polarization, and / or propagation direction of the EM beam. In some embodiments, this change may be linear or nonlinear. Without being limited to any other aspect of this disclosure, it will be understood that the description utilizing EO active layers, active layers, EO materials, and / or crystals may additionally or alternatively include any other EO active materials described throughout this disclosure.

[0141] Those skilled in the art, benefiting from the disclosure herein, can readily select appropriate EO materials for a particular system. Certain considerations for material selection include, but are not limited to: material cost, beam steering capability (e.g., the amount of electric field and / or optical change required), material response time when optical properties are altered, material cost, material manufacturing considerations (e.g., including available manufacturing methods, the ability of the material to achieve a specific design state through manufacturing processes, and / or the cost of those processes), the physical strength of the material configured in the beam steering device, and / or the material's thermal capabilities (e.g., the ability to withstand heat generation and / or support heat dissipation). When considering a particular material, certain system considerations include, but are not limited to: the desired amount of beam steering; the trade-off between capital costs and operating costs; the energy throughput of the application; the available configurations of EM beam orientation, polarization, and / or wavelength options; the desired accuracy and precision of the beam steering direction, energy transfer, and / or the optical properties of the beam steering beam; the availability of computing power in or accessible to the device to provide compensation, control, and / or analysis of electrical and / or optical components within the device; and / or the size of the beam steering device (e.g., influencing the size, number of layers, and / or the geometry of the manufactured layers).

[0142] exist Figure 11 In this example, upper electrode 2 is the high-side electrode constituting the high-side electrode layer, and lower electrode 4 is the low-side electrode constituting the low-side electrode layer. In this example, lower electrode 4 can be at ground voltage, or another low voltage or baseline voltage value. Upper electrode 2 can be at a selected voltage, thereby providing a selected voltage difference across a portion of the EO layer 3, thereby creating active cells in the EO layer 3. Figure 11In the example, the EO layer 3 is inserted between the two substrates 1. The description of the upper electrode 2 and the lower electrode 4 is an electrical description, not a geometric description, and the upper electrode 2 may be vertically above or vertically below the EO layer 3, or sideways, tilted, or any other arrangement. In some embodiments, one or more lower electrodes 4 may instead be continuous or uniform electrodes, such as a uniform ground electrode (e.g., refer to a sample with ground electrode 670). Figure 12 In some embodiments, the lower electrode 4 (and / or the uniform ground electrode 670) may be transparent, sufficiently transparent at a selected EM wavelength, reflective, and / or include or be coupled to a reflective layer. In some embodiments, the substrate 1 is transparent, sufficiently transparent at a selected EM wavelength, and / or includes or is coupled to a reflective layer. Figure 11 In the example, light propagates perpendicularly to the substrate 1 through the EO crystal layer 3 and can first pass through the upper electrode 2 or the lower electrode 4, and then pass through the other of the upper electrode 2 or the lower electrode 4.

[0143] refer to Figure 5 Embodiments of this disclosure include a set of transparent discrete electrodes 30 and a ground electrode 40 located on opposite sides of the EO active layer 10. The ground electrode may be reflective or transparent to incoming light. The discrete electrodes 30 may be conductive or resistive. In some embodiments, the discrete electrodes may replace the uniform ground electrode 40. Light propagates perpendicular to the EO crystal layer 10, or propagates towards the discrete electrodes at an angle relative to the ground electrode 40 through the EO crystal layer 10.

[0144] Note that the terms "crystal," "EO crystal," "crystal layer," and "EO crystal layer" are used interchangeably herein and refer to any medium whose refractive index or birefringence can be changed by an applied electric field. The crystals of this disclosure can include crystals having a refractive index that changes linearly or quadratically with respect to an applied field. The term "crystal" can also include liquid crystals, or any medium whose refractive index can be changed by an applied electric field. Figure 5 Since both sides of the structure shown are transparent electrodes, multiple stacked structures can be used in one embodiment to achieve a larger steering angle.

[0145] exist Figure 5 In this context, the ground electrode 40 can be transparent or reflective. In the case of a transparent ground electrode 40, it can be a single electrode as shown, or it can be a series of electrodes similar to discrete electrodes 30 located on the other side of the EO crystal layer 10. If the ground electrode 40 is a series of electrodes, then even when using the term ground, the series of electrodes 40 need not all be set to zero voltage.

[0146] The use of an insulator 20 between the electrodes 30 reduces the retracement discussed in the background section for mode 2π beam steering devices. This allows for steering at larger angles with high efficiency because it reduces the diffuse field effect on the electric field. In some embodiments, the insulator 20 may be a dielectric material, and / or include a dielectric material or layer as part of the insulator 20. In previously known mode 2π beam steering devices, there is a significant extension of the electric field, known as the diffuse field, which is the primary cause of the retracement effect. The presence of an insulator 20 between the electrodes 30... Figure 5 The example embodiment reduces electric field diffusion between electrodes. The transparent discrete electrode 30 can be conductive or resistive. In both cases, the scan distance will be significantly reduced, but the phase diagram will differ regardless of whether it is conductive or resistive. As previously stated, Figure 6 An example phase diagram and abrupt reset are shown when the discrete electrode 30 is conductive, and Figure 8 The phase diagram and abrupt reset are shown when the discrete electrode 30 is a resistive discrete electrode and / or is configured to provide the optimal set of voltages across the active cell.

[0147] In one embodiment, crystal layer 10 may have a resistivity that is potentially much lower than that of insulator 20 (e.g., as low as 1 / 100). This is estimated to reduce the diffuse electric field diffusion effect in insulator 20 to, for example, approximately 1 / 100. The width of insulator 20 can affect the amount of reduction in diffuse field. The quality of the insulator may also affect the amount of reduction in diffuse field, with a less conductive insulator providing a greater reduction in diffuse field. Insulator 20 may extend entirely through crystal layer 10, the refractive index of which may be altered by an electric field, or insulator 20 may extend only partially through crystal layer 10. For example, insulator 20 may extend through crystal layer 10 anywhere from less than 10% to greater than 80%, or it may extend all the way through 100% of the crystal. As a result, a more abrupt reset is achieved when the OPD decreases from approximately a multiple of a wave or a wavelength to approximately zero during reset. Thus, an OPD profile with a more abrupt reset result and higher steering efficiency are achieved.

[0148] Will Figure 2 and Figure 6The comparison shows that the electric field will increase with a greater discrete step increment than if the discrete electrodes 30 were not separated by the insulator 20, rather than being smoothed by the diffuse field, and the reset will be much more abrupt. Example embodiments utilize the partial penetration of the insulator 20 into the crystal layer 10 to maintain and / or configure some smoothness of the diffuse field on the increased phase ramp. Example embodiments utilize the partial penetration of the insulator 20 into the crystal layer 10 as a practical consideration for creating the insulator 20 within the crystal layer 10—for example, to make the beam steering device easier to manufacture and / or improve the mechanical structure. In some embodiments, the insulator 20 provided at the reset position is enhanced (e.g., higher resistance and / or impedance, greater thickness, and / or greater penetration of the crystal layer 10), thereby providing a smoothing effect on the increased phase ramp portion with greater diffuse field resistance at the reset position.

[0149] refer to Figure 7 Another embodiment of this disclosure includes a tilted electrode 50 instead of an electrode on the surface of the EO crystal layer 10. This embodiment reduces or eliminates the quantization effect of the step size in the constructed electric field. This embodiment further includes the EO crystal layer 10, a ground electrode 40, and an insulator 20. The ground electrode 40 includes, but is not limited to, a transparent ground electrode. The transparent ground electrode 40 can be a single electrode as shown, or it can be a series of electrodes. Similarly, the insulator 20 can extend completely or partially through the EO crystal layer 10. The tilted electrode 50 can advance through the EO crystal layer 10 in any configuration as described throughout this disclosure.

[0150] for Figure 7 The tilted electrode embodiment shown reduces the distance between the discrete electrode 50 and the ground electrode 40 by using a fixed tilt angle, making the electric field on adjacent discrete tilted electrodes 50 continuous or nearly continuous. While a fixed electrode tilt angle may not be ideal for all steering angles, it will reduce quantization effects over a wide range of steering angles. Figure 8 As shown, the increase in applied voltage is compensated for by a distance change to provide a continuous or near-continuous electric field at any adjacent discrete tilted electrode 50 before reset.

[0151] Another embodiment using an insulator (not shown) will use liquid crystal to achieve mode 2π beam steering, causing a change in refractive index. Any material that can have a refractive index change under a polarization can be used with an insulator between conductive or resistive electrodes. The insulator can also be located between the electrodes with a depth between 0 and the thickness of the liquid crystal, depending on the desired steering efficiency.

[0152] like Figure 9 and Figure 10As seen, a mirror layer 60 can be added after the ground electrode layer 40 and / or as a layer on the substrate. If a stacked structure is used, the mirror layer will be after the entire stack of device layers. This will increase the allowable deflection angle at a given steering efficiency by reducing the required cell thickness and retrace distance.

[0153] The following description and Figure 12 The example embodiment is consistent with the description. The embodiment includes two optically active rows 610, 620 inserted between two substrates 600, 605. Each row contains an array of active units 630, which are separated from each other by insulator units 640. The active units 630 are made of an optically active material and are sandwiched between a continuous ground electrode 650 and a discrete electrode 660. The discrete electrode can be conductive or resistive. The arrangement of the active units 630 and the insulator units 640 in each row is reversed. The size of the active units 630 in rows 610, 620 is the same as the size of the corresponding insulator units 640 in the next row. The last ground electrode 670 can be reflective or transparent to incoming light to be deflected by the scanner.

[0154] The following description and Figure 13 The example embodiments are consistent with the description. Figure 13 The embodiments described are similar to Figure 12 The embodiment shown includes four active rows 680, 685, 690, and 695. These four active rows are interposed between two substrates 710 and 720. This embodiment may include any even number of active rows, and / or may include an odd number of active rows, such as having one or more repeating rows. Each active row includes a ground electrode 730, wherein the last ground electrode 700 is reflective or transparent to incoming light to be deflected by the scanner. Similar to... Figure 12 In the embodiment shown, each active row contains an array of active units 740. The active units are separated from each other by insulator units 750. The active units 740 are made of an optically active material and are sandwiched between consecutive ground electrodes 700, 730 and discrete electrodes 760, which may be conductive or resistive. In another embodiment, the ground electrodes may be in discrete elements. The arrangement of the active units 740 and the insulator units 750 is reversed in each row. The active units 740 in rows 680, 685, 690, and 695 are the same size as the corresponding insulator units 750 in the next row. Although... Figure 13 Two pairs of rows are shown, for a total of 4 rows, but the number of rows can be any number, including any multiple of two rows or other arrangements.

[0155] The following description and Figure 14The illustrated example embodiment is consistent with the description. The scanner embodiment includes two optically active rows 770, 775 separated by a common transparent continuous ground electrode 780. Each of the active rows 770, 775 is inserted between two substrates 805, 807. Each row contains an array of active units 790. The active units 790 are separated from each other by insulating units 800. The active units are made of an optically active material and are sandwiched between the continuous ground electrode 780 and a discrete electrode 810, which may be conductive or resistive. The arrangement of the active units 790 and the insulating units 800 is reversed in each row. The size of the active units 790 in rows 770, 775 is the same as the size of the corresponding insulating units 800 in the adjacent row. A reflective layer 820 may be located on the surface of the substrate 805 to make the scanner reflective.

[0156] The following description and Figure 15 The example embodiments are consistent with the description. Figure 15 The embodiments of the scanner described herein are similar to Figure 14 The embodiment shown includes four active rows 830, 840, 850, and 860, instead of just two. This embodiment may include any even number of active rows, and / or may include an odd number of active rows, such as having one or more repeating rows. Each pair of rows is separated by a transparent, continuous ground electrode 780, and each pair of rows is inserted by two substrates. More specifically, as... Figure 15 As shown, a first pair of rows is inserted between substrates 870 and 872, and a second pair of rows is inserted between substrates 872 and 875. Each row contains an array of active units 790. The active units 790 are separated from each other by insulator units 800. The active units are made of an optically active material and are sandwiched between a continuous ground electrode 780 and a discrete electrode 810, which may be conductive or resistive. The arrangement of the active units 790 and the insulator units 800 is reversed in each row. The size of the active units 790 in one row is the same as the size of the corresponding insulator units 800 in the adjacent row. A reflective layer 890 may be located on the surface of substrate 870 to make the scanner reflective. Although Figure 15 Two pairs of rows are shown, for a total of 4 rows, but the number of rows can be any number, including any multiple of two rows or other arrangements.

[0157] exist Figure 12-15 In this process, light initially propagates perpendicularly to the substrate toward the discrete electrodes through the active unit, or forms an initial input angle with the perpendicular line. Figure 12-15In this process, the discrete electrodes can be conductive or resistive. With conductive discrete electrodes, only one voltage is applied to each discrete electrode at a time, and the reset typically involves eight or more discrete electrodes to achieve a steering efficiency of 95% or better based on quantization loss. With resistive electrodes, two or more different voltages can be applied simultaneously to each discrete electrode, and the reset may involve only one or more discrete electrodes. Furthermore, in... Figure 12-15 In the embodiments depicted, the active unit is made of any transparent material whose refractive index can be changed by applying a voltage to the discrete electrodes. Such transparent materials include, but are not limited to, EO crystals such as PMN-PT, KTN, SBN, PBN, PZT, BaTiO3, liquid crystals, and / or quantum dot materials.

[0158] refer to Figure 16 An example embodiment of a beam steering device is described. Figure 16 The example includes two active layers, wherein the EO active material 1606 provides a plurality of active units, each active unit being located at one of a plurality of discrete high-side electrodes 1610 and low-side electrodes 1612 (in Figure 16 The example beam steering device includes an insulator 1608 located between each high-side electrode 1610, and substrates 1602, 1604 disposed on each side of the active layer. Figure 16 Examples may include additional active layers, and substrates 1602, 1604 may be located between each active layer and / or interspersed end-to-end between active layers. Figure 16 An example similar to a chess-pattern beam steering device has offset active cells in adjacent active layers, such that the incident EM beam passes through one or the other active layer. Figure 16 The bridging portion 1614, comprising the EO active material 1606 across the insulating region (1608), can provide a ramp smoothing of the progressive phase delay and / or provide easier manufacturing and / or improved mechanical properties for the beam steering device.

[0159] refer to Figure 17 An example embodiment of a beam steering device is described. Figure 17 The example includes two active layers, wherein the EO active material 1706 provides multiple active units, each active unit being located at one of multiple discrete high-side electrodes 1710 and low-side electrodes 1712. Figure 17 The example beam steering device includes an insulator 1708 located between each high-side electrode 1710, and substrates 1702, 1704 disposed on each side of the active layer. Figure 17 The example further includes reflective layer 1716. Figure 17Examples may include additional active layers, and substrates 1702 and 1704 may be located between each active layer and / or interspersed between active layers. Figure 17 An example similar to a chess-pattern beam steering device has offset active cells in adjacent active layers, such that the incident EM beam passes through one or the other active layer. Figure 17 The bridging portion 1714, comprising the EO active material 1706 across the insulating region (1708), can provide a ramp smoothing of the progressive phase delay and / or provide easier manufacturing and / or improved mechanical properties for the beam steering device.

[0160] refer to Figure 18 An example embodiment of a beam steering device is described. Figure 18 Examples include an active layer that provides near 100% fill efficiency within a single active layer. Figure 18 Examples include EO active material 1806 providing multiple active units, each active unit located at one of multiple discrete high-side electrodes 1810, 1811 and low-side electrode 1812. Figure 18 Between the common ground electrode in the example. This example beam steering device includes a substrate 1804—in Figure 18 In the example, substrate 1804 provides insulation for the active layer, and the portion of substrate 1804 located between the high-side electrodes 1810 can be considered as an insulator, as described throughout this disclosure. Figure 18 The example further includes a substrate 1802 opposite to the substrate 1804, and a reflective layer 1816 coupled to the substrate 1804. Figure 18 Examples include multiple active cells formed from a single active EO substrate 1806, having different thicknesses 1818, 1820. This example beam steering device includes a first thickness 1818, which is the wavelength of the target EM beam, half the wavelength of the target EM beam (e.g., in an embodiment with a reflective layer 1816), and / or a discrete number of wavelengths and / or half-wavelengths of the target EM beam. This example beam steering device further includes a second thickness 1820, which is at least half a wavelength larger than the thickness 1818, or a full wavelength larger than the thickness 1818. In some embodiments, the thickness 1818 is one wavelength (λ), and the thickness 1820 is two wavelengths (2λ). In some embodiments, the voltage applied across each active cell is adjusted to provide a desired phase delay profile, and / or the width of the active cells with different thicknesses 1818, 1820 is varied to provide a desired phase delay profile. In some embodiments, a beam scanner (such as one with two (or more) active thicknesses within a single active layer) is used. Figure 18The beam scanner (described herein) is described as a castle scanner and / or a castle pattern. In some embodiments, where high-resistivity side electrodes 1810, 1811 are used in conjunction with the castle pattern, such a beam scanner is described as Castle Scanner Pro or Castle Pattern Pro. For convenience and clarity in the description herein, the terminology of the Castle Scanner or Castle Scanner Pro embodiments is used. Figure 18 Examples provided in certain embodiments of this disclosure offer numerous advantages, including, for a given steering capability, simplification in the manufacture of the beam steering device, enhanced mechanical integrity of the beam steering device, and / or a smaller vertical coverage area of ​​the scanner (e.g., along the propagation axis of the incident EM beam).

[0161] For clarity, this disclosure provides specific examples throughout and illustrates the interoperability of various features of this disclosure. Depending on the desired capabilities of a particular system, the described embodiments may be combined in whole or in part, and / or certain described features may be omitted. For example, in any described embodiment, resistive electrodes may be used for some or all of the high-side electrodes. In any described embodiment, the active cell thickness may be in any active layer or gradual between active layers and may vary. Insulators may be provided as explicit devices (e.g., such as...). Figure 12 (or 16) and / or may be included as an air gap or substrate portion (e.g., as Figure 18 (Middle). The low-side electrode can be at any voltage value, including baseline or zero reference voltage, any voltage lower than the high-side electrode (during steering operation), and / or a negative reference voltage. The electrode can be provided as a tilting or wavy electrode in one or more portions of the beam steering device, or throughout the beam steering device. All or part of the beam steering device can be provided in a chessboard arrangement, a castle arrangement, or throughout any other arrangement described in this disclosure.

[0162] This disclosure describes an active layer for steering incident EM beams. It should be understood that the steering of the EM beam can be in a single direction (e.g., X or Y, azimuth or elevation, etc.) and / or for the unipolarity of the EM beam, and additional layers can be provided to include additional steering in other directions, in another polarity, and / or to provide incremental steering for the first direction and / or polarity.

[0163] refer to Figure 19 An example controller 1902 is schematically depicted as being configured to perform certain operations for steering multiple EM wavelengths. For clarity of description, controller 1902 is depicted as a single device, although aspects of controller 1902 may be distributed across multiple devices, implemented in hardware and / or as instructions stored on a computer-readable medium, as sensors or actuators present in the system, and / or via network communication and / or remote processing capabilities.

[0164] Example controller 1902 includes multiple circuits configured to functionally perform certain operations of controller 1902. See details. Figure 19 Certain operations are described, but any operation, process, or technique throughout this disclosure can be implemented or performed by a controller such as controller 1902. Example controller 1902 includes incident wavelength circuitry 1904 for determining an incident EM beam wavelength value 1906, and steering configuration circuitry 1908 for determining a first EO layer command value 1910 and a second EO layer command value 1912 in response to the incident EM beam. A given system may include any number of EO layers, and / or EO layers may be a logical arrangement of active cells within one or more physical layers, for example, where regions of active cells are distributed across multiple physical layers constituting the EO layers. EO layer commands may include multiple commands to be provided to multiple electrodes, including voltage commands to high-side electrodes, and / or pull-down commands to low-side electrodes (e.g., one or more low-side electrodes are pulled to a lower voltage during steering operations), such that when an EO layer command is executed, a selected number of phase delay levels are provided across the EO layer. In some embodiments, EO layer commands further include coordinating timing values ​​for the EO layers, for example, when controller 1902 steering multiple EM wavelengths in a sequential and / or pulse-width modulation (PWM) manner. Example controller 1902 further includes steering implementation circuitry 1914, which provides at least one of a first EO layer command value 1910 or a second EO layer command value 1912 to steering control module 1916.

[0165] The operation of controller 1902 can be performed during runtime, design time, or a combination thereof. For example, if the wavelength of the incident EM beam to be steered is predetermined, the operation of incident wavelength circuit 1904 can be performed at design time, such as in the selection and configuration of active cell materials, the geometry of active cells, the thickness of EO layers, the utilization (or non-utilization) of reflective layers, the selected parameters of the insulator, and the design voltage of the electrodes (high-side and / or low-side). In this example, EO layer commands 1910, 1912 can be predetermined for a selected wavelength, and the operation of steering configuration circuit 1908 includes providing a lookup of EO layer commands 1910, 1912 (e.g., considering wavelength value 1906, the configuration of one or more EO layers in the system, and / or the amount and direction of the commanded steering). In this example, when the incident EM beam is active, steering implementation circuit 1914 provides EO layer commands 1910, 1912 to steering control module 1916 during a selected operating cycle and / or continuously. In this example, the steering control module 1916 responds to commands provided by the steering implementation circuit 1914 to control the electrode voltage to implement EO layer commands 1910, 1912.

[0166] In another example, where the wavelength of the incident EM beam is configurable, selectable, and / or variable after the initial construction of the beam steering device (e.g., supporting multiple steering configurations with a single hardware device, and / or steering multiple EM beam wavelengths with a single hardware device), one or more operations of the incident wavelength circuit 1904 can be performed at runtime. In this example, the incident wavelength circuit 1904 determines the wavelength value 1906 at runtime, for example using any sensing technology known in the art, and / or by determining another system parameter indicating that a specific wavelength value 1906 is being utilized (e.g., network parameters, parameters provided by another controller, the activity status of a specific EM source, etc.). In this example, the steering configuration circuit 1908 determines the EO layer commands 1910, 1912 (e.g., considering the wavelength value 1906, the configuration of one or more EO layers in the system, and / or the amount and direction of the commanded steering). In this example, the steering control module 1916 controls the electrode voltages in response to commands provided by the steering implementation circuit 1914 to implement the EO layer commands 1910, 1912.

[0167] For clarity of this description, certain examples of the operation of controller 1902 are provided. It will be understood that the operation of controller 1902 may be provided in any combination of design-time and / or runtime operations, and further, the operation of controller 1902 may be adjusted in response to changes in system operating conditions, including changes in the application of the beam steering device of controller 1902 (e.g., changes in steering wavelength, changes in desired steering capability, and / or changes in the timing of multi-layer steering operation) and / or changes in the hardware configuration of the beam steering device (e.g., changes in EO layer, system voltage, and / or EM source wavelength).

[0168] Example steering control module 1916, in response to at least one of a first EO layer command value 1910 or a second EO layer command value 1912, provides a selected voltage to at least one of a first high-side electrode layer or a second high-side electrode layer. Example steering control module 1916 further includes solid-state circuitry that applies the selected voltage to each electrode of the first and second high-side electrode layers. The example solid-state circuitry further selectively couples power to each electrode of the first and second high-side electrode layers, and / or selectively couples the power using pulse width modulation (PWM) operation. In some embodiments, steering control module 1916 includes hardware elements configured to perform operations to implement EO layer command values ​​1910, 1912, such as a solid-state switch in response to a command from steering implementation circuitry 1914. In some embodiments, steering control module 1916 may be a smart controller configured to provide commands to implement EO layer command values ​​1910, 1912 provided by steering implementation circuitry 1914. In some embodiments, aspects of steering control module 1916 may be implemented on controller 1902. Therefore, it will be seen that the EO layer command values ​​1910, 1912 can vary from low-level hardware commands (e.g., on / off, or voltage values ​​originating from or switched by controller 1902) to high-level steering commands (e.g., steering 5 degrees on the X-axis for EO layer 2 and 7 degrees on the Y-axis for EO layer 3), combinations of these, and / or intermediate parameters between these (e.g., simple state values ​​indicating steering amount and / or voltage values ​​of the layer to be controlled, for which steering control module 1916 is configured to respond). In some embodiments, steering control module 1916 may receive EO layer command values ​​1910, 1912 as physical values ​​(e.g., voltage, frequency, pressure, or another physical value), as network communication parameters from controller 1902, and / or as parameters retrieved by steering control module 1916 from the memory of controller 1902 (e.g., in selected storage locations populated by steering implementation circuitry 1914). The example steering control module 1916 hardware and operation examples are non-limiting and are provided for clarity of this description.

[0169] In some embodiments, the EO active layer having thick and thin elements is referred to herein as a castle configuration. In some embodiments, a castle configuration includes both thick and thin elements (e.g., having associated discrete high-side electrodes) constituting the active unit of a beam steering device. In some embodiments, a castle configuration includes adjacent physical layers of a beam steering device having alternating thick and thin elements, such as… Figure 16 As depicted herein. In some embodiments, the beam steering device in a castle configuration having one or more high-resistivity side electrodes may be referred to herein as a castle pro configuration.

[0170] In some embodiments, the EO active layer having alternating active cells is referred to herein as a chess configuration. In some embodiments, the chess configuration includes adjacent physical layers of alternating beam steering devices such that the incident EM beam passes from one EO active layer through one or more active cells. In some embodiments, the chess configuration includes active cells of the same size (e.g., thickness, width, or both) from adjacent layers. In some embodiments, the beam steering device in a chess configuration having one or more high-resistivity side electrodes may be referred to herein as a chess pro configuration.

[0171] refer to Figure 20 Example device 1902 includes an incident beam circuit 2002 that interprets an EM beam value 2004 (e.g., the wavelength and / or frequency of the incident EM beam of a beam steering device), a steering request circuit 2006 that interprets a steering profile value 2008, and a steering configuration circuit 1908 that determines a plurality of voltage values ​​2010 in response to the steering profile value 2008. In some embodiments, the steering request circuit 2006 determines the steering profile value 2008 in response to the EM beam value 2004 and / or the steering request value 2012. Example steering profile value 2008 includes a steering command (e.g., the wavelength and / or polarity to be steered, and a steering direction that may be determined in response to a steering target position and / or steering amount). Example steering configuration circuit 1908 determines a plurality of voltage values ​​2010 in response to the steering profile value 2008, for example, determining voltage values ​​2010 that provide a configuration for the active unit of the beam steering device to steer the incident EM beam in a manner consistent with the steering profile value 2008.

[0172] In some embodiments, the plurality of voltage values ​​2010 correspond to a plurality of active cells of the EO material, wherein the plurality of voltage values ​​2010 includes at least one series of voltage values ​​and voltage reset values ​​(e.g., a voltage trajectory across one or more active cells, and a voltage reset value reset at each active cell and / or after a selected number of active cells). Example device 1902 further includes a steering implementation circuit 1914 that provides an EO command value 1910 in response to the plurality of voltage values ​​2010.

[0173] The following describes certain other aspects of the example device 1902, any one or more of which may exist in certain embodiments. Example device 1902 includes a voltage reset value comprising a voltage adjustment between two adjacent active cells in a plurality of active cells to apply a 2πn phase shift between the first and second adjacent active cells in the active cells, where n includes a small positive integer value. Example steering profile value 2008 for the selected polarity of the EM beam includes: the target position of the EM beam; the target steering angle of the EM beam; a first target steering angle of a first steering axis of the EM beam and a second target steering angle of a second steering axis of the EM beam; and / or any of the foregoing. Example EM beam value 2004 includes at least one EM beam value, such as: the wavelength value of the incident EM beam, the presence of the incident EM beam, and characteristics of the incident EM beam (e.g., polarity, energy level, timing value, incident angle, etc.). Example device 1902 includes steering configuration circuitry 1908, which further determines a plurality of voltage values ​​2010 for the plurality of active cell layers of the EO material. In some embodiments, the steering implementation circuit 1914 provides one or more EO command values ​​1910 to the device to implement beam steering, for example to the steering control module 1916.

[0174] The following description references schematic flowcharts and schematic process descriptions of certain processes and operations according to this disclosure. Any such processes and operations may be used in conjunction with and / or performed by any system of this disclosure, and in conjunction with other processes and operations described throughout this disclosure. Any grouping and ordering of operations is for convenience and clarity of description, and unless otherwise expressly indicated, the described operations may be omitted, reordered, grouped, and / or divided in whole or in part.

[0175] refer to Figure 21 Example process 2100 includes operations 2102 of receiving an incident electromagnetic (EM) beam at a multi-layer beam steering device, operations 2104 of determining the wavelength value of the incident EM beam, and operations 2106 of selectively steering the EM beam using a first or second layer of the multi-layer beam steering device in response to the determined wavelength value of the incident EM beam.

[0176] Several other aspects of the example process are described below, any one or more of which may exist in some embodiments. The example process further includes operation 2106 to selectively redirect by applying a selected voltage to a selected layer of the first or second layer, applying a voltage gradient across the selected layer of the first or second layer, and / or by applying a reset across the selected layer of the first or second layer at selected intervals. The example process further includes operation 2108 of determining a selected frequency of interest, and operation 2110 of alternating wavelength values ​​of the EM beam at a frequency at least equal to the selected frequency of interest.

[0177] refer to Figure 22 Example process 2200 includes: operation 2102 to receive an incident electromagnetic (EM) beam at a plurality of active cells of an electro-optic (EO) material; operation 2202 to apply a voltage to the plurality of active cells to selectively adjust the optical properties of each of the plurality of active cells; and operation 2204 to reset the voltage between at least two adjacent active cells of the plurality of active cells to redirect the incident EM beam. In some embodiments, the number of active cells between reset operations 2204 is a single active cell, for example, where a high-resistivity side electrode, a tilted electrode, and / or other configurations described throughout this disclosure provide a configuration in which a voltage gradient can be applied across a single active cell. In some embodiments, even where a voltage gradient can be applied across a single active cell, the voltage reset operation 2204 may be performed after a number of active cells greater than one (1) cell, for example, where the voltage gradient extends to a second cell (e.g., to reduce the number of resets across the beam-directing device, to keep the voltage gradient across a single cell below a selected value, to keep the voltage gradient across a single cell within another selected region of a linear or conductive resistor, etc.).

[0178] Some other aspects of Example Process 2200 are described below, any one or more of which may exist in some embodiments. The Example Process includes a voltage reset operation 2204, which includes one or more of the following: resetting the voltage by an amount to apply a 2π phase shift between a first and an adjacent second of a plurality of active cells; resetting the voltage by an amount to apply a 2πn phase shift between the first and an adjacent second of the plurality of active cells, where n includes a small positive integer value; and / or resetting the voltage to a value that applies a negative phase shift. Example Process 2200 further includes an operation 2202 to apply a voltage to the plurality of active cells to: apply a progressive phase shift to the incident EM beam; and / or apply a progressive phase shift by applying a progressive voltage to adjacent active cells of the plurality of active cells and resetting the progressive voltage at selected intervals between the plurality of active cells. In some embodiments, the selected interval between the resets of the plurality of active cells includes at least six (6) of the plurality of active cells in each selected interval. In some embodiments, the operation 2202 of applying a voltage to a plurality of active cells includes: applying a uniform voltage to each of the plurality of active cells, and further applying different uniform voltages to adjacent active cells among the plurality of active cells; applying a voltage gradient to each of the plurality of active cells; and / or applying different voltage gradients to adjacent active cells among the plurality of active cells.

[0179] Example process 2200 further includes operation 2206 to insulate a first high-side electrode corresponding to a first of a plurality of active cells from a second high-side electrode corresponding to a second of a plurality of active cells, wherein the first of the plurality of active cells is adjacent to the second of the plurality of active cells. In some embodiments, operation 2206 includes enhancing the insulation in response to the first of the plurality of active cells and the second of the plurality of active cells comprising at least two of the plurality of active cells corresponding to a reset voltage (e.g., providing enhanced insulation between a final active cell having a first asymptotic phase delay stage with the maximum phase shift / voltage and an initial active cell having a second asymptotic phase delay stage with the minimum phase shift / voltage). Example process 2200 further includes operation 2208 to steer the incident EM beam on a first axis, thereby providing a first-axis-steered EM beam. In some embodiments, process 2200 further includes operation 2210 to determine whether an additional axis and / or additional polarity of the incident EM beam should be steered, and repeating operations 2102, 2202, 2204, and 2206 to steer on a second axis and / or a second polarity. For example, process 2200 further includes, in response to operation 2210 determining that, operation 2102 receives a first-directed EM beam at a second plurality of active cells of the EO material (e.g., from a previous iteration of process 2200), operation 2202 applies a voltage to the second plurality of active cells to selectively adjust the optical properties of each of the second plurality of active cells; and / or operation 2204 resets the voltage between at least two adjacent active cells in the second plurality of active cells to direct the incident EM beam on a second axis (and / or second polarity) different from the first axis (and / or first polarity). In some embodiments, process 2200 further includes operation 2206 insulating a first high-side electrode corresponding to the first of the second plurality of active cells from a second high-side electrode corresponding to the second of the second plurality of active cells, wherein the first of the second plurality of active cells is adjacent to the second of the second plurality of active cells. It can be seen that the operation of example process 2200 provides a biaxially directed and / or bipolar directed EM beam.

[0180] refer to Figure 23 Example process 2300 includes operations 2302 of interpreting electromagnetic (EM) beam values, operations 2304 of interpreting steering profile values, and operations 2306 of determining a plurality of voltage values ​​in response to the steering profile values. The plurality of voltage values ​​correspond to a plurality of active cells of the EO material, and the plurality of voltage values ​​include at least one stepped voltage value and a voltage reset value. In some embodiments, the stepped voltage values ​​may be stepped within active cells and / or between active cells. Example process 2300 further includes operation 2308 to provide EO command values ​​in response to the plurality of voltage values.

[0181] The following describes certain other aspects of the example process, any one or more of which may exist in some embodiments. Example process 2300 further includes: wherein the voltage reset value includes a voltage adjustment between two adjacent active cells in a plurality of active cells to apply a 2πn phase shift between the first and the second adjacent active cells in the active cells, where n includes a small positive integer value. Example steering profile values ​​include a target position of the EM beam and / or a target steering angle of the EM beam; wherein the steering profile values ​​include a first target steering angle of a first steering axis of the EM beam and a second target steering angle of a second steering axis of the EM beam; wherein the steering profile values ​​include a first target steering angle for a first polarity of the EM beam and a second target steering angle for a second polarity of the EM beam; and / or wherein the EM beam values ​​include at least one EM beam value, such as: the wavelength value of the incident EM beam, the presence of the incident EM beam, and the characteristics of the incident EM beam. Example process 2300 further includes operation 2306 to determine multiple voltage values ​​for a plurality of active cell layers of the EO material.

[0182] refer to Figure 24 Example process 2400 includes operation 2402 of providing an EO layer comprising an EO active material, and operation 2404 of forming a plurality of active units of the EO layer, wherein the forming includes: operatively coupling a high-side electrode layer comprising a plurality of discrete electrodes to a first side of the EO layer; and operatively coupling a low-side electrode layer to a second side of the EO layer. Example process 2400 further includes operation 2406 of operatively coupling an insulator to the plurality of active units of the EO layer, wherein the insulator is at least partially located between a first and a second of the active units.

[0183] The following describes certain other aspects of example process 2400, any one or more of which may exist in certain embodiments. Example process 2400 further includes: operation 2402 including providing an EO layer in a castle configuration; operation 2402 including providing a plurality of EO layers in a chessboard configuration; operation 2404 including operatively coupling a high-side electrode layer by providing a plurality of discrete electrodes as resistive electrodes; operation 2404 including operatively coupling a high-side electrode layer by providing a plurality of discrete electrodes as tilted electrodes; and / or operation 2404 including operatively coupling a high-side electrode layer by providing a plurality of discrete electrodes as electrodes having a selected geometric arrangement. Example process 2400 further includes: operation 2402 including providing an EO layer by providing a plurality of EO layers, and operation 2404 further including forming a plurality of active units of the EO layer by operatively coupling each of the plurality of high-side electrode layers to a corresponding one of the plurality of EO layers; and / or operation 2404 further including forming a plurality of active units of the EO layer by operatively coupling a low-side electrode layer such that the low-side electrode layer is shared by adjacent EO layers among the plurality of EO layers. Example process 2400 further includes: operation 2402 further includes providing an EO layer by utilizing an adjacent substrate of EO material for the EO layer; operation 2406 further includes operatively coupling an insulator by utilizing an adjacent substrate of insulating material for the insulator; operation 2404 further includes operatively coupling a low-side electrode layer by utilizing a reflective low-side electrode layer; operation 2404 further includes operatively coupling a high-side electrode layer by providing a plurality of discrete electrodes as resistive electrodes with selectable resistance profiles; and / or operation 2404 further includes providing a plurality of discrete electrodes as resistive electrodes with selectable resistance profiles by providing a plurality of discrete electrodes as solid-state electrodes.

[0184] refer to Figure 25 An example process 2500 for implementing an improved mode 2πn electro-optic or photon beam steering scanner includes operations 2502 of providing a mode 2πn electro-optic or photon beam steering scanner, operations 2504 of introducing a beam into at least one active EO crystal layer of the scanner, and operations 2506 of applying one or more voltages to conductive or resistive discrete electrodes of the scanner to change the refractive index sufficiently to cause an OPD change in the beam traveling through the scanner.

[0185] Not limited to any other aspect of this disclosure; a first example of an improved mode 2πn electro-optic or photon beam steering scanner for use with process 2500 includes at least one active EO layer having a first side and an opposing second side; at least one conductive or resistive discrete electrode arranged along the first side; at least one ground electrode arranged along the second side; and at least one insulator arranged to at least partially extend into the active EO layer; and a second example of an improved mode 2πn electro-optic or photon beam steering scanner for use with process 2500 includes at least two active rows arranged between two substrates, the substrates being transparent to incident light or photon waves. Each active row has a first side and an opposite second side, wherein each active row includes at least two active units separated by at least one insulator unit, and at least one ground electrode arranged between two of the at least two active rows; each of the at least two active rows has at least one discrete conductive or resistive electrode arranged along the first or second side of each active row opposite to the at least one ground electrode; and wherein the arrangement of at least two active units and insulator units in one row of the at least two active rows is opposite to the arrangement of at least two active units and insulator units in the other row of the at least two active rows.

[0186] refer to Figure 26 An example beam steering device is depicted. The example beam steering device includes a hardware layer 2602 with beam steering components, comprising a high-side electrode layer 2606, a low-side electrode layer 2610, and a plurality of active units 2608. The active units 2608 are located between the high-side electrode layer 2606 and the low-side electrode layer 2610 and include an EO active material that changes optical properties in response to an applied voltage or electric field. The example beam steering device may include the EO active material constituting a substrate of the active unit 2608, which may be provided as a discrete element of the EO active material or as a monolithic substrate, wherein portions of the monolithic substrate inserted between each of the plurality of discrete electrodes of the high-side electrode layer 2610 each form an active unit. In some embodiments, fragments of the EO active material may form several active units 2608, wherein the EO active material is formed in more than one fragment to create an active unit layer.

[0187] The example beam steering device further includes a voltage controller 2612 responsive to a voltage command, steering command, or other similar command structure, wherein the voltage controller 2612 provides voltage control of elements of the high-side electrode layer 2606 and / or the low-side electrode layer 2610, thereby controlling the voltage difference and / or electric field across the active unit 2608. In some embodiments, voltage control of electrode layers 2606, 2610 includes increasing the voltage of individual discrete electrodes of the high-side electrode layer 2606 and / or the high-side electrode layer 2610, and may further include decreasing the voltage of individual discrete electrodes of the low-side electrode layer 2610 and / or connecting them to ground. In some embodiments, the hardware layer 2602 of the example beam steering device may include any features and / or elements throughout any beam steering device of this disclosure, including but not limited to: an insulator inserted (at least partially) between one or more active units 2608; electrodes provided as discrete or continuous electrode layers (e.g., where at least one of the high-side electrode layer 2606 or the low-side electrode layer 2610 is provided as discrete electrodes, and / or where each active unit 2608 is provided with discrete electrodes on the high side or low side to provide individual voltage differential control for that active unit); angled and / or geometrically contoured electrodes; active units provided in a castle arrangement, a chessboard arrangement, or a combination of these arrangements; a reflective layer or reflective element (e.g., a substrate or ground electrode provided as a reflective layer, and / or a reflective layer associated with one of these); and / or an anti-reflective coating provided on at least a portion of the layer interfaces in the hardware layer 2602. In some embodiments, hardware layer 2602 includes multiple active units configured to cooperate to provide one or more of the following: steering for more than one polarity; more than one axis; more than one target wavelength of the incident EM beam 2604; additional steering capability; and / or cooperation between different hardware layers of active units to steering a specific wavelength, polarity, and / or axis.

[0188] In some embodiments, the discrete electrode 2606 is sized such that the length of an individual discrete electrode 2606 (e.g., the left-right distance between discrete electrodes 2606) is the same as or similar to the thickness of the active unit 2608. In some embodiments, the ratio of the length of an individual discrete electrode 2606 to the thickness of the active unit 2608 is referred to as the aspect ratio. It has been found that having discrete electrodes 2606 with the same thickness as the active unit 2608 (e.g., providing an aspect ratio of approximately 1) minimizes (but does not eliminate) the diffuse field between electrodes 2606. In some embodiments, and not limited to, the length of the discrete electrode 2606, which has the same or similar thickness as the active unit 2608 (e.g., having an aspect ratio of approximately 1), includes: nominally identical length and thickness (e.g., allowing for variations and tolerances due to manufacturing and assembly processes, and variations between components); selection of length and thickness such that the dispersion field is within a selected amount (e.g., ratio, offset value, below a maximum threshold, etc.) of the minimum dispersion field value; the closest match between the nominally available length and thickness of the component (e.g., readily available or commercially available electrode and / or EO materials; the closest match with available electrode and / or EO materials in other systems already in production; and / or the closest match of electrode and / or EO materials, the EO materials being selected from a range of materials designed for other considerations (e.g., the size of the beam steering device; the number of progressive phase delay stages and the number of phase delay steps in each stage; the mechanical integrity of the beam steering device; and / or the heat transfer environment and / or heat dissipation of the beam steering device). (Environment). In some embodiments, some electrodes 2606 may have a length that is the same as or similar to the thickness of the active cell, and other electrodes 2606 may not have a length that is the same as or similar to the thickness of the active cell. For example, electrodes 2606 located at a reset position (e.g., the last electrode of the first stage, and / or the first electrode of the second stage) may be sized to be closer to the same length as the active cell thickness relative to other electrodes 2606 in the same beam steering device. In another example, some electrodes 2606 may be separated by an insulator (and / or a more powerful insulator), while other electrodes 2606 are not separated by an insulator (and / or a less powerful insulator), with the non-insulated electrode 2606 separation having an aspect ratio close to 1, and the insulated electrode 2606 separation having an aspect ratio far from 1. It can be seen that the length of the electrodes 2606 and / or the thickness 2608 of the active cell can be adjusted to provide a desired dispersion field profile across the beam steering device, for example, using the dispersion field to smooth the phase profile (e.g., referencing...). Figure 8 Meanwhile, minimizing the diffusion field loss in high-loss regions such as the reset position.

[0189] Given the various embodiments of this disclosure, it can be seen that in some embodiments, electrode lengths such as λ, 1 / 2λ, and / or 1 / 4λ, and integer multiples of these lengths, may be desirable to match the varying thickness of the active unit 2608, either within a beam steering device, within a beam steering device layer (e.g., where different layers are provided to steering different wavelengths), or between different devices. For example, in beam steering devices where steering efficiency is a primary consideration, a close match between the electrode length 2606 and the thickness of the active unit 2608 can be provided, while in beam steering devices where a smooth phase delay profile is desired, the match between the electrode length 2606 and the thickness of the active unit 2608 can be relaxed—even where the beam steering device is otherwise configured to steering incident EM beams of the same wavelength to the same steering direction.

[0190] The example beam steering device further includes a steering controller 2616 that provides steering commands to hardware layer 2602. Voltage controller 2612, in response to the steering commands, provides voltage control to the elements of electrode layers 2606, 2610, thereby guiding the incident EM beam 2604 as a steering EM beam 2614 to a desired location. In some embodiments, steering controller 2616 and / or voltage controller 2612 include any aspect and / or are configured to perform any operation as referred to throughout this disclosure to perform beam steering operations. Without limitation to any other aspect of this disclosure, steering controller 2616 and / or voltage controller 2612 may include any aspect of controller 1902 or perform any operation of controller 1902, and / or may perform reference... Figure 21-25 Any operations described in the publicly available content, and / or references Figure 31 Any operations described in the publicly available information.

[0191] refer to Figure 27 An example beam steering device includes a high-side electrode layer 2606, a low-side electrode layer 2610, and an active unit 2608. Figure 27 In the example, the high-side electrode layer 2606 is provided as a plurality of discrete electrodes, the low-side electrode layer 2610 is provided as a common ground electrode, and the active unit 2608 includes a portion of a monolithic EO active substrate layer located between corresponding portions of each discrete high-side electrode and the common low-side electrode. Figure 27 In some examples, the beam steering device does not include an insulator between the active unit and / or discrete high-side electrodes, but in some embodiments, Figure 27 The beam steering device is configured to manage the dispersion field loss on steering efficiency using a steering controller 2616 and / or a voltage controller 2612 configured to reduce dispersion field loss. In some embodiments, Figure 27 Beam steering devices are implemented using half-wave voltage profiles, such as references. Figures 29-31 As described in the disclosed content. In some embodiments, Figure 27 One or more parts of the example beam steering device are provided with an aspect ratio of 1 or about 1.

[0192] refer to Figure 28 It depicts an example beam steering device, similar to Figure 27 The beam steering device depicted in the image. Figure 28 The beam steering device in the example includes discrete high-side electrodes 2801 and opposing discrete low-side electrodes 2803. The beam steering device includes an EO active layer forming active cells 2608, wherein each active cell 2608 is formed by a portion of the EO active layer between the opposing electrodes 2801, 2803. In some embodiments, one or more electrodes may omit the insulator between them, and / or Figure 28 The beam steering device can operate within a half-wave voltage profile. In some embodiments, the use of discrete low-side electrodes 2803 can provide more convenient development of the voltage profile, such as by manipulating individual voltages on the low-side electrodes 2803, depending on the hardware and electrode type to achieve the desired voltage profile on the electrodes.

[0193] In some embodiments, for example, where providing an aspect ratio of 1 or about 1 prompts the design to reduce the number of electrodes per reset (e.g., due to the size of the aperture and / or beam steering device), the half-wave voltage profile can be combined with resistive electrodes to provide some reduction in quantization loss while achieving the half-wave voltage profile advantages of diffuse field loss. As will be seen in the references... Figure 30The half-wave voltage profile described in the disclosure implements a maximum diffusion field region (scan distance), which is equal to the distance between discrete electrodes. For comparison, a castle arrangement implements a maximum scan distance of the width of a discrete electrode, and a chess arrangement implements a maximum scan distance that is theoretically zero (e.g., where each electrode is surrounded by an insulator, thus limiting edge effects across the electrode range). Some additional considerations include: for the half-wave voltage portion of the beam steering device, an aspect ratio of approximately 1 is desired; for the castle arrangement portion of the beam steering device, optical property matching between the substrate and the EO active material is desired; and for the chess arrangement portion of the beam steering device, optical property matching between the insulator and the EO active material is desired. Those skilled in the art who benefit from the disclosure herein can readily determine arrangements of beam steering devices utilizing the various features described herein, including: the use of an insulator; a chess arrangement; a castle arrangement; a selected aspect ratio; a selected voltage level including the half-wave voltage profile; selected optical properties of the EO active layer, substrate, and / or (one or more) insulators; and / or the use of a reflective layer. Certain considerations in determining which features to utilize for a particular beam steering device include, but are not limited to, any other aspects of this disclosure: desired device steering capability; steering efficiency; voltage provided and its control; manufacturing considerations; and / or the desired size of the beam steering device.

[0194] refer to Figure 29Example steering controller 2616 and voltage controller 2612 are configured to reduce diffuse field losses in beam steering devices, including beam steering devices with or without insulating elements. Example steering controller 2616 includes steering request circuitry 2006 that determines one or more steering values ​​2012, such as steering direction, target location, steering efficiency value, etc. In some embodiments, the steering values ​​2012 include a selected wavelength or frequency of incident EM radiation, a selected polarity, a selected steering axis, or other parameters. Example steering controller 2616 further includes steering configuration circuitry 1908 that determines one or more EO command values ​​1910, which may include desired optical characteristics (e.g., OPD change) across the beam steering device in response to the steering request values ​​2012. In some embodiments, the EO command values ​​1910 are determined for one or more various layers in the beam steering device, such as layers in response to selected wavelength, polarity, efficiency, steering axis, etc. In some embodiments, the steering configuration circuit 1908 utilizes a half-wave voltage profile 2908 to determine one or more EO command values ​​1910, which can be used for one or more EO active layers and / or portions of one or more EO active layers in the beam steering device. It can be seen that in some embodiments, one or more layers of the beam steering device can utilize the half-wave voltage profile 2908, while other layers of the beam steering device can be configured to utilize another voltage profile. The example steering controller 2616 further includes steering implementation circuitry 1914, which provides a command to voltage controller 2612 in response to one or more EO command values ​​1910. In some embodiments, the conversion between one or more EO command values ​​1910 and selected voltages across various active elements of the beam steering device can be performed by the steering implementation circuitry 1914 (e.g., directly passing the voltage command to voltage controller 2612) or by the voltage controller 2612 (e.g., converting one or more EO command values ​​1910 into one or more voltage values ​​2010 of electrodes in the beam steering device). Example voltage controller 2612 provides voltage value 2010 to electrodes (high-side electrodes, or both high-side and low-side electrodes) by directly operating voltage control hardware (e.g., solid-state switch, PWM device, relay, etc.) or by providing voltage value 2010 to a hardware layer in response to voltage value 2010, thereby stimulating electrodes in a manner that implements EO command value 1910 in the active unit of the beam steering device.

[0195] Figure 30 This is an example depiction of the actual phase profile 2808, based on modeling and calculations, and is believed to utilize various aspects of this disclosure—including such as Figure 29 The steering controller 2616 and voltage controller 2612 depicted herein and / or using, for example, Figure 31 The process depicted in the diagram allows for the realization of this phase profile 2808. Figure 30 In the example, OPD stage 2806 is depicted as being above and below the nominal voltage 2804, having positive and negative voltages relative to the nominal voltage, and can be referred to as a half-wave voltage profile. Additionally, in Figure 30 In the example, the aspect ratio is provided as approximately 1. Figure 30 In the example, the reset occurs between the positive and negative voltage electrodes. It has been found that, such as Figure 30 The voltage profile depicted in the figure, combined with an aspect ratio of approximately 1, provides rapid voltage reset, where the diffuse field region is confined to the distance between the electrodes, even without the use of an insulator, thus providing a significant reduction in diffuse field loss during reset. Figure 30 The example depicts a resistive electrode, although a conductive electrode could also be used. Because the maximum voltage in the EO active layer is half the voltage in the nominal voltage phase delay profile (e.g., from a 2π delay voltage reset to a zero delay voltage), the thickness of the EO active layer using a half-wave voltage profile can be half the thickness used for the nominal voltage phase delay profile. Additionally, adding a reflective layer (e.g., a reflective substrate, a reflective ground electrode, or a dedicated reflective layer) can provide a thickness that is one-quarter the thickness used for the nominal voltage phase delay profile.

[0196] In some embodiments, the use of an ultrathin EO active layer (e.g., 1 / 4λ, which may be 500 nm or less for certain steering wavelengths) provides additional capabilities. For example, the small physical coverage area and ease of fabrication allow for the easy addition of extra layers to steering additional wavelengths, increasing steering capability, and / or steering and / or steering axis with additional polarity. In another example, the ultrathin layer provides increased energy throughput capability because the thin layer absorbs a lower portion of the energy flow as heat and has a more favorable heat dissipation environment (lower capability and shorter heat conduction path), which is subject to active or passive cooling systems (e.g., cooling layers in thermal contact with the reflective layer).

[0197] exist Figure 30 In the example, the high voltage 2802 of the phase delay order can be matched with a π phase delay, and the low voltage 2806 can be matched with a -π phase delay, such that a 2π (or 2πn) reset is applied at reset position 108, but the total voltage in the system is relative to the nominal voltage 2804. Therefore, it can be seen that in Figure 30In the example, the maximum magnitude of the phase delay (and corresponding voltage) applied by any active cell is π (or + / - π), and therefore, the maximum thickness required for the active cell can be as low as half of λ, instead of λ, which is typically required when a phase delay of 2π is applied within a single active cell.

[0198] Figure 30 The examples depict symmetrical voltage profiles (e.g., high voltage value 2802 and low voltage value 2806 are both at the same distance from the nominal voltage value 2804), although the voltage profiles may be asymmetrical. Additionally, half-wave voltage profiles can still be utilized with a maximum phase delay exceeding + / - π (which can be symmetrical).

[0199] refer to Figure 31 An example process 3100 for steering an incident EM beam using a half-wave voltage profile is schematically depicted. Process 3100 includes an operation 2102 of receiving the incident EM beam and an operation 3104 of determining a steering request value for the incident EM beam. Example process 3100 further includes an operation 3106 of determining a half-wave voltage profile in response to the steering request value, for example, providing an OPD profile on the EO active layer of a beam steering device in response to the steering request value and the incident EM beam. Example process 3100 further includes an operation 3108 of providing a voltage command in response to the half-wave voltage profile, thereby configuring the EO active layer and steering the incident EM beam. Example operation 3108 includes providing a number of voltage stages across the EO active layer and providing a reset position where the power of the last electrode (or capacitor) of the first delay stage is approximately equal to and opposite in sign to the power of the first electrode (or capacitor) of the second delay stage. Example operation 3108 includes providing a voltage such that the last electrode of the first delay stage has a positive voltage approximately equal to the negative voltage of the first electrode of the second delay stage.

[0200] refer to Figure 32 The illustration depicts an example beam steering device including a thin beam steering device 3206. The example thin beam steering device 3206 can be any mode 2π phase shift device, including multiple active units with voltage reset, as described throughout this disclosure (e.g., in...). Figure 5-31 and / or Figure 44 As described in the relevant description. In some embodiments, the thin beam steering device 3206 may be in a castle configuration, castle pro configuration, chess configuration, chess pro configuration and / or alternating resistor electrode configuration. In some embodiments, the thin beam steering device 3206 may include one or more layers of thin beam steering devices. Figure 32Examples additionally include a convex lens portion 3202 and a concave lens portion 3204. In some embodiments, the incident EM beam enters the beam steering device at the convex lens portion 3202, passes through the thin beam steering device 3206, and exits from the surface of the concave lens portion 3204. In some embodiments, Figure 32 The embodiment is referred to as a zero-power meniscus lens embodiment because lens portions 3202 and 3204 operate together with the zero-power lens. The convex lens portion 3202 converges the redirected EM beam, and the concave lens portion 3204 amplifies the redirection of the EM beam while diverging the redirected EM beam (canceled by the convergence of the convex portion). Although Figure 32 Examples of this technology may utilize non-optical power lenses, but in some embodiments, one or more lens portions may alternatively (or additionally) include optical power lenses, such as zoom lenses (e.g., refer to Figures 54-56 and related descriptions of U.S. PCT application PCT / US19 / 57616). Based on calculations and modeling, it is believed that... Figure 32 and 33 The beam steering device described herein is capable of steering the incident EM beam to angles exceeding + / -20° and / or exceeding + / -30°.

[0201] refer to Figure 33 Another embodiment of the beam steering device is depicted, wherein the convex lens portion 3302 and the concave lens portion 3304 have separated components. In some embodiments, the separation of the lens portions 3302, 3304 can provide ease of manufacture, ease of cooling, and / or electrical connection with the thin beam steering device 3206, and / or the lens portions 3302, 3304 serve as separation for different devices and / or different operating configurations. In some embodiments, for example, the lens portions 3302, 3304 are integrated components (e.g., as...). Figure 32 When the lens portions are manufactured using the same process (e.g., in the middle) and / or by the same process, aberrations in the lens portions can be acceptablely offset. In some embodiments, manufacturing tolerances can be used to ensure acceptable performance of the lens portions 3302, 3304.

[0202] refer to Figure 34Figure 3400 illustrates an example system 3400 of this disclosure. The example system 3400 includes a beam steering device that utilizes multiple aspects of this disclosure, possessing wide-angle capability and maintaining steering efficiency. The specific implementation of Figure 3400 is provided for illustrative purposes, and the components of this example are not limited to those of this disclosure. The example system 3400 includes an incident beam 3412 to be directed to a selected location (e.g., a target region, a scan region during scanning, etc.). The example beam steering device 3400 may additionally or alternatively guide an optical path to a target location, observation location, etc., to receive the EM beam 3412 at a detection array, photon array, sensor, etc. (e.g., steering the received EM beam from the target location to a detector, rather than from an EM source to the target location, and / or combinations thereof—e.g., steering the EM beam from an EM source to the target location and receiving a return signal from the steered detector at the target location). The example system 3400 includes an initial steering layer 3402 capable of steering the EM beam 3412 to a selected angle. Example initial steering layer 3402 includes PBG, but may additionally or alternatively be any steering device, such as thin beam steering device, volume beam steering device, discrete steering device (e.g., capable of steering between multiple discrete steering angles), and / or continuous steering device (e.g., capable of steering at selected angles, arbitrary angles, and / or a large number of discrete angles that are sufficient to be considered “continuous” for the application and / or purpose of system 3400).

[0203] Example initial steering layer 3402 includes a polar birefringent grating, a birefringent prism, etc. In an example where the initial steering layer 3402 is a PBG, example system 3400 includes a PBG 3402 that deflects the incident beam 3412 by an offset angle, which can be selected based on the polarization of the incident beam 3412. Example system 100 further includes a first volume hologram 3404 and a second volume hologram 3406. Volume holograms 3404 and 3406 adjust (e.g., deflect) the angle of the incident EM beam 3412 for light received at a specific angle (e.g., an upper beam 3414 received at the first volume hologram 3404, or a lower beam 3416 received at the second volume hologram 3406) and pass it through light received at another angle (e.g., an upper beam 3414 received at the second volume hologram 3406, or a lower beam 3416 received at the first volume hologram 3406). Example system 3400 includes a thin beam steering device 3410 that provides continuous steering of the final transmitted beam (e.g., 3414 or 3416). The final steering device 3410 can be a discrete steering device, a continuous steering device, a thin beam steering device, and / or a volume beam steering device. For clarity, the examples herein describe the final steering device 3410. In some embodiments, the thin beam steering device 3410 provides certain advantages that may be useful depending on the specific system and application, such as providing a small axial span of the entire system 3400 to accommodate the final steering device 3410 and providing an enhanced incident area, thereby allowing a wide range of steering capabilities while still impacting the active steering portion of the thin beam steering device 3410.

[0204] It can be seen that the thin beam steering device 3410 steers relative to the incident angle entering the thin beam steering device 3410 and approximately increases the available angle of the incident light. For example, if the combination of the initial steering layer 3402 and (one or more) volumetric holograms 3404, 3406 can achieve + / -20 degrees (e.g., 20 degrees "up" or "left" for the upper path 3414 and 20 degrees "down" or "right" for the lower path 3416), then the thin beam steering device 3410, which can be steered by + / -20 degrees, causes the beam steering device 3400 to be steered by + / -40 degrees. Figure 34 The examples depict steering on a given axis (e.g., elevation, azimuth, or other selected axis). It can be seen that additional steering layers (e.g., one or more initial steering layers 3402, volumetric holograms 3404, 3406, thin and / or volumetric steering devices 3410, etc.) can be provided to steering on additional axes. In some embodiments, polarization management and the like can be provided between steering layers based on the response of devices in the layers (e.g., PBG, volumetric hologram, etc.) to the polarization of the incident beam 3412 as it asymptotically passes through the system 3400.

[0205] Figure 34 Specific examples offer numerous benefits. For instance, the use of PBG 3402 provides convenient application of the selected steering angle, such as by one or more volume holograms 3404, 3406, and efficient discrete steering to the extension angle by volume holograms 3404, 3406, thereby providing an enhancement to the baseline steering capability of system 3400 transmitted by thin beam steering device 3410. Figure 34 The example embodiments can be readily configured to provide a steering capability of + / -60 degrees with a total steering efficiency exceeding 90%. It will be noted that at a 60-degree steering angle, a flat launch surface (e.g., Figure 1 The geometric efficiency (or "cosine efficiency") of the depicted thin beam steering device 3410 (right-hand side) will be 0.5 (or COS 60°), which is a physical constraint for any beam steering device. Geometric efficiency can be increased by utilizing curved emitting surfaces, such as those illustrated in embodiments of this disclosure utilizing fishtail enhancers (or meniscus lenses), as in... Figure 32 As stated in the relevant public statements.

[0206] It will be understood that the phase delay series profile across the continuous steering element 3410 will be adjusted to account for the angle of incidence of light (e.g., from the angle of incidence of light). Figure 34 (Left side of the image), thereby achieving the desired steering angle and optical characteristics. For example, when the previous steering elements 3402, 3404, 3406 are active, the phase wavefront of the incident beam 3412 is not perpendicular to the thin beam steering device 3410. Therefore, the phase delay order (e.g., reference...) Figure 6 , 8 (30 and 46) can be adjusted to provide selected steering, phase profile, etc. of the transmitted beams 3414, 3416, and / or configure the received EM radiation (e.g., to compensate steering elements 3402, 3404, 3406 (e.g., they are downstream rather than upstream steering elements of the received EM radiation) to return to the EM detector receiving EM radiation 3412 - not shown).

[0207] The following description Figure 34Certain additional and / or optional features are provided, which are not limited to the embodiments contemplated in this disclosure. Example systems include continuous steering devices (e.g., thin beam steering devices, volume steering devices, etc.) that either replace all or a portion of the initial steering layer 3402, the first volume hologram 3404, and / or the second volume hologram 3406 at the location of the initial steering layer 3402. Additionally or alternatively, additional stages of the volume holograms 3404, 3406 may be provided, for example, by steering in additional directions to provide additional discrete steering prior to the continuous steering element 3410, etc. In some embodiments, one or more discrete steering elements 3402, 3404, 3406 may be provided downstream of the continuous steering element 3410.

[0208] refer to Figures 35-37 It depicts an example steering operation of the continuous steering element 3410 and / or the steering system 3400. Figures 35-37 The example steering operation depicted is illustrative steering data representing the continuous steering element 3410 of a thin and / or bulk steering device according to this disclosure. Figures 35-37 The steering capability described herein cooperates with the offset steering provided by other steering elements (e.g., 3402, 3404, 3406) illustrated herein. Example, and non-limiting, the continuous steering element 3410 is capable of steering angles exceeding 20 degrees while maintaining >90% efficiency (e.g., in…). Figure 37 In the example, the efficiency is 20 degrees at 92.3%. Figures 35-37 The described performance can be achieved at least by using a thin beam steering device that utilizes a half-wave voltage profile.

[0209] refer to Figure 38 An example thin beam steering device 110 with an associated fishtail intensifier 3802 (and / or meniscus lens) is depicted. In some embodiments, the fishtail intensifier 3802 is provided with zero optical power, or the fishtail intensifier 3802 maintains the convergence / divergence characteristics of the incident beam 3412. For clarity of this description, the incident beam 3412 is depicted as perpendicular to the thin beam steering device 3410, but it will be understood that the incident beam 3412 can be steered at an angle (e.g., as shown in the image). Figure 34 (As depicted in the text). The fishtail enhancer 3802 extends the steering capability of the thin beam steering device 3410. For example, the thin beam steering device 3410 according to embodiments of the present disclosure, such as the thin beam steering device 3410 utilizing a half-wave voltage profile, can achieve a steering angle of approximately 30 degrees with high efficiency (see reference). Figure 40An example thin beam steering device 3410 with an associated fishtail amplifier 3802 can be amplified from approximately 20 degrees (the capability of device 3410) to approximately 28.5 degrees without loss of steering efficiency. In some embodiments, the fishtail amplifier 3802 can also moderately reduce cosine loss, for example, by reducing the geometric angle between the emitting surface and the steering beam 3414. The optical power (e.g., convergence / divergence characteristics) of the fishtail amplifier 3802 can be manipulated using the thickness of the lens portion, the radius of curvature of the lens portion, and / or the refractive index of the lens material used for the meniscus lens. In some embodiments, the front portion (e.g., on the incident beam 3412 side), the rear portion (e.g., on the emitting beam 3414 side), or both can be implemented as a zoom lens (VFL). Lens action can be provided using an integrated lens body (e.g., as... Figure 32 , 38 (as depicted in 39), wherein lens portions are provided on each side of the thin beam steering device 3410 (e.g., as shown in 39). Figure 33(as depicted herein), and / or utilize VFLs on one or both lens sections. Any of these arrangements may be referred to herein as fishtail intensifier 3802 and / or meniscus lens. An example thin beam steering device 3410 with fishtail intensifier 3802 includes potassium tantalate columbite (KTN) as the active material (or EO material) of the thin beam steering device and is capable of deflection (steering) from the thin beam steering device up to + / -15-25 degrees, and for a steering beam with a wavelength of 1550 nm, partial deflection up to + / -30 degrees using fishtail intensifier 3802. It can be seen that the final steering capability of + / -30 degrees provides a total steering of up to + / -60 degrees for the system 3400 with full coverage, utilizing a pre-steering of up to + / -30 degrees (whether discrete or continuous). In some embodiments, such as when the incident beam 3412 can be provided with an orientation perpendicular to the thin beam steering device 3410, coverage of the intermediate steering zone can be performed by the thin beam steering device 3410 without assistance, and the available steering range can be further extended. Example embodiments include a thin beam steering device 3410 (possibly with an associated fishtail enhancer 3802) capable of steering + / -30 degrees, where the steering enhancement to each side is up to 30 degrees, thereby providing steering coverage up to full + / -90 degrees. Therefore, embodiments of this disclosure can provide full steering coverage with an arbitrary range limit of up to + / -90 degrees, which is the theoretical limit for a flat transmitting surface. It will be understood that cosine loss increases significantly at high steering angles, for example, 50% at 60 degrees and 100% at 90 degrees, so very high steering capabilities may be unnecessary for many applications. Therefore, the embodiments herein are capable of supporting any application that desires beam steering from a flat transmitting surface, with the only limitation being maintaining an acceptable cosine loss for a given application.

[0210] refer to Figure 39The example beam steering system 3900 includes multiple steering layers and a thin beam steering device 3410 with an associated fishtail intensifier 3802. The example beam steering system 3900 includes a first steering layer 3902 that selectively steering the incident beam 3412 in a first or second direction (e.g., steering the transmitted beam 3414 in the first direction and steering the transmitted beam 3416 in the second direction). The first steering layer 3902 can be a discrete steering element (e.g., a PBG) or a continuous steering element (e.g., a volume steering device, a thin steering device, etc.). The example beam steering system 3900 includes a first volume hologram 3904 and a second volume hologram 3906, the first volume hologram 3904 responding to a first incident angle to further increase the steering angle before approaching the thin beam steering device 3410, and the second volume hologram 3906 responding to a second incident angle to further increase the steering angle before approaching the thin beam steering device 3410. As will be seen, volume holograms 3904 and 3906 can be used as discrete steering angle enhancers to extend the steering range of the thin beam steering device 3410. In some embodiments, the incident beam 3412 can be provided without steering from the first steering layer 3902, for example, when the natural steering capability of the thin beam steering device 3410 is capable of steering to a target value under current operating conditions. In some embodiments, for example, when the first steering layer 3902 is a continuous steering element, the incident beam 3412 can be steered to an angle that is not one of the encoded angles of the volume holograms 3904 and 3906, wherein the incident beam 3412 will pass through the volume holograms 3904 and 3906 without steering angle enhancement from the volume holograms 3904 and 3906, for example to provide a small steering enhancement from the first steering layer 3902 to the thin beam steering device 3410. Figure 39 Examples include the optional fishtail enhancer 3802 depicted in the example configuration. Steering performed by the first steering layer 3902 can be controlled by manipulating the polarization of the incident beam 3412, controlling the phase delay order in the first steering layer 3902 (e.g., controlling the voltage profile of the steering device, which may be a thin-beam steering device and / or a volume beam steering device), etc. In some embodiments, the volume holograms 3904, 3906 can be omitted entirely, for example, where the first steering layer 3902 is capable of providing sufficient steering enhancement for the applied steering window without the discrete enhancement provided by the volume holograms(s) 3904, 3906. Figure 39The examples depict steering on a given axis, but which can be adjusted, as set forth throughout this disclosure, to also provide steering on a second axis. In the case of providing dual-axle steering, and for embodiments throughout this disclosure, the steering layer for each steering axis may be different (e.g., different sets and / or sequences of steering elements for each steering axis), and / or the steering capability for each steering axis may be different.

[0211] (For example, the thin-film scanner of the thin beam steering device 3410) acts as a variable blazed grating. Generally, the relationship between the incident angle and the diffraction angle (e.g., the trajectories of 3414 / 3416 entering and leaving the thin beam steering device 3410) can be approximated in Equation 6: Equation 6. Relationship between the incident angle and diffraction angle of a thin-film scanner In equation 6, It is the angle of incidence, and It is the deflection angle inside the grating. It is the incident wavenumber, and It is the refractive index of the incident medium. It is considered to be approximately 1 because it is assumed that the light enters from the air, but as those skilled in the art will understand, this parameter can be modified for other media. Defined as It is the deflection wavenumber, and It is the refractive index of the medium on the deflection side. q It is a diffraction order. It is the grating wavenumber, which is defined as in Equation 7: Equation 7. Definition of grating wavenumber In equation 7, It is the reset cycle.

[0212] In the case of a transmission deflector, when light exits from the grating material into the air, the light will be refracted. According to Snell's law (Equation 8): Equation 8, Snell's Law, determines the deflection angle based on the refractive index ratio (assuming it to be 1 for air). In equation 8, It is the deflection angle in the air. Therefore, the formula for the transmission grating will be approximated by Equation 9: Equation 9. Grating formula for transmission gratings Equation 9 shows that if the incident angle is chosen correctly, a wider deflection angle can be achieved for non-normal incident light. For normal (perpendicular) incident light, the deflection angle will be approximated by Equation 10: Equation 10. Deflection angle of the normally incident EM beam Note that if The wave may not appear in the far field. Therefore, for a given desired angle, it has been found that the preferred angle is... In the case of a perfectly blazed grating, the maximum intensity will be q = ±1. Therefore, for normal incidence, The thin beam steering device approximates a perfect blazed grating, and the deflection angle will be approximated by Equation 11: Equation 11. Deflection angle estimation of the normal incident EM beam For the maximum design angle, The preferred value is the minimum, and vice versa. For example, if the thin film is designed to deflect 1550nm normal incident light by ±20°... o Then the minimum reset period (Λ) will be approximately 4.5 μm.

[0213] In some embodiments, the steering device is configured such that only The first order survives; otherwise, the diffraction efficiency will be significantly reduced because a large portion of the light will be sent to other angles associated with higher-order diffraction, where... .

[0214] Generally, if For q = ±1, the final steering angle can be estimated using Equation 12: Equation 12. Deflection angle of non-perpendicularly incident EM beam For example, for The minimum angle is approximately 0°, and the widest angle will be... .for The minimum angle will be approximately 0. o And the widest angle will be Therefore, by providing for At the angle of incidence, light can be redirected. .

[0215] Parameter ± This is the sine of the maximum angle designed for a thin-film scanner (e.g., thin beam steering device 110, and / or associated fishtail intensifier 502) under normal-incident EM beam conditions. Therefore, except in atypical cases, This may be the smallest reset cycle that a thin-film scanner can provide. By using the half-wave voltage method with a fishtail intensifier, the normal incidence ( The light can be redirected up to ±30 degrees. o .if If the density of the order is maximized, then parameter This refers to the aspect ratio (e.g., the ratio of the thickness to the length of the active unit—see U.S. Application 16 / 999,815). Figure 26 The minimum reset period available when (and related descriptions) is still 1. In the example, if Then the light can be redirected approximately ±90 degrees. o .

[0216] In the example, where q = ±1, then .

[0217] The example beam steering system utilizes a thin beam steering device 110, such as a half-wave voltage-based device, without an associated fishtail intensifier. The example system can be easily configured for the thin beam steering device 110 portion to have up to ±20 o Its unassisted, highly efficient steering capability. Therefore, for this system: And it follows the final enhanced steering capability approximately ±43. o (For example, where q = ±1, then) ).

[0218] Therefore, enhanced steering is provided by utilizing the incident angle adjustment described in this paper, using a design to deflect the normal incident light. Thin-film scanners, for and The steering ability generated by the incident angle can be used to turn. .

[0219] The following describes the ability to turn. This is an example beam steering system, and it is not limited to any other aspect of this disclosure. The example beam steering system is related to... Figure 34 This is consistent with the example depicted. That example beam steering device includes components designed to deflect normally incident light up to [missing information - likely a beam direction]. 25.6 oThe example includes a thin beam steering device, a PBG, and two volumetric holograms inserted between the PBG and the thin beam steering device. In the example, in conjunction with the PBG, the volumetric holograms are configured to provide a normal incident beam as an incident beam at +25.6° or -25.6° to the thin beam steering device onto the PBG. For example, the PBG can be configured to provide a first or second angle to the incident beam, such as in response to the polarization of the incident beam, wherein the first angle matches a selected angle responded to by a first volumetric hologram, and wherein the second angle matches a selected angle responded to by a second volumetric hologram. In some embodiments, the PBG in the example can be replaced with a different type of steering element, such as a continuous steering element, which is controllable to provide one or more selected angles to the volumetric holograms. In the example, the PBG (or other guiding steering element) steering the incident beam at one or more selected angles, and the first volumetric hologram steering the light at +sin... -1 ( The second volume hologram directs the light towards -sin -1 ( The thin beam steering device is designed to redirect the normal incident beam to + / - sin -1 ( And the total steering capability of the beam steering system is + / - sin -1 ( ).

[0220] As described herein, embodiments of this disclosure include the steering of incident EM beams, wherein, under at least certain operating conditions, the EM beam incident on the final steering layer (e.g., a thin beam steering device) is not at a normal angle of incidence. Therefore, in some embodiments, due to the high angle of incidence, first-order reflections can be considered in the arrangement of the beam steering system and can be regarded as a loss of steering efficiency. Reference Figure 41 An illustrative operational diagram for a given beam steering device. Figure 41 As can be seen in the examples, low and usually insignificant reflections occur up to approximately θ. i 18 degrees. Figure 41 In the examples, even an incident angle of 30 degrees—sufficient to support many arrangements that can provide + / -60 degree diffraction—results in approximately 5% reflection loss. In many applications, given the beam-steering capability of the + / -60 degree diffraction-efficient beam-steering device of this disclosure, 5% reflection loss may be readily acceptable relative to the steering efficiency and capability of previously known devices. Figure 41 The examples are determined for typical scanner materials and EM beam profiles (e.g., wavelength, intensity, etc.). Those skilled in the art who benefit from this disclosure will readily obtain... Figure 41The data types described herein, and information typically available when conceiving a particular system, such as scanner materials, EM beam characteristics, surface conditions (e.g., availability and / or utilization of anti-reflective coatings, surface properties, etc.). It can be seen that for Figure 41 The explanatory data in the table, up to θ i The reflection loss only reaches 10% at approximately 60 degrees. This disclosure is not limited to a specific θ. i Values, including those exceeding 60 degrees, but note that a given beam steering device can arbitrarily achieve θ values ​​significantly below 60 degrees. i Values ​​(e.g., steering up to + / - 90 degrees). Therefore, this disclosure describes a beam steering system capable of steering to any capability while maintaining high steering efficiency for a wide range of applications. In some embodiments, at high θ... i The reflection loss occurring at values ​​of θ can still be acceptable, for example, at θ. i High values ​​can provide benefits beyond the reflection loss of the intended application for a given system, such as reducing the capability requirements of the thin beam steering device 3410, eliminating other components (e.g., fishtail enhancer 3802), shifting some steering tasks to high-efficiency components (e.g., volumetric holograms), manipulating heat generation and / or dissipation at selected locations and / or between components within the beam steering device, and so on.

[0221] The following describes several design considerations for volumetric holograms; these considerations are illustrative and not limiting. An example volumetric hologram directs the incident EM beam at an angle, such as... or The example volume hologram functions similarly to a diffraction grating with thickness and is made of a recording medium (e.g., photothermal glass) extending between planes at z=0 (e.g., one side of the active medium of the volume hologram) and z=Δ (e.g., the opposite side of the active medium of the volume hologram). Equation 13 illustrates the interference pattern of the volume hologram in the x, y, and z coordinates: Equation 13. Interference pattern of an example volume hologram In the example of equation 13, and It is the intensity of the reference and object beams, and and These are the object and the reference wave vector, respectively. In the example, the raster vector... The periodic sine mode is L = 2π / If the angle between the reference point and the object wave is Θ, then the grating period is... And the period will be approximately 1. In the example, parallel plates are recorded and form a thick diffraction grating—called a volume hologram. When the volume hologram is illuminated with a wave, the parallel planes of the grating are parallel only if the Bragg condition is satisfied. Only when the light is reflected will it be reflected; otherwise, the light will be transmitted.

[0222] The angle φ is the angle between the grating plane and the incident reference wave, and it is approximately half the angle between the reference wave and the object wave. For providing... Example volume holograms of incident angles and providing In the second example volume hologram, the angular distribution between the incident light and the parallel plane of the grating in the first and second volume holograms is preferably... and To meet the Prague conditions.

[0223] Table 3 summarizes example arrangements for directing light across selected wide angles as described. The angular capability achievable by a steering scanner arrangement may be limited by the total internal reflection angle of the second steering layer (e.g., a thin-beam scanning device, a continuous steering device, etc.), which will limit the impact angle on the second steering layer that can be used to enhance steering capability. Example embodiments may utilize PBG and / or volumetric holograms (VHs) to provide initial steering before the second steering layer, but initial steering may alternatively or additionally be provided by any other steering element, such as continuous or discrete steering devices, any type of thin-beam steering device, and / or steering devices combined with one or more VHs.

[0224] Table 3. Example layout of beam steering system with selected steering angle Target range for turning: Turning (Limited to total internal reflection angle) <![CDATA[Steering ±90 o (Due to total internal reflection limitations and cosine losses, embodiments that cannot be fully implemented are restricted)]]> <![CDATA[Steering ±60 o > <![CDATA[Steering ±40 o <!-- 42 -->]]> Types of scanners Any applicable type. The angle should not be too wide, otherwise total internal reflection may occur. Alternating resistor scanners, chess scanners, and / or scanners utilizing half-wave voltage profiling and / or fishtail enhancers. Example systems are located after a PBG and two VHs, or after any other type of discrete or continuous turning layer. Alternating resistor scanners, chess scanners, and / or scanners utilizing half-wave voltage profiling and / or fishtail enhancers. Example systems are located after a PBG and two VHs, or after any other type of discrete or continuous turning layer. Alternating resistor scanners, chess scanners, and / or scanners utilizing half-wave voltage profiles. Example systems are located after a PBG and two VHs, or after any other type of discrete or continuous steering layer. This steering capability can be achieved without a fishtail enhancer, but the fishtail enhancer can be utilized with other components to provide capability margin and / or utilize other components with lower capabilities. For normal incidence, the maximum deflection angle of the scanner <![CDATA[±30 o ]]> <![CDATA[±25.6 o ]]> <![CDATA[±20 o ]]> Bragg condition for volumetric holograms* (see footnote) Sin(15)=0.2588= 0.22= 0.173= VH1 exit angle* (see footnote) <![CDATA[30 o ]]> <![CDATA[25.6 o ]]> <![CDATA[20 o ]]> The angle between the grating and the incoming wave in VH1* (see footnote) <![CDATA[15 o ]]> <![CDATA[12.8 o ]]> <![CDATA[10 o ]]> VH2 exit angle* (see footnote) <![CDATA[-30 o ]]> <![CDATA[-25.6 o ]]> <![CDATA[-20 o ]]> The angle between the grating and the incoming wave in VH2* (see footnote) <![CDATA[-15 o ]]> <![CDATA[-12.8 o ]]> <![CDATA[-10 o ]]> .

[0225] refer to Figure 42 An example steering controller 4202 is schematically depicted as being configured to perform certain operations for steering EM beams (whether transmitted or received). For clarity, the steering controller 4202 is depicted as a single device, although aspects of the steering controller 4202 may be distributed across multiple devices, implemented in hardware and / or as instructions stored on a computer-readable medium, as sensors and / or actuators present in a system including the steering controller 4202, and / or implemented via network communication and / or remote processing capabilities.

[0226] The example steering controller 4202 includes multiple circuits configured to functionally perform certain operations of the steering controller 4202. (Reference) Figure 42Certain operations are described, but any operation, process, or technique throughout this disclosure can be implemented or performed by a controller such as steering controller 4202. Example steering controller 4202 can form part of any system, apparatus, device, or other embodiment disclosed throughout this disclosure. Not limited to any other aspect of this disclosure, including references to… Figure 42 The steering controller 4202 described in one or more aspects may exist in a system having one or more controllable devices, such as, but not limited to, continuous steering elements (e.g., thin beam steering devices and / or volume beam steering devices), PBGs (e.g., in combination with EM sources capable of providing selectable polarization) and / or volume holograms (e.g., controlling upstream devices to provide incident beams to the volume hologram at a selected incident angle, which includes an angle selected to activate and / or bypass active steering of the volume hologram).

[0227] Example steering controller 4202 includes steering request circuitry 4204, which interprets steering request values ​​4206 (e.g., directing the transmitted beam to a selected location and / or at one or more selected angles; and / or directing received EM radiation from a selected location and / or at one or more selected angles to an EM receiving device, such as a detector array, sensor, photon array, optical device, etc.). Example steering controller 4202 further includes steering configuration circuitry 4208, which determines a plurality of electro-optical command values ​​4210 (e.g., values ​​of the active layer of a thin beam steering device, and / or values ​​of the electrodes of a bulk steering device, thereby configuring the steering operation of the steering device, the phase delay order, and / or compensating optical characteristics to account for the incident angle θ of the EM radiation on the steering device to be steered). i An example system including a steering controller 4202 includes a continuous steering element (e.g., a thin beam steering device and / or a volume steering device) that responds to a plurality of EO command values ​​4210 to provide a selected steering operation (e.g., utilizing corresponding phase delay levels across the continuous steering element). The example steering controller 4202 further includes a steering configuration circuit 4208 that determines a polarization orientation 4212 (e.g., providing an EM source for an incident beam that will be steered from the PBG in the selected direction) in response to a steering request value 4206 (e.g., utilizing a steering mechanism associated with a steering target, etc.). The example system including the steering controller 4202 includes a selectively polarized electromagnetic source (not shown) that provides an incident beam to the PBG with a selected one of a first polarization corresponding to a first angle or a second polarization corresponding to a second angle, and wherein the selectively polarized electromagnetic source responds to the polarization orientation 4212.

[0228] refer to Figure 43An example process 4300 is schematically depicted for steering an EM beam at a wide angle (e.g., >+ / -30 degrees, >+ / -45 degrees, up to + / -60 degrees, and / or up to + / -90 degrees, and / or sufficiently far from 90 degrees, depending on the application, with the cosine loss of the steered beam within acceptable parameters). Example process 4300 includes operations 4302 (e.g., using a continuous steering element and / or a PBG in response to the polarization of the incident EM beam) to guide the incident electromagnetic (EM) beam to a selected angle of a first selected angle or a second selected angle, and operations 4304 (using a volumetric hologram in response to the selected angle of the first selected angle or the second selected angle) to increase the selected angle of the first selected angle or the second selected angle. Example process 4300 further includes operations 4306 (using a continuous steering element, such as a thin beam steering device and / or a volume beam steering device) to steering the incident EM beam to a final steering angle.

[0229] refer to Figure 44 An example process 4400 for steering an EM beam across a wide angle is schematically depicted. Example process 4400 includes operation 4402 to adjust the incident angle of the EM beam to be steering, thereby impacting a final steering device (e.g., a continuous steering element, a thin beam steering device, and / or a volume beam steering device). Example operation 4402 includes, but is not limited to, one or more of the following: adjusting the emission angle of the PBG (e.g., the PBG is emitted to a volume hologram, and / or directly to the final steering device); adjusting the emission angle of the initial steering device (e.g., a continuous steering element, a thin beam steering device, and / or a volume beam steering device, wherein the initial steering device emits to a volume hologram and / or directly to the final steering device); and / or enhancing the angle of an intermediate beam to form a beam impacting the final steering device (e.g., using a volume hologram to increase the steering angle of the intermediate beam before impacting the final steering device). Example process 4400 further includes operation 4404 to operate a final steering device to steer the EM beam according to a steering target value (e.g., commanding a continuous steering element, such as a thin beam steering device, a volume beam steering device, and / or a steering device associated with a fishtail intensifier). Example operation 4402 may include selecting an angle for the EM beam to impact on a second steering layer (e.g., a continuous steering element) and using a first steering layer (e.g., a discrete or continuous steering element) to steer the EM beam to impact the second steering layer at the selected angle. The initial impact angle on the second steering layer is limited by the total internal reflection angle of the second steering layer, such as the angle at which the incident EM beam will be rejected by the optical material of the second steering layer, and results in a minimum steering efficiency for the scanner 4500.

[0230] refer to Figure 45An example thin-beam scanner 4500 is depicted, which has a high-side electrode layer on a first side of the EO layer 10 and a low-side electrode layer 40 on a second side of the EO layer 10. The low-side electrode layer may be a continuous low-side electrode layer (e.g., as depicted), a discrete low-side electrode layer, or a combination thereof.

[0231] In the example scanner 4500, the high-side electrode layer is formed by alternating high-side electrodes 30 with resistors 4502. This alternating resistor embodiment of the high-side electrode layer provides a linear phase delay order along the EO layer 10, thereby improving steering efficiency, reducing steering EM beam loss, and improving the quality of the transmitted steering beam as a better matched representation of the EM source beam (and / or the received EM beam). For example, refer to… Figure 46 An illustrative phase delay series profile 4600 of a scanner 4500 using an arrangement of alternating resistors is depicted. The example phase delay series profile 4600 includes multiple linearly rising portions 4602—corresponding to the phase delay series within the EO layer 10 associated with the resistors—and multiple flattening portions 4604—corresponding to the phase delay series within the EO layer 10 associated with the electrodes 30. The linearization of the resistors 4502 impacts the portion of the EO layer 10 associated with the electrodes 30 such that the width of the flattening portions 4604 will be smaller than the width of the electrodes 30, thereby improving the overall fit of the wavefront relative to the original wavefront before turning. Figure 46 The examples depict a reset section 4606, such as the reset section used in a modulo 2πn steering device, as which the scanner 4500 can operate. In some embodiments, the scanner 4500 can operate as a half-wave voltage profiling device, for example having negative and positive voltage sections that reduce the magnitude of the maximum voltage in the scanner 4500 during steering operation. The example half-wave voltage profile descriptions are non-limiting and any half-wave voltage profile and / or any modulo 2πn or modulo πn configuration described herein can be utilized.

[0232] In some embodiments, the thin-beam scanner 4500 may include a reflective layer, such as a layer coupled to a lower-side electrode layer, and / or one of the electrode layers 30, 40 included as a reflective layer. In some embodiments, the scanner 4500 may be used as a thin-beam scanner according to any other embodiment set forth throughout this disclosure. Without being limited to any other aspect of this disclosure, the scanner 4500 may be used in conjunction with a fishtail enhancer (e.g., see reference 1). Figure 32 , 33 , 38, 39 and related descriptions); as a first steering layer, to adjust the impact angle on the second steering layer and / or to provide a selected angle to the volumetric hologram to reinforce the selected angle (e.g., reference). Figure 34 , 39(and related descriptions); as a second steering layer to provide final steering to the steering EM beam (e.g., refer to...) Figure 34 , 39 (and related descriptions); and / or combinations thereof.

[0233] In some embodiments, the thin-beam scanner 4500 can be used in any system, apparatus, steering device, and / or scanner described herein, including any embodiment utilizing a discrete steering device, a continuous steering device, and / or a thin-beam steering device. In some embodiments, the thin-beam scanner 4500 can be used in any process or operation described herein, and / or may include, operatively coupled to, and / or responsive to any controller, circuitry, processor, control device, etc., described herein.

[0234] refer to Figure 47 This shows an illustrative description of the far-field pattern of the scanner 4500, consistent with the embodiment depicted in 45. Figure 47 The examples are illustrative and depict typical capabilities of + / -30 degrees for an EM beam with a wavelength of 1.06 μm (e.g., a total steering capability of 60 degrees on the selected steering axis) based on simulations and experience.

[0235] The methods and systems described herein can be deployed, in part or in whole, via a machine having a computer, computing device, processor, circuitry, and / or server, which executes computer-readable instructions, program code, directives, and / or includes hardware configured to functionally perform one or more operations of the methods and systems described herein. The terms computer, computing device, processor, circuitry, and / or server (“computing device”) as used herein should be understood broadly.

[0236] Example computing devices include any type of computer capable of accessing instructions stored in communication with it, such as instructions stored on a non-transitory computer-readable medium, so that the computer performs operations of the computing device when executing the instructions. In some embodiments, such instructions themselves comprise the computing device. Additionally or alternatively, a computing device may be a separate hardware device, one or more computing resources distributed across hardware devices, and / or may include aspects such as: logic circuitry, embedded circuitry, sensors, actuators, input and / or output devices, network and / or communication resources, any type of memory resources, any type of processing resources, and / or hardware devices configured to functionally perform one or more operations of the systems and methods described herein in response to determined conditions.

[0237] Network and / or communication resources, without limitation, include local area networks, wide area networks, wireless networks, the Internet, or any other known communication resources and protocols. Example and non-limiting hardware and / or computing devices, without limitation, include general-purpose computers, servers, embedded computers, mobile devices, virtual machines, and / or emulated computing devices. A computing device can be a distributed resource included as an aspect of several devices, or as an interoperable set of resources performing the functions of the computing device, such that the distributed resources operate together to perform the operations of the computing device. In some embodiments, each computing device may be on separate hardware, and / or one or more hardware devices may include aspects of more than one computing device, for example, as separate executable instructions stored on the device, and / or as logically partitioned aspects of a set of executable instructions, some of which include part of one of the first computing devices, and some of which include part of another computing device.

[0238] The computing device can be a server, client, network infrastructure, mobile computing platform, fixed computing platform, or part of another computing platform. The processor can be any kind of computing or processing device capable of executing program instructions, code, binary instructions, etc. The processor can be or includes signal processors, digital processors, embedded processors, microprocessors, or any variants such as coprocessors (mathematical coprocessors, graphics coprocessors, communication coprocessors, etc.) that can directly or indirectly facilitate the execution of program code or program instructions stored thereon. Furthermore, the processor can enable the execution of multiple programs, threads, and code. Threads can be executed concurrently to enhance processor performance and facilitate simultaneous operation of applications. By means of implementation, the methods, program code, program instructions, etc., described herein can be implemented in one or more threads. The thread can spawn other threads that have been assigned an associated priority; the processor can execute these threads based on priority or any other order of instructions provided in the program code. The processor can include memory that stores the methods, code, instructions, and programs as described herein and elsewhere. The processor can access storage media through an interface that can store the methods, code, and instructions as described herein and elsewhere. The storage medium associated with the processor for storing methods, programs, code, program instructions or other types of instructions that can be executed by a computing or processing device may include, but is not limited to, one or more of CD-ROM, DVD, memory, hard disk, flash drive, RAM, ROM, cache, etc.

[0239] The processor may include one or more cores that can enhance the speed and performance of a multiprocessor. In embodiments, this process may be a dual-core processor, a quad-core processor, or other chip-level multiprocessors that combine two or more independent cores (called dies).

[0240] The methods and systems described herein can be deployed, in part or in whole, on machines that execute computer-readable instructions on servers, clients, firewalls, gateways, hubs, routers, or other such computer and / or network hardware. The computer-readable instructions can be associated with a server, which may include file servers, print servers, domain servers, internet servers, intranet servers, and other variations such as secondary servers, host servers, distributed servers, etc. A server may include one or more of the following: memory, processor, computer-readable transient and / or non-transitory media, storage media, ports (physical and virtual), communication devices, and interfaces capable of accessing other servers, clients, machines, and devices via wired or wireless media. The methods, programs, or code described herein and elsewhere can be executed by the server. Furthermore, other devices required to perform the methods described in this application can be considered part of the infrastructure associated with the server.

[0241] The server can provide interfaces to other devices, which, without limitation, include clients, other servers, printers, database servers, print servers, file servers, communication servers, distributed servers, etc. Additionally, this coupling and / or connection can facilitate remote execution of instructions across a network. Networking of some or all of these devices can facilitate parallel processing of program code, instructions, and / or programs at one or more locations without departing from the scope of this disclosure. Furthermore, all devices attached to the server via the interface can include at least one storage medium capable of storing methods, program code, instructions, and / or programs. A central repository can provide program instructions to be executed on different devices. In this implementation, a remote repository can act as a storage medium for methods, program code, instructions, and / or programs.

[0242] The methods, program code, instructions, and / or programs described herein may be associated with a client, which may include file clients, print clients, domain clients, internet clients, intranet clients, and other variations such as auxiliary clients, host clients, distributed clients, etc. A client may include one or more of the following: memory, processor, computer-readable transient and / or non-transitory media, storage media, ports (physical and virtual), communication devices, and interfaces capable of accessing other clients, servers, machines, and devices via wired or wireless media, etc. The methods, program code, instructions, and / or programs described herein and elsewhere may be executed by the client. Furthermore, other devices required to perform the methods described in this application may be considered part of the infrastructure associated with the client.

[0243] The client can provide interfaces to other devices, which, without limitation, include servers, other clients, printers, database servers, print servers, file servers, communication servers, distributed servers, etc. Additionally, this coupling and / or connection can facilitate the remote execution of methods, program code, instructions, and / or programs across a network. Networking of some or all of these devices can facilitate parallel processing of methods, program code, instructions, and / or programs at one or more locations without departing from the scope of this disclosure. Furthermore, all devices attached to the client via the interface can include at least one storage medium capable of storing methods, program code, instructions, and / or programs. A central repository can provide program instructions to be executed on different devices. In this implementation, a remote repository can act as a storage medium for methods, program code, instructions, and / or programs.

[0244] The methods and systems described herein can be deployed, in part or in whole, through a network infrastructure. The network infrastructure may include elements such as computing devices, servers, routers, hubs, firewalls, clients, personal computers, communication devices, routing devices, and other active and passive devices, modules, and / or components as known in the art. Among other components, one or more computing and / or non-computing devices associated with the network infrastructure may include storage media such as flash memory, buffers, stacks, RAM, ROM, etc. The methods, program code, instructions, and / or programs described herein and elsewhere may be executed by one or more network infrastructure elements.

[0245] The methods, program code, instructions, and / or programs described herein and elsewhere can be implemented on a cellular network with multiple cells. The cellular network can be a frequency division multiple access (FDMA) network or a code division multiple access (CDMA) network. A cellular network can include mobile devices, cell sites, base stations, repeaters, antennas, towers, etc.

[0246] The methods, program code, instructions, and / or programs described herein and elsewhere can be implemented on or through mobile devices. Mobile devices may include navigation devices, cellular phones, mobile phones, mobile personal digital assistants, laptops, handheld computers, netbooks, pagers, e-book readers, music players, etc. Among other components, these devices may include storage media such as flash memory, buffers, RAM, ROM, and one or more computing devices. The computing device associated with the mobile device may be enabled to execute the methods, program code, instructions, and / or programs stored thereon. Alternatively, the mobile device may be configured to cooperate with other devices to execute instructions. The mobile device may communicate with a base station, which interfaces with a server and is configured to execute methods, program code, instructions, and / or programs. The mobile device may communicate on a peer-to-peer network, mesh network, or other communication network. The methods, program code, instructions, and / or programs may be stored on a storage medium associated with a server and executed by a computing device embedded within the server. The base station may include computing devices and storage media. The storage device may store methods, program code, instructions, and / or programs executed by the computing device associated with the base station.

[0247] The methods, program code, instructions, and / or programs may be stored and / or accessed on machine-readable transient and / or non-transient media, which may include: computer components, devices, and recording media that retain digital data for computation over a period of time; semiconductor storage devices known as random access memory (RAM); mass storage devices, typically used for more permanent storage, such as optical discs; magnetic storage forms such as hard disks, magnetic tapes, magnetic drums, cards, and other types; processor registers, cache memory, volatile memory, and non-volatile memory; optical storage devices such as CDs and DVDs; removable media such as flash memory (e.g., USB sticks or keys), floppy disks, magnetic tapes, paper tapes, punched cards, stand-alone RAM disks, Zip drives, removable mass storage devices, offline storage, etc.; other computer memories such as dynamic memory, static memory, read / write storage devices, variable storage devices, read-only storage devices, random access memory, sequential access memory, location-addressable, file-addressable, content-addressable storage devices, network-attached storage devices, storage area networks, barcodes, magnetic ink, etc.

[0248] Some of the operations described herein include interpreting, receiving, and / or determining one or more values, parameters, inputs, data, or other information (“receiving data”). Operations for receiving data, without limitation, include: receiving data via user input; receiving data over any type of network; reading data values ​​from a memory location in communication with the receiving device; using default values ​​as received data values; estimating, calculating, or deriving data values ​​based on other information available to the receiving device; and / or updating any of these in response to subsequently received data values. In some embodiments, a data value may be received by a first operation as part of a received data value and later updated by a second operation. For example, a first receiving operation may be performed when communication is down, intermittent, or interrupted, and an updated receiving operation may be performed when communication is restored.

[0249] This document provides certain logical groupings of operations—such as the methods or procedures of this disclosure—to illustrate aspects of this disclosure. The operations described herein are illustrated and / or depicted schematically, and operations can be combined, divided, reordered, added, or removed in a manner consistent with the disclosure herein. It should be understood that the context in which the operations are described may require ordering one or more operations, and / or the order of operations may be explicitly disclosed; however, the order of operations should be interpreted broadly, where this document specifically contemplates any equivalent grouping of operations that provides equivalent results for the operations. For example, if a value is used in a step of an operation, in some contexts (e.g., where the time delay of the data used to achieve a certain effect is important), it may be necessary to determine the value before that step of the operation, but in other contexts (e.g., where using a value from a previous execution cycle of the operation would be sufficient for those purposes), it may not be necessary to determine the value before that step of the operation. Therefore, in some embodiments, the ordering and grouping of operations as described herein are explicitly contemplated, and in some embodiments, reordering, subdivision, and / or different groupings of operations are explicitly contemplated herein.

[0250] The methods and systems described herein can transform physical and / or intangible items from one state to another. The methods and systems described herein can also transform data representing physical and / or intangible items from one state to another.

[0251] The methods and / or processes described above, and their steps, may be implemented in hardware, program code, instructions, and / or programs, or any combination of hardware and methods, program code, instructions, and / or programs, suitable for a particular application. Hardware may include dedicated computing devices or specific computing devices, specific aspects or components of specific computing devices, and / or arrangements of hardware components and / or logic circuitry to perform one or more operations of the methods and / or systems. The processes may be implemented in one or more microprocessors, microcontrollers, embedded microcontrollers, programmable digital signal processors, or other programmable devices together with internal and / or external memory. The processes may also be embodied in, or instead of, application-specific integrated circuits, programmable gate arrays, programmable array logic, or any other device or combination of devices that can be configured to process electronic signals. It will be further appreciated that one or more processes may be implemented as computer-executable code capable of executing on a machine-readable medium.

[0252] Computer-executable code can be created using structured programming languages ​​(such as C), object-oriented programming languages ​​(such as C++), or any other high- or low-level programming languages ​​(including assembly language, hardware description languages, and database programming languages ​​and techniques), and can be stored, compiled, or interpreted to run on one of the aforementioned devices and processors, heterogeneous combinations of processor architectures, or combinations of different hardware and computer-readable instructions, or any other machine capable of executing program instructions.

[0253] Therefore, in one aspect, each of the methods described above and combinations thereof may be embodied in computer-executable code, which, when executed on one or more computing devices, performs its steps. In another aspect, the method may be embodied in a system that performs its steps and may be distributed across devices in various ways, or all functionality may be integrated into a dedicated standalone device or other hardware. In yet another aspect, means for performing the steps associated with the above-described processes may include any of the aforementioned hardware and / or computer-readable instructions. All such permutations and combinations are intended to fall within the scope of this disclosure.

[0254] While this disclosure has been shown and described in detail with reference to specific embodiments, various modifications and improvements thereto will become apparent to those skilled in the art. Therefore, the spirit and scope of this disclosure are not limited by the foregoing examples, but should be understood in the broadest sense permitted by law.

Claims

1. A system comprising: The high-side electrode layer includes: A first plurality of electrical components, which alternate with and are electrically coupled to adjacent electrical components in a second plurality of electrical components; One of the first or second plurality of electrical components includes a plurality of discrete electrodes; and The first plurality of electrical components or another of the second plurality of electrical components includes a plurality of resistors; Low-side electrode layer; and An electro-optic (EO) layer includes at least partially inserted EO active material between a high-side electrode layer and a low-side electrode layer, thereby forming multiple active units of the EO layer.

2. The system of claim 1, wherein the first termination electrical component at the first end of the high-side electrode layer comprises the first of the plurality of discrete electrodes.

3. The system of claim 2, wherein the second terminal electrical component at the second end of the high-side electrode layer comprises the second of the plurality of discrete electrodes.

4. The system according to claim 1, further comprising: The controller includes: The steering request circuit is configured to interpret steering request values; A steering configuration circuit is configured to determine a plurality of EO command values ​​in response to a steering request value, wherein the plurality of EO command values ​​correspond to a half-wave voltage profile; and The steering implementation circuit is configured to provide multiple voltage commands in response to the multiple EO command values.

5. The system according to claim 4, wherein, The half-wave voltage profile includes: The first voltage value of the last electrode of the first phase delay stage, wherein the last electrode includes one of the plurality of discrete electrodes; The second voltage value of the first electrode of the second phase delay stage, wherein the first electrode includes one of the plurality of discrete electrodes; and The first voltage value and the second voltage value have opposite signs.

6. The system according to claim 5, wherein, The first voltage value and the second voltage value have equal magnitudes.

7. The system according to claim 5, wherein, The first voltage value and the second voltage value have a voltage difference within the noise voltage value corresponding to a π phase delay.

8. The system according to claim 5, wherein, The first voltage value and the second voltage value have a voltage difference corresponding to an nπ phase delay, where n includes integer values ​​between 1 and 4, including 1 and 4.

9. The system according to claim 5, wherein, The opposite signs of the first and second voltage values ​​are determined relative to the nominal voltage.

10. The system according to claim 5, wherein, The first and second voltage values ​​are symmetrically distributed about the 0π phase shift.

11. The system according to claim 1, wherein, The lower-side electrode layer includes a second plurality of discrete electrodes.

12. The system according to claim 1, wherein, The lower-side electrode layer includes continuous electrodes.

13. The system according to claim 1, wherein, The lower-side electrode layer includes a reflective layer.

14. An apparatus comprising: Thin beam steering device, including: The high-side electrode layer includes: A first plurality of electrical components, which alternate with and are electrically coupled to adjacent electrical components in a second plurality of electrical components; One of the first or second plurality of electrical components includes a plurality of discrete electrodes; and The first plurality of electrical components or another of the second plurality of electrical components includes a plurality of resistors; Low-side electrode layer; and An electro-optic (EO) layer includes an EO active material that is at least partially inserted between a high-side electrode layer and a low-side electrode layer, thereby forming a plurality of active units of the EO layer; The convex lens portion is optically coupled to the thin beam steering device on the first side of the thin beam steering device; and The concave lens portion is optically coupled to the thin beam steering device on the second side of the thin beam steering device.

15. The apparatus of claim 1, further comprising: The controller includes: The steering request circuit is configured to interpret steering request values; A steering configuration circuit is configured to determine a plurality of EO command values ​​in response to a steering request value, wherein the plurality of EO command values ​​correspond to a half-wave voltage profile; and The steering implementation circuit is configured to provide multiple voltage commands in response to the multiple EO command values.

16. The apparatus according to claim 15, wherein, The half-wave voltage profile includes: The first voltage value of the last electrode of the first phase delay stage, wherein the last electrode includes one of the plurality of discrete electrodes; The second voltage value of the first electrode of the second phase delay stage, wherein the first electrode includes one of the plurality of discrete electrodes; and The first voltage value and the second voltage value have opposite signs.

17. The apparatus according to claim 16, wherein, The first voltage value and the second voltage value have equal magnitudes.

18. The apparatus according to claim 16, wherein, The first voltage value and the second voltage value have a voltage difference within the noise voltage value corresponding to a π phase delay.

19. The apparatus according to claim 16, wherein, The first voltage value and the second voltage value have a voltage difference corresponding to an nπ phase delay, where n includes integer values ​​between 1 and 4, including 1 and 4.

20. The apparatus according to claim 16, wherein, The opposite signs of the first and second voltage values ​​are determined relative to the nominal voltage.

21. The apparatus according to claim 16, wherein, The first and second voltage values ​​are symmetrically distributed about the 0π phase shift.

22. The apparatus according to claim 14, wherein, The lower-side electrode layer includes a second plurality of discrete electrodes.

23. The apparatus according to claim 14, wherein, The lower-side electrode layer includes continuous electrodes.

24. The apparatus according to claim 14, wherein, The lower-side electrode layer includes a reflective layer.

25. The apparatus according to claim 14, wherein, The device is capable of redirecting the incident electromagnetic beam by at least + / - 20 degrees on one axis.

26. The apparatus according to claim 14, wherein, The device is capable of redirecting the incident electromagnetic beam by at least + / -30 degrees on one axis.

27. The apparatus according to claim 14, wherein, The convex lens portion and the concave lens portion are each formed on separate substrates.

28. The apparatus according to claim 27, wherein, The individual substrates are formed using manufacturing techniques with similar tolerance values.

29. The apparatus according to claim 14, wherein, The convex lens portion and the concave lens portion share a common substrate.

30. A system comprising: A polarized birefringent grating (PBG) is inserted between an electromagnetic (EM) source and a first volume hologram. A first volume hologram inserted between the PBG and the second volume hologram; A second volume hologram is inserted between the first volume hologram and the continuous steering element; The continuous steering element includes: The high-side electrode layer includes: A first plurality of electrical components, which alternate with and are electrically coupled to adjacent electrical components in a second plurality of electrical components; One of the first or second plurality of electrical components includes a plurality of discrete electrodes; and The first plurality of electrical components or another of the second plurality of electrical components includes a plurality of resistors; Low-side electrode layer; and An electro-optic (EO) layer includes an EO active material that is at least partially inserted between a high-side electrode layer and a low-side electrode layer, thereby forming a plurality of active units of the EO layer; The PBG responds to the polarization of the incident beam from the EM source to selectively turn the incident beam to one of a first selected angle or a second selected angle. The first volumetric hologram responds to a first selected angle of the incident beam to increase the steering angle of the incident beam in the direction of the first selected angle; and The second volume hologram responds to a second selected angle of the incident beam to increase the steering angle in the direction of the second selected angle.

31. The system of claim 30, further comprising: The controller includes: The steering request circuit is configured to interpret steering request values; A steering configuration circuit is configured to determine a plurality of EO command values ​​in response to a steering request value, wherein said plurality of EO command values ​​correspond to a half-wave voltage profile; and The steering implementation circuit is configured to provide multiple voltage commands in response to the multiple EO command values.

32. The system according to claim 31, wherein, The half-wave voltage profile includes: The first voltage value of the last electrode of the first phase delay stage, wherein the last electrode includes one of the plurality of discrete electrodes; The second voltage value of the first electrode of the second phase delay stage, wherein the first electrode includes one of the plurality of discrete electrodes; and The first voltage value and the second voltage value have opposite signs.

33. The system according to claim 32, wherein, The first voltage value and the second voltage value have equal magnitudes.

34. The system according to claim 32, wherein, The first voltage value and the second voltage value have a voltage difference corresponding to an nπ phase delay, where n includes integer values ​​between 1 and 4, including 1 and 4.

35. The system according to claim 30, wherein, The lower-side electrode layer includes a second plurality of discrete electrodes.

36. The system according to claim 30, wherein, The lower-side electrode layer includes continuous electrodes.

37. The system according to claim 30, wherein, The lower-side electrode layer includes a reflective layer.

38. The system of claim 30, further comprising: The convex lens portion is optically coupled to the continuous steering element on the first side of the continuous steering element; and The concave lens portion is optically coupled to the continuous steering element on the second side of the continuous steering element.

39. The system according to claim 38, wherein, The thin beam steering device and associated fishtail enhancer include a combined steering capability of more than 25 degrees.

40. The system according to claim 38, wherein, The system includes a final steering capability of more than 30 degrees.

41. The system according to claim 38, wherein, The system includes a final steering capability of more than 45 degrees.

42. The system according to claim 38, wherein, The system includes a final steering capability between 45 degrees and 60 degrees, including both 45 degrees and 60 degrees.

43. The system according to claim 38, wherein, The system includes a final steering capability of more than 60 degrees.

44. The system of claim 30, further comprising: Steering controller, including: The steering request circuit is configured to interpret steering request values; The steering configuration circuit is configured to determine multiple electro-optical command values ​​in response to a steering request value; and The continuous steering element responds to the plurality of EO command values ​​to provide a corresponding number of phase delay levels across the continuous steering element.

45. The system of claim 44, further comprising: The steering configuration circuit is further configured to determine the polarization orientation in response to the steering request value; and A selectively polarized electromagnetic source is configured to provide an incident beam to a PBG with a selected one of a first polarization corresponding to a first selected angle or a second polarization corresponding to a second selected angle, wherein the selectively polarized electromagnetic source responds to polarization orientation.

46. ​​An optical steering device, comprising: The first steering layer is configured to adjust the incident angle of the electromagnetic (EM) beam on the second steering layer, and the first steering layer is inserted between the EM source and the second steering layer; The second turning layer includes: The high-side electrode layer includes: A first plurality of electrical components, which alternate with and are electrically coupled to adjacent electrical components in a second plurality of electrical components; One of the first or second plurality of electrical components includes a plurality of discrete electrodes; and The first plurality of electrical components or another of the second plurality of electrical components includes a plurality of resistors; Low-side electrode layer; and An electro-optic (EO) layer includes at least partially inserted EO active material between a high-side electrode layer and a low-side electrode layer, thereby forming multiple active units of the EO layer.

47. The optical steering device according to claim 46, wherein, The first steering layer includes discrete steering elements configured to steer the incident EM beam at an angle selected from either a first angle or a second angle.

48. The optical steering device according to claim 47, further comprising: A first volume hologram is inserted between a first steering layer and a second steering layer. The first volume hologram is configured to increase a selected first angle to an increased first angle. and A second volumetric hologram is inserted between the first and second steering layers, and the second volumetric hologram is configured to increase the selected second angle to an increased second angle.

49. The optical steering device according to claim 48, wherein, The first steering layer includes a polarized birefringent grating.

50. The optical steering device according to claim 49, wherein, The EM source further includes a selectively polarized EM source configured to provide an incident EM beam to the first steering layer with either a first polarization corresponding to a first angle or a second polarization corresponding to a second angle.

51. The optical steering device according to claim 46, wherein, The first steering layer includes a thin beam steering device.

52. The optical steering device according to claim 51, further comprising: A first volume hologram is inserted between a first steering layer and a second steering layer. The first volume hologram is configured to increase a selected first angle to an increased first angle. and A second volumetric hologram is inserted between the first and second steering layers, and the second volumetric hologram is configured to increase the selected second angle to an increased second angle.

53. The optical steering device according to claim 51, wherein, The first steering layer utilizes a half-wave voltage profile.

54. The optical steering device according to claim 46, wherein, The second steering layer utilizes a half-wave voltage profile.

55. The optical steering device according to claim 46, further comprising: Steering controller, including: The steering request circuit is configured to interpret steering request values; The steering configuration circuit is configured to determine multiple EO command values ​​in response to a steering request value; and The second steering layer responds to the plurality of EO command values ​​to provide a corresponding number of phase delay levels across the second steering layer.

56. The optical steering device according to claim 51, further comprising: Steering controller, including: The steering request circuit is configured to interpret steering request values; The steering configuration circuit is configured to determine multiple EO command values ​​in response to a steering request value; The first steering layer responds to at least a first portion of the plurality of EO command values ​​to provide a corresponding phase delay order across the thin-beam steering device; and The second steering layer responds to at least a second portion of the plurality of EO command values ​​to provide a corresponding number of phase delay levels across the second steering layer.

57. The optical steering device according to claim 46, wherein, The second steering layer further includes a fishtail enhancer associated with the high-side electrode layer, the low-side electrode layer, and the EO layer.

58. The optical steering device according to claim 51, wherein, Thin beam steering equipment includes at least one device selected from the following: castle layout device; castle pro layout device; chess layout device; chess pro layout device; alternating resistor layout device; or half-wave voltage profile device.

Images