Configuration state recognition method, semiconductor device, and interlock control method thereof

Abstract

This disclosure provides a method for identifying configuration status, a semiconductor device, and an interlock control method thereof. The method for identifying configuration status includes: collecting hardware configuration information and software configuration information of each functional module; the hardware configuration information includes a hardware function identifier and a hardware configuration identifier; the software configuration information includes a software function identifier and a software configuration identifier; obtaining reference configuration information; the reference configuration information includes a hardware function reference identifier, a hardware configuration reference identifier, a software function reference identifier, and a software configuration reference identifier; comparing the hardware configuration information and software configuration information with the reference configuration information; and outputting a configuration status identification result based on the comparison result. This embodiment can identify whether the hardware configuration and software configuration in a target device are consistent, and can directly output the actual functional configuration in the target device.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and in particular to a method for identifying configuration status, a semiconductor device, and an interlock control method thereof. Background Technology

[0002] In semiconductor manufacturing equipment (or simply semiconductor equipment), a typical semiconductor manufacturing machine consists of multiple chambers and a transfer platform. Each chamber can perform different functions through the combination of different functional modules. Since the entire semiconductor manufacturing equipment can be composed of different functional modules, the manufacturing process can be carried out using a modular manufacturing approach. First, each functional module is produced and tested. Then, these modules are assembled according to the customer's required functions to form the complete product.

[0003] Since the operation of semiconductor manufacturing equipment requires a software control system, the software control system of semiconductor manufacturing equipment often needs to be manually configured by engineers for a complete piece of equipment according to different customer needs. The software system does not automatically configure as different hardware modules are assembled. Therefore, the problem of mismatch between software configuration and hardware configuration may occur. Summary of the Invention

[0004] This disclosure provides a method for identifying configuration status, a semiconductor device, and an interlock control method thereof, which can identify whether the hardware configuration and software configuration in the target device are consistent, and can directly output the actual functional configuration in the target device.

[0005] In a first aspect, embodiments of this disclosure provide a method for identifying a configuration state, used to identify the configuration state of a target device, the target device including at least one functional module, each of the functional modules being used to implement a preset function, the identification method including:

[0006] The hardware configuration information of each functional module is collected, and the software configuration information of the functional software configured for the functional module is also collected; wherein, the hardware configuration information includes the hardware function identifier corresponding to the functional module and the hardware configuration identifier corresponding to the configuration type of the functional module; the software configuration information includes the software function identifier corresponding to the functional software configured for the functional module and the software configuration identifier corresponding to the configuration type of the functional software.

[0007] Obtain pre-set reference configuration information for each of the aforementioned functional modules and the aforementioned functional software; the reference configuration information is the functional configuration identification information of the mutually matching hardware and software of the target device; the reference configuration information includes: hardware functional reference identifier, hardware configuration reference identifier, software functional reference identifier, and software configuration reference identifier;

[0008] The hardware configuration information and the software configuration information are compared with the reference configuration information;

[0009] The corresponding configuration status identification result is output based on the comparison result; the configuration status identification result includes the current actual software and hardware function configuration information of the target device and the software and hardware consistency information of the target device.

[0010] Secondly, embodiments of this disclosure provide an interlock control method for a semiconductor device. The semiconductor device includes multiple functional modules and multiple interlock circuits. Each functional module corresponds to one interlock circuit. Each interlock circuit includes at least one selection sub-circuit. Each selection sub-circuit corresponds to a configuration state of the functional module. The interlock control method includes:

[0011] The functional configuration identification results corresponding to each functional module are obtained according to the configuration status identification method described in the first aspect;

[0012] The actual hardware and software function configuration information of the target device is determined based on the configuration identification result.

[0013] The selection sub-circuit in the interlock circuit that corresponds to the software and hardware function configuration information is selected to operate.

[0014] Thirdly, embodiments of this disclosure provide a semiconductor device, including: multiple functional modules, multiple interlocking circuits, and a controller, each of the functional modules corresponding to one of the interlocking circuits, each interlocking circuit including at least one selection sub-circuit, each of the selection sub-circuits corresponding to a configuration state of the functional module;

[0015] The controller is configured to implement the interlock control method described in the second aspect.

[0016] This embodiment of the disclosure collects hardware configuration information and software configuration information of each functional module; the hardware configuration information includes hardware function identifier and hardware configuration identifier; the software configuration information includes software function identifier and software configuration identifier; it obtains pre-set reference configuration information; the reference configuration information includes: hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier; it compares the hardware configuration information and software configuration information with the reference configuration information; and it outputs a corresponding configuration status identification result based on the comparison result; the configuration status identification result includes the current actual hardware and software function configuration information of the target device and the hardware and software consistency information of the target device. Through this embodiment, it is possible to identify whether the hardware configuration and software configuration in the target device are consistent, and the actual functional configuration in the target device can be directly output. Attached Figure Description

[0017] In the accompanying drawings of the embodiments disclosed herein:

[0018] Figure 1 A flowchart illustrating the configuration status identification method provided in this embodiment of the disclosure;

[0019] Figure 2 This is a schematic diagram illustrating an embodiment of obtaining hardware function identifiers and hardware configuration identifiers based on a hardware configuration signal input port, as provided in this disclosure.

[0020] Figure 3 A schematic diagram illustrating an embodiment of obtaining software function identifiers and software configuration identifiers based on a software configuration signal input port, as provided in this disclosure.

[0021] Figure 4 A schematic diagram illustrating an embodiment of obtaining software function identifiers and software configuration identifiers based on a software configuration signal input port, as provided in this disclosure.

[0022] Figure 5 A schematic diagram of the identifier comparison scheme provided in the embodiments of this disclosure;

[0023] Figure 6 A flowchart of an interlock control method for a semiconductor device provided in an embodiment of this disclosure;

[0024] Figure 7 A schematic diagram of the interlocking scheme provided for related technologies;

[0025] Figure 8 A schematic diagram of the interlock logic circuit provided in the embodiments of this disclosure;

[0026] Figure 9 A block diagram of the controller provided in the embodiments of this disclosure;

[0027] Figure 10 This is a schematic diagram of the controller structure provided in an embodiment of this disclosure. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solutions of this disclosure, the communication-sensing data processing method and computer-readable storage medium provided in the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings.

[0029] The accompanying drawings of the embodiments disclosed herein are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the detailed embodiments to explain this disclosure and do not constitute a limitation thereof. The above and other features and advantages will become more apparent to those skilled in the art from the description of the detailed embodiments with reference to the accompanying drawings.

[0030] Where there is no conflict, the various embodiments of this disclosure and the features thereof in the embodiments may be combined with each other.

[0031] The terminology used in this disclosure is for the purpose of describing particular embodiments only and is not intended to limit the disclosure. The term "and / or" as used in this disclosure includes any and all combinations of one or more of the associated enumerated entries. The singular forms "a" and "the" as used in this disclosure are also intended to include the plural forms, unless the context clearly indicates otherwise. The terms "comprising," "made of," etc., as used in this disclosure specify the presence of the stated feature, integral, step, operation, element, and / or component, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof.

[0032] Unless otherwise specified, all terms used in this disclosure (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art. It will also be understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and this disclosure, and will not be interpreted as having an idealized or overly formal meaning, unless expressly so defined in this disclosure.

[0033] Currently, related technologies involve individually coding each electronic product for different sales regions. During product testing, based on the actual hardware configuration of the electronic product and the obtained software version information, a logic circuit built with XOR gates is used to detect the consistency of the software and hardware configuration of the entire product. The output comparison result is used to indicate whether the configuration is correct or incorrect.

[0034] This solution encodes complete, standalone electronic products. However, semiconductor devices have diverse configurations; a single product consists of multiple different functional modules, and each functional module can have various configuration types. Therefore, the method of uniformly encoding products in this technology cannot distinguish different configurations of the same product.

[0035] This embodiment of the disclosure collects hardware configuration information and software configuration information of each functional module; the hardware configuration information includes hardware function identifier and hardware configuration identifier; the software configuration information includes software function identifier and software configuration identifier; it obtains pre-set reference configuration information; the reference configuration information includes: hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier; it compares the hardware configuration information and software configuration information with the reference configuration information; and it outputs a corresponding configuration status identification result based on the comparison result; the configuration status identification result includes the current actual hardware and software function configuration information of the target device and the hardware and software consistency information of the target device. Through this embodiment, it is possible to identify whether the hardware configuration and software configuration in the target device are consistent, and the actual functional configuration in the target device can be directly output.

[0036] The solutions disclosed herein can be applied to any device that requires confirmation of the device's functional configuration and requires matching interlock circuits according to the functional configuration, such as, but not limited to, semiconductor manufacturing equipment.

[0037] The embodiments of this disclosure will be described in detail below.

[0038] This disclosure provides a method for identifying configuration states, such as... Figure 1 As shown, steps S11-S14 may be included:

[0039] S11. Collect the hardware configuration information of each functional module and the software configuration information of the functional software configured for the functional module.

[0040] In this embodiment of the disclosure, the hardware configuration information includes the hardware function identifier corresponding to the functional module and the hardware configuration identifier corresponding to the configuration type of the functional module; the software configuration information includes the software function identifier corresponding to the functional software and the software configuration identifier corresponding to the configuration type of the functional software.

[0041] In this embodiment of the disclosure, since the hardware part of the device (such as the target device, which may be a semiconductor device) is composed of various different functional modules, a unique identifier can be set for each configurable hardware part's functional module in the design of the functional modules. This identifier can be set according to requirements. For example, a fixed code can be assigned to each configurable hardware part's functional module. As shown in Table 1, the identifier corresponding to each functional module may include the hardware part's functional identifier (which can be simply referred to as the hardware functional identifier, for example, it can be represented in decimal, such as 01, 02, 03, 04, etc.) and the hardware part's configuration identifier (which can be simply referred to as the hardware configuration identifier, for example, it can be represented in decimal, such as 01, 02, etc.).

[0042] In this embodiment, each hardware function identifier represents a specific hardware function module that can be paired with the device. Different function modules (even those with the same function) within the same device cannot have the same identifier. If multiple function modules with the same function are used on the same device, they must be distinguished by different identifiers. Each hardware configuration identifier represents a specific configuration type for each function. During use, only one hardware configuration identifier can be configured within a single function module. For example, identifier 0101 represents that the semiconductor device chamber is configured with an upper electrode function module (the corresponding hardware function identifier is 01), and the upper electrode type configured in this upper electrode function module is a forward rotation type (the corresponding hardware configuration identifier is 01).

[0043] Table 1

[0044]

[0045] In this embodiment of the disclosure, when setting the control software for the device, each configurable software function can also be assigned a unique identifier. The identifier corresponding to each software function may include the function identifier of the software function (which can be simply referred to as the software function identifier, for example, it can be represented in decimal, such as 01, 02, 03, 04, etc.) and the configuration identifier corresponding to the configuration type of the software function (which can be simply referred to as the software configuration identifier, for example, it can be represented in decimal, such as 01, 02, etc.).

[0046] In this embodiment, each software function identifier represents a specific software function that can be used on the device. The same software function identifier cannot be used to identify different software on the same device, even if two software programs have the same function. Each software configuration identifier represents a specific configuration type for each software function. During use, only one software configuration identifier can be configured within a single software program.

[0047] In the embodiments of this disclosure, when designing the hardware part and software configuration of the functional module of any device, for completely identical devices, the same identification setting rules and the same identifiers can be used, and the correspondence between hardware function identifiers and hardware configuration identifiers is the same, and the correspondence between software function identifiers and software configuration identifiers is the same.

[0048] In this embodiment of the disclosure, the hardware configuration information and software configuration information are hardware and software function configuration identification information collected from a target device.

[0049] In this embodiment of the disclosure, collecting hardware configuration information of each functional module and software configuration information of the functional software configured for the functional module may include:

[0050] The hardware configuration signal input port is connected to the functional module, and the hardware function identifier and hardware configuration identifier are collected from the functional module through the hardware configuration signal input port.

[0051] The software is connected to the functional software via a preset software configuration signal input port, and the software function identifier and software configuration identifier are collected from the functional software through the software configuration signal input port.

[0052] In this embodiment of the disclosure, based on the aforementioned settings, the software and hardware function configuration identification information (which may include hardware function identifier, hardware configuration identifier, software function identifier, and software configuration identifier) ​​of the device's software and hardware can be obtained through a software and hardware function and configuration identification device (which may be called a configuration comparator). The software and hardware function and configuration identification device may be provided with a hardware configuration signal input port, a software configuration signal input port, a reference function configuration information input port, and an output port. The number of channels of each of the above input ports matches the number of identifier bits corresponding to the software and hardware configuration identification information, and the channel identifier of each channel corresponds to the identifier of each identifier bit in the software and hardware configuration identification information.

[0053] In this embodiment of the disclosure, the configuration identification device may be equipped with multiple intelligent modules, such as including but not limited to a collection module, an acquisition module, a comparison module, and an output module. These intelligent modules acquire hardware configuration information, software configuration information, and reference configuration information corresponding to the functional configuration of the target device, and output the current actual hardware and software functional configuration information of the target device and the hardware and software consistency information of the target device.

[0054] In this embodiment of the disclosure, the acquisition module can be used to acquire hardware configuration information and software configuration information corresponding to the functions and configurations of the target device's hardware and software.

[0055] In this embodiment of the disclosure, the acquisition module may include a hardware configuration signal input port and a software configuration signal input port, the acquisition module may include a reference function configuration information input port, and the output module may include an output port.

[0056] In this embodiment of the disclosure, after the hardware and software function and configuration identification device is connected to the target device to be identified, it can collect the hardware function identifier and hardware configuration identifier of the functional module configured by the target device through the hardware configuration signal input port, and collect the software function identifier and software configuration identifier set in the software configured by the target device through the software configuration signal input port.

[0057] In this embodiment, during the manufacturing process of each configurable functional module, a hardware function identifier and a hardware configuration identifier corresponding to the functional module can be set into the functional module. The hardware function identifier is equivalent to the identity certificate of the functional module, and the hardware configuration identifier is an indication of the configuration type of the functional module. After the functional module is installed on the device, there will be signal interaction between the functional module and the device body. The configuration identification device (or configuration comparator) on the device can obtain the software and hardware configuration identifier information of the functional module through the signal line connecting the functional module and the device (this identifier information can be expressed in any form, for example, including but not limited to decimal, binary, etc.). The hardware function identifier and hardware configuration identifier of different functional modules will be obtained by the designated channel of the software and hardware function and configuration identification device according to preset rules.

[0058] In the embodiments disclosed herein, such as Figure 2 The diagram shown is a schematic representation of an embodiment for obtaining hardware function identifiers and hardware configuration identifiers based on hardware configuration signal input ports.

[0059] In this embodiment, for example, if the device is equipped with an upper electrode module, according to a preset rule, the hardware function identifier corresponding to the upper electrode module is decimal 01 or binary 0001. In the hardware configuration signal input port of the hardware configuration identification device for software and hardware functions and configurations, the hardware function identifier (decimal 01 or binary 0001) corresponding to the upper electrode module can only be obtained by the first channel of the hardware configuration signal input port. Similarly, the first channel in the software and hardware function and configuration identification device can only obtain the hardware function identifier of the upper electrode module. If the device is not equipped with an upper electrode module, there will be no signal connection between the software and hardware function and configuration identification device and the upper electrode module, and the hardware function identifier obtained by the first channel will be a preset identifier, such as the binary identifier 0000.

[0060] In this embodiment, for example, if the device is equipped with a radio frequency (RF) module, according to a preset rule, the hardware function identifier corresponding to the RF module is decimal 02 or binary 0010. In the hardware configuration signal input port of the hardware configuration identification device for software and hardware functions and configurations, the hardware function identifier (decimal 02 or binary 0010) corresponding to the RF module can only be obtained by the second channel of the hardware configuration signal input port. Similarly, the second channel in the hardware configuration signal input port can only obtain the hardware function identifier of the RF module. If the device is not equipped with an RF module, there will be no signal connection between the software and hardware function and configuration identification device and the RF module, and the hardware function identifier obtained by the second channel will be a preset identifier, such as the binary identifier 0000.

[0061] In this embodiment, for example, if the device is equipped with a heater module, according to a preset rule, the hardware function identifier corresponding to the heater module is decimal 03 or binary 0011. In the hardware configuration signal input port of the hardware configuration identification device, the hardware function identifier (decimal 03 or binary 0011) corresponding to the heater module can only be obtained by the third channel of the hardware configuration signal input port. Similarly, the third channel in the hardware configuration signal input port can only obtain the hardware function identifier of the heater module. If the device is not equipped with a heater module, there will be no signal connection between the hardware configuration identification device and the heater module, and the hardware function identifier obtained by the third channel will be a preset identifier, such as the binary identifier 0000.

[0062] In this embodiment, for example, if the device is equipped with a vacuum pump module, according to a preset rule, the hardware function identifier corresponding to the vacuum pump module is decimal 04 or binary 0100. In the hardware configuration signal input port of the hardware configuration identification device for software and hardware functions and configurations, the hardware function identifier (decimal 04 or binary 0100) corresponding to the vacuum pump module can only be obtained by the fourth channel of the hardware configuration signal input port. Similarly, the fourth channel in the hardware configuration signal input port can only obtain the hardware function identifier of the vacuum pump module. If the device is not equipped with a vacuum pump module, there will be no signal connection between the software and hardware function and configuration identification device and the vacuum pump module, and the hardware function identifier obtained by the fourth channel will be a preset identifier, such as the binary identifier 0000.

[0063] In this embodiment of the disclosure, when configuring the control software of the device, the software function identifier and software configuration identifier of each configurable software function can be configured into the software. After the software configuration of the entire device is completed, the identifier information configured in the software (i.e., the first software function identifier and the first software configuration identifier) ​​is output to the software configuration signal input port of the hardware and software function and configuration identification device in a preset form (e.g., decimal or binary form) at a specified location through the communication interface between the software and the device. For configuration types not configured in the software, the hardware configuration identifier is output with a preset identifier, such as the binary identifier 0000. For functional modules not configured in the software, the corresponding hardware function identifier and hardware configuration identifier are all output with preset identifiers.

[0064] In the embodiments disclosed herein, such as Figure 3 The diagram shown is a schematic representation of an embodiment for obtaining software function identifiers and software configuration identifiers based on software configuration signal input ports.

[0065] In this embodiment, for example, if the device is configured with upper electrode software, according to a preset rule, the software function identifier corresponding to the upper electrode software is decimal 01 or binary 0001. In the software configuration signal input port of the hardware and software function and configuration identification device, the software function identifier (decimal 01 or binary 0001) corresponding to the upper electrode software can only be obtained by the first channel of the software configuration signal input port. Similarly, the first channel in the software configuration signal input port can only obtain the software function identifier of the upper electrode software. If the device is not configured with upper electrode software, there will be no signal connection between the hardware and software function and configuration identification device and the upper electrode software, and the software function identifier obtained by the first channel will be a preset identifier, such as the binary identifier 0000.

[0066] In this embodiment, for example, if the device is configured with radio frequency (RF) software, according to a preset rule, the software function identifier corresponding to the RF software is decimal 02 or binary 0010. In the software configuration signal input port of the hardware and software function and configuration identification device, the software function identifier (decimal 02 or binary 0010) corresponding to the RF software can only be obtained by the second channel of the software configuration signal input port. Similarly, the second channel in the software configuration signal input port can only obtain the software function identifier of the RF software. If the device is not configured with RF software, there will be no signal connection between the hardware and software function and configuration identification device and the RF software, and the software function identifier obtained by the second channel will be a preset identifier, such as the binary identifier 0000.

[0067] In this embodiment, for example, if the device is configured with heater software, according to preset rules, the hardware function identifier corresponding to the heater software is decimal 03 or binary 0011. In the software configuration signal input port of the hardware and software function and configuration identification device, the software function identifier (decimal 03 or binary 0011) corresponding to the heater software can only be obtained by the third channel of the software configuration signal input port. Similarly, the third channel in the software configuration signal input port can only obtain the software function identifier of the heater software. If the device is not configured with heater software, there will be no signal connection between the hardware and software function and configuration identification device and the heater software, and the software function identifier obtained by the third channel will be a preset identifier, such as the binary identifier 0000.

[0068] In this embodiment, for example, if the device is configured with vacuum pump software, according to preset rules, the software function identifier corresponding to the vacuum pump software is decimal 04 or binary 0100. In the software configuration signal input port of the hardware and software function and configuration identification device, the software function identifier (decimal 04 or binary 0100) corresponding to the vacuum pump software can only be obtained by the fourth channel of the software configuration signal input port. Similarly, the fourth channel in the software configuration signal input port can only obtain the software function identifier of the vacuum pump software. If the device is not configured with vacuum pump software, there will be no signal connection between the hardware and software function and configuration identification device and the vacuum pump software, and the software function identifier obtained by the fourth channel will be a preset identifier, such as the binary identifier 0000.

[0069] S12. Obtain the pre-set reference configuration information for each functional module and functional software.

[0070] In this embodiment of the disclosure, the reference configuration information is the functional configuration identification information of the mutually matching hardware and software of the target device; the reference configuration information includes: hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier.

[0071] In this embodiment of the disclosure, the reference configuration information is the functional configuration identification information of the mutually compatible software and hardware of the target device.

[0072] In this embodiment of the disclosure, the reference configuration information may include: hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier.

[0073] In this embodiment of the disclosure, reference configuration information corresponding to the pre-set functions and configurations can be obtained through the aforementioned acquisition module as a comparison standard.

[0074] In this embodiment of the disclosure, obtaining pre-set reference configuration information for each functional module and functional software may include:

[0075] The hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier are obtained based on the preset reference function configuration information input port.

[0076] In this embodiment of the disclosure, the hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier can be manually input through the reference function configuration information input port in the hardware and software function and configuration identification device.

[0077] In this embodiment of the disclosure, an input device (or selector) may be set at the reference function configuration information input port, such as, but not limited to, an input touch screen, an input keyboard, an input button, a DIP switch, etc.

[0078] In this embodiment, to ensure the accuracy of configuration comparison, reference configuration information is introduced as a comparison item between hardware and software configuration information. After the device is connected to each functional module and software, each functional configuration of the device needs to be checked according to the configuration of each functional module and software installed on the actual device. At the reference functional configuration information input port of the configuration identification device (which can be called the configuration selection input port), each functional configuration can be selected by means of a DIP switch. According to preset rules (e.g., preset input order, input position, etc.), the identifiers corresponding to the matching hardware and software functional configurations of the target device are input, which serve as a comparison reference standard for hardware and software functional configurations.

[0079] In this embodiment of the disclosure, regarding the functional configuration of the device, if the device is configured with corresponding functional modules, the DIP input switches are set according to preset rules to input the hardware function identifier and hardware configuration identifier of the corresponding functional module. Similarly, if the device is configured with corresponding software functions, the DIP input switches are set according to preset rules to input the software function identifier and software configuration identifier of the corresponding software function. If the device is not configured with certain functional modules and / or certain software functions, the DIP input switches for the corresponding function identifiers and configuration identifiers are all set to preset identifiers (e.g., binary 0000).

[0080] In the embodiments disclosed herein, such as Figure 4 The diagram shown is a schematic representation of an embodiment for obtaining software function identifiers and software configuration identifiers based on software configuration signal input ports.

[0081] S13. Compare the hardware configuration information and software configuration information with the reference configuration information.

[0082] In this embodiment of the disclosure, hardware function identifiers and hardware configuration identifiers are arranged according to preset rules and input according to a preset channel in the hardware configuration signal input port; software function identifiers and software configuration identifiers are arranged according to preset rules and input according to a preset channel in the software configuration signal input port.

[0083] Hardware function reference identifiers, hardware configuration reference identifiers, software function reference identifiers, and software configuration reference identifiers are arranged according to preset rules and input according to the preset channels in the reference function configuration information input port.

[0084] In this embodiment of the disclosure, the first software and hardware function configuration identification information and the second software and hardware function configuration identification information can be compared through the aforementioned comparison module.

[0085] In this embodiment of the disclosure, comparing the first software and hardware function configuration identification information and the second software and hardware function configuration identification information may include:

[0086] The data of each channel in the hardware configuration signal input port and the software configuration signal input port are compared with the data of the corresponding channel in the reference function configuration information input port.

[0087] In the embodiments disclosed herein, such as Figure 5 As shown, the hardware and software function and configuration identification device acquires the function identifiers and configuration identifiers of each channel input from the hardware end, software end, and the hardware and software function and configuration identification device through each port. The identification of each channel is compared using a comparison module (e.g., a numerical comparator chip within the comparison module). After comparison, the device outputs the consistency check result of the configuration comparison (i.e., the hardware and software consistency information of the target device) and the actual configuration status (i.e., the actual configuration information of the target device). The device can automatically acquire its own configuration information. Based on this configuration information, the interlocking circuits of each module in the device can be designed on the same interlocking circuit board, automatically selecting the interlocking logic to be executed by identifying the device's configuration status.

[0088] S14. Output the corresponding configuration status identification result based on the comparison result.

[0089] In this embodiment of the disclosure, the configuration status identification result includes the actual configuration information of the target device and the software and hardware consistency information of the target device.

[0090] In this embodiment of the disclosure, the aforementioned output module can output the corresponding configuration status identification result based on the comparison result.

[0091] In this embodiment of the disclosure, an output port can be set in the hardware and software function and configuration identification device to output the configuration status identification result; wherein, the output port may include: a configuration status output port and a function configuration output port;

[0092] Configure the status output port to output the hardware and software consistency information of the target device;

[0093] The function configuration output port is used to output the current actual hardware and software function configuration information of the target device.

[0094] In this embodiment of the disclosure, the actual hardware and software function configuration information of the target device may include: the hardware function identifier and hardware configuration identifier corresponding to the functional modules of the target device, and the software function identifier and software configuration identifier corresponding to the functional software of the target device.

[0095] The function configuration output port may include: hardware and software function identification output port and hardware and software configuration identification output port;

[0096] Hardware and software function identifier output port, used to output hardware function identifiers and software function identifiers;

[0097] The hardware and software configuration identifier output port is used to output hardware configuration identifiers and software configuration identifiers.

[0098] In this embodiment of the disclosure, the configuration status output port, the software and hardware function identification output port and the software and hardware configuration identification output port described above can be used to output the configuration status identification result of the target device.

[0099] In this embodiment of the disclosure, outputting the corresponding configuration status identification result based on the comparison result may include:

[0100] The data of each channel in the hardware configuration signal input port is compared with the data of the corresponding channel in the reference function configuration information input port to obtain a first comparison result, and the data of each channel in the software configuration signal input port is compared with the data of the corresponding channel in the reference function configuration information input port to obtain a second comparison result.

[0101] Output the actual hardware and software configuration information of the target device based on the information indicated by the first comparison result and the second comparison result;

[0102] The calculation results are obtained by performing preset calculations based on the first comparison results and the second comparison results, and the calculation results are output as the software and hardware consistency information of the target device.

[0103] In the embodiments disclosed herein, such as Figure 5As shown, after acquiring the function identifiers and configuration identifiers of each channel input by the selector from the hardware and configuration identification devices, the identifiers acquired by the hardware and the hardware-related identifiers (hardware function identifiers, hardware configuration identifiers) input by the selector are compared by a numerical comparator chip. If the comparison determines that the identifiers acquired by the hardware and the identifiers input by the selector are completely identical, a value, such as 1, can be output to indicate that the identifiers are completely identical, and this is output as the first comparison result. If the comparison determines that at least one of the identifiers acquired by the hardware and the identifiers input by the selector are inconsistent, another value, such as 0, can be output to indicate that the identifiers are not completely identical, and this is output as the first comparison result. Additionally, the identifiers acquired by the software and the software-related identifiers (software function identifiers, software configuration identifiers) input by the selector are compared by a numerical comparator chip. If the comparison determines that the identifiers acquired by the software and the identifiers input by the selector are completely identical, a value, such as 1, can be output to indicate that the identifiers are completely identical, and this is output as the second comparison result. If the comparison determines that at least one of the identifiers acquired by the hardware and the identifiers input by the selector are inconsistent, another value, such as 0, can be output to indicate that the identifiers are not completely identical, and this is output as the second comparison result.

[0104] In this embodiment of the disclosure, outputting the current actual hardware and software function configuration information of the target device based on the information indicated by the first comparison result and the second comparison result may include:

[0105] If the data of each channel in the hardware configuration signal input port and the software configuration signal input port is the same as the data of the corresponding channel in the reference function configuration information input port, then output the second hardware and software function configuration identification information as the current actual hardware and software function configuration information of the target device; or,

[0106] If the data of any one or more channels in the hardware configuration signal input port and the software configuration signal input port are different from the data of the corresponding channel in the reference function configuration information input port, a preset identification information is output as the current actual hardware and software function configuration information of the target device.

[0107] In this embodiment, if both the first comparison result and the second comparison result are 1, it indicates that the identifiers collected by the software and hardware are consistent with the identifiers input by the selector. Therefore, the actual current software and hardware function configuration information of the target device can be output through the function configuration output ports (software and hardware function identifier output port and software and hardware configuration identifier output port). At this time, the manually input reference configuration information can be output as the actual current software and hardware function configuration information of the target device, because the reference configuration information is the configuration information confirmed by the user. In addition, if a certain function in the target device is not configured, all corresponding identifiers will be 0. At this time, it will also be determined that the software and hardware match is consistent. Therefore, if the hardware function identifier and / or software function identifier are 0 in the collected hardware configuration information and software configuration information, even if the final output result is software and hardware match, the identifier 0000 will be output according to the rules to indicate that the hardware function and / or software function in the target device is not configured.

[0108] In this embodiment of the disclosure, if at least one of the outputs of the first comparison result and the second comparison result is not 1, it indicates that the identifiers collected by the software and hardware ends are not completely consistent with the identifiers input by the selector. Therefore, the actual software and hardware function configuration information of the target device can still be output through the function configuration output port (software and hardware function identifier output port and software and hardware configuration identifier output port). However, the actual software and hardware function configuration information of the target device is mismatched at this time. The hardware configuration information and software configuration information collected at the beginning can be output. Although the identifiers of the software end and the hardware end in the hardware configuration information and software configuration information are mismatched, they can still reflect the actual software and hardware function configuration information of the target device. In addition, in order to avoid the user not knowing that the identifiers of the software end and the hardware end are mismatched after the hardware configuration information and software configuration information are output through the function configuration output port, a preset identifier information can be output through the function configuration output port. For example, the identifier 0000 can be output to indicate that the identifiers of the software end and the hardware end in the target device are mismatched (i.e., the software end and the hardware end are mismatched).

[0109] In this embodiment of the disclosure, the software and hardware consistency information of the target device may include: the software and hardware of the target device are consistent or the software and hardware of the target device are inconsistent;

[0110] If the calculation result is the first value, the calculation result is used to indicate that the target device's hardware and software are consistent;

[0111] If the calculation result is the second value, the calculation result is used to indicate a software-hardware inconsistency in the target device.

[0112] In this embodiment of the disclosure, the first value and the second value can be defined as needed. For example, the first value may include, but is not limited to, 1, and the second value may include, but is not limited to, 0.

[0113] In this embodiment, the configuration status output port is used to output the configuration status of the channels. After the comparison of each channel is completed, the comparison result will be output to the configuration status output port. If the comparison result is a complete match, a first value, such as 1, can be output to the configuration status output port, indicating that the configuration information of the target device is consistent and the configuration is correct. If the configuration status output port outputs a second value, such as 0, it indicates that the configuration information of the target device is inconsistent, and it is necessary to reconfirm the current actual hardware and software function configuration information of the target device.

[0114] In this embodiment, the value of the configuration status output port only indicates the consistency of the configuration of each input port and does not represent the specific function configured in the target device. This is because if a function of the target device is not configured, the software, hardware, and selector will all be in a state of 0 if there are no errors, and the configuration comparator will still show a match. However, the device does not actually have this function. Therefore, the specific configuration information needs to be determined by combining the actual configuration information output by the software / hardware function identifier output port and the software / hardware configuration identifier output port, provided that the configuration status output port outputs 1.

[0115] In this embodiment of the disclosure, based on the output of the first comparison result and the second comparison result, a preset operation can be performed, such as, but not limited to, an AND operation.

[0116] In this embodiment, if both the first comparison result and the second comparison result are 1, it indicates that the identifiers collected by the software and hardware are consistent with the identifiers input by the selector. In this case, the first comparison result and the second comparison result are calculated, and the result is 1. A first value of 1 is output through the configuration status output port to indicate that the identifiers of the software and hardware match (i.e., the software and hardware of the target device are consistent). If at least one of the first comparison result and the second comparison result is not 1, it indicates that the identifiers collected by the software and hardware are inconsistent with the identifiers input by the selector. In this case, the first comparison result and the second comparison result are calculated, and the result is 0. A second value of 0 is output through the configuration status output port to indicate that the identifiers of the software and hardware do not match (i.e., the software and hardware of the target device are inconsistent).

[0117] This disclosure also provides an interlock control method for a semiconductor device. The semiconductor device includes multiple functional modules and multiple interlock circuits. Each functional module corresponds to one interlock circuit. Each interlock circuit includes at least one selection sub-circuit. Each selection sub-circuit corresponds to a configuration state of the functional module, such as... Figure 6 As shown, steps S21-S23 may be included:

[0118] S21. Obtain the functional configuration identification results corresponding to each functional module according to the configuration status identification method.

[0119] S22. Determine the actual hardware and software function configuration information of the target device based on the configuration identification results.

[0120] S23. Select the sub-circuit in the interlock circuit that corresponds to the hardware and software function configuration information to operate.

[0121] In related technologies, when equipment is equipped with different functions, manual configuration of the corresponding hardware interlock circuits and software is required based on the actual configuration of the equipment. In practical applications, due to different customer needs, equipment configurations vary, resulting in a large number of personnel needed to configure the interlock logic and software. Moreover, interlock failures frequently occur due to configuration mismatches.

[0122] In related technologies, different configurations require different interlocking circuits to achieve interlocking between functions. For example... Figure 7 As shown, the configuration of the vacuum pump in a PVD (Physical Vapor Deposition) process chamber is an example. The interlock circuits for the valve opening action differ between cold pump and molecular pump configurations in the PVD process chamber. When a cold pump is configured, interlock circuit 1 is required for valve opening. However, when a molecular pump is used, interlock circuit 2 is required. Therefore, in related technologies, each configuration requires a corresponding interlock circuit, making it impossible to identify the actual configuration and differences within the chamber, and failing to automatically match the interlock logic based on the chamber configuration.

[0123] In this embodiment, when the actual configuration information of the target device can be obtained through the hardware and software function and configuration identification device, the interlock circuit no longer needs to be configured separately. The interlock circuit can be designed so that all configuration scenarios are designed on the same interlock board. The interlock circuit may include at least one selection sub-circuit, each selection sub-circuit corresponding to a configuration state of a functional module. The selection sub-circuit can use the actual configuration information output by the configuration state output port of the hardware and software function and configuration identification device as the trigger condition for the interlock circuit to automatically determine the selection sub-circuit, eliminating the need to design separate interlock circuits for different configurations. This increases the configurability of the device, reduces the configuration work of personnel, and lowers the probability of interlock logic errors due to different configurations.

[0124] In this embodiment of the disclosure, multiple sets of selection sub-circuits can be connected in parallel; the operation of the selection sub-circuit corresponding to the software and hardware function configuration information in the selection interlock circuit may include:

[0125] Input the hardware and software function configuration information into at least one selection sub-circuit connected in parallel;

[0126] If the hardware and software function configuration information can serve as a trigger signal for any of the first selector circuits in at least one selector circuit to start the first selector circuit, then the first selector circuit is selected as the selected selector circuit.

[0127] In this embodiment, the configuration within a PVD process chamber is taken as an example. The PVD process chamber is equipped with different functional modules, each with its own interlocking logic. Taking a vacuum pump as an example: the interlocking circuits for the valve opening actions of the cold pump configuration and the molecular pump configuration are different. In the interlocking circuit design, the selection sub-circuits for two different configurations corresponding to the same instruction are connected in parallel. Before each selection sub-circuit corresponding to a configuration, the encoding of the corresponding configuration status output port is serially connected as a condition to the selection sub-circuit.

[0128] In this embodiment, if the hardware and software function and configuration identification device identifies a cold pump configuration, the vacuum pump channel corresponding to the output port of the hardware and software function and configuration identification device will output a 0402 identifier. At this time, among the multiple parallel selection sub-circuits, only the selection sub-circuit using 0402 as the trigger condition can be activated. If the hardware and software function and configuration identification device identifies a molecular pump configuration, the vacuum pump channel corresponding to the output port of the hardware and software function and configuration identification device will output a 0401 identifier. At this time, only the selection sub-circuit using 0401 as the trigger condition satisfies the condition. This achieves the purpose of automatically selecting the interlocking loop based on the actual hardware and software function configuration information of the target device.

[0129] In the embodiments disclosed herein, such as Figure 8The diagram illustrates an interlocking logic circuit based on the upper electrode module, RF module, heating module, and valve module. Based on this circuit, the actual configuration information of each module can be used as trigger conditions to select the appropriate interlocking circuit. For example, 0101 serves as the trigger condition for the upper electrode module's forward rotation, correspondingly locking the upper electrode module's reverse rotation circuit; 0102 serves as the trigger condition for the upper electrode module's reverse rotation, correspondingly locking the upper electrode module's forward rotation circuit. Similarly, 0201 serves as the trigger condition for the RF module operating at 13.56MHz, correspondingly locking the RF module's circuit operating at 2MHz; 0202 serves as the trigger condition for the RF module operating at 2MHz, correspondingly locking the RF module's circuit operating at 13.56MHz. Likewise, 0301 serves as the trigger condition for the heating module operating with single-zone temperature control, correspondingly locking the heating module's circuit operating with dual-zone temperature control; 0302 serves as the trigger condition for the heating module operating with dual-zone temperature control, correspondingly locking the heating module's circuit operating with single-zone temperature control. 0401 serves as the trigger condition for the valve module to operate in cold pump configuration, and correspondingly locks the circuit for the valve module to operate in molecular pump configuration. 0302 serves as the trigger condition for the valve module to operate in molecular pump configuration, and correspondingly locks the circuit for the valve module to operate in cold pump configuration.

[0130] This disclosure embodiment includes at least the following advantages:

[0131] 1. In target equipment (such as semiconductor equipment), the automatic acquisition, identification, and comparison of hardware and software configurations of different functional modules within the same device can automatically identify the product's configuration and automatically select interlocking logic circuits between different configurations based on the actual configuration, achieving compatible design of interlocking logic circuits. This reduces the risk of failure due to interlocking logic malfunctions caused by configuration errors.

[0132] 2. In a device with multiple configurations, by comparing the configuration of functions, in the case of mismatch between hardware and software function configurations, the matching status of each function channel can be obtained through the configuration status output port of each function, and the mismatched function can be quickly identified, thereby reducing the troubleshooting time when configuration mismatch occurs.

[0133] This disclosure also provides a semiconductor device, which may include: multiple functional modules, multiple interlocking circuits and a controller, each functional module corresponding to an interlocking circuit, and the interlocking circuit including at least one selection sub-circuit, each selection sub-circuit corresponding to a configuration state of the functional module;

[0134] The controller is configured to implement the interlock control method described above.

[0135] In this embodiment of the disclosure, the controller is the aforementioned hardware and software function and configuration identification device, such as... Figure 9 As shown, the controller 100 may include:

[0136] The acquisition module 101 is used to acquire the hardware configuration information of each functional module and the software configuration information of the functional software configured for the functional module; wherein, the hardware configuration information includes the hardware function identifier corresponding to the functional module and the hardware configuration identifier corresponding to the configuration type of the functional module; the software configuration information includes the software function identifier corresponding to the functional software and the software configuration identifier corresponding to the configuration type of the functional software.

[0137] The acquisition module 102 is used to acquire the pre-set reference configuration information of each functional module and functional software; the reference configuration information is the functional configuration identification information of the mutually matching hardware and software of the target device; the reference configuration information includes: hardware function reference identifier, hardware configuration reference identifier, software function reference identifier and software configuration reference identifier;

[0138] Comparison module 103 is used to compare hardware configuration information and software configuration information with reference configuration information;

[0139] The output module 104 is used to output the corresponding configuration status identification result based on the comparison result; the configuration status identification result includes the current actual software and hardware function configuration information of the target device and the software and hardware consistency information of the target device.

[0140] In the embodiments disclosed herein, such as Figure 10 As shown, the acquisition module 101 includes: a hardware configuration signal input port 1011 and a software configuration signal input port 1012;

[0141] The hardware configuration signal input port 1011 is connected to the functional module of the hardware part in the target device, and is used to collect the hardware function identifier and hardware configuration identifier corresponding to the hardware part of the functional module from the functional module.

[0142] The software configuration signal input port 1012 is connected to the functional software in the target device and is used to collect the software function identifier and software configuration identifier corresponding to the functional software.

[0143] In this embodiment of the disclosure, the acquisition module 102 includes: a reference function configuration information input port 1021; the reference configuration information includes: a hardware function reference identifier, a hardware configuration reference identifier, a software function reference identifier, and a software configuration reference identifier;

[0144] The reference function configuration information input port is equipped with an input component, which is used to obtain the hardware function reference identifier, hardware configuration reference identifier, software function reference identifier, and software configuration reference identifier based on the input component.

[0145] In this embodiment of the disclosure, the output module 104 includes: an output port 1041;

[0146] Output port 1041 is used to output the configuration status identification result.

[0147] In this embodiment of the disclosure, the output port 1041 includes: a configuration status output port and a function configuration output port;

[0148] Configure the status output port to output the hardware and software consistency information of the target device;

[0149] The function configuration output port is used to output the current actual hardware and software function configuration information of the target device.

[0150] In this embodiment of the disclosure, the actual hardware and software function configuration information of the target device includes: the hardware function identifier and hardware configuration identifier corresponding to the functional modules of the target device, and the software function identifier and software configuration identifier corresponding to the functional software of the target device.

[0151] The function configuration output ports include: hardware and software function identifier output ports and hardware and software configuration identifier output ports;

[0152] Hardware and software function identifier output port, used to output hardware function identifiers and software function identifiers;

[0153] The hardware and software configuration identifier output port is used to output the hardware configuration identifier and the software configuration identifier.

[0154] In the embodiments disclosed herein, any of the aforementioned configuration identification methods are applicable to the device embodiments, and will not be described in detail here.

[0155] In the embodiments disclosed herein, any of the aforementioned configuration identification methods are applicable to the semiconductor device embodiments, and will not be described in detail here.

[0156] Those skilled in the art will understand that all or some of the functional modules / units disclosed above can be implemented as software, firmware, hardware, or suitable combinations thereof.

[0157] In hardware implementations, the division between functional modules / units mentioned in the above description does not necessarily correspond to the division of physical components; for example, a physical component may have multiple functions, or a function or step may be executed by several physical components working together.

[0158] Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit (CPU), digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application-specific integrated circuit (ASIC). Such software may be distributed on a computer-readable medium, which may include computer storage media (or non-transitory media) and communication media (or transient media). As is known to those skilled in the art, the term computer storage media includes volatile and non-volatile, removable and non-removable media implemented in any method or technique for storing information (such as computer-readable instructions, data structures, program modules, or other data). Computer storage media include, but are not limited to, random access memory (RAM, more specifically SDRAM, DDR, etc.), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory (FLASH) or other disk storage; read-only optical disc (CD-ROM), digital versatile disc (DVD) or other optical disc storage; magnetic cartridges, magnetic tapes, disk storage or other magnetic storage; and any other media that can be used to store desired information and can be accessed by a computer. Furthermore, as is known to those skilled in the art, communication media typically contain computer-readable instructions, data structures, program modules, or other data in modulated data signals such as carrier waves or other transmission mechanisms, and may include any information delivery medium.

[0159] This disclosure has disclosed exemplary embodiments, and although specific terminology has been used, it is for general illustrative purposes only and should not be construed as limiting. In some instances, it will be apparent to those skilled in the art that features, characteristics, and / or elements described in conjunction with particular embodiments may be used alone, or in combination with features, characteristics, and / or elements described in conjunction with other embodiments, unless otherwise expressly indicated. Therefore, those skilled in the art will understand that various changes in form and detail may be made without departing from the scope of this disclosure as set forth by the appended claims.

Claims

1. A method for identifying configuration status, used to identify the configuration status of a target device, characterized in that, The target device includes at least one functional module, each of which is used to implement a preset function, and the identification method includes: The hardware configuration information of each functional module is collected, and the software configuration information of the functional software configured for the functional module is also collected; wherein, the hardware configuration information includes the hardware function identifier corresponding to the functional module and the hardware configuration identifier corresponding to the configuration type of the functional module; the software configuration information includes the software function identifier corresponding to the functional software and the software configuration identifier corresponding to the configuration type of the functional software; Obtain pre-set reference configuration information for each of the aforementioned functional modules and the aforementioned functional software; the reference configuration information is the functional configuration identification information of the mutually matching hardware and software of the target device; the reference configuration information includes: hardware functional reference identifier, hardware configuration reference identifier, software functional reference identifier, and software configuration reference identifier; The hardware configuration information and the software configuration information are compared with the reference configuration information; The corresponding configuration status identification result is output based on the comparison result; the configuration status identification result includes the current actual software and hardware function configuration information of the target device and the software and hardware consistency information of the target device.

2. The configuration status identification method according to claim 1, characterized in that, The process of collecting hardware configuration information for each of the functional modules and software configuration information for the functional software configured for each functional module includes: The hardware configuration signal input port is connected to the functional module, and the hardware function identifier and the hardware configuration identifier are collected from the functional module through the hardware configuration signal input port. The software is connected to the functional software via a preset software configuration signal input port, and the software function identifier and the software configuration identifier are collected from the functional software through the software configuration signal input port.

3. The configuration status identification method according to claim 1, characterized in that, The step of obtaining the pre-set reference configuration information for each of the functional modules and the functional software includes: The hardware function reference identifier, the hardware configuration reference identifier, the software function reference identifier, and the software configuration reference identifier are obtained based on the preset reference function configuration information input port.

4. The configuration status identification method according to claim 1, characterized in that, The hardware function identifier and the hardware configuration identifier are arranged according to a preset rule and input through a preset channel in the hardware configuration signal input port; the software function identifier and the software configuration identifier are arranged according to the preset rule and input through a preset channel in the software configuration signal input port. The hardware function reference identifier, the hardware configuration reference identifier, the software function reference identifier, and the software configuration reference identifier are arranged according to the preset rules and input according to the set channel in the preset reference function configuration information input port.

5. The configuration status identification method according to claim 4, characterized in that, The step of comparing the hardware configuration information and the software configuration information with the reference configuration information includes: The data of each channel in the hardware configuration signal input port and the software configuration signal input port are compared with the data of the corresponding channel in the reference function configuration information input port.

6. The configuration state identification method according to claim 5, characterized in that, The step of outputting the corresponding configuration status identification result based on the comparison result includes: A first comparison result is obtained by comparing the data of each channel in the hardware configuration signal input port with the data of the corresponding channel in the reference function configuration information input port, and a second comparison result is obtained by comparing the data of each channel in the software configuration signal input port with the data of the corresponding channel in the reference function configuration information input port. Output the actual hardware and software function configuration information of the target device based on the information indicated by the first comparison result and the second comparison result; The calculation result is obtained by performing a preset calculation based on the first comparison result and the second comparison result, and the calculation result is output as the software and hardware consistency information of the target device.

7. The configuration state identification method according to claim 6, characterized in that, The step of outputting the current actual hardware and software function configuration information of the target device based on the information indicated by the first comparison result and the second comparison result includes: If the data of each channel in the hardware configuration signal input port and the software configuration signal input port is the same as the data of the corresponding channel in the reference function configuration information input port, the reference configuration information is output as the current actual hardware and software function configuration information of the target device; or, If the data of any one or more channels in the hardware configuration signal input port and the software configuration signal input port are different from the data of the corresponding channel in the reference function configuration information input port, preset identification information is output as the current actual hardware and software function configuration information of the target device.

8. The configuration state identification method according to claim 6, characterized in that, The software and hardware consistency information of the target device includes: the software and hardware of the target device are consistent or the software and hardware of the target device are inconsistent; If the calculation result is a first value, the calculation result is used to indicate that the target device's hardware and software are consistent; If the calculation result is a second value, the calculation result is used to indicate that the target device's hardware and software are inconsistent.

9. An interlock control method for a semiconductor device, characterized in that, The semiconductor device includes multiple functional modules and multiple interlocking circuits, each functional module corresponding to one interlocking circuit, each interlocking circuit including at least one selection sub-circuit, each selection circuit corresponding to a configuration state of the functional module, and the interlocking control method including: The configuration status identification method according to any one of claims 1-8 obtains the functional configuration identification result corresponding to each functional module; The actual hardware and software function configuration information of the target device is determined based on the configuration identification result. The selection sub-circuit in the interlock circuit that corresponds to the software and hardware function configuration information is selected to operate.

10. The interlock control method for a semiconductor device according to claim 9, characterized in that, The multiple sets of interlocking circuits are connected in parallel; The step of selecting the sub-circuit corresponding to the software and hardware function configuration information in the interlock circuit includes: The software and hardware function configuration information is input into at least one selection sub-circuit connected in parallel; If the hardware and software function configuration information can serve as a trigger signal for any first selector circuit among the at least one selector circuits, and the first selector circuit is selected as the selected selector circuit.

11. A semiconductor device, characterized in that, include: Multiple functional modules, multiple interlocking circuits and a controller, each functional module corresponds to one interlocking circuit, each interlocking circuit includes at least one selection sub-circuit, and each selection sub-circuit corresponds to a configuration state of the functional module; The controller is configured to implement the interlock control method as described in claim 9 or 10.

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