Linear rotary two-dimensional motor

Abstract

The application provides a linear-rotary two-dimensional motor, which comprises a driver, a first screw rod assembly, a second screw rod assembly, a sliding table and a rotary motor. The first screw rod assembly and the second screw rod assembly are electrically connected with the driver. The second screw rod assembly is arranged in parallel with the first screw rod assembly. The sliding table is connected with the first screw rod assembly and the second screw rod assembly in a screw pair mode. The rotary motor is fixed to the sliding table. The driver is used to control the first screw rod assembly and the second screw rod assembly to drive the sliding table to move linearly. In the process of starting or zero speed of the first screw rod assembly and the second screw rod assembly, the driver controls the first screw rod assembly and the second screw rod assembly to be opposite in direction to eliminate the backlash between the first screw rod assembly, the second screw rod assembly and the sliding table. The application solves the problem that the existing linear-rotary two-dimensional motor is difficult to balance low cost and high precision.

Description

Technical Field

[0001] This application relates to the technical field of precision mechanical drives, and in particular to a linear rotary two-dimensional motor. Background Technology

[0002] Linear-rotary two-dimensional motors can simultaneously achieve two-dimensional motion control of linear and rotary motion, featuring a compact structure and small size. They are ideally suited for applications in high-precision and highly complex environments, such as semiconductor processing equipment, industrial automation equipment, military equipment, robots, and precision medical devices.

[0003] Current linear rotary 2D motors utilize linear servo motors, precision lead screws, and linear grating rulers for linear motion control. Rotational motion is achieved using servo motors, reduction gears, and circular grating rulers. Linear rotary 2D motors employing grating rulers are expensive due to the pursuit of high precision. Using traditional lead screws for linear motion often results in lower accuracy due to backlash. Therefore, existing linear rotary 2D motors face the challenge of balancing low cost and high precision. Summary of the Invention

[0004] The purpose of this application is to provide a linear rotary two-dimensional motor to solve the problem that existing linear rotary two-dimensional motors cannot simultaneously achieve low cost and high precision.

[0005] This application provides a linear-rotary two-dimensional motor, including a driver, a first lead screw assembly, a second lead screw assembly, a slide table, and a rotary motor. The first lead screw assembly and the driver are electrically connected. The second lead screw assembly and the driver are electrically connected, and the second lead screw assembly and the first lead screw assembly are arranged in parallel. The slide table is connected to the first lead screw assembly and the second lead screw assembly in a helical pair. The rotary motor is fixed to the slide table. The driver controls the first lead screw assembly and the second lead screw assembly to drive the slide table to perform linear motion. During the start-up or zero-speed crossing process of the first lead screw assembly and the second lead screw assembly, the driver first controls the first lead screw assembly and the second lead screw assembly to rotate in opposite directions to eliminate backlash between the first lead screw assembly / second lead screw assembly and the slide table.

[0006] Optionally, the first lead screw assembly includes a first motor and a first lead screw, the first motor and the driver are electrically connected, the first lead screw and the first motor are connected, and the slide and the first lead screw are connected in the form of a screw pair.

[0007] Optionally, the second lead screw assembly includes a second motor and a second lead screw. The second motor is electrically connected to the driver, and the second lead screw is connected to the second motor. The slide and the second lead screw are connected in the form of a helical pair. During the start-up or zero-speed crossing process of the first and second lead screws, the driver first controls the first and second lead screws to rotate in opposite directions to eliminate the backlash between the first and second lead screws and the slide.

[0008] Optionally, the first motor and the second motor are stepper motors.

[0009] Optionally, the rotary motor includes a first driving gear, a driven gear, and a second driving gear. The driven gear meshes with the first driving gear and the second driving gear. The first driving gear and the second driving gear are symmetrically arranged. During the start-up or zero-speed crossing of the rotary motor, the driver first controls the first driving gear and the second driving gear to rotate in opposite directions to eliminate backlash between the first driving gear and the second driving gear and the driven gear.

[0010] Optionally, the rotary motor further includes a third motor, which is electrically connected to the driver and connected to the first drive gear.

[0011] Optionally, the rotary motor further includes a fourth motor, which is electrically connected to the driver and connected to the second drive gear.

[0012] Optionally, the rotary motor further includes a third driving gear and a fourth driving gear, the driven gear meshes with the third driving gear and the fourth driving gear, the third driving gear and the fourth driving gear are symmetrically arranged, during the start-up or zero-speed crossing process of the rotary motor, the driver first controls the third driving gear and the fourth driving gear to rotate in opposite directions to eliminate the backlash between the third driving gear and the fourth driving gear and the driven gear.

[0013] Optionally, the rotary motor further includes a fifth motor, which is electrically connected to the driver and connected to a third drive gear.

[0014] Optionally, the rotary motor further includes a sixth motor, which is electrically connected to the driver and connected to the fourth drive gear.

[0015] The beneficial effects of this application are as follows: By configuring a driver, a first lead screw assembly, a second lead screw assembly, a slide table, and a rotary motor, the first lead screw assembly and the driver are electrically connected. The second lead screw assembly and the driver are also electrically connected, and the second lead screw assembly and the first lead screw assembly are arranged in parallel. The slide table is connected to the first and second lead screw assemblies in a helical pair configuration. The rotary motor is fixed to the slide table. The driver controls the first and second lead screw assemblies to drive the slide table in linear motion. During the start-up or zero-speed crossing process of the first and second lead screw assemblies, the driver first controls the first and second lead screw assemblies to rotate in opposite directions to eliminate backlash between the first and second lead screw assemblies and the slide table.

[0016] Since the first and second lead screw assemblies are started or their speed crosses zero during the start-up or speed crossing process, the driver first controls the first and second lead screw assemblies to rotate in opposite directions to eliminate the backlash between the first and second lead screw assemblies and the slide table. This results in high precision and eliminates the need for a grating ruler, thus reducing costs. Therefore, it can balance low cost and high precision.

[0017] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, the following describes the application in detail with reference to the preferred embodiments and accompanying drawings. Attached Figure Description

[0018] Figure 1 This is a longitudinal sectional view of a rotary electric motor in one embodiment of this application;

[0019] Figure 2 This is a top view of a linear rotary two-dimensional motor in one embodiment of this application;

[0020] Figure 3 This is a control block diagram of a linear rotary two-dimensional motor in one embodiment of this application;

[0021] Figure 4 This is a cross-sectional view of a rotary motor in one embodiment of this application.

[0022] In the attached figures, the following labels are used:

[0023] 10 drives

[0024] 11 First lead screw assembly

[0025] 110 First Electric Motor

[0026] 111 First Lead Screw

[0027] 12 Second lead screw assembly

[0028] 120 Second Motor

[0029] 121 Second lead screw

[0030] 13 slide

[0031] 14 Rotary electric motor

[0032] 140 Driven gear

[0033] 141 First driving gear

[0034] 142 Second driving gear

[0035] 143 Third Motor

[0036] 144 Fourth Motor

[0037] 145 Third driving gear

[0038] 146 Fourth driving gear

[0039] 147 chassis

[0040] 148 Fifth Motor

[0041] 149 Sixth Electric Machine

[0042] 150° Rotary motor output shaft

[0043] 16 Support base Detailed Implementation

[0044] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification.

[0045] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present application will now be described in detail with reference to the accompanying drawings and embodiments. To enable those skilled in the art to better understand the solutions of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this application.

[0046] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products, or devices.

[0047] It should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0048] Please also refer to Figure 1 and Figure 2 This embodiment provides a linear-rotary two-dimensional motor, including a driver 10, a first lead screw assembly 11, a second lead screw assembly 12, a slide table 13, and a rotary motor 14. The first lead screw assembly 11 is electrically connected to the driver 10. The second lead screw assembly 12 is electrically connected to the driver 10, and the second lead screw assembly 12 is arranged parallel to the first lead screw assembly 11. The slide table 13 is connected to the first lead screw assembly 11 and the second lead screw assembly 12 in a helical pair. The rotary motor 14 is fixed to the slide table 13. The driver 10 is used to control the first lead screw assembly 11 and the second lead screw assembly 12 to drive the slide table 13 to perform linear motion. During the start-up or zero-speed crossing process of the first lead screw assembly 11 and the second lead screw assembly 12, the driver 10 first controls the first lead screw assembly 11 and the second lead screw assembly 12 to rotate in opposite directions to eliminate the backlash between the first lead screw assembly 11 and the second lead screw assembly 12 and the slide table 13.

[0049] Please also refer to Figure 1 and Figure 2 During the start-up or zero-speed crossing process of the first lead screw assembly 11 and the second lead screw assembly 12, the driver 10 is used to control the first lead screw assembly 11 and the second lead screw assembly 12 to rotate in opposite directions to eliminate the backlash between the first lead screw assembly 11 and the second lead screw assembly 12 and the slide table 13. This method has high precision and does not require the use of a grating ruler, resulting in lower cost. Therefore, it can balance low cost and high precision.

[0050] Please also refer to Figure 1 and Figure 2The driver 10 is preferably a servo motor FOC (Field Oriented Control) vector closed-loop controller, employing an industrial-grade high-precision 21-bit magnetic encoder and a precision current sensor, supporting pulse control, serial / RS232 / RS485 / CAN communication control, and hybrid control modes. The driver 10 can also be a stepper motor driver. The first lead screw assembly 11 is electrically connected to the driver 10 via wires. For the specific configuration of the first lead screw assembly 11, please refer to the subsequent description of the embodiment.

[0051] Please also refer to Figure 1 and Figure 2 The second lead screw assembly 12 is electrically connected to the driver 10 via wires. The specific configuration of the second lead screw assembly 12 will be described later in the embodiments. The central axis of the second lead screw assembly 12 is parallel to the central axis of the first lead screw assembly 11. For example, both the central axes of the second lead screw assembly 12 and the first lead screw assembly 11 are parallel to the horizontal direction. The slide 13 is cuboid in shape and made of steel. The upper and lower sides of the slide 13 are connected to the first lead screw assembly 11 and the second lead screw assembly 12 respectively via helical pairs.

[0052] Please also refer to Figure 1 and Figure 2 There is backlash between the slide table 13 and the first lead screw assembly 11. There is also backlash between the slide table 13 and the second lead screw assembly 12. The linear motion direction of the slide table 13 is parallel to the length direction of the first lead screw assembly 11 and the second lead screw assembly 12. For example, the slide table 13 can move horizontally to the left or horizontally to the right in a straight line. The slide table 13 can be formed by two nut seats connected by bolts. One nut seat is connected to the first lead screw assembly 11 by a screw pair. The other nut seat is connected to the second lead screw assembly 12 by a screw pair.

[0053] like Figure 2 As shown, the rotary motor 14 is preferably a servo motor. The rotary motor 14 is fixed to the center of the top surface of the slide table 13 by bolts. An output shaft 150 is provided on the rotary motor 14. The central axis of the output shaft 150 of the rotary motor 14 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12.

[0054] like Figure 2As shown, the linear-rotary two-dimensional motor is a two-degree-of-freedom drive device that integrates linear and rotary motion into the same motor. In this embodiment, the linear motion of the linear-rotary two-dimensional motor is provided by the first lead screw assembly 11 and the second lead screw assembly 12, and the rotary motion is provided by the rotary motor 14. The backlash between the first lead screw assembly 11 and the slide 13 refers to the axial displacement corresponding to the idle rotation of the first lead screw assembly 11 when its rotation direction is reversed, after the first lead screw assembly 11 has rotated a certain angle but the slide 13 has not yet moved.

[0055] like Figure 2 As shown, the backlash between the second lead screw assembly 12 and the slide table 13 refers to the axial displacement corresponding to the free rotation of the second lead screw assembly 12 when its rotation direction is reversed. The second lead screw assembly 12 has rotated a certain angle, but the slide table 13 has not yet moved. Zero speed crossing refers to the instant the motor speed changes from a positive value to a negative value (or from a negative value to a positive value) during operation, i.e., the instant the speed passes through zero.

[0056] Please also refer to Figure 2 and Figure 3 Optionally, the first lead screw assembly 11 includes a first motor 110 and a first lead screw 111. The first motor 110 is electrically connected to the driver 10, and the first lead screw 111 is connected to the first motor 110. The slide table 13 and the first lead screw 111 are connected in the form of a screw pair. Using the first lead screw 111 and the second lead screw assembly 12, the additional auxiliary support slide and slide table 13 connection is no longer needed, making the structure of the linear rotary two-dimensional motor more compact.

[0057] Please also refer to Figure 2 and Figure 3 The first motor 110 is either a servo motor or a stepper motor. The first motor 110 is electrically connected to the driver 10 via wires. The first lead screw 111 is made of steel. The left end of the first lead screw 111 is connected to the output shaft of the first motor 110 via a coupling. The first motor 110 drives the first lead screw 111 to rotate. The right end of the first lead screw 111 is connected to the support seat 16 via a bearing. Ball bearings fill the space between the first lead screw 111 and the slide 13. The upper side of the slide 13 and the first lead screw 111 are connected in a helical pair configuration.

[0058] Please also refer to Figure 2 and Figure 3Optionally, the second lead screw assembly 12 includes a second motor 120 and a second lead screw 121. The second motor 120 is electrically connected to the driver 10, and the second lead screw 121 is connected to the second motor 120. The slide table 13 and the second lead screw 121 are connected in the form of a screw pair. During the start-up or zero-speed crossing process of the first lead screw 111 and the second lead screw 121, the driver 10 first controls the first lead screw 111 and the second lead screw 121 to rotate in opposite directions to eliminate the backlash between the first lead screw 111, the second lead screw 121 and the slide table 13.

[0059] Please also refer to Figure 2 and Figure 3 Since the backlash between the first lead screw 111 and the slide table 13, and the backlash between the second lead screw 121 and the slide table 13, can be eliminated by the first motor 110 and the second motor 120 themselves, there is no need to rely on other sensors to eliminate the backlash, further balancing the low cost and high precision of the linear rotary two-dimensional motor. Moreover, by using the first lead screw 111 and the second lead screw 121, there is no need for additional auxiliary support slides and slide table 13 connections, making the structure of the linear rotary two-dimensional motor more compact.

[0060] Please also refer to Figure 2 and Figure 3 The second motor 120 is either a servo motor or a stepper motor. The second motor 120 is electrically connected to the driver 10 via wires. The second lead screw 121 is made of steel. The left end of the second lead screw 121 is connected to the output shaft of the second motor 120 via a coupling. The second motor 120 drives the second lead screw 121 to rotate. The right end of the second lead screw 121 is connected to the support seat 16 via a bearing. Ball bearings fill the space between the second lead screw 121 and the slide 13. The central axis of the second lead screw 121 is parallel to the central axis of the first lead screw 111. The lower side of the slide 13 and the second lead screw 121 are connected in a helical pair. After the slide 13 moves smoothly, the second lead screw 121 and the first lead screw 111 rotate in the same direction.

[0061] like Figure 2 As shown, optionally, the first motor 110 and the second motor 120 are stepper motors. This configuration allows the two lead screw assemblies to achieve high positional accuracy even in open-loop operation, while also reducing open-loop operating costs, further balancing the low cost and high precision of linear rotary two-dimensional motors. The first motor 110 and the second motor 120 are connected in series or parallel. If the driving power remains constant and the first motor 110 and the second motor 120 are identical, the volume of the two motors can be halved, the combined output torque of the two motors remains unchanged, and the two motors are connected in parallel or series through windings and driven by a single driver 10, without increasing volume, weight, or cost.

[0062] Please also refer to Figure 2 and Figure 4Optionally, the rotary motor 14 includes a first driving gear 141, a driven gear 140, and a second driving gear 142. The driven gear 140 meshes with the first driving gear 141 and the second driving gear 142. The first driving gear 141 and the second driving gear 142 are symmetrically arranged. During the start-up or zero-speed crossing process of the rotary motor 14, the driver 10 first controls the first driving gear 141 and the second driving gear 142 to rotate in opposite directions to eliminate the backlash between the first driving gear 141 and the second driving gear 142 and the driven gear 140. Since the backlash between the first driving gear 141 and the driven gear 140, and the backlash between the second driving gear 142 and the driven gear 140, can be eliminated by the rotary motor 14 itself, there is no need to use other sensors to eliminate the backlash, further balancing the low cost and high precision of the linear rotary two-dimensional motor.

[0063] Please also refer to Figure 2 and Figure 4 The central axis of the first driving gear 141 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12. The first driving gear 141 is made of steel. The central axis of the driven gear 140 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12. The driven gear 140 is also made of steel. The output shaft 150 of the rotary motor 14 is mounted on the driven gear 140. The output shaft 150 of the rotary motor 14 is connected to the driven gear 140 via a key. The output shaft 150 of the rotary motor 14 and the driven gear 140 are coaxially arranged.

[0064] Please also refer to Figure 2 and Figure 4 The central axis of the second driving gear 142 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12. The second driving gear 142 is made of steel. The second driving gear 142 and the first driving gear 141 are symmetrically arranged about the central axis of the driven gear 140. After driving the driven gear 140 to rotate smoothly, the second driving gear 142 and the first driving gear 141 rotate in the same direction.

[0065] Please also refer to Figures 2 to 4Optionally, the rotary motor 14 also includes a third motor 143, which is electrically connected to the driver 10 and to the first drive gear 141. Using a single driver 10 to drive the first lead screw assembly 11, the second lead screw assembly 12, and the third motor 143 eliminates lead screw backlash and gear backlash, saving on drive costs and further balancing the low cost and high precision of the linear rotary two-dimensional motor. The third motor 143 can be a servo motor or a stepper motor. The third motor 143 and the driver 10 are electrically connected via wires. The output shaft of the third motor 143 and the first drive gear 141 are connected via a key.

[0066] Please also refer to Figures 2 to 4 Optionally, the rotary motor 14 also includes a fourth motor 144, which is electrically connected to the driver 10. The fourth motor 144 is connected to the second drive gear 142. Using a single driver 10 to drive four components—the first lead screw assembly 11, the second lead screw assembly 12, the third motor 143, and the fourth motor 144—eliminates lead screw backlash and gear backlash, saving on drive costs and further balancing the low cost and high precision of the linear rotary two-dimensional motor. The fourth motor 144 can be a servo motor or a stepper motor. The fourth motor 144 and the driver 10 are electrically connected via wires. The output shaft of the fourth motor 144 is connected to the second drive gear 142 via a key connection.

[0067] Please also refer to Figure 3 and Figure 4 The fourth motor 144 and the third motor 143 are symmetrically arranged about the central axis of the driven gear 140. The third motor 143 and the fourth motor 144 are connected in series or in parallel. If the driving power remains unchanged and the third motor 143 and the fourth motor 144 are identical, the volume of the two motors can be halved, the combined output torque of the two motors remains unchanged, and the two motors are connected in parallel or series through windings and driven by a single driver 10 without increasing the volume, weight, or cost.

[0068] Please also refer to Figure 2 and Figure 4Optionally, the rotary motor 14 also includes a third driving gear 145 and a fourth driving gear 146, with the driven gear 140 meshing with both the third and fourth driving gears 145 and 146. The third and fourth driving gears 145 and 146 are symmetrically arranged. During the start-up or zero-speed crossing of the rotary motor 14, the driver 10 first controls the third and fourth driving gears 145 and 146 to rotate in opposite directions to eliminate the backlash between the third and fourth driving gears 145 and the driven gear 140. Since the backlash between the third and fourth driving gears 145 and 140, and between the fourth and fourth driving gears 146 and 140, can be eliminated by the rotary motor 14 itself, there is no need to use other sensors to eliminate the backlash, further balancing the low cost and high precision of the linear rotary two-dimensional motor.

[0069] Please also refer to Figure 2 and Figure 4 The central axis of the third driving gear 145 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12. The third driving gear 145 is made of steel. The central axis of the fourth driving gear 146 is parallel to the central axis of the first lead screw assembly 11 and the central axis of the second lead screw assembly 12. The fourth driving gear 146 is also made of steel. The fourth driving gear 146 and the third driving gear 145 are symmetrically arranged about the central axis of the driven gear 140. After the driven gear 140 is driven to rotate smoothly, the first driving gear 141, the second driving gear 142, the third driving gear 145, and the fourth driving gear 146 rotate in the same direction.

[0070] Please also refer to Figure 2 and Figure 4 The first driving gear 141, the second driving gear 142, the third driving gear 145, and the fourth driving gear 146 are evenly distributed with reference to the central axis of the driven gear 140. The specifications (shape, size, number of teeth, and pitch circle diameter, etc.) of the first driving gear 141, the second driving gear 142, the third driving gear 145, and the fourth driving gear 146 are identical. The first driving gear 141, the second driving gear 142, the third driving gear 145, the fourth driving gear 146, and the driven gear 140 are preferably involute gears.

[0071] Please also refer to Figure 1 , Figure 2 and Figure 4The rotary motor 14 also includes a housing 147. The housing 147 is made of steel or cast iron. The housing 147 is bolted to the slide table 13. The first drive gear 141, the second drive gear 142, the third drive gear 145, the fourth drive gear 146, and the driven gear 140 are disposed inside the housing 147 and pivotally connected to the housing 147. The third motor 143 and the fourth motor 144 are bolted to the housing 147.

[0072] Please also refer to Figures 2 to 4 Optionally, the rotary motor 14 also includes a fifth motor 148, which is electrically connected to the driver 10 and to the third drive gear 145. Using a single driver 10 to drive five components—the first lead screw assembly 11, the second lead screw assembly 12, the third motor 143, the fourth motor 144, and the fifth motor 148—eliminates lead screw backlash and gear backlash, saving on drive costs and further balancing the low cost and high precision of the linear rotary two-dimensional motor. The fifth motor 148 can be a servo motor or a stepper motor. The fifth motor 148 and the driver 10 are electrically connected via wires. The output shaft of the fifth motor 148 and the third drive gear 145 are connected via a key. The fifth motor 148 is bolted to the housing 147.

[0073] Please also refer to Figures 2 to 4 Optionally, the rotary motor 14 also includes a sixth motor 149, which is electrically connected to the driver 10 and connected to the fourth drive gear 146. Using a single driver 10 to drive six components—the first lead screw assembly 11, the second lead screw assembly 12, the third motor 143, the fourth motor 144, the fifth motor 148, and the sixth motor 149—eliminates lead screw backlash and gear backlash, saving on drive costs and further balancing the low cost and high precision of linear rotary two-dimensional motors.

[0074] Please also refer to Figures 2 to 4 Optionally, the sixth motor 149 can be a servo motor or a stepper motor. The sixth motor 149 and the driver 10 are electrically connected via wires. The output shaft of the sixth motor 149 and the fourth drive gear 146 are connected by a key. The sixth motor 149 is fixed inside the housing 147 with bolts.

[0075] like Figure 4As shown, the sixth motor 149 and the fifth motor 148 are symmetrically arranged about the central axis of the driven gear 140. The fifth motor 148 and the sixth motor 149 are connected in series or in parallel. If the driving power remains constant and the fifth motor 148 and the sixth motor 149 are identical, the volume of the two motors can be halved, the combined output torque of the two motors remains unchanged, and the two motors are connected in parallel or series through windings and driven by a single driver 10, without increasing volume, weight, or cost. The third motor 143, the fourth motor 144, the fifth motor 148, and the sixth motor 149 can be identical two-phase stepper motors.

[0076] The linear rotary two-dimensional motor provided in the embodiments of this application has been described in detail above. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be construed as a limitation of this application. All equivalent modifications or changes made in accordance with the spirit and technical concept of this application should still be covered by the claims of this application.

Claims

1. A linear-rotating two-dimensional motor, characterized in that, include: drive; The first lead screw assembly is electrically connected to the driver; The second lead screw assembly is electrically connected to the driver, and the second lead screw assembly is arranged in parallel with the first lead screw assembly; The slide is connected to the first lead screw assembly and the second lead screw assembly in the form of a screw pair; as well as A rotary motor is fixed to the slide table. The driver is used to control the first lead screw assembly and the second lead screw assembly to drive the slide table to make linear motion. During the start-up or zero-speed crossing process of the first lead screw assembly and the second lead screw assembly, the driver first controls the first lead screw assembly and the second lead screw assembly to rotate in opposite directions to eliminate the backlash between the first lead screw assembly and the second lead screw assembly and the slide table.

2. The linear-rotary two-dimensional motor according to claim 1, characterized in that, The first lead screw assembly includes a first motor and a first lead screw. The first motor and the driver are electrically connected. The first lead screw and the first motor are connected. The slide table and the first lead screw are connected in the form of a screw pair.

3. The linear-rotary two-dimensional motor according to claim 2, characterized in that, The second lead screw assembly includes a second motor and a second lead screw. The second motor and the driver are electrically connected. The second lead screw and the second motor are connected. The slide and the second lead screw are connected in the form of a screw pair. During the start-up or zero-speed crossing process of the first and second lead screws, the driver first controls the first and second lead screws to rotate in opposite directions to eliminate the backlash between the first and second lead screws and the slide.

4. The linear-rotary two-dimensional motor according to claim 3, characterized in that, The first motor and the second motor are stepper motors.

5. The linear-rotary two-dimensional motor according to claim 1, characterized in that, The rotary motor includes a first driving gear, a driven gear, and a second driving gear. The driven gear meshes with the first driving gear and the second driving gear. The first driving gear and the second driving gear are symmetrically arranged. During the start-up or zero-speed crossing of the rotary motor, the driver first controls the first driving gear and the second driving gear to rotate in opposite directions to eliminate the backlash between the first driving gear and the second driving gear and the driven gear.

6. The linear-rotary two-dimensional motor according to claim 5, characterized in that, The rotary motor also includes a third motor, which is electrically connected to the driver and connected to the first drive gear.

7. The linear-rotary two-dimensional motor according to claim 6, characterized in that, The rotary motor also includes a fourth motor, which is electrically connected to the driver and connected to the second drive gear.

8. The linear-rotary two-dimensional motor according to claim 7, characterized in that, The rotary motor further includes a third driving gear and a fourth driving gear. The driven gear meshes with the third driving gear and the fourth driving gear. The third driving gear and the fourth driving gear are symmetrically arranged. During the start-up or zero-speed crossing of the rotary motor, the driver first controls the third driving gear and the fourth driving gear to rotate in opposite directions to eliminate the backlash between the third driving gear and the fourth driving gear and the driven gear.

9. The linear-rotary two-dimensional motor according to claim 8, characterized in that, The rotary motor also includes a fifth motor, which is electrically connected to the driver and connected to the third drive gear.

10. The linear-rotary two-dimensional motor according to claim 9, characterized in that, The rotary motor also includes a sixth motor, which is electrically connected to the driver and connected to the fourth drive gear.

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