Nozzle member, liquid ejection head, recording apparatus, and method for manufacturing nozzle member

Abstract

The nozzle component includes a nozzle having a first opening and a second opening located on the opposite side of the first opening, wherein the first opening is located on the liquid supply side of the nozzle and the second opening is located on the liquid ejection side of the nozzle. In a top view, the first opening has: a pair of first edges opposite each other; a pair of second edges opposite each other; and four connecting portions that connect the pair of first edges and the pair of second edges respectively, each of the four connecting portions having a curved outer periphery.

Description

Technical Field

[0001] This disclosure relates to a nozzle component, a liquid ejector head, a recording device, and a method for manufacturing the nozzle component. Background Technology

[0002] Patent Document 1 discloses a nozzle assembly having a first opening and a second opening located on the opposite side of the first opening. In this nozzle assembly, liquid flows in through the first opening and liquid is ejected from the second opening.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2011-5876 Summary of the Invention

[0006] One aspect of this disclosure relates to a nozzle component comprising a nozzle having a first opening and a second opening located on the opposite side of the first opening, wherein the first opening is located on the liquid inflow side of the nozzle and the second opening is located on the liquid outflow side of the nozzle. In top view, the first opening has: a pair of first edges opposite each other; a pair of second edges opposite each other; and four connecting portions connecting the pair of first edges and the pair of second edges respectively, each of the four connecting portions having a curved outer periphery. Attached Figure Description

[0007] Figure 1 This is a schematic side view of the printer involved in this embodiment.

[0008] Figure 2 This is a schematic top view of the printer involved in this embodiment.

[0009] Figure 3 This is a schematic top view of the liquid ejector head according to this embodiment.

[0010] Figure 4 Observing from A Figure 3 The diagram shows the liquid ejection head.

[0011] Figure 5 It is Figure 3 The diagram shows the expanded version of region I.

[0012] Figure 6 It is along Figure 5 The cross-sectional view along line II-II shown.

[0013] Figure 7 It is along Figure 5 The cross-sectional view along line III-III shown.

[0014] Figure 8 This is a top view showing a portion of the nozzle component involved in this embodiment.

[0015] Figure 9 It is along Figure 8 The cross-sectional view of line IV-IV shown.

[0016] Figure 10 This is a diagram showing the liquid being ejected from the nozzle component.

[0017] Figure 11 This is a top view showing a portion of the nozzle component involved in this embodiment.

[0018] Figure 12 This is a top view showing a portion of the nozzle component and flow path component involved in this embodiment.

[0019] Figure 13 This diagram shows the shape of the nozzle component when a single-crystal silicon substrate is individually etched for the first, second, and third etches.

[0020] Figure 14 This diagram shows the sequential steps of manufacturing nozzles on a single-crystal silicon substrate. Detailed Implementation

[0021] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0022] It should be noted that the figures used in the following description are schematic illustrations, and the scales shown in the figures may not necessarily match the actual scales. In multiple figures representing the same structure, the scales may sometimes differ to exaggerate the shape.

[0023] In the aforementioned conventional nozzle components, the first opening is quadrilateral in shape when viewed from above. Therefore, when liquid flows in from the first opening and is ejected from the second opening, air bubbles generated in the liquid may remain on the sidewall of the nozzle, including the corners of the quadrilateral shape.

[0024] The purpose of this invention is to reduce the possibility of air bubbles remaining on the sidewall, including the first opening.

[0025] Reference Figure 1 and Figure 2 The structure of the printer 10 involved in this embodiment will be explained.

[0026] Figure 1 This is a schematic side view of the printer 10 according to this embodiment. Figure 2This is a schematic top view of printer 10. Printer 10 is, for example, a color inkjet printer. It should be noted that, for ease of understanding, Figure 1 A three-dimensional orthogonal coordinate system is shown, comprising an X-axis with the rightward direction of the paper as positive and a Y-axis with the depth direction of the paper as positive. Such an orthogonal coordinate system is also shown in other figures used in the description below.

[0027] Additionally, for convenience, in the following explanations, the positive Z-axis side will sometimes be referred to as "up." It should be noted that the X-axis direction is the transport direction of the printing paper P. Furthermore, "viewing from above" refers to viewing from the Z-axis direction.

[0028] The printer 10 includes a paper feed roller 101, a guide roller 102, a conveyor roller 103, a recovery roller 104, a nozzle housing 105, a frame 106, a liquid nozzle 1, a dryer 107, a sensor unit 108, and a control unit 109.

[0029] The control unit 109 controls the operation of the paper feed roller 101, guide roller 102, conveyor roller 103, recovery roller 104, nozzle housing 105, frame 106, liquid nozzle 1, dryer 107 and sensor unit 108.

[0030] The paper feed roller 101, guide roller 102, conveyor roller 103, and return roller 104 constitute a moving part that moves the printing paper P relative to the liquid ejector head 1. The printing paper P is an example of a recording medium. The moving part is controlled by the control unit 109. The printing paper P is conveyed from the paper feed roller 101 between two guide rollers 102A onto a plurality of conveyor rollers 103. Then, the printing paper P is conveyed to the return roller 104 between two guide rollers 102B and two guide rollers 102C.

[0031] The nozzle housing 105 houses the conveyor roller 103, the frame 106, and the liquid nozzle 1. The nozzle housing 105 is a space that is connected to the outside in part, such as the part where the printing paper P enters or exits, but is isolated from the outside in other parts. The internal space of the nozzle housing 105 is controlled by the control unit 109 to control factors such as temperature, humidity, and air pressure as needed.

[0032] The frame 106 is flat and is positioned above and close to the printing paper P conveyed by the conveyor roller 103. Four frames 106 are arranged within the nozzle housing 105 and are spaced at predetermined intervals along the conveying direction of the printing paper P. The number of frames 106 mounted on the printer 10 can be appropriately varied depending on the object being printed or the printing conditions.

[0033] The liquid ejector head 1 has an elongated shape in the Y-axis direction. The liquid ejector head 1 is as follows: Figure 2As shown, each frame 106 is equipped with five liquid nozzles. Within each frame 106, three liquid nozzles 1 are arranged in a direction intersecting the transport direction of the printing paper P, and two other liquid nozzles 1 are arranged one between the three liquid nozzles 1 at positions offset along the transport direction. Within each frame 106, the liquid nozzles 1 are configured to overlap in the transport direction of the printing paper P. The number of liquid nozzles 1 contained in one frame 106 can be appropriately varied depending on the object being printed or the printing conditions.

[0034] In this embodiment, the liquid ejector head 1 is fixed relative to the printer 10, which is a so-called line printer. It should be noted that it is not limited to a line printer, but can also be a so-called serial printer in which the action of ejecting liquid droplets while moving the liquid ejector head 1 in a direction intersecting with the transport direction of the printing paper P alternates with the transport of the printing paper P.

[0035] The liquid ejector head 1 is controlled by the control unit 109 based on data such as images or text, and ejects liquid toward the printing paper P. The distance between the liquid ejector head 1 and the printing paper P is, for example, 0.5 to 20 mm.

[0036] By supplying liquid of the same color to the liquid ejection head 1 belonging to one frame 106, four-color liquid can be printed using four frames 106. The colors of the liquid ejected from each liquid ejection head 1 of each frame 106 are, for example, magenta, yellow, cyan, and black. By striking printing paper P with such liquid, a color image can be printed. It should be noted that the types of liquid colors can be appropriately changed. Alternatively, multiple colors of liquid can be supplied to the liquid ejection head 1 belonging to one frame 106, enabling the printing of multiple colors of liquid using a single frame 106.

[0037] Dryer 107 dries the printing paper P. After passing through two guide rollers 102B, the printing paper P is dried by dryer 107. By drying by dryer 107, it is less likely that the printing paper P, which is wound overlapping in the recovery roller 104, will stick together or that undried liquid will rub against each other.

[0038] The sensor unit 108 includes a position sensor, a speed sensor, and a temperature sensor. The control unit 109 is capable of controlling various parts of the printer 10 based on information from each sensor.

[0039] The printer 10 may also have a cleaning section for the cleaning liquid nozzle 1.

[0040] Besides printing paper P, the recording medium can also be a roll of cloth or the like. Furthermore, the printer 10 can also transport the recording medium on a conveyor belt. Therefore, the printer 10 can use single sheets of paper, cut cloth, wood, or bricks as recording media. Moreover, it can also print wiring patterns for electronic devices by spraying a liquid containing conductive particles from the liquid ejector head 1.

[0041] Reference Figure 3 and Figure 4 The structure of the liquid ejector head 1 involved in this embodiment will be explained. Figure 3 This is a schematic top view of the liquid ejector head 1 according to this embodiment. Figure 4 Observing from A Figure 3 The image shows a side view of the liquid ejection head 1. It should be noted that along... Figure 3 The two wavy lines shown in the diagram on the paper represent ellipses.

[0042] The liquid ejector head 1 includes a nozzle component 2, a flow path component 3, a support component 4, and a liquid supply component 5.

[0043] The nozzle component 2 includes a plurality of nozzles 21. The nozzle component 2 is made of a monocrystalline silicon substrate. The plurality of nozzles 21 are through-holes penetrating the monocrystalline silicon substrate along the Z-axis direction. The plurality of nozzles 21 are arranged along the Y-axis direction to form a nozzle group. The nozzle component 2 according to this embodiment has two nozzle groups: a nozzle group on the positive X-axis side and a nozzle group on the negative X-axis side. While the nozzle component 2 according to this embodiment has two nozzle groups, it may also have only one nozzle group, or it may have three or more nozzle groups. The two nozzle groups according to this embodiment are arranged parallel to each other. Furthermore, the distance between the nozzles 21 in each nozzle group is 84.6 μm. That is, the resolution of the nozzles 21 in the nozzle group is 300 dpi. The nozzles 21 of the nozzle group on the positive X-axis side are located between the nozzles 21 of the nozzle group on the negative X-axis side in the Y-axis direction. That is, the nozzles 21 of the nozzle group on the positive X-axis side and the nozzles 21 of the nozzle group on the negative X-axis side are offset from each other in the Y-axis direction, so that the resolution of the nozzle 21 combined with the two nozzles is 600 dpi. It should be noted that the size between the nozzles 21 of each nozzle group can be appropriately set according to the resolution.

[0044] The flow path component 3 includes a monocrystalline silicon substrate 33, a vibrating plate 34, and a plurality of piezoelectric elements 35. The monocrystalline silicon substrate 33 is located on the nozzle component 2. The vibrating plate 34 is located on the monocrystalline silicon substrate 33. The plurality of piezoelectric elements 35 are located on the vibrating plate 34. A plurality of pressure chambers 31 and a plurality of first pores 32 are formed on the monocrystalline silicon substrate 33. The flow path component 3 according to this embodiment has a shape substantially the same as that of the nozzle component 2 when viewed from above.

[0045] Multiple pressure chambers 31 are through holes that penetrate the single-crystal silicon substrate 33 along the Z-axis and are connected to multiple nozzles 21 respectively. The multiple pressure chambers 31 are arranged along the Y-axis. Furthermore, when viewed from above, the long side of each pressure chamber 31 is along the X-axis, and its short side is along the Y-axis. Liquid is stored within the pressure chambers 31.

[0046] Each of the multiple first apertures 32 is a through-hole that penetrates the single-crystal silicon substrate 33 along the Z-axis direction and is connected to one end of the long side of each of the multiple pressure chambers 31. The first aperture 32 connected to the pressure chamber 31 located on the positive X-axis side is connected to the end of the pressure chamber 31 on the negative X-axis side. The first aperture 32 connected to the pressure chamber 31 located on the negative X-axis side is connected to the end of the pressure chamber 31 on the positive X-axis side. In addition, liquid is stored in the first aperture 32 in the same way as in the pressure chamber 31. The first aperture 32 has a smaller width in the Y-axis direction relative to the pressure chamber 31 when viewed from above, and therefore functions as a so-called throttling section.

[0047] The vibrating plate 34 is located on the single-crystal silicon substrate 33. Furthermore, the vibrating plate 34 is located on multiple pressure chambers 31 and multiple first pores 32. Examples of materials for the vibrating plate 34 include Si or SiO2. The thickness of the vibrating plate 34 can be 1 μm or more and 2 μm or less.

[0048] Multiple piezoelectric elements 35 are located on vibrating plates 34 corresponding to multiple pressure chambers 31. The multiple piezoelectric elements 35 and multiple pressure chambers 31 are arranged in a 1:1 ratio. By applying a voltage to the piezoelectric elements 35, the piezoelectric elements 35 are displaced. Accompanying the displacement of the piezoelectric elements 35, the vibrating plates 34 located on the pressure chambers 31 are also displaced. As a result, pressure is applied to the liquid inside the pressure chambers 31. Thus, the liquid is ejected from the pressure chambers 31 through nozzles 21.

[0049] Support member 4 is located on flow path member 3. Support member 4 is formed of monocrystalline silicon. Compared with flow path member 3, support member 4 has a specified thickness in the Z-axis direction and functions to support flow path member 3. Support member 4 has multiple second pores 41.

[0050] The multiple second holes 41 are through holes that pass through the support member 4 along the Z-axis direction and are connected to the multiple first holes 32 respectively. The multiple second holes 41 are connected to the multiple pressure chambers 31 respectively via the multiple first holes 32. Like the first holes 32, the second holes 41 function as so-called throttling sections. In addition, the multiple second holes 41 are located at the center of the support member 4 in the X-axis direction when viewed from above.

[0051] The liquid supply component 5 is located on the support component 4. The liquid supply component 5 has approximately the same shape as the support component 4 when viewed from above. The liquid supply component 5 has a common flow path 51. The liquid supply component 5 is formed of resin.

[0052] The common flow path 51 is located at the center of the liquid supply member 5 along the X-axis direction when viewed from above, and is arranged along the Y-axis direction. Therefore, the common flow path 51 is located on and connected to the plurality of second orifices 41. Thus, the common flow path 51 can supply liquid to the plurality of second orifices 41.

[0053] The pressure chamber 31, the first orifice 32, the second orifice 41, and the common flow path 51 are filled with liquid. Liquid is supplied from the pressure chamber 31 to the nozzle 21 by applying pressure to the pressure chamber 31 via the piezoelectric element 35, and droplets are ejected from the nozzle 21. Additionally, liquid is supplied from the common flow path 51 towards the pressure chamber 31 via the first orifice 32 and the second orifice 41.

[0054] It should be noted that, Figure 3 and Figure 4 This example illustrates the structure of the liquid ejector head 1, and may also include... Figure 3 and Figure 4 Components other than those shown.

[0055] Reference Figure 5 , Figure 6 and Figure 7 The structure surrounding the nozzle 21 and pressure chamber 31 involved in this embodiment will be described in detail. Figure 5 It is Figure 3 The diagram shows an enlarged version of region I. Figure 6 It is along Figure 5 The cross-sectional view along line II-II shown. Figure 7 It is along Figure 5 The cross-sectional view along line III-III is shown. Additionally, in Figure 5 , Figure 6 and Figure 7 To make the explanation easier to understand, the illustration of the liquid supply component 5 has been omitted.

[0056] The height 21Z of the nozzle 21 is, for example, 50~100μm. The height 21Z of the nozzle 21 is almost equal to the thickness of the nozzle component 2.

[0057] The length 31X of the long side of the pressure chamber 31 is, for example, 300~500μm. The length 31Y of the short side of the pressure chamber 31 is, for example, 60~80μm. The height 31Z of the pressure chamber 31 is, for example, 50~100μm. The height 31Z of the pressure chamber 31 is almost equal to the thickness of the single-crystal silicon substrate 33.

[0058] In the liquid ejector head 1 according to this embodiment, the height 21Z of the nozzle 21 is higher than the height 31Z of the pressure chamber 31. Specifically, in the liquid ejector head 1 according to this embodiment, the height 21Z of the nozzle 21 is 80 μm, and the height 31Z of the pressure chamber 31 is 70 μm. Therefore, in the liquid ejector head 1 according to this embodiment, the height 21Z of the nozzle 21 is higher than the height 31Z of the pressure chamber 31, thus the flow direction of the liquid can be aligned with the negative Z-axis direction using the nozzle 21. Therefore, the liquid ejector head 1 according to this embodiment can improve the accuracy of liquid impact.

[0059] The piezoelectric element 35 includes a common electrode 351, a piezoelectric body 352, and individual electrodes 353. Furthermore, regarding the piezoelectric element 35 according to this embodiment, the common electrode 351 is disposed on the vibrating plate 34, the piezoelectric body 352 is disposed on the common electrode 351, and the individual electrode 353 is disposed on the piezoelectric body 352, but this is not limited to this. For example, the arrangement order of the common electrode 351 and the individual electrode 353 from the vibrating plate 34 can also be reversed. Specifically, it is also possible that the individual electrode 353 is disposed on the vibrating plate 34, the piezoelectric body 352 is disposed on the individual electrode 353, and the common electrode 351 is disposed on the piezoelectric body 352. Moreover, the piezoelectric element 35 may also have a close-fitting layer such as Ti between the common electrode 351 and the vibrating plate 34. Additionally, the piezoelectric element 35 may also have a close-fitting layer such as LaNiO3 between the common electrode 351 and the piezoelectric body 352, and between the piezoelectric body 352 and the individual electrode 353.

[0060] In this embodiment, the common electrode 351 is shared by multiple pressure chambers 31. The thickness of the common electrode 351 in this embodiment can be 0.05 μm or more and 1 μm or less. Furthermore, the constituent material of the common electrode 351 can be, for example, a metallic material such as Pt.

[0061] In this embodiment, the piezoelectric element 352 is individually provided corresponding to each pressure chamber 31, but it is not limited thereto. For example, the piezoelectric element 352 may also be provided across multiple pressure chambers 31 when viewed from above. The thickness of the piezoelectric element 352 may be 0.5 μm or more and 5 μm or less. Examples of materials constituting the piezoelectric element 352 include Pb(Zr,Ti)O3, NaNbO3, BaTiO3, (BiNa)NbO3, and BiNaNB5O. 15 Ceramic materials with strong dielectric properties, such as those used in the system.

[0062] Each individual electrode 353 is provided separately, corresponding to each pressure chamber 31. The thickness of each individual electrode 353 can be 0.05 μm or more and 1 μm or less. The constituent material of the individual electrode 353 can be, for example, a metallic material such as Pt.

[0063] In the liquid ejector head 1 described in this embodiment, the vibrating plate 34 and the piezoelectric element 35 function as actuators. It should be noted that the actuator can also be a heating element. That is, the liquid ejector head 1 can eject ink via piezoelectricity as in this embodiment, or it can eject ink via heat if the actuator is a heating element.

[0064] Reference Figure 8 and Figure 9 The structure of the nozzle component 2 as described in this embodiment will be explained in detail from a top view. Figure 8 This is a top view showing a portion of the nozzle component 2 involved in this embodiment. Figure 9 It is along Figure 8 The cross-sectional view of line IV-IV shown.

[0065] The nozzle component 2 includes a nozzle 21, which has a first opening 211 and a second opening 212 located on the opposite side of the first opening 211. The first opening 211 is located on the liquid supply side, i.e., the pressure chamber 31 side, in the nozzle 21, and the second opening 212 is located on the liquid ejection side in the nozzle 21. Therefore, in the nozzle component 2 according to this embodiment, liquid is supplied to the nozzle 21 from the first opening 211, and liquid is ejected from the second opening 212.

[0066] Furthermore, in the nozzle component 2 according to this embodiment, viewed from above, the edge of the first opening 211 has a pair of first edges 213, a pair of second edges 214, and a connecting portion 215. The pair of first edges 213 are opposite to each other in the Y-axis direction. The pair of second edges 214 are opposite to each other in the X-axis direction. The connecting portion 215 connects the pair of first edges 213 and the pair of second edges 214 respectively. Therefore, there are four connecting portions 215 in one first opening 211.

[0067] From a top view, assuming a rectangle (including a square) located within the first opening 211, with the area where the vertex meets the edge of the first opening 211 to the maximum, the four connection points C1 to C4 where the edge of the first opening 211 meets this rectangle are determined. It should be noted that, regarding the method of determining connection points C1 to C4, the points with the largest curvature among the four connecting portions 215 can also be designated as connection points C1 to C4 respectively.

[0068] The first opening 211 is formed by an edge on the positive X-axis side connecting contact C1 and contact C2, an edge on the negative X-axis side connecting contact C3 and contact C4, an edge on the positive Y-axis side connecting contact C1 and contact C3, and an edge on the negative Y-axis side connecting contact C2 and contact C4. Hereinafter, the structure of a pair of first edges 213, a pair of second edges 214, and the connecting portion 215 will be described in detail based on the edges on the positive X-axis side, the negative X-axis side, the positive Y-axis side, and the negative Y-axis side.

[0069] It should be noted that when the edge of the first opening 211 is circular, there are infinitely many points that can become contact points C1 to C4, therefore a pair of first edges 213, a pair of second edges 214, and a connecting part 215 cannot be defined. Therefore, when the edge of the first opening 211 is circular, it does not have any of the following: a pair of first edges 213, a pair of second edges 214, and a connecting part 215.

[0070] In this embodiment, the first edge 213 refers to the central 3-part division when the edge on the positive Y-axis side (the edge connecting contact C1 and contact C2) and the edge on the negative Y-axis side (the line connecting contact C3 and contact C4) are each divided into 5 equal parts in the X-axis direction. Similarly, the second edge 214 refers to the central 3-part division when the edge on the positive X-axis side (the edge connecting contact C1 and contact C3) and the edge on the negative X-axis side (the edge connecting contact C2 and contact C4) are each divided into 5 equal parts in the Y-axis direction.

[0071] In this embodiment, the connecting portion 215a located on the positive X-axis and positive Y-axis sides refers to the edge formed by combining one of the five equal parts of the edge on the positive X-axis side along the Y-axis direction, which is located at the position closest to the positive Y-axis, and the edge formed by combining one of the five equal parts of the edge on the positive Y-axis side along the X-axis direction, which is located at the position closest to the positive X-axis. Similarly, the connecting portion 215b located on the positive X-axis and negative Y-axis sides refers to the edge formed by combining one of the five equal parts of the edge on the positive X-axis side along the Y-axis direction, which is located at the position closest to the negative Y-axis, and the edge formed by combining one of the five equal parts of the edge on the negative Y-axis side along the X-axis direction, which is located at the position closest to the positive X-axis.

[0072] Furthermore, in this embodiment, the connecting portion 215c located on the negative X-axis side and the positive Y-axis side refers to the edge that combines one of the five equal parts of the edge located on the negative X-axis side along the Y-axis direction, which is located at the position closest to the positive Y-axis side, and the edge that combines one of the five equal parts of the edge located on the positive Y-axis side along the X-axis direction, which is located at the position closest to the negative X-axis side. Similarly, the connecting portion 215d located on the negative X-axis side and the negative Y-axis side refers to the edge that combines one of the five equal parts of the edge located on the negative X-axis side along the Y-axis direction, which is located at the position closest to the negative Y-axis side, and the edge that combines one of the five equal parts of the edge located on the negative Y-axis side along the X-axis direction, which is located at the position closest to the negative X-axis side.

[0073] In this embodiment, the four connecting portions 215 are curved. Therefore, compared with nozzle components where the connecting portions form an angle, the nozzle component 2 according to this embodiment can reduce the possibility of air bubbles remaining on the sidewall 21a of the nozzle 21, including the connecting portions 215. Therefore, the nozzle component 2 according to this embodiment can reduce the influence of retained air bubbles on the ejection characteristics of the liquid.

[0074] In the nozzle component 2 according to this embodiment, when viewed from above, the pair of first edges 213 are convex. That is, the central side of the first edge 213 located on the positive Y-axis side is positioned closer to the positive Y-axis side than the end side. Furthermore, the central side of the first edge 213 located on the negative Y-axis side is positioned closer to the negative Y-axis side than the end side. In this embodiment, the angle between the straight line connecting the portion 2131 where the first edge 213 connects to the connecting portion 215 and the edge 2132 located at the center of the first edge 213 in the X-axis direction, and the straight line along the X-axis direction, is less than 15 degrees.

[0075] Furthermore, in the nozzle component 2 according to this embodiment, the pair of second edges 214 are also convex in plan view. Therefore, the central side of the second edge 214 located on the positive X-axis side is positioned closer to the positive X-axis side than the end side. Additionally, the central side of the second edge 214 located on the negative X-axis side is positioned closer to the negative X-axis side than the end side. In this embodiment, the angle between the straight line connecting the portion 2141 where the second edge 214 connects to the connecting portion 215 to the edge 2142 located at the center of the second edge 214 in the X-axis direction and the straight line along the Y-axis direction is less than 15 degrees.

[0076] In the nozzle member 2 according to this embodiment, compared with a nozzle member in which a pair of first edges are straight along the X-axis and a pair of second edges are also straight along the Y-axis, the pair of first edges 213 and the pair of second edges 214 bulge outward, thus increasing the area of ​​the first opening 211 when viewed from above. Therefore, the nozzle member 2 according to this embodiment can reduce the flow resistance of the liquid supplied to the first opening 211. Therefore, the nozzle member 2 according to this embodiment can reduce the energy required to eject liquid from the nozzle 21.

[0077] Furthermore, in the nozzle component 2 according to this embodiment, the pair of first edges 213 and the pair of second edges 214 are curved. In a nozzle component where the pair of first edges and the pair of second edges are convex in a straight line, the pair of first edges and the pair of second edges form an angle. Compared with a nozzle component where the pair of first edges and the pair of second edges are convex in a straight line, the nozzle component 2 according to this embodiment can reduce the possibility of air bubbles remaining on the sidewall 21a of the nozzle 21, including the pair of first edges 213 and the pair of second edges 214. Therefore, the nozzle component 2 according to this embodiment can reduce the influence of retained air bubbles on the ejection characteristics of the liquid.

[0078] Furthermore, in the nozzle component 2 according to this embodiment, a pair of first edges 213 gradually bulge outward from the portion 2131 connected to the connecting portion 215 toward the central side in the X-axis direction. Also, in the nozzle component 2 according to this embodiment, a pair of second edges 214 also gradually bulge outward from the portion 2141 connected to the connecting portion 215 toward the central side in the Y-axis direction. Therefore, in the nozzle component 2 according to this embodiment, the outer periphery of each of the four connecting portions 215 has a smoother curve, thus further reducing the possibility of air bubbles remaining on the sidewall 21a of the nozzle 21, including the connecting portions 215.

[0079] In the nozzle component 2 according to this embodiment, the second opening 212 is circular in top view. In the nozzle component 2 according to this embodiment, liquid is ejected from the second opening 212 toward the printing paper P. Therefore, in the nozzle component 2 according to this embodiment, the second opening 212 has a symmetrical circular shape, thus enabling the liquid to be ejected with good precision toward the printing paper P from the second opening 212. That is, the hitting accuracy is improved in the nozzle component 2 according to this embodiment. It should be noted that the diameter of the second opening 212 in this embodiment is 20 μm. Furthermore, in this embodiment, the distance in the X-axis direction of the first edge 213 and the distance in the Y-axis direction of the second edge 214 in the first opening 211 are 30 μm. That is, the diameter of the second opening 212 is shorter than the distance in the X-axis direction of the first edge 213 and the distance in the Y-axis direction of the second edge 214 in the first opening 211.

[0080] Reference Figure 9 The structure of the nozzle component 2 involved in this embodiment will be described in detail below.

[0081] The nozzle 21, in cross-section, has: a first portion 216 including a first opening 211; and a second portion 217 connected to the first portion 216 and including a second opening 212. In this embodiment, the sidewall 216a of the first portion 216 is conical in cross-section. In other words, the sidewall 216a of the first portion 216 is inclined relative to the Z-axis direction perpendicular to the first opening 211 in cross-section. Further, the sidewall 216a of the first portion 216 can also be said to be inclined relative to a straight line perpendicular to the ejection surface 22 including the second opening 212 in cross-section. Therefore, the nozzle member 2 according to this embodiment can reduce the flow resistance of the liquid supplied from the first opening 211. Therefore, the nozzle member 2 according to this embodiment can reduce the energy required to eject liquid from the nozzle 21.

[0082] Furthermore, in the nozzle component 2 according to this embodiment, the sidewall 217a of the second portion 217 is straight in cross-section. In other words, the sidewall 217a of the second portion 217 is along the Z-axis direction in cross-section. More specifically, the sidewall 217a of the second portion 217 is along a straight line perpendicular to the ejection surface 22 containing the second opening 212 in cross-section. It should be noted that "along the Z-axis direction" and "along a straight line perpendicular to the ejection surface 22" do not mean completely parallel, but rather generally parallel. For example, manufacturing errors and other deviations are allowed. In this embodiment, if the angle between the sidewall 217a of the second portion 217 and the Z-axis direction is less than ±2 degrees, then the sidewall 217a of the second portion 217 can be said to be along the Z-axis direction. Furthermore, in this embodiment, if the angle between the sidewall 217a of the second portion 217 and the straight line perpendicular to the ejection surface 22 is less than ±2 degrees, then the sidewall 217a of the second portion 217 can be said to be along a straight line perpendicular to the ejection surface 22. Therefore, the nozzle member 2 according to this embodiment can align the flow direction of the liquid towards the negative Z-axis using the second portion 217. Therefore, the nozzle member 2 according to this embodiment can improve the hitting accuracy of the liquid ejected from the second opening 212 toward the printing paper P.

[0083] Furthermore, in the nozzle component 2 according to this embodiment, in cross-section, the connection portion between the sidewall 216a of the first portion 216 and the sidewall 217a of the second portion 217 forms an angle with a straight line, but it is not limited to this. For example, the connection portion between the sidewall 216a of the first portion 216 and the sidewall 217a of the second portion 217 may also be curved. If the nozzle component 2 has a curved connection portion between the sidewall 216a of the first portion 216 and the sidewall 217a of the second portion 217 in cross-section, the possibility of air bubbles remaining at this connection portion is reduced.

[0084] Furthermore, the inventors evaluated the liquid ejected from the nozzle member 2 by simulation when a voltage of half the pulse width of the natural vibration period AL (Acoustic Length) was applied to the piezoelectric element 35.

[0085] exist Figure 10 In the diagram, (a) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 5 degrees; (b) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 10 degrees; (c) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 15 degrees; (d) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 20 degrees; (e) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 30 degrees; and (f) shows the liquid ejected from the nozzle member 2 when the cone angle of the sidewall 216a of the first part 216 is 40 degrees. Here, the cone angle refers to the angle formed by the sidewall 21a of the nozzle 21 relative to the Z-axis direction. Figure 10 In (a) to (f), the nozzle component 2 is shown on the upper side of the figure. Additionally, in Figure 10 In (a) to (f), what is shown in black is liquid. Furthermore, in Figure 10 In (a) to (f), the leftmost part represents the liquid when a voltage is applied to the piezoelectric element 35, and then, from left to right, the liquid ejected from the nozzle member 2 after every 4 μs.

[0086] It can be seen that in nozzle components 2 with cone angles of 5 degrees and 10 degrees on the sidewall 216a of the first part 216, the ejected liquid separates into 4 drops in the air, but 2 of these drops merge into 1 drop, and on the far right of the figure, they merge into 3 drops. Furthermore, it can be seen that in nozzle components 2 with cone angles of 15 degrees, 20 degrees, and 30 degrees on the sidewall 216a of the first part 216, the ejected liquid separates into 3 drops in the air, but 2 of these drops merge into 1 drop, and on the far right of the figure, they merge into 3 drops. Figure 10The rightmost two drops in the middle are collected together.

[0087] On the other hand, it can be seen that in the nozzle component 2 with a cone angle of 40 degrees on the side wall 216a of the first part 216, the ejected liquid separates into four parts in the air, even in Figure 10 On the far right, the separated liquids do not pool together, but remain separated into 4 drops.

[0088] Thus, in nozzle member 2 where the cone angle of the sidewall 216a of the first portion 216 is 30 degrees or less, the concentration of the sprayed liquid becomes good. Therefore, in the nozzle member 2 according to this embodiment, the possibility of impact deviation caused by liquid separation due to non-concentration of the sprayed liquid can be reduced. Here, when the first portion 216 has multiple sidewalls 216a with different cone angles, it is sufficient that the cone angle of each sidewall 216a is 30 degrees or less.

[0089] In this embodiment, in the nozzle member 2 with a cone angle of 15 degrees on the sidewall 216a of the first portion 216, the ejected liquid separates into 3 drops in the air, but 2 of these drops merge into 1 drop. Subsequently, the distance between the 2 liquid drops gradually shortens, causing them to converge. Therefore, in the nozzle member 2 with a cone angle greater than 10 degrees and less than 20 degrees on the sidewall 216a of the first portion 216, the possibility of impact deviation caused by liquid separation due to non-convergence of the ejected liquid can be further reduced. Here, when the first portion 216 has multiple sidewalls 216a with different cone angles, it is sufficient that the cone angle of each sidewall 216a is greater than 10 degrees and less than 20 degrees.

[0090] As described above, the nozzle member 2 of this embodiment sprays liquid from the second opening 212 toward the printing paper P. The second portion 217, which includes the second opening 212, has a greater impact on the spraying accuracy of the liquid compared to the first portion 216. In the nozzle member 2 of this embodiment, the surface roughness of the sidewall 217a of the second portion 217 is smaller than the surface roughness of the sidewall 216a of the first portion 216. Here, when the surface roughness of the sidewall 21a of the nozzle 21 is small, the liquid flows smoothly and the possibility of air bubbles remaining in the nozzle 21 is reduced. Therefore, in the nozzle member 2 of this embodiment, air bubbles remaining in the sidewall 217a of the second portion 217 are more easily discharged compared to the sidewall 216a of the first portion 216. Therefore, the nozzle member 2 of this embodiment can reduce the influence of retained air bubbles on the spraying characteristics of the liquid.

[0091] It should be noted that "surface roughness" in this specification refers to the maximum height roughness R obtained based on JIS B0601:2013. zFor example, it can be measured by a confocal laser microscope. The same applies below.

[0092] In the nozzle component 2 according to this embodiment, the first portion 216 has a third portion 2161 and a fourth portion 2162. The third portion 2161 is the portion that includes the first opening 211. The fourth portion 2162 is the portion that is connected to the third portion 2161 and connected to the second portion 217.

[0093] Here, in the nozzle 21, the sidewall 21a closer to the liquid ejection side has a greater effect on reducing flow resistance by increasing the cone angle compared to the sidewall 21a farther from the liquid ejection side. Therefore, in the nozzle component 2 according to this embodiment, by making the cone angle of the sidewall 2162a of the fourth portion 2162 closer to the liquid ejection side larger than the cone angle of the sidewall 2161a of the third portion 2161 farther from the liquid ejection side, the flow resistance of the liquid supplied to the nozzle 21 can be further reduced. Here, in this embodiment, the cone angle of the sidewall 2162a of the fourth portion 2162 is 15 degrees, and the cone angle of the sidewall 2161a of the third portion 2161 is 12 degrees. Therefore, the nozzle component 2 according to this embodiment can further reduce the energy used to eject liquid from the nozzle 21.

[0094] In the nozzle component 2 according to this embodiment, the difference between the cone angle of the sidewall 2162a of the fourth portion 2162 and the cone angle of the sidewall 2161a of the third portion 2161 is 10 degrees or less, thus reducing the possibility of air bubbles remaining at the connection between the third portion 2161 and the fourth portion 2162. Furthermore, in the liquid ejector head 1 according to this embodiment, the difference between the cone angle of the sidewall 2162a of the fourth portion 2162 and the cone angle of the sidewall 2161a of the third portion 2161 is 5 degrees or less, thus further reducing the possibility of air bubbles remaining at the connection between the third portion 2161 and the fourth portion 2162.

[0095] Furthermore, in the liquid nozzle 1 according to this embodiment, the connection between the sidewall 2161a of the third portion 2161 and the sidewall 2162a of the fourth portion 2162 forms an angle with a straight line, but it is not limited to this. For example, the connection between the sidewall 2161a of the third portion 2161 and the sidewall 2162a of the fourth portion 2162 may also be curved. In the nozzle member 2 where the connection between the sidewall 2161a of the third portion 2161 and the sidewall 2162a of the fourth portion 2162 is curved in cross-section, the possibility of air bubbles remaining at the connection portion is reduced.

[0096] In the nozzle component 2 of this embodiment, the surface roughness of the sidewall 2161a of the third portion 2161 is smaller than the surface roughness of the sidewall 2162a of the fourth portion 2162.

[0097] In the nozzle component 2 of this embodiment, liquid is supplied to the nozzle 21 from the first opening 211. Therefore, the third portion 2161, including the first opening 211, is a portion where the liquid flow is more prone to turbulence compared to the fourth portion 2162. Consequently, at the third portion 2161, compared to the fourth portion 2162, bubbles are more likely to be generated due to the turbulence of the liquid flow, and these bubbles may remain on the sidewall 2161a of the third portion 2161. In the nozzle component 2 of this embodiment, the surface roughness of the sidewall 2161a of the third portion 2161 is smaller than that of the sidewall 2162a of the fourth portion 2162. Therefore, the possibility of bubbles remaining on the sidewall 2161a of the third portion 2161 is reduced, and the influence of bubbles on the ejection characteristics of the liquid can be reduced.

[0098] Next, refer to Figure 11 The structure of the adjacent nozzles 21 as described in this embodiment will be explained in detail from a top view. Figure 11 This is a top view showing a portion of the nozzle component 2 involved in this embodiment, showing two adjacent nozzles 21.

[0099] In the nozzle component 2 of this embodiment, the maximum value of the distance L1 from one of the first edges 213 to the other first edge 213 is shorter than the maximum value of the distance L2 between the diagonally opposite connecting portions 215.

[0100] In the nozzle component 2 of this embodiment, adjacent nozzles 21 are arranged along the Y-axis direction. Therefore, by making the maximum value of the distance L1 from one of the first edges 213 to the other of the first edges 213 shorter than the maximum value of the distance L2 between the diagonally opposite connecting portions 215, the spacing between the nozzles 21 can be reduced.

[0101] Furthermore, in the nozzle component 2 according to this embodiment, the maximum value of the distance L3 from one of the pair of second edges 214 to the other is also shorter than the maximum value of the distance L2 between the diagonally opposite connecting portions 215. Thus, in the nozzle component 2 according to this embodiment, the first opening 211 has a symmetrical shape, thereby reducing the possibility of turbulent flow of liquid supplied to the first opening 211.

[0102] Reference Figure 12 The structure of the nozzle 21 and pressure chamber 31 as described in this embodiment will be explained in detail from a top view. Figure 12 This is a top view showing a portion of the nozzle component 2 and flow path component 3 involved in this embodiment.

[0103] The liquid ejector head 1 according to this embodiment includes a nozzle member 2 and a flow path member 3. As described above, the flow path member 3 is located on the nozzle member 2 and has a pressure chamber 31 and a vibrating plate 34 and a piezoelectric element 35 located on the pressure chamber 31. A first opening 211 is connected to the pressure chamber 31. Therefore, in the liquid ejector head 1 according to this embodiment, liquid is supplied from the pressure chamber 31 to the nozzle 21 via the first opening 211. Furthermore, the liquid ejector head 1 according to this embodiment ejects liquid from the second opening 212 toward the printing paper P.

[0104] In the liquid nozzle 1 according to this embodiment, the outer periphery of each of the four connecting portions 215 is curved. Therefore, compared with a liquid nozzle in which the outer periphery of each of the four connecting portions forms an angle, the liquid nozzle 1 according to this embodiment can reduce the possibility of air bubbles remaining on the sidewall 21a of the nozzle 21 including the connecting portions 215. Therefore, the liquid nozzle 1 according to this embodiment can reduce the influence of retained air bubbles on the liquid ejection characteristics.

[0105] In the liquid ejector head 1 according to this embodiment, viewed from above, the pressure chamber 31 has a pair of third edges 311 facing each other in the Y-axis direction. The pair of third edges 311 are configured along the X-axis direction. Additionally, the pair of first edges 213 of the first opening 211 are also configured along the X-axis direction. Here, "the pair of first edges 213 along the X-axis direction" means that the straight line connecting the portion 2131 where the first edge 213 is connected to the connecting portion 215 to the portion 2131 where the first edge 213 is connected to the connecting portion 215 is along the X-axis direction. Therefore, in this embodiment, the pair of third edges 311 and the pair of first edges 213 are respectively along the same direction. Furthermore, in this specification, "along the same direction" does not mean completely along the same direction, but rather generally along the same direction. In this embodiment, if the angle between the pair of third edges 311 and the pair of first edges 213 is less than ±5 degrees, it can be said that the pair of third edges 311 are along the same direction as the pair of first edges 213. It should be noted that the same applies below.

[0106] Therefore, compared to liquid nozzles where the pair of third edges and the pair of first edges are in different directions, the liquid nozzle 1 of this embodiment can increase the area of ​​the first opening 211 when viewed from above. For example, in a liquid nozzle where the pair of first edges are inclined at 45 degrees relative to the pair of third edges, the connecting portion approaches or overlaps with the pair of third edges when viewed from above. Therefore, in this liquid nozzle, it is necessary to reduce the area of ​​the first opening when viewed from above to prevent the connecting portion from approaching or overlapping with the pair of third edges. In the liquid nozzle 1 of this embodiment, compared to liquid nozzles where the pair of third edges and the pair of first edges are in different directions, the area of ​​the first opening 211 when viewed from above can be increased, thus reducing the flow resistance of the liquid supplied from the pressure chamber 31 to the first opening 211. Therefore, the liquid nozzle 1 of this embodiment can reduce the energy required to eject liquid from the nozzle 21.

[0107] The liquid ejector head 1 according to this embodiment includes a first orifice 32, which, when viewed from above, is located at one end of a pressure chamber 31 and is capable of supplying liquid to the pressure chamber 31. The first orifice 32 corresponds to a supply path for supplying liquid to the pressure chamber 31. Furthermore, the nozzle 21 is located at the other end of the pressure chamber 31. Therefore, in the liquid ejector head 1 according to this embodiment, liquid is supplied from the supply path located at one end of the pressure chamber 31, liquid flows to the nozzle 21 located at the other end, and liquid is ejected from the nozzle 21.

[0108] Furthermore, in the liquid ejector head 1 according to this embodiment, the pressure chamber 31 has a fourth edge 312 located at one end and connected to a pair of third edges 311. Therefore, as liquid flows from one end of the pressure chamber 31 toward the fourth edge 312, air bubbles may remain in the portion between the first opening 211 and the fourth edge 312 in the pressure chamber 31 when viewed from above. In the liquid ejector head 1 according to this embodiment, a pair of second edges 214 are configured along the Y-axis direction, and the fourth edge 312 is also configured along the Y-axis direction. Here, "a pair of second edges 214 along the Y-axis direction" means that the straight line connecting the portion 2141 where the second edge 214 is connected to the connecting portion 215 to the other portion 2141 where the second edge 214 is connected to the connecting portion 215 is along the Y-axis direction. Therefore, in this embodiment, the pair of second edges 214 and the fourth edge 312 are respectively along the same direction.

[0109] Therefore, in the liquid ejector head 1 according to this embodiment, the portion between the first opening 211 and the fourth edge 312 in the pressure chamber 31 can be reduced. Therefore, the liquid ejector head 1 according to this embodiment can reduce the possibility of air bubbles remaining in the portion between the first opening 211 and the fourth edge 312 in the pressure chamber 31.

[0110] In the liquid nozzle 1 according to this embodiment, the first orifice 32 corresponds to the "supply path" described in the technical solution. However, in the liquid nozzle 1 where the pressure chamber 31 and the second orifice 41 are directly connected, the second orifice 41 corresponds to the "supply path" described in the technical solution. Therefore, in the liquid nozzle where the pressure chamber 31 and the second orifice 41 are directly connected, it is sufficient to have the second orifice 41 at one end of the pressure chamber 31 and the nozzle 21 at the other end.

[0111] Finally, the manufacturing method of the liquid ejector head 1 will be explained.

[0112] First, the manufacturing method of nozzle component 2 will be explained. (Refer to...) Figure 13 To illustrate the manufacturing method of nozzle 21.

[0113] Figure 13 This diagram shows the sequential steps of fabricating the nozzle 21 on the monocrystalline silicon substrate S. Figure 13 In the middle, starting from the left, the shapes of the nozzle component 2 that performs the first etching E1 on the monocrystalline silicon substrate S, the nozzle component 2 that performs the second etching E2 on the monocrystalline silicon substrate S after the first etching E1, and the nozzle component 2 that performs the third etching E3 on the monocrystalline silicon substrate S after the first etching E1 and the second etching E2 are shown in sequence.

[0114] The nozzle component 2 is manufactured by performing a first etching E1 on a single-crystal silicon substrate S, followed by a second etching E2, and then a third etching E3 to form the nozzle 21.

[0115] In the first etching E1, a third portion 2161 is formed as part of the first portion 216. The third portion 2161 includes a first opening 211 and has a tapered sidewall 2161a in cross-section.

[0116] The second etching E2 is performed after the first etching E1. By performing the second etching E2 after the first etching E1, a fourth portion 2162, which constitutes the remainder of the first portion 216, is formed, thus forming the entire first portion 216. The fourth portion 2162 is connected to the third portion 2161. Furthermore, the sidewall 2162a of the fourth portion 2162 has a larger cone angle compared to the sidewall 2161a of the third portion 2161.

[0117] The third etching E3 is performed after the second etching E2. By performing the third etching E3 after the second etching E2, the second portion 217 is formed. The second portion 217 includes a second opening 212. In addition, the sidewall 217a of the second portion 217 is straight.

[0118] Reference Figure 14 To illustrate the conditions for the second etching. Figure 14 This is a diagram showing the nozzle component 2, which has only undergone the second etching E2 on the single-crystal silicon substrate S.

[0119] The nozzle member 2, which performs only the second etching E2 on the monocrystalline silicon substrate S, has a circular portion 219, which has a sidewall 219a that convex outwards in cross-section. Furthermore, in the nozzle member 2 that performs only the second etching E2 on the monocrystalline silicon substrate S, a tapered portion is formed on the underside of the circular portion 219 in cross-section, and this tapered portion has a tapered sidewall 220a. Thus, the condition for the second etching E2 is that, when only this second etching E2 is performed on the monocrystalline silicon substrate S, a circular portion 219 with a sidewall 219a convex outwards in cross-section and a tapered portion 220 with a tapered sidewall 220a on the underside of the circular portion 219 are formed.

[0120] The inventors conducted detailed research and learned that when a second etching E2 is performed under the aforementioned conditions after a first etching E1 on a single-crystal silicon substrate S, a structure as described above can be formed. Figure 13 The first portion 216, as shown in the central diagram, has a conical sidewall in cross-section. Furthermore, this manufacturing method allows the height of the first portion 216 to be greater than half the height of the nozzle member 2. Moreover, this manufacturing method allows the formation of a third portion 2161, which is part of the first portion 216, and a fourth portion 2162, which is the remainder, and allows the sidewall 2162a of the fourth portion 2162 to have a larger cone angle compared to the sidewall 2161a of the third portion 2161.

[0121] It should be noted that the substrate used to manufacture the nozzle component 2 is not limited to a single-crystal silicon substrate; for example, an SOI substrate can also be used.

[0122] Next, the manufacturing method of the flow path component 3 will be described. The flow path component 3 can be manufactured by sequentially forming and etching various films on a single monocrystalline silicon substrate. On the monocrystalline silicon substrate, the vibrating plate 34 and the piezoelectric element 35 are formed by sputtering, sol-gel method, CVD method or thermal oxidation method. The pressure chamber 31 and the first aperture 32 are formed, for example, by etching the monocrystalline silicon substrate.

[0123] The liquid nozzle 1 is manufactured by: attaching the support member 4 to the flow path member 3, then attaching the nozzle member 2 to the flow path member 3, and finally attaching the liquid supply member 5 to the support member 4. The order of attachment is not limited to this. For example, the nozzle member 2 could be attached to the flow path member 3, and then the support member 4 could be attached to the flow path member 3. It should be noted that the attachment between the nozzle member 2 and the flow path member 3, and between the flow path member 3 and the support member 4, can be achieved through methods such as room temperature attachment or metal-to-metal attachment. Furthermore, the attachment between the support member 4 and the liquid supply member 5 can be achieved by using an adhesive. It should be noted that the attachment method is not limited to this.

[0124] Explanation of reference numerals in the attached figures:

[0125] 1. Liquid ejector head

[0126] 10. Printer (recording device)

[0127] 2 Nozzle components

[0128] 21 nozzles

[0129] 21a Sidewall

[0130] 211 First opening

[0131] 212 Second opening

[0132] 213 A pair of first fates

[0133] 214 A pair of second fates

[0134] 215 Connecting part

[0135] 216 First Part

[0136] 216a Sidewall of the first part

[0137] 2161 Third Part

[0138] 2161a Side wall of the third part

[0139] 2162 Fourth Part

[0140] 2162a Side wall of the fourth part

[0141] 217 Second Part

[0142] 217a Sidewall of the second part

[0143] 3 Flow path components

[0144] 31 Pressure Chamber

[0145] 311 A pair of third-degree connections

[0146] 312 The Fourth Bond

[0147] 32 First pore (supply path)

[0148] 34 Vibrating plate (actuator)

[0149] 35. Piezoelectric element (actuator).

Claims

1. A nozzle component comprising a nozzle having a first opening and a second opening located on the opposite side of the first opening, wherein, The first opening is located on the liquid supply side of the nozzle. The second opening is located on the liquid ejection side of the nozzle. From an overhead view, The edge of the first opening has: A pair of first encounters, facing each other; A pair of second relationships that are opposite each other; and Four connecting parts that connect a pair of first edges and a pair of second edges respectively. The four connecting parts are respectively curved.

2. The nozzle component according to claim 1, wherein, From an overhead view, The first edge of the pair is convex. The second edge of each pair is also convex.

3. The nozzle component according to claim 1 or 2, wherein, From an overhead view, The second opening is circular in shape.

4. The nozzle component according to any one of claims 1 to 3, wherein, Under cross-section, The nozzle has: The first portion includes the first opening; and The second part, which is connected to the first part, includes the second opening. The sidewall of the first part is cone-shaped. The sidewalls of the second part are straight.

5. The nozzle component according to claim 4, wherein, Under cross-section, The cone angle of the sidewall of the first part is less than 30 degrees.

6. The nozzle component according to claim 4 or 5, wherein, The surface roughness of the straight portion is smaller than that of the tapered portion.

7. The nozzle component according to any one of claims 4 to 6, wherein, Under cross-section, The first part has: The third part includes the first opening; as well as The fourth part is connected to the third part and also to the second part. The cone angle of the sidewall of the fourth part is larger than that of the sidewall of the third part.

8. The nozzle component according to claim 6 or 7, wherein, Under cross-section, The first part has: The third portion includes the first opening; and The fourth part is connected to the third part and also to the second part. The connection between the side of the third part and the side of the fourth part is curved.

9. The nozzle component according to claim 7 or 8, wherein, The surface roughness of the third part is smaller than that of the fourth part.

10. A liquid ejector head, wherein, The liquid ejector head includes: The nozzle component according to any one of claims 1 to 9; and A flow path component, located on the nozzle component, having a pressure chamber and an actuator on the pressure chamber. The first opening is connected to the pressure chamber. The second opening has the function of ejecting the liquid that has flowed into the pressure chamber through the first opening to the outside.

11. The liquid ejector head according to claim 10, wherein, From an overhead view, The pressure chamber has a pair of third edges that are opposite each other. The pair of third edges and the pair of first edges are respectively along the same direction.

12. The liquid ejector head according to claim 10 or 11, wherein, From an overhead view, The liquid ejector head has a supply path located at one end of the pressure chamber and capable of supplying liquid to the pressure chamber. The nozzle is located at the other end of the pressure chamber. The pressure chamber has a pair of third edges facing each other and a fourth edge located at the end side of the other edge and connected to the pair of third edges. The second edge and the fourth edge are respectively along the same direction.

13. A recording device, wherein, The recording device includes: Liquid ejector head as described in any one of claims 10 to 12; The moving part, which causes relative movement between the liquid ejection head and the recording medium; and A control unit that controls the moving unit.

14. A method for manufacturing a nozzle component, the nozzle component comprising a nozzle having a first opening and a second opening located on the opposite side of the first opening, wherein, The method for manufacturing the nozzle component includes: The first etching forms a portion of a first region on the substrate, which includes the first opening and has a tapered sidewall in cross-section. as well as The second etching, which occurs after the first etching, forms the remaining portion of the first portion on the substrate. The condition for the second etching is that, when only the second etching is performed on the substrate, a sidewall that is convex outward in cross-section is formed.

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