Micro-electro-mechanical device and electronic device

Abstract

The embodiment of the utility model relates to a micro-electro-mechanical device and an electronic device. The microelectromechanical device includes a support comprising a semiconductor material and a movable mass constrained to the support with a relative degree of freedom with respect to at least one direction of movement over a range of permissible positions. The apparatus further includes a stopper element operable by the movable mass due to movement along at least one direction of movement and configured to move the stopper element when the movable mass reaches a respective end point of the range of allowable positions. A stop force is applied to opposite sides of the movable mass transverse to the at least one direction of movement to prevent the movable mass from exceeding the respective end point.

Description

Technical Field

[0001] The present disclosure relates to a microelectromechanical (MEMS) device including a movable mass and a stopper mechanism. Background Art

[0002] Inertial microelectromechanical (MEMS) devices, in particular such as gyroscopes and accelerometers, base their operation on a mass coupled to a support (such as a frame or substrate of semiconductor material, for example) by flexures (springs) which allow the mass to oscillate in one or more directions in order to detect changes in physical quantities or to act as an actuator.

[0003] Responds to shocks that may occur during the life of the sensor (with a 3 -10 5 g), the movable mass may go beyond the range of working positions that are considered safe. In order to avoid damage to the springs, for example, stopper elements are provided, which can limit the allowed displacement of the movable mass.

[0004] A typical stop element may include a static block anchored to a substrate and arranged at a given distance from the mass block in the direction of motion (in a static position) so as to allow normal operation of the device and at the same time limit the maximum displacement allowed for the movable mass block (i.e., full stroke).

[0005] The full stroke is actually determined by the head-on impact between the movable mass and the stop element; the latter usually has a suitably patterned surface in order to limit the stresses generated at the interface between the two impact surfaces.

[0006] The disadvantages of the known solutions are mainly that the stopping force applied by the stopper element may lead to damage and / or sticking of the movable mass to the structure. Furthermore, since the direction of the impact force is usually not perfectly colinear with the direction of movement, the direction of movement (rebound direction) of the movable mass after hitting the stopper element may be unpredictable. Utility Model Content

[0007] The present disclosure is directed to one or more embodiments to overcome or at least alleviate the disadvantages and limitations of the prior art.

[0008] According to the present disclosure, a MEMS device is proposed. For example, in at least one embodiment, the MEMS device can be summarized as comprising: a support body, the support body comprising a semiconductor material; a movable mass block, the movable mass block being constrained to the support body with a relative degree of freedom relative to at least one direction of motion within a range of positions; a stopper element, the stopper element being operable by the movable mass block due to movement along at least one direction of motion of the movable mass block, and the stopper element being configured to apply a stopper force to the opposite side of the movable mass block transversely to the at least one direction of motion when the movable mass block reaches the corresponding end point of the range of positions in operation to prevent the movable mass block from exceeding the corresponding end point.

[0009] According to one embodiment, the micro-electromechanical device comprises anchors which are fixed to a support body and connecting elements which connect stopper elements to respective anchors.

[0010] According to one embodiment, the connection element is configured to allow, in operation, a rotation of the stop element about a respective rotation axis, the rotation axis being perpendicular to at least one direction of movement of the movable mass.

[0011] According to one embodiment, the stop elements are arranged around the movable mass and the stop elements are coupled to the movable mass such that the stop elements cooperate to clamp onto the movable mass by rotating in a corresponding opposite direction in response to movement of the movable mass along at least one direction of motion.

[0012] According to one embodiment, the micro-electromechanical device comprises a coupling element, which is constrained to the movable mass and which is configured to, in operation, operate the stopper element due to a movement of the movable mass along at least one direction of motion.

[0013] According to one embodiment, the coupling element is fixed to the movable mass and the stopper element, and wherein the anchor, the connection element and the coupling element are configured to keep the movable mass suspended relative to the support.

[0014] According to one embodiment, the microelectromechanical device comprises a further connection element and a further anchor, wherein the movable mass is kept suspended relative to the support body by the further connection element and by the further anchor, and the further connection element is shaped to allow movement of the movable mass according to at least one direction of movement of the movable mass.

[0015] According to one embodiment, the coupling element comprises a flexure.

[0016] According to one embodiment, the coupling element comprises a protrusion of rigid material, the protrusion being carried by the movable mass.

[0017] According to one embodiment, the stop element comprises a corresponding transmission arm, which is coupled to the movable mass block by means of a corresponding coupling element, and the corresponding transmission arm is configured to cause the stop element to rotate around the corresponding rotation axis in response to the movement of the movable mass block along at least one direction of movement during operation.

[0018] According to one embodiment, the stop element comprises a stop arm having ends, the stop arm being configured to clamp onto the movable mass in operation when the movable mass reaches respective ends of the range of positions.

[0019] According to one embodiment, the ends of the stop arms are patterned to engage corresponding seats on the sides of the movable mass when the movable mass reaches corresponding ends of the range of positions.

[0020] According to one embodiment, each respective one of the stop elements comprises a transmission arm facing a first side of the movable mass and a stop arm facing a second side of the movable mass, the second side being transverse to the first side of the movable mass.

[0021] According to one embodiment, each respective one of the stopper elements comprises a transmission arm facing a side of the movable mass and a stopper arm facing a side of the movable mass.

[0022] Another embodiment provides an electronic device. The electronic device includes: a support body; a movable mass block, the movable mass block is suspended from the support body, the movable mass block includes: a static position; a first end position, the first end position is away from the static position in a first movement direction; and a second end position, the second end position is away from the static position in a second movement direction, the second movement direction is different from the first movement direction; a first pair of stopper elements, the first pair of stopper elements are configured to clamp to the pair of opposite sides of the movable mass block when the movable mass block is at the first end point during operation, each corresponding stopper element in the first pair of stopper elements includes: a stopper arm, the stopper arm includes an end portion that abuts a corresponding side of the pair of opposite sides when the movable mass block is at the first end position; and a transmission arm , a transmission arm is coupled to the stop arm, the transmission arm is configured to rotate the stop arm in response to the movable mass block moving toward the first end position in the first motion direction during operation; a second pair of stop elements, the second pair of stop elements are configured to clamp to the pair of opposite sides of the movable mass block when the movable mass block is at the second end point during operation, each corresponding stop element in the second pair of stop elements includes: a stop arm, the stop arm includes an end portion adjacent to a corresponding side of the pair of opposite sides when the movable mass block is at the second end point position; and a transmission arm, the transmission arm is coupled to the stop arm, the transmission arm is configured to rotate the stop arm in response to the movable mass block moving toward the second end point position in the second motion direction during operation.

[0023] According to another embodiment, the first direction of movement is opposite to the second direction of movement.

[0024] According to another embodiment, the movable mass includes a plurality of seats along pairs of opposing sides of the movable mass; and the stop arms of the first pair of stop elements include ends patterned to engage corresponding seats of the plurality of seats.

[0025] Another embodiment provides an electronic device. The electronic device includes: a support body; a movable mass, the movable mass is suspended from the support body, the movable mass has multiple sides, and the movable mass includes: a static position; a first end position, the first end position is away from the static position in a first direction of motion; and a second end position, the second end position is away from the static position in a second direction of motion, and the second direction of motion is different from the first direction of motion; a plurality of stopper elements, the plurality of stopper elements are configured to prevent the movable mass from moving past the first end position and the second end position during operation, and each corresponding stopper element in the plurality of stopper elements includes: a first group of stopper elements, the first group of stopper elements includes corresponding stopper arms, the stopper arms have ends, when the movable mass is in the first end position, the ends are adjacent to one or more corresponding sides of the plurality of sides of the movable mass; and a second group of stopper elements, the second group of stopper elements includes corresponding stopper arms, the stopper arms have ends, when the movable mass is in the second end position, the ends are adjacent to one or more corresponding sides of the plurality of sides of the movable mass.

[0026] According to another embodiment, an electronic device includes: a plurality of anchors, the plurality of anchors being coupled to a support; and a plurality of connection elements, the plurality of connection elements being coupled to the plurality of anchors and the movable mass, and

[0027] The anchor and the plurality of connection elements provide the movable mass with one or more degrees of freedom to move between a first end position and a second end position.

[0028] According to another embodiment, the movable mass includes a plurality of seats along multiple sides of the movable mass; and the corresponding stop arms of the first set of stop elements and the second set of stop elements each include an end patterned to engage with a corresponding seat in the plurality of seats. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] For a better understanding of the present disclosure, preferred embodiments are presented by way of non-limiting examples with reference to the accompanying drawings, in which:

[0030] Figure 1 A MEMS device in a first operational configuration according to an embodiment of the present disclosure is illustrated in a top view;

[0031] Figure 2 The top view shows Figure 1 The range of permissible positions of components of a MEMS device;

[0032] Figure 3 The second operating configuration is shown in a top view. Figure 1 MEMS devices;

[0033] Figure 4 The top view shows Figure 1 A magnified detail of a MEMS device;

[0034] Figure 5 A MEMS device according to another embodiment of the present disclosure is illustrated in a top view;

[0035] Figure 6 A MEMS device according to another embodiment of the present disclosure is illustrated in a top view; and

[0036] Figure 7 The top view shows Figure 6 The range of permissible positions of components of a MEMS device. DETAILED DESCRIPTION

[0037] The following description refers to the arrangements shown in the accompanying drawings; therefore, expressions such as "above", "below", "upper", "lower", "top", "bottom", "right", "left", etc. are related to the drawings and should not be interpreted in a limiting manner.

[0038] Figures 1 to 3 A microelectromechanical or MEMS device 1, for example an inertial sensor such as an accelerometer or a gyroscope, according to an embodiment of the present disclosure is illustrated. The MEMS device 1 comprises a support 2, for example a substrate of semiconductor material, and a movable mass 3 coupled to the support 2 so as to be able to oscillate along one or more directions of motion within a range of permissible positions I ( Figure 2 ), as described in more detail below. Each range I is defined by opposite end points I1, I2 corresponding to the full travel position of the movable mass 3, and includes a rest position I0, which is not necessarily the center.

[0039] exist Figure 1 In the example, the MEMS device 1 is shown in its rest condition ( Figure 2 In one embodiment, the movable mass 3 is allowed to move along a motion direction D, such as a detection or driving direction parallel to the horizontal axis X of a three-axis reference system of axes X, Y, and Z that are orthogonal to each other. Although the direction D is shown as pointing to Figure 1 but alternatively, when some external force is applied, the direction of motion D may be directed to Figure 1 left hand side.

[0040] The MEMS device 1 further comprises a stopper element 7 which is arranged around the movable mass 3 and coupled to the support 2 via an anchor 9. Specifically, the stopper element 7 is supported by the corresponding anchor 9 by means of a connection element 8 which is configured to allow the stopper element 7 to rotate around a corresponding rotation axis R parallel to the vertical axis Z.

[0041] The movable mass 3 is connected to the stopper element 7 via a coupling element 5 .

[0042] The coupling element 5 comprises a flexure (spring) which constrains the movable mass 3 to the stopper element 7 and, together with the anchor 9 and the connection element 8 , keeps the movable mass 3 suspended relative to the support 2 in the direction of the vertical axis Z.

[0043] The stopper element 7 is configured to limit the movement of the movable mass 3 along the motion direction D within a range of permissible positions I. In the MEMS device 1, the stopper element 7 has a general "L" shape and is provided with an actuator arm 7A and a stopper arm 7B.

[0044] The stopper element 7 is operated by the movable mass 3 via a coupling element 5 which, in the MEMS device 1 , connects the movable mass 3 to the end of the actuator arm 7A of the stopper element 7 opposite the anchor 9 .

[0045] During the period in which the movable mass 3 is allowed to move along the direction of movement D, the movable mass 3 operates the stopper element 7 via the coupling element 5 .

[0046] Specifically, the movable mass 3 pushes / pull the actuator arm 7A, thus causing the stopper element 7 to rotate around the corresponding rotation axis R. Figure 3 As shown in , the rotation axes R are each located between the corresponding stop element 7 and the corresponding anchor 9 .

[0047] The stopper element 7 , in particular the stopper arm 7B, is dimensioned to ensure adequate stiffness and allow normal operation of the MEMS device 1 as long as the movement of the movable mass 3 is contained within the range I of permissible positions from the designed rest position I0 .

[0048] on the contrary, Figure 3 The full travel conditions of the movement of the movable mass 3 are shown, in particular for a movement to the right in the direction of movement D, for example in response to an impact.

[0049] When the movable mass block 3 reaches one of the end points I1, I2 of the range I of the permissible position ( Figure 3When the movable mass block 3 moves to the end point I1), the stopper element 7 on the side to which the movable mass block 3 moves rotates to the point where the corresponding stopper arm 7B contacts the movable mass block 3 and clamps the movable mass block 3.

[0050] More precisely, the end 77 of the stopper arm 7B exerts a stop force F transversely to the direction of movement D on the opposite side of the movable mass 3 due to the rotation. C , which creates a "clamping effect".

[0051] exist Figure 3 In the example, the stopping force F C Perpendicular to the direction of movement D and the axis Z. In some alternative embodiments, the clamping force may be at some other angle transverse to the direction of movement D.

[0052] For clear understanding, Figure 3 It is also shown that the movable mass 3 is in a rest position once it has reached the end point I1 .

[0053] The stopper element 7 on the side where the movable mass 3 moves away is dragged and rotated by the movement of the movable mass 3 so that the corresponding stopper arm 7B tends to open without interfering with the stopping action.

[0054] refer to Figure 4 The end 77 of the stopper arm 7B is patterned to engage a corresponding seat 73 on the side of the movable mass 3 when reaching the respective end points I1, I2 of the range I, thereby allowing control of the applied stop force F C direction.

[0055] For example, in Figure 3 , the end 77 of the stopper arm 7B is shaped to contact the side of the movable mass 3 in a parallel manner.

[0056] When the action of the stopper element 7 following the impact experienced by the movable mass 3 is terminated, the system constituted by the movable mass 3 , the coupling element 5 and the stopper element 7 returns to normal operation.

[0057] Stop force F C The strength of can be selected according to design preference by acting on the ratio between the length of the stopper arm 7B and the length of the transmission arm 7A.

[0058] The applicant has verified that the stopping force F exerted by the stopper arm 7B C The stopping force F can be lower than that obtained by using a stationary block stopper element that stops the movable mass block 3 from the front. C Stop force F C It is also a structural balancing force system of the MEMS device 1 .

[0059] The resulting "clamping effect" also limits the movable mass block 3 from moving in the direction preset for movement (in Figure 1 and Figure 3 Movement in a direction perpendicular to the axis Y) ensures greater rigidity for lateral movement.

[0060] The overall benefits achieved include a lower risk of damage to the entire structure and a more controllable and predictable rebound direction of the movable mass 3.

[0061] Figure 5 A MEMS device 100 is shown according to various embodiments of the present disclosure. Figure 5 in Figure 1 Elements corresponding to those in FIG. 8 are illustrated with the same reference numerals, in particular the support body 2 , the movable mass 3 , the stop element 7 and the anchor 9 .

[0062] The coupling element 105 may comprise a protrusion of a rigid material, which extends from the movable mass 3 towards the respective stopper element 7. The coupling element 105 contacts the transmission arm 7A of the respective stopper element 7 on the side towards which it moves due to the oscillation of the movable mass 3 and causes a rotation of the respective stopper element 7. On the side away from it, the coupling element 105 may be separated from the respective stopper element 7. In this case, the connection element 8 applies an elastic return force, which moves the stopper element 7 towards a stationary configuration, in which the stopper arm 7B is separated from the movable mass 3 and does not interfere with the oscillation.

[0063] The stop element 7 thus functions as described previously, while clamping the movable mass 3 on the opposite side.

[0064] exist Figure 5 In the embodiment of FIG. 1 , the movable mass 3 is kept suspended relative to the support 2 by means of a further connection element 108 and an anchor 109. In particular, the connection element 108 is shaped to allow the movable mass 3 to move according to the direction of movement D.

[0065] exist Figure 5 In the embodiment, the movable mass block 3 is in a stationary condition.

[0066] Figure 6 A MEMS device 200 according to another embodiment of the present disclosure is shown. Figure 6 in Figure 1 and Figure 5 Corresponding elements in FIG. 1 are shown with the same reference numerals.

[0067] In the MEMS device 200, the movable mass 3 can be moved between the corresponding first end points I Xl and the corresponding second endpoint I X2The first range I of the allowed positions is defined X In the first direction of motion D X Move with a first degree of freedom; and can be moved by the corresponding first endpoint I Y1 and the corresponding second endpoint I Y2 The second range I of the allowed position is defined Y In the second direction of motion D Y Move with a second degree of freedom, the second motion direction D Y Perpendicular to the first movement direction D X and is perpendicular to the axis Z. End point I X1 ,I X2 With endpoint I Y1 ,I Y2 Can be different ( Figure 7 ).

[0068] The MEMS device 200 comprises a stopper element 7 which is oriented in such a way that the previously described “clamping effect” for the movement of the movable mass 3 beyond the first direction of movement D is achieved in an independent manner. X The range of permissible positions I X and along the second movement direction D Y The range of permissible positions I Y Both of these.

[0069] In this embodiment, the coupling element 105 comprises a protrusion of a rigid material, for example having the shape of a triangular-based prism, which extends from the movable mass 3 towards the corresponding stopper element 7. The stopper element 7 is dimensioned so as not to interfere during normal operation of the MEMS device 200 and so that the movement directions D along which the stopper moves perpendicularly to each other are not disturbed. X , D Y The applied stopping actions do not interfere with each other.

[0070] The coupling element 105 contacts the transmission arm 7A of the corresponding stopper element 7 close to the coupling element 105 (similar to what was described previously, considering the displacement), operating the rotation of the corresponding stopper element 7 about the corresponding rotation axis R. The distant coupling element 105 can alternatively be separated from the corresponding and close stopper element 7.

[0071] For the movable mass 3 exceeding the permissible position range I X ,I Y The stop element 7 thus acts as described previously, clamping the movable mass 3 on the opposite side simultaneously.

[0072] exist Figure 6In the embodiment, each stopper element 7 has a transmission arm 7A and a stopper arm 7B facing the same side of the movable mass 3. X Out of range of permissible position I X The stopper element 7 of the movable mass block 3 faces the first side of the movable mass block 3; the clamping object can be moved along the movement direction D Y Exceeding the range of permissible position I Y The stopper element 7 of the movable mass 3 faces a second side of the movable mass 3 , the second side being orthogonal to the first side.

[0073] exist Figure 6 In the embodiment of the invention, the movable mass 3 is kept suspended relative to the support 2 by means of a further connection element 208 and an anchor 209. In particular, the connection element 208 is shaped to allow the movable mass 3 to be moved according to the movement direction D X , D Y move.

[0074] exist Figure 6 In the embodiment, the movable mass block 3 is in a stationary condition.

[0075] Finally, it is clear that modifications and variations may be made to what has been described and illustrated herein without departing from the scope of the present disclosure as defined in the appended claims.

[0076] A micro-electromechanical device (1; 100; 200) can be summarized as comprising: a support (2) comprising a semiconductor material; a movable mass (3) within a range of allowable positions (I; I X ;I Y ) with respect to at least one direction of motion (D; D X ;D Y ) is constrained to the support body; a stopper element (7) which can be operated by the movable mass (3) due to the movement along at least one direction of movement and is configured to stop the movable mass (3) when it reaches the corresponding end point (I1, I2; I3) of the range of permissible positions. X1 , I X2 ;I Y1 , I Y2 ), a stopping force (F) is applied to the opposite side of the movable mass block (3) transversely to at least one direction of movement. C ) to prevent the movable mass (3) from exceeding the corresponding end point.

[0077] The device (1; 100; 200) may comprise anchors (9) fixed to the support (2) and connecting elements (8) connecting the stopper elements (7) to the respective anchors (9).

[0078] The connection element (8) may be configured to allow the stopper element (7) to rotate about a respective rotation axis (R), the rotation axis (R) rotating perpendicular to at least one direction of movement of the movable mass (3).

[0079] The stopper element (7) may be arranged around the movable mass (3) and may be coupled to the movable mass (3) so that the stopper element (7) cooperates to move the movable mass (3) along at least one direction of motion (D; D X ;D Y ) is moved and rotated in the corresponding opposite direction to clamp the movable mass block (3).

[0080] The device (1; 100; 200) may comprise a coupling element (5; 105) which is constrained to the movable mass (3) and which may be configured to operate a stop element (7) as a result of a movement of the movable mass (3) along at least one direction of movement.

[0081] The coupling element (5) may be fixed to the movable mass (3) and the stopper element (7), and the anchor (9), the connecting element (8) and the coupling element (5) may be configured to keep the movable mass suspended relative to the support (2).

[0082] The device (100; 200) may comprise a further connection element (108; 208) and a further anchor (109; 209), wherein the movable mass (3) can be kept suspended relative to the support (2) by means of the further connection element (108; 208) and by means of the further anchor (109; 209), the further connection element (108; 208) being shaped to allow the movable mass to be moved according to at least one direction of movement (D; D X ;D Y ) movement.

[0083] The coupling element (5) may comprise a flexure.

[0084] The coupling element (105) may comprise a protrusion of a rigid material, the protrusion being carried by the movable mass (3).

[0085] The stopper element (7) may comprise a corresponding transmission arm (7A) coupled to the movable mass (3) by means of a corresponding coupling element (5; 105) so as to respond to the movable mass (3) moving along at least one direction of movement (D; D X ;D Y ) causes the stop element (7) to rotate around the corresponding rotation axis (R).

[0086] The stop element (7) may include a stop arm (7B) having an end (77), the stop arm (7B) being configured to clamp the movable mass (3) when the movable mass (3) reaches a corresponding end point of the range of permissible positions.

[0087] The ends (77) of the stopper arms (7B) may be patterned to engage corresponding seats (73) on the sides of the movable mass (3) when the movable mass reaches corresponding ends of the range of permissible positions.

[0088] In each stopper element (7), the transmission arm (7A) and the stopper arm (7B) may face respective orthogonal sides of the movable mass (3).

[0089] Each stopper element (7) may have a transmission arm (7A) and a stopper arm (7B), the transmission arm (7A) and the stopper arm (7B) facing the same side of the movable mass (3).

[0090] The various embodiments described above can be combined to provide further embodiments. Aspects of the embodiments can be modified, if necessary to employ concepts of the various patents, applications and publications to provide further embodiments.

[0091] These and other changes can be made to the embodiments in light of the above detailed description. In general, in the appended claims, the terms used should not be interpreted as limiting the claims to the specific embodiments disclosed in the specification and claims, but should be interpreted to include all possible embodiments and the full scope of equivalents to which these claims are entitled. Therefore, the claims are not limited by this disclosure.

Claims

1. A micro-electromechanical device, characterized in that: include: a support body, the support body comprising a semiconductor material; a movable mass constrained to the support body within a range of positions with relative degrees of freedom with respect to at least one direction of motion; a stopper element operable by the movable mass due to movement along at least one direction of motion of the movable mass, and configured to apply a stopping force to an opposite side of the movable mass transverse to the at least one direction of motion when the movable mass reaches a corresponding end point of the range of positions during operation, so as to prevent the movable mass from exceeding the corresponding end point.

2. The micro-electromechanical device according to claim 1, characterized in that: It comprises anchors which are fixed to the support and connecting elements which connect the stopper elements to the respective anchors.

3. The micro-electromechanical device according to claim 2, characterized in that: The connection element is configured to allow, in operation, a rotation of the stop element about a respective rotation axis, the rotation axis being perpendicular to the at least one movement direction of the movement of the movable mass.

4. The micro-electromechanical device according to claim 3, characterized in that: The stopper elements are arranged around the movable mass and the stopper elements are coupled to the movable mass such that the stopper elements cooperate to clamp onto the movable mass by rotating in a corresponding opposite direction in response to movement of the movable mass along the at least one direction of motion.

5. The micro-electromechanical device according to claim 2, characterized in that: A coupling element is included, the coupling element being constrained to the movable mass and being configured to, in operation, operate the stopper element as a result of the movement of the movable mass along the at least one direction of motion.

6. The micro-electromechanical device according to claim 5, characterized in that: The coupling element is fixed to the movable mass and the stopper element, and wherein the anchor, the connecting element and the coupling element are configured to keep the movable mass suspended relative to the support.

7. The micro-electromechanical device according to claim 2, characterized in that: comprising a further connection element and a further anchor, wherein the movable mass is kept suspended relative to the support body by means of the further connection element and by means of the further anchor, the further connection element being shaped to allow the movement of the movable mass according to the at least one movement direction of the movable mass.

8. The micro-electromechanical device according to claim 5, characterized in that: The coupling element includes a flexure.

9. The micro-electromechanical device according to claim 5, characterized in that: The coupling element comprises a projection of rigid material, the projection being carried by the movable mass.

10. The micro-electromechanical device according to claim 5, characterized in that: The stopper element comprises a corresponding transmission arm, which is coupled to the movable mass block by means of the corresponding coupling element, and the corresponding transmission arm is configured to cause the stopper element to rotate around the corresponding rotation axis in response to the movement of the movable mass block along the at least one movement direction during operation.

11. The micro-electromechanical device according to claim 5, characterized in that: The stop element comprises a stop arm having ends, the stop arm being configured to clamp onto the movable mass when the movable mass reaches respective ends of the range of positions in operation.

12. The micro-electromechanical device according to claim 11, characterized in that: The ends of the stop arms are patterned to engage corresponding seats on sides of the movable mass when the movable mass reaches corresponding ends of the range of positions.

13. The micro-electromechanical device according to claim 11, characterized in that: Each respective one of the stop elements comprises a transmission arm facing a first side of the movable mass and a stop arm facing a second side of the movable mass, the second side being transverse to the first side of the movable mass.

14. The micro-electromechanical device according to claim 11, characterized in that: Each respective one of the stops comprises a transmission arm facing a side of the movable mass and a stopper arm facing the side of the movable mass.

15. An electronic device, characterized in that: include: Support body; a movable mass, the movable mass being suspended from the support, the movable mass comprising: static position; a first endpoint position, the first endpoint position being away from the rest position in a first direction of motion; and a second endpoint position, the second endpoint position being away from the static position in a second motion direction, the second motion direction being different from the first motion direction; a first pair of stop elements configured to clamp onto a pair of opposing sides of the movable mass when the movable mass is at the first end point in operation, each respective stop element of the first pair of stop elements comprising: a stopper arm including ends that abut corresponding ones of the pair of opposing sides when the movable mass is in the first end position; and a transmission arm coupled to the stopper arm, the transmission arm being configured to rotate the stopper arm in response to movement of the movable mass in the first direction of motion toward the first end position in operation; a second pair of stop elements configured to clamp onto pairs of opposing sides of the movable mass when the movable mass is at the second end point in operation, each respective stop element of the second pair of stop elements comprising: a stopper arm including ends abutting corresponding ones of the pair of opposing sides when the movable mass is in the second end position; and A transmission arm is coupled to the stop arm, the transmission arm being configured to rotate the stop arm in response to the movable mass moving in the second direction of motion toward the second end position in operation.

16. The electronic device according to claim 15, characterized in that: The first movement direction is opposite to the second movement direction.

17. The electronic device according to claim 15, characterized in that: The movable mass includes a plurality of seats along pairs of opposing sides of the movable mass; and The stop arms of the first pair of stop elements include ends patterned to engage corresponding seats of the plurality of seats.

18. An electronic device, characterized in that: include: Support body; a movable mass suspended from the support, the movable mass having a plurality of sides, and comprising: static position; a first endpoint position, the first endpoint position being away from the rest position in a first direction of motion; and a second endpoint position, the second endpoint position being away from the static position in a second motion direction, the second motion direction being different from the first motion direction; a plurality of stop elements configured to prevent the movable mass from moving past the first end position and the second end position in operation, each respective stop element of the plurality of stop elements comprising: a first set of stop elements, the first set of stop elements comprising respective stop arms having ends that abut one or more corresponding ones of the plurality of sides of the movable mass when the movable mass is in the first end position; and A second set of stop elements includes respective stop arms having ends that abut one or more corresponding ones of the plurality of sides of the movable mass when the movable mass is in the second end position.

19. The electronic device according to claim 18, characterized in that: include: a plurality of anchors coupled to the support; as well as a plurality of connection elements coupled to the plurality of anchors and the movable mass, and Wherein the anchor and the plurality of connection elements provide the movable mass with one or more degrees of freedom to move between the first end position and the second end position.

20. The electronic device according to claim 18, characterized in that The movable mass includes a plurality of seats along the plurality of sides of the movable mass; and The respective stop arms of the first and second sets of stop elements each include an end portion patterned to engage a corresponding seat of the plurality of seats.

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