Beryllium window structure of X-ray tube
Patent Information
- Application Number
- CN202421113099.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-21
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2034-05-21
Smart Images
Figure CN222440520U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of X-ray tubes, and specifically relates to a beryllium window structure of an X-ray tube. Background Art
[0002] In my country, reflection X-ray tubes are mainly used in industrial precision X-ray nondestructive testing, mainly for industries such as integrated circuits, electronic manufacturing, and new energy batteries. They are also gradually being used in the aerospace industry, nuclear industry, and military industry. Among the main parameter indicators of reflection X-ray tubes, the minimum distance from the focus to the object to be detected (FOD) and the X-ray beam angle determine the detection range of the object to be detected. Therefore, in order to ensure the comprehensiveness of the object when it is detected, the state of the X-ray tube beam angle must be considered. Although the X-ray beam angle can be guaranteed to meet the requirements from the design point of view, in actual production, when brazing the beryllium window ring and the beryllium window, there is solder accumulation on the edge of the beryllium window in the vacuum chamber, which affects the size of the X-ray beam angle, resulting in a deviation between the exit angle and the design value, resulting in low production yield and poor delivery quality. Utility Model Content
[0003] In view of the shortcomings of the prior art mentioned above, the utility model provides a beryllium window structure of an X-ray tube, comprising a beryllium window ring and a beryllium window, wherein a first table top and a second table top are arranged on the inner side of the beryllium window ring, the two are connected by a second side wall, and the second table top and the second side wall form a containing space; when welding, a solder ring is arranged between the beryllium window ring and the beryllium window, and the volume of the solder ring is smaller than the volume of the containing space, and when there is a risk of the solder ring being dispersed, the solder ring can be accumulated in the containing space, thereby avoiding the accumulation of solder on the edge of the beryllium window in the vacuum chamber, thereby ensuring the X-ray beam angle and improving the product yield and reliability.
[0004] In order to achieve the above-mentioned and other related purposes, the utility model provides a beryllium window structure of an X-ray tube, comprising:
[0005] A beryllium window ring, the beryllium window ring is a circular ring structure, having a first surface and a second surface opposite to each other, and a first table surface and a second table surface are provided inside the beryllium window ring between the first surface and the second surface; the first table surface is parallel to the first surface, and the two are connected by a first side wall; the second table surface is parallel to the first table surface, and the two are connected by a second side wall; the distance between the center of the beryllium window ring and the first side wall is greater than the distance between the center of the beryllium window ring and the second side wall;
[0006] The beryllium window is located on the first table, and the side wall of the beryllium window is in contact with the first side wall.
[0007] Optionally, a solder ring is further provided between the first table and the beryllium window, and the solder ring is a circular ring structure.
[0008] Optionally, the second table and the second side wall form a receiving space, and the volume of the receiving space is greater than the volume of the solder ring.
[0009] Optionally, the solder ring has a thickness of 0.08 mm to 0.12 mm and a ring width of 0.48 mm to 0.52 mm.
[0010] Optionally, the solder ring is a copper-silver solder ring.
[0011] Optionally, the width of the second table is 0.48 mm to 0.52 mm.
[0012] Optionally, the height of the second side wall is 0.28 mm to 0.32 mm.
[0013] The beryllium window structure of the X-ray tube provided by the utility model has at least the following beneficial effects:
[0014] The beryllium window structure of the X-ray tube provided by the utility model comprises a beryllium window ring and a beryllium window, wherein a first table top and a second table top are arranged inside the beryllium window ring, the two are connected through a second side wall, and the second table top and the second side wall form a containing space; when welding is performed, a solder ring is arranged between the beryllium window ring and the beryllium window, and the volume of the solder ring is smaller than the volume of the containing space, and when the solder ring has a risk of dispersion, the solder ring can be accumulated in the containing space, thereby avoiding solder accumulation at the edge of the beryllium window in the vacuum chamber, thereby ensuring the X-ray beam output angle and improving the product yield and reliability. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 Shown is a partial schematic diagram of the X-ray beam angle provided in an embodiment.
[0016] Figure 2 Shown is a schematic diagram of the beryllium window structure of an X-ray tube provided in an embodiment.
[0017] Figure 3a-3b Shown is a schematic structural diagram of a beryllium window ring provided in an embodiment.
[0018] Figure 4 Shown is a schematic diagram of welding of a beryllium window structure provided in an embodiment.
[0019] Component number description
[0020] 1 Electron gun
[0021] 2 Targets
[0022] 3 Beryllium window
[0023] 31 Beryllium window exterior
[0024] 32 Inner side of beryllium window
[0025] 4 Beryllium window ring
[0026] 41 First Surface
[0027] 42 Second Surface
[0028] 401 First Counter
[0029] 402 Second countertop
[0030] 410 First side wall
[0031] 420 Second side wall
[0032] 5 Solder ring
[0033] 6 Base
[0034] 7 Upper die DETAILED DESCRIPTION
[0035] The following is an explanation of the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.
[0036] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the utility model in a schematic manner. Although the illustrations only show components related to the utility model rather than being drawn according to the number, shape and size of components in actual implementation, the form, quantity, positional relationship and proportion of each component in actual implementation can be changed at will under the premise of realizing the technical solution of this party, and the component layout form may also be more complicated.
[0037] Example
[0038] In the prior art, the main parameter indicators of the reflection X-ray tube are tube current, tube voltage, focal spot size, minimum distance from the focus to the object to be detected (Focus to object distance, FOD), X-ray beam angle, dose rate, etc. Among them, the minimum distance from the focus to the object to be detected (Focus to object distance, FOD) and the X-ray beam angle determine the detection range of the object to be detected. Figure 1As shown, the electron gun 1 emits electrons to hit the target 2, generating X-rays, which are then emitted through the beryllium window 3. In actual tube core production, the X-ray beam angle cannot achieve the ideal state in design. The main reason is that during the brazing process of the beryllium window 3 and the beryllium window ring 4, solder accumulates on the edge of the beryllium window 3 in the vacuum chamber, thus affecting the size of the X-ray beam angle A. According to statistics, in current batch production, the defective rate of the beryllium window combination formed by the beryllium window 3 and the beryllium window ring 4 is 10%, of which the solder dispersion problem accounts for 8%, which seriously affects product performance and production delivery.
[0039] This embodiment provides a beryllium window structure of an X-ray tube, such as Figure 2 As shown, it includes a beryllium window 3, a beryllium window ring 4 and a solder ring 5.
[0040] Combination Figure 3a and Figure 3b As shown, the beryllium window ring 4 is a circular ring structure, having a first surface 41 and a second surface 42 opposite to each other, and a first table 401 and a second table 402 are provided inside the beryllium window ring 4 between the first surface 41 and the second surface 42. As an example, the first table 401 is parallel to the first surface 41, and the two are connected by a first side wall 410; the second table 402 is parallel to the first table 401, and the two are connected by a second side wall 420; the distance between the center of the beryllium window ring 4 and the first side wall 410 is greater than the distance between the center of the beryllium window ring 4 and the second side wall 420.
[0041] As an example, the second mesa 402 and the second side wall 420 form a receiving space. In this embodiment, the width of the second mesa 402 is 0.48 mm to 0.52 mm, preferably 0.5 mm; the height of the second side wall 420 is 0.28 mm to 0.32 mm, preferably 0.3 mm.
[0042] like Figure 2 As shown, the beryllium window 3 is located on the first table 401. As an example, the radius of the beryllium window 3 is equal to the distance from the center of the beryllium window ring 4 to the first side wall 410, so that the side wall of the beryllium window 3 is in contact with the first side wall 410; the outer side surface 31 of the beryllium window 3 is flush with the first surface 41, and the thickness of the beryllium window 3 is less than the height of the first side wall 410, so that a gap is formed between the inner side surface 32 of the beryllium window 3 and the first table 401.
[0043] like Figure 2As shown, the solder ring 5 is located in the gap formed between the first table 401 and the beryllium window 3. The solder ring 5 is a circular ring structure and is used to connect the beryllium window 3 and the beryllium window ring 4. As an example, the volume of the solder ring 5 is smaller than the volume of the accommodation space formed by the second table 402 and the second side wall 420. During the brazing process, after reaching the flow point temperature, the solder ring 5 will flow along the welding surface to the accommodation space formed by the second table 402 and the second side wall 420, so that the solder that may flow on the edge of the beryllium window 3 is accumulated in the accommodation space, thereby avoiding the accumulation of solder on the edge of the beryllium window 3 and ensuring the X-ray beam state.
[0044] As an example, the thickness of the solder ring 5 is 0.08 mm to 0.12 mm, preferably 0.1 mm, and the width of the solder ring 5 is 0.48 mm to 0.52 mm, preferably 0.5 mm. In this embodiment, the solder ring 5 is a copper-silver solder ring.
[0045] This embodiment also provides a method for forming the beryllium window structure, comprising the following steps:
[0046] 1) Processing of beryllium window ring 4. Figure 3a and Figure 3b As shown, the beryllium window ring 4 is a circular ring structure, having a first surface 41 and a second surface 42 opposite to each other, and having a first table 401 and a second table 402 inside the beryllium window ring 4, the first table 401 and the second table 402 are parallel, and the two are connected by a second side wall 420, and the second table 402 and the second side wall 420 form a receiving space. During the processing, special attention should be paid to the surface roughness of the second surface 42 to meet specific process requirements, and the surface roughness will directly affect the sealing performance and durability of the beryllium window ring 4.
[0047] 2) Cleaning and inspection. The processed beryllium window ring 4 needs to be thoroughly cleaned to remove debris, grease or other contaminants that may be generated during the processing; after cleaning, the surface condition is carefully checked again to ensure that there is no abnormality such as deformation, scratches or bumps; at the same time, special attention should be paid to the cleanliness of the first table 401 and the first side wall 410, as the cleanliness of these parts will directly affect the quality of welding and the final sealing performance.
[0048] 3) Assemble the beryllium window assembly. Figure 4 As shown, the beryllium window ring 4 is placed on the base 6 so that the second surface 42 contacts the surface of the base 6. After ensuring that the position is accurate, the solder ring 5 and the beryllium window 3 are placed on the first table 401 of the beryllium window ring 4 in sequence, and a certain pressure is applied to the assembly using the upper die 7 to ensure the stability of the parts in the vacuum soldering furnace. During the assembly process, it is necessary to ensure that all parts fall completely into the predetermined position to avoid welding defects caused by improper assembly.
[0049] 4) Vacuum brazing. The assembled beryllium window assembly is sent to a vacuum brazing furnace for welding. The temperature is kept at 750°C for 10 minutes to allow the solder ring 5 to fully melt and flow, so as to achieve a firm connection between the beryllium window ring 4 and other components. After welding, the assembly is allowed to cool naturally in the furnace. During the entire welding process, the flow and temperature changes of the solder ring 5 must be closely monitored to ensure that the welding parameters meet the process requirements.
[0050] 5) Airtightness inspection and packaging. The cooled beryllium window structure needs to be inspected for airtightness using a helium mass spectrometer leak detector. This step is to ensure that the welded beryllium window structure can meet the application requirements of a high vacuum environment. At the same time, the flow of the solder ring 5 needs to be observed to ensure that the weld is uniform and defect-free. Only the beryllium window structure that meets all requirements can be finally packaged for subsequent use.
[0051] This embodiment improves the structure of the beryllium window ring 4, and a second table 402 and a second side wall 420 are arranged inside the beryllium window ring 4. The second table 402 and the second side wall 420 form a receiving space. When the beryllium window ring 4 and the beryllium window 3 are welded, even if the solder ring 5 has a risk of dispersion, the solder ring 5 can be accumulated in the receiving space, thereby controlling the dispersion state of the solder ring 5. After actual verification, this solution is feasible and has significant effects.
[0052] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.
Claims
1. A beryllium window structure for an X-ray tube, characterized in that: include: A beryllium window ring, the beryllium window ring is a circular ring structure, having a first surface and a second surface opposite to each other, and a first table surface and a second table surface are provided inside the beryllium window ring between the first surface and the second surface; the first table surface is parallel to the first surface, and the two are connected by a first side wall; the second table surface is parallel to the first table surface, and the two are connected by a second side wall; the distance between the center of the beryllium window ring and the first side wall is greater than the distance between the center of the beryllium window ring and the second side wall; The beryllium window is located on the first table, and the side wall of the beryllium window is in contact with the first side wall.
2. The beryllium window structure of an X-ray tube according to claim 1, characterized in that: A solder ring is also provided between the first table and the beryllium window, and the solder ring is a circular ring structure.
3. The beryllium window structure of an X-ray tube according to claim 2, characterized in that: The second table and the second side wall form a receiving space, and the volume of the receiving space is greater than the volume of the solder ring.
4. The beryllium window structure of an X-ray tube according to claim 2, characterized in that: The solder ring has a thickness of 0.08 mm to 0.12 mm and a ring width of 0.48 mm to 0.52 mm.
5. The beryllium window structure of an X-ray tube according to claim 2, characterized in that: The solder ring is a copper-silver solder ring.
6. The beryllium window structure of an X-ray tube according to claim 1, characterized in that: The width of the second mesa is 0.48 mm to 0.52 mm.
7. The beryllium window structure of an X-ray tube according to claim 1, characterized in that: The height of the second side wall is 0.28 mm to 0.32 mm.