Grinding clamp with pressurizing and lifting mechanism

Abstract

The utility model discloses a grinding fixture with a pressurizing lifting mechanism, which comprises a rotating shaft, a U-shaped support mechanism, a pressurizing lifting block, a lifting pin mechanism and a fixture body, the rotating shaft is fixedly connected with the U-shaped support mechanism, two support arms of the U-shaped support mechanism are provided with transverse bolts, the pressurizing lifting block is fixedly connected to the middle of the U-shaped support mechanism, and the lifting pin mechanism is provided with a lifting pin. The clamp body comprises a driving ring and a piston body, the piston body is arranged in the driving ring in a penetrating mode and guided by the driving ring to move up and down, the bottom face of the piston body is used for adsorbing a product to be ground, the pin lifting mechanism is fixed to the driving ring and provided with a bolt pin through hole, the transverse bolt pin is arranged in the bolt pin through hole in a penetrating mode, and the top of the piston body is clamped and hung on the pressurizing lifting block. The pressurizing lifting block moves along with the U-shaped support mechanism to lift or press down the piston body, and the bottom face of the piston body is higher than the bottom face of the driving ring during lifting. According to the utility model, downward external pressurization control and upward lifting control of the grinding clamp can be realized, and materials are protected from being damaged during lifting.

Description

Technical Field

[0001] The utility model relates to a grinding and polishing device, in particular to a grinding fixture with a pressurizing and pulling mechanism. Background Art

[0002] During the semiconductor wafer grinding process, the fixture holds the wafer and material on the grinder for precision machining. During the machining, the fixture needs to apply a certain amount of pressure on the surface of the wafer or material to ensure that the wafer or material is processed correctly. The main function of the fixture during the grinding process is to ensure the surface flatness of the wafer or material after processing.

[0003] When the size of the wafer or material is 6 inches in diameter or larger, a large downward pressure needs to be applied to its surface to achieve a certain removal rate. Taking 6-inch silicon as an example, at 100g / cm 2 It is calculated that a downward pressure of about 17KG needs to be applied during grinding, and even greater pressure is required for hard materials such as SiC and GaN. Such large size and high pressure result in the size and structure of the precision grinding fixture to be relatively large and heavy. The deadweight of a large fixture is generally over 20KG. Therefore, in semi-automatic grinding equipment, this large fixture usually needs to be lifted and controlled by a cylinder or motor instead of manual handling. In order to prevent the fixture from being too heavy, facilitate the installation and flipping of the fixture, and ensure the high pressure required for grinding, an additional pressurizing mechanism is required to provide the corresponding pressure to increase the removal speed and efficiency of grinding. At the same time, before and after grinding, it is hoped that the wafer will be protected to prevent damage and scratches. Utility Model Content

[0004] In view of the above-mentioned defects of the prior art, the task of the utility model is to provide a grinding fixture with a pressurized lifting mechanism to solve the problem of too low grinding removal rate due to insufficient pressure during the grinding process of large-sized and hard materials, as well as to reduce the scratches and damages that may be caused to the processed products during falling, lifting and flipping.

[0005] The technical scheme of the utility model is as follows: A grinding fixture with a pressurized lifting mechanism comprises a rotating shaft, a U-shaped bracket mechanism, a pressurized lifting block, a lifting pin mechanism and a fixture body, the rotating shaft is fixedly connected to the U-shaped bracket mechanism, the two arms of the U-shaped bracket mechanism are provided with transverse bolts, the pressurized lifting block is fixedly connected to the middle part of the U-shaped bracket mechanism, the fixture body comprises a driving ring and a piston body, the piston body is penetrated in the driving ring and guided by the driving ring to move up and down, the bottom surface of the piston body is used to adsorb the product to be ground, the lifting pin mechanism is fixed on the driving ring, the lifting pin mechanism is provided with a bolt through hole, the transverse bolt is penetrated in the bolt through hole, the top of the piston body is clamped on the pressurized lifting block, the pressurized lifting block moves with the U-shaped bracket mechanism to lift or press down the piston body, and when lifting, the bottom surface of the piston body is higher than the bottom surface of the driving ring.

[0006] Furthermore, the pressurized lifting block is provided with an inverted T-shaped notch that penetrates laterally, the top of the piston body is provided with a connecting block that is larger at the top and smaller at the bottom, and the top of the inverted T-shaped notch is provided with a downwardly convex hemispherical ejector pin. The point contact between the hemispherical ejector pin and the connecting block transmits downward pressure without affecting the flatness of the fixture.

[0007] Furthermore, the connecting block is a cone-shaped body that is larger at the top and smaller at the bottom.

[0008] Furthermore, the driving ring is provided with a pressure regulating nut with adjustable height, the piston body is provided with a piston spring top block, and a spring is provided between the top surface of the pressure regulating nut and the bottom surface of the piston spring top block. By adjusting the height of the pressure regulating nut, the distance between the pressure regulating nut and the piston spring top block is controlled, thereby adjusting the force of the spring on the piston body, and then changing the downward pressure of the piston body on the product to be ground.

[0009] Furthermore, in order to facilitate the flipping of the clamp, the support arm of the U-shaped bracket mechanism is provided with a lifting pin inner hole, and the front and rear side walls of the lifting pin inner hole are provided with avoidance grooves for avoiding the lifting pin mechanism when the clamp is flipped, and the transverse bolt is fixed in the lifting pin inner hole.

[0010] Furthermore, an anti-fall hook is provided on one side of the lifting and pinning mechanism.

[0011] Furthermore, the transverse bolt is a spindle-shaped bolt that is thin in the middle and thick at both ends, and a downwardly convex adjustment pin is provided on the top of the bolt hole. When the pin lifting mechanism is hung on the transverse bolt, the adjustment pin is located in the middle of the transverse bolt. When the clamp is lifted, the clamp is not easy to slide left and right, and has good stability.

[0012] The advantages of the utility model compared with the prior art are:

[0013] The utility model can realize downward external pressure control and upward lifting control of the fixture body through the cooperation of the U-shaped bracket mechanism, the pressure lifting block and the lifting pin mechanism. The downward external pressure on the fixture by the hemispherical top pin is a point contact, which will not affect the flatness of the fixture. Before grinding, the fixture drive ring first contacts the moving disc surface, and then the grinding material will slowly drop and pressurize; at the end of grinding, before the drive ring leaves the grinding disc surface, the pressure lifting block can first lift the grinding material away from the disc surface to further protect it from damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic structural diagram of a grinding fixture with a pressurizing and pulling mechanism according to an embodiment.

[0015] Figure 2 It is a schematic diagram of the front structure of the U-shaped bracket mechanism.

[0016] Figure 3 It is a schematic diagram of the rear structure of the U-shaped bracket mechanism.

[0017] Figure 4 It is a schematic diagram of the longitudinal section structure of the U-shaped bracket mechanism.

[0018] Figure 5 Schematic diagram of the structure of the transverse bolt and R-shaped lock pin

[0019] Figure 6 It is a schematic diagram of the lifting and selling mechanism structure.

[0020] Figure 7 It is a schematic diagram of the structure of the fixture body.

[0021] Figure 8 Schematic diagram of the piston body structure of the fixture body.

[0022] Fig. 9 Schematic diagram of the structure of the pressurized lifting block

[0023] Fig.10 Schematic diagram of the force applied to the grinding fixture with a pressurized lifting mechanism during the descending process.

[0024] Fig.11 It is a schematic diagram of the force applied to the grinding fixture with a pressurized lifting mechanism when the piston body is lowered.

[0025] Fig.12 It is a schematic diagram of the force applied to the grinding fixture with a pressurizing and pulling mechanism when it is pressed down.

[0026] Fig.13 It is a schematic diagram of the force applied to the grinding fixture with a pressurized lifting mechanism during lifting. DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with the embodiments, but is not intended to limit the present invention.

[0028] Please combine Figures 1 to 9 As shown, the present embodiment involves a grinding fixture with a pressurized lifting mechanism, which mainly includes a U-shaped bracket mechanism 1, a lifting and pinning mechanism 2, a fixture body 3, a rotating shaft 4, a substrate and a wafer 5, and a pressurized lifting block 6. The middle part of the U-shaped bracket mechanism 1 is fixed to the bottom end of the rotating shaft 4 by screws. The rotating shaft 4 is a hollow shaft, the upper part of which is connected to the motor and the cylinder (not shown), which can rotate under the drive of the motor and can rise and fall under the action of the cylinder. A rotating joint (not shown) is installed on the top of the rotating shaft 4, and a connecting hose (not shown) is passed through the internal hollow hole. One end of the hose in the rotating shaft 4 is connected to the vacuum pressure system through the rotating joint, and the other end passes through the side hole at the bottom of the rotating shaft 4 and is connected to the connecting conduit 303 on the fixture body 3, providing vacuum or pressure to the adsorption surface 302 in the fixture body 3.

[0029] Please combine Figures 2 to 5 As shown, the lifting and pinning mechanism 2 is fixed on the left and right sides of the clamp body 3, and can be connected to the left and right support arms 102 of the U-shaped bracket mechanism 1 through a transverse bolt 103. Specifically, the U-shaped bracket mechanism 1 is mainly composed of a fixed crossbeam 101 and two left and right support arms 102. The center of the fixed crossbeam 101 has a through hole and a fixing screw hole, and it is fixedly connected to the rotating shaft 4 through screws. The support arm 102 can be fixed to the two ends of the fixed crossbeam 101 by screws, and the support arm 102 can also be welded and connected to the fixed crossbeam 101 to form an integral body or integrally formed for processing. A lifting pin inner hole 107 is opened at the bottom of the support arm 102, and avoidance notches of different shapes are opened before and after the lifting pin inner hole 107, including a front avoidance notch 105 and a rear avoidance notch 106. A bolt hole 108 is opened on the upper side of the support arm 102 and on the left and right sides of the lifting pin inner hole 107. The transverse bolt 103 passes through the bolt hole 108 and is fixed by two R-shaped locking pins 104. In this embodiment, the transverse bolt 103 is a spindle shape with a thin middle and thick ends.

[0030] Please combine Figure 6As shown, the pin lifting mechanism 2 is mainly composed of a pin lifting body 201, an anti-fall hook 202, a bolt through hole 203, a fixing flange 204 and an adjusting top pin 205. The fixing flange 204 arranged at the bottom of the pin lifting body 201 is fixed to the left and right sides of the clamp body 3 by bolts. The pin lifting body 201 is provided with a bolt through hole 203, which is a long hole in the vertical direction so that the horizontal bolt 103 can move up and down. After the horizontal bolt 103 is inserted into the bolt through hole 203, the pin lifting mechanism 2 is mounted on the U-shaped bracket mechanism 1, that is, the clamp body 3 is mounted. When the rotating shaft 4 is lifted and lowered by the cylinder or the motor, the U-shaped bracket mechanism 1 and the clamp body 3 will also be lifted and lowered; when the rotating shaft 4 is rotated by the motor, the U-shaped bracket mechanism 1 and the clamp body 3 will also rotate; the left and right arms 102 of the U-shaped bracket mechanism 1 provide rotational driving force to the pin lifting mechanisms 2 fixed on the left and right sides of the clamp body 3 through the transverse bolt 103, but do not provide any downward force. In order to make the clamp body 3 stable and centered when lifting the clamp body 3, a downward convex adjustment pin 205 is provided on the top of the bolt through hole 203. When the clamp body 3 is mounted, the upper surface of the transverse bolt 103 contacts the adjustment pin 205. Since the transverse bolt 103 is thin in the middle and thick at both ends, under the force generated by the inclined surface, the transverse bolt 103 will move to keep the adjustment pin 205 in the middle of the transverse bolt 103 as much as possible, so that the clamp body 3 remains stable on the left and right sides.

[0031] In addition, an anti-fall hook 202 is provided on the top side of the lifting pin body 201. When the clamp body 3 is flipped, that is, the lifting pin mechanism 2 rotates in the lifting pin inner hole 107, the anti-fall hook 202 can be stuck on the edge of the rear avoidance slot 106 to stabilize the clamp body 3 in the flipped state, making it easy to operate the adsorption surface 302 of the clamp body 3.

[0032] Please combine Figures 7 to 9As shown, the fixture body 3 has a driving ring 301 and a piston body 309. The lifting and pinning mechanism 2 is fixed on the driving ring 301 to connect the fixture body 3 with the U-shaped bracket mechanism 1. The driving ring 301 provides a guide for the piston body 309 to move up and down. The lower part of the driving ring 301 has a limiting cavity, and the disk surface at the bottom of the piston body 309 is limited in the limiting cavity. The lower disk surface of the piston body 309 is an adsorption surface for adsorbing the material to be ground. A plurality of connecting conduits 303 are arranged on the disk surface at the bottom of the piston body 309, and the connecting conduits 303 extend from the top surface of the driving ring 301. The connecting conduits 303 provide vacuum adsorption and pressure purge to the adsorption surface 302. The central axis of the piston body 309 also extends from the top surface of the driving ring 301. Specifically, a shaft sleeve 308 is also arranged in the center of the top surface of the driving ring 301, and the top of the shaft sleeve 308 is threadedly connected with an adjusting nut 304, and the height of the adjusting nut 304 can be adjusted by rotating it. The central axis of the piston body 309 extends into the center of the sleeve 308 and extends from the top, and the piston body 309 can move freely up and down in the sleeve 308. A piston spring top block 305 is arranged at the top of the central axis of the piston body 309, and the top of the piston spring top block 305 is located at a connecting block 307, and the connecting block 307 is a conical body with a larger top and a smaller bottom. A spring 306 is arranged between the top surface of the pressure regulating nut 304 and the bottom surface of the piston spring top block 305. By adjusting the height of the pressure regulating nut 304, the distance between the pressure regulating nut 304 and the piston spring top block 305 is controlled, so as to adjust the force of the spring 306 on the piston body 309 to set the downward pressure of the clamp body 3 itself on the wafer 5.

[0033] The pressurized lifting block 6 is a metal block 601 fixedly connected to the middle of the U-shaped bracket mechanism 1, and is fixed to the center of the fixed crossbeam 101 by screws. The pressurized lifting block 6 is provided with an inverted T-shaped notch 604 that penetrates laterally, and a downwardly convex hemispherical ejector pin 602 is provided at the top of the inverted T-shaped notch 604, and the bottom opening of the inverted T-shaped notch 604 is a lifting opening 603.

[0034] The connecting block 307 at the top of the piston body 309 extends sideways into the inverted T-shaped slot 604. When the pressurized lifting block 6 moves up and down with the U-shaped bracket mechanism 1, the connecting block 307 can be lifted (the lifting opening 603 acts on the lower side of the connecting block 307), released, pressed down (the hemispherical ejector pin 602 acts on the top surface of the connecting block 307), and the like, thereby performing corresponding operations on the clamp body 3.

[0035] The overall weight of the piston body 309 is set to G. When the spring 306 does not support the piston body 309 during grinding, the downward pressure on the wafer 5 is G; when the spring 306 provides upward support Fs to the piston body 309 during grinding, the downward pressure on the wafer 5 is G-Fs; when the connecting block 307 is subjected to an external downward pressure Fy, the downward pressure on the wafer 5 is G+Fy-Fs.

[0036] Please combine Figures 10 to 13 As shown, before grinding, the clamp body 3 is suspended away from the grinding disc by the U-shaped support mechanism 1 under the lifting of the cylinder, and the piston body 309 of the clamp body 3 is also lifted by the pressurized lifting block 6. The bottom surface of the piston body 309 is higher than the bottom surface of the drive ring 301, so that the surface of the wafer 5 is above the bottom surface of the drive ring 301. When the cylinder is working, the whole mechanism slowly descends to the surface of the grinding disc. The bottom surface of the drive ring 301 first contacts the disc surface, and then the U-shaped support mechanism 1 continues to descend, and the piston body 309 continues to descend in the drive ring 301 until the surface of the wafer 5 also contacts the disc surface. When the U-shaped support mechanism 1 descends to Fig.11 (Release) position, at which time, the various parts of the pressurized lifting block 6 have no contact with the connecting block 307, and the fixture body 3 is not subjected to any external pressure. The downward pressure F1 on the wafer 5 is equal to the difference between the overall weight G of the piston body 309 and the upward supporting force Fs generated by the spring 306 on the piston body 309 (F1=G-Fs). At this time, the pressure on the wafer 5 is affected by the adjustment of the spring 307; when the supporting force Fs of the spring 306 on the piston body is zero, the downward pressure F1 on the wafer 5 is equal to the overall weight G of the piston body 309 (F1=G). Control the action of the cylinder or motor to allow the U-shaped bracket mechanism 1 to descend, so that the hemispherical top pin 602 of the pressurized lifting block 6 contacts the top surface of the connecting block 307, and generates a downward pressure F2 on the fixture connecting block 307, as shown in FIG. Fig.12 As shown, the downward pressure on the wafer 5 at this time = F1 + F2. In actual use, different pressure intervals can be selected according to the material properties and size of the wafer 5 actually processed to perform segmented pressure control. The pressure regulating nut 304 of the clamp body 3 can be used to adjust the pressure for small pressure; when large pressure is required, external pressure can be used to supplement the pressure.

[0037] When the grinding is completed, the U-shaped bracket mechanism 1 and the pressurized lifting block 6 begin to be lifted under the action of the cylinder. Fig.13 . The vertical movement distance of the connection block 307 in the pressurized lifting block 6 is short, only a few millimeters, while the vertical movement distance of the transverse bolt 103 in the bolt hole 203 of the lifting mechanism 2 is large, so the connection block 307 is first lifted up by the pressurized lifting block 6, at which time the piston body 309 is lifted as a whole, and the wafer 5 begins to move away from the grinding disc surface; when the U-shaped bracket mechanism 1 continues to lift upward, the transverse bolt 103 contacts the top of the bolt hole 203 of the lifting mechanism 2, and then continues to lift, the left and right arms 102 will lift the lifting mechanism 2, and then lift the drive ring 301 of the fixture body 3, so that the drive ring 301 is away from the disc surface. Then the central pressurized lifting block 6 lifts the piston body 309 and the wafer 5, while the arms 102 on both sides also lift the drive ring 301 connected to the lifting mechanism 2. After the whole continues to rise to a certain height, the cylinder stops moving, and the lifting operation of the wafer 5 and the fixture is completed.

Claims

1. A grinding fixture with a pressurizing and pulling mechanism, characterized in that: It includes a rotating shaft, a U-shaped bracket mechanism, a pressurized lifting block, a lifting pin mechanism and a fixture body, the rotating shaft is fixedly connected to the U-shaped bracket mechanism, the two arms of the U-shaped bracket mechanism are provided with a transverse bolt, the pressurized lifting block is fixedly connected to the middle part of the U-shaped bracket mechanism, the fixture body includes a driving ring and a piston body, the piston body is inserted in the driving ring and is guided by the driving ring to move up and down, the bottom surface of the piston body is used to adsorb the product to be ground, the lifting pin mechanism is fixed on the driving ring, the lifting pin mechanism is provided with a bolt through hole, the transverse bolt is inserted in the bolt through hole, the top of the piston body is clamped on the pressurized lifting block, the pressurized lifting block moves with the U-shaped bracket mechanism to lift or press down the piston body, and the bottom surface of the piston body is higher than the bottom surface of the driving ring when lifting.

2. The grinding fixture with a pressurizing and pulling mechanism according to claim 1, characterized in that: The pressurized lifting block is provided with an inverted T-shaped notch that penetrates laterally, the top of the piston body is provided with a connecting block that is larger at the top and smaller at the bottom, and the top of the inverted T-shaped notch is provided with a downwardly convex hemispherical ejector pin.

3. The grinding fixture with a pressurizing and pulling mechanism according to claim 2, characterized in that: The connecting block is a cone-shaped body that is larger at the top and smaller at the bottom.

4. The grinding fixture with a pressurizing and pulling mechanism according to claim 1, characterized in that: The driving ring is provided with a pressure-adjusting nut with adjustable height, the piston body is provided with a piston spring top block, and a spring is provided between the top surface of the pressure-adjusting nut and the bottom surface of the piston spring top block.

5. The grinding fixture with a pressurizing and pulling mechanism according to claim 1, characterized in that: The support arm of the U-shaped bracket mechanism is provided with a lifting pin inner hole, and the front and rear side walls of the lifting pin inner hole are provided with avoidance grooves for avoiding the lifting pin mechanism when the clamp is flipped, and the transverse bolt is fixed in the lifting pin inner hole.

6. The grinding fixture with a pressurizing and pulling mechanism according to claim 5, characterized in that: An anti-falling hook is arranged on one side of the lifting and pinning mechanism.

7. The grinding fixture with a pressurizing and pulling mechanism according to claim 1, characterized in that: The transverse bolt is a spindle-shaped bolt that is thin in the middle and thick at both ends. A downwardly convex adjustment pin is provided at the top of the bolt through hole. When the pin lifting mechanism is hung on the transverse bolt, the adjustment pin is located in the middle of the transverse bolt.

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