Tension adjusting mechanism and magnetron sputtering machine

Abstract

The utility model provides a tension adjusting mechanism and a magnetron sputtering machine, the tension adjusting mechanism comprises: a mounting rack; the floating roller is rotatably arranged on the mounting frame around the axis of the floating roller; the driving part is connected with the mounting frame and can drive the mounting frame to rotate around a preset axis, and the preset axis is parallel to the axis of the floating roller so that the floating roller can swing around the preset axis. According to the tension adjusting mechanism, the floating roller is eccentrically arranged on the installation frame, the installation frame is driven by the driving piece to rotate so that the floating roller can swing around the preset axis, the tension of a material film can be actively controlled through the floating roller, and the movement track of the floating roller can be made to be in an arc shape; therefore, the tension of the material belt can be adjusted more smoothly in the swinging process of the floating roller, a better tension control effect is achieved when the instantaneous tension of the material belt fluctuates greatly, and the situation that the material belt is wrinkled, damaged or torn due to sudden change of the tension of the material belt is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of film processing, and more specifically to a tension regulating mechanism and a magnetron sputtering machine. Background Art

[0002] In the related art, during the coating process of the magnetron winding coating machine, the substrate tension will fluctuate due to the different amounts of gas adsorbed by the substrate in the atmospheric state and the different amounts of gas released in the vacuum environment at different time periods, as well as the influence of factors such as stretching and heating on the substrate. The tension fluctuation will cause the substrate to wrinkle and break, etc., affecting the coating quality. The existing tension adjustment mechanism has a complex control process and is difficult to meet the tension control requirements. Utility Model Content

[0003] The utility model provides a new technical solution for a tension regulating mechanism, which can at least solve the problem that the control process of the tension regulating mechanism in the prior art is complicated and difficult to meet the tension control requirements.

[0004] The utility model also provides a magnetron sputtering machine, comprising the tension adjustment mechanism.

[0005] According to the first aspect of the utility model, a tension adjustment mechanism is provided, comprising: a mounting frame; a floating roller, the floating roller being rotatably arranged on the mounting frame around its own axis; a driving member, the driving member being connected to the mounting frame and capable of driving the mounting frame to rotate around a preset axis, the preset axis being parallel to the axis of the floating roller, so that the floating roller can swing around the preset axis.

[0006] Optionally, the mounting frame includes: a rotating shaft, which is connected to the driving member, the axis of the rotating shaft coincides with the preset axis, and the rotating shaft is rotatable around its own axis; two connecting frames, the two connecting frames are spaced apart along the axial direction of the rotating shaft and are respectively connected to the rotating shaft, each of the connecting frames extends along the radial direction of the rotating shaft, and the floating roller is rotatably connected between the two connecting frames; an auxiliary shaft, the auxiliary shaft is connected between the two connecting frames, and the rotating shaft is located between the auxiliary shaft and the floating roller.

[0007] Optionally, the tension adjustment mechanism further includes: a detector, which is arranged opposite to the end of the auxiliary shaft, and is used to detect the extreme position of the swing of the auxiliary shaft.

[0008] Optionally, the tension adjustment mechanism further includes: a counterweight assembly, wherein the counterweight assembly is connected to the mounting frame, and the counterweight assembly is located on a side of the rotating shaft away from the floating roller.

[0009] Optionally, the counterweight assembly includes: a counterweight frame, which is respectively connected to the auxiliary shaft and the rotating shaft; and a counterweight block, which is movably arranged on the counterweight frame in the radial direction of the rotating shaft.

[0010] Optionally, the counterweight frame is provided with a scale extending radially along the rotating shaft.

[0011] Optionally, the counterweight frame is provided with a plurality of mounting portions, the plurality of mounting portions are arranged radially along the rotating shaft, and the counterweight block is detachably provided on the mounting portions.

[0012] Optionally, a sealing seat is provided between the driving member and one end of the rotating shaft, and a supporting seat is provided at the other end of the rotating shaft.

[0013] Optionally, the driving member comprises a motor.

[0014] According to a second aspect of the utility model, a magnetron sputtering machine is provided, comprising the tension adjustment mechanism described in any one of the above embodiments.

[0015] According to the tension adjustment mechanism of the utility model, the floating roller is eccentrically arranged on the mounting frame, and the mounting frame is driven to rotate by a driving member so that the floating roller swings around a preset axis. Not only can the floating roller be used to actively control the tension of the material film, but the movable trajectory of the floating roller can also be made arc-shaped, so that the tension of the material strip can be adjusted more smoothly during the swinging process of the floating roller, and a better tension control effect can be achieved when the instantaneous tension of the material strip has a large fluctuation, thereby avoiding the material strip from wrinkling, breaking or tearing due to a sudden change in the tension of the material strip.

[0016] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0018] Figure 1 It is a three-dimensional diagram of a tension adjustment mechanism according to an embodiment of the utility model from one viewing angle;

[0019] Figure 2 yes Figure 1 A magnified view of the structure in the middle;

[0020] Figure 3 is a stereoscopic diagram of a tension adjustment mechanism according to an embodiment of the utility model from another viewing angle;

[0021] Figure 4 yes Figure 3A magnified view of the structure in the middle;

[0022] Figure 5 This is a front view of a tension adjustment mechanism according to an embodiment of the utility model;

[0023] Figure 6 It is a structural schematic diagram of a magnetron sputtering machine according to an embodiment of the utility model;

[0024] Figure 7 yes Figure 6 A magnified view of some of the structures in .

[0025] Reference numerals

[0026] Magnetron sputtering machine 100;

[0027] Unwinding mechanism 10;

[0028] A first coating mechanism 20;

[0029] A second coating mechanism 30;

[0030] Winding mechanism 40;

[0031] Tension adjustment mechanism 50; mounting frame 51; rotating shaft 511; connecting frame 512; auxiliary shaft 513; induction sheet 514; floating roller 52; reference position 521; limit position 522; driving member 53; detector 55; induction head 551; counterweight assembly 56; counterweight frame 561; counterweight block 562; scale 563; mounting portion 564; support seat 57; sealing seat 58;

[0032] Roller 60;

[0033] The preset axis is A. DETAILED DESCRIPTION

[0034] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0035] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0036] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0037] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0038] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0039] The tension adjustment mechanism 50 according to the embodiment of the utility model will be described in detail below with reference to the accompanying drawings.

[0040] like Figures 1 to 5 As shown, the tension adjustment mechanism 50 according to the embodiment of the utility model includes: a mounting frame 51, a floating roller 52 and a driving member 53.

[0041] Specifically, the floating roller 52 is rotatably mounted on the mounting frame 51 around its own axis. The driving member 53 is connected to the mounting frame 51 and can drive the mounting frame 51 to rotate around a preset axis A, which is parallel to the axis of the floating roller 52, so that the floating roller 52 swings around the preset axis A.

[0042] In other words, the tension adjustment mechanism 50 according to the embodiment of the present invention is mainly composed of a mounting frame 51, a floating roller 52 and a driving member 53. The tension adjustment mechanism 50 can be arranged on the conveying path of the material film to adjust the tension of the material film.

[0043] The mounting frame 51 can be used to carry and mount a floating roller 52, and the floating roller 52 can rotate around its own axis. The material film can be wound around the floating roller 52, and the movement of the floating roller 52 can be used to adjust the tension of the material film.

[0044] The driving member 53 can be connected to the mounting frame 51, and the connection can be direct or indirect, which is not limited here. The driving member 53 can drive the mounting frame 51 to rotate around a preset axis A. The preset axis A and the axis of the floating roller 52 can be parallel, that is, the floating roller 52 can be eccentrically arranged on the mounting frame 51 relative to the preset axis A. When the mounting frame 51 rotates around the preset axis A, the floating roller 52 can swing around the preset axis A, thereby changing the tension of the film.

[0045] Since the floating roller 52 swings around the preset axis A, the moving path of the floating roller 52 is arc-shaped. When the tension adjustment mechanism 50 is installed on the conveying path of the material film, the upstream and downstream of the tension adjustment mechanism 50 can be respectively provided with rollers 60, and the conveying direction of the material film between the two rollers 60 can intersect with the conveying direction of the material film outside the two rollers 60.

[0046] For example, Figure 6 and Figure 7As shown, taking the tension adjustment mechanism 50 between the unwinding mechanism 10 and the first coating mechanism 20 in the magnetron sputtering machine 100 as an example, the material film outside the two rollers 60 can be transported in the vertical direction, the material film between the two rollers 60 can be transported approximately in the horizontal direction, and the material film between the two rollers 60 can be wound on the floating roller 52, and the floating roller 52 can swing left and right.

[0047] For ease of explanation, the position of the floating roller 52 when the axis of the floating roller 52 is arranged along the vertical direction with the preset axis A can be defined as a reference position 521. When the floating roller 52 is located at the reference position 521, in the vertical direction, the floating roller 52 can be located at the center of the two rollers 60. In other words, the two rollers 60 can be symmetrically distributed along a specific horizontal plane, and the axis of the floating roller 52 can be located within the specific horizontal plane.

[0048] The floating roller 52 can swing toward both sides of the reference position 521 to adjust the tension of the material film. Since the swinging track of the floating roller 52 is arc-shaped, the adjustment of the tension during the swinging process of the floating roller 52 is not uniform, and the tension adjustment process can be smoother, avoiding excessive changes in the tension in the material strip, which may cause the material strip to wrinkle, break or tear.

[0049] In addition, the driving of the floating roller 52 by the driving member 53 can make the floating roller 52 subject to controllable resistance. When the tension of the material film floats, the pressure exerted by the material film on the floating roller 52 needs to overcome the resistance exerted by the driving member 53 to make the floating roller 52 swing. By controlling the driving member 53, the resistance of the floating roller 52 can be controlled. For example, when the swing angle of the floating roller 52 relative to the reference position 521 is too large, the driving hanger can be controlled to increase the resistance to slow down the swing amplitude of the floating roller 52, thereby avoiding excessive fluctuation of the instantaneous tension.

[0050] Therefore, according to the tension adjustment mechanism 50 of the embodiment of the utility model, the floating roller 52 is eccentrically set on the mounting frame 51, and the driving member 53 is used to drive the mounting frame 51 to rotate so that the floating roller 52 swings around the preset axis A. Not only can the floating roller 52 be used to actively control the tension of the material film, but the moving trajectory of the floating roller 52 can also be made arc-shaped, so that the tension of the material strip can be adjusted more smoothly during the swinging process of the floating roller 52, and there is a better tension control effect when the instantaneous tension of the material strip has a large fluctuation, thereby avoiding the material strip from wrinkling, breaking or tearing due to a sudden change in the tension of the material strip.

[0051] According to an embodiment of the present invention, the tension adjustment mechanism 50 further includes an angle sensor, which is fixedly arranged relative to the driving member 53 , and is used to detect the swing angle of the floating roller 52 .

[0052] When the tension of the material film fluctuates, the floating roller 52 will swing around the preset axis A. The swing angle of the floating roller 52 is detected by the angle sensor to judge the tension of the material film. The driving member 53 is controlled according to the swing angle. The driving member 53 can control the driving of the mounting frame 51, thereby controlling the swing of the floating roller 52 to adjust the tension of the material film.

[0053] In addition, the power source upstream or downstream of the tension adjustment mechanism 50 can be adjusted to adjust the tension of the film according to the swing angle detected by the angle sensor. The driving power source can include but is not limited to the unwinding motor in the unwinding mechanism 10 and the coating motor driving the coating roller in the coating mechanism.

[0054] According to some other embodiments of the present invention, the mounting frame 51 includes a rotating shaft 511 , two connecting frames 512 and an auxiliary shaft 513 .

[0055] The rotating shaft 511 is connected to the driving member 53. The axis of the rotating shaft 511 coincides with the preset axis A. The rotating shaft 511 can rotate around its own axis. Two connecting frames 512 are spaced apart along the axial direction of the rotating shaft 511 and are respectively connected to the rotating shaft 511. Each connecting frame 512 extends along the radial direction of the rotating shaft 511. The floating roller 52 is rotatably connected between the two connecting frames 512. The auxiliary shaft 513 is connected between the two connecting frames 512. The rotating shaft 511 is located between the auxiliary shaft 513 and the floating roller 52.

[0056] In other words, the mounting frame 51 of the present embodiment may be mainly composed of a rotating shaft 511 , two connecting frames 512 and an auxiliary shaft 513 , wherein the rotating shaft 511 , the connecting frames 512 and the auxiliary shaft 513 may rotate around a preset axis A together.

[0057] The axis of the rotating shaft 511 may coincide with the preset axis A, one end of the rotating shaft 511 may be connected to the output shaft of the driving member 53 , and the rotating shaft 511 may rotate around the preset axis A under the drive of the driving member 53 .

[0058] Two connecting frames 512 may be connected to the rotating shaft 511, and the two connecting frames 512 may be spaced apart along the axis of the rotating shaft 511. A floating roller 52 and an auxiliary shaft 513 may be connected between the two connecting frames 512. The floating roller 52 and the auxiliary shaft 513 may be spaced apart along the radial direction of the rotating shaft 511 and arranged on both sides of the rotating shaft 511. That is, the rotating shaft 511 may be located between the floating roller 52 and the auxiliary shaft 513, and the floating roller 52 and the auxiliary shaft 513 are respectively eccentrically arranged relative to the rotating shaft 511. When the rotating shaft 511 rotates, the floating roller 52 and the auxiliary shaft 513 swing together around the preset axis A.

[0059] Optionally, the connecting frame 512 may be a connecting rod, and the connecting rod may extend radially of the rotating shaft 511. The floating roller 52, the auxiliary shaft 513 and the two connecting frames 512 may be combined to form a rectangular frame, and the rotating shaft 511 may pass through the rectangular frame and the two short sides of the rectangular frame.

[0060] When the tension of the film fluctuates, the film will exert pressure on the floating roller 52 to make the floating roller 52 swing, that is, the rotating shaft 511 rotates around the preset axis A.

[0061] In this embodiment, the mounting frame 51 includes a rotating shaft 511, two connecting frames 512 and an auxiliary shaft 513. Since the auxiliary shaft 513 and the floating roller 52 are located on both sides of the rotating shaft 511, the auxiliary shaft 513 can be used to counterweight the mounting frame 51 to avoid the side of the rotating shaft 511 where the floating roller 52 is provided being too heavy, which is beneficial to reducing the driving force required to drive the mounting frame 51 and facilitating the control of the rotation of the mounting frame 51.

[0062] In some specific embodiments of the present invention, the tension adjustment mechanism 50 further includes a detector 55 . The detector 55 is disposed opposite to the end of the auxiliary shaft 513 . The detector 55 is used to detect the extreme position 522 of the swing of the auxiliary shaft 513 .

[0063] Specifically, the detector 55 can be fixedly arranged relative to the housing of the driving member 53, that is, the position of the detector 55 can remain unchanged. The detector 55 can be arranged opposite to the end of the auxiliary shaft 513. Since the auxiliary shaft 513 and the floating roller 52 are respectively connected to the rotating shaft 511 through the connecting frame 512, the swing angle of the auxiliary shaft 513 is equal to the swing angle of the floating roller 52.

[0064] The detector 55 can detect the limit position 522 of the auxiliary shaft 513. Figure 5 and Figure 6 As shown in the figure, the circles indicated by the dotted lines on both sides of the floating roller 52 are the two extreme positions 522 during the swinging process of the floating roller 52. The figure also shows the connection line between the floating roller 52 and the preset axis A when the floating roller 52 is at the reference position 521 and the two extreme positions 522, as well as the swinging trajectory of the floating roller 52.

[0065] The limit position 522 can be a preset position according to the tension control requirements. When the floating roller 52 swings to the limit position 522, the auxiliary shaft 513 swings to the corresponding limit position 522. The detector 55 can be set at the limit position 522 corresponding to the auxiliary shaft 513, and sends a sensing signal to the external controller when the auxiliary shaft 513 reaches the limit position 522. When the controller receives the sensing signal, it indicates that the tension adjustment mechanism 50 has reached the limit, and other tension control structures can continue to be started to control the tension of the material film, such as controlling the rotation speed of the upstream and downstream power sources.

[0066] In this embodiment, the detector 55 can be used to detect the extreme position 522 of the swing of the auxiliary shaft 513, so as to determine whether the tension adjustment of the material film by the tension adjustment mechanism 50 of this embodiment has reached the limit, and then it can be determined whether other tension control structures need to be started based on the detection result of the detector 55. In this way, a multi-level tension control system can be formed to better meet the tension control requirements, which is beneficial to improving the yield rate of material film processing.

[0067] Meanwhile, in the above-mentioned multi-stage tension control system, the first-stage adjustment may be the driving of the floating roller 52 by the driving member 53, thereby reducing the adjustment of the tension by other tension control structures as the second-stage adjustment. Figure 6 For the magnetron sputtering machine 100 shown, the secondary adjustment can be the speed adjustment of the unwinding roller and the coating roller. Therefore, by driving the floating roller 52 with the driving member 53, the number of times the speed of the unwinding roller and the coating roller is adjusted can be reduced, so that the tension of the material film is more stable and the adjustment is more convenient, especially when there is a large fluctuation in the instantaneous tension, the tension control effect is better, and the tension fluctuation of the material film entering the coating roller caused by adjusting the speed of the coating roller is avoided.

[0068] In some specific embodiments, a sensing sheet 514 may be provided at the end of the auxiliary shaft 513 , and the detector 55 may have a sensing head 551 with a gap therein, and the end of the sensing sheet 514 may pass through the gap in the sensing head 551 .

[0069] Optionally, the reference position 521 may be provided with a detector 55 for detecting whether the floating roller 52 is at the reference position 521 .

[0070] According to some optional embodiments of the present invention, the tension adjustment mechanism 50 further includes a counterweight assembly 56 , which is connected to the mounting frame 51 , and is located on a side of the rotating shaft 511 away from the floating roller 52 .

[0071] Specifically, a counterweight assembly 56 may be provided on the mounting frame 51 . Optionally, the counterweight assembly 56 may be connected to one or more of the auxiliary shaft 513 , the connecting frame 512 and the rotating shaft 511 , which is not limited here.

[0072] In addition, the counterweight assembly 56 can be arranged on the side of the rotating shaft 511 away from the floating roller 52. The floating roller 52 has a relatively large diameter, and the diameters of the rotating shaft 511 and the auxiliary shaft 513 can be set to be relatively small to reduce the weight of the mounting frame 51. The counterweight assembly 56 is arranged on the side of the rotating shaft 511 away from the floating roller 52, so that the mounting frame 51 can be counterweighted to avoid the side of the mounting frame 51 connected to the floating roller 52 being too heavy, and the driving member 53 can drive and control the mounting frame 51.

[0073] Optionally, the counterweight assembly 56 can be detachably connected to the mounting frame 51 , so that the mounting frame 51 can be counterweighted according to the weight of the floating roller 52 , which facilitates adjustment of the counterweight and improves the applicability of the tension adjustment mechanism 50 .

[0074] According to some other embodiments of the present invention, Figure 4 As shown, the counterweight assembly 56 includes a counterweight frame 561 and a counterweight block 562 .

[0075] The counterweight frame 561 is connected to the auxiliary shaft 513 and the rotating shaft 511 respectively. The counterweight block 562 is movably disposed on the counterweight frame 561 in the radial direction of the rotating shaft 511.

[0076] In other words, the counterweight assembly 56 of this embodiment may be mainly composed of a counterweight frame 561 and a counterweight block 562. The counterweight frame 561 may be connected between the auxiliary shaft 513 and the rotating shaft 511. Optionally, the counterweight frame 561 may be detachably connected to the auxiliary shaft 513 and the rotating shaft 511.

[0077] The counterweight block 562 can be mounted on the counterweight frame 561 so that the counterweight block 562 is located on the side of the rotating shaft 511 away from the floating roller 52. The counterweight block 562 can move on the counterweight frame 561 along the radial direction of the rotating shaft 511, thereby adjusting the position of the counterweight of the mounting frame 51 according to the weight of the floating roller 52 to meet the actual counterweight demand and adapt to various types of floating rollers 52, which is conducive to improving the applicability of the tension adjustment mechanism 50.

[0078] In addition, the counterweight block 562 can be locked after it moves on the counterweight frame 561 to a position that meets the requirements, so as to ensure that the counterweight remains unchanged during the operation of the tension adjustment mechanism 50.

[0079] In some specific embodiments of the present invention, a scale 563 extending radially along the rotating shaft 511 is provided on the counterweight frame 561 .

[0080] Specifically, a scale 563 may be provided on the counterweight frame 561, and the scale on the scale 563 may extend radially along the rotating shaft 511. The counterweight block 562 may be adjusted in position according to the scale on the scale 563, which is conducive to improving the convenience of operation and facilitating workers to adjust the counterweight.

[0081] According to some optional embodiments of the present invention, a plurality of mounting portions 564 are provided on the counterweight frame 561 . The plurality of mounting portions 564 are arranged radially along the rotating shaft 511 , and the counterweight block 562 is detachably provided on the mounting portion 564 .

[0082] Specifically, the counterweight frame 561 may be provided with a mounting portion 564, and the number of the mounting portions 564 may be multiple, and the counterweight block 562 may be detachably connected to the mounting portion 564. The multiple mounting portions 564 may be arranged along the radial direction of the rotating shaft 511, and the counterweight on the mounting frame 51 may be adjusted by adjusting the connection relationship between the counterweight block 562 and the multiple mounting portions 564.

[0083] Optionally, there may be a plurality of counterweight blocks 562 , and the plurality of counterweight blocks 562 may be respectively connected to the plurality of mounting portions 564 .

[0084] The mounting portion 564 may be a waist-shaped hole, which may extend radially along the rotating shaft 511 . The end of the counterweight block 562 may be connected to the waist-shaped hole by bolts, and the counterweight block 562 may move along the waist-shaped hole.

[0085] According to some other embodiments of the present invention, a sealing seat 58 is provided between the driving member 53 and one end of the rotating shaft 511 , and a supporting seat 57 is provided at the other end of the rotating shaft 511 .

[0086] That is to say, the rotating shaft 511 can be mounted between the sealing seat 58 and the supporting seat 57 , and the driving member 53 can be connected to an end of the sealing seat 58 away from the rotating shaft 511 .

[0087] Specifically, the tension adjustment mechanism 50 can be installed in a film processing device, which can have a processing cabin, and the sealing seat 58 and the support seat 57 can be connected to the cabin wall of the processing cabin. The sealing seat 58 is arranged between the driving member 53 and the rotating shaft 511, so that the rotating shaft 511 can be sealed in the processing cabin, and the driving member 53 is located outside the processing cabin to avoid contact between the driving member 53 and the film, which is conducive to maintaining the cleanliness of the processing cabin.

[0088] In some specific embodiments of the present invention, the driving member 53 includes a motor. The output shaft of the motor can be connected to the rotating shaft 511 to drive the rotating shaft 511 to rotate around the preset axis A. Since the rotation angle of the motor is easy to control, the swing angle of the floating roller 52 can be accurately controlled by the motor, thereby improving the adjustment accuracy of the tension adjustment mechanism 50.

[0089] The embodiment of the utility model further provides a magnetron sputtering machine 100, and the magnetron sputtering machine 100 includes a tension adjustment mechanism 50 according to any of the above embodiments.

[0090] Among them, Figure 6 As shown, the magnetron sputtering machine 100 may further include an unwinding mechanism 10, two coating mechanisms and a winding mechanism 40. The two coating mechanisms are respectively a first coating mechanism 20 and a second coating mechanism 30, and the first coating mechanism 20 and the second coating mechanism 30 are arranged in sequence along the conveying direction of the film. A tension adjustment mechanism 50 may be provided between the unwinding mechanism 10 and the first coating mechanism 20 and between the two coating mechanisms, so that the film before coating may be actively controlled by the tension adjustment mechanism 50.

[0091] In addition, the two tension adjustment mechanisms 50 can also cooperate with each other. For example, when the tension of the material film between the unwinding mechanism 10 and the first coating mechanism 20 fluctuates, and it is necessary to adjust the rotation speed of the coating roller in the first coating mechanism 20 to adjust the tension of the material film, the tension of the material film between the two coating mechanisms will also change. At this time, the tension adjustment mechanism 50 between the two coating mechanisms can adjust the tension of the material film, eliminate the tension change caused by the change in the rotation speed of the coating roller in the first coating mechanism 20, thereby avoiding adjusting the rotation speed of the coating roller in the second coating mechanism 30, thereby avoiding frequent adjustment of the rotation speed of the coating roller, making the tension adjustment more stable and convenient.

[0092] Since the tension adjustment mechanism 50 according to the embodiment of the utility model has the above-mentioned technical effects, the magnetron sputtering machine 100 according to the embodiment of the utility model also has the corresponding technical effects, that is, the floating roller 52 can be used to actively control the tension of the material film, and the moving trajectory of the floating roller 52 is made arc-shaped, so that the tension of the material strip can be adjusted more smoothly during the swinging process of the floating roller 52, and there is a better tension control effect when the instantaneous tension of the material strip fluctuates greatly, thereby avoiding the material strip from wrinkling, breaking or tearing due to sudden changes in the tension of the material strip.

[0093] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A tension adjustment mechanism, characterized in that: include: Mounting frame; A floating roller, the floating roller being rotatably arranged on the mounting frame around its own axis; A driving member is connected to the mounting frame and can drive the mounting frame to rotate around a preset axis, wherein the preset axis is parallel to the axis of the floating roller so that the floating roller can swing around the preset axis.

2. The tension adjustment mechanism according to claim 1, characterized in that: The mounting frame comprises: A rotating shaft, the rotating shaft is connected to the driving member, the axis of the rotating shaft coincides with the preset axis, and the rotating shaft is rotatable around its own axis; Two connecting frames, the two connecting frames are spaced apart along the axial direction of the rotating shaft and are respectively connected to the rotating shaft, each connecting frame extends along the radial direction of the rotating shaft, and the floating roller is rotatably connected between the two connecting frames; An auxiliary shaft is connected between the two connecting frames, and the rotating shaft is located between the auxiliary shaft and the floating roller.

3. The tension adjustment mechanism according to claim 2, characterized in that: Also includes: A detector is arranged opposite to the end of the auxiliary shaft, and is used to detect the extreme position of the swing of the auxiliary shaft.

4. The tension adjustment mechanism according to claim 2, characterized in that: Also includes: A counterweight assembly is connected to the mounting frame and is located at a side of the rotating shaft away from the floating roller.

5. The tension adjustment mechanism according to claim 4, characterized in that: The counterweight assembly comprises: A counterweight frame, the counterweight frame is connected to the auxiliary shaft and the rotating shaft respectively; A counterweight block is movably arranged on the counterweight frame in the radial direction of the rotating shaft.

6. The tension adjustment mechanism according to claim 5, characterized in that: The counterweight frame is provided with a scale extending in the radial direction of the rotating shaft.

7. The tension adjustment mechanism according to claim 5, characterized in that: The counterweight frame is provided with a plurality of mounting parts, the plurality of mounting parts are arranged along the radial direction of the rotating shaft, and the counterweight block is detachably arranged on the mounting parts.

8. The tension adjustment mechanism according to claim 2, characterized in that: A sealing seat is provided between the driving member and one end of the rotating shaft, and a supporting seat is provided at the other end of the rotating shaft.

9. The tension adjustment mechanism according to claim 1, characterized in that: The driving member includes a motor.

10. A magnetron sputtering machine, characterized in that: include: The magnetron sputtering machine according to any one of claims 1 to 9.

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