Single crystal furnace

Abstract

The utility model provides a single crystal furnace which comprises a furnace body, a heat preservation cylinder, a heater, at least one pair of main electrodes, a supporting assembly and a main pump, the furnace body comprises a furnace cylinder and a furnace bottom connected to the bottom of the furnace cylinder, and at least four gas guide holes are formed in the furnace bottom; the heat preservation cylinder is annular and is arranged in the furnace body; the heater is annular and is arranged in the heat preservation cylinder; the first end of the main electrode is connected with the upper part of the heater; the second end of the main electrode sequentially penetrates through the heat-insulating cylinder and the furnace cylinder; the supporting assembly is located outside the furnace body and can move in the radial direction of the furnace body, and the second end of the main electrode is connected with the supporting assembly; and the main pump is communicated with each air guide hole. According to the single crystal furnace disclosed by the utility model, the mounting position of the main electrode is adjusted to the middle part of the furnace body, so that more gas guide holes can be formed in the furnace bottom, the probability of unsmooth gas circulation caused by blockage of the gas guide holes is reduced, the crystal pulling stability in a low furnace pressure state is ensured, and the quality of a produced crystal bar is improved.

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