Wafer macroscopic inspection module

Abstract

The utility model discloses a wafer macroscopic inspection module group. The wafer macroscopic inspection module group is characterized by comprising a first rotating module group, a second rotating module group, a first rotating module group, a second rotating module group and a clamping module group. The module can be used for macroscopic inspection of crystal faces of wafers of 6 inches, 8 inches and 12 inches, can also be used as a transfer station of a wafer transporter, and is used for pre-alignment of the wafers, feeding through a mechanical arm, placing the wafers on the product macroscopic module and clamping through two-shaft alignment of the clamping mechanical arm. The module can realize movement in four directions of theta1, theta2, small rotation and large rotation, can more completely and simultaneously move through four axes, and is more complete in wafer macroscopic inspection.

Description

Technical Field

[0001] The utility model relates to an auxiliary device in the field of semiconductor technology manufacturing, in particular to a wafer macroscopic inspection module. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit component structures can be processed on the silicon wafer to become IC products with specific electrical functions. The original material of the wafer is silicon, and there is an inexhaustible supply of silicon dioxide on the surface of the earth's crust. In the process of producing wafers, an inspection platform is often required to facilitate observation of the shape of the wafer. Wafer inspection is divided into macro inspection and micro inspection. During macro inspection, the crystal surface inspection of the wafer lacks an inspection device for clamping the wafer. Utility Model Content

[0003] In view of the above problems, the utility model provides a wafer macro inspection module, which can realize four directions of movement: θ1, θ2, small rotation and large rotation.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a wafer macro inspection module, including a first rotating module for θ1 action, a second rotating module for θ2 action, a first rotating module for large rotation action, a second rotating module for small rotation action and a clamping module;

[0005] Wherein: the first rotating module comprises a first motor, a first fixing seat and a rotating device, the first motor and the rotating device are respectively fixed at the upper end and the lower end of the first fixing seat, the rotating device is fixed to the main frame, and a second photoelectric sensing module is installed on the side of the rotating device, and the rotating device is driven by the first motor to drive the entire main frame to perform a large rotation action;

[0006] The main frame is composed of a bottom plate, a left side plate and a right side plate, wherein the lower ends of the left side plate and the right side plate are respectively fixed to the two ends of the bottom plate, and the upper ends of the left side plate and the right side plate are provided with a hinge shaft, a bearing and a connecting seat, and a second fixing seat is installed between the two groups of the connecting seats;

[0007] The second fixed seat is equipped with a second rotating module, which includes a second motor and a first pulley module. An auxiliary frame is installed above the first pulley module, and clamping modules are installed on both sides of the upper end of the auxiliary frame. The auxiliary frame is driven by the second motor to perform a small rotation action;

[0008] A second rotating module is also fixed on one side of the auxiliary frame. The second rotating module is a fourth motor fixed on the outer side wall of the auxiliary frame. The main shaft of the fourth motor is linked with the clamping module through a key. The fourth motor drives the entire auxiliary frame to perform θ2 action. A fourth photoelectric sensing module for sensing the state of the second rotating module is installed on the outer side wall of the other side of the auxiliary frame.

[0009] A first rotating module is fixed to the left side plate, and a third photoelectric sensing module for sensing the state of the first rotating module is provided on the right side plate. The first rotating module includes a second pulley module and a third motor on the outer wall of the left side plate. The third motor drives the second pulley module to perform the θ1 action, that is, drives the second fixed and auxiliary frame to perform the θ1 action of flipping.

[0010] The first rotating module is fixed on the workbench through the mounting module.

[0011] Furthermore, the first pulley module includes a first driving wheel, a first driven wheel and a first belt. The first driving wheel is fixed on the main shaft of the second motor. The first driven wheel is fixed to the auxiliary frame through a first connecting shaft and a connecting plate. A first photoelectric sensing module is provided on the side of the connecting plate. A first adjusting device for adjusting the tightness of the first pulley module is installed on the second fixed seat.

[0012] Furthermore, the second pulley module includes a second driving wheel, a second driven wheel and a second belt, the second driving wheel is connected to the third motor shaft, the second driven wheel is installed at one end of the hinge shaft, and a second adjustment device for adjusting the tightness of the second pulley module is also installed on the left side panel.

[0013] Furthermore, the clamping module includes mounting seats and a plurality of clamping manipulators which are arranged at both ends and fixed to the auxiliary frame.

[0014] From the above description of the structure of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages: this module can be used for 6-inch, 8-inch, and 12-inch wafer surface macroscopic inspection, and can also be used as a transfer station for wafer transporters for pre-alignment of wafers. The wafers are loaded by a manipulator and placed on the product macroscopic module, and the clamping action is performed by the two axes of the clamping manipulator. This module can realize four-directional movement of θ1, θ2, small rotation and large rotation, and can more completely move through four axes at the same time, making the wafer macroscopic inspection more complete. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0016] Figure 1 This is a schematic diagram of the structure of the wafer macro inspection module of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the wafer macro inspection module of the utility model;

[0018] Figure 3This is a schematic diagram of the cross-sectional structure of the wafer macro inspection module of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the first rotating module of the wafer macro inspection module of the utility model;

[0020] Figure 5 It is a structural schematic diagram of the second rotating module and the first rotating module of the wafer macro inspection module of the utility model;

[0021] Figure 6 It is a structural schematic diagram of the second rotating module of the wafer macro inspection module of the utility model. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0023] Example

[0024] refer to Figure 1 , a wafer macro inspection module, the macro inspection module is fixed on the workbench through the mounting module 16, and includes a first rotating module, a second rotating module, a first rotating module, a second rotating module and a clamping module;

[0025] The first rotating module includes a first motor 1, a first fixed seat 2 and a rotating device 3. The first motor 1 and the rotating device 3 are respectively fixed to the upper end and the lower end of the first fixed seat 2. The rotating device 3 is fixed to the main frame. A second photoelectric sensing module 4 is installed on the side of the rotating device 3.

[0026] The main frame is composed of a bottom plate 5, a left side plate 6 and a right side plate 7, wherein the lower ends of the left side plate 6 and the right side plate 7 are respectively fixed to the two ends of the bottom plate 5, and the upper ends of the left side plate 6 and the right side plate 7 are provided with a hinge shaft 8, a bearing 9 and a connecting seat 10, and a second fixing seat 11 is installed between the two sets of connecting seats 10;

[0027] The second fixed seat 11 is equipped with a second rotating module, the second rotating module includes a second motor 12 and a first pulley module, an auxiliary frame 13 is installed above the first pulley module, and clamping modules are installed on both sides of the upper end of the auxiliary frame 13. The first pulley module includes a first driving wheel 17, a first driven wheel 18 and a first belt 19. The first driving wheel 17 is fixed on the main shaft of the second motor 12, and the first driven wheel 18 is fixed to the auxiliary frame 13 through a connecting shaft 20 and a connecting plate 21. A first photoelectric sensing module 22 is provided on the side of the connecting plate 21. A first adjusting device 23 for adjusting the tightness of the first pulley module is installed on the second fixed seat 11;

[0028] A second rotating module is also fixed on one side of the auxiliary frame 13. The second rotating module is a fourth motor 14 fixed on the outer side wall of the auxiliary frame. The main shaft of the fourth motor 14 is linked with the clamping module through a key. A fourth photoelectric sensing module 31 for sensing the state of the second rotating module is installed on the outer side wall of the other side of the auxiliary frame 13.

[0029] The left side plate 6 is fixed with a first rotating module, which includes a second pulley module and a third motor 15 on the outer wall of the left side plate, and the second pulley module includes a second driving wheel 24, a second driven wheel 25 and a second belt 26. The second driving wheel 24 is connected to the main shaft of the third motor 15, and the second driven wheel 25 is installed at one end of the hinge shaft 8. A second adjusting device 27 for adjusting the tightness of the second pulley module is also installed on the left side plate 6, and the right side plate 7 is provided with a third photoelectric sensing module 30 for sensing the state of the first rotating module.

[0030] The clamping module includes a mounting seat 28 and a plurality of clamping manipulators 29 which are arranged at both ends and fixed to the auxiliary frame.

[0031] When in use, the first motor 1 drives the rotating device 3 to rotate, thereby driving the main frame to perform a large rotation movement;

[0032] The second motor 12 drives the first pulley module to rotate. During the rotation, the auxiliary frame 13 performs a small rotation as a whole under the drive of the connecting shaft 20 and the connecting plate 21 .

[0033] In addition, the third motor 15 drives the rotation of the second pulley module, and through the cooperation of the hinge shaft 8, the bearing 9 and the connecting seat 10, drives the second fixed seat 11 to flip, that is, drives the entire auxiliary frame to flip, which is the θ1 action.

[0034] Finally, when the fourth motor 14 is working, it drives the clamping module to flip, and the wafer clamped by the clamping module can be flipped for inspection, realizing the θ2 flipping action.

[0035] The above actions can be controlled individually, and are all equipped with photoelectric sensing modules for real-time sensing and control.

[0036] In addition, the connection between the motor and the pulley module is a mechanical matching mode of shaft and key.

Claims

1. Wafer macro inspection module, characterized by: It includes a first rotating module, a second rotating module, a first rotating module, a second rotating module and a clamping module; The first rotating module comprises a first motor (1), a first fixed seat (2) and a rotating device (3), the first motor (1) and the rotating device (3) being fixed at the upper end and the lower end of the first fixed seat (2) respectively, the rotating device (3) being fixed to the main frame, and a second photoelectric sensing module (4) being installed on the side of the rotating device (3); The main frame is composed of a bottom plate (5), a left side plate (6) and a right side plate (7), wherein the lower ends of the left side plate (6) and the right side plate (7) are respectively fixed to the two ends of the bottom plate (5), and the upper ends of the left side plate (6) and the right side plate (7) are provided with a hinge shaft (8), a bearing (9) and a connecting seat (10), and a second fixing seat (11) is installed between the two groups of the connecting seats (10); The second fixed seat (11) is equipped with a second rotating module, the second rotating module includes a second motor (12) and a first pulley module, an auxiliary frame (13) is installed above the first pulley module, and clamping modules are installed on both sides of the upper end of the auxiliary frame (13); A second rotating module is also fixed on one side of the auxiliary frame (13); the second rotating module is a fourth motor (14) fixed on the outer side wall of the auxiliary frame; the main shaft of the fourth motor (14) is linked with the clamping module through a key; The left side plate (6) is fixed with a first rotating module, which comprises a second pulley module on the outer wall of the left side plate and a third motor (15).

2. The wafer macro inspection module according to claim 1, characterized in that: The first rotating module is fixed on the workbench via a mounting module (16).

3. The wafer macro inspection module according to claim 1, characterized in that: The first pulley module comprises a first driving wheel (17), a first driven wheel (18) and a first belt (19); the first driving wheel (17) is fixed on the main shaft of the second motor (12); the first driven wheel (18) is fixed to the auxiliary frame (13) through a connecting shaft (20) and a connecting plate (21); a first photoelectric sensing module (22) is arranged on the side of the connecting plate (21); and a first adjusting device (23) for adjusting the tightness of the first pulley module is installed on the second fixing seat (11).

4. The wafer macro inspection module according to claim 1, characterized in that: The second pulley module comprises a second driving wheel (24), a second driven wheel (25) and a second belt (26); the second driving wheel (24) is connected to the main shaft of the third motor (15); the second driven wheel (25) is installed at one end of the hinge shaft (8); and a second adjusting device (27) for adjusting the tightness of the second pulley module is also installed on the left side plate (6).

5. The wafer macro inspection module according to claim 1, characterized in that: The clamping module comprises a mounting seat (28) and a plurality of clamping manipulators (29) which are arranged at both ends and fixed to the auxiliary frame.

6. The wafer macro inspection module according to claim 1, characterized in that: The right side plate (7) is provided with a third photoelectric sensing module (30) for sensing the state of the first rotating module.

7. The wafer macro inspection module according to claim 1, characterized in that: A fourth photoelectric sensing module (31) for sensing the state of the second rotating module is installed on the outer side wall of the other side of the auxiliary frame (13).

Images