Pressure test leak hunting device of granular silicon production equipment

Abstract

The utility model discloses a pressure test leak hunting device of granular silicon production equipment. The pressure test leak hunting device comprises a pressing disc lower cover, a pressing disc upper cover, a guide rod and a screw rod, the pressing disc lower cover and the pressing disc upper cover respectively cover an upper opening and a lower opening of a to-be-tested graphite cylinder; the guide rods and the screw rods are respectively connected between the pressing disc lower cover and the pressing disc upper cover; a group of positioning holes and bolt holes are annularly formed in the pressing disc lower cover and the pressing disc upper cover; the positioning hole is a through hole, and the bolt hole is provided with an open groove extending towards the outer side. And the positioning holes and the bolt holes are arranged at intervals and are matched with the guide rods and the screw rods, so that the pressing disc lower cover and the pressing disc upper cover are fastened on the graphite cylinder. By means of the device, whether the graphite cylinder leaks or not can be found out, whether the graphite cylinder used for particle silicon production is qualified can be rapidly judged, the blank of graphite cylinder leakage detection is filled up, it is ensured that no leakage occurs in a graphite stack annular space, meanwhile, it is avoided that the graphite cylinder is collided during pressure testing, and long-period operation and product quality of particle silicon produced through a silane method are ensured.

Description

Technical Field

[0001] The utility model belongs to the field of granular silicon production, and specifically relates to a pressure test and leak detection device for granular silicon production equipment. Background Art

[0002] Isostatic graphite cylinders are used in the production of granular silicon. Silane gas decomposes in the graphite stack to eventually produce granular silicon. The graphite stack is composed of various graphite cylinders. After the silicon carbide coating is deposited and assembled, the graphite cylinders are used in the production of granular silicon. Before this patent, after the graphite cylinder was processed, the appearance dimensions were measured, and the product quality was judged by visually observing whether there were coating leaks, color differences, carbon leaks, etc. The leakage of the annular gap of the graphite stack seriously affects the quality of the granular silicon product and the long-term operation. Due to the large leakage of the annular gap, the cause has been sought from other aspects. No problems were found in the graphite cylinder itself by appearance observation, and the graphite cylinder cannot be bumped and is easily damaged. Summary of the invention

[0003] Purpose of the utility model: The technical problem to be solved by the utility model is to provide a pressure test and leak detection device for granular silicon production equipment in view of the deficiencies in the prior art, so as to conveniently and quickly find out whether there is a leak in the graphite cylinder and solve the problem that the existing graphite cylinder is easily damaged by bumps during pressure test and leak detection.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0005] A pressure test and leak detection device for granular silicon production equipment comprises a pressure plate lower cover, a pressure plate upper cover, a guide rod and a screw rod; the pressure plate lower cover and the pressure plate upper cover are respectively covered on the upper and lower openings of a graphite cylinder to be tested; the guide rod and the screw rod are a group, respectively connected between the pressure plate lower cover and the pressure plate upper cover; a group of positioning holes and bolt holes are circumferentially arranged on the pressure plate lower cover and the pressure plate upper cover; the positioning holes are through holes, and the bolt holes have slots extending outward; the positioning holes and the bolt holes are arranged at intervals, and cooperate with the guide rod and the screw rod to fasten the pressure plate lower cover and the pressure plate upper cover to the graphite cylinder.

[0006] Furthermore, there are four guide rods and positioning holes; the positioning holes are evenly distributed on the lower cover and the upper cover of the pressure plate at 90° intervals; after the guide rod passes longitudinally through the positioning holes of the upper and lower covers of the pressure plate, both ends are locked by hexagonal nuts.

[0007] Furthermore, the bolt holes are evenly distributed between the positioning holes and are located in the same annular direction as the positioning holes; the screw rod is laterally guided by the slot and inserted into the bolt hole, and both ends are locked by hexagonal nuts.

[0008] Furthermore, the upper cover of the pressure plate is also provided with a flange interface connected to an external gas source and a pressure gauge for monitoring the pressure change inside the graphite cylinder.

[0009] Furthermore, two groups of sealing bosses are circumferentially arranged at the bottom of the upper cover of the pressure plate, which cooperate with the opening of the graphite cylinder, and the two groups of sealing bosses are mutually clamped and sealed with the cylinder wall of the graphite cylinder.

[0010] Furthermore, the two groups of sealing bosses are respectively installed with a first silicone sealing ring and a second silicone sealing ring from outside to inside.

[0011] Furthermore, a corresponding sealing boss is arranged above the lower cover of the pressure plate corresponding to the wall of the graphite cylinder, and a third silicone sealing ring is arranged on the sealing boss.

[0012] Furthermore, the sealing bosses of the pressure plate lower cover and the pressure plate upper cover are additionally provided with cross reinforcing ribs and circular reinforcing ribs.

[0013] Furthermore, a lifting screw is installed at the center of the upper cover of the pressure plate.

[0014] Furthermore, the inner surfaces of the lower cover of the pressure plate and the upper cover of the pressure plate located on one side of the graphite cylinder are both flat; and a group of supporting feet are also provided at the bottom of the lower cover of the pressure plate. Beneficial Effects

[0015] Through this device, it is possible to find out whether the graphite cylinder itself is leaking, quickly determine whether the graphite cylinder used for granular silicon production is qualified, and judge whether the graphite cylinder is leaking from visual detection to qualitative determination, filling the gap in graphite cylinder leakage detection, ensuring that the annular gap of the graphite stack does not leak, and also avoiding bumping the graphite cylinder during the pressure test, thereby achieving long-term operation of granular silicon production by the silane method and improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods, and the above and / or other advantages of the present invention will become more clear.

[0017] Figure 1 It is a schematic diagram of the overall structure of the pressure test and leak detection device.

[0018] Figure 2 It is a structural schematic diagram of the upper cover of the pressure plate in the pressure test and leak detection device.

[0019] Wherein, each reference numeral represents:

[0020] 1-pressure plate lower cover; 2-hexagonal nut; 3-guide rod; 4-screw; 5-pressure plate upper cover; 6-first silicone sealing ring; 7-second silicone sealing ring; 8-pressure gauge; 9-lifting ear screw; 10-flange interface; 11-third silicone sealing ring; 12-sealing boss; 13-circular reinforcement rib; 14-cross reinforcement rib; 15-positioning hole; 16-bolt hole; 17-slot; 18-support foot. DETAILED DESCRIPTION

[0021] The present invention can be better understood according to the following embodiments.

[0022] The structures, proportions, sizes, etc. illustrated in the drawings of the specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effect and purpose that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model. At the same time, the terms such as "upper", "lower", "front", "back", "middle" and so on quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the utility model without substantial change of the technical content.

[0023] Combination Figure 1 and Figure 2 The pressure test and leak detection device of the granular silicon production equipment of the utility model comprises a pressure plate lower cover 1, a pressure plate upper cover 5, a guide rod 3 and a screw rod 4; the pressure plate lower cover 1 and the pressure plate upper cover 5 are respectively covered on the upper and lower openings of the graphite cylinder to be tested; the guide rod 3 and the screw rod 4 are a group, respectively connected between the pressure plate lower cover 1 and the pressure plate upper cover 5; a group of positioning holes 15 and bolt holes 16 are circumferentially arranged on the pressure plate lower cover 1 and the pressure plate upper cover 5; the positioning hole 15 is a through hole, and the bolt hole 16 has a slot 17 extending outward; the positioning hole 15 and the bolt hole 16 are arranged at intervals, and cooperate with the guide rod 3 and the screw rod 4 to fasten the pressure plate lower cover 1 and the pressure plate upper cover 5 to the graphite cylinder.

[0024] Among them, the lower cover 1 of the pressure plate is a 20mm thick 304 steel plate, with a sealing boss set according to the shape of the graphite cylinder, a cross reinforcement rib 14 is set below, and a circle of circular reinforcement ribs 13 is set near the outer circle to strengthen the strength of the plate. There are also four support feet 18 with a height of 250mm at the bottom. The screw 4 provides preload force for the pressure test, and the guide rod 3 plays a guiding role during installation. The upper cover 5 of the pressure plate is a 20mm thick 304 steel plate, with two sealing bosses 12 set according to the shape of the graphite cylinder, four cross reinforcement ribs 14 are set above, and a circle of circular reinforcement ribs 13 is set near the outer circle to strengthen the strength of the plate, leaving a pressure gauge interface and a pressure test air inlet.

[0025] Among them, there are four guide rods 3 and positioning holes 15; the positioning holes 15 are evenly distributed on the pressure plate lower cover 1 and the pressure plate upper cover 5 at intervals of 90°; after the guide rod 3 longitudinally passes through the positioning holes 15 of the upper and lower covers of the pressure plate, the two ends are locked by hexagonal nuts 2.

[0026] The bolt holes 16 are evenly distributed between the positioning holes 15 and are located in the same circumferential direction as the positioning holes 15 ; the screw rod 4 is laterally guided by the slot 17 and inserted into the bolt hole 16 , and both ends are locked by the hexagonal nuts 2 .

[0027] The upper cover 5 of the pressure plate is also provided with a flange interface 10 connected to an external gas source and a pressure gauge 8 for monitoring the pressure change inside the graphite cylinder.

[0028] The bottom of the pressure plate upper cover 5 is circumferentially provided with two groups of sealing bosses 12 that cooperate with the opening of the graphite cylinder, and the two groups of sealing bosses 12 are mutually clamped and sealed with the cylinder wall of the graphite cylinder.

[0029] The two sets of sealing bosses 12 are respectively installed with a first silicone seal ring 6 and a second silicone seal ring 7 from outside to inside. The first silicone seal ring 6 is made of reusable silicone and is suitable for G5 graphite cylinders. The second silicone seal ring 7 is made of reusable silicone and is suitable for G4.5 graphite cylinders.

[0030] A corresponding sealing boss is arranged above the pressure plate lower cover 1 corresponding to the graphite cylinder wall, and a third silicone sealing ring 11 is arranged on the sealing boss. A wider silicone sealing pad is selected to meet the pressure test of G4.5 and G5 graphite cylinders.

[0031] The sealing bosses of the pressure plate lower cover 1 and the pressure plate upper cover 5 are additionally provided with cross reinforcing ribs 14 and circular reinforcing ribs 13 .

[0032] A lifting screw 9 is provided at the center of the upper cover 5 of the pressure plate for easy lifting.

[0033] The inner surfaces of the pressure plate lower cover 1 and the pressure plate upper cover 5 on one side of the graphite cylinder are both flat; a group of supporting feet 18 are also provided at the bottom of the pressure plate lower cover 1.

[0034] Because the molecular sizes of helium and hydrogen are similar, it was decided to use helium for pressure testing and leak detection, and the test pressure was 0.1Mpa. For cleanliness considerations, the device is made of 304 material with a plate thickness of 20mm. Cross reinforcement ribs 14 and circular reinforcement ribs 13 are installed at the upper and lower flat covers to meet the pressure test strength requirements. In order to prevent the graphite cylinder from being bumped when installing the pressure plate upper cover 5 and unevenness during hoisting, four detachable positioning guide rods 3 are set between the upper and lower covers of the pressure plate. The positioning guide rods 3 play a guiding role and slowly descend after passing through the guide rods 3 during installation. For the convenience of disassembly and assembly, except for the positioning holes 15 at the four positioning guide rods, the other bolt holes 16 are set to open type and slots 17 are set. For the convenience of disassembly and assembly, a lifting ear screw 9 is installed in the center of the pressure plate upper cover 5. The pressure plate lower cover 1 is equipped with a support foot 18 with a height of 150mm. The sealing cover of the upper cover 5 of the pressure plate is designed with a sealing boss 12 with a height of 3.1mm and a width of 13mm, which can play a sealing role and seal the graphite barrel, while completely simulating the normal operation of the graphite barrel. The lower cover 1 of the pressure plate is flat. In order to avoid waste, reusable silicone pads are used for sealing, completely simulating the upper and lower assembly states of the graphite barrel. At the same time, a pressure gauge 8 is provided to observe the pressure effect during pressure increase; the flange interface 10 is the pressure intake interface of the graphite barrel.

[0035] During the inspection, a leak detection liquid can be used for detection. When necessary, a helium detector can be used for leak detection. Slowly pressurize helium into the graphite barrel from the air inlet valve, and control the pressure increase rate to 0.02MPa / min. When the pressure reaches 0.05MPa, stop increasing the pressure, and use a leak detection liquid to check the sealing surface and the cylinder to see if there is any leakage. If no leakage is found, continue to increase the pressure to 0.103MPa, stop increasing the pressure, and use a helium detector to check for leaks.

[0036] The utility model provides a concept and method for a pressure test and leak detection device for granular silicon production equipment. There are many methods and ways to implement the technical solution. The above is only a preferred implementation of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model. These improvements and modifications should also be regarded as the protection scope of the utility model. All components not specified in this embodiment can be implemented by existing technologies.

Claims

1. A pressure test and leak detection device for granular silicon production equipment, characterized in that: The invention comprises a pressure plate lower cover (1), a pressure plate upper cover (5), a guide rod (3) and a screw rod (4); the pressure plate lower cover (1) and the pressure plate upper cover (5) are respectively covered on the upper and lower openings of the graphite cylinder to be tested; the guide rod (3) and the screw rod (4) are a group, respectively connected between the pressure plate lower cover (1) and the pressure plate upper cover (5); a group of positioning holes (15) and bolt holes (16) are circumferentially arranged on the pressure plate lower cover (1) and the pressure plate upper cover (5); the positioning holes (15) are through holes, and the bolt holes (16) have slots (17) extending outward; the positioning holes (15) and the bolt holes (16) are arranged at intervals, and cooperate with the guide rod (3) and the screw rod (4) to fasten the pressure plate lower cover (1) and the pressure plate upper cover (5) to the graphite cylinder.

2. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: There are four guide rods (3) and four positioning holes (15); the positioning holes (15) are evenly distributed at intervals of 90 degrees on the lower cover (1) and the upper cover (5) of the pressure plate; after the guide rod (3) passes longitudinally through the positioning holes (15) of the upper and lower covers of the pressure plate, both ends are locked by hexagonal nuts (2).

3. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: The bolt holes (16) are evenly distributed between the positioning holes (15) and are located in the same circumferential direction as the positioning holes (15); the screw rod (4) is laterally guided through the slot (17) and inserted into the bolt hole (16), and both ends are locked by hexagonal nuts (2).

4. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: The pressure plate upper cover (5) is also provided with a flange interface (10) connected to an external gas source and a pressure gauge (8) for monitoring the pressure change inside the graphite cylinder.

5. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: The bottom of the pressure plate upper cover (5) is provided with two sets of sealing bosses (12) that cooperate with the opening of the graphite cylinder in an annular direction, and the two sets of sealing bosses (12) are mutually clamped and sealed with the wall of the graphite cylinder.

6. The pressure test and leak detection device for granular silicon production equipment according to claim 5, characterized in that: The two groups of sealing bosses (12) are respectively provided with a first silicone sealing ring (6) and a second silicone sealing ring (7) from the outside to the inside.

7. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: A corresponding sealing boss is arranged above the lower cover (1) of the pressure plate corresponding to the wall of the graphite cylinder, and a third silicone sealing ring (11) is arranged on the sealing boss.

8. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: The sealing bosses of the pressure plate lower cover (1) and the pressure plate upper cover (5) are additionally provided with cross reinforcing ribs (14) and circular reinforcing ribs (13).

9. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: A lifting screw (9) is installed at the center of the upper cover (5) of the pressure plate.

10. The pressure test and leak detection device for granular silicon production equipment according to claim 1, characterized in that: The inner surfaces of the pressure plate lower cover (1) and the pressure plate upper cover (5) located on one side of the graphite cylinder are both flat; a group of supporting feet (18) is also provided at the bottom of the pressure plate lower cover (1).

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