Crucible and electron beam evaporation coating system
By designing a crucible that prevents the splitting of crawl and conductive splitting, the problem of creeping and overflow of coating materials during the electron beam evaporation process is solved, and the effective anti-spill and conductive properties of the material are achieved.
Patent Information
- Application Number
- CN202420288963.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-07
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2034-02-07
AI Technical Summary
During the electron beam evaporation process, the coating material evaporates rapidly in the conductive crucible, causing the coating material to crawl along the crucible wall, causing the "crawl" phenomenon to occur, causing the material to overflow.
A crucible is designed, including anti-crawling pot splits and conductive splits, which are connected by thermal expansion, adhesive or nesting to prevent the coating material from crawling along the crucible wall.
Effectively prevent coating materials from overflowing from the crucible, maintaining conductive properties, and reducing the complexity and cost of the preparation process.
Smart Images
Figure CN222540860U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of film coating, in particular to a crucible and an electron beam evaporation film coating system. Background Art
[0002] Electron beam evaporation is a type of physical vapor deposition. Electron beam evaporation uses accelerated electrons to bombard the coating material. The kinetic energy of the electrons is converted into heat energy to heat and evaporate the coating material. After evaporation, the coating material adheres to the surface of the workpiece to form a film.
[0003] During the electron beam evaporation process, the coating material is generally placed in a crucible, which needs to have conductive and heat-resistant properties. However, some coating materials (such as metal aluminum) have good wettability when the evaporation rate in the conductive crucible is fast, and are prone to "climbing the crucible" phenomenon, that is, the coating material climbs up from the bottom along the crucible wall and eventually overflows to the outer wall of the crucible. Utility Model Content
[0004] The purpose of the present application is to provide a crucible and an electron beam evaporation coating system to ensure the electrical conductivity of the crucible body while preventing the coating material from creeping to the outside of the crucible.
[0005] In order to achieve the above objectives, this application provides the following technical solutions:
[0006] A crucible, comprising:
[0007] A first split body and a second split body, the first split body and the second split body are fixedly connected by thermal expansion, gluing or nesting, the first split body is an anti-climbing crucible split body, and the second split body is a conductor;
[0008] The first split body comprises a first annular side plate, the top of the first annular side plate is higher than the top of the second split body;
[0009] The first sub-body and the second sub-body are distributed vertically along the height direction of the crucible, or the first sub-body surrounds the second sub-body along the circumference direction of the crucible.
[0010] When the crucible provided by the utility model is used, the coating material is placed inside the crucible. During the electronic evaporation process, the liquid coating material contacts the second split body, and the current can be transmitted through the second split body to avoid charge accumulation. At the same time, since the first split body is an anti-climbing split body, it has an anti-climbing performance, that is, the coating material placed in the crucible has poor wettability or does not wet the surface of the first split body. In addition, the top of the first annular side plate is higher than the second split body, so that when the coating material in the crucible crawls upward along the inner wall of the crucible, if the coating material wants to crawl to the opening of the crucible, it will inevitably pass through the surface of the first annular side plate. Since the first annular side plate has an anti-climbing performance, the coating material does not crawl along the surface of the first annular side plate or the coating material crawls very slowly along the first annular side plate, thereby preventing the coating material from overflowing the crucible.
[0011] In one implementation, the thermal expansion coefficient of the first sub-body is not equal to the thermal expansion coefficient of the second sub-body, the first sub-body and the second sub-body are fixedly connected by thermal expansion, and in a high temperature environment, the volume changes of the first sub-body and the second sub-body are different, so that the first sub-body and the second sub-body are in close contact and sealed;
[0012] The difference between the thermal expansion coefficient of the first sub-body and the thermal expansion coefficient of the second sub-body is greater than 10 -6 / K to ensure the sealing between the first sub-body and the second sub-body.
[0013] In one implementation, the first sub-body and the second sub-body are sealed by an adhesive, which has low cost and simplifies the processing technology;
[0014] The adhesive includes an inorganic adhesive. The inorganic adhesive has the advantages of good heat resistance, low cost, not easy to age, simple structure, high adhesion, etc., and is suitable for processing crucibles for electron beam evaporation coating process.
[0015] In one implementation, the second split body includes a basin structure, the basin structure includes a first bottom plate and a second annular side plate, the first bottom plate is fixedly connected to the second annular side plate; the second annular side plate is fixedly connected to the first annular side plate.
[0016] In one implementation, the bottom end of the first annular side plate and the top end of the second annular side plate are matched in a concave-convex manner to achieve relative positioning of the first annular side plate and the second annular side plate, and the structure is simple and easy to assemble.
[0017] In one implementation, steps are provided at the top end of the second annular side plate and the bottom end of the first annular side plate, and the top end of the second annular side plate and the bottom end of the first annular side plate are overlapped and engaged through the steps to achieve relative positioning of the second annular side plate and the first annular side plate, and the structure of the step wall is simple and easy to manufacture;
[0018] The top surface of the step is a horizontal surface, an inclined surface and / or an arc surface. When the top surface of the step is a horizontal surface, it is easier to process and manufacture. When the top surface of the step is an inclined surface and / or an arc surface, it is easier to place the first annular side plate on the second annular side plate and position the two relative to each other, thereby preventing the first annular side plate from sliding relative to the second annular side plate; and / or,
[0019] The width of the step is 0.1 mm to 20 mm, which ensures a good positioning effect of the first annular side plate and the second annular side plate while saving raw materials as much as possible; and / or,
[0020] The height of the step is 1%-70% of the overall height of the crucible; and / or,
[0021] The height of the step is not less than 2 mm, which ensures that the first annular side plate and the second annular side plate have a good positioning effect while not affecting the mechanical properties of the first annular side plate and the second annular side plate.
[0022] In one implementation, the top end of the second annular side plate and the bottom end of the first annular side plate are both provided with a plurality of grooves and protrusions arranged at intervals along the circumferential direction, and the top end of the second annular side plate and the bottom end of the first annular side plate are engaged with each other through the plurality of grooves and protrusions. In this solution, the contact area between the top end of the second annular side plate and the bottom end of the second annular side plate is relatively large, and the engagement of the grooves and protrusions is more suitable for fixing and sealing by thermal expansion.
[0023] The shapes of the protrusions and the grooves are triangles, squares, semicircles, ellipses and / or trapezoids, which are regular and easy to manufacture.
[0024] In one implementation, the lower portion of the first annular side plate is nested on the inner side or the outer side of the second annular side plate.
[0025] In one implementation, the lower portion of the first annular side plate is sleeved on the inner side of the second annular side plate, and the inner wall of the second annular side plate gradually tilts toward the inner cavity of the crucible from top to bottom along the height direction of the crucible; or, the lower portion of the first annular side plate is sleeved on the outer side of the second annular side plate, and the outer wall of the second annular side plate gradually tilts away from the inner cavity of the crucible from top to bottom along the height direction of the crucible. The first annular side plate and the second annular side plate are both inclined, which makes it easier to align the first annular side plate and the second annular side plate during the stacking process, and after the stacking, the first annular side plate and the second annular side plate are positioned by themselves through the inclined wall, and there is no need to set a blocking wall, which simplifies the structure of the crucible.
[0026] In one implementation, the height of the first annular side plate is 1%-95% of the overall height of the crucible, ensuring that the first annular side plate and the second annular side plate are telescoped.
[0027] In one implementation, the first split body further includes a second bottom plate, and the bottom end of the first annular side plate is fixed to the second bottom plate;
[0028] The second bottom plate is provided with a through hole, and the second split body includes a plugging piece for plugging the through hole. In this solution, the contact area between the coating material and the first split body is larger, which further prevents the coating material from climbing up the crucible and overflowing onto the outer wall of the crucible.
[0029] In one implementation, the inner wall of the through hole is gradually inclined from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate, and the outer wall of the blocking member is gradually inclined from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate, which is more convenient for aligning the blocking member and the through hole during the nesting process;
[0030] The second split body includes a first bottom plate, and the sealing piece is fixedly connected to the first bottom plate or formed integrally therewith. In this solution, the first bottom plate supports and positions the sealing piece, which makes it easier to assemble the sealing piece. The setting of the first bottom plate ensures that the bottom of the crucible is flat, which facilitates the placement of the crucible and is suitable for more application scenarios.
[0031] In one implementation, the inner wall of the through hole is gradually inclined from top to bottom along the height direction of the crucible in a direction away from the first annular side plate, and the outer wall of the blocking member is gradually inclined from top to bottom along the height direction of the crucible in a direction away from the first annular side plate. In this solution, the blocking member enters the through hole from top to bottom and can be positioned by itself through the inclined wall, without the need to set a blocking part, thereby simplifying the structure of the crucible.
[0032] In one implementation, the second split body includes a bottom positioning member located at the lower side of the second bottom plate, and the bottom positioning member and the blocking member are positioned in a concave-convex manner to prevent the blocking member from moving left and right and detaching from the through hole; or,
[0033] The second split body includes a first bottom plate, and the first bottom plate and the blocking member are positioned in a concave-convex manner; or,
[0034] The second split body includes a first bottom plate and a second annular side plate, the bottom end of the second annular side plate is fixedly connected to the first bottom plate, and the first bottom plate and the blocking member are positioned in a concave-convex manner. The setting of the first bottom plate ensures that the bottom of the crucible is flat, which is convenient for placing the crucible and is suitable for more application scenarios.
[0035] In one implementation, the first sub-body and the second sub-body are sealed and fixed by thermal expansion and / or gluing; and / or the cross-section of the through hole is square, triangular, circular, trapezoidal and / or polygonal, so that the shape of the through hole is regular and easy to process and manufacture; and / or the maximum inner diameter of the through hole is 5%-80% of the diameter of the second base plate, ensuring that the contact area between the sealing member and the coating material is not too small, thereby improving the current transmission efficiency.
[0036] In one implementation, the surface of the first split body is insulated; or, the first split body is an insulator; or, an insulating layer is provided on the surface of the first split body; the insulating material has poor or no wettability with the coating material, which can prevent the coating material from crawling along the surface of the first split body, and is particularly suitable for metal coating materials, such as aluminum.
[0037] The material of the insulator or insulating layer includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride. The above materials have poor wettability or no wettability with the coating material, and are suitable for producing the first sub-body. And / or,
[0038] The material of the second body includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride doped with a conductive phase. The above materials have good conductivity and are suitable for producing the second body.
[0039] An electron beam evaporation coating system comprises any of the above crucibles. Compared with the prior art, the electron beam evaporation coating system provided by the utility model embodiment has the same beneficial effects as the above crucibles, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:
[0041] Figure 1 A cross-sectional view of the step cooperation between the first split body and the second split body of the crucible provided in an embodiment of the present application;
[0042] Figure 2 A cross-sectional view of the step-matching of the first split body and the second split body of the crucible provided in another embodiment of the present application;
[0043] Figures 3A-3C A partial schematic diagram of three first sub-bodies and second sub-bodies provided in the embodiments of the present application being engaged with each other through grooves and protrusions;
[0044] Figure 4A A schematic diagram of a first split body provided in an embodiment of the present application being sleeved on the outside of a second split body;
[0045] Figure 4B A schematic diagram of a first split body provided in an embodiment of the present application being sleeved inside a second split body;
[0046] Figure 5AA schematic diagram of another embodiment of the present application showing that a first split body is sleeved on the outside of a second split body;
[0047] Figure 5B A schematic diagram of a first split body provided in another embodiment of the present application being sleeved inside a second split body;
[0048] Figure 6 A schematic diagram of a blocking member provided in an embodiment of the present application blocking the second bottom plate from bottom to top;
[0049] Figure 7 A schematic diagram of a blocking member provided in another embodiment of the present application blocking the second bottom plate from bottom to top;
[0050] Figure 8 A schematic diagram of a blocking member provided in another embodiment of the present application blocking the second bottom plate from bottom to top;
[0051] Fig. 9 A schematic diagram of a blocking member provided in an embodiment of the application blocking the second bottom plate from top to bottom;
[0052] Fig.10 A schematic diagram of a blocking member provided in another embodiment of the present application blocking the second bottom plate from top to bottom;
[0053] Fig.11 A schematic diagram of a sealing member provided in another embodiment of the present application sealing the second bottom plate from top to bottom.
[0054] Reference numerals:
[0055] 1a-first annular side plate, 1b-second bottom plate, 1c-through hole, 2a-second annular side plate, 2b-first bottom plate, 2c-sealing member, 2d-bottom positioning member, 01-step, 02-adhesive. DETAILED DESCRIPTION
[0056] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0057] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0058] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.
[0059] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc., indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present application.
[0060] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0061] At present, in the process of electron beam evaporation, the coating material is generally placed in a crucible, and the crucible needs to have conductive and heat-resistant properties. However, the conductive crucible material generally has good wettability with the coating material, and the liquid coating material easily climbs up from the bottom of the crucible, resulting in a "climbing crucible" phenomenon. If you want to avoid the "climbing crucible" phenomenon, you need to choose a material that is both conductive and has poor wettability with the coating material to prepare the crucible. At the same time, the crucible material also needs to have heat resistance, which limits the choice of crucible materials, and places higher requirements on the crucible preparation process and higher costs.
[0062] The crucible provided in the embodiment of the present application includes a first body and a second body, wherein the first body and the second body are connected by thermal expansion, gluing or nesting. Specifically, the first body and the second body can be sealed and relatively fixed by thermal expansion, that is, under high temperature, the thermal expansion coefficients of the first body and the second body are different, so that the thermal expansion of the first body and the second body is different, that is, the volume changes of the first body and the second body in a high temperature environment are different, so that the first body and the second body are in close contact and sealed. Alternatively, the first body and the second body are connected by gluing, that is, an adhesive 02 is set between the first body and the second body, so that the first body and the second body are bonded and fixed together. Alternatively, the first body and the second body can also be connected by nesting, that is, part of the first body is embedded in the second body, and all or part of the second body can be embedded in the first body, so as to achieve the first body and the second body fixed together.
[0063] The first part is an anti-climbing part, which has an anti-climbing property, that is, the coating material contained in the crucible has poor or no wettability on the surface of the first part. The second part is a conductor, and current can be transmitted to the outside of the crucible through the second part to avoid charge accumulation.
[0064] The first sub-body includes a first annular side plate 1a. Along the height direction of the crucible, the top of the first annular side plate 1a is higher than the second sub-body, that is, at any position along the circumferential direction, the top of the first annular side plate 1a is higher than the second sub-body. Specifically, the first sub-body and the second sub-body can be distributed up and down along the height direction of the crucible, and the first sub-body is higher than the second sub-body. Alternatively, the first sub-body surrounds the second sub-body along the circumference of the crucible, that is, the first sub-body surrounds the second sub-body on the inner side of the crucible or the first sub-body surrounds the second sub-body on the outer side of the crucible. In this solution, a part of the second sub-body can be surrounded by the first sub-body.
[0065] When the crucible provided by the utility model is used, the coating material is placed inside the crucible. During the electronic evaporation process, the liquid coating material contacts the second split body, and the current can be transmitted through the second split body to avoid charge accumulation. At the same time, since the first split body is an anti-climbing split body, it has an anti-climbing performance, that is, the coating material placed in the crucible has poor wettability or does not wet the surface of the first split body. In addition, the top of the first annular side plate 1a is higher than the second split body, so that when the coating material in the crucible crawls upward along the inner wall of the crucible, if the coating material wants to crawl to the opening of the crucible, it will inevitably pass through the surface of the first annular side plate 1a. Since the first annular side plate 1a has an anti-climbing performance, the coating material does not crawl along the surface of the first annular side plate 1a or the coating material crawls very slowly along the first annular side plate 1a, thereby preventing the coating material from overflowing the crucible.
[0066] In a specific embodiment, the thermal expansion coefficient of the first sub-body is not equal to the thermal expansion coefficient of the second sub-body, so that in a high temperature environment, the volume changes of the first sub-body and the second sub-body are different, so that the first sub-body and the second sub-body are in close contact and sealed, and the first sub-body and the second sub-body are fixedly connected through thermal expansion. Specifically, the thermal expansion coefficient of the first sub-body is greater than the thermal expansion coefficient of the second sub-body, or the thermal expansion coefficient of the first sub-body is less than the thermal expansion coefficient of the second sub-body, which can be set according to actual conditions.
[0067] In the above embodiment, the difference between the thermal expansion coefficient of the first sub-body and the thermal expansion coefficient of the second sub-body is greater than 10 -6 / K, so that the sealing between the first sub-body and the second sub-body can be ensured. Specifically, the difference in thermal expansion coefficient between the first sub-body and the second sub-body is 10 -6 / K, 2*10 -6 / K, 3*10 -6 / K, etc.
[0068] In another preferred embodiment, the first sub-body and the second sub-body can be sealed by adhesive 02, that is, adhesive 02 is coated between the first sub-body and the second sub-body, which has low cost and simplifies the processing technology.
[0069] In the above embodiment, since the crucible has a high temperature during use, the adhesive 02 should be a high temperature resistant adhesive 02. Preferably, the adhesive 02 includes an inorganic adhesive 02. The inorganic adhesive 02 has the advantages of good heat resistance, low cost, not easy to age, simple structure, high adhesion, etc., and is suitable for processing crucibles for electron beam evaporation coating process. Specifically, the inorganic adhesive 02 includes phosphate coating, silicate adhesive 02 and / or alumina cement. The above materials have a certain blocking / isolating effect on the infiltration of the coating material, and are suitable for processing crucibles for electron beam evaporation coating process.
[0070] like Figure 1 and Figure 2 As shown, the second split body includes a basin structure, and the basin structure includes a first bottom plate 2b and a second annular side plate 2a, the first bottom plate 2b is fixedly connected to the second annular side plate 2a, and the second annular side plate 2a is fixedly connected to the first annular side plate 1a. The first bottom plate 2b and the second annular side plate 2a together enclose a part of the inner cavity of the crucible. The first bottom plate 2b and the second annular side plate 2a can be an integral structure, or the first bottom plate 2b and the second annular side plate 2a can be connected by gluing, clamping, threading or interference fit.
[0071] In the above embodiment, the bottom end of the first annular side plate 1a and the top end of the second annular side plate 2a are matched in a concave-convex manner, that is, the bottom end of the first annular side plate 1a and the top end of the second annular side plate 2a are matched in a concave-convex manner through the grooves and the protrusions to achieve relative positioning, and the structure is simple and easy to assemble.
[0072] The cross-section of the crucible provided in the present application may be circular, square, elliptical, etc., and the overall shape of the crucible may be cylindrical, square cylindrical, truncated cone, prism-shaped, elliptical cone, etc.
[0073] In this embodiment, if Figure 3A-3B In the embodiment, the bottom end of the first annular side plate 1a and the top end of the second annular side plate 2a can be fixedly connected by thermal expansion, that is, in a high temperature environment, the volume of the protrusion thermally expands and becomes closely in contact with the inner wall of the groove, thereby achieving fixation and sealing; and, there is no need to heat the first annular side plate 1a and the second annular side plate 2a at high temperature before use, but during the electronic evaporation process, when the crucible temperature is high, the first annular side plate 1a and the second annular side plate 2a are fixed and sealed, thereby simplifying the processing technology of the crucible. Of course, if Figure 2 As shown, in this embodiment, the bottom end of the first annular side plate 1a and the top end of the second annular side plate 2a can also be fixedly connected by gluing.
[0074] like Figure 1 and Figure 2 As shown, the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a are both provided with a step 01, and the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a are overlapped and engaged through the step 01. The top end of the second annular side plate 2a and the bottom plate of the first annular side plate 1a are in contact with each other through the step wall, so that the second annular side plate 2a and the first annular side plate 1a are relatively positioned. The structure of the step wall is simple and easy to manufacture. In this embodiment, the step 01 at the top end of the second annular side plate 2a can be arranged around the circumference of the crucible, or the step 01 can be arranged only on a part of the circumference of the second annular side plate 2a; similarly, the step 01 at the top end of the first annular side plate 1a can be arranged around the circumference of the crucible, or the step 01 can be arranged only on a part of the circumference of the first annular side plate 1a.
[0075] In the above embodiment, the top surface of the step 01 is a horizontal surface, an inclined surface and / or a curved surface. When the top surface of the step 01 is a horizontal surface, it is easier to process and manufacture. When the top surface of the step 01 is an inclined surface and / or a curved surface, it is easier to place the first annular side plate 1a on the second annular side plate 2a and then position the two relative to each other, thereby preventing the first annular side plate 1a from sliding relative to the second annular side plate 2a.
[0076] The width of step 01 is the extension distance of step 01 along the radial direction of the crucible. If the width of step 01 is too wide, the thickness of the first annular side plate 1a or the second annular side plate 2a may be too thick, wasting raw materials. If the width of step 01 is too narrow, the positioning effect of the first annular side plate 1a and the second annular side plate 2a may be poor. Therefore, the width of step 01 is set within the range of 0.1mm-20mm. Specifically, the width of step 01 is 0.1mm, 1mm, 2mm, 4mm, 5mm, 8mm, 10mm, 12mm, 15mm, 18mm or 20mm, preferably 0.2mm-5mm.
[0077] In addition, the height of the step 01 is the extension distance of the step 01 along the height of the crucible. If the height of the step 01 is too high, it may affect the mechanical properties of the first annular side plate 1a and the second annular side plate 2a. If the height of the step 01 is too low, it may cause the first annular side plate 1a and the second annular side plate 2a to have poor positioning effects. Therefore, the height of the step 01 is 1%-70% of the overall height of the crucible. Exemplarily, the height of the step 01 is 1%, 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65% or 70% of the overall height of the crucible, preferably 16%-50%. Alternatively, the height of the step 01 is not less than 2 mm, and specifically, the height of the step 01 is 2 mm, 3 mm, 4 mm or 5 mm.
[0078] like Figures 3A-3C As shown, the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a are both provided with a plurality of grooves and protrusions arranged at intervals along the circumferential direction, and the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a are engaged with each other through the plurality of grooves and protrusions. In this embodiment, the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a can be fixed and sealed by thermal expansion, that is, the second annular side plate 2a and the first annular side plate 1a have different volume changes in a high temperature environment, so as to achieve close contact and sealing between the two. Alternatively, in this embodiment, the top end of the second annular side plate 2a and the bottom end of the first annular side plate 1a can also be fixedly connected by gluing.
[0079] In the above embodiments, the shapes of the protrusions and grooves can be triangular, square, semicircular, elliptical and / or trapezoidal, which are regular in shape and easy to manufacture. Of course, protrusions and grooves of any other shapes are within the protection scope of this application.
[0080] like Figure 1-3C In the embodiment shown, the first sub-body and the second sub-body are distributed vertically along the height direction of the crucible, and the first sub-body is higher than the second sub-body. It should be understood that when the first sub-body and the second sub-body are matched in concave and convex configuration, the convex part of the first sub-body is allowed to be lower than the top of the second sub-body.
[0081] In another embodiment, if Figures 4A-5B As shown, the lower portion of the first annular side plate 1a can be nested on the inner side or outer side of the second annular side plate 2a. Figure 4A In the embodiment, the lower part of the first annular side plate 1a is nested on the outer side of the second annular side plate 2a, that is, the first sub-body surrounds the second sub-body on the outer side of the crucible; Figure 4B In the embodiment, the lower part of the first annular side plate 1a is nested on the inner side of the second annular side plate 2a, that is, the second sub-body surrounds the first sub-body on the inner side of the crucible. Such an arrangement makes it easier to assemble the first sub-body and the second sub-body. Moreover, in this embodiment, the lower part of the first annular side plate 1a can be fixed and sealed with the second annular side plate 2a by thermal expansion, and the volume change of the annular side plate located on the inner side is greater than the volume change of the annular side plate located on the outer side, so that the inner annular side plate and the outer annular side plate are in close contact. Alternatively, the lower part of the first annular side plate 1a can be fixedly connected with the second annular side plate 2a by gluing. Alternatively, in this embodiment, the lower part of the first annular side plate 1a can be connected with the second annular side plate 2a only by nesting, and the first annular side plate 1a and the second annular side plate 2a are sealed by solidifying the coating liquid that penetrates into the gap between the two.
[0082] In the above embodiment, Figure 4A In the embodiment, when the lower portion of the first annular side plate 1a is overlapped on the outer side of the second annular side plate 2a, a blocking wall can be provided on the outer wall of the second annular side plate 2a, and the bottom end of the first annular side plate 1a abuts against the blocking wall to achieve relative positioning of the first annular side plate 1a and the second annular side plate 2a. Figure 4B In the embodiment, when the lower portion of the first annular side plate 1a is nested inside the second annular side plate 2a, a blocking wall may be provided on the inner wall of the second annular side plate 2a, and the bottom end of the first annular side plate 1a abuts against the blocking wall to achieve relative positioning of the first annular side plate 1a and the second annular side plate 2a.
[0083] As a preferred embodiment, Figure 5A As shown, the lower part of the first annular side plate 1a is sleeved on the outer side of the second annular side plate 2a, the outer wall of the second annular side plate 2a gradually tilts away from the inner cavity of the crucible from top to bottom along the height direction of the crucible, and the inner wall of the first annular side plate 1a gradually tilts away from the inner cavity of the crucible from top to bottom along the height direction of the crucible. Or, as Figure 5BAs shown, the lower part of the first annular side plate 1a is sleeved on the inner side of the second annular side plate 2a, and the inner wall of the second annular side plate 2a gradually tilts toward the inner cavity of the crucible from top to bottom along the height direction of the crucible, and the outer wall of the first annular side plate 1a gradually tilts toward the inner cavity of the crucible from top to bottom along the height direction of the crucible. In the above two embodiments, the first annular side plate 1a and the second annular side plate 2a are both tilted, which makes it easier to align the first annular side plate 1a and the second annular side plate 2a during the stacking process, and after the stacking, the first annular side plate 1a and the second annular side plate 2a are positioned by themselves through the tilted wall, and there is no need to set a blocking wall, which simplifies the structure of the crucible.
[0084] Further, the extension distance of the first annular side plate 1a along the height of the crucible is the height of the first annular side plate 1a. If the height of the first annular side plate 1a is too high, raw materials will be wasted. If the first annular side plate 1a is too short, the first annular side plate 1a and the second annular side plate 2a will be affected. Therefore, the height of the first annular side plate 1a can be 1%-95% of the overall height of the crucible. Specifically, the height of the first annular side plate 1a is 1%, 5%, 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80% or 90% of the overall height of the crucible, preferably 16%-50%.
[0085] like Figure 6-Figure 11 As shown, the first split body also includes a second bottom plate 1b, and the bottom end of the first annular side plate 1a is fixed to the second bottom plate 1b. The second bottom plate 1b and the first annular side plate 1a can be an integral structure, or the second bottom plate 1b and the first annular side plate 1a can be connected by gluing, clamping, threading or interference fit. Among them, the second bottom plate 1b is provided with a through hole 1c, and the second split body includes a plugging member 2c for plugging the through hole 1c. In this scheme, the plugging member 2c is nested in the through hole 1c of the second bottom plate 1b. If the inside of the crucible is a molten coating material, the plugging member 2c and the inner wall of the through hole 1c can be sealed by thermal expansion or gluing; if the inside of the crucible is an unmelted or incompletely molten coating material, there can be a gap between the plugging member 2c and the inner wall of the through hole 1c, and the unmelted or incompletely molten coating material will not leak from the gap between the plugging member 2c and the inner wall of the through hole 1c. In this solution, the contact area between the coating material and the first split body is larger, which further prevents the coating material from climbing into the crucible and overflowing onto the outer wall of the crucible.
[0086] like Figure 6As shown, the inner wall of the through hole 1c gradually tilts from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate 1a, and the outer wall of the blocking member 2c gradually tilts from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate 1a. In this solution, the blocking member 2c enters the through hole 1c from bottom to top and can be positioned by itself through the inclined wall, without the need to set a blocking part, thereby simplifying the structure of the crucible. In addition, the inner wall of the through hole 1c and the outer wall of the blocking member 2c are both inclined, which makes it easier to align the blocking member 2c and the through hole 1c during the nesting process.
[0087] like Figure 7 As shown, the second split includes a first bottom plate 2b, and the blocking piece 2c is fixedly connected to the first bottom plate 2b, or the blocking piece 2c and the first bottom plate 2b can be an integral structure. Specifically, the blocking piece 2c and the first bottom plate 2b can be connected by gluing, clamping, threading or interference fit. In this embodiment, the second split may only include the blocking piece 2c and the first bottom plate 2b and does not include the second annular side plate 2a; or, the second split may include the blocking piece 2c, the first bottom plate 2b and the second annular side plate 2a, preferably the three are an integral structure. With the above technical solution, the first bottom plate 2b supports and positions the blocking piece 2c, which is more convenient for assembling the blocking piece 2c, and the setting of the first bottom plate 2b ensures that the bottom of the crucible is flat, which is convenient for placing the crucible and is suitable for more application scenarios.
[0088] like Figure 9-11 As shown, the inner wall of the through hole 1c gradually tilts away from the first annular side plate 1a from top to bottom along the height direction of the crucible, and the outer wall of the blocking member 2c gradually tilts away from the first annular side plate 1a from top to bottom along the height direction of the crucible. In this solution, the blocking member 2c enters the through hole 1c from top to bottom and can be positioned by itself through the inclined wall, without the need to set a blocking part, thereby simplifying the structure of the crucible. In addition, the inner wall of the through hole 1c and the outer wall of the blocking member 2c are both inclined, which makes it easier to align the blocking member 2c and the through hole 1c during the nesting process.
[0089] Furthermore, in order to prevent the blocking member 2c from moving out of position, the second split body includes a bottom positioning member 2d located at the lower side of the second bottom plate 1b, and the bottom positioning member 2d and the blocking member 2c are positioned by concave-convex cooperation. Specifically, the bottom positioning member 2d and the blocking member 2c are relatively positioned by the concave-convex cooperation of the card groove and the card convex, so as to prevent the blocking member 2c from moving left and right and leaving the through hole 1c.
[0090] like Fig.10 As shown, the second split body includes a first bottom plate 2b, and the first bottom plate 2b and the blocking member 2c are positioned in a concave-convex manner. Fig.11As shown, the second split body includes a first bottom plate 2b and a second annular side plate 2a, the bottom end of the second annular side plate 2a is fixedly connected to the first bottom plate 2b, and the first bottom plate 2b and the blocking member 2c are positioned in a concave-convex manner. The setting of the first bottom plate 2b ensures that the bottom of the crucible is flat, which is convenient for placing the crucible and is suitable for more application scenarios.
[0091] In the above embodiment, the first split body includes a first annular side plate and a second bottom plate, the second bottom plate is provided with a through hole, and the second split body includes a sealing piece. The first split body and the second split body can be sealed and fixed by thermal expansion and / or gluing to ensure the seal between the first split body and the second split body to prevent leakage of the coating liquid.
[0092] Optionally, the cross section of the through hole 1c can be square, triangular, circular, trapezoidal and / or polygonal, so that the through hole 1c has a regular shape and is easy to manufacture. Of course, through holes 1c of any other shapes are within the protection scope of this application.
[0093] Considering that if the inner diameter of the through hole 1c is too large, the mechanical strength of the second bottom plate 1b will be reduced, and if the inner diameter of the through hole 1c is too small, the contact area between the plugging member 2c and the coating material will be too small, which will reduce the current transmission efficiency. Therefore, the maximum inner diameter of the through hole 1c is set to 5%-80% of the diameter of the second bottom plate 1b. Exemplarily, the maximum inner diameter of the through hole 1c is 5%, 10%, 20%, 30%, 40%, 50%, 60%, 70% or 80% of the diameter of the second bottom plate 1b, preferably 10%-25%.
[0094] In the above embodiments, the surface of the first body is insulated; or, the first body is an insulator; or, an insulating layer is provided on the surface of the first body, and the insulating layer can be provided on the surface of the first body by coating, spraying, etc., to ensure the surface insulation of the first body. The insulating material has poor or no wettability with the coating material, which can prevent the coating material from creeping along the surface of the first body, and is particularly suitable for metal coating materials, such as aluminum.
[0095] In the above embodiment, the material of the insulator or the insulating layer includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride. The above materials have poor wettability or no wettability with the coating material, and are suitable for producing the first sub-body.
[0096] The material of the second body includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride doped with a conductive phase. The above materials have good electrical conductivity and are suitable for producing the second body.
[0097] The first sub-body and / or the second sub-body can be formed into a preliminary embryo by a process such as powder sintering or reaction sintering, and then machined into a desired shape.
[0098] In addition, the embodiment of the utility model further provides an electron beam evaporation coating system, which includes the crucible provided by any of the above embodiments. Compared with the prior art, the beneficial effects of the electron beam evaporation coating system provided by the embodiment of the utility model are the same as the beneficial effects of the above crucible, which will not be described in detail here.
[0099] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.
[0100] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. A crucible, characterized in that: include: A first split body and a second split body, wherein the first split body and the second split body are fixedly connected by thermal expansion, gluing or nesting, the first split body is an anti-climbing crucible split body, and the second split body is a conductor; The first split body comprises a first annular side plate, the top of the first annular side plate is higher than the top of the second split body; The first sub-body and the second sub-body are distributed vertically along the height direction of the crucible, or the first sub-body surrounds the second sub-body along the circumference direction of the crucible.
2. The crucible according to claim 1, characterized in that The thermal expansion coefficient of the first sub-body is not equal to the thermal expansion coefficient of the second sub-body, and the first sub-body and the second sub-body are fixedly connected by thermal expansion; The difference between the thermal expansion coefficient of the first sub-body and the thermal expansion coefficient of the second sub-body is greater than 10 -6 / K.
3. The crucible according to claim 1, characterized in that The first sub-body and the second sub-body are sealed by an adhesive; The adhesive includes an inorganic adhesive.
4. The crucible according to claim 2 or 3, characterized in that: The second split body includes a basin structure, and the basin structure includes a first bottom plate and a second annular side plate. The first bottom plate is fixedly connected to the second annular side plate; and the second annular side plate is fixedly connected to the first annular side plate.
5. The crucible according to claim 4, characterized in that The bottom end of the first annular side plate is matched with the top end of the second annular side plate in a concave-convex manner.
6. The crucible according to claim 5, characterized in that The top end of the second annular side plate and the bottom end of the first annular side plate are both provided with steps, and the top end of the second annular side plate and the bottom end of the first annular side plate are overlapped and engaged with each other through the steps; The top surface of the step is a horizontal surface, an inclined surface and / or a curved surface; and / or, The width of the step is 0.1 mm to 20 mm; and / or, The height of the step is 1%-70% of the overall height of the crucible; and / or, The height of the step is not less than 2 mm.
7. The crucible according to claim 5, characterized in that The top end of the second annular side plate and the bottom end of the first annular side plate are both provided with a plurality of grooves and protrusions arranged at intervals along the circumferential direction, and the top end of the second annular side plate and the bottom end of the first annular side plate are engaged with each other through the plurality of grooves and protrusions; The shapes of the protrusions and the grooves are triangle, square, semicircle, ellipse and / or trapezoid.
8. The crucible according to claim 4, characterized in that The lower portion of the first annular side plate is nested on the inner side or the outer side of the second annular side plate.
9. The crucible according to claim 8, characterized in that The lower portion of the first annular side plate is sleeved on the inner side of the second annular side plate, and the inner wall of the second annular side plate gradually inclines toward the inner part of the crucible cavity from top to bottom along the height direction of the crucible; or, the lower portion of the first annular side plate is sleeved on the outer side of the second annular side plate, and the outer wall of the second annular side plate gradually inclines away from the inner part of the crucible cavity from top to bottom along the height direction of the crucible.
10. The crucible according to claim 8, characterized in that The height of the first annular side plate is 1%-95% of the overall height of the crucible.
11. The crucible according to claim 1, characterized in that The first split body further includes a second bottom plate, and the bottom end of the first annular side plate is fixed to the second bottom plate; The second bottom plate is provided with a through hole, and the second split body includes a blocking member for blocking the through hole.
12. The crucible according to claim 11, characterized in that The inner wall of the through hole is gradually inclined from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate, and the outer wall of the blocking member is gradually inclined from top to bottom along the height direction of the crucible toward the direction close to the first annular side plate; The second split body includes a first bottom plate, and the blocking member is fixedly connected to or integrally formed with the first bottom plate.
13. The crucible according to claim 11, characterized in that The inner wall of the through hole gradually tilts away from the first annular side plate from top to bottom along the height direction of the crucible, and the outer wall of the blocking member gradually tilts away from the first annular side plate from top to bottom along the height direction of the crucible.
14. The crucible according to claim 13, characterized in that The second split body comprises a bottom positioning member located at the lower side of the second bottom plate, and the bottom positioning member and the blocking member are positioned in a concave-convex manner; or, The second split body includes a first bottom plate, and the first bottom plate and the blocking member are positioned in a concave-convex manner; or, The second split body includes a first bottom plate and a second annular side plate. The bottom end of the second annular side plate is fixedly connected to the first bottom plate. The first bottom plate and the blocking member are positioned in a concave-convex manner.
15. The crucible according to any one of claims 11 to 14, characterized in that The first sub-body and the second sub-body are sealed and fixed by means of thermal expansion and / or gluing; and / or, The cross-section of the through hole is square, triangular, circular, trapezoidal and / or polygonal; and / or, The maximum inner diameter of the through hole is 5%-80% of the diameter of the second bottom plate.
16. The crucible according to any one of claims 1-3 and 5-14, characterized in that The surface of the first split body is insulated; or, the first split body is an insulator; or, an insulating layer is provided on the surface of the first split body; The material of the insulator or insulating layer includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride; and / or, The material of the second body includes one or more of magnesium oxide, aluminum oxide, silicon oxide, tantalum oxide, zirconium oxide, beryllium oxide, barium oxide, copper oxide, silicon carbide, magnesium carbide, aluminum carbide, silicon nitride, boron nitride, aluminum nitride, magnesium nitride, and beryllium nitride doped with a conductive phase.
17. An electron beam evaporation coating system, characterized in that: Comprising the crucible according to any one of claims 1-16.