S-shaped thermocouple for whole-section temperature measurement of photovoltaic semiconductor diffusion furnace
By designing an S-type thermocouple for photovoltaic semiconductor diffusion furnace, combined with quartz casing, multiple sets of temperature measurement points, sealant strips and breathable holes, the problem of low accuracy in multi-point temperature measurement is solved, and higher temperature measurement accuracy and efficiency are achieved.
Patent Information
- Application Number
- CN202421894479.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-07
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-08-07
AI Technical Summary
Existing thermocouples have low multi-point temperature measurement accuracy in photovoltaic semiconductor diffusion furnaces, which affects the production efficiency of the diffusion furnace.
A S-type thermocouple used in a photovoltaic semiconductor diffusion furnace is designed, including quartz casing, thermocouple wire, multiple sets of temperature measurement points, metal connecting sleeves, sealing tapes, protective sleeves, breathable holes, compensation wires and plug-in cables. Through the combination of these components, higher temperature measurement accuracy and efficiency are achieved.
By installing a quartz casing on the outside of the corundum pipe, the temperature measurement area is transparent and maintenance convenience is improved; the setting of multiple sets of temperature measurement points achieves multi-point temperature measurement throughout the whole section; the use of sealant strips and breathable holes reduces the energy loss of temperature field and thermal expansion, contraction and burst, avoids inaccurate temperature measurement caused by the terminal block, and significantly improves the temperature measurement accuracy and efficiency.
Smart Images
Figure CN222895812U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of medium and high temperature temperature measuring equipment, in particular to an S-type thermocouple used for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace. Background Art
[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It dopes semiconductor wafers under high temperature conditions, that is, diffuses elements such as phosphorus and boron into silicon wafers, thereby changing and controlling the type, concentration and distribution of impurities in the semiconductor to establish different electrical characteristic areas. The special thermocouples of the diffusion furnace, especially the polysilicon ingot furnace and semiconductor diffusion furnace used in the photovoltaic industry, need to use multiple points to measure the temperature of the entire section of the furnace at the same time, so as to provide a strong guarantee for the precise control of the uniformity of the furnace temperature of the diffusion furnace. However, the temperature measuring thermocouples commonly used at present are mostly single-point temperature measurement and open structure, which can easily reduce the accuracy of thermocouples in measuring the temperature of multiple points in the photovoltaic semiconductor diffusion furnace, and ultimately affect the overall production efficiency of the diffusion furnace. Therefore, it is necessary to further optimize the structure of conventional "S" type or "K" type thermocouples to ensure the accuracy and efficiency of their measurement of the temperature of multiple points in the photovoltaic semiconductor diffusion furnace. Utility Model Content
[0003] The utility model provides an S-type thermocouple used for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace, so as to solve the problems existing in the above background.
[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0005] An S-type thermocouple for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace comprises a metal connecting sleeve, a corundum tube is sleeved inside the metal connecting sleeve, a thermocouple wire is passed through the corundum tube, a compensation wire is covered on one side of the thermocouple wire passing through the corundum tube, a plurality of temperature measuring points are arranged on the thermocouple wire in the corundum tube, and the positive and negative poles of the thermocouple wire inside the compensation wire and the temperature measuring points are matched and connected with a connector cable.
[0006] Furthermore, a quartz sleeve is sleeved on the outer side of the corundum tube, and an air hole is opened on the outer wall side of the quartz sleeve close to the metal connecting sleeve.
[0007] Furthermore, a protective sleeve is provided on the side of the metal connecting sleeve away from the quartz sleeve, and the metal connecting sleeve and the protective sleeve are bonded by a first sealing strip.
[0008] Furthermore, the thermocouple wires are all arranged through the metal connecting sleeve and the protective sleeve, and the protective sleeve and the compensation wire are bonded by a second sealing strip.
[0009] The utility model has the following beneficial effects:
[0010] The utility model provides an S-type thermocouple for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace, which is mainly composed of a quartz sleeve, a thermocouple wire, multiple groups of temperature measurement points, a metal connecting sleeve, a sealing strip, a protective sleeve, a vent hole, a compensation wire, a connecting cable and other components. By installing a quartz sleeve on the outside of a corundum tube, the transparency of the temperature measurement area is ensured, and the convenience of thermocouple wire maintenance is improved; the setting of multiple groups of temperature measurement points further realizes the whole-section multi-point temperature measurement of the diffusion furnace; the metal connecting sleeve and the protective sleeve are bonded by a first sealing strip, which effectively improves the connection sealing and reduces the temperature field Energy loss, at the same time, the setting of the quartz sleeve air holes effectively avoids the bursting of the corundum tube due to thermal expansion and contraction; the protection sleeve and the compensation wire are bonded by the second sealing strip, which further avoids the inaccurate temperature measurement caused by the use of the terminal board, and solves the problem that in the entire temperature measurement process of the photovoltaic semiconductor diffusion furnace, the existing thermocouple temperature measurement point design is insufficient, the light transmittance of the temperature measurement area is poor, and the sealing of the protection sleeve and the connector is poor, which usually leads to the thermocouple's measurement accuracy of multiple points in the furnace is reduced, which ultimately affects the overall production efficiency of the diffusion furnace.
[0011] The utility model provides multiple groups of temperature measuring points at the thermocouple wires in the corundum tube, further realizing multi-point temperature measurement of the entire diffusion furnace. A single thermocouple can be used to measure the temperatures of multiple points in the temperature field, effectively improving the practicability of the thermocouple.
[0012] In the utility model, a quartz sleeve is installed on the outer side of the corundum tube, which ensures the transparency of the temperature measurement area, and allows the user to see whether the internal temperature measuring couple wire is damaged and replace it in time, thereby improving the overall maintenance convenience of the thermocouple wire.
[0013] In the utility model, the metal connecting sleeve and the protective sleeve are bonded by the first sealing strip, which effectively improves the connection sealing and reduces the energy loss of the temperature field. At the same time, the setting of the quartz sleeve air holes effectively avoids the bursting of the corundum tube due to thermal expansion and contraction.
[0014] In the utility model, the protective sleeve and the compensating wire are bonded by the second sealing adhesive strip, thereby further avoiding the phenomenon of inaccurate temperature measurement due to the use of a wiring board.
[0015] In the utility model, the materials of the connector cable and the compensation wire can be selected to be consistent, thereby reducing the electromotive force error and further improving the accuracy of thermocouple temperature measurement. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0017] The meanings of the reference numerals are as follows:
[0018] 1. Quartz sleeve; 2. Corundum tube; 3. Thermocouple wire; 4. Temperature measuring point; 5. Metal connecting sleeve; 6. First sealing strip; 7. Protective sleeve; 8. Air vent; 9. Second sealing strip; 10. Compensation wire; 11. Connecting cable. DETAILED DESCRIPTION
[0019] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.
[0020] like Figure 1 As shown, an S-type thermocouple for temperature measurement of the entire section of a photovoltaic semiconductor diffusion furnace comprises a metal connecting sleeve 5, a corundum tube 2 is sleeved inside the metal connecting sleeve 5, a thermocouple wire 3 is installed through the corundum tube 2, a compensation wire 10 is coated on one side of the thermocouple wire 3 passing through the corundum tube 2, a plurality of temperature measuring points 4 are installed on the thermocouple wire 3 in the corundum tube 2, and a connector cable 11 is matched and connected to the positive and negative poles of the thermocouple wire 3 on the inner side of the compensation wire 10 and the temperature measuring points 4.
[0021] A quartz sleeve 1 is sleeved on the outer side of the corundum tube 2 , and a vent hole 8 is also opened on the outer wall side of the quartz sleeve 1 close to the metal connecting sleeve 5 .
[0022] A protective sleeve 7 is connected to the side of the metal connecting sleeve 5 away from the quartz sleeve 1 , and the metal connecting sleeve 5 and the protective sleeve 7 are bonded together by a first sealing strip 6 .
[0023] The thermocouple wires 3 are all arranged through the metal connecting sleeve 5 and the protective sleeve 7 , and the protective sleeve 7 and the compensation wire 10 are bonded by a second sealing strip 9 .
[0024] When the utility model is used in practice, the "S" type thermocouple is assembled and installed in good condition in advance, and after checking that the first sealing strip 6 and the second sealing strip 9 are well bonded, in the closed loop composed of two different conductors of the photovoltaic semiconductor diffusion furnace, due to the different temperatures of different contact points of the conductors, an electromotive force is generated, and then the corresponding connector cable 11 of the thermocouple is connected to the measuring end of the closed loop, and the temperature of the measuring end and the reference end is measured, so that the thermocouple is measured through the electromotive force, thereby realizing multi-point temperature measurement of the entire section of the photovoltaic semiconductor diffusion furnace. After optimizing and upgrading the "S" type thermocouple structure, a quartz sleeve 1 is added to the outside of the corundum tube 2. Since the quartz sleeve 1 has better light transmittance, the transparency of the temperature measurement area is ensured, and the convenience of maintenance of the thermocouple wire 3 is improved; six groups of temperature measurement points 4 are set in the temperature measurement area of the thermocouple wire 3, which further realizes the expansion The whole section of the diffusion furnace is multi-point temperature measured; the metal connecting sleeve 5 and the protective sleeve 7 are bonded by the first sealing strip 6, which effectively improves the sealing of the connection and reduces the energy loss of the temperature field. At the same time, the setting of the air vents 8 on the outer wall of the quartz sleeve 1 effectively avoids the bursting of the corundum tube 2 due to thermal expansion and contraction; the protective sleeve 7 and the compensation wire 10 are bonded by the second sealing strip 9, which further avoids the phenomenon of inaccurate temperature measurement due to the use of a terminal block, and solves the problem that in the current whole section temperature measurement process of the photovoltaic semiconductor diffusion furnace, the existing thermocouple temperature measurement point design is insufficient, the light transmittance of the temperature measurement area is poor, and the sealing of the protective sleeve 7 and the connector is poor, which usually leads to a decrease in the accuracy of thermocouple temperature measurement at multiple points in the furnace, which ultimately affects the overall production efficiency of the diffusion furnace. Therefore, the "S" type thermocouple has better practicality in the multi-point temperature measurement process of actual industrial equipment.
Claims
1. An S-type thermocouple for measuring the temperature of a photovoltaic semiconductor diffusion furnace, comprising a metal connection sleeve (5), a corundum tube (2) is provided inside the metal connection sleeve (5), a thermocouple wire (3) is passed through the corundum tube (2), and a compensation wire (10) is covered on one side of the thermocouple wire (3) passing through the corundum tube (2), wherein: A plurality of temperature measuring points (4) are provided on the thermocouple wire (3) in the corundum tube (2), and the positive and negative electrodes of the thermocouple wire (3) inside the compensation wire (10) and the temperature measuring points (4) are matched and connected with a plug-in cable (11).
2. The S-type thermocouple for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace according to claim 1, characterized in that: The outer side of the corundum tube (2) is sleeved with a quartz sleeve (1), and the outer wall side of the quartz sleeve (1) close to the metal connecting sleeve (5) is also provided with a vent hole (8).
3. The S-type thermocouple for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace according to claim 2, characterized in that: A protective sleeve (7) is provided on the side of the metal connection sleeve (5) away from the quartz sleeve (1), and the metal connection sleeve (5) and the protective sleeve (7) are bonded together by a first sealing strip (6).
4. The S-type thermocouple for whole-section temperature measurement of a photovoltaic semiconductor diffusion furnace according to claim 3 is characterized in that: The thermocouple wires (3) are all arranged through the metal connection sleeve (5) and the protective sleeve (7), and the protective sleeve (7) and the compensation wire (10) are bonded together by a second sealing strip (9).