Crystal pulling equipment and crystal pulling system

Abstract

The utility model provides crystal pulling equipment and a crystal pulling system. The crystal pulling equipment comprises a single crystal furnace, a corrugated pipe, a vacuum pipeline, a furnace platform, a first fire extinguishing assembly, a second fire extinguishing assembly and a water supply assembly, the water supply assembly communicates with the first fire extinguishing assembly and the second fire extinguishing assembly. The first fire extinguishing assembly comprises a first supporting part and a spraying part; the spraying part is arranged at a first preset position in the mounting space through the first supporting part; and the second fire extinguishing assembly comprises a second supporting part and a spraying head part, and the spraying head part is arranged at a second preset position in the mounting space through the second supporting part. By means of the first fire extinguishing assembly and the second fire extinguishing assembly, the surface temperature of the corrugated pipe and the vacuum pipeline can be rapidly reduced, and leaked silicon liquid is cooled. In addition, the first fire extinguishing assembly and the second fire extinguishing assembly are located at different positions for the corrugated pipe and the vacuum pipeline, so that fire extinguishing at different positions is achieved, and the fire extinguishing effect is better.

Description

Technical Field

[0001] This application relates to a technical field for crystal preparation, and particularly to crystal pulling equipment and a crystal pulling system. Background Art

[0002] In recent years, the technology of single crystal furnaces has been iteratively updated, the thermal field size of single crystal furnaces has become larger and larger, and the charge of crucibles has also become larger and larger.

[0003] During the single crystal production process, problems such as leakage of silicon caused by the dropping of crystal rods and damage to crucibles often lead to silicon leakage and fire. Since the temperature of the silicon liquid is about 1450 °C, the leakage of silicon liquid poses a safety hazard to equipment and personnel.

[0004] In response to the above problems, there is currently no reasonable solution. Therefore, it is urgent to develop crystal pulling equipment and crystal pulling equipment to solve the technical problems existing in the prior art to a certain extent. Utility Model Content

[0005] The purpose of this application is to provide a crystal pulling equipment and a crystal pulling system, which can extinguish fires caused by silicon leakage to a certain extent, reduce equipment losses, improve personnel safety, and provide protection for the safety of rescue personnel during the rescue and fire extinguishing process.

[0006] A crystal pulling equipment of this application includes a single crystal furnace, a bellows, a vacuum pipeline, a furnace platform, a first fire extinguishing component, a second fire extinguishing component, and a water supply component;

[0007] There is an installation position on the furnace platform, the single crystal furnace is arranged at the installation position, and a crucible is arranged in the single crystal furnace;

[0008] The furnace platform is also surrounded by an installation space, the bellows is arranged in the installation space and connected to the crucible, and can drive the crucible to lift; the vacuum pipeline is arranged in the installation space and can introduce inert gas into the single crystal furnace;

[0009] The water supply component is respectively communicated with the first fire extinguishing component and the second fire extinguishing component, and can supply water to the first fire extinguishing component and the second fire extinguishing component;

[0010] The first fire extinguishing component includes a first support part and a spraying part; the spraying part is arranged at a first preset position in the installation space through the first support part, and the spraying part faces the bellows and the vacuum pipeline;

[0011] The second fire extinguishing component includes a second support part and a spraying head, the spraying head is arranged at a second preset position in the installation space through the second support part, and the spraying head faces the bellows and the vacuum pipeline.

[0012] In the above technical solution, further, the first fire extinguishing component includes a support plate that can serve as the first support portion and a spray head that can serve as the spraying portion;

[0013] The support plate is fixed at the first preset position within the installation space, and the spray head is fixed to the support plate and the spray head is communicated with the water supply component;

[0014] The spray head forms a first preset angle with the support plate so that the spray head can face the corrugated pipe and the vacuum pipe.

[0015] In the above technical solution, further, the first preset angle is set between 45° and 135°.

[0016] In the above technical solution, further, a plurality of the first fire extinguishing components are provided, and the plurality of fire extinguishing components are arranged in parallel within the installation space.

[0017] In the above technical solution, further, the second fire extinguishing component includes a support ring that can serve as the second support portion and a spray head that can serve as the spraying portion;

[0018] The spray head is fixed at a second preset position within the installation space through the support ring, and the spray head is communicated with the water supply component;

[0019] The spray head forms a second preset angle with the support ring so that the spray head can face the corrugated pipe and the vacuum pipe.

[0020] In the above technical solution, further, the second preset angle is set between 0° and 10°.

[0021] In the above technical solution, further, the water supply component includes a water supply tank, a water distributor, and a water supply pipe;

[0022] Both ends of the water distributor are respectively communicated with the water supply tank and the water supply pipe;

[0023] One end of the water supply pipe away from the water distributor is respectively communicated with the first fire extinguishing component and the second fire extinguishing component.

[0024] In the above technical solution, further, the water supply pipe includes a main pipe and branch pipes;

[0025] One end of the main pipe is communicated with the water distributor and the other end is respectively communicated with the branch pipe for communicating with the first fire extinguishing component and the branch pipe for communicating with the second fire extinguishing component.

[0026] In the above technical solution, further, the water supply component further includes a valve, and the valve is disposed on the branch pipe for controlling the water flow in the branch pipe.

[0027] The present application also provides a crystal pulling system, including the above-mentioned crystal pulling equipment.

[0028] Compared with the prior art, the present application has the following beneficial effects:

[0029] A crystal pulling equipment of the present application includes a single crystal furnace, a bellows, a vacuum pipe, a furnace platform, a first fire extinguishing component, a second fire extinguishing component, and a water supply component;

[0030] The furnace platform has an installation position, the single crystal furnace is disposed at the installation position, and a crucible is disposed in the single crystal furnace;

[0031] The furnace platform is further surrounded by an installation space, the bellows is disposed in the installation space and connected to the crucible, and can drive the crucible to lift; the vacuum pipe is disposed in the installation space and can introduce inert gas into the single crystal furnace;

[0032] The water supply component is respectively communicated with the first fire extinguishing component and the second fire extinguishing component, and can supply water to the first fire extinguishing component and the second fire extinguishing component;

[0033] The first fire extinguishing component includes a first support portion and a spraying portion; the spraying portion is disposed at a first preset position in the installation space through the first support portion, and the spraying portion faces the bellows and the vacuum pipe;

[0034] The second fire extinguishing component includes a second support portion and a spraying head, the spraying head is disposed at a second preset position in the installation space through the second support portion, and the spraying head faces the bellows and the vacuum pipe.

[0035] In summary, the present application can quickly reduce the surface temperature of the bellows and the vacuum pipe by using the first fire extinguishing component and the second fire extinguishing component, cool the leaked silicon liquid, cool the ignition point in the first time, effectively prevent the spread of the fire, and effectively prevent more serious accidents from occurring. In addition, the first fire extinguishing component and the second fire extinguishing component in the present application are disposed at different positions in the installation space, that is to say, the first fire extinguishing component and the second fire extinguishing component are in different positions with respect to the bellows and the vacuum pipe, so as to realize fire extinguishing at different positions with respect to the bellows and the vacuum pipe by using the first fire extinguishing component and the second fire extinguishing component, and the fire extinguishing effect is better.

[0036] The present application also provides a crystal pulling system, including the above-mentioned crystal pulling equipment. Therefore, it has all the beneficial effects of the crystal pulling equipment, and will not be specifically described herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0038] Figure 1 Side view of the crystal pulling device provided by the present application from the first perspective;

[0039] Figure 2 is Figure 1 Enlarged view of part A;

[0040] Figure 3 Side view of the crystal pulling device provided by the present application from the second perspective;

[0041] Figure 4 is Figure 3 Enlarged view of part B;

[0042] Figure 5 Side view of the crystal pulling device provided by the present application from the third perspective;

[0043] Figure 6 is Figure 5 Enlarged view of part C;

[0044] Figure 7 Side view of the crystal pulling device provided by the present application from the fourth perspective;

[0045] Figure 8 is Figure 7 Enlarged view of part D.

[0046] Reference numerals: 1 - single crystal furnace; 2 - bellows; 3 - vacuum pipeline; 4 - furnace platform; 5 - first fire extinguishing component; 6 - second fire extinguishing component; 8 - installation space; 9 - first support part; 10 - spraying part; 11 - second support part; 12 - spray head part; 14 - support plate; 15 - spray head; 16 - support ring; 18 - nozzle; 19 - water distributor; 21 - water supply pipeline; 22 - main pipeline; 24 - branch pipeline. Specific Embodiments

[0047] The following specific embodiments are provided to assist the reader in obtaining a comprehensive understanding of the methods, apparatuses, and / or systems described herein. However, after understanding the disclosure of this application, various changes, modifications, and equivalents of the methods, apparatuses, and / or systems described herein will be apparent. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein, but rather, changes that will be apparent after understanding the disclosure of this application may be made, except for operations that must occur in a specific order. Additionally, descriptions of features known in the art may be omitted for increased clarity and conciseness.

[0048] The features described herein may be implemented in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided only to illustrate some of the many possible ways of implementing the methods, apparatuses, and / or systems described herein that will be apparent after understanding the disclosure of this application.

[0049] Throughout the specification, when an element (such as a layer, region, or substrate) is described as "on" another element, "connected to" another element, "coupled to" another element, "above" another element, or "covering" another element, it may be directly "on," "connected to," "coupled to," "above," or "covering" the other element, or there may be one or more other elements intervening therebetween. In contrast, when an element is described as "directly on" another element, "directly connected to" another element, "directly coupled to" another element, "directly above" another element, or "directly covering" another element, there may be no other elements intervening therebetween.

[0050] As used herein, the term "and / or" includes any one of the listed related items and any combination of any two or more of them.

[0051] Although terms such as "first," "second," and "third" may be used herein to describe various components, elements, regions, layers, or portions, these components, elements, regions, layers, or portions are not limited by these terms. Rather, these terms are only used to distinguish one component, element, region, layer, or portion from another. Thus, a first component, element, region, layer, or portion described in the examples herein may also be referred to as a second component, element, region, layer, or portion without departing from the teachings of the examples.

[0052] For ease of description, spatial relationship terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another as shown in the accompanying drawings. Such spatial relationship terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is flipped, an element described as "above" or "upper" relative to another element will subsequently be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientation of "above" and "below" depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relationship terms used herein will be interpreted accordingly.

[0053] The terms used herein are for the purpose of describing various examples only and are not intended to limit the disclosure. Unless the context clearly dictates otherwise, the singular forms are also intended to include the plural forms. The terms "comprising", "including", and "having" enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof that exist, but do not preclude the existence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0054] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the accompanying drawings may occur. Thus, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that occur during manufacturing.

[0055] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application.

[0056] Example 1

[0057] When pulling a crystal using existing crystal pulling equipment, problems such as crystal rod dropping and crucible damage often occur. Once the crystal rod drops or the crucible is damaged, the problem of silicon liquid leakage will occur. Since the temperature of the silicon liquid is about 1450 °C, it is very easy to cause a fire; in addition, once a fire occurs, it will cause serious accidents to the equipment and personnel.

[0058] The present application provides a crystal pulling device, which includes a single crystal furnace 1, a bellows 2, a vacuum pipeline 3, a furnace platform 4, a first fire extinguishing component 5, a second fire extinguishing component 6, and a water supply component.

[0059] Specifically, Figure 1Taking the perspective of the placement in the middle as an example, an installation position is formed on the upper end surface of the furnace platform 4, and the single crystal furnace 1 is arranged at the installation position; further, an installation groove is formed at the position corresponding to the single crystal furnace 1 on the furnace platform 4, and the single crystal furnace 1 is in interference fit with the installation groove so that the single crystal furnace 1 can be stably limited in the installation groove. Further still, the shape and size of the installation groove are adapted to those of the bottom of the single crystal furnace 1. Further still, after the single crystal furnace 1 is arranged in the installation groove, the single crystal furnace 1 can be welded to the furnace platform 4 by welding, that is, the single crystal furnace 1 is stably fixed to the furnace platform 4 to prevent the single crystal furnace 1 from falling off the furnace platform 4.

[0060] Specifically, a crucible is arranged in the single crystal furnace 1, and silicon material is placed in the crucible. The crucible can change the silicon material from a solid state to a molten state.

[0061] Specifically, the furnace platform 4 is of a frame structure, and an installation space 8 is surrounded by the furnace platform 4. The bellows 2 is arranged in the installation space 8 and is connected to the crucible and can drive the crucible to lift; further, in the actual use process, a driving mechanism is used to drive the crucible to rise or fall in the single crystal furnace 1. The driving mechanism is preferably a driving motor, the output shaft of the driving motor is connected to the crucible, and the bellows 2 is sleeved on the output shaft of the driving motor. The above driving mechanism is a prior art and can be understood by those skilled in the art. In addition, it is not within the protection scope of this application, so it will not be specifically introduced.

[0062] Specifically, the vacuum pipeline 3 is arranged in the installation space 8 and can introduce inert gas into the single crystal furnace 1 so that the single crystal furnace 1 has a vacuum environment that meets the requirements.

[0063] Specifically, the water supply assembly is respectively communicated with the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6, and can supply water to the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6; further, the first fire extinguishing assembly 5 includes a first support portion 9 and a spraying portion 10; the spraying portion 10 is arranged at a first preset position in the installation space 8 through the first support portion 9, and the spraying portion 10 faces the corrugated pipe 2 and the vacuum pipe 3; the second fire extinguishing assembly 6 includes a second support portion 11 and a spraying head 12, the spraying head 12 is arranged at a second preset position in the installation space 8 through the second support portion 11, and the spraying head 12 faces the corrugated pipe 2 and the vacuum pipe 3. During the actual crystal pulling process, once problems such as crystal rod dropping and crucible damage occur, first start the water supply assembly to make the water supply assembly supply water to the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6; then open the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6, and use the spraying head 12 and the spraying portion 10 to extinguish the fire on the corrugated pipe 2 and the vacuum pipe 3; further, the water sprayed by the spraying head 12 and the spraying portion 10 will directly act on the corrugated pipe 2 and the vacuum pipe 3, which can quickly reduce the surface temperature of the corrugated pipe 2 and the vacuum pipe 3, cool the leaked silicon liquid, cool the ignition point in the first time and effectively prevent the spread of the fire, and effectively prevent more serious accidents from occurring.

[0064] In summary, the present application can quickly reduce the surface temperature of the corrugated pipe 2 and the vacuum pipe 3 by using the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6, cool the leaked silicon liquid, cool the ignition point in the first time and effectively prevent the spread of the fire, and effectively prevent more serious accidents from occurring. In addition, the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6 in the present application are arranged at different positions in the installation space 8, that is to say, the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6 are in different positions with respect to the corrugated pipe 2 and the vacuum pipe 3, so as to realize fire extinguishing at different positions of the corrugated pipe 2 and the vacuum pipe 3 by using the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6, and the fire extinguishing effect is better.

[0065] In this embodiment, in combination with Figures 1-6 as shown, the first fire extinguishing assembly 5 includes a support plate 14 that can serve as the first support portion 9 and a spray head 15 that can serve as the spraying portion 10.

[0066] Specifically, the support plate 14 is in a plate-like structure, which has a fixed end and a connecting end, the fixed end is fixed to the furnace table 4, the connecting end extends towards the single crystal furnace 1, and the spray head 15 is fixedly arranged at the connecting end of the support plate 14.

[0067] Specifically, the support plate 14 is fixed (welded) at the first preset position in the installation space 8. In combination with Figure 1 as shown, the installation space 8 is a cube space, then the first preset position is preferably the bottom of the installation space 8, that is, the edge of the inner side wall of the furnace table 4.

[0068] Specifically, the shower head 15 is connected to the water supply assembly, and the water supply assembly can supply water to the shower head 15. Specifically, in combination Figure 1 As shown, since the support plate 14 extends in the vertical direction, and the bellows 2, the vacuum pipe 3 and the support plate 14 are located at different positions of the installation space 8, the spray head 15 and the support plate 14 are set at a first preset angle so that the spray head 15 can be directed toward the bellows 2 and the vacuum pipe 3.

[0069] Further, the first preset angle is set between 45° and 135°. Preferably, the first preset angle is 45°.

[0070] Furthermore, a plurality of first fire extinguishing components 5 are provided, and the plurality of fire extinguishing components are arranged in parallel in the installation space 8. The plurality of first fire extinguishing components 5 working simultaneously can increase the fire extinguishing coverage area, thereby improving the fire extinguishing efficiency.

[0071] In this embodiment, combined Figure 7 and Figure 8 As shown, the second fire extinguishing assembly 6 includes a support ring 16 that can serve as the second support portion 11 and a spray head 18 that can serve as the spray head portion 12 .

[0072] Specifically, the nozzle 18 is fixed at a second preset position in the installation space 8 through a support ring 16 , and the nozzle 18 is connected to the water supply assembly; wherein the support ring 16 is arranged on the inner wall of the furnace table 4 and located at the top, and the nozzle 18 is suspended from the support ring 16 .

[0073] Specifically, a second preset angle is formed between the nozzle 18 and the support ring 16 , so that the nozzle 18 can be directed toward the bellows 2 and the vacuum pipe 3 .

[0074] Further, the second preset angle is set between 0° and 10°. Preferably, the second preset angle is 0°, that is, the support ring 16 and the spray head 18 are located on the same straight line.

[0075] In this embodiment, the water supply assembly (the assembly is not shown in the figure) includes a water supply tank, a water distributor 19 and a water supply pipe 21 .

[0076] Specifically, both ends of the water distributor 19 are connected to the water supply tank and the water supply pipe 21 respectively; the end of the water supply pipe 21 away from the water distributor 19 is connected to the first fire extinguishing assembly 5 and the second fire extinguishing assembly 6 respectively. The water distributor 19 is used to divert water in the water supply assembly.

[0077] Furthermore, the water supply pipe 21 includes a main pipe 22 and a branch pipe 24; one end of the main pipe 22 is connected to the water distributor 19 and the other end is respectively connected to the branch pipe 24 for connecting to the first fire extinguishing component 5 and the branch pipe 24 for connecting to the second fire extinguishing component 6.

[0078] Furthermore, the water supply component further includes a valve disposed in the branch pipe 24 for controlling the water flow in the branch pipe 24. That is, opening the valve wider can increase the water flow rate in the branch pipe 24, and opening the valve smaller can decrease the water flow rate in the branch pipe 24.

[0079] Preferably, the valve is a solenoid valve, which can be controlled by an electric control method. The control part is not within the protection scope of this application, so it will not be specifically described here to avoid the object problem.

[0080] During actual use, a manual valve can be selected. At the beginning, the valve is opened to the maximum to increase the fire extinguishing efficiency; when there is no flame and the surrounding temperature is already not high, then the valve can be manually adjusted to reduce the water flow.

[0081] Embodiment 2

[0082] This application also provides a crystal pulling system, including the above-mentioned crystal pulling equipment. Therefore, it has all the beneficial effects of the crystal pulling equipment, which will not be specifically described here.

[0083] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of this application, rather than to limit them; although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A crystal pulling device, characterized in that, It includes a single crystal furnace, a bellows, a vacuum pipe, a furnace table, a first fire extinguishing component, a second fire extinguishing component and a water supply component; The furnace platform has an installation position, the single crystal furnace is arranged at the installation position, and a crucible is arranged in the single crystal furnace; The furnace platform is also surrounded by an installation space, the bellows is arranged in the installation space and connected to the crucible, and can drive the crucible to rise and fall; the vacuum pipe is arranged in the installation space, and can introduce inert gas into the single crystal furnace; The water supply component is communicated with the first fire extinguishing component and the second fire extinguishing component respectively, and can provide water to the first fire extinguishing component and the second fire extinguishing component; The first fire extinguishing assembly includes a first supporting portion and a spraying portion; the spraying portion is arranged at a first preset position in the installation space through the first supporting portion, and the spraying portion faces the bellows and the vacuum pipe; The second fire extinguishing assembly includes a second supporting portion and a nozzle head, wherein the nozzle head is arranged at a second preset position in the installation space through the second supporting portion, and the nozzle head faces the bellows and the vacuum pipe.

2. The crystal pulling device according to claim 1, wherein The first fire extinguishing assembly includes a support plate capable of serving as the first support portion and a sprinkler head capable of serving as the sprinkler portion; The support plate is fixed to the first preset position in the installation space, the spray head is fixed to the support plate and the spray head is connected to the water supply assembly; A first preset angle is formed between the spray head and the support plate, so that the spray head can face the bellows and the vacuum pipe.

3. The crystal pulling device according to claim 2, characterized in that, The first preset angle is set between 45° and 135°.

4. The crystal pulling apparatus according to claim 2, wherein The first fire extinguishing components are provided in plurality, and the plurality of the fire extinguishing components are arranged in parallel in the installation space.

5. The crystal pulling device according to claim 1, characterized in that, The second fire extinguishing assembly includes a support ring capable of serving as the second support portion and a nozzle capable of serving as the nozzle portion; The nozzle is fixed at a second preset position in the installation space through a support ring, and the nozzle is connected to the water supply assembly; A second preset angle is formed between the nozzle and the support ring so that the nozzle can be directed toward the bellows and the vacuum pipe.

6. The crystal pulling device according to claim 5, wherein The second preset angle is set between 0° and 10°.

7. The crystal pulling device according to claim 1, characterized in that, The water supply assembly includes a water supply tank, a water distributor and a water supply pipeline; The two ends of the water distributor are respectively connected to the water supply tank and the water supply pipeline; One end of the water supply pipe away from the water divider is respectively connected to the first fire extinguishing assembly and the second fire extinguishing assembly.

8. The crystal pulling equipment according to claim 7, characterized in that, The water supply pipeline includes a main pipeline and a branch pipeline; One end of the main pipeline is communicated with the water distributor, and the other end is respectively communicated with a branch pipeline for communicating with the first fire extinguishing component and a branch pipeline for communicating with the second fire extinguishing component.

9. The crystal pulling device according to claim 8, wherein The water supply assembly also includes a valve, which is arranged on the branch pipe and is used to control the water flow in the branch pipe.

10. A crystal pulling system, characterized in that, A crystal pulling device comprising the crystal pulling device described in any one of claims 1-9.

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