Small spiral spray head device

Abstract

The utility model discloses a small-sized spiral spray head device, which is characterized in that a cylindrical pipe part is arranged on an exhaust pipe of a vacuum pump, a sleeve cavity separated from the inside of the cylindrical pipe part is arranged in the middle of the cylindrical pipe part, axial spray pipes communicated to the inside of the cylindrical pipe part are arranged in the sleeve cavity, and a plurality of axial spray pipes are uniformly arranged at intervals around the outer wall of the cylindrical pipe part; one side of the sleeve cavity is connected with an inflation pipe, an external air source is guided into the sleeve cavity, the pressure in the sleeve cavity is larger than that in the cylindrical pipe part, and the external air source is sprayed into the cylindrical pipe part through the axial spraying pipe. And heated N2 is sprayed into the pipeline through a circle of small spiral holes designed in the equipment, so that the generation of dust in the pipeline is inhibited to the maximum extent, and the blockage phenomenon of the pipeline between the vacuum pump and the washing tower is reduced. Meanwhile, the injected N2 drives the flowing speed of gas in the pipe, the pressure at the outlet end of the exhaust pipe of the vacuum pump is reduced, the pumping speed of the vacuum pump is reduced, maintenance of equipment and pipelines is reduced, and the productivity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum pipeline field, specifically is small -size spiral shower nozzle device. BACKGROUND

[0002] The prior art is generally connected to the environmental protection equipment of the processing process waste gas through the exhaust pipeline at the outlet of the vacuum pump, for example, a scrubbing tower, and there is no such device between the two, for example, toxic and harmful gas will be discharged in the process of semiconductor process manufacturing, and the byproduct dust generated before the toxic and harmful gas reaches the scrubbing tower, and such byproduct dust usually has adhesion and corrosion, after long time operation, the dust will be deposited on the inner wall of the exhaust pipeline, resulting in the blockage of the exhaust pipeline, and the pressure loss caused will lead to the shortening of the main machine inside the pipeline or the shutdown of the vacuum pump, and there is a hidden danger of safety accidents.

[0003] In view of the above, it is necessary to provide a small spiral spray head device to solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model aims at solving the above technical problem, and provides a small spiral spray head device.

[0005] In order to achieve the above object, the utility model adopts the following technical scheme: a small spiral spray head device, comprising a vacuum pump, a cylindrical pipe part is arranged on the exhaust pipe of the vacuum pump, a sleeve chamber separated from the inside of the cylindrical pipe part is arranged in the middle of the cylindrical pipe part, the sleeve chamber is annularly arranged on the periphery of the cylindrical pipe part, an axial spray pipe connected to the inside of the cylindrical pipe part is arranged in the sleeve chamber, a plurality of axial spray pipes are uniformly and interval arranged around the outer wall of the cylindrical pipe part, a gas filling pipe is connected on one side of the sleeve chamber, the gas filling pipe is connected with an external gas source, the external gas source is introduced into the sleeve chamber, so that the pressure in the sleeve chamber is greater than the pressure in the cylindrical pipe part, and the external gas source is sprayed into the cylindrical pipe part through the axial spray pipe.

[0006] Further, the extension direction of the axial spray pipe is parallel to the axial direction of the cylindrical pipe part.

[0007] Further, the gas flow injection direction of the axial spray pipe is the same as the flow direction of the gas flow in the cylindrical pipe part.

[0008] Further, the inner wall of the cylindrical pipe part is provided with a necking part, and the cross section of the necking part is a circular arc inner wall cross section.

[0009] Further, the necking part is arranged at the rear end of the outlet of the axial spray pipe.

[0010] Further, the external gas source is nitrogen.

[0011] Further, the inner wall of the axial nozzle is provided with a convex spiral line, and the spiral line is provided with a plurality of lines around the axis of the axial nozzle.

[0012] Further, the lower end of the cylindrical pipe is a lower connecting flange, and the upper end is an upper connecting flange.

[0013] Compared with the prior art, the beneficial effects of the small spiral nozzle device are as follows: the small spiral nozzle device of the utility model increases the device in the exhaust pipe, so that the heated N2 is sprayed into the pipeline through the fine spiral hole of the device, the generation of dust in the pipeline is inhibited to the maximum extent, the pipeline blockage phenomenon between the vacuum pump and the washing tower is reduced, the flow rate of the gas in the pipeline is driven by the sprayed N2, the pressure at the outlet end of the vacuum pump exhaust pipe is reduced, the pumping speed of the vacuum pump is relieved, the maintenance of the equipment and the pipeline is reduced, and the production rate is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is one of the axial drawings of the small spiral nozzle device.

[0015] Figure 2 It is the second axial drawing of the small spiral nozzle device.

[0016] In the figure: 1, cylindrical pipe part; 2, sleeve chamber; 3, axial nozzle; 4, gas charging pipe; 5, neck-in part; 6, circular arc-shaped inner wall; 7, lower connecting flange; 8, upper connecting flange. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0018] The specific implementation manners of the utility model will be further described below with reference to the drawings. The same parts are denoted by the same reference numerals.

[0019] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0020] The byproduct dust generated before toxic and harmful gases reach the scrubbing tower is adhesive and corrosive. Dust particles condense and fall into the recessed area of ​​the bellows at the inlet end. These corrosive particles, after prolonged adhesion, may corrode the metal bellows, leading to cracks and gas leakage. To address this issue, the spiral nozzle heating equipment is designed with a ring of spiral-shaped air outlet holes. Details are as follows:

[0021] A small spiral nozzle device, such as Figure 1 , 2 As shown, the device includes a vacuum pump, and a cylindrical tube section 1 is provided on the exhaust pipe of the vacuum pump. A sleeve chamber 2, which is separated from the interior of the cylindrical tube section 1, is provided in the middle of the cylindrical tube section 1. The sleeve chamber 2 is annularly sleeved around the outer periphery of the cylindrical tube section 1. An axial nozzle 3, which is connected to the inside of the cylindrical tube section 1, is provided in the sleeve chamber 2. Several axial nozzles 3 are evenly spaced around the outer wall of the cylindrical tube section 1.

[0022] Specifically, the axial nozzle 3 extends in a direction parallel to the axis of the cylindrical tube 1. The airflow injection direction of the axial nozzle 3 is the same as the airflow direction inside the cylindrical tube 1. In this way, the axial nozzle 3 can form multiple nozzles and eject accelerated airflow in the same direction as the airflow inside the cylindrical tube.

[0023] The inner wall of the axial nozzle 3 is provided with raised helical lines. Multiple helical lines are arranged around the axis of the axial nozzle 3. Under the guidance of the helical lines, a rotational torque is applied to the airflow ejected through the axial nozzle 3, causing the airflow to rotate and be ejected in a spiral shape. In this way, the axial nozzle 3 can form a spiral nozzle, so that the airflow is ejected in a spiral jet shape.

[0024] The sleeve chamber 2 is connected with a gas filling pipe 4 on one side, the gas filling pipe 4 is connected with an external gas source, the external gas source is introduced into the sleeve chamber 2, so that the pressure in the sleeve chamber 2 is greater than the pressure in the cylindrical pipe part 1, and the external gas source is sprayed into the cylindrical pipe part 1 through the axial nozzle 3.

[0025] The working principle of the spiral nozzle is mainly that the heated N2 is directly sprayed into the pipeline to inhibit the generation and accumulation of dust.

[0026] The inner wall of the cylindrical pipe part 1 is provided with a necked part 5, and the cross section of the necked part 5 is a circular arc-shaped inner wall 6.

[0027] The lower end of the cylindrical pipe is a lower connecting flange 7, and the upper end is an upper connecting flange 8.

[0028] In use, the heated N2 is sprayed out through the spiral small holes, which can not only inhibit the condensation of dust, but also increase the flow rate of the gas passing through, so that the gas can be discharged faster, the pressure at the outlet end of the vacuum pump is reduced, the pumping speed of the vacuum pump is relieved, and the energy-saving effect of the vacuum pump is achieved.

[0029] The gas dust enters from the lower end of the cylindrical pipe part 1 and flows out from the top. The hot N2 is flushed into the sleeve chamber 2 from the gas filling pipe 4, sprayed out through a circle of spiral small holes, and the pressure generated by the gas spraying is changed through the necked part 5, so that the dust is quickly discharged, the pressure at the outlet end of the vacuum pump is reduced, and the pumping speed of the vacuum pump is relieved.

[0030] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A compact spiral-jet device comprising a vacuum pump, characterized in that, The application relates to a vacuum pump exhaust pipe provided with a cylindrical pipe part (1), wherein a sleeve cavity (2) is arranged in the middle of the cylindrical pipe part (1) and is separated from the inside of the cylindrical pipe part (1), the sleeve cavity (2) is annularly arranged on the periphery of the cylindrical pipe part (1), an axial nozzle (3) is arranged in the sleeve cavity (2) and is communicated with the inside of the cylindrical pipe part (1), a plurality of axial nozzles (3) are uniformly and spacedly arranged around the outer wall of the cylindrical pipe part (1), an inflation pipe (4) is connected to one side of the sleeve cavity (2), the inflation pipe (4) is connected with an external gas source, the external gas source is introduced into the sleeve cavity (2) to make the pressure in the sleeve cavity (2) greater than the pressure in the cylindrical pipe part (1), and the external gas source is sprayed into the cylindrical pipe part (1) through the axial nozzles (3).

2. A small spiral tip device according to claim 1, wherein The extending direction of the axial nozzle (3) is parallel to the axial direction of the cylindrical pipe part (1).

3. A small spiral tip device according to claim 1, wherein The gas flow spraying direction of the axial nozzle (3) is the same as the flow direction of the gas flow in the cylindrical pipe part (1).

4. A small spiral tip device according to claim 1, wherein The inner wall of the cylindrical pipe part (1) is provided with a necked part (5), and the cross section of the necked part (5) is a circular arc-shaped inner wall (6).

5. A small spiral tip device according to claim 4, wherein The necked part (5) is arranged at the rear end of the outlet of the axial nozzle.

6. A small spiral tip device according to claim 1, wherein The external gas source is nitrogen.

7. A small spiral tip device according to claim 1, wherein The inner wall of the axial nozzle (3) is provided with a convex spiral line, a plurality of spiral lines are arranged around the axis of the axial nozzle (3), and the spiral lines guide the gas flow sprayed through the axial nozzle (3) to exert a rotating torque on the gas flow, so that the gas flow is spirally sprayed.

8. A small spiral tip device according to claim 1, wherein The lower end of the cylindrical pipe is a lower connecting flange (7), and the upper end is an upper connecting flange (8).

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