Radio frequency circuit

Abstract

The embodiment of the utility model provides a radio frequency circuit, a frequency mixing matching module in the circuit takes a first radio frequency input signal as a carrier signal, modulates a second radio frequency input signal into the first radio frequency input signal to form a frequency mixing signal, and performs matching processing on the frequency mixing signal to obtain a matching signal; the power distribution module is connected with the frequency mixing matching module, the radio frequency output main path and each radio frequency output branch; the power distribution module performs power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals, and transmits the first radio frequency output signal to a corresponding flange heating area through a radio frequency output main path; the second radio frequency output signals are transmitted to the corresponding flange heating areas through the radio frequency output branches in a one-to-one correspondence mode, power distribution of the multiple radio frequency outputs is achieved, the multiple corresponding flange heating areas are matched, consistency adjustment can be conducted on the multiple radio frequency output signals, the circuit structure is simplified, and the circuit structure cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of radio frequency, in particular to a radio frequency circuit and a radio frequency system. BACKGROUND

[0002] The plasma radio frequency power supply system is a device for converting electric energy into high-frequency radio frequency energy, and then exciting gas molecules, atoms or ions to ionize to form plasma. The plasma radio frequency power supply system is to make the electrons in the gas obtain enough energy to form plasma by the action of high-frequency electromagnetic field, and to be maintained under the action of high-frequency electric field.

[0003] In the existing plasma radio frequency power supply system, the radio frequency power supply is usually matched with a single flange heating area. If multiple flange heating areas are matched, multiple radio frequency power supplies need to be used for matching, the circuit structure is complex, and the circuit structure cost is increased. CONTENT OF THE UTILITY MODEL

[0004] The present application provides a radio frequency circuit and a radio frequency system.

[0005] The present application provides a radio frequency circuit, which comprises:

[0006] The radio frequency output circuit comprises a radio frequency output main path and a plurality of radio frequency output branches.

[0007] The mixing matching module is configured to use the first radio frequency input signal as a carrier signal, modulate the second radio frequency input signal to the first radio frequency input signal to form a mixed signal, and perform matching processing on the mixed signal to obtain a matching signal.

[0008] The power distribution module is connected to the mixing matching module, the radio frequency output main path and each radio frequency output branch. The power distribution module is configured to perform power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals, and transmit the first radio frequency output signal to the corresponding flange heating area through the radio frequency output main path, and transmit each second radio frequency output signal to the corresponding flange heating area through each radio frequency output branch.

[0009] In an optional embodiment of the present application, the power distribution module comprises a first power distribution module and a plurality of second power distribution modules.

[0010] The first end of the first power distribution module is connected to the mixing matching module, and the second end of the first power distribution module is connected to the radio frequency output main path.

[0011] The first end of each second power distribution module is connected to the frequency mixing and matching module, and the second end of each first power distribution module is connected to each radio frequency output branch in one-to-one correspondence.

[0012] In an optional embodiment of the present application, the first power distribution module comprises a first capacitor, and the second power distribution module comprises a second capacitor.

[0013] The first end of the first capacitor is connected to the frequency mixing and matching module, and the second end of the first capacitor is connected to the radio frequency output main branch.

[0014] The first end of each second capacitor is connected to the frequency mixing and matching module, and the second end of each second capacitor is connected to each radio frequency output branch in one-to-one correspondence.

[0015] In an optional embodiment of the present application, the capacitance of each second capacitor is equal.

[0016] In an optional embodiment of the present application, the capacitance of the first capacitor is equal to or not equal to the capacitance of any one second capacitor.

[0017] In an optional embodiment of the present application, the frequency mixing and matching module comprises a frequency mixing module and a first matching module, the first end of the frequency mixing module is used for inputting the first radio frequency input signal and the second radio frequency input signal, and the second end of the frequency mixing module is connected to the first matching module and each second power distribution module.

[0018] The first matching module is connected to the first power distribution module.

[0019] In an optional embodiment of the present application, the frequency mixing and matching module further comprises a plurality of second matching modules.

[0020] The first end of each second matching module is connected to the frequency mixing module, and the second end of each second matching module is connected to each second power distribution module in one-to-one correspondence.

[0021] In an optional embodiment of the present application, the first matching module comprises a third capacitor and a first inductor.

[0022] The first end of the first inductor is connected to the first end of the third capacitor, the second end of the first inductor is connected to the second end of the third capacitor, the first end of the third capacitor is connected to the frequency mixing module, and the second end of the third capacitor is connected to the first power distribution module.

[0023] In an optional embodiment of the present application, the radio frequency circuit further comprises a plurality of first filters.

[0024] Each first filter is connected to the input end of each radio frequency output branch in one-to-one correspondence.

[0025] In an optional embodiment of the present application, the frequency of the first radio frequency input signal is 13.56 MHz, and the frequency of the second radio frequency input signal is 400 KHz.

[0026] The embodiment of the present application also provides a radio frequency system, comprising a radio frequency input power supply, a cavity and the radio frequency circuit according to any one of the preceding embodiments; the radio frequency circuit is connected between the radio frequency input power supply and the cavity.

[0027] One of the technical solutions has the following advantages and beneficial effects:

[0028] In the radio frequency circuit, the radio frequency output circuit comprises a radio frequency output main path and a plurality of radio frequency output branches; the mixing matching module is configured to use the first radio frequency input signal as a carrier signal, modulate the second radio frequency input signal into the first radio frequency input signal to form a mixed signal, and perform matching processing on the mixed signal to obtain a matching signal; the power distribution module is connected with the mixing matching module, the radio frequency output main path and the radio frequency output branches; the power distribution module is configured to perform power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals, and transmit the first radio frequency output signal to the corresponding flange heating area through the radio frequency output main path, and transmit each second radio frequency output signal to the corresponding flange heating area through the corresponding radio frequency output branch, so as to realize power distribution of multiple radio frequency outputs. Based on the carrier mode, the mixing matching module is used to perform mixing processing on the first radio frequency input signal and the second radio frequency input signal to obtain a mixed signal, and the mixing matching module is used to perform matching processing on the mixed signal to obtain a matching signal, so as to transmit the matching signal obtained by mixing to the flange heating area of the cavity; by dividing the radio frequency output circuit into a radio frequency output main path and a plurality of radio frequency output branches, and using the power distribution module to perform power distribution on the matching signal, the radio frequency output main path can obtain the corresponding first radio frequency output signal, and the radio frequency output branch can obtain the corresponding second radio frequency output signal, so as to match a plurality of corresponding flange heating areas, to uniformly adjust a plurality of radio frequency output signals, to simplify the circuit structure, and to reduce the cost of the circuit structure. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0030] In order to more completely understand the present application and its beneficial effects, the following will be described in conjunction with the drawings, wherein the same reference numerals in the following description represent the same parts.

[0031] Figure 1 A first circuit structure schematic diagram of a radio frequency circuit provided by an embodiment of the present application is shown in FIG. 1.

[0032] Figure 2 A second circuit structure schematic diagram of a radio frequency circuit provided by an embodiment of the present application is shown in FIG. 2.

[0033] Figure 3 A third circuit structure schematic diagram of a radio frequency circuit provided by an embodiment of the present application is shown in FIG. 3.

[0034] Figure 4 A fourth circuit structure schematic diagram of a radio frequency circuit provided by an embodiment of the present application is shown in FIG. 4.

[0035] Figure 5 A fifth circuit structure schematic diagram of a radio frequency circuit provided by an embodiment of the present application is shown in FIG. 5.

[0036] Reference signs:

[0037] 10, radio frequency output circuit; 110, main radio frequency output branch; 120, branch radio frequency output branch; 20, mixing and matching module; 210, mixing module; 220, first matching module; C3, third capacitor; L1, first inductor; 230, second matching module; 30, power distribution module; 310, first power distribution module; C1, first capacitor; 320, second power distribution module; C2, second capacitor; 40, first filter; 50, flange heating zone. DETAILED DESCRIPTION

[0038] In order to make the personnel in the art better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the personnel in the art without making creative efforts should belong to the scope of protection of the present application.

[0039] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to the process, method, product or device.

[0040] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "transverse", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0041] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned partial terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0042] In addition, the meaning of the term "a plurality of" should be two and more than two.

[0043] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0044] In one embodiment, as shown in Figure 1 A radio frequency circuit is provided, which includes a radio frequency output circuit 10, a mixing and matching module 20 and a power distribution module 30. The radio frequency output circuit 10 includes a radio frequency output main path 110 and a plurality of radio frequency output branch paths 120. The mixing and matching module 20 is used to access a first radio frequency input signal and a second radio frequency input signal. The mixing and matching module 20 is configured to modulate the second radio frequency input signal to the first radio frequency input signal to form a mixing signal by taking the first radio frequency input signal as a carrier signal, and to perform matching processing on the mixing signal to obtain a matching signal. The power distribution module 30 is connected to the mixing and matching module 20, the radio frequency output main path 110 and each radio frequency output branch path 120. The power distribution module 30 is configured to perform power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals, and to transmit the first radio frequency output signal through the radio frequency output main path 110 to the corresponding flange heating area 50, and to transmit each second radio frequency output signal through each radio frequency output branch path 120 one by one to the corresponding flange heating area 50.

[0045] The radio frequency circuit of the application is used to supply power to the flange-joined cavity, the cavity is provided with a flange module, and the flange module is divided into a plurality of flange heating zones 50. The first radio frequency input signal can be a high frequency signal in the radio frequency range, and the second radio frequency input signal can be a low frequency signal in the radio frequency range. In one example, the frequency of the first radio frequency input signal is 13.56 MHz, and the frequency of the second radio frequency input signal is 400 KHz. In another example, the frequency of the first radio frequency input signal can also be one, two or three times of 13.56 MHz; the frequency of the second radio frequency input signal can be 500 KHz or 600 KHz, etc.

[0046] The first radio frequency input signal and the second radio frequency input signal are transmitted to the mixing matching module 20, respectively. The first radio frequency input signal is used as a carrier signal, and the second radio frequency input signal is loaded on the first radio frequency input signal based on the frequency modulation or amplitude modulation of the carrier, thereby forming a mixing signal and realizing the mixing input of the first radio frequency input signal and the second radio frequency input signal. For example, the first radio frequency input signal is used as a carrier signal, and the second radio frequency input signal is used as a modulation signal. The frequency of the first radio frequency input signal is modulated according to the change rule of the second radio frequency input signal through the mixing matching module 20, thereby obtaining a mixing signal. For another example, the first radio frequency input signal is used as a carrier signal, and the second radio frequency input signal is used as a modulation signal. Based on the linear relationship between the amplitude of the first radio frequency input signal and the amplitude of the second radio frequency input signal, the second radio frequency input signal is multiplied with the first radio frequency input signal through the mixing matching module 20, so that the amplitude change of the second radio frequency input signal is mapped to the amplitude of the first radio frequency input signal, thereby obtaining a mixing signal.

[0047] The mixing matching module 20 is used for matching processing of the mixing signal, thereby obtaining a matching signal after mixing. For example, the mixing matching module 20 can be used for impedance, reactance or current adjustment of the input mixing signal, thereby obtaining a matching signal after mixing.

[0048] In one example, the first radio frequency input signal of 13.56 MHz and the second radio frequency input signal of 400 KHz are input into the mixing matching module 20. The first radio frequency input signal of 13.56 MHz is used as a carrier signal, and the second radio frequency input signal of 400 KHz is modulated to the first radio frequency input signal of 13.56 MHz, thereby forming a mixing signal,

[0049] The radio frequency output circuit 10 can be divided into a radio frequency output main circuit 110 and a plurality of radio frequency output branch circuits 120 according to the number of the flange heating zones 50. For example, the radio frequency output circuit 10 can be divided into a radio frequency output main circuit 110 and two radio frequency output branch circuits 120. The radio frequency output main circuit 110 is used to connect the corresponding flange heating zone 50, and then transmit the processed radio frequency output signal to the corresponding flange heating zone 50, thereby realizing reliable power supply to the corresponding flange heating zone 50. The radio frequency output branch circuit 120 is used to connect the corresponding flange heating zone 50, and then transmit the processed radio frequency output signal to the corresponding flange heating zone 50, thereby realizing reliable power supply to the corresponding flange heating zone 50. It should be noted that the radio frequency output circuit 10 can also be divided into a radio frequency output main circuit 110 and three radio frequency output branch circuits 120; for example, the radio frequency output circuit 10 can also be divided into a radio frequency output main circuit 110 and five radio frequency output branch circuits 120.

[0050] The power distribution module 30 is used to perform power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals. The first radio frequency output signal is used to transmit to the radio frequency output main circuit 110; the second radio frequency output signal is used to transmit to the radio frequency output branch circuit 120. For example, the power distribution module 30 can perform power distribution on the radio frequency output main circuit 110 based on a preset main circuit matching inductance, thereby obtaining the first radio frequency output signal; the power distribution module 30 can also perform power distribution on each radio frequency output branch circuit 120 according to a preset branch circuit matching inductance, thereby obtaining each second radio frequency output signal. In another example, the power distribution module 30 can perform power distribution on the radio frequency output main circuit 110 according to the total power and a preset main circuit matching circuit, thereby obtaining the first radio frequency output signal; then the power distribution module 30 performs power average distribution on each radio frequency output branch circuit 120 according to the remaining power, thereby obtaining each second radio frequency output signal. For example, the power distribution module 30 can perform power average distribution on the radio frequency output main circuit 110 and each radio frequency output branch circuit 120 according to the total power, thereby realizing the consistency of the inductance of each radio frequency output, realizing power distribution of a plurality of radio frequency output circuits, and improving the efficiency and reliability of multi-radio frequency output power distribution.

[0051] In the above embodiments, the mixing and matching module 20 is used to receive the first RF input signal and the second RF input signal; the mixing and matching module 20 is configured to use the first RF input signal as the carrier signal, modulate the second RF input signal onto the first RF input signal to form a mixing signal, and perform matching processing on the mixing signal to obtain a matching signal; the power distribution module 30 is connected to the mixing and matching module 20, the RF output main path 110 and each RF output branch 120; the power distribution module 30 is configured to perform power distribution processing on the matching signal to obtain a first RF output signal and several second RF output signals, and transmit the first RF output signal to the corresponding flange heating area 50 through the RF output main path 110, and transmit each second RF output signal to the corresponding flange heating area 50 one by one through each RF output branch 120, thereby realizing power distribution of multiple RF outputs. This application uses a carrier-based method, employing a mixing and matching module 20 to mix the first and second RF input signals to obtain a mixed signal. The mixing and matching module 20 then performs matching processing on the mixed signal to obtain a matched signal, which is then transmitted to the flange heating zone 50 of the cavity. By dividing the RF output circuit 10 into a main RF output path 110 and several RF output branches 120, and using a power distribution module to distribute the power of the matched signal, the main RF output path 110 receives the corresponding first RF output signal, and the RF output branches 120 receive the corresponding second RF output signal. This achieves matching of multiple corresponding flange heating zones 50, enabling consistent adjustment of multiple RF output signals, simplifying the circuit structure, and reducing circuit cost.

[0052] In one embodiment, such as Figure 2 As shown, the power distribution module 30 includes a first power distribution module 310 and several second power distribution modules 320; the first end of the first power distribution module 310 is connected to the mixing and matching module 20, and the second end of the first power distribution module 310 is connected to the RF output main circuit 110; the first end of each second power distribution module 320 is connected to the mixing and matching module 20, and the second end of each first power distribution module 310 is connected to each RF output branch 120 in a corresponding manner.

[0053] The first power distribution module 310 performs power distribution processing on the matching signal transmitted by the mixing and matching module 20 to obtain a first RF output signal, and transmits the first RF output signal to the RF output main circuit 110. The RF output main circuit 110 then transmits the first RF output signal to the corresponding flange heating area 50, thus achieving reliable power supply to the corresponding flange heating area 50. The second power distribution module 320 performs power distribution processing on the matching signal transmitted by the mixing and matching module 20 to obtain a corresponding second RF output signal, and transmits the second RF output signal to the corresponding RF output branch circuit 120. The RF output branch circuit 120 then transmits the second RF output signal to the corresponding flange heating area 50, thus achieving reliable power supply to the corresponding flange heating area 50.

[0054] For example, taking two second power distribution modules 320 and two RF output branches 120 as an example, the first power distribution module 310 can be activated first to match the matching signal, and then the first power distribution module 310 outputs a first RF output signal with a preset power, so that the RF output main line 110 is allocated a first RF output signal corresponding to a specific inductor; then the two second power distribution modules 320 are activated to match the matching signal, and each second power distribution module 320 can evenly distribute the remaining power, and then output the corresponding second RF output signal, so that the corresponding inductors of each RF output branch 120 are consistent. In another example, the first isolation distribution module and the two second power distribution modules 320 can evenly distribute the power of the RF output main line 110 and the two RF output branches 120 according to the total power, thereby achieving inductor consistency of the three RF outputs, realizing power distribution of multiple RF output lines, and improving the efficiency and reliability of power distribution of multiple RF outputs.

[0055] In one example, such as Figure 4 As shown, the first power distribution module 310 includes a first capacitor C1; the second power distribution module 320 includes a second capacitor C2; the first end of the first capacitor C1 is connected to the mixing matching module 20, and the second end of the first capacitor C1 is connected to the RF output main circuit 110; the first end of each second capacitor C2 is connected to the mixing matching module 20, and the second end of each second capacitor C2 is connected to each RF output branch 120 in a corresponding manner.

[0056] In this circuit, the first capacitor C1 and the second capacitor C2 can be DLC capacitors. The capacitance values ​​of the first capacitor C1 and the second capacitor C2 can be determined according to the power matching requirements of the circuit. For example, the capacitance value of the first capacitor C1 can be 4.08nF, and the capacitance value of the second capacitor C2 can be 4.5nF.

[0057] For example, the capacitances of the second capacitors C2 are equal. When the second power distribution modules 320 are enabled to match the matching signals, the second power distribution modules 320 can evenly distribute the remaining power, and output corresponding second radio frequency output signals, so that the corresponding inductances of the radio frequency output branches 120 are consistent, and the consistency of the multiple radio frequency output branches 120 can be adjusted, the circuit structure is simplified, and the cost of the circuit structure is reduced.

[0058] In another example, the capacitance of the first capacitor C1 is equal to the capacitance of any one of the second capacitors C2. Then, the first isolation distribution module and the second power distribution modules 320 can evenly distribute the power of the radio frequency output main branch 110 and the radio frequency output branches 120 according to the total power, and then realize the inductance consistency adjustment of the radio frequency output branches, simplify the circuit structure, reduce the cost of the circuit structure, and improve the efficiency and reliability of the power distribution of the multiple radio frequency output branches.

[0059] In another example, the capacitance of the first capacitor C1 is not equal to the capacitance of any one of the second capacitors C2. First, the first power distribution module 310 is enabled to match the matching signals, and then the first power distribution module 310 outputs a first radio frequency output signal with a preset power, so that the radio frequency output main branch 110 distributes the first radio frequency output signal with a corresponding specific inductance. Then, the corresponding second power distribution module 320 is enabled to match the matching signals, and the corresponding second power distribution module 320 can distribute the power based on the corresponding power, and then output a corresponding second radio frequency output signal, so that the power of the radio frequency output branches is adjusted based on the preset power, and the diversification and versatility of the radio frequency output are improved.

[0060] In one embodiment, as shown in Figure 3 The mixing matching module 20 includes a mixing module 210 and a first matching module 220. The first end of the mixing module 210 is used to access the first radio frequency input signal and the second radio frequency input signal. The second end of the mixing module 210 is connected to the first matching module 220 and the second power distribution modules 320. The first matching module 220 is connected to the first power distribution module 310.

[0061] The mixing module 210 is used to perform frequency modulation or amplitude modulation on the first and second radio frequency input signals based on the carrier principle, thereby obtaining a mixed signal. For example, using the first radio frequency input signal as the carrier signal and the second radio frequency input signal as the modulation signal, the mixing module 210 modulates the frequency of the first radio frequency input signal according to the variation law of the second radio frequency input signal, thereby obtaining a mixed signal. Alternatively, using the first radio frequency input signal as the carrier signal and the second radio frequency input signal as the modulation signal, based on the linear relationship between the amplitude of the first and second radio frequency input signals, the mixing module 210 multiplies the second and first radio frequency input signals, so that the amplitude variation of the second radio frequency input signal is mapped onto the amplitude of the first radio frequency input signal, thereby obtaining a mixed signal.

[0062] The first matching module 220 is used to perform matching processing on the mixed signal to adjust the impedance or reactance of the mixed signal to obtain a corresponding matching signal, and transmits the corresponding matching signal to the first power distribution module 310. The mixed signal can also be directly transmitted to the corresponding second power distribution module 320. The first power distribution module 310 matches the corresponding matching signal, and then the first power distribution module 310 outputs a first RF output signal with a preset power, so that the RF output main circuit 110 is allocated the first RF output signal corresponding to the specific inductor. The second power distribution module 320 matches the mixed signal and outputs a corresponding second RF output signal, realizing power distribution for multiple RF output lines and improving the efficiency and reliability of power distribution for multiple RF outputs.

[0063] In one embodiment, such as Figure 3 As shown, the mixing matching module 20 also includes several second matching modules 230; the first end of each second matching module 230 is connected to the mixing module 210, and the second end of each second matching module 230 is connected to each second power distribution module 320 in a one-to-one correspondence.

[0064] The second matching module 230 can be used to perform matching processing on the mixed signal to adjust the impedance or reactance of the mixed signal to obtain a corresponding matching signal. The corresponding matching signal is then transmitted to the second power distribution module 320, which matches the corresponding matching signal and outputs a corresponding second RF output signal. This achieves power distribution for each RF output, simplifies the circuit structure, reduces the circuit cost, and improves the efficiency and reliability of power distribution for multiple RF outputs.

[0065] In one embodiment, such as Figure 4As shown, the first matching module 220 includes a third capacitor C3 and a first inductor L1; a first end of the first inductor L1 is connected to a first end of the third capacitor C3, and a second end of the first inductor L1 is connected to a second end of the third capacitor C3; the first end of the third capacitor C3 is connected to the mixing module 210, and the second end of the third capacitor C3 is connected to the first power distribution module 310.

[0066] The third capacitor C3 can be an adjustable capacitor. The mixed signal is matched by the impedance tuner composed of the third capacitor C3 and the first inductor L1, and then the corresponding matching signal is obtained and transmitted to the first power distribution module 310. The first power distribution module 310 matches the corresponding matching signal, and then the first power distribution module 310 outputs the first radio frequency output signal of the preset power, so that the radio frequency output main circuit 110 distributes the first radio frequency output signal corresponding to a specific inductance, and realizes power distribution of the radio frequency output main circuit 110.

[0067] In one embodiment, as shown in Figure 5 The radio frequency circuit further includes a plurality of first filters 40; each first filter 40 is connected to the input end of each radio frequency output branch 120 one by one.

[0068] The first filter 40 can be an ESC filter. The ESC filter refers to a power supply connected to an electrostatic chuck, which is used to filter the corresponding radio frequency output branch 120.

[0069] Based on the connection of the first filter 40 to the corresponding radio frequency output branch 120, the corresponding radio frequency output branch 120 is filtered to improve the reliability and stability of the radio frequency signal output by the corresponding radio frequency output branch 120.

[0070] In one embodiment, a radio frequency system is also provided, which includes a radio frequency input power supply, a cavity, and a radio frequency circuit according to any one of the above embodiments; the radio frequency circuit is connected between the radio frequency input power supply and the cavity.

[0071] The radio frequency input power supply can be used to transmit at least two different frequency radio frequency input signals to the radio frequency circuit; the cavity is provided with a flange module, and the flange module is divided into a plurality of flange heating zones.

[0072] The radio frequency input power is connected to the mixing and matching module, and then the radio frequency input power transmits a first radio frequency input signal and a second radio frequency input signal to the mixing and matching module; the mixing and matching module takes the first radio frequency input signal as a carrier signal, modulates the second radio frequency input signal to the first radio frequency input signal to form a mixed signal, and performs matching processing on the mixed signal to obtain a matching signal; the power distribution module is connected to the mixing and matching module, the radio frequency output main path and each radio frequency output branch; the power distribution module performs power distribution processing on the matching signal to obtain a first radio frequency output signal and a plurality of second radio frequency output signals, and transmits the first radio frequency output signal to the corresponding flange heating area through the radio frequency output main path, and transmits each second radio frequency output signal to the corresponding flange heating area through each radio frequency output branch one by one, so as to realize power distribution of multiple radio frequency outputs.

[0073] In the above embodiment, based on the carrier mode, the first radio frequency input signal and the second radio frequency input signal are mixed and processed by the mixing and matching module, and then the mixed signal is obtained, and the mixed signal is matched and processed by the mixing and matching module, and then the matching signal is obtained, so as to transmit the mixed matching signal to the flange heating area of the cavity; by dividing the radio frequency output circuit into a radio frequency output main path and a plurality of radio frequency output branches, and performing power distribution on the matching signal by the power distribution module, the radio frequency output main path obtains the corresponding first radio frequency output signal, and the radio frequency output branch obtains the corresponding second radio frequency output signal, so as to match a plurality of corresponding flange heating areas, and the consistency of the plurality of radio frequency output signals can be adjusted, the circuit structure is simplified, and the cost of the radio frequency system structure is reduced.

[0074] The technical features of the above embodiments can be combined arbitrarily, and in order to make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the description.

[0075] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent application scope. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A radio frequency circuit, characterized in that, include: The radio frequency output circuit includes a main radio frequency output path and several radio frequency output branches; A mixing and matching module is used to receive a first radio frequency input signal and a second radio frequency input signal; the mixing and matching module is configured to use the first radio frequency input signal as a carrier signal, modulate the second radio frequency input signal onto the first radio frequency input signal to form a mixing signal, and perform matching processing on the mixing signal to obtain a matching signal; A power distribution module is provided, which is connected to the mixing and matching module, the main RF output path, and each of the RF output branches. The power distribution module is configured to perform power distribution processing on the matching signal to obtain a first RF output signal and several second RF output signals. The first RF output signal is transmitted to the corresponding flange heating area through the main RF output path, and each of the second RF output signals is transmitted to the corresponding flange heating area through each of the RF output branches.

2. The radio frequency circuit according to claim 1, characterized in that, The power distribution module includes a first power distribution module and several second power distribution modules; The first end of the first power distribution module is connected to the mixing matching module, and the second end of the first power distribution module is connected to the RF output main circuit. The first end of each of the second power distribution modules is connected to the mixing matching module, and the second end of each of the first power distribution modules is connected to each of the radio frequency output branches in a corresponding manner.

3. The radio frequency circuit according to claim 2, characterized in that, The first power distribution module includes a first capacitor; the second power distribution module includes a second capacitor. The first terminal of the first capacitor is connected to the mixing matching module, and the second terminal of the first capacitor is connected to the RF output main circuit. The first end of each of the second capacitors is connected to the mixing matching module, and the second end of each of the second capacitors is connected to each of the radio frequency output branches in a corresponding manner.

4. The radio frequency circuit according to claim 3, characterized in that, The capacitance values ​​of each of the second capacitors are equal.

5. The radio frequency circuit according to claim 3, characterized in that, The capacitance value of the first capacitor may be equal to or different from the capacitance value of any of the second capacitors.

6. The radio frequency circuit according to claim 2, characterized in that, The mixing and matching module includes a mixing module and a first matching module. The first end of the mixing module is used to receive the first radio frequency input signal and the second radio frequency input signal, and the second end of the mixing module is connected to the first matching module and each of the second power distribution modules. The first matching module is connected to the first power distribution module.

7. The radio frequency circuit according to claim 6, characterized in that, The mixing matching module also includes several second matching modules; The first end of each of the second matching modules is connected to the mixing module, and the second end of each of the second matching modules is connected to each of the second power distribution modules in a corresponding manner.

8. The radio frequency circuit according to claim 6, characterized in that, The first matching module includes a third capacitor and a first inductor; The first end of the first inductor is connected to the first end of the third capacitor, and the second end of the first inductor is connected to the second end of the third capacitor; the first end of the third capacitor is connected to the mixer module, and the second end of the third capacitor is connected to the first power distribution module.

9. The radio frequency circuit according to any one of claims 1 to 8, characterized in that, It also includes several first filters; Each of the first filters is connected to the input terminal of each of the radio frequency output branches in a one-to-one correspondence.

10. The radio frequency circuit according to any one of claims 1 to 8, characterized in that, The frequency of the first radio frequency input signal is 13.56MHz, and the frequency of the second radio frequency input signal is 400KHz.

Images