Tool magazine motor mounting seat for semiconductor equipment

Abstract

The utility model discloses a tool magazine motor mounting base for semiconductor equipment, and relates to the technical field of semiconductor equipment, the tool magazine motor mounting base comprises a base, a sliding cavity is formed in the base, a side plate is fixedly connected to one side of the base, an adjusting plate is slidably connected to the interior of the side plate, one end of the adjusting plate is fixedly connected with a supporting panel, and the supporting panel is fixedly connected with the sliding cavity. An adjusting assembly is arranged in the sliding cavity and comprises a clamping block, and the clamping block is located in the sliding cavity. The rotary table is rotated to drive the lead screws to rotate, and gear rings on the surfaces of the lead screws are matched with cog belts, so that the two lead screws can be driven to rotate synchronously, a sliding sleeve drives an inclined surface block B to move, and an inclined surface block A can be pushed through the inclined surface block B; and the clamping block and the clamping plate on one side of the inclined surface block A move in the sliding cavity, so that mounting, clamping and fixing of motors with different transverse sizes are achieved, and mounting, dismounting and position adjustment of the motors are facilitated.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a tool magazine motor mounting base for semiconductor equipment. Background Technology

[0002] During the operation of semiconductor equipment, the tool magazine motor undertakes important tasks such as driving the tool magazine to exchange tools. Its stability and accuracy directly affect the processing quality and production efficiency of semiconductor products. However, existing tool magazine motor mounting bases for semiconductor equipment generally have some significant problems.

[0003] Currently, traditional mounting brackets are not very adaptable in terms of size. Different models of semiconductor equipment use different specifications of tool magazine motors, including different parameters such as motor dimensions, mounting hole layout, and motor length. However, existing mounting brackets are often designed in a relatively simple way, making it difficult to flexibly adjust to adapt to the installation requirements of various motor specifications. This means that when changing different models of motors, it may be necessary to replace the entire mounting bracket, which is not only cumbersome to operate, but also consumes a lot of time and costs, seriously affecting production progress and equipment versatility. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the problems existing in the prior art, this utility model provides a tool magazine motor mounting base for semiconductor equipment.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solution: a tool magazine motor mounting base for semiconductor equipment, including a base, a sliding cavity is provided inside the base, a side plate is fixedly connected to one side of the base, an adjustment plate is slidably connected inside the side plate, a support panel is fixedly connected to one end of the adjustment plate, and an adjustment component is provided inside the sliding cavity;

[0008] The adjustment assembly includes a clamping block located inside the sliding cavity. A clamping plate is fixedly connected to one side of the clamping block, and an inclined block A is fixedly connected to the other side of the clamping block. An inclined block B is slidably connected to the surface of the inclined block A. A sliding sleeve is fixedly connected to one side of the inclined block B. A lead screw is threadedly connected to the inner wall of the sliding sleeve, and both ends of the lead screw are rotatably connected to the surface of the base.

[0009] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, the number of clamping blocks is set to two sets, which are symmetrically arranged inside the sliding cavity.

[0010] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, a gear ring is fixedly connected to the upper end of the lead screw, and a toothed belt is meshed with the surface of the gear ring.

[0011] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, a turntable is fixedly connected to the top of the lead screw, and the cross-section of the clamping block is "V" shaped.

[0012] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, a sliding groove is provided on the surface of the inclined panel B, a sliding plate is slidably connected to the inner wall of the sliding groove, and one side of the sliding plate is fixedly connected to the surface of the inclined panel A.

[0013] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, the inner wall of the sliding cavity is provided with guide groove A and guide groove B. The inner wall of guide groove A is slidably connected to guide plate A, and one side of guide plate A is fixedly connected to the lower end of clamping block. The inner wall of guide groove B is slidably connected to guide plate B, and one side of guide plate B is fixedly connected to the side wall of inclined block B.

[0014] In a preferred embodiment of the tool magazine motor mounting base for semiconductor equipment described in this utility model, a fixing bolt is provided on the top of the side plate, and a fixing groove is provided on the upper surface of the adjusting plate, the size of which is adapted to the size of the fixing bolt.

[0015] (III) Beneficial Effects

[0016] This utility model provides a tool magazine motor mounting base for semiconductor equipment. It has the following advantages:

[0017] 1. The rotating turntable drives the lead screw to rotate. Through the cooperation of the gear ring and toothed belt on the surface of the lead screw, the two lead screws can be driven to rotate synchronously, so that the sliding sleeve drives the inclined block B to move. The inclined block B can push the inclined block A, so that the clamping block and clamping plate on one side of the inclined block A can move in the sliding cavity, so as to adapt to the installation and clamping of motors with different transverse dimensions, and facilitate the installation, disassembly and position adjustment of the motor. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a utility model Figure 1 A schematic diagram of the side view structure;

[0021] Figure 3 This is a schematic diagram of the structure of the adjustment component in this utility model;

[0022] Figure 4 This is a schematic diagram of the internal structure of the sliding cavity in this utility model;

[0023] Figure 5 This is a schematic diagram of the structure of inclined block A and inclined block B in this utility model;

[0024] Figure 6 This is a schematic diagram of the side plate and adjustment plate in this utility model.

[0025] In the diagram, 1. Base; 2. Sliding cavity; 3. Adjustment assembly; 301. Clamping block; 302. Clamping plate; 303. Inclined block A; 304. Inclined block B; 305. Sliding sleeve; 306. Lead screw; 307. Gear ring; 308. Toothed belt; 309. Turntable; 310. Guide plate A; 311. Guide plate B; 312. Sliding groove; 313. Sliding plate; 314. Guide groove A; 315. Guide groove B; 4. Side plate; 5. Adjustment plate; 6. Support panel; 7. Fixing bolt; 8. Fixing groove. Detailed Implementation

[0026] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0027] Reference Figures 1 to 6 As shown, this utility model provides a technical solution: a tool magazine motor mounting base for semiconductor equipment, including a base 1, a sliding cavity 2 is provided inside the base 1, and a side plate 4 is fixedly connected to one side of the base 1. An adjustment plate 5 is slidably connected inside the side plate 4, and a support panel 6 is fixedly connected to one end of the adjustment plate 5. An adjustment component 3 is provided inside the sliding cavity 2.

[0028] The adjusting assembly 3 includes a clamping block 301 located inside the sliding cavity 2. A clamping plate 302 is fixedly connected to one side of the clamping block 301, and an inclined block A 303 is fixedly connected to the other side of the clamping block 301. An inclined block B 304 is slidably connected to the surface of the inclined block A 303. A sliding sleeve 305 is fixedly connected to one side of the inclined block B 304. A lead screw 306 is threadedly connected to the inner wall of the sliding sleeve 305. The two ends of the lead screw 306 are rotatably connected to the surface of the base 1. By rotating the lead screw 306, since the lead screw 306 is threadedly connected to the sliding sleeve 305, the sliding sleeve 305 drives the inclined block B to move on the lead screw 306. The inclined block B cooperates with the inclined block A to push the clamping block 301 to move, thereby adjusting the distance between the two sets of clamping blocks 301 to adapt to the installation and clamping of motors of different sizes, facilitating the installation, disassembly, and position adjustment of the motor.

[0029] Reference Figure 1 , Figure 3 and Figure 5 As shown, in this embodiment: the number of clamping blocks 301 is set to two sets, and they are symmetrically arranged inside the sliding cavity 2. A gear ring 307 is fixedly connected to the upper end of the lead screw 306. A toothed belt 308 is meshed with the surface of the gear ring 307. Through the arrangement of the gear ring 307 and the toothed belt 308, the two lead screws 306 can be driven to rotate synchronously at the same time, so as to realize the synchronous movement of the two sets of clamping blocks 301, thereby improving the adjustment efficiency. A turntable 309 is fixedly connected to the top of the lead screw 306, and the clamping blocks 301... The cross-section of the clamping block 301 is V-shaped. By setting the cross-section of the clamping block 301 to V-shape, it can better fit the outer surface of the motor, increase the contact area with the motor, and improve the clamping stability of the motor. The surface of the inclined plate B is provided with a sliding groove 312. The inner wall of the sliding groove 312 is slidably connected to a sliding plate 313. One side of the sliding plate 313 is fixedly connected to the surface of the inclined plate A. Through the cooperation of the sliding plate 313 and the sliding groove 312, the sliding of the inclined plate A and the inclined plate B can be made more stable.

[0030] Reference Figure 4 , Figure 5 and Figure 6As shown, specifically, the inner wall of the sliding cavity 2 is provided with guide groove A314 and guide groove B315. A guide plate A310 is slidably connected to the inner wall of guide groove A314, and one side of guide plate A310 is fixedly connected to the lower end of clamping block 301. A guide plate B311 is slidably connected to the inner wall of guide groove B315, and one side of guide plate B311 is fixedly connected to the side wall of inclined block B304. Through the cooperation of guide plate A with guide groove A and guide plate B with guide groove B, the clamping block 301 and inclined plate B move... To prevent deviation or shaking during operation, the stability and reliability of the structural connection are enhanced. A fixing bolt 7 is provided on the top of the side plate 4, and a fixing groove 8 is provided on the upper surface of the adjusting plate 5. The size of the fixing groove 8 is adapted to the size of the fixing bolt 7. By cooperating with the fixing bolt 7 on the top of the side plate 4 and the fixing groove 8 on the adjusting plate 5, the adjusted plate 5 can be easily fixed on the side plate 4 after being moved. This allows the distance between the support panel 6 and the base 1 to be adjusted, thereby adapting to motors of different lengths and improving the versatility of the device.

[0031] Working principle: In use, firstly, the distance between the support panel 6 and the base 1 is changed by sliding the adjusting plate 5. Then, the fixing bolt 7 is rotated to fix the adjusting plate 5 to the side plate 4, thereby flexibly adjusting the distance between the support panel 6 and the base 1. This allows the mounting base to accommodate motors of different lengths. Then, the motor is placed into the base 1. The rotating turntable 309 drives the lead screw 306 to rotate. Through the engagement of the gear ring 307 and the toothed belt 308 on the surface of the lead screw 306, the two lead screws 306 can be driven to rotate synchronously, allowing the sliding plate 6 to rotate. The moving sleeve 305 drives the inclined block B304 to move, which in turn pushes the inclined block A303, causing the clamping block 301 and clamping plate 302 on one side of the inclined block A303 to move within the sliding cavity 2. This allows for the installation and clamping of motors with different lateral dimensions, facilitating the installation, disassembly, and position adjustment of the motors. At the same time, the cooperation between the guide plate A and the guide groove A, and between the guide plate B and the guide groove B, prevents the clamping block 301 and the inclined plate B from shifting or shaking during movement, thus enhancing the stability and reliability of the structural connection.

[0032] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. A tool magazine motor mounting base for semiconductor equipment, comprising a base (1), characterized in that: The base (1) has a sliding cavity (2) inside, and a side plate (4) is fixedly connected to one side of the base (1). An adjustment plate (5) is slidably connected inside the side plate (4). A support panel (6) is fixedly connected to one end of the adjustment plate (5). An adjustment component (3) is provided inside the sliding cavity (2). The adjustment component (3) includes a clamping block (301), which is located inside the sliding cavity (2). A clamping plate (302) is fixedly connected to one side of the clamping block (301), and a slope block A (303) is fixedly connected to the other side of the clamping block (301). A slope block B (304) is slidably connected to the surface of the slope block A (303). A sliding sleeve (305) is fixedly connected to one side of the slope block B (304). A lead screw (306) is threadedly connected to the inner wall of the sliding sleeve (305). The two ends of the lead screw (306) are rotatably connected to the surface of the base (1).

2. The tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The number of clamping blocks (301) is set to two sets, and they are symmetrically arranged inside the sliding cavity (2).

3. The tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The upper end of the lead screw (306) is fixedly connected to a gear ring (307), and a toothed belt (308) is meshed with the surface of the gear ring (307).

4. The tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The top of the lead screw (306) is fixedly connected to a turntable (309), and the cross-section of the clamping block (301) is "V" shaped.

5. A tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The inclined block B (304) has a sliding groove (312) on its surface. A sliding plate (313) is slidably connected to the inner wall of the sliding groove (312). One side of the sliding plate (313) is fixedly connected to the surface of the inclined plate A.

6. A tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The inner wall of the sliding cavity (2) is provided with guide groove A (314) and guide groove B (315). The inner wall of guide groove A (314) is slidably connected to guide plate A (310). One side of guide plate A (310) is fixedly connected to the lower end of clamping block (301). The inner wall of guide groove B (315) is slidably connected to guide plate B (311). One side of guide plate B (311) is fixedly connected to the side wall of inclined block B (304).

7. A tool magazine motor mounting base for semiconductor equipment according to claim 1, characterized in that: The top of the side plate (4) is provided with a fixing bolt (7), and the upper surface of the adjusting plate (5) is provided with a fixing groove (8), the size of the fixing groove (8) is adapted to the size of the fixing bolt (7).

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