Film thickness on-line detection film thickness gauge support capable of adjusting measurement angle

Abstract

The utility model discloses a film thickness online detection film thickness gauge support capable of adjusting a measurement angle, which comprises a rack, a support frame, an annular guide rail, angle scales, a rotary support frame, an electric stroke slide block, a film workpiece, a translation guide rail, an electric slide block, a film thickness gauge and a touch display center, an annular guide rail is matched with an electric stroke sliding block to rotate a film workpiece fixed in a rotating support frame to adjust the measurement angle, a rotating bearing is matched with a rotating shaft to limit the center of the rotating support frame, and a translation guide rail is matched with an electric translation sliding block to translate a film thickness gauge. Therefore, the measurement position of the thin film workpiece fixed in the rotary support frame is adjusted, the measurement angle and position of the thin film workpiece are convenient to adjust, and the detection efficiency and precision are improved.

Description

[Technical Field]

[0001] This utility model relates to the technical field of film thickness gauges, and in particular to the technical field of a support for an online film thickness gauge with adjustable measurement angle. [Background Technology]

[0002] A film thickness gauge is an instrument used to measure the thickness of a reflective film on a material. It is commonly used in the field of optics. It uses non-contact testing technology to measure parameters such as reflectivity, transmittance, and phase angle, and then analyzes and calculates the thickness of the film. When performing a film thickness gauge test, the film workpiece needs to be placed on the support base of the film thickness gauge. If other positions of the film workpiece need to be tested after the initial test, the film workpiece needs to be manually rotated and flipped. The equipment needs to be stopped and the film workpiece adjusted before the test can continue, which is quite troublesome and affects the efficiency and accuracy of the test. [Utility Model Content]

[0003] The purpose of this invention is to solve the problems in the prior art by proposing an adjustable online film thickness gauge bracket, which allows the film workpiece to be rotated to adjust the measurement angle. The adjustment of the film workpiece measurement angle and position is convenient, which helps to improve detection efficiency and accuracy.

[0004] To achieve the above objectives, this utility model proposes an adjustable online film thickness gauge bracket, comprising a frame, a support frame, an annular guide rail, angle scales, a rotating support frame, an electric stroke slider, a film workpiece, a translational guide rail, an electric slider, a film thickness gauge, and a touch display center. The support frame is located in the middle of the frame, and an annular guide rail is fixedly installed within the support frame. An angle scale is evenly arranged around the circumference of the annular guide rail. The rotating support frame is located within the annular guide rail, with both ends connected to the annular guide rail via electric stroke sliders. A film workpiece is fixedly installed within the rotating support frame. A translational guide rail is located at the upper part of the frame, and an electric slider is installed at the bottom of the translational guide rail. A film thickness gauge is installed at the bottom of the electric slider and is located directly above the rotating support frame. A touch display center is located on the side of the frame, and the touch display center is connected to the electric stroke slider, the electric slider, and the film thickness gauge.

[0005] Preferably, the support frame is a hollow frame, and a rotating shaft is provided on the side of the support frame corresponding to the axis of the annular guide rail. A rotating bearing is installed at the end of the rotating shaft, and the rotating bearing is connected to the center of the outer side of the rotating support frame.

[0006] Preferably, there are two annular guide rails, which are symmetrically arranged in the support frame.

[0007] Preferably, the electric stroke slider is an electric self-locking stroke slider, and a laser positioning sensor is provided on the outer side of the electric stroke slider at the corresponding angle scale position. The laser positioning sensor is connected to the touch display center.

[0008] Preferably, the rotating support frame is a hollow frame, and a thin film limiting groove is provided through the interior of the rotating support frame. A hollow limiting frame is provided at the top of the thin film limiting groove, and the edge of the hollow limiting frame is limited and fixed to the top of the thin film limiting groove by a number of locking bolts.

[0009] Preferably, the sides of the frame are detachably equipped with light-shielding plates.

[0010] Preferably, the bottom of the frame is equipped with self-locking casters.

[0011] The beneficial effects of this utility model are as follows: This utility model combines a frame, a support frame, a ring guide rail, an angle scale, a rotating support frame, an electric stroke slider, a thin film workpiece, a translation guide rail, an electric slider, a film thickness gauge, and a touch display center. Through experimental optimization, it can rotate and adjust the measurement angle of the thin film workpiece fixed in the rotating support frame using the ring guide rail and the electric stroke slider. The rotating support frame is center-limited by the rotating bearing and the rotating shaft. The film thickness gauge is translated by the translation guide rail and the electric translation slider, thereby adjusting the measurement position of the thin film workpiece fixed in the rotating support frame. The measurement angle and position adjustment of the thin film workpiece are convenient, which helps to improve the detection efficiency and accuracy.

[0012] The features and advantages of this utility model will be described in detail through embodiments and accompanying drawings. [Attached Image Description]

[0013] Figure 1 This is a schematic diagram of the main cross-sectional structure of the adjustable online film thickness measuring instrument bracket of this utility model;

[0014] Figure 2 This is a top view of the support structure of the adjustable-angle online film thickness measuring instrument bracket of this utility model.

[0015] In the diagram: 1-frame, 2-support frame, 3-circular guide rail, 4-angle scale, 5-rotating support frame, 6-electric stroke slider, 7-film workpiece, 8-translation guide rail, 9-electric slider, 10-film thickness gauge, 11-touch display center, 12-rotating shaft, 13-rotating bearing, 14-laser positioning sensor.

Detailed Implementation Methods

[0016] See Figure 1 and Figure 2This utility model relates to an adjustable online film thickness gauge bracket, comprising a frame 1, a support frame 2, an annular guide rail 3, an angle scale 4, a rotating support frame 5, an electric stroke slider 6, a film workpiece 7, a translation guide rail 8, an electric slider 9, a film thickness gauge 10, and a touch display center 11. The support frame 2 is located in the middle of the frame 1. An annular guide rail 3 is fixedly installed within the support frame 2. An angle scale 4 is evenly arranged around the circumference of the annular guide rail 3. An angle scale 4 is also arranged within the annular guide rail 3. A rotating support frame 5 is provided, with both ends of the rotating support frame 5 connected to an annular guide rail 3 via electric stroke sliders 6. A thin film workpiece 7 is fixedly mounted inside the rotating support frame 5. A translation guide rail 8 is provided on the upper part of the frame 1, and an electric slider 9 is installed at the bottom of the translation guide rail 8. A film thickness gauge 10 is installed at the bottom of the electric slider 9 and is located directly above the rotating support frame 5. A touch display center 11 is provided on the side of the frame 1, and the touch display center 11 is connected to the electric stroke slider 6. The electric slider 9 and the film thickness gauge 10 are connected one by one. The support frame 2 is a hollow frame. A rotating shaft 12 is set on the side of the support frame 2 corresponding to the axis of the annular guide rail 3. A rotating bearing 13 is installed at the end of the rotating shaft 12. The rotating bearing 13 is connected to the center of the outer side of the rotating support frame 5. There are two annular guide rails 3, which are symmetrically arranged in the support frame 2. The electric stroke slider 6 is an electric self-locking stroke slider. A laser positioning sensor 14 is set on the outer side of the electric stroke slider 6 corresponding to the angle scale 4. The laser positioning sensor 14 is connected to the touch display center 11. The rotating support frame 5 is a hollow frame. A film limiting groove is provided through the interior of the rotating support frame 5. A hollow limiting frame is set on the top of the film limiting groove. The edge of the hollow limiting frame is limited and fixed to the top of the film limiting groove by several locking bolts. A light shield is detachably set on the sides of the frame 1. A self-locking universal wheel is set on the bottom of the frame 1.

[0017] This invention combines a frame 1, a support frame 2, an annular guide rail 3, an angle scale 4, a rotating support frame 5, an electric stroke slider 6, a thin film workpiece 7, a translation guide rail 8, an electric slider 9, a film thickness gauge 10, and a touch display center 11. After experimental optimization, it can rotate and adjust the measurement angle of the thin film workpiece 7 fixed inside the rotating support frame 5 through the annular guide rail 3 and the electric stroke slider 6. The rotating bearing 13 and the rotating shaft 12 limit the center of the rotating support frame 5. The film thickness gauge 10 is translated through the translation guide rail 8 and the electric translation slider, thereby adjusting the measurement position of the thin film workpiece 7 fixed inside the rotating support frame 5. The measurement angle and position adjustment of the thin film workpiece 7 are convenient, which helps to improve detection efficiency and accuracy.

[0018] The above embodiments are illustrative of the present invention and are not intended to limit the present invention. Any simple modifications to the present invention are within the protection scope of the present invention.

Claims

1. A film thickness gauge holder with adjustable measurement angle for online film thickness measurement, characterized in that: The device includes a frame (1), a support frame (2), an annular guide rail (3), an angle scale (4), a rotating support frame (5), an electric stroke slider (6), a thin film workpiece (7), a translation guide rail (8), an electric slider (9), a film thickness gauge (10), and a touch display center (11). The support frame (2) is located in the middle of the frame (1). An annular guide rail (3) is fixedly installed inside the support frame (2). An angle scale (4) is evenly arranged around the circumference of the annular guide rail (3). A rotating support frame (5) is installed inside the annular guide rail (3). The two ends of the rotating support frame (5) are respectively... The rotating support frame (5) is fixedly equipped with a thin film workpiece (7) connected to the annular guide rail (3) via an electric stroke slider (6). A translation guide rail (8) is provided on the upper part of the frame (1). An electric slider (9) is installed at the bottom of the translation guide rail (8). A film thickness gauge (10) is installed at the bottom of the electric slider (9). The film thickness gauge (10) is located directly above the rotating support frame (5). A touch display center (11) is provided on the side of the frame (1). The touch display center (11) is connected to the electric stroke slider (6), the electric slider (9), and the film thickness gauge (10) one by one.

2. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: The support frame (2) is a hollow frame. A rotating shaft (12) is provided on the side of the support frame (2) corresponding to the axis of the annular guide rail (3). A rotating bearing (13) is installed at the end of the rotating shaft (12). The rotating bearing (13) is connected to the center of the outer side of the rotating support frame (5).

3. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: There are two annular guide rails (3), which are symmetrically arranged in the support frame (2).

4. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: The electric stroke slider (6) is an electric self-locking stroke slider. A laser positioning sensor (14) is provided on the outer side of the electric stroke slider (6) at the position corresponding to the angle scale (4). The laser positioning sensor (14) is connected to the touch display center (11).

5. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: The rotating support frame (5) is a hollow frame. A thin film limiting groove is provided through the interior of the rotating support frame (5). A hollow limiting frame is provided at the top of the thin film limiting groove. The edge of the hollow limiting frame is fixed to the top of the thin film limiting groove by several locking bolts.

6. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: The frame (1) is equipped with detachable light shields on all four sides.

7. The adjustable-angle online film thickness measuring instrument bracket as described in claim 1, characterized in that: The bottom of the frame (1) is equipped with self-locking casters.

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