Operating tool for taking and placing quartz grid
By designing an operating tool that includes a handle and a base, the problem of quartz grids easily slipping when using traditional tweezers to pick up and put down quartz grids is solved, achieving efficient and convenient replacement of quartz grids and improving safety, while reducing the risk of damage.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI XINWEI SEMICON CO LTD
- Filing Date
- 2025-05-16
- Publication Date
- 2026-05-12
AI Technical Summary
Traditional tweezers are prone to slipping and breaking quartz gratings due to insufficient friction when handling them. They are also difficult to operate and require high skill levels from equipment maintenance personnel.
Design an operating tool that includes a handle and a base. The base has a slot that can be engaged with the center hole of a quartz grating. The quartz grating can be efficiently and conveniently picked up and put away by gripping the handle and cooperating with the slot on the base.
It improves the replacement efficiency of quartz gratings, reduces the risk of damage to quartz gratings and related parts, simplifies the operation process, and reduces production costs.
Smart Images
Figure CN224227197U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor equipment operation, and specifically relates to an operating tool for picking up and placing quartz gates. Background Technology
[0002] Currently, the epitaxial wafer manufacturing process typically involves periodic maintenance of the reaction chamber of epitaxial equipment (such as MOCVD equipment), which requires the handling of quartz gratings. The traditional method for handling quartz gratings is with ordinary tweezers. However, quartz is highly brittle and has a smooth surface; the planar gripping method of ordinary tweezers easily leads to insufficient friction, causing the quartz grating to slip and break, and may also damage nearby components such as optical tubes and graphite parts. Furthermore, the limited space within the reaction chamber requires precise control of the operating angle and force, making the handling of quartz gratings with ordinary tweezers difficult and demanding a high level of skill from maintenance personnel. Utility Model Content
[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide an operating tool for picking up and placing quartz gratings, which aims to pick up and place quartz gratings more efficiently and conveniently during the maintenance of the reaction chamber of epitaxial equipment, and to minimize the risk of damage to quartz gratings and related parts.
[0004] To achieve the above objectives, this utility model provides an operating tool for picking up and placing quartz gratings, including a handle and a base connected to the handle; the base has a slot on its end face corresponding to its width and height; the slot penetrates the base along its width direction, but does not penetrate the base along its length and height directions; the base can be inserted into the center hole of the quartz grating, thereby allowing the slot to engage with the quartz grating in the radial direction, and the slot to have a clearance fit with the quartz grating in the height direction.
[0005] Optionally, the depth direction of the slot corresponds to the length direction of the base, and the depth of the slot is 30% to 50% of the width of the quartz grating ring.
[0006] Optionally, the depth of the slot is 30% to 35% of the width of the quartz grating ring.
[0007] Optionally, the depth of the card slot is 70mm to 80mm.
[0008] Optionally, the depth of the slot is 75mm.
[0009] Optionally, the gap between the slot and the quartz grating in the height direction is 2mm to 3mm.
[0010] Optionally, the height of the card slot is 4mm to 6mm.
[0011] Optionally, the thickness of the slot extending into the lower sidewall of the bottom of the quartz grating is less than the distance between the bottom of the quartz grating and the lower coil.
[0012] Optionally, the thickness of the lower sidewall of the slot is 1.2mm to 1.5mm.
[0013] Optionally, the operating tool also has at least one of the following structures:
[0014] One or both ends of the handle are fixedly connected to the base;
[0015] The handle is configured in a curved shape;
[0016] The handle is equipped with an anti-slip structure;
[0017] The slot has a polished structure;
[0018] The depth direction of the slot corresponds to the length direction of the base, and the depth of the slot is greater than or equal to 1 / 2 of the length of the base.
[0019] As described above, this utility model provides an operating tool for picking up and placing quartz gratings, which has at least the following features:
[0020] Beneficial effects:
[0021] The above-mentioned operating tools are used for both holding and operating the handle, and for loading and unloading the quartz grid through the base and its slot. This allows equipment maintenance personnel to replace the quartz grid more efficiently and conveniently, improves the ability to manually replace the quartz grid, and ensures the safety of the process of picking up and placing the quartz grid, minimizing the risk of damage to the quartz grid and related parts during operation. Attached Figure Description
[0022] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:
[0023] Figure 1 This is a side view of the operating tool provided according to a preferred embodiment of the present invention;
[0024] Figure 2 This is a front view of the operating tool provided by this utility model according to a preferred embodiment;
[0025] Figure 3 This is an application scenario diagram of the operating tool provided by this utility model according to a preferred embodiment, wherein the handle is represented by a simplified structure.
[0026] [The following are the annotations in the attached drawings]: 1-handle, 11-anti-slip groove, 2-base, 21-slot, 22-lower sidewall, 10-quartz grid, 101-center hole, 102-small hole, L1-slot depth, H1-slot height, T1-lower sidewall thickness, W-slot or base width, L-base length, H-base height. Detailed Implementation
[0027] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the objectives of the embodiments of this utility model.
[0028] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.
[0029] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.
[0030] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.
[0031] The purpose of this utility model is to provide an operating tool for picking up and placing quartz gratings. Based on the actual needs of picking up and placing quartz gratings during equipment maintenance, through a simple and reasonable design, it enables equipment maintenance personnel to replace quartz gratings more efficiently and conveniently, and minimizes the risk of damage to quartz gratings and related parts during maintenance. The following description is in conjunction with the accompanying drawings.
[0032] like Figure 1 and Figure 2 As shown, this utility model embodiment provides an operating tool, which includes: a handle 1 and a base 2; one or both ends of the handle 1 are connected to the base 2. In this embodiment, one end of the handle 1 is fixedly connected to the base 2. The handle 1 and the base 2 can be designed as an integral part or as separate parts, and there is no limitation thereto.
[0033] The handle 1 can be of various shapes, such as straight, curved, or folding. In some embodiments, the handle 1 is straight, making it convenient for equipment maintenance personnel to hold and use. In this embodiment, the handle 1 is curved, providing better grip comfort and operational flexibility, better adapting to the needs of picking up and placing the quartz grid 10 during operation. In other embodiments, the handle 1 can also be folding, facilitating carrying and storage, allowing the tool to be folded up when not in use, saving space.
[0034] The material of the handle 1 is not limited; common materials include plastic and metal. Since metal handles are durable, in this embodiment, the handle 1 is made of metal, preferably stainless steel. Furthermore, the handle 1 can be various common shapes such as rod-shaped, pole-shaped, or leaf-shaped; it can be thicker or thinner, as long as it is suitable for gripping and easy to operate and use. The shape of the handle 1 should meet the requirements of comfort, serving as an auxiliary tool, improving the stability of the tool, reducing hand fatigue, and increasing operating efficiency.
[0035] Furthermore, the base 2 has a slot 21 on its end face corresponding to the width W and height H. This slot 21 extends through the base 2 along its width direction but does not extend through the base 2 along its length and height directions. This slot 21 provides sufficient contact area in both width and depth directions, facilitating the placement and removal of the quartz grid 10 and effectively preventing the quartz grid 10 from falling or slipping. The base 2 is preferably made of stainless steel.
[0036] The tool is shaped like an iron, held and operated via the handle 1, and the quartz grid 10 is placed and removed via the base 2 (see...). Figure 3 Its English name is Diffusion Barrier.
[0037] refer to Figure 3 The base 2 is configured to accommodate the central hole 101 of the quartz grating 10, thereby allowing the slot 21 to engage with the quartz grating 10 in the radial direction. In other words, during maintenance, the base 2 must be inserted into the central hole 101 of the quartz grating 10 to allow the quartz grating 10 to be inserted into the slot 21. Therefore, the width W and length L of the base 2 are both smaller than the inner diameter of the quartz grating 10. Furthermore, the slot 21 has a clearance fit with the quartz grating 10 in the height direction, which reduces damage to the quartz grating 10. The clearance fit between the slot 21 and the quartz grating 10 can be adjusted as needed. Therefore, the slot 21 is configured as the contact portion with the quartz grating 10, and the quartz grating 10 is picked up and put down using force applied through the slot 21.
[0038] Here, those skilled in the art will readily understand the quartz grating 10 described in this application based on common sense. Specifically, most epitaxial equipment reaction chambers (especially MOCVD reaction chambers) contain the following components, such as a cover star, a tension disk, a planetary disk, a quartz grating 10, an exhaust collector ring, a coil, and a light tube. The exhaust collector ring comprises three layers: an upper collector ring, a middle collector ring, and a lower collector ring, all of which are made of graphite.
[0039] like Figure 3 As shown, generally, the quartz grid 10 is provided with a small hole 102, through which a light pipe can pass.
[0040] Thus, when maintaining the reaction chamber of the epitaxial equipment, maintenance personnel can use the operating tools of this application to pick up and put down the quartz grating 10, thereby replacing the quartz grating 10 more efficiently and conveniently, improving the ability to manually replace the quartz grating 10, while ensuring the safety of the process of picking up and putting down the quartz grating 10, and minimizing the risk of damage to the quartz grating 10 and related parts during operation.
[0041] Furthermore, the shape and size of the slot 21 can be set as needed, as long as it ensures that the quartz grid 10 is not easily detached or slipped, and is not damaged, especially preventing chipping or other damage to the inner edge of the quartz grid 10. Specifically, there should be sufficient contact area between the slot 21 and the quartz grid 10, and the slot 21 should have sufficient strength and toughness so that it is not easily deformed or bent under force. In addition, the slot 21 should be as smooth as possible and free of burrs to avoid wear or damage to the quartz grid 10.
[0042] In detail, the depth direction of the slot 21 corresponds to the length direction of the base 2, and the depth L1 of the slot 21 can be set according to the ring width of the quartz grating 10, with different ring widths having different depths L1. Generally, the depth L1 of the slot 21 is less than or equal to half the ring width of the quartz grating 10. Preferably, the depth L1 of the slot 21 is 30% to 50% of the ring width of the quartz grating 10, and more preferably, the depth L1 of the slot 21 is 30% to 35% of the ring width of the quartz grating 10. In this embodiment, the depth L1 of the slot 21 is approximately 33% of the ring width of the quartz grating 10.
[0043] Optionally, the depth L1 of the card slot 21 is 70mm to 80mm. Specifically, in this embodiment, the depth L1 of the card slot 21 is 75mm.
[0044] In a specific application scenario, the outer diameter of the quartz grating 10 is 612mm and the inner diameter is 160mm. At this time, the depth L1 of the slot 21 is set to 75mm. This design can ensure the contact area between the slot 21 and the quartz grating 10, and also facilitate maintenance operations.
[0045] Furthermore, the depth L1 of the slot 21 is preferably greater than or equal to 1 / 2 of the length L of the base 2, and does not exceed 2 / 3 of the length L of the base 2. In this way, the base 2 is prevented from being too long, the strength of the base 2 is guaranteed, and the contact area with the quartz grid 10 is also taken into account.
[0046] The base 2 is designed to be as compact as possible to increase the usability of the tool. Optionally, the length L of the base 2 is 105mm to 115mm, and more preferably, the length L of the base 2 is 110mm.
[0047] As mentioned above, the slot 21 is clearance-fitted with the quartz grating 10 in the height direction. In this case, the height H1 of the slot 21 is greater than the thickness of the quartz grating 10, so the height H1 of the slot 21 should be adjusted according to the thickness of the quartz grating 10.
[0048] The clearance between the slot 21 and the quartz grating 10 should not be too large; an excessively large clearance will cause the quartz grating 10 to wobble and slip, making it easy for the quartz grating 10 to slip off; an excessively small clearance will easily damage the quartz grating 10. Research has shown that a clearance of 2mm to 3mm between the slot 21 and the quartz grating in the height direction is most suitable.
[0049] Optionally, the height H1 of the card slot 21 is 4mm to 6mm. Further, the height H1 of the card slot 21 is 5mm.
[0050] In a specific application scenario, the thickness of the quartz grating 10 is 2mm to 3mm, and correspondingly, the height H1 of the slot 21 is 5mm.
[0051] This application does not have a specific requirement for the height H of the base 2. In practice, the base 2 should not be too high, otherwise it will be inconvenient to operate and use. Optionally, the height H of the base 2 is 12mm, especially for the quartz grid 10 with an outer diameter of 612mm and an inner diameter of 160mm.
[0052] The width W of the base 2 is the width of the slot 21. In practice, for ease of use, the width W of the base 2 cannot be too large, but to ensure sufficient contact area, the width W of the base 2 cannot be too small. Therefore, the width W of the base 2 is preferably 12mm to 15mm. In this embodiment, the width W of the base 2 is 15mm.
[0053] Secondly, the slot 21 has a lower sidewall 22 extending into the bottom of the quartz grating 10. This lower sidewall 22 needs to extend into the bottom of the quartz grating 10 for operation. However, this operation is limited by the distance between the bottom of the quartz grating 10 and the lower coil (similar to a mosquito coil structure). Therefore, the thickness T1 of the lower sidewall 22 is less than the distance between the bottom of the quartz grating 10 and the lower coil, so as to facilitate the placement and removal of the quartz grating 10 without interfering with the lower components.
[0054] Optionally, the thickness of the lower sidewall 22 of the slot 21 is 1.2mm to 1.5mm, more preferably 1.5mm. This ensures the strength and toughness of the lower sidewall 22, making it less prone to deformation and bending under stress.
[0055] Preferably, the slot 21 is a polished structure, that is, the slot 21 is polished. This reduces the impact of picking up and putting down the quartz grating 10, further reducing the risk of damage to the quartz grating 10.
[0056] Furthermore, in a specific example, the length L of the base 2 is 110mm, the height H of the base 2 is 12mm, the width W of the base 2 is 15mm, the depth L1 of the slot 21 is 75mm, the height H1 of the slot 21 is 5mm, and the thickness T1 of the lower sidewall 22 of the slot 21 is 1.5mm. This structure is mainly suitable for quartz grids 10 with a thickness of 2mm to 3mm, an outer diameter of 612mm, and an inner diameter of 160mm.
[0057] Preferably, the handle 1 is provided with an anti-slip structure. This anti-slip structure increases the roughness of the gripping contact surface of the handle 1, facilitating the handling of the quartz grid 10 by maintenance personnel and preventing slippage during operation that could damage parts. In practice, various measures can be used to implement the anti-slip structure; this application is not limited to these methods.
[0058] In this embodiment, the upper gripping area of the handle 1 is provided with anti-slip grooves 11. The anti-slip grooves 11 are formed by engraving, molding, machining, or other methods. The number and shape of the anti-slip grooves 11 are not limited. It should be noted that, in addition to the anti-slip grooves 11, materials with a high coefficient of friction, such as silicone, rubber, or coatings, can also be used to increase the friction during gripping. The anti-slip grooves 11 can also be replaced with protrusions, etc.
[0059] Finally, it should be noted that the quartz grating 10 described in this application is preferably used in an MOCVD equipment. MOCVD (Metal-organic Chemical Vapor Deposition) is a novel vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth (VPE). This technology mainly relies on MOCVD equipment for implementation.
[0060] In summary, this utility model provides an operating tool for handling quartz gratings, which not only improves the ability of equipment maintenance personnel to replace quartz gratings 10, but also ensures the safety of handling quartz gratings 10 and reduces damage to quartz gratings 10, optical tubes, and graphite components during operation. Compared with the traditional use of ordinary tweezers, this operating tool facilitates the maintenance of quartz gratings 10, greatly reduces the risk of damaging parts, and lowers production costs.
[0061] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of this specification and its equivalents, the present invention also intends to include such modifications and variations.
Claims
1. A tool for picking up and placing quartz gratings, characterized in that, The device includes a handle and a base connected to the handle; the base has a slot on its end face corresponding to its width and height; the slot passes through the base along its width direction but does not pass through the base along its length and height directions; the base can be inserted into the center hole of the quartz grating, thereby allowing the slot to engage with the quartz grating in the radial direction, and the slot to have a clearance fit with the quartz grating in the height direction.
2. The operating tool for picking up and placing quartz gratings according to claim 1, characterized in that, The depth direction of the slot corresponds to the length direction of the base, and the depth of the slot is 30% to 50% of the width of the quartz grating ring.
3. The operating tool for picking up and placing quartz gratings according to claim 2, characterized in that, The depth of the slot is 30% to 35% of the width of the quartz grating ring.
4. The operating tool for picking up and placing quartz gratings according to any one of claims 1-3, characterized in that, The depth of the card slot is 70mm to 80mm.
5. The operating tool for picking up and placing quartz gratings according to claim 4, characterized in that, The depth of the slot is 75mm.
6. The operating tool for picking up and placing quartz gratings according to claim 1, characterized in that, The gap between the slot and the quartz grating in the height direction is 2mm to 3mm.
7. The operating tool for picking up and placing quartz gratings according to claim 6, characterized in that, The height of the card slot is 4mm to 6mm.
8. The operating tool for picking up and placing quartz gratings according to claim 1, characterized in that, The thickness of the slot extending into the lower sidewall of the bottom of the quartz grating is less than the distance between the bottom of the quartz grating and the coil below.
9. The operating tool for picking up and placing quartz gratings according to claim 8, characterized in that, The thickness of the lower sidewall of the slot is 1.2mm to 1.5mm.
10. The operating tool for picking up and placing quartz gratings according to claim 1, characterized in that, The operating tool also has at least one of the following structures: One or both ends of the handle are fixedly connected to the base; The handle is configured in a curved shape; The handle is equipped with an anti-slip structure; The slot has a polished structure; The depth direction of the slot corresponds to the length direction of the base, and the depth of the slot is greater than or equal to 1 / 2 of the length of the base.