Magnetic sensor and current detection device

Abstract

The utility model discloses a magnetic sensor and a current detection device, a signal magnetic field comprises a magnetic field component along a first direction, the magnetic sensor comprises a first working unit used for detecting a magnetic field component along a second direction to generate a first signal; the magnetic conduction assembly comprises at least one magnetic conduction unit, and the magnetic conduction unit is at least partially located on one side of the second direction of the first working unit; the magnetic field generation unit is used for generating an excitation magnetic field; the calibration assembly comprises at least one calibration unit, the calibration unit is used for detecting the excitation magnetic field to generate a second signal, and the second signal is used for calibrating the first signal; the calibration assembly is arranged on a first reference line, the first reference line intersects with the center line of the magnetic conductive assembly and extends in a third direction, and the center line passes through the center of the whole magnetic conductive assembly and extends in a second direction; the first direction, the second direction, and the third direction are arranged at an angle to each other. The magnetic sensor gives consideration to sensitivity, bandwidth and accuracy.

Description

Technical Field

[0001] This utility model relates to the field of testing and measurement technology, and in particular to a magnetic sensor and a current detection device. Background Technology

[0002] Magnetic sensors are used to detect magnetic fields and have a wide range of applications. In consumer electronics, they are used in applications such as triaxial magnetometers to measure the Earth's magnetism, magnetic displacement meters to measure lens travel, and magnetic switches to detect screen opening and closing. In industrial and transportation applications, they are used in angle sensors and current sensors.

[0003] When fabricating and using magnetic sensors, variations in stress and environmental temperature and humidity can cause linear errors in the sensor's output curve. Existing technologies provide two sets of sensing units to measure the magnetic field under test, eliminating linear errors by canceling out the output results. However, this cancellation results in a loss of sensitivity in the magnetic sensor, and the output bandwidth is also affected due to computational requirements, making it unsuitable for applications requiring high bandwidth and high sensitivity. Utility Model Content

[0004] One of the objectives of this invention is to provide a magnetic sensor to solve the technical problem of bandwidth and sensitivity loss in existing magnetic sensors when eliminating linearity errors.

[0005] One of the objectives of this invention is to provide a current detection device.

[0006] To achieve one of the above-mentioned objectives, one embodiment of this utility model provides a magnetic sensor for detecting a signal magnetic field, the signal magnetic field including a magnetic field component along a first direction. The magnetic sensor includes: a first working unit for detecting the magnetic field component along a second direction to generate a first signal; a magnetically conductive component including at least one magnetically conductive unit, the magnetically conductive unit being at least partially located on one side of the first working unit in the second direction; a magnetic field generating unit for generating an excitation magnetic field; and a calibration component including at least one calibration unit, the calibration unit being used to detect the excitation magnetic field to generate a second signal, the second signal being used to calibrate the first signal; the calibration component is disposed on a first reference line, the first reference line intersecting with the center line of the magnetically conductive component and extending along a third direction, the center line passing through the center of the entire magnetically conductive component and extending along the second direction; the first direction, the second direction, and the third direction are arranged at angles to each other.

[0007] To achieve one of the above-mentioned objectives of the utility model, one embodiment of the present utility model provides a current detection device for detecting the current flowing through a conductor. The current detection device includes a magnetic sensor, configured as in any technical solution. When the current detection device detects the current in the conductor, the magnetic sensor is located on one side of the conductor in a second direction, and the direction of the current in the conductor is parallel to a third direction.

[0008] Compared with the prior art, the magnetic sensor provided by this utility model has the following advantages in terms of sensitivity: Firstly, through the cooperation of the magnetic conductive component and the first working unit, the first signal has high sensitivity to the magnetic field of the signal to be detected. Simultaneously, the second signal can calibrate the first signal without loss during calibration, thus improving the overall sensitivity of the magnetic sensor. Secondly, in terms of bandwidth, based on the position of the calibration component, the components of the magnetic field of the signal to be detected at the calibration component cancel each other out, so that the calibration component basically does not generate an output for the magnetic field of the signal to be detected. Therefore, there is no need for additional calculations on the first and second signals to cancel out the magnetic field components, which improves the bandwidth of the magnetic sensor to a certain extent. Attached Figure Description

[0009] Figure 1 This is a structural schematic diagram of the current detection device at a first angle in one embodiment of this utility model.

[0010] Figure 2 This is a structural schematic diagram of the current detection device from a second angle in one embodiment of this utility model.

[0011] Figure 3 This is a structural schematic diagram of the first angle of the magnetic sensor in one embodiment of this utility model.

[0012] Figure 4 This is a structural schematic diagram of the second angle of the magnetic sensor in one embodiment of this utility model.

[0013] Figure 5 This is a circuit diagram of a magnetic sensor in one embodiment of the present invention.

[0014] Figure 6 This is a circuit diagram of a magnetic sensor in one embodiment of the present invention.

[0015] Figure 7 This is a circuit diagram of a magnetic sensor in one embodiment of the present invention.

[0016] Figure 8 This is a schematic diagram of the structure of the first working unit in one embodiment of the present invention.

[0017] Figure 9 This is another structural schematic diagram of the first working unit in one embodiment of the present invention.

[0018] Figure 10 This is a schematic diagram of the structure of a calibration unit in one embodiment of the present invention.

[0019] Figure 11 This is a schematic diagram of another structure of the calibration unit in one embodiment of the present invention.

[0020] Figure 12 This is a schematic diagram of the structure of a working unit in one embodiment of the present invention.

[0021] Figure 13 This is a schematic diagram of another structure of the working unit in one embodiment of the present invention.

[0022] Figure 14 This is a schematic diagram of another structure of the magnetic sensor in one embodiment of the present invention.

[0023] Figure 15 This is a schematic diagram of the structure of a magnetic sensor in one embodiment of this utility model.

[0024] Figure 16 This is a schematic diagram of the structure of a magnetic sensor in one embodiment of this utility model.

[0025] Figure 17 This is a schematic diagram of the structure of a working unit in one embodiment of the present invention.

[0026] Figure 18 This is a schematic diagram of another structure of the working unit in one embodiment of the present invention.

[0027] Figure 19 This is a schematic diagram of the structure of a magnetic sensor in one embodiment of this utility model.

[0028] Figure 20 This is a schematic diagram of the structure of a magnetic sensor in one embodiment of this utility model.

[0029] Figure 21 This is a schematic diagram of the structure of a working unit in one embodiment of the present invention.

[0030] Figure 22 This is a schematic diagram of another structure of the working unit in one embodiment of the present invention.

[0031] Figure 23 This is a structural schematic diagram of the first angle of the magnetic sensor in one embodiment of this utility model.

[0032] Figure 24 This is a structural schematic diagram of the second angle of the magnetic sensor in one embodiment of this utility model.

[0033] Figure 25 This is a schematic diagram of the structure of a magnetic sensor in one embodiment of this utility model. Detailed Implementation

[0034] The present invention will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the protection scope of the present invention.

[0035] It should be noted that the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0036] Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. There is no necessary relationship between "first," "second," and "third," for example, the presence of "second" in an embodiment does not necessarily mean the presence of "first," and so on.

[0037] Current detection device

[0038] One embodiment of this utility model provides a current detection device 1000, such as... Figure 1 and Figure 2 As shown.

[0039] The current detection device 1000 is used to detect the current flowing through the conductor 900.

[0040] When conductor 900 is energized, it generates a signal magnetic field. Current detection device 1000 can detect the current flowing through conductor 900 by detecting the signal magnetic field.

[0041] The current detection device 100 includes a magnetic sensor 100. The magnetic sensor 100 is used to detect the signal magnetic field Bs.

[0042] The magnetic sensor 100 can be configured according to any of the technical solutions provided below in this utility model.

[0043] For example, the signal magnetic field Bs includes a magnetic field component along a first direction X. The magnetic sensor 100 includes a first operating unit 11. The first operating unit 11 is used to detect the magnetic field component along a second direction Z to generate a first signal. The magnetic sensor 100 includes a magnetically conductive assembly 20. The magnetically conductive assembly 20 includes at least one magnetically conductive unit (e.g., a first magnetically conductive unit 21). The magnetically conductive unit is at least partially located on the second direction Z side of the first operating unit 11.

[0044] The magnetic sensor 100 includes a magnetic field generating unit 30 for generating an excitation magnetic field Br. The magnetic sensor 100 includes a calibration assembly 40, including at least one calibration unit (e.g., an eighth calibration unit 48). The calibration unit is used to detect the excitation magnetic field Br to generate a second signal. The second signal is used to calibrate the first signal. The calibration assembly 40 is disposed on a first reference line L1. The first reference line L1 intersects the center line C2 of the magnetically conductive assembly 20. The first reference line L1 extends along a third direction Y. The center line C2 of the magnetically conductive assembly 20 passes through the center O2 of the entire magnetically conductive assembly 20. The center line C2 of the magnetically conductive assembly 20 extends along a second direction Z. The first direction X, the second direction Z, and the third direction Y are arranged at angles to each other.

[0045] When the current detection device 1000 detects the current in the conductor 900, the magnetic sensor 100 is located on the second direction Z side of the conductor 900, and the direction of the current I in the conductor 900 is parallel to the third direction Y.

[0046] like Figure 1 and Figure 2 As shown, current I generates a circular signal magnetic field Bs, and at magnetic sensor 100, a magnetic field component Bs' is generated along the first direction X or its opposite direction. Magnetic sensor 100 can detect the magnetic field component Bs' along the first direction X to obtain information about the signal magnetic field, and current detection device 1000 can determine information about current I based on this.

[0047] magnetic sensor

[0048] like Figure 3 and Figure 4 This utility model provides a magnetic sensor 100 according to one embodiment.

[0049] The magnetic sensor 100 may include only the element part that is sensitive to the magnetic field, or it may include the element part and the circuit part that works with it.

[0050] The magnetic sensor 100 is used to detect the signal magnetic field Bs.

[0051] When the detection direction of the magnetic sensor 100 is consistent with the magnetic field direction of the signal magnetic field Bs, the magnetic sensor 100 is used to detect the entire signal magnetic field Bs; when the detection direction is inconsistent with the magnetic field direction, the magnetic sensor 100 is used to detect the component of the signal magnetic field Bs.

[0052] The signal magnetic field Bs can be a magnetic field carrying specific information or a general magnetic field to be measured.

[0053] The signal magnetic field Bs includes a magnetic field component along the first direction X. The magnetic field direction of the signal magnetic field Bs can be arbitrary, but it must include at least a magnetic field component along the first direction X. The magnetic field direction of the signal magnetic field Bs can also be the first direction X. The first direction X can be parallel to the detection surface of the working unit or calibration component mentioned later; the detection direction of the working unit or calibration component can be parallel to or perpendicular to the first direction X.

[0054] The magnetic sensor 100 includes a first working unit 11. The first working unit 11 is used to detect the magnetic field component along the second direction Z to generate a first signal.

[0055] The first working unit 11 may include magnetic field sensitive components, such as magnetoresistive elements or Hall elements. The first working unit 11 is sensitive to at least the magnetic field component with the magnetic field direction in the second direction Z; the detection direction of the first unit 11 may also be the second direction Z.

[0056] The first working unit 11 may include a Hall element. When implementing the magnetic sensor 100, the first direction X may point to a direction on a horizontal plane, and the second direction Z may be perpendicular to the first direction X or perpendicular to the horizontal plane. Based on this, the first working unit 11 may include a vertical Hall element. When the signal magnetic field Bs is detected using the vertical Hall element, the magnetic sensor 100 has higher sensitivity, lower power consumption, and can generate a linear output.

[0057] The first signal can be directly used or employed to determine the magnetic field detection signal.

[0058] The magnetic sensor 100 includes a magnetically conductive assembly 20, which includes at least one magnetically conductive unit 20a. The magnetically conductive unit 20a is at least partially located on the second direction Z side of the first working unit 11.

[0059] The magnetically conductive unit 20a has a higher permeability than the surrounding environment, specifically, it can guide the surrounding magnetic field to deflect in the direction of the magnetically conductive unit 20a. The surrounding environment includes components located near the magnetically conductive unit 20a and media such as air in the area where the magnetically conductive element 20a is located.

[0060] The positional relationship between the magnetically conductive unit 20a and the first working unit 11 can also be such that the projection of the magnetically conductive unit 20a along the second direction Z onto the first working unit 11 at least partially overlaps with the first working unit 11 (especially its detection surface). In some embodiments, the entire first working unit 11 can be located on the opposite side of the second direction Z of the magnetically conductive unit 20a; the first working unit 11 can completely overlap with the projection of the magnetically conductive unit 20a; and the area of ​​the projection can be larger than the area of ​​the detection surface of the first working unit 11.

[0061] The magnetically conductive unit 20a can be located on the second direction Z side of the first working unit 11, or on the opposite side of its second direction Z.

[0062] Although the magnetically conductive component 20 is called a component, it is not required to necessarily include a plurality of structures. In some embodiments, the magnetically conductive component 20 may be equivalent to the magnetically conductive unit 20a.

[0063] Magnetic conductive unit 20a can also be Figure 1 , Figure 2 , Figure 23 and Figure 24 At least one of the first magnetically conductive unit 21 and the second magnetically conductive unit 22 shown; the magnetically conductive unit 20a may also be as follows: Figure 25 The first magnetically conductive unit 21, the second magnetically conductive unit 22, the third magnetically conductive unit 23, and the fourth magnetically conductive unit 24 shown are at least one of them. Based on this, the explanation or specific embodiment of the magnetically conductive unit 20a in this utility model can be applied to the above-mentioned first magnetically conductive unit 11 and second magnetically conductive unit 22.

[0064] The magnetic sensor 100 includes a magnetic field generating unit 30. The magnetic field generating unit 30 is used to generate an excitation magnetic field Br.

[0065] The direction of the excitation magnetic field Br can be parallel to the detection direction of the corresponding component. In some embodiments, the excitation magnetic field Br can have a magnetic field component parallel to the second direction Z.

[0066] The magnetic sensor 100 may have multiple magnetic field generating units 30. The multiple magnetic field generating units 30 may apply the same or different excitation magnetic fields to the corresponding components. The same or different magnetic fields may include the same or different magnetic field strengths, and may also include the same or different magnetic field directions.

[0067] The magnetic sensor 100 may have a magnetic field generating unit 30, and the magnetic field direction and magnetic field strength of the excitation magnetic field generated by the magnetic field generating unit 30 may be the same or different at the corresponding different components.

[0068] The magnetic field strength and direction of the excitation magnetic field Br can be preset and known. The excitation magnetic field Br can be used to determine whether the magnetic sensor 100 needs calibration or to generate a signal for calibration. The determination of whether calibration is required or the signal for calibration can be determined based on the difference between the preset magnetic field strength of the excitation magnetic field Br and the detection strength of the excitation magnetic field Br.

[0069] The magnetic sensor 100 includes a calibration assembly 40. The calibration assembly 40 includes at least one calibration unit (e.g., a first calibration unit 41). The calibration unit is used to detect the excitation magnetic field Br to generate a second signal. The second signal is used to calibrate the first signal.

[0070] The calibration component 40 and calibration unit are used for calibration, but this does not mean that the component or unit itself has calibration functionality. In some embodiments, the calibration component 40 and calibration unit are configured to detect magnetic field information of their environment, specifically including magnetic field-sensitive components and / or circuitry that works with the components.

[0071] The calibration unit can be configured to output only to the excitation magnetic field Br. Alternatively, the calibration unit can be configured to output information about all magnetic fields in the environment; even in this configuration, the technical solution provided later in this invention can still achieve the effect of outputting only to the excitation magnetic field Br.

[0072] The detection direction of the calibration unit can be parallel to the excitation magnetic field Br; in embodiments where the two directions are not parallel, the calibration unit can at least detect the magnetic field component of the excitation magnetic field Br in its detection direction.

[0073] Although the calibration component 40 is called a component, it is not required to necessarily include a plurality of structures. In some embodiments, the calibration component 40 may be equivalent to a calibration unit.

[0074] The second signal can be used directly as or to determine the calibration signal to calibrate the first signal.

[0075] The second signal can be used to characterize the detection intensity and / or direction of the excitation magnetic field Br. When the detection intensity and / or direction is inconsistent with the preset intensity and / or direction of the excitation magnetic field Br, the first signal can be calibrated based on the difference between the two.

[0076] The magnetically conductive unit 20a is at least partially located on the second direction Z side of the calibration assembly 40 or calibration unit. The projection of the magnetically conductive unit 20a along the second direction Z onto the calibration assembly 40 or calibration unit at least partially overlaps with the calibration assembly 40 or calibration unit (particularly its detection surface). In some embodiments, the entire calibration assembly 40 or calibration unit may be located on the opposite side of the second direction Z of the magnetically conductive unit 20a; the calibration assembly 40 or calibration unit may completely overlap with the projection of the magnetically conductive unit 20a; the area of ​​the projection may be larger than the area of ​​the detection surface of the calibration assembly 40 or calibration unit.

[0077] The calibration component 40 is disposed on the first reference line L1. The first reference line L1 intersects the center line C2 of the magnetically conductive component 20. The first reference line L1 extends along the third direction Y. The center line C2 passes through the center O2 of the entire magnetically conductive component 20 and extends along the second direction Z.

[0078] When the magnetic conductive assembly 20 has only one magnetic conductive unit 20a, the center O2 of the whole can be the geometric center, center of gravity, centroid, circumcenter (or center of the circumscribed sphere), incenter (or center of the inscribed sphere), orthocenter, center of symmetry, etc. of the three-dimensional structure of the magnetic conductive unit 20a or its surface.

[0079] When the magnetically conductive assembly 20 includes a plurality of magnetically conductive units 20a, the overall center O2 can be the geometric center, center of gravity, centroid, circumcenter (or center of the circumscribed sphere), incenter (or center of the inscribed sphere), orthocenter, center of symmetry, etc., of the region where the multiple magnetically conductive units are located. In this case, the center O2 can be located inside the magnetically conductive unit, or it can be... Figure 1 and Figure 2 It is located outside the magnetically conductive unit.

[0080] When the calibration component 40 is set on the first reference line, such as Figure 4 As shown, under the influence of the magnetic conductive component 20, the magnetic field component of the signal magnetic field Bs at the calibration component 40 is entirely or mostly along the first direction X. When the detection direction of the calibration unit is other than the specified direction, the calibration unit does not generate an output for the signal magnetic field Bs, and the second signal is independent of the signal magnetic field Bs. Therefore, the interference of the signal magnetic field Bs can be eliminated, allowing for more accurate calibration.

[0081] The first direction X, the second direction Z, and the third direction Y are set at angles to each other. Specifically, the first direction X forms a first angle with the second direction Z, the second direction Z forms a second angle with the third direction Y, and the first direction X forms a third angle with the third direction Y.

[0082] The first direction X, the second direction Z, and the third direction Y can be perpendicular to each other.

[0083] Based on this, the detection direction of the first working unit 11 can be perpendicular to the plane containing the first direction X and the third direction Y. Because of the presence of the magnetically conductive component 20, even if the first working unit 11 is configured to include a vertical Hall element, it can still obtain information about the signal magnetic field in the plane containing the first direction X and the third direction Y, thus balancing the universal applicability and sensitivity of magnetic field detection.

[0084] like Figure 4 As shown, the magnetic sensor 100 may include a substrate 800.

[0085] The substrate 800 may be arranged along a first direction X and a third direction Y. The substrate 800 may include a first surface 81, which may be the upper surface of the substrate 800 when the second direction Z is defined as "upper". The first surface 81 is parallel to both the first direction X and the third direction Y.

[0086] The first working unit 11 and the calibration unit (e.g., the first calibration unit 41) are disposed on the first surface 81 of the substrate 800.

[0087] The detection surface of the first working unit 11 can be parallel to the first surface 81. The detection surface of the calibration unit can be parallel to the first surface 81. When the opposite direction of the second direction Z is defined as "down", the first working unit 11 can be disposed below the first surface 81 or stacked above the first surface 81; the calibration unit can be disposed below the first surface 81 or stacked above the first surface 81.

[0088] The substrate 800 can be divided into a first region A1, a second region A2, and a third region A3 according to their positions relative to the first reference line L1. The first region A1 is located on the opposite side of the first direction X of the first reference line L1. When the direction of the signal magnetic field Bs is the first direction X, the signal magnetic field Bs in the first region A1 is deflected along the second direction Z by the magnetic guide component 20. When the first working unit 11 is disposed in the first region A1, it can detect the deflected signal magnetic field Bs to generate a first signal. Furthermore, the second region A2 is located on both sides of the first reference line L1 in the first direction X, preferably evenly distributed on both sides. The signal magnetic field Bs is acted upon and simultaneously has components along the second direction Z and its opposite direction. The third region A3 is located on one side of the first reference line L1 in the first direction X. The signal magnetic field Bs is acted upon and deflected along the opposite direction of the second direction Z. For other regions of the substrate 800 besides the above three regions (e.g., the fourth region A4), it can be considered that the signal magnetic field Bs is not acted upon by the magnetic guide component 20 or the effect is weak, thus maintaining its original magnetic field strength and direction.

[0089] The magnetic field generating unit 30 is disposed on the second direction Z side of the first surface 81.

[0090] The magnetic field generating unit 30 is positioned close to the calibration unit in the calibration assembly 40 and is used to generate an excitation magnetic field Br. When the magnetic field direction of the excitation magnetic field Br at the calibration unit is the second direction Z, the second signal generated by the calibration unit can be positively correlated with the component of the excitation magnetic field Br in the second direction Z.

[0091] In order to ensure that the magnetic field generating unit 30 can accurately generate the excitation magnetic field Br at the calibration unit, the magnetic field generating unit 30 and the calibration unit can be aligned, and in particular, they can be configured to be geometrically aligned.

[0092] The magnetic sensor 100 may include an insulating layer 700.

[0093] Insulation layer 700 is used to isolate other electrical interference in the environment.

[0094] The insulating layer 700 may be disposed on the second direction Z side of the first surface 81 of the substrate 800.

[0095] The insulating layer 700 can be used to cover the magnetic field generating unit 30. In this way, external interference can be prevented from affecting the excitation magnetic field Br.

[0096] The magnetic conductive unit 20a or magnetic conductive assembly 20 can be disposed on the second direction Z side of the insulating layer 700.

[0097] Thus, when the second direction Z is defined as "up" and its opposite direction as "down", the magnetic sensor 100 is provided with a magnetic conductive component 20, an insulating layer 700, a magnetic field generating unit 30, a first working unit 11, a calibration component 40, and a substrate 800 from top to bottom.

[0098] Combination Figure 3 and Figure 4 The magnetic conductive unit 20a is a regular polygon.

[0099] For example, the magnetically conductive unit 20a can be a square, a regular hexagon, a regular octagon, etc., and preferably has an even number of sides. In other embodiments, it can also be a non-regular polygon such as a rectangle with an even number of sides, or a regular polygon such as a regular pentagon with an odd number of sides.

[0100] The first working unit 11 is positioned close to the edge of the magnetically conductive unit that cooperates with the first working unit 11.

[0101] For example, the edge of the detection surface of the first working unit 11 is configured to be parallel to the edge of the magnetic conductive unit 20a, so that the guiding effect of the magnetic conductive unit 20a on the signal magnetic field Bs can be uniformly reflected at the first working unit 11.

[0102] In addition, there are such Figure 1 and Figure 2 As shown, when the magnetic sensor 100 includes at least two magnetically conductive units 20a and at least two working units, the first working unit 11 cooperates with the first magnetically conductive unit 21, and the first working unit 11 is arranged close to the side of the first magnetically conductive unit 21.

[0103] The calibration component 40 is disposed on the first reference line L1. Since the components of the signal magnetic field on both sides of the first reference line L1 are opposite in direction due to the action of the magnetic guiding unit 20a, the magnetic field components in the second direction Z and the opposite direction at the calibration component 40 located on the first reference line L1 can be equal, so the calibration component 40 can only generate output for the excitation magnetic field Br.

[0104] When describing the magnetic sensor 100 later, the first calibration unit 41 will be used as the calibration unit included in the calibration assembly 40. When the calibration assembly 40 includes more calibration units, the other calibration units can be configured with reference to the first calibration unit 41.

[0105] like Figures 5 to 7As shown, the magnetic sensor 100 includes a processing unit 50.

[0106] The processing unit 50 can be used to perform operations on the acquired signals, including but not limited to arithmetic operations, comparisons, and judgments.

[0107] The input of the processing unit 50 is directly or indirectly coupled to a calibration unit (e.g., a first calibration unit 41). The output of the processing unit 50 is used to generate a calibration signal.

[0108] The input terminal of processor 50 is directly coupled to the calibration unit, which can be achieved through a physical structure such as wires. The input terminal of processor 50 is indirectly coupled to the calibration unit, which can be through other components or a medium such as air.

[0109] In one embodiment, the magnetic sensor 100 may include a second amplifier 62. The input terminal of the processor 50 is coupled to the output terminal of the second amplifier 62, and the input terminal of the second amplifier 62 is coupled to a first calibration unit 41. The processor 50 is indirectly coupled to the first calibration unit 41 through the second amplifier 62.

[0110] The second amplifier 62 can be used to amplify the signal output by the first calibration unit 41.

[0111] The processing unit 50 can be configured to generate a calibration signal based on the difference between the second signal and a preset value. The preset value is determined based on a preset magnetic field strength value of the excitation magnetic field.

[0112] When the detected value of the magnetic field strength corresponding to the excitation magnetic field Br in the second signal is not equal to the preset value, it indicates that the detection situation of the magnetic sensor 100 does not match the actual situation. At this time, the magnetic field detection signal can be calibrated according to the difference between the second signal and the preset value.

[0113] For example, when the detected value is less than the preset value, it indicates that the detection result of the magnetic sensor 100 is too small. At this time, the magnetic field detection signal is calibrated and increased.

[0114] For example, when the detected value is greater than the preset value, it indicates that the detection result of the magnetic sensor 100 is too large. At this time, the magnetic field detection signal is calibrated and reduced.

[0115] The magnetic field detection signal, calibration signal, second signal, and the first signal mentioned above and the third signal mentioned below can be voltage signals, current signals or data signals.

[0116] Figure 5 In this embodiment, the processing unit 50 may be configured such that its output is coupled to the input of the first working unit 11. A calibration signal at the output of the processing unit 50 is used to adjust the drive current of the first working unit 11.

[0117] The output of the processing unit 50 can also be coupled to the input of the first calibration unit 41. In this way, the calibration effect can be verified.

[0118] The processing unit 50 can adjust the drive current based on the difference between the detected value of the second signal and a preset value. When the detected value of the second signal is less than the preset value, the processing unit 50 increases the drive current; conversely, it decreases the drive current.

[0119] Figure 5 In this embodiment, the processing unit 50 may be configured such that its output is coupled to the input of the first working unit 11. A calibration signal at the output of the processing unit 50 is used to adjust the driving voltage of the first working unit 11.

[0120] The processing unit 50 can adjust the driving voltage according to the difference between the detected value of the second signal and the preset value. When the detected value of the second signal is less than the preset value, the processing unit 50 increases the driving voltage; conversely, it decreases the driving voltage.

[0121] Figure 6 In this embodiment, the processing unit 50 may be configured as follows: the output of the processing unit 50 is coupled to the first amplifier 61. A calibration signal at the output of the processing unit 50 is used to adjust the amplification factor of the first amplifier 61. The input of the first amplifier 61 is coupled to the output of the first working unit 11. The first amplifier 61 is used to amplify the first signal.

[0122] The processing unit 50 can adjust the amplification factor of the first amplifier 61 according to the difference between the detected value of the second signal and the preset value. When the detected value of the second signal is less than the preset value, the processing unit 50 increases the amplification factor of the first amplifier 61; conversely, it decreases the amplification factor of the first amplifier 61.

[0123] The magnetic sensor 100 may further include a first arithmetic unit 51, the input of which is directly or indirectly coupled to the output of the first working unit 11. Specifically, the first arithmetic unit 51 may be indirectly coupled to the first working unit 11 through a first amplifier 61.

[0124] Figure 7 In this embodiment, the processing unit 50 may be configured as follows: the output of the processing unit 50 is coupled to the first arithmetic unit 51. The calibration signal at the output of the processing unit 50 is used to adjust the arithmetic gain of the first arithmetic unit 51. The input of the first arithmetic unit 51 is directly or indirectly coupled to the output of the first working unit 11.

[0125] The processing unit 50 can adjust the amplification factor of the first arithmetic unit 51 according to the difference between the detected value of the second signal and the preset value. When the detected value of the second signal is less than the preset value, the processing unit 50 increases the amplification factor of the first arithmetic unit 51; conversely, it decreases the amplification factor of the first arithmetic unit 51.

[0126] The first operational unit 51 can be directly or indirectly coupled to the first working unit 11 through the first amplifier 61.

[0127] like Figure 8 and Figure 9 , combined Figure 3 and Figure 4 As shown, the magnetic sensor 100 can be configured as follows: the first working unit 11 includes a Hall unit.

[0128] The first working unit 11 may consist of one or more Hall elements. The Hall elements operate based on the Hall effect. In some embodiments, the first working unit 11 may also include a magnetoresistive element or other components for detecting magnetic fields.

[0129] Figure 8 In one embodiment, the first working unit 11 includes a Hall unit.

[0130] The detection direction of this Hall element can be the second direction Z. This Hall element can be used to detect the magnetic field component of the signal magnetic field Bs along the second direction Z or its opposite direction.

[0131] The Hall element may include a first terminal e1, a second terminal e2, a third terminal e3, and a fourth terminal e4. The first terminal e1 can be used to couple to a power supply terminal, the second terminal e2 can be used to couple to a ground terminal, and the third terminal e3 and the fourth terminal e4 can be used to generate a first signal. The first signal may be the difference between the voltage value at the third terminal e3 and the voltage value at the fourth terminal e4. The first signal is positively correlated with the magnetic field strength of the magnetic field component of the signal magnetic field in the second direction Z.

[0132] When the magnetic field direction of the signal magnetic field Bs at the Hall unit is the second direction Z, if the first terminal e1 is coupled to the power supply terminal and the second terminal e2 is coupled to the ground terminal, then the third terminal e3 generates a high-level output and the fourth terminal e4 generates a low-level output. The voltage value formed is related to the magnetic field component of the signal magnetic field Bs. Therefore, the Hall unit can be used to detect the signal magnetic field.

[0133] In the various embodiments of Hall effect cells provided below, the signals and effects generated by the Hall effect cells based on their connection methods can all refer to this embodiment.

[0134] Figure 9In this embodiment, the first working unit 11 includes a first Hall unit H1 and a second Hall unit H2. The first terminal e11 of the first Hall unit H1 is coupled to the power supply terminal Vd, and the second terminal e12 of the first Hall unit H1 is coupled to the ground terminal GND. The first terminal e21 of the second Hall unit H2 is coupled to the power supply terminal Vd, the second terminal e22 of the second Hall unit H2 is coupled to the ground terminal GND, the third terminal e23 of the second Hall unit H2 is coupled to the third terminal e13 of the first Hall unit H1, and the fourth terminal e24 of the second Hall unit H2 is coupled to the fourth terminal e14 of the first Hall unit H1.

[0135] The fourth terminal e14 of the first Hall unit H1 and the fourth terminal e24 of the second Hall unit H2 are coupled to form a first output node, and the third terminal e13 of the first Hall unit H1 and the third terminal e23 of the second Hall unit H2 are coupled to form a second output node. The first output node and the second output node are used to generate the output of the first signal.

[0136] In other embodiments, the first working unit 11 may also include, for example, four or more Hall units.

[0137] like Figure 10 and Figure 11 , combined Figure 3 and Figure 4 As shown, the magnetic sensor 100 can be configured such that the calibration unit (e.g., the first calibration unit 41) includes a Hall element.

[0138] The calibration unit may consist of one or more Hall elements. Hall elements operate based on the Hall effect. In some embodiments, the calibration unit may also include magnetoresistive elements or other components for detecting magnetic fields.

[0139] Figure 10 In one embodiment, the calibration unit includes a Hall element.

[0140] The detection direction of this Hall element can be the second direction Z. This Hall element can be used to detect the excitation magnetic field Br along the second direction Z or its opposite direction.

[0141] The Hall element may include a first terminal e1, a second terminal e2, a third terminal e3, and a fourth terminal e4. The first terminal e1 can be used to couple to the power supply terminal, the second terminal e2 can be used to couple to the ground terminal, and the third terminal e3 and the fourth terminal e4 can be used to generate a first signal.

[0142] When the magnetic field direction of the signal magnetic field Bs at the Hall unit is the second direction Z, if the first terminal e1 is coupled to the power supply terminal and the second terminal e2 is coupled to the ground terminal, then the third terminal e3 generates a high-level output and the fourth terminal e4 generates a low-level output. The voltage value formed is related to the magnetic field component of the excitation magnetic field Br. Therefore, the Hall unit can be used to generate a calibration signal related to the excitation magnetic field Br.

[0143] The Hall element can be located on the first reference line L1, and the area of ​​the Hall element on both sides of the first reference line L1 can be equal, so that the Hall element does not generate an output for the signal magnetic field Bs.

[0144] Figure 11 In this embodiment, the calibration unit includes a sixth Hall unit H6 and a seventh Hall unit H7. The first terminal e61 of the sixth Hall unit H6 is coupled to the power supply terminal Vd, and the second terminal e62 of the sixth Hall unit H6 is coupled to the ground terminal GND. The first terminal e71 of the seventh Hall unit H7 is coupled to the power supply terminal Vd, the second terminal e72 of the seventh Hall unit H7 is coupled to the ground terminal GND, the third terminal e73 of the seventh Hall unit H7 is coupled to the fourth terminal e64 of the sixth Hall unit H6, and the fourth terminal e74 of the seventh Hall unit H7 is coupled to the third terminal e63 of the sixth Hall unit H6.

[0145] The fourth terminal e64 of the sixth Hall unit H6 and the third terminal e73 of the seventh Hall unit H7 are coupled to form a first reference node, and the third terminal e63 of the sixth Hall unit H6 and the fourth terminal e74 of the seventh Hall unit H7 are coupled to form a second reference node. The first reference node and the second reference node are used to generate the output of the second signal.

[0146] The second signal can be half the difference between the voltage value output by the sixth Hall unit H6 and the voltage value output by the seventh Hall unit H7. The second signal can be positively correlated with the magnetic field strength of the magnetic field component of the excitation magnetic field Br in the second direction Z.

[0147] The excitation magnetic field Br generated by the magnetic field generating unit 30 has a magnetic field direction at the sixth Hall unit H6 that is opposite to the magnetic field direction at the seventh Hall unit 7.

[0148] For example, the excitation magnetic field Br generated by the magnetic field generating unit 30 is along the second direction Z at the sixth Hall unit H6, and the excitation magnetic field Br is along the opposite direction of the second direction Z at the seventh Hall unit H7.

[0149] The magnetic field generating unit 30 can be configured as one unit to generate two sets of magnetic field components in opposite directions. Alternatively, a plurality of magnetic field generating units 30 can be configured, for example, including a first magnetic field generating unit for generating a magnetic field along the second direction Z, and a second magnetic field generating unit for generating a magnetic field in the opposite direction along the second direction Z.

[0150] The sixth Hall element H6 and the seventh Hall element H7 can be disposed on the first reference line. Specifically, the area of ​​the sixth Hall element H6 on both sides of the first reference line L1 in the first direction X and its opposite direction is equal; the area of ​​the seventh Hall element H7 on both sides of the first reference line L1 in the first direction X and its opposite direction is equal.

[0151] Thus, the sixth Hall unit H6 does not generate an output for the signal magnetic field Bs, and the seventh Hall unit H7 does not generate an output for the signal magnetic field Bs. The calibration signals generated by the sixth Hall unit H6 and the seventh Hall unit H7 are independent of the signal magnetic field Bs.

[0152] The sixth Hall unit H6 can be located on the opposite side of the first direction X of the first reference line L1, and the seventh Hall unit H7 can be located on the first direction X of the first reference line L1.

[0153] Thus, the output formed by the sixth Hall unit H6 and the seventh Hall unit H7 through the above connection method is independent of the signal magnetic field Bs.

[0154] Specifically, the distance between the sixth Hall element H6 and the first reference line L1 is equal to the distance between the seventh Hall element H7 and the first reference line L1. The first Hall element H6 and the seventh Hall element H7 are symmetrical with respect to the first reference line L1.

[0155] In other embodiments, the calibration unit may also include, for example, four or more Hall effect units.

[0156] Figures 3 to 13 Several embodiments of one implementation of this utility model are provided. In a preferred embodiment, the magnetic sensor 100 includes two working units, and the magnetically conductive component 20 has one magnetically conductive unit 20a. In describing several embodiments of this implementation, parts similar to other technical solutions will not be repeated, but embodiments of this implementation can be combined with or explained in conjunction with other technical solutions.

[0157] like Figure 3 and Figure 4 The magnetic sensor 100 includes a second working unit 13. The second working unit 13 is used to detect the magnetic field component along the second direction Z to generate a third signal.

[0158] The second working unit 13 can be configured in the same or similar way as the first working unit 11.

[0159] The second signal can be used to calibrate the third signal.

[0160] When the second signal is used to calibrate the first and third signals, the second signal may actually calibrate the magnetic field detection signal determined based on the first and third signals, or other signals used to generate the magnetic field detection signal.

[0161] The first working unit 11 can be located on the opposite side of the first direction X of the first reference line L1. The second working unit 13 can be located on the first direction X side of the first reference line L1.

[0162] When the magnetic field direction of the signal magnetic field Bs is the first direction X, the direction of the magnetic field component of the signal magnetic field Bs at the first working unit 11 is the second direction Z, and the direction of the magnetic field component at the second working unit 13 is the opposite direction of the second direction Z.

[0163] The second working unit 13 can be disposed in the third region A3 of the substrate 800.

[0164] The distance along the first direction X between the center line C2 of the first working unit 11 and the magnetic conductive component 20 can be equal to the distance along the first direction X between the center line C2 of the second working unit 13 and the magnetic conductive component 20.

[0165] Thus, the magnetic field Bs of the signal magnetic field is equal in strength and opposite in direction at the first working unit 11 and the second working unit 13. When the magnetic sensor 100 is set in a scene with a uniform ambient magnetic field, the outputs of the first working unit 11 and the second working unit 13 can be subtracted to retain the signal magnetic field Bs and cancel the influence of the ambient magnetic field.

[0166] The magnetically conductive unit in the magnetically conductive assembly 20 corresponding to the second working unit 13 is at least partially located on the second direction Z side of the second working unit 13. The positional relationship between the magnetically conductive unit and the second working unit 13 can also be such that the projection of the magnetically conductive unit along the second direction Z onto the second working unit 13 at least partially overlaps with the second working unit 13 (particularly its detection surface). In some embodiments, the entire second working unit 13 can be located on the opposite side of the second direction Z of the magnetically conductive unit; the second working unit 13 can completely overlap with the projection of the magnetically conductive unit; and the area of ​​the projection can be larger than the area of ​​the detection surface of the second working unit 13.

[0167] In some embodiments, the first working unit 11 and the second working unit 13 may be symmetrical with respect to the center O2 of the entire magnetically conductive assembly 20. In some embodiments, the first working unit 11 and the second working unit 13 may be symmetrical with respect to the first reference line L1.

[0168] The magnetic field detection signal can be generated by coupling the output terminals of the first working unit 11 and the second working unit 13. For example... Figure 5In the embodiment shown, the first working unit 11 and the second working unit 13 are coupled to form two output nodes, which are used to generate magnetic field detection signals.

[0169] The magnetic sensor 100 can be configured such that the first signal and the third signal are used to generate a magnetic field detection signal. The magnetic field detection signal is obtained by performing a first operation on the first signal and the third signal. The first operation is a superposition operation.

[0170] By superposition operation, when the first working unit 11 and the second working unit 13 are set in different positions, the common mode output of the signal magnetic field Bs at the two different positions can be obtained according to the first signal and the third signal.

[0171] The magnetic sensor 100 can be configured such that the first signal and the third signal are used to generate a magnetic field detection signal. The magnetic field detection signal is obtained by performing a second operation on the first signal and the third signal. The second operation is a subtraction operation.

[0172] By subtraction, when the first working unit 11 and the second working unit 13 are set in different positions, the differential output of the signal magnetic field Bs at the two different positions can be obtained based on the first signal and the third signal.

[0173] The first and second operations can be performed by the first operation unit 51.

[0174] The first arithmetic unit 51 can be directly or indirectly coupled to the output of the second working unit 13.

[0175] The magnetic sensor 100 may also include a third amplifier 63. The first operational unit 51 can be indirectly coupled to the second operational unit 13 through the third amplifier 63.

[0176] The magnetically conductive assembly 20 includes a magnetically conductive unit 20a. The magnetically conductive assembly 20 may have a magnetically conductive unit 20a.

[0177] The first working unit 11 and the second working unit can be disposed on the second reference line L2. The second reference line L2 intersects the center line C2 of the magnetic conductive assembly 30 and extends along the first direction X.

[0178] When the first direction X is perpendicular to the third direction Y, the second reference line L2 is perpendicular to the first reference line L1. The first working unit 11 and the second working unit 13 are located on both sides of the first reference line L1 in the first direction X.

[0179] The calibration component 40 may include a first calibration unit 41. The calibration component 40 may include a first calibration unit 41. The first calibration unit 41 is disposed on the center line C2 of the magnetic conductive component 20.

[0180] Thus, the first working unit 11 and the second working unit 13 are located on both sides of the first calibration unit 41 in the first direction X.

[0181] Figure 14 In other embodiments, the first calibration unit 41 may also be disposed at a location on the first reference line L1 other than the center line C2. For example, the first calibration unit 41 may be disposed on the Y-side of the center line C2. In this embodiment, the portion of the signal magnetic field Bs located on both sides of the first reference line L1 in the first calibration unit 41 has magnetic field components with opposite directions, and the first calibration unit 41 does not generate an output for the signal magnetic field Bs.

[0182] Figure 12 and Figure 13 In the embodiments, the first working unit 11 and the second working unit 13 each include a Hall unit.

[0183] The two Hall effect sensors can detect the magnetic field information of the areas where the two working units are located, so as to obtain common-mode output or differential output, or eliminate the interference of the ambient magnetic field.

[0184] The first working unit 11 includes a third Hall unit H3. The first terminal e31 of the third Hall unit H3 is coupled to the power supply terminal Vd, and the second terminal e32 of the third Hall unit H3 is coupled to the ground terminal GND.

[0185] Combination Figure 3 and Figure 4 The magnetic sensor 200 further includes a second working unit 13, which is used to detect the magnetic field component along the second direction Z to generate a third signal. The first working unit 11 is disposed on the opposite side of the first direction X of the first reference line L1, and the second working unit 13 is disposed on the first direction X side of the first reference line L1. The second working unit 13 can be configured with reference to other embodiments.

[0186] Figure 12 In this embodiment, the magnetic sensor 100 is configured as follows: the second working unit 13 includes a fourth Hall unit H4. The first terminal e41 of the fourth Hall unit H4 is coupled to the power supply terminal Vd, the second terminal e42 of the fourth Hall unit H4 is coupled to the ground terminal GND, the third terminal e43 of the fourth Hall unit H4 is coupled to the fourth terminal e34 of the third Hall unit H3, and the fourth terminal e44 of the fourth Hall unit H4 is coupled to the third terminal e33 of the third Hall unit H3.

[0187] Based on the positional arrangement of the first working unit 11 and the second working unit 13, and the function of the magnetic guiding component 20, the direction of the signal magnetic field Bs at the third Hall unit H3 is the second direction Z, and the direction of the signal magnetic field Bs at the fourth Hall unit H4 is the opposite direction of the second direction Z. Therefore, the fourth terminal e34 of the third Hall unit H3, used to output a high level, is coupled to the third terminal e43 of the fourth Hall unit H4, used to output a high level; the third terminal e33 of the third Hall unit H3, used to output a low level, is coupled to the fourth terminal e44 of the fourth Hall unit H4, used to output a low level. This forms two output nodes for generating the magnetic field detection signal. The magnetic field detection signal is positively correlated with the magnetic field strength of the magnetic field component of the signal magnetic field Bs in the second direction Z; the third Hall unit H3 and the fourth Hall unit H4 do not generate output for the ambient magnetic field along the second direction Z.

[0188] The first working unit 11 and the second working unit 13 may include at least two Hall units.

[0189] Figure 13 In this embodiment, the magnetic sensor 100 is configured as follows: the magnetic sensor 100 includes a first amplifier 61. The output of the first amplifier 61 is used to generate a magnetic field detection signal. The third terminal e33 of the third Hall unit H3 is coupled to the first input terminal of the first amplifier 61, and the fourth terminal e34 of the third Hall unit H3 is coupled to the second input terminal of the first amplifier 61.

[0190] The second working unit 13 includes a fifth Hall unit H5. The first terminal e51 of the fifth Hall unit H5 is coupled to the power supply terminal Vd, the second terminal e52 of the fifth Hall unit H5 is coupled to the ground terminal GND, the third terminal e53 of the fifth Hall unit H5 is coupled to the first input terminal of the third amplifier 63, and the third terminal e53 of the fifth Hall unit H5 is coupled to the second input terminal of the third amplifier 63.

[0191] The magnetic field component of the signal magnetic field Bs at the third Hall unit H3 is oriented along the second direction Z, while the magnetic field component at the fifth Hall unit H5 is oriented in the opposite direction to the second direction Z. The fourth terminal e34 of the third Hall unit H3, used to generate a high-level output, and the third terminal e34, used to generate a low-level output, are respectively coupled to an amplifier to obtain the magnetic field information of the signal magnetic field Bs at the third Hall unit H3. Similarly, the fourth terminal e54 of the fifth Hall unit H5, used to generate a high-level output, and the third terminal e54, used to generate a low-level output, are respectively coupled to an amplifier to obtain the magnetic field information of the signal magnetic field Bs at the fifth Hall unit H5.

[0192] The outputs of the first amplifier 61 and the third amplifier 63 are superimposed to generate a common-mode output related to the sum of the magnetic field strengths of the first Hall unit H1 and the third Hall unit H3. If the outputs are subtracted, a differential output related to the difference in magnetic field strength is generated. The superposition and subtraction operations can be implemented by the first arithmetic unit 51.

[0193] Figure 15 One embodiment of this utility model is provided. In a preferred embodiment, the magnetic sensor 100 includes four working units, the magnetic guiding component 20 has a magnetic guiding unit 20a, and the four working units are disposed in four different directions along the center line of the magnetic guiding unit. In describing several embodiments of this invention, parts similar to other technical solutions will not be repeated, but embodiments of this invention can be combined with or explained in conjunction with other technical solutions.

[0194] like Figure 15 The magnetic sensor 100 includes a fourth working unit 14. The fourth working unit 14 is used to detect the magnetic field component along the second direction Z to generate a fourth signal.

[0195] The magnetic sensor 100 includes a fifth working unit 15. The fifth working unit 15 is used to detect the magnetic field component along the second direction Z to generate a fifth signal.

[0196] The magnetically conductive unit 20a is at least partially located on the second direction Z side of the fourth working unit 14. The projection of the magnetically conductive unit 20a along the second direction Z onto the fourth working unit 14 at least partially overlaps with the fourth working unit 14.

[0197] The magnetically conductive unit 20a is at least partially located on the second direction Z side of the fifth working unit 15. The projection of the magnetically conductive unit 20a along the second direction Z onto the fifth working unit 15 at least partially overlaps with the fifth working unit 15.

[0198] When multiple magnetic conductive units are provided, each magnetic conductive unit can be configured to correspond to a working unit. For example, one magnetic conductive unit is located on the second direction Z side of the fourth working unit 14, and another magnetic conductive unit is located on the second direction Z side of the fifth working unit 15.

[0199] The fourth working unit 14 is located on the third direction Y side of the second reference line L2. The fifth unit 15 is located on the third direction Y side of the second reference line L2.

[0200] At this time, for signal magnetic fields Bs in directions other than the first direction X, the outputs of the fourth working unit 14 and the fifth working unit 15 can be calculated to generate common-mode output, differential output, or eliminate environmental magnetic field interference.

[0201] The distance along the third direction Y between the center line C2 of the fourth working unit 14 and the magnetic conductive unit 20a can be equal to the distance along the third direction Y between the center line C2 of the fifth working unit 15 and the magnetic conductive unit 20a.

[0202] Thus, the magnetic field components of the signal magnetic field Bs at the fourth working unit 14 and the fifth working unit 15 have equal strength and opposite directions.

[0203] The fourth working unit 14 and the fifth working unit 15 can be symmetrical with respect to the second reference line L2.

[0204] The second signal can be used to calibrate the fourth signal, calibrate the fifth signal, or calibrate both the fourth and fifth signals.

[0205] The second signal can be calibrated based on its detected value of the excitation magnetic field and the preset value of the excitation magnetic field. Specifically, it can be used to calibrate the drive current, drive voltage, and amplifier or operational unit coupled to the fourth working unit 14, or to calibrate the drive current, drive voltage, and amplifier or operational unit coupled to the fifth working unit 15.

[0206] The fourth working unit 14 and the fifth working unit 15 may include one or more Hall effect units. Their internal structures may be configured with reference to the first working unit 11 or the second working unit 13.

[0207] Figure 15 The embodiment shown can be used to sense a signal magnetic field Bs at least along a first direction X, a second direction Y and a third direction Z, and in conjunction with the calibration component 40, the sensitivity of the magnetic sensor 100 output with respect to the signal magnetic field Bs can be calibrated in real time.

[0208] Figures 16 to 18 Several embodiments of one implementation of this utility model are provided. In a preferred embodiment, the magnetic sensor 100 includes four working units, the magnetic guiding component 20 has one magnetic guiding unit 20a, and the four working units are disposed on both sides of the center line of the magnetic guiding unit in a first direction and the opposite direction. In describing several embodiments of this implementation, parts similar to other technical solutions will not be repeated, but the embodiments of this implementation can be combined with or explained with other technical solutions.

[0209] like Figure 16 The magnetic sensor 100 includes a sixth working unit 16. The sixth working unit 16 is used to detect the magnetic field component in the second direction Z to generate a sixth signal.

[0210] The magnetically conductive unit 20a is at least partially located on the second direction Z side of the sixth working unit 16. The projection of the magnetically conductive unit 20a along the second direction Z onto the sixth working unit 16 at least partially overlaps with the sixth working unit 16.

[0211] The magnetic sensor 100 includes a seventh working unit 17. The seventh working unit 17 is used to detect the magnetic field component along the second direction Z to generate a seventh signal.

[0212] The magnetically conductive unit 20a is at least partially located on the second direction Z side of the seventh working unit 17. The projection of the magnetically conductive unit 20a along the second direction Z onto the seventh working unit 17 at least partially overlaps with the seventh working unit 17.

[0213] When there are multiple magnetic conductive units, each magnetic conductive unit can be set up to correspond to a working unit.

[0214] The sixth working unit 16 is located on the opposite side of the first direction X of the first reference line L1. The seventh working unit 17 is located on the first direction X side of the first reference line L1.

[0215] At this time, the outputs of the sixth working unit 16 and the seventh working unit 17 can be used to generate common-mode output, differential output, or eliminate environmental magnetic field interference through calculation.

[0216] The distance along the first direction X between the center line C2 of the sixth working unit 16 and the magnetic conductive unit 20a can be equal to the distance along the first direction X between the center line C2 of the seventh working unit 17 and the magnetic conductive unit 20a.

[0217] Thus, the magnetic field components of the signal magnetic field Bs at the sixth working unit 16 and the seventh working unit 17 have equal strength and opposite directions.

[0218] The sixth working unit 16 and the seventh working unit 17 can be symmetrical with respect to the first reference line L1.

[0219] The second signal can be used to calibrate the sixth signal, calibrate the seventh signal, or calibrate both the sixth and seventh signals.

[0220] The second signal can be calibrated based on its detected value of the excitation magnetic field and the preset value of the excitation magnetic field. Specifically, it can be used to calibrate the drive current, drive voltage, amplifier or operational unit coupled to the sixth working unit 16, or to calibrate the drive current, drive voltage, amplifier or operational unit coupled to the seventh working unit 17.

[0221] The first working unit 11 and the sixth working unit 16 can be set at intervals along the third direction Y.

[0222] The first working unit 11 can be set on the third direction Y side of the second reference line L2, and the sixth working unit 16 can be set on the third direction Y side of the second reference line L2.

[0223] The first working unit 11 and the sixth working unit 16 can be symmetrical with respect to the second reference line L2.

[0224] Thus, the first working unit 11 and the sixth working unit 16 can generate contrasting outputs at different positions in the third direction Y. The magnetic field components of the signal magnetic field Bs at the first working unit 11 and the sixth working unit 16 have the same direction.

[0225] The magnetic sensor 100 includes a second working unit 13. The first working unit 11 can be located on the opposite side of the first reference line L1 in the first direction X. The second working unit 13 can be located on the first reference line L1 in the first direction X. The distance along the first direction X between the first working unit 11 and the center line C2 of the magnetically conductive unit 30 can be equal to the distance along the first direction X between the second working unit 13 and the center line C2 of the magnetically conductive unit 30.

[0226] The second working unit 13 can be configured with reference to other embodiments.

[0227] The second working unit 13 and the seventh working unit 17 can be set at intervals along the third direction Y.

[0228] The second working unit 13 can be set on the third direction Y side of the second reference line L2, and the seventh working unit 17 can be set on the third direction Y side of the second reference line L2.

[0229] The second working unit 13 and the seventh working unit 17 can be symmetrical with respect to the second reference line L2.

[0230] Thus, the second working unit 13 and the seventh working unit 17 can generate contrasting outputs at different positions in the third direction Y. The magnetic field components of the signal magnetic field Bs at the second working unit 13 and the seventh working unit 17 have the same direction.

[0231] In this embodiment, the magnetic sensor 100 includes a second working unit 13, a sixth working unit 16, and a seventh working unit 17. The second working unit 13 detects the magnetic field component along the second direction Z to generate a third signal; the sixth working unit 16 detects the magnetic field component along the second direction Z to generate a sixth signal; and the seventh working unit 17 detects the magnetic field component along the second direction Z to generate a seventh signal. The first working unit 11 and the sixth working unit 16 are located on the opposite side of the first direction X of the first reference line L1. The second working unit 13 and the seventh working unit 17 are located on the first direction X side of the first reference line L1.

[0232] The first working unit 11 and the sixth working unit 16 may be disposed in the first region A1 of the substrate 800. The second working unit 13 and the seventh working unit 17 may be disposed in the third region A3 of the substrate 800.

[0233] Under the action of the magnetic conductive component 20, the magnetic field component of the signal magnetic field Bs at the first working unit 11 and the sixth working unit 16 is along the second direction, and the magnetic field component at the second working unit 13 is along the opposite direction of the second direction Z.

[0234] The first working unit 11, the second working unit 13, the sixth working unit 16, and the seventh working unit 17 may include Hall units.

[0235] Figure 17 In the embodiment, the first working unit 11, the second working unit 13, the sixth working unit 16, and the seventh working unit 17 are configured as follows:

[0236] The first working unit 11 includes an eighth Hall unit H8. The first terminal e81 of the eighth Hall unit H8 is coupled to the power supply terminal Vd, and the second terminal e82 of the eighth Hall unit H8 is coupled to the ground terminal GND.

[0237] The sixth working unit 16 includes a ninth Hall unit H9. The first terminal e91 of the ninth Hall unit H9 is coupled to the power supply terminal Vd, and the second terminal e92 of the ninth Hall unit H9 is coupled to the ground terminal GND. The third terminal e93 of the ninth Hall unit H9 is coupled to the third terminal e83 of the eighth Hall unit H8, and the fourth terminal e94 of the ninth Hall unit H9 is coupled to the fourth terminal e84 of the eighth Hall unit H8.

[0238] The second working unit 13 includes a tenth Hall unit H10. The first terminal e101 of the tenth Hall unit H10 is coupled to the power supply terminal Vd, and the second terminal e102 of the tenth Hall unit H10 is coupled to the ground terminal GND.

[0239] The seventh working unit 17 includes an eleventh Hall unit H11. The first terminal e111 of the eleventh Hall unit H11 is coupled to the power supply terminal Vd, and the second terminal e112 of the eleventh Hall unit H11 is coupled to the ground terminal GND. The third terminal e113 of the eleventh Hall unit H11 is coupled to the third terminal e103 of the tenth Hall unit H10, and the fourth terminal e114 of the eleventh Hall unit H11 is coupled to the fourth terminal e104 of the tenth Hall unit H10.

[0240] When the signal magnetic field Bs is along the first direction X, under the action of the magnetic conductive component 20, the third terminal e83 of the eighth Hall unit H8 and the third terminal e93 of the ninth Hall unit H9 are used to generate a low-level output (output V1a after coupling), and the third terminal e103 of the tenth Hall unit H10 and the third terminal e113 of the eleventh Hall unit H11 are used to generate a low-level output (output V2b after coupling). The nodes formed by the two sets are coupled to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0241] The fourth terminal e84 of the eighth Hall unit H8 and the fourth terminal e94 of the ninth Hall unit H9 are used to generate a high-level output (output V1b after coupling). The fourth terminal e104 of the tenth Hall unit H10 and the fourth terminal e114 of the eleventh Hall unit H11 are used to generate a high-level output (output V2a after coupling). The nodes formed by the two sets are coupled to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0242] In addition, the difference between output V1a and output V1b, and the difference between output V2a and output V2b can be calculated and then connected to amplifiers for calculation to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0243] Figure 18 In the embodiment, the first working unit 11, the second working unit 13, the sixth working unit 16, and the seventh working unit 17 are configured as follows:

[0244] The first working unit 11 includes a twelfth Hall unit H12. The first terminal e121 of the twelfth Hall unit H12 is coupled to the power supply terminal Vd, and the second terminal e122 of the twelfth Hall unit H12 is coupled to the ground terminal GND. The second working unit 13 includes a thirteenth Hall unit H13. The first terminal e131 of the thirteenth Hall unit H13 is coupled to the power supply terminal Vd, and the second terminal e132 of the thirteenth Hall unit H13 is coupled to the ground terminal GND. The third terminal e133 of the thirteenth Hall unit H13 is coupled to the fourth terminal e124 of the twelfth Hall unit H12, and the fourth terminal e134 of the thirteenth Hall unit H13 is coupled to the third terminal e123 of the twelfth Hall unit H12.

[0245] The sixth working unit 16 includes a fourteenth Hall unit H14. The first terminal e141 of the fourteenth Hall unit H14 is coupled to the power supply terminal Vd, and the second terminal e142 of the fourteenth Hall unit H14 is coupled to the ground terminal GND. The seventh working unit 17 includes a fifteenth Hall unit H15. The first terminal e151 of the fifteenth Hall unit H15 is coupled to the power supply terminal Vd, the second terminal e152 of the fifteenth Hall unit H15 is coupled to the ground terminal GND, the third terminal e153 of the fifteenth Hall unit H15 is coupled to the fourth terminal e144 of the fourteenth Hall unit H14, and the fourth terminal e154 of the fifteenth Hall unit H15 is coupled to the third terminal e143 of the fourteenth Hall unit H14.

[0246] When the signal magnetic field Bs is along the first direction X, under the action of the magnetic conductive component 20, the fourth terminal e124 of the twelfth Hall unit H12 and the third terminal e133 of the thirteenth Hall unit H13 are used to generate a high-level output (output V2a after coupling), and the fourth terminal e144 of the fourteenth Hall unit H14 and the third terminal e153 of the fifteenth Hall unit H15 are used to generate a high-level output (output V1b after coupling). The nodes formed by the two sets are coupled to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0247] The third terminal e123 of the twelfth Hall unit H12 and the fourth terminal e134 of the thirteenth Hall unit H13 are used to generate a low-level output (output V1a after coupling). The third terminal e143 of the fourteenth Hall unit H14 and the fourth terminal e154 of the fifteenth Hall unit H15 are used to generate a low-level output (output V2b after coupling). The nodes formed by the two sets are coupled to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0248] In addition, the difference between output V1a and output V2a, and the difference between output V1b and output V2b can be calculated and then connected to amplifiers for calculation to obtain a detection signal that is positively correlated with the difference in magnetic field strength between the first region A1 and the third region A3.

[0249] Figure 19 One embodiment of this utility model is provided. In a preferred embodiment, the magnetic sensor 100 includes two calibration units, the magnetically conductive assembly 20 has a magnetically conductive unit 20a, and the two calibration units are disposed on both sides of the center line of the magnetically conductive unit in the third direction and the opposite direction. In describing several embodiments of this embodiment, parts similar to other technical solutions will not be repeated, but embodiments of this embodiment can be combined with or explained in conjunction with other technical solutions.

[0250] like Figure 19The calibration assembly 40 includes a second calibration unit 42. The second calibration unit 42 is disposed on the first reference line L1. The second calibration unit 42 is located on the third Y-side of the center line C2 of the magnetically conductive assembly 20.

[0251] The calibration assembly 40 includes a third calibration unit 43. The third calibration unit 43 is disposed on the first reference line L1. The third calibration unit 43 is located on the side opposite to the third direction Y of the center line C2 of the magnetic conductive assembly 20.

[0252] The second calibration unit 42 and the third calibration unit 43 may be disposed in the second region A2 of the substrate 800. The magnetic sensor 100 also includes a first working unit 11 disposed in the first region A1 and a second working unit 13 disposed in the second region A2.

[0253] The second calibration unit 42 and the third calibration unit 43 do not generate output for the signal magnetic field Bs. Therefore, the interference of the ambient magnetic field can be eliminated by subtracting the output signal of the second calibration unit 42 from the output signal of the third calibration unit 43.

[0254] The excitation magnetic field Br generated by the magnetic field generating unit 30 has opposite directions at the magnetic field components of the second calibration unit 42 and the third calibration unit 43. In this way, while eliminating the influence of the ambient magnetic field by subtraction, the outputs of the excitation magnetic field Br from both calibration units can be retained, thereby generating a calibration signal for at least calibrating the first signal.

[0255] Figures 20 to 22 Several embodiments of one implementation of this utility model are provided. In a preferred embodiment, the magnetic sensor 100 includes two calibration unit groups, the magnetically conductive component 20 has a magnetically conductive unit 20a, and each calibration unit group includes at least two calibration units. The two calibration unit groups are disposed on both sides of the center line of the magnetically conductive unit in the third direction and the opposite direction. In describing several embodiments of this implementation, parts similar to other technical solutions will not be repeated, but the embodiments of this implementation can be combined with or explained with other technical solutions.

[0256] like Figure 20 The calibration assembly 40 includes a first calibration unit group 40A. The first calibration unit group 40A is disposed on the first reference line L1. The first calibration unit group 40A is located on the third Y-side of the center line C2 of the magnetic conductive assembly 20.

[0257] Compared to Figure 19 Implementation method, Figures 20 to 22 The implementation method sets up a calibration unit group at the location of the second calibration unit 42 to obtain more magnetic field information.

[0258] The first calibration unit group 40A includes at least two calibration units.

[0259] The two calibration units are equidistant from the first reference line L1. The two calibration units are located on one side of the first reference line L1 in the first direction X and on the opposite side of the first direction X, respectively.

[0260] The calibration units of the first calibration unit group 40A are symmetrical about the first reference line L1.

[0261] Thus, when the signal magnetic field Bs is along the first direction X, under the action of the magnetic guide component 20, the magnetic field components of the signal magnetic field Bs at the calibration units located on both sides of the first reference line L1 in the first calibration unit group 40A are opposite in direction, and the first calibration unit group 40A can be used to generate an output that is independent of the signal magnetic field Bs.

[0262] The first calibration unit group 40A may include a fourth calibration unit 44 and a fifth calibration unit 45.

[0263] The fourth calibration unit 44 can be disposed on the opposite side of the first direction X of the first reference line L1, and the fifth calibration unit 45 can also be disposed on the first direction X side of the first reference line L1. The fourth calibration unit 44 and the fifth calibration unit 45 can be symmetrical with respect to the first reference line L1.

[0264] The excitation magnetic field Br generated by the magnetic field generating unit 30 has the opposite magnetic field direction at the fourth calibration unit 44 to that at the fifth calibration unit 45. For example, the excitation magnetic field Br is along the second direction Z at the fourth calibration unit 44, and along the opposite direction Z at the fifth calibration unit 45.

[0265] The magnetic field generating unit 30 can be provided as one, or two can be provided respectively corresponding to the fourth calibration unit 44 and the fifth calibration unit 45.

[0266] The calibration assembly 40 includes a second calibration unit group 40B. The second calibration unit group 40B is disposed on the first reference line L1. The second calibration unit group 40B is located on the side opposite to the third direction Y of the center line C2 of the magnetically conductive assembly 20.

[0267] Compared to Figure 19 Implementation method, Figures 20 to 22 The implementation method sets up a calibration unit group at the position of the third calibration unit 43 to obtain more magnetic field information.

[0268] The second calibration unit group 40B includes at least two calibration units.

[0269] The two calibration units are equidistant from the first reference line L1. The two calibration units are located on one side of the first reference line L1 in the first direction X and on the opposite side of the first direction X, respectively.

[0270] The calibration units of the second calibration unit group 40B are symmetrical about the first reference line L1.

[0271] Thus, when the signal magnetic field Bs is along the first direction X, under the action of the magnetic guide component 20, the second calibration unit group 40B can be used to generate an output that is independent of the signal magnetic field Bs.

[0272] The second calibration unit group 40B may include a sixth calibration unit 46 and a seventh calibration unit 47.

[0273] The excitation magnetic field Br generated by the magnetic field generating unit 30 has the opposite magnetic field direction at the sixth calibration unit 46 to that at the seventh calibration unit 47. For example, the excitation magnetic field Br is along the second direction Z at the seventh calibration unit 47, and along the opposite direction Z at the sixth calibration unit 46.

[0274] The magnetic field generating unit 30 can be provided as one unit, or two units can be provided to correspond to the sixth calibration unit 46 and the seventh calibration unit 47 respectively.

[0275] When the output corresponding to the Z-direction magnetic field component generated by the magnetically conductive component 20 on the signal magnetic field Bs is defined as Vbs, the output corresponding to the excitation magnetic field is defined as Vbr, and the output corresponding to the uniform environmental magnetic field is defined as Vco, then the fourth calibration unit 44 can generate the output V44 = +Vbs + Vbr + Vco, the fifth calibration unit 45 can generate the output V45 = -Vbs - Vbr + Vco, the sixth calibration unit 46 can generate the output V46 = +Vbs - Vbr + Vco, and the seventh calibration unit 47 can generate the output V47 = -Vbs + Vbr + Vco. The four calibration units, through connection or operation, can generate the output Vr = (V44 - V45) / 2 - (V46 - V47) / 2 = 2Vbr. Thus, the output of the calibration component 40 is only related to the excitation magnetic field Br and can be used to calibrate the magnetic field detection signal.

[0276] Furthermore, the difference between the output of the fourth calibration unit 44 and the output of the sixth calibration unit 46, or the difference between the output of the fifth calibration unit 45 and the seventh calibration unit 47, can simultaneously eliminate the influence of the signal magnetic field Bs and the ambient magnetic field. To further eliminate gradient errors in different location regions, the above two differences can be subtracted or summed to eliminate the influence of gradient errors.

[0277] The first calibration unit group 40A and the second calibration unit group 40B may include Hall effect cells. For example, the fourth calibration unit 44, the fifth calibration unit 45, the sixth calibration unit 46, and the seventh calibration unit 47 may include Hall effect cells. Each calibration unit may include one or more Hall effect cells.

[0278] Combination Figures 20 to 22The first calibration unit group 40A includes a sixteenth Hall unit H16; the fourth calibration unit 44 includes a sixteenth Hall unit H16. The sixteenth Hall unit H16 is located on the opposite side of the first direction X of the first reference line L1.

[0279] The first calibration unit group 40A includes the seventeenth Hall unit H17; the fifth calibration unit 45 includes the seventeenth Hall unit H17. The seventeenth Hall unit H17 is located on the first direction X side of the first reference line L1.

[0280] The distance from the sixteenth Hall element H16 to the first reference line L1 is equal to the distance from the seventeenth Hall element H17 to the first reference line L1.

[0281] The sixteenth Hall element H16 and the seventeenth Hall element H17 are symmetrical about the first reference line L1.

[0282] The second calibration unit group 40B includes the eighteenth Hall unit H18; the sixth calibration unit 46 includes the eighteenth Hall unit H18. The eighteenth Hall unit H18 is located on the opposite side of the first direction X of the first reference line L1.

[0283] The second calibration unit group 40B includes a nineteenth Hall unit H19; the seventh calibration unit 47 includes a nineteenth Hall unit H19. The nineteenth Hall unit H19 is located on the first direction X side of the first reference line L1.

[0284] The distance from the eighteenth Hall element H18 to the first reference line L1 is equal to the distance from the nineteenth Hall element H19 to the first reference line L1.

[0285] The eighteenth Hall element H18 and the nineteenth Hall element H19 are symmetrical about the first reference line L1.

[0286] Figure 21 In the embodiment, the first calibration unit group 40A and the second calibration unit group 40B are configured as follows: the first terminal e161 of the sixteenth Hall unit H16 is coupled to the power supply terminal Vd, and the second terminal e162 of the sixteenth Hall unit H16 is coupled to the ground terminal GND. The first terminal e171 of the seventeenth Hall unit H17 is coupled to the power supply terminal Vd, and the second terminal e172 of the seventeenth Hall unit H17 is coupled to the ground terminal GND. The third terminal e173 of the seventeenth Hall unit H17 is coupled to the fourth terminal e164 of the sixteenth Hall unit H16, and the fourth terminal e174 of the seventeenth Hall unit H17 is coupled to the third terminal e163 of the sixteenth Hall unit H16.

[0287] The direction of the excitation magnetic field 30 generated by the magnetic field generating unit 30 at the sixteenth Hall unit H16 is opposite to the direction of the magnetic field at the seventeenth Hall unit H17.

[0288] Thus, the difference between the output V2a formed by coupling the third terminal e163 of the sixteenth Hall unit H16 and the fourth terminal e174 of the seventeenth Hall unit H17 and the output V1a formed by coupling the fourth terminal e164 of the sixteenth Hall unit H16 and the third terminal e173 of the seventeenth Hall unit H17 is: V2a-V1a=Vbs+Vbr, which can eliminate the influence of the ambient magnetic field.

[0289] The first terminal e181 of the eighteenth Hall unit H18 is coupled to the power supply terminal Vd, and the second terminal e182 of the eighteenth Hall unit H18 is coupled to the ground terminal GND. The first terminal e191 of the nineteenth Hall unit H19 is coupled to the power supply terminal Vd, and the second terminal e192 of the nineteenth Hall unit H19 is coupled to the ground terminal GND. The third terminal e193 of the nineteenth Hall unit H19 is coupled to the fourth terminal e184 of the eighteenth Hall unit H18, and the fourth terminal e194 of the nineteenth Hall unit H19 is coupled to the third terminal e183 of the eighteenth Hall unit H18.

[0290] The direction of the excitation magnetic field 30 generated by the magnetic field generating unit 30 at the eighteenth Hall unit H18 is opposite to the direction of the magnetic field at the nineteenth Hall unit H19.

[0291] Thus, the difference between the output V2b formed by coupling the fourth terminal e184 of the eighteenth Hall unit H18 and the third terminal e193 of the nineteenth Hall unit H19 and the output V1b formed by coupling the third terminal e183 of the eighteenth Hall unit H18 and the fourth terminal e194 of the nineteenth Hall unit H19 is: V2b-V1b=Vbs-Vbr, which can eliminate the influence of the ambient magnetic field.

[0292] Using (V2a-V1a)-(V2b-V1b)=2Vbr as the output, the influence of the ambient magnetic field and the signal magnetic field Bs can be eliminated simultaneously, and a calibration signal for calibration can be obtained.

[0293] Figure 22 In the embodiment, the first calibration unit group 40A and the second calibration unit group 40B are configured as follows: the first terminal e161 of the sixteenth Hall unit H16 is coupled to the power supply terminal Vd, and the second terminal e162 of the sixteenth Hall unit H16 is coupled to the ground terminal GND. The first terminal e181 of the eighteenth Hall unit H18 is coupled to the power supply terminal Vd, and the second terminal e182 of the eighteenth Hall unit H18 is coupled to the ground terminal GND. The third terminal e183 of the eighteenth Hall unit H18 is coupled to the fourth terminal e164 of the sixteenth Hall unit H16, and the fourth terminal e184 of the eighteenth Hall unit H18 is coupled to the third terminal e163 of the sixteenth Hall unit H16.

[0294] The direction of the excitation magnetic field 30 generated by the magnetic field generating unit 30 at the sixteenth Hall unit H16 is opposite to the direction of the magnetic field at the eighteenth Hall unit H18.

[0295] Thus, the difference between the output V2a formed by coupling the third terminal e163 of the sixteenth Hall unit H16 and the fourth terminal e184 of the eighteenth Hall unit H18 and the output V1a formed by coupling the fourth terminal e164 of the sixteenth Hall unit H16 and the third terminal e183 of the eighteenth Hall unit H18 is: V2a-V1a=+Vbr, which can eliminate the influence of environmental magnetic field and signal magnetic field.

[0296] The first terminal e171 of the seventeenth Hall unit H17 is coupled to the power supply terminal Vd, and the second terminal e172 of the seventeenth Hall unit H17 is coupled to the ground terminal GND. The first terminal e191 of the nineteenth Hall unit H19 is coupled to the power supply terminal Vd, and the second terminal e192 of the nineteenth Hall unit H19 is coupled to the ground terminal GND. The third terminal e193 of the nineteenth Hall unit H19 is coupled to the fourth terminal e174 of the seventeenth Hall unit H17, and the fourth terminal e194 of the nineteenth Hall unit H19 is coupled to the third terminal e173 of the seventeenth Hall unit H17.

[0297] The direction of the excitation magnetic field 30 generated by the magnetic field generating unit 30 at the seventeenth Hall unit H17 is opposite to the direction of the magnetic field at the nineteenth Hall unit H19.

[0298] Thus, the difference between the output V2b formed by coupling the third terminal e173 of the seventeenth Hall unit H17 and the fourth terminal e194 of the nineteenth Hall unit H19 and the output V1b formed by coupling the fourth terminal e174 of the seventeenth Hall unit H17 and the third terminal e193 of the nineteenth Hall unit H19 is: V2b-V1b=+Vbr, which can eliminate the influence of the ambient magnetic field and the signal magnetic field.

[0299] Using (V2a-V1a)+(V2b-V1b)=2Vbr as the output, the calibration signal used for calibration can be obtained.

[0300] The first calibration unit group 40A and the second calibration unit group 40B can be disposed in the second region A2 of the substrate 800. The magnetic sensor 100 also includes a first working unit 11 disposed in the first region A1 and a second working unit 13 disposed in the second region A2.

[0301] Figure 1 , Figure 2 , Figure 23 and Figure 24One embodiment of this utility model is provided. In a preferred embodiment, the magnetic sensor 100 includes two working units, and the magnetic conductive component 20 has at least two magnetic conductive units. In describing several embodiments of this invention, parts similar to other technical solutions will not be repeated, but embodiments of this invention can be combined with or explained in conjunction with other technical solutions.

[0302] like Figure 1 , Figure 2 , Figure 23 and Figure 24 The magnetically conductive assembly 20 includes at least two magnetically conductive units. The magnetically conductive assembly 20 may include a first magnetically conductive unit 21 and a second magnetically conductive unit 22.

[0303] The magnetic sensor 200 also includes a second working unit 13, which is used to detect the magnetic field component along the second direction Z to generate a third signal. The first working unit 11 is disposed on the opposite side of the first reference line L1 in the first direction X, and the second working unit 13 is disposed on the first reference line L1 in the first direction X. The distance along the first direction X between the first working unit 11 and the center line C2 of the magnetically conductive unit 30 can be equal to the distance along the first direction X between the second working unit 13 and the center line C2 of the magnetically conductive unit 30.

[0304] In one embodiment, the regions where the first working unit 11 and the second working unit 13 are located are symmetrical with respect to the center line C2 of the magnetic conductive component 20.

[0305] The centerline C2 of the magnetically conductive assembly 20 is a reference line drawn along the second direction Z through the center O2 of the entire magnetically conductive assembly 20. The center O2 can be the geometric center, center of gravity, or centroid of the entire region where the first magnetically conductive unit 21 and the second magnetically conductive unit 22 are located; when the first magnetically conductive unit 21 and the second magnetically conductive unit 22 are symmetrical about the center O2, the center O2 is the center of symmetry of the magnetically conductive units in the magnetically conductive assembly 20.

[0306] At least a portion of the first magnetically conductive unit 21 may be located on the second direction Z side of the first working unit 11. The projection of the first magnetically conductive unit 21 along the second direction Z onto the first working unit 11 at least partially overlaps with the first working unit 11.

[0307] The first magnetic conductive unit 21 is positioned close to the first working unit 11.

[0308] At least a portion of the second magnetically conductive unit 22 may be located on the second direction Z side of the second working unit 13. The projection of the second magnetically conductive unit 22 along the second direction Z onto the second working unit 13 at least partially overlaps with the second working unit 13.

[0309] The second magnetic conductive unit 22 is positioned close to the second working unit 13.

[0310] The calibration assembly 40 may include an eighth calibration unit 48. The eighth calibration unit 48 is disposed on the center line C2 of the magnetically conductive assembly 20.

[0311] When two magnetically conductive units are arranged along the first direction X, the area of ​​the substrate 800 in the first direction X can be divided into a first region A1, a second region A2, a third region A3, another first region A1, another second region A2, and another third region A3 arranged in sequence.

[0312] The first working unit 11 is located in the third region A3, the second working unit 13 is located in the first region A1, and the calibration component 40 is located in the second region A2.

[0313] When the signal magnetic field Bs is along the first direction X, under the action of the magnetic conductive component 20, the magnetic field component of the signal magnetic field Bs in the first region A1 is along the second direction Z, the magnetic field component of the signal magnetic field Bs in the third region A3 is along the opposite direction of the second direction Z, and the magnetic field component of the signal magnetic field Bs in the second region A2 includes components along the second direction Z and its opposite direction.

[0314] Thus, the working units located in the first region A1 and the third region A3 can be used to detect the signal magnetic field Bs, and the calibration component 40 located in the second region A2 can be used to generate a signal for calibration.

[0315] Figure 25 One embodiment of this utility model is provided. In a preferred embodiment, the magnetic sensor 100 includes at least four working units, and the magnetic conductive component 20 has at least four magnetic conductive units. In describing several embodiments of this invention, parts similar to other technical solutions will not be repeated, but embodiments of this invention can be combined with or explained in conjunction with other technical solutions.

[0316] like Figure 25 The magnetic sensor 100 includes a second working unit 13. The second working unit 13 is used to detect the magnetic field component along the second direction Z to generate a third signal.

[0317] The magnetic sensor 100 includes an eighth working unit 18. The eighth working unit 18 is used to detect the magnetic field component along the second direction Z to generate an eighth signal.

[0318] The magnetic sensor 100 includes a ninth working unit 19. The ninth working unit 19 is used to detect the magnetic field component along the second direction Z to generate a ninth signal.

[0319] The first working unit 11, the second working unit 13, the eighth working unit 18, and the ninth working unit 19 can be located in different directions along the center line C2 of the magnetically conductive assembly 20. The distances between the first working unit 11, the second working unit 13, the eighth working unit 18, and the ninth working unit 19 and the center line C2 of the magnetically conductive assembly 20 can be equal.

[0320] In one embodiment, the regions where the first working unit 11, the second working unit 13, the eighth working unit 18, and the ninth working unit 19 are located are symmetrical with respect to the center line C2 of the magnetic conductive component 20.

[0321] The magnetic conductive assembly 20 may include a third magnetic conductive unit 23, a fourth magnetic conductive unit 24, a fifth magnetic conductive unit 25, and a sixth magnetic conductive unit 26.

[0322] The centerline C2 of the magnetically conductive assembly 20 is a reference line along the second direction Z, passing through the center O2 of the entire magnetically conductive assembly 20. The center O2 can be the geometric center, centroid, or center of mass of the region where the third magnetically conductive unit 23, the fourth magnetically conductive unit 24, the fifth magnetically conductive unit 25, and the sixth magnetically conductive unit 26 are located. When the third magnetically conductive unit 23, the fourth magnetically conductive unit 24, the fifth magnetically conductive unit 25, and the sixth magnetically conductive unit 26 are symmetrical about the center O2, the center O2 is the center of symmetry of the magnetically conductive units in the magnetically conductive assembly 20.

[0323] At least a portion of the third magnetically conductive unit 23 may be located on the second direction Z side of the first working unit 11. The projection of the third magnetically conductive unit 23 along the second direction Z onto the first working unit 11 at least partially overlaps with the first working unit 11.

[0324] The third magnetic conductive unit 23 is positioned close to the first working unit 11.

[0325] At least a portion of the fourth magnetically conductive unit 24 may be located on the second direction Z side of the second working unit 13. The projection of the fourth magnetically conductive unit 24 along the second direction Z onto the second working unit 13 at least partially overlaps with the second working unit 13.

[0326] The fourth magnetic conductive unit 24 is positioned close to the second working unit 13.

[0327] At least a portion of the fifth magnetically conductive unit 25 may be located on the second direction Z side of the eighth working unit 18. The projection of the fifth magnetically conductive unit 25 along the second direction Z onto the eighth working unit 18 at least partially overlaps with the eighth working unit 18.

[0328] The fifth magnetic conductive unit 25 is positioned close to the eighth working unit 18.

[0329] At least a portion of the sixth magnetically conductive unit 26 may be located on the second direction Z side of the ninth working unit 19. The projection of the sixth magnetically conductive unit 26 along the second direction Z onto the ninth working unit 19 at least partially overlaps with the ninth working unit 19.

[0330] The sixth magnetic conductive unit 26 is positioned close to the ninth working unit 19.

[0331] The calibration assembly 40 may include a ninth calibration unit 49. The ninth calibration unit 49 is disposed on the centerline C2 of the magnetically conductive assembly 20.

[0332] Reference Figure 1 , Figure 2 , Figure 23 and Figure 24 As described in the embodiment, the multiple magnetic conductive units in this embodiment can divide the substrate 800 into multiple first regions A1, second regions A2 and third regions A3. The working unit is disposed in the first region A1 or the third region A3, and the calibration unit is disposed in the second region A2.

[0333] Additionally, in any of the above embodiments and examples, at least one of the following configurations may also be included.

[0334] The magnetic field generating unit 30 can be configured as at least one coil to generate a magnetic field by passing current through the coil.

[0335] The magnetic field generating unit 30 can be configured as at least one magnet or other component capable of generating a stable magnetic field.

[0336] In summary, the magnetic sensor and current detection device provided by this utility model, in terms of sensitivity, through the cooperation of the magnetic conductive component and the first working unit, enables the first signal to have high sensitivity to the magnetic field of the signal to be detected. At the same time, the second signal can calibrate the first signal without loss during the calibration process, thus improving the overall sensitivity of the magnetic sensor. In terms of bandwidth, based on the position setting of the calibration component, the components of the magnetic field of the signal to be detected at the calibration component cancel each other out, so that the calibration component basically does not generate output for the magnetic field of the signal to be detected. Thus, there is no need to perform additional calculations on the first and second signals to cancel out the magnetic field components, which improves the bandwidth of the magnetic sensor to a certain extent.

[0337] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0338] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A magnetic sensor, characterized in that, A magnetic sensor is used to detect a signal magnetic field, the signal magnetic field including a magnetic field component along a first direction, the magnetic sensor comprising: The first working unit is used to detect the magnetic field component along the second direction to generate a first signal; A magnetically conductive assembly includes at least one magnetically conductive unit, which is at least partially located on one side of the second direction of the first working unit; Magnetic field generating unit, used to generate excitation magnetic field; The calibration assembly includes at least one calibration unit, which is used to detect an excitation magnetic field to generate a second signal, and the second signal is used to calibrate the first signal. The calibration component is disposed on a first reference line, which intersects with the center line of the magnetic conductive component and extends along a third direction. The center line passes through the center of the entire magnetic conductive component and extends along a second direction. The first direction, the second direction, and the third direction are set at angles to each other.

2. The magnetic sensor according to claim 1, characterized in that, The first direction, the second direction, and the third direction are perpendicular to each other.

3. The magnetic sensor according to claim 1, characterized in that, Also includes: A processing unit, whose input is directly or indirectly coupled to the calibration unit, and whose output is used to generate a calibration signal, is configured according to one of the following: A calibration signal is generated based on the difference between the second signal and the preset value, whereby the preset value is determined based on the preset magnetic field strength value of the excitation magnetic field. The output terminal of the processing unit is coupled to the input terminal of the first working unit and is used to adjust the drive current of the first working unit. The output terminal of the processing unit is coupled to the input terminal of the first working unit and is used to adjust the driving voltage of the first working unit; The output of the processing unit is coupled to the first amplifier and is used to adjust the amplification factor of the first amplifier. The input of the first amplifier is coupled to the output of the first working unit and is used to amplify the first signal. The output of the processing unit is coupled to the first arithmetic unit and is used to adjust the arithmetic gain of the first arithmetic unit; the input of the first arithmetic unit is directly or indirectly coupled to the output of the first working unit.

4. The magnetic sensor according to claim 1, characterized in that, Also includes: The second working unit is used to detect the magnetic field component along the second direction to generate a third signal; The first working unit is located on the opposite side of the first direction of the first reference line, and the second working unit is located on the first side of the first direction of the first reference line. Along the first direction, the distance between the center line of the first working unit and the center line of the magnetic conductive unit is equal to the distance between the center line of the second working unit and the magnetic conductive unit; The second signal is used to calibrate the third signal.

5. The magnetic sensor according to claim 4, characterized in that, The magnetic sensor is configured according to one of the following: The first signal and the third signal are used to generate a magnetic field detection signal; the magnetic field detection signal is obtained by performing a first operation on the first signal and the third signal, which is a superposition operation; The first and third signals are used to generate the magnetic field detection signal; the magnetic field detection signal is obtained by performing a second operation on the first and third signals, which is a subtraction operation. The magnetically conductive component has a magnetically conductive unit; the first working unit and the second working unit are disposed on the second reference line, the second reference line intersects the center line of the magnetically conductive component and extends along the first direction; The magnetically conductive component has a magnetically conductive unit; the magnetic sensor includes a fourth working unit and a fifth working unit. The fourth working unit is used to detect the magnetic field component along the second direction to generate a fourth signal, and the fifth working unit is used to detect the magnetic field component along the second direction to generate a fifth signal. The fourth working unit is located on the third direction side of the second reference line, and the fifth unit is located on the opposite direction side of the third direction of the second reference line. Along the third direction, the distance between the center line of the fourth working unit and the magnetically conductive unit is equal to the distance between the center line of the fifth working unit and the magnetically conductive unit. The second signal is used to calibrate the fourth signal and / or the fifth signal. The magnetic sensor includes a sixth working unit and a seventh working unit. The sixth working unit is used to detect the magnetic field component along the second direction to generate a sixth signal, and the seventh working unit is used to detect the magnetic field component along the second direction to generate a seventh signal. The sixth working unit is located on the opposite side of the first direction of the first reference line, and the seventh working unit is located on one side of the first direction of the first reference line. Along the first direction, the distance between the center line of the sixth working unit and the magnetically conductive unit is equal to the distance between the center line of the seventh working unit and the magnetically conductive unit. The second signal is used to calibrate the sixth signal and / or the seventh signal. The first and sixth working units are spaced apart along the third direction, and the second and seventh working units are spaced apart along the third direction.

6. The magnetic sensor according to claim 1, characterized in that, The magnetically conductive assembly has a magnetically conductive unit; the calibration assembly is configured according to one of the following: The calibration assembly includes a first calibration unit, which is disposed on the center line of the magnetically conductive assembly; The calibration assembly includes a second calibration unit and a third calibration unit. The second calibration unit is disposed on the first reference line and is located on the third-direction side of the center line of the magnetically conductive assembly. The third calibration unit is disposed on the first reference line and is located on the third-direction opposite side of the center line of the magnetically conductive assembly. The calibration assembly includes a first calibration unit group and a second calibration unit group. The first calibration unit group is disposed on the first reference line and located on the third-direction side of the centerline of the magnetically conductive assembly. The second calibration unit group is disposed on the first reference line and located on the third-direction opposite side of the centerline of the magnetically conductive assembly. The first calibration unit group includes at least two calibration units, and the calibration units of the first calibration unit group are symmetrical about the first reference line. The second calibration unit group includes at least two calibration units, and the calibration units of the second calibration unit group are symmetrical about the first reference line.

7. The magnetic sensor according to claim 1, characterized in that, The magnetic conductive assembly includes a first magnetic conductive unit and a second magnetic conductive unit; The magnetic sensor also includes a second working unit for detecting the magnetic field component along the second direction to generate a third signal. The regions where the first and second working units are located are symmetrical with respect to the centerline of the magnetically conductive component. The first magnetically conductive unit is at least partially located on one side of the second direction of the first working unit, and the second magnetically conductive unit is at least partially located on the second side of the second working unit. The calibration assembly includes an eighth calibration unit, which is disposed on the center line of the magnetically conductive assembly.

8. The magnetic sensor according to claim 1, characterized in that, The magnetically conductive assembly includes a third magnetically conductive unit, a fourth magnetically conductive unit, a fifth magnetically conductive unit, and a sixth magnetically conductive unit; The magnetic sensor includes a second working unit, an eighth working unit, and a ninth working unit. The second working unit is used to detect the magnetic field component along the second direction to generate a third signal. The eighth working unit is used to detect the magnetic field component along the second direction to generate an eighth signal. The ninth working unit is used to detect the magnetic field component along the second direction to generate a ninth signal. The areas where the first working unit, the second working unit, the eighth working unit, and the ninth working unit are located are symmetrical with respect to the centerline of the magnetically conductive component. The third magnetically conductive unit is at least partially located on the second direction side of the first working unit, the fourth magnetically conductive unit is at least partially located on the second direction side of the second working unit, the fifth magnetically conductive unit is at least partially located on the second direction side of the eighth working unit, and the sixth magnetically conductive unit is at least partially located on the second direction side of the ninth working unit. The calibration assembly includes a ninth calibration unit, which is located on the center line of the magnetically conductive assembly.

9. The magnetic sensor according to claim 1, characterized in that, include: A substrate, a first working unit and a calibration unit are disposed on a first surface of the substrate, and a magnetic field generating unit is disposed on a second side of the first surface. An insulating layer is disposed on one side of the first surface of the substrate in a second direction, and a magnetically conductive unit is disposed on one side of the insulating layer in a second direction. The magnetic conductive unit is a regular polygon, and the first working unit is positioned close to the edge of the magnetic conductive unit that cooperates with the first working unit.

10. The magnetic sensor according to claim 1, characterized in that, The magnetic sensor is configured according to at least one of the following: The first working unit includes a Hall element; The calibration unit includes a Hall effect sensor.

11. The magnetic sensor according to claim 10, characterized in that, The first working unit includes: The first Hall element has its first end coupled to the power supply terminal and its second end coupled to the ground terminal; The second Hall element has a first end coupled to the power supply terminal, a second end coupled to the ground terminal, a third end coupled to the third end of the first Hall element, and a fourth end coupled to the fourth end of the first Hall element.

12. The magnetic sensor according to claim 10, characterized in that, The first working unit includes: The third Hall element has its first end coupled to the power supply terminal and its second end coupled to the ground terminal. The magnetic sensor further includes a second working unit for detecting the magnetic field component along the second direction to generate a third signal; the first working unit is disposed on the opposite side of the first direction of the first reference line, and the second working unit is disposed on one side of the first direction of the first reference line; the magnetic sensor is configured according to one of the following: The second working unit includes a fourth Hall unit, whose first end is coupled to the power supply end, its second end is coupled to the ground end, its third end is coupled to the fourth end of the third Hall unit, and its fourth end is coupled to the third end of the third Hall unit. The magnetic sensor includes a first amplifier and a third amplifier. The outputs of the first amplifier and the third amplifier are used to generate a magnetic field detection signal. The third terminal of the third Hall unit is coupled to the first input terminal of the first amplifier, and the fourth terminal of the third Hall unit is coupled to the second input terminal of the first amplifier. The second working unit includes a fifth Hall unit, whose first terminal is coupled to the power supply terminal, its second terminal is coupled to the ground terminal, its third terminal is coupled to the first input terminal of the third amplifier, and its fourth terminal is coupled to the second input terminal of the third amplifier.

13. The magnetic sensor according to claim 10, characterized in that, The calibration unit includes: The sixth Hall element has its first end coupled to the power supply terminal and its second end coupled to the ground terminal. The seventh Hall unit has its first end coupled to the power supply terminal, its second end coupled to the ground terminal, its third end coupled to the fourth end of the sixth Hall unit, and its fourth end coupled to the third end of the sixth Hall unit. The sixth Hall element is located on the opposite side of the first direction of the first reference line, and the seventh Hall element is located on one side of the first direction of the first reference line. The excitation magnetic field generated by the magnetic field generating unit has opposite directions at the sixth Hall unit and the seventh Hall unit.

14. The magnetic sensor according to claim 10, characterized in that, The magnetic sensor includes a second working unit, a sixth working unit, and a seventh working unit. The second working unit is used to detect the magnetic field component along the second direction to generate a third signal, the sixth working unit is used to detect the magnetic field component along the second direction to generate a sixth signal, and the seventh working unit is used to detect the magnetic field component along the second direction to generate a seventh signal. The first working unit and the sixth working unit are disposed on the opposite side of the first direction of the first reference line, and the second working unit and the seventh working unit are disposed on the first direction side of the first reference line. The first working unit, the second working unit, the sixth working unit, and the seventh working unit are configured according to one of the following: The first working unit includes an eighth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal; the sixth working unit includes a ninth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal; whose third end is coupled to the third end of the eighth Hall unit and whose fourth end is coupled to the fourth end of the eighth Hall unit; the second working unit includes a tenth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal; the seventh working unit includes an eleventh Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal; whose third end is coupled to the third end of the tenth Hall unit and whose fourth end is coupled to the fourth end of the tenth Hall unit. The first working unit includes a twelfth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal. The second working unit includes a thirteenth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal. Its third end is coupled to the fourth end of the twelfth Hall unit, and its fourth end is coupled to the third end of the twelfth Hall unit. The sixth working unit includes a fourteenth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal. The seventh working unit includes a fifteenth Hall unit, whose first end is coupled to a power supply terminal and whose second end is coupled to a ground terminal. Its third end is coupled to the fourth end of the fourteenth Hall unit, and its fourth end is coupled to the third end of the fourteenth Hall unit.

15. The magnetic sensor according to claim 10, characterized in that, The calibration assembly includes a first calibration unit group and a second calibration unit group. The first calibration unit group is disposed on the first reference line and located on the third-direction side of the center line of the magnetically conductive assembly. The second calibration unit group is disposed on the first reference line and located on the third-direction opposite side of the center line of the magnetically conductive assembly. The first calibration unit group includes a sixteenth Hall unit and a seventeenth Hall unit. The sixteenth Hall unit is located on the opposite side of the first direction of the first reference line, and the seventeenth Hall unit is located on the first side of the first reference line. The second calibration unit group includes an eighteenth Hall unit and a nineteenth Hall unit. The eighteenth Hall unit is located on the opposite side of the first direction of the first reference line, and the nineteenth Hall unit is located on the first side of the first reference line. The first calibration unit group and the second calibration unit group are configured according to one of the following: The first end of the sixteenth Hall unit is coupled to the power supply terminal, the second end of the sixteenth Hall unit is coupled to the ground terminal, the first end of the seventeenth Hall unit is coupled to the power supply terminal, the second end of the seventeenth Hall unit is coupled to the ground terminal, the third end of the seventeenth Hall unit is coupled to the fourth end of the sixteenth Hall unit, and the fourth end of the seventeenth Hall unit is coupled to the third end of the sixteenth Hall unit. The excitation magnetic field generated by the magnetic field generating unit has opposite directions at the sixteenth Hall unit and the seventeenth Hall unit; the first end of the eighteenth Hall unit is coupled to the power supply terminal, the second end of the eighteenth Hall unit is coupled to the ground terminal, the first end of the nineteenth Hall unit is coupled to the power supply terminal, the second end of the nineteenth Hall unit is coupled to the ground terminal, the third end of the nineteenth Hall unit is coupled to the fourth end of the eighteenth Hall unit, and the fourth end of the nineteenth Hall unit is coupled to the third end of the eighteenth Hall unit. The excitation magnetic field generated by the magnetic field generating unit has opposite directions at the eighteenth Hall unit and the nineteenth Hall unit; The first end of the sixteenth Hall unit is coupled to the power supply terminal, the second end of the sixteenth Hall unit is coupled to the ground terminal, the first end of the eighteenth Hall unit is coupled to the power supply terminal, the second end of the eighteenth Hall unit is coupled to the ground terminal, the third end of the eighteenth Hall unit is coupled to the fourth end of the sixteenth Hall unit, and the fourth end of the eighteenth Hall unit is coupled to the third end of the sixteenth Hall unit. The excitation magnetic field generated by the magnetic field generating unit has opposite directions at the sixteenth Hall unit and the eighteenth Hall unit; the first end of the seventeenth Hall unit is coupled to the power supply terminal, the second end of the seventeenth Hall unit is coupled to the ground terminal, the first end of the nineteenth Hall unit is coupled to the power supply terminal, the second end of the nineteenth Hall unit is coupled to the ground terminal, the third end of the nineteenth Hall unit is coupled to the fourth end of the seventeenth Hall unit, and the fourth end of the nineteenth Hall unit is coupled to the third end of the seventeenth Hall unit. The excitation magnetic field generated by the magnetic field generating unit has opposite directions at the seventeenth Hall unit and the nineteenth Hall unit.

16. A current detection device, characterized in that, A current detection device is used to detect the current flowing through a conductor, comprising: A magnetic sensor, configured as claimed in any one of claims 1-15; When the current detection device detects the current in the conductor, the magnetic sensor is located on one side of the conductor in a second direction, and the direction of the current in the conductor is parallel to the third direction.

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