Full-automatic hydrogen fluoride feeding device

Abstract

The utility model relates to the field of hydrogen fluoride feeding, and discloses a full-automatic hydrogen fluoride feeding device which comprises a hydrogen fluoride storage tank, a residual liquid collecting mechanism and an impurity discharging mechanism are arranged at the top of the hydrogen fluoride storage tank, the residual liquid collecting mechanism comprises a corrosion-resistant conveying pipeline, and the outer wall of the corrosion-resistant conveying pipeline is fixedly connected to the top of the hydrogen fluoride storage tank. The inner wall of the corrosion-resistant conveying pipeline is fixedly connected with a filter screen plate, the inner wall of the corrosion-resistant conveying pipeline is rotatably connected with a screw rod, the outer wall of the screw rod is in threaded connection with a scraping ring, the outer wall of the scraping ring is in contact with the inner wall of the corrosion-resistant conveying pipeline, and the left end of the screw rod is fixedly connected with a rotating rod. According to the utility model, the residual liquid collecting mechanism and the filter screen plate are arranged to intercept impurities and prevent the impurities from scratching wafers or causing pollution, the scraping ring moves along the inner wall of the pipeline, the residual solution is scraped into the ring groove and is recovered through the corrosion-resistant collecting pipe, the waste of the solution is reduced, and the potential corrosion risk of the residual solution to the environment or equipment is reduced.

Description

Technical Field

[0001] This utility model relates to the field of hydrogen fluoride feeding, and in particular to a fully automatic hydrogen fluoride feeding device. Background Technology

[0002] In the wafer hydrogen fluoride cleaning process, hydrogen fluoride feeding refers to the process of extracting and transporting the hydrogen fluoride solution in the hydrogen fluoride storage tank to a container mixed with deionized water through a specific device and process, so as to prepare a hydrogen fluoride solution with a certain concentration for subsequent wafer cleaning.

[0003] In existing technologies, when adding hydrogen fluoride solution into a stirred tank for mixing, a corrosion-resistant pipe is typically used to connect the hydrogen fluoride storage container to the tank's feed port. A corrosion-resistant metering pump is then used to precisely control the flow rate and dosage, pumping the solution into the stirred tank. For scenarios requiring precise proportions, flow meters and concentration sensors are installed on the pipes to provide real-time data feedback to the control system, ensuring accurate hydrogen fluoride addition.

[0004] In the feeding stage of the hydrogen fluoride cleaning process for wafers, solid impurities mixed in the hydrogen fluoride solution can easily enter the cleaning system with the liquid, causing scratches or contamination on the wafer surface, affecting the yield of semiconductor devices. The hydrogen fluoride solution remaining on the inner wall of the delivery pipeline cannot be effectively recovered, which not only wastes raw materials, but also poses a potential threat to equipment and the environment due to the corrosiveness of the solution. Therefore, a fully automatic hydrogen fluoride feeding device is proposed to solve the above problems. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a fully automatic hydrogen fluoride feeding device, which aims to solve the problem of raw material waste caused by the inability to recover residual solution on the inner wall of the pipeline in the prior art.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a fully automatic hydrogen fluoride feeding device, comprising a hydrogen fluoride storage tank, wherein a residual liquid collection mechanism and a waste removal mechanism are provided on the top of the hydrogen fluoride storage tank, the residual liquid collection mechanism includes a corrosion-resistant conveying pipe, the outer wall of the corrosion-resistant conveying pipe is fixedly connected to the top of the hydrogen fluoride storage tank, a filter screen is fixedly connected to the inner wall of the corrosion-resistant conveying pipe, a screw is rotatably connected to the inner wall of the corrosion-resistant conveying pipe, a scraper ring is threadedly connected to the outer wall of the screw, the outer wall of the scraper ring contacts the inner wall of the corrosion-resistant conveying pipe, a rotating rod is fixedly connected to the left end of the screw, a scraper is fixedly connected to the outer wall of the rotating rod, the right side of the scraper contacts the outer wall of the filter screen, an annular groove is formed on the inner wall of the corrosion-resistant conveying pipe, a corrosion-resistant collection pipe is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipe, and the top end of the corrosion-resistant collection pipe is connected to the inner wall of the annular groove.

[0007] As a further description of the above technical solution:

[0008] The residual liquid collection mechanism also includes a motor, which is fixedly connected to the right end of the corrosion-resistant conveying pipeline on the left side, and the output end of the motor is fixedly connected to the right end of the screw.

[0009] As a further description of the above technical solution:

[0010] The residual liquid collection mechanism also includes a limiting groove, which is formed on the inner wall of the corrosion-resistant conveying pipeline. A limiting slider is slidably connected to the inner wall of the limiting groove, and the outer wall of the limiting slider is fixedly connected to the arc surface of the scraper ring.

[0011] As a further description of the above technical solution:

[0012] The residual liquid collection mechanism also includes a diaphragm pump, the bottom of which is fixedly connected to the top of the hydrogen fluoride storage tank.

[0013] As a further description of the above technical solution:

[0014] The residual liquid collection mechanism also includes a corrosion-resistant connecting pipe, the left end of which is fixedly connected to the outer wall of the diaphragm pump, and the right end of which is fixedly connected to the left end of the corrosion-resistant conveying pipeline.

[0015] As a further description of the above technical solution:

[0016] The residual liquid collection mechanism also includes a corrosion-resistant support pipe, the top of which is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipe, and a stirring cylinder is fixedly connected to the bottom of the corrosion-resistant support pipe.

[0017] As a further description of the above technical solution:

[0018] The debris removal mechanism includes an arc-shaped scraper block, the sidewall of which is fixedly connected to the sidewall of the scraper, and the arc surface of which contacts the inner wall of the corrosion-resistant conveying pipeline.

[0019] As a further description of the above technical solution:

[0020] The waste removal mechanism also includes a waste removal pipe, the top of which is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipeline.

[0021] This utility model has the following beneficial effects:

[0022] 1. In this utility model, by setting up a residual liquid collection mechanism, the filter screen can intercept solid impurities, preventing them from scratching the wafer or causing pollution. The scraper ring moves along the inner wall of the pipe to scrape the residual solution into the ring groove, which is then recovered through the corrosion-resistant collection pipe, reducing solution waste and lowering the potential corrosion risk of residual liquid to the environment or equipment.

[0023] 2. In this utility model, by setting up a debris removal mechanism, impurities are prevented from accumulating and clogging in the pipeline, maintaining continuous and efficient filtration of the filter screen, and preventing poor solution flow or secondary pollution caused by impurity retention; at the same time, the frequency of manual cleaning is reduced, maintenance costs and operational risks are lowered, and the long-term stable operation of the hydrogen fluoride solution delivery system is ensured. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the main structure of a fully automatic hydrogen fluoride feeding device proposed in this utility model;

[0025] Figure 2 This is a schematic diagram of the corrosion-resistant conveying pipeline structure of a fully automatic hydrogen fluoride feeding device proposed in this utility model;

[0026] Figure 3 This is a schematic diagram of the cross-sectional structure of a corrosion-resistant conveying pipeline for a fully automatic hydrogen fluoride feeding device proposed in this utility model;

[0027] Figure 4 This is a schematic cross-sectional view of the corrosion-resistant conveying pipeline of a fully automatic hydrogen fluoride feeding device proposed in this utility model.

[0028] Legend:

[0029] 1. Hydrogen fluoride storage tank; 2. Residual liquid collection mechanism; 211. Corrosion-resistant conveying pipeline; 212. Filter screen; 213. Screw; 214. Scraper ring; 215. Rotating rod; 216. Scraper; 217. Ring groove; 218. Corrosion-resistant collection pipe; 219. Motor; 220. Limiting groove; 221. Limiting slider; 222. Diaphragm pump; 223. Corrosion-resistant connecting pipe; 224. Corrosion-resistant support pipe; 225. Stirring drum; 3. Impurity removal mechanism; 311. Arc-shaped scraper; 312. Impurity removal pipe. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Reference Figures 2-4The present invention provides an embodiment of a fully automatic hydrogen fluoride feeding device, comprising a hydrogen fluoride storage tank 1, a residual liquid collection mechanism 2 and a debris removal mechanism 3 at the top of the hydrogen fluoride storage tank 1, the residual liquid collection mechanism 2 including a corrosion-resistant conveying pipe 211, the outer wall of which is fixedly connected to the top of the hydrogen fluoride storage tank 1, the corrosion-resistant conveying pipe 211 being used to carry the conveying of hydrogen fluoride solution, a filter screen 212 fixedly connected to the inner wall of the corrosion-resistant conveying pipe 211, the filter screen 212 being used to intercept solid impurities in the solution, a screw 213 rotatably connected to the inner wall of the corrosion-resistant conveying pipe 211, which is driven by a motor 219 to move a scraper ring 214, the outer wall of which is threadedly connected to the screw 213, the scraper ring 214 being used to scrape off the corrosion-resistant solution. The inner wall of the conveying pipe 211 contains residual solution. The outer wall of the scraper ring 214 is in contact with the inner wall of the corrosion-resistant conveying pipe 211. The left end of the screw 213 is fixedly connected to the rotating rod 215, which is used to drive the scraper 216 to rotate. The outer wall of the rotating rod 215 is fixedly connected to the scraper 216, which is used to scrape off the impurities intercepted by the filter screen 212. The right side of the scraper 216 is in contact with the outer wall of the filter screen 212. The inner wall of the corrosion-resistant conveying pipe 211 is provided with an annular groove 217, which is used to temporarily store the scraped residual liquid. The bottom of the outer wall of the corrosion-resistant conveying pipe 211 is fixedly connected to a corrosion-resistant collection pipe 218, which is used to discharge the residual liquid in the collection annular groove 217. The top end of the corrosion-resistant collection pipe 218 is connected to the inner wall of the annular groove 217.

[0032] Reference Figures 1-3 The residual liquid collection mechanism 2 also includes a motor 219, which provides power for the rotation of the screw 213. The left side of the motor 219 is fixedly connected to the right end of the corrosion-resistant conveying pipe 211, and the output end of the motor 219 is fixedly connected to the right end of the screw 213. The residual liquid collection mechanism 2 also includes a limiting groove 220, which guides and limits the movement of the scraper ring 214. The limiting groove 220 is formed on the inner wall of the corrosion-resistant conveying pipe 211, and a limiting slider 221 is slidably connected to the inner wall of the limiting groove 220. The limiting slider 221 is fixedly engaged with the scraper ring 214 to achieve the limiting function. The outer wall of the limiting slider 221 is fixedly connected to the arc surface of the scraper ring 214. The residual liquid collection mechanism 2 also includes a diaphragm pump 222, which is used to extract hydrogen fluoride. The solution in storage tank 1 is fixedly connected to the bottom of diaphragm pump 222 at the top of hydrogen fluoride storage tank 1. The residual liquid collection mechanism 2 also includes a corrosion-resistant connecting pipe 223, which is used to connect diaphragm pump 222 and corrosion-resistant conveying pipe 211. The left end of corrosion-resistant connecting pipe 223 is fixedly connected to the outer wall of diaphragm pump 222, and the right end of corrosion-resistant connecting pipe 223 is fixedly connected to the left end of corrosion-resistant conveying pipe 211. The residual liquid collection mechanism 2 also includes a corrosion-resistant support pipe 224, which is used to convey the solution to stirring drum 225. The top end of corrosion-resistant support pipe 224 is fixedly connected to the bottom of outer wall of corrosion-resistant conveying pipe 211, and the bottom end of corrosion-resistant support pipe 224 is fixedly connected to stirring drum 225.

[0033] Reference Figures 2-4 The impurity removal mechanism 3 includes an arc-shaped scraper 311, which is used to guide the scraped impurities into the impurity removal pipe 312. The side wall of the arc-shaped scraper 311 is fixedly connected to the side wall of the scraper 216. The arc surface of the arc-shaped scraper 311 contacts the inner wall of the corrosion-resistant conveying pipe 211. The impurity removal mechanism 3 also includes an impurity removal pipe 312, which is used to collect and discharge filtered impurities. The top end of the impurity removal pipe 312 is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipe 211. The filter screen 212, screw 213, scraper ring 214, rotating rod 215, scraper 216, limiting slider 221, and arc-shaped scraper 311 are all made of corrosion-resistant alloy.

[0034] Working Principle: In the wafer hydrogen fluoride cleaning process, hydrogen fluoride solution is typically added to the hydrogen fluoride storage tank 1 and mixed with deionized water to prepare a hydrogen fluoride solution of a certain concentration, which is then used to clean the wafer. First, the solution inside the hydrogen fluoride storage tank 1 is extracted by the diaphragm pump 222. Then, the hydrogen fluoride solution is transported to the corrosion-resistant delivery pipe 211 through the corrosion-resistant connecting pipe 223. The filter screen 212 fixedly connected inside the corrosion-resistant delivery pipe 211 can filter impurities in the hydrogen fluoride solution, effectively intercepting solid impurities in the hydrogen fluoride solution and preventing impurities from entering the subsequent cleaning process and causing scratches or contamination to the wafer surface. Finally, the hydrogen fluoride solution is transported to the stirring tank 225 through the corrosion-resistant support pipe 224. Deionized water is added to the stirring tank 225 in proportion, and then the mixture is thoroughly stirred inside the stirring tank 225 to form a hydrogen fluoride cleaning solution of a specific concentration, which is then used for subsequent hydrogen fluoride cleaning of the wafer.

[0035] After the hydrogen fluoride solution is added, some solution will remain on the inner wall of the corrosion-resistant conveying pipe 211. By starting the motor 219, the output end of the motor 219 drives the fixedly connected screw 213 to rotate, thereby driving the scraper ring 214 threaded on the outer wall of the screw 213 to move. The scraper ring 214 drives the limiting slider 221 fixedly connected on the outer wall to slide in the inner wall of the limiting groove 220, thereby limiting the scraper ring 214. The scraper ring 214 can scrape the hydrogen fluoride solution remaining on the inner wall of the corrosion-resistant conveying pipe 211 to the ring groove 217, and finally collect it through the corrosion-resistant collection pipe 218.

[0036] When the screw 213 rotates, it causes the rotating rod 215 fixedly connected to the left end of the screw 213 to rotate, thereby causing the scraper 216 fixedly connected to the outer wall of the rotating rod 215 to rotate. The scraper 216 can scrape off the impurities intercepted and filtered by the filter screen 212, thereby preventing the filter screen 212 from becoming clogged. When the scraper 216 rotates, it causes the arc-shaped scraper block 311 fixedly connected to the outer wall of the scraper 216 to move accordingly. The arc-shaped scraper block 311 can scrape off the impurities and collect them inside the discharge pipe 312.

[0037] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A fully automatic hydrogen fluoride feeding device, comprising a hydrogen fluoride storage tank (1), characterized in that: The top of the hydrogen fluoride storage tank (1) is equipped with a residual liquid collection mechanism (2) and a waste removal mechanism (3). The residual liquid collection mechanism (2) includes a corrosion-resistant conveying pipe (211), the outer wall of which is fixedly connected to the top of the hydrogen fluoride storage tank (1), a filter screen plate (212) is fixedly connected to the inner wall of the corrosion-resistant conveying pipe (211), a screw (213) is rotatably connected to the inner wall of the corrosion-resistant conveying pipe (211), and a scraper ring (214) is threadedly connected to the outer wall of the screw (213). The outer wall of the scraper ring (214) is flush with the inner wall of the corrosion-resistant conveying pipe (211). The screw (213) is fixedly connected to a rotating rod (215) at its left end. A scraper (216) is fixedly connected to the outer wall of the rotating rod (215). The right side of the scraper (216) is in contact with the outer wall of the filter screen (212). An annular groove (217) is provided on the inner wall of the corrosion-resistant conveying pipe (211). A corrosion-resistant collection pipe (218) is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipe (211). The top end of the corrosion-resistant collection pipe (218) is connected to the inner wall of the annular groove (217).

2. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The residual liquid collection mechanism (2) also includes a motor (219), which is fixedly connected to the right end of the corrosion-resistant conveying pipe (211) on the left side, and the output end of the motor (219) is fixedly connected to the right end of the screw (213).

3. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The residual liquid collection mechanism (2) also includes a limiting groove (220), which is opened on the inner wall of the corrosion-resistant conveying pipeline (211). A limiting slider (221) is slidably connected to the inner wall of the limiting groove (220), and the outer wall of the limiting slider (221) is fixedly connected to the arc surface of the scraper ring (214).

4. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The residual liquid collection mechanism (2) also includes a diaphragm pump (222), the bottom of which is fixedly connected to the top of the hydrogen fluoride storage tank (1).

5. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The residual liquid collection mechanism (2) also includes a corrosion-resistant connecting pipe (223), the left end of which is fixedly connected to the outer wall of the diaphragm pump (222), and the right end of which is fixedly connected to the left end of the corrosion-resistant conveying pipe (211).

6. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The residual liquid collection mechanism (2) also includes a corrosion-resistant support pipe (224), the top end of which is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipe (211), and the bottom end of which is fixedly connected to a stirring cylinder (225).

7. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The debris removal mechanism (3) includes an arc-shaped scraper (311), the side wall of which is fixedly connected to the side wall of the scraper (216), and the arc surface of which is in contact with the inner wall of the corrosion-resistant conveying pipeline (211).

8. The fully automatic hydrogen fluoride feeding device according to claim 1, characterized in that: The waste removal mechanism (3) also includes a waste removal pipe (312), the top end of which is fixedly connected to the bottom of the outer wall of the corrosion-resistant conveying pipeline (211).

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