Anti-blocking device of tail gas pipeline and process machine table
By incorporating a heating element and a sealing element into the exhaust pipe anti-clogging device, the problem of pipe blockage caused by cold spots is solved, enabling heating of the pipe at the wall penetration point, ensuring stable equipment operation, reducing energy consumption, and facilitating maintenance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHONGQING XINLIAN MICROELECTRONICS CO LTD
- Filing Date
- 2025-07-03
- Publication Date
- 2026-05-22
AI Technical Summary
In semiconductor manufacturing processes, exhaust gas pipelines can become cold spots when passing through cleanrooms and non-cleanrooms because the heating band cannot be wrapped around them, leading to pipeline blockage and affecting the normal operation of the equipment.
Design an exhaust pipe anti-clogging device, including a heating part and a sealing part. The heating part heats the pipe at the wall penetration point, and the sealing part is set on the other side to prevent cold spots from forming. It adopts a detachable fastener and heating element structure, and combines a temperature sensor and controller for temperature regulation.
It effectively prevents the formation of cold spots in the exhaust pipe at the wall penetration point, avoids blockage, ensures stable equipment operation, reduces energy consumption, and facilitates maintenance.
Smart Images
Figure CN224266569U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor equipment technology, and in particular to an anti-clogging device and process equipment for an exhaust gas pipeline. Background Technology
[0002] In semiconductor manufacturing processes, various process equipment, such as etching machines and film deposition machines, need to discharge gases or byproducts from the process chamber through exhaust gas pipelines after the process is completed. The gases discharged from the process chambers are high-temperature gases with complex compositions. When flowing in the exhaust gas pipeline, they may form a large number of particles due to the temperature drop. In severe cases, this may cause blockage inside the pipeline, which may lead to the dry pump failing to work and causing downtime.
[0003] Therefore, heating tape is typically wrapped around the exhaust pipe to maintain its temperature and prevent blockage. However, for equipment placement considerations, exhaust pipes often need to pass through floors or walls. When the pipe passes through floors or walls, especially when traversing cleanrooms and non-cleanroom environments, it is usually impossible to wrap the exhaust pipe with heating tape at these points. This can lead to cold spots in the pipe, making it prone to blockage. Therefore, it is necessary to provide a device that can heat the pipe at the wall penetration point to prevent blockage.
[0004] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Utility Model Content
[0005] To solve all or part of the problems of the prior art, this utility model provides an anti-clogging device and process equipment for exhaust gas pipelines, so as to heat the pipeline at the wall penetration point and achieve the purpose of preventing pipeline blockage.
[0006] To achieve the above objectives, in a first aspect, this utility model provides an anti-clogging device for an exhaust pipe, the anti-clogging device comprising a heating part and a sealing part, and the anti-clogging device being installed on the exhaust pipe;
[0007] The exhaust gas pipeline is connected to the process chamber and is used to discharge the gas in the process chamber. A section of the exhaust gas pipeline passes through the space separation component.
[0008] The heating element is located on one side of the space partition and is used to heat the exhaust pipe located in the space partition. The sealing element is located on the other side of the space partition.
[0009] This application heats the exhaust gas pipeline in the space-separating component by setting a heating part, and a sealing part is set on the other side to achieve a sealing and isolation effect, thereby achieving heating of the pipeline at the wall penetration point, preventing cold spots in the exhaust gas pipeline, and thus preventing pipeline blockage.
[0010] The space partition component is a partition structure set between two independent spaces.
[0011] A connecting hole is formed on the space partition member, and the exhaust pipe passes through the space partition member through the connecting hole.
[0012] The heating element includes a fixing member and a heating element disposed on the fixing member; the fixing member is used to detachably fix the heating element to the exhaust pipe, and to position the heating element outside the exhaust pipe in the connecting hole. The detachable structure makes maintenance, upkeep, or replacement more convenient.
[0013] The fixing components are a first fixing component and a second fixing component arranged symmetrically. The first fixing component and the second fixing component have a semi-circular structure and can be fixedly sleeved on the exhaust pipe by bolts. The left and right split design facilitates installation and disassembly.
[0014] The heating element comprises two parts, which are independently mounted on the first fixing member and the second fixing member, respectively. The left-right split design facilitates installation and disassembly.
[0015] The heating element is a rigid heating tube or a flexible heating wire.
[0016] A heat-reflective layer is applied to the inner wall of the connecting hole, which reduces energy consumption.
[0017] It also includes a temperature sensor and a controller. The temperature sensor is used to detect the temperature of the exhaust pipe, and the controller is electrically connected to the temperature sensor and the heating element to adjust the temperature of the heating element. Real-time temperature detection and feedback are performed to ensure effective heating.
[0018] On the other hand, this application also provides a process machine tool, including a process chamber and an exhaust gas pipeline, wherein the exhaust gas pipeline is used to discharge gas from the process chamber, and an anti-clogging device for the exhaust gas pipeline as described in any of the first aspects is provided on the exhaust gas pipeline.
[0019] Compared with the prior art, the main beneficial effects of this utility model are: it provides an anti-clogging device for exhaust pipes, which heats the exhaust pipe in the space-separating component by setting a heating part, and sets a sealing part on the other side to achieve a sealing and isolation effect, thereby realizing the heating of the pipe at the wall penetration point, preventing the exhaust pipe from generating cold spots, and thus preventing pipe blockage. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 This is a schematic diagram of the exhaust gas pipeline setup for a process machine in the prior art.
[0022] Figure 2 This is a schematic diagram of an anti-clogging device for an exhaust pipe provided as an example. Detailed Implementation
[0023] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of the preferred embodiments with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the scope of this utility model.
[0024] Example 1:
[0025] Figure 1 This is a schematic diagram of the exhaust gas piping setup for a process machine in the prior art. (Reference) Figure 1 One end of the exhaust gas pipe 2 is connected to the process chamber 1 of the machine, and the other end is connected to the vacuum pump 4 to exhaust the gas in the process chamber 1. After the vacuum pump 4, other equipment, such as an exhaust gas treatment device, may be connected to cool and remove dust from the exhaust gas. In some cases, for example, to ensure the cleanliness of the process machine environment, the process machine may be placed in a cleanroom, while the downstream equipment is placed in a dust area. In this case, the exhaust gas pipe 2 must pass through a spatial partition (e.g., a wall, floor, or ceiling). A short section of the exhaust gas pipe 2 located within a spatial partition typically cannot be wrapped with a heating element, resulting in a cold spot in this area, which is easily blocked.
[0026] Therefore, this utility model provides an anti-clogging device for exhaust gas pipelines, which is a device that can heat the pipeline at the wall penetration point to prevent pipeline blockage.
[0027] Figure 2 This is a schematic diagram of an anti-clogging device for an exhaust pipe provided as an embodiment. Wherein, Figure 2 In the diagram, 'a' is a top view of the anti-clogging device. Figure 2 In the diagram, b is a front view of the heating element in the anti-clogging device.
[0028] refer to Figure 2 As shown, an anti-clogging device for an exhaust pipe includes a heating part 5 and a sealing part 6. The anti-clogging device is installed on the exhaust pipe 2; one end of the exhaust pipe 2 is connected to the process chamber 1. Figure 2 Not shown in the image, please refer to [link / reference]. Figure 1 The other end of the exhaust pipe 2 is connected to the vacuum pump 4. Figure 2 Not shown in the image, please refer to [link / reference]. Figure 1 The exhaust gas pipe 2 is used to discharge the gas in the process chamber 1. In this embodiment, a section of the exhaust gas pipe 2 passes through the space partition member 3. The heating part 5 is provided on one side of the space partition member 3 to heat the section of the exhaust gas pipe 2 located in the space partition member 3. A sealing part 6 is provided on the opposite side of the space partition member 3. The sealing part 6 can isolate the space on both sides of the space partition member 3 and prevent the ash area from contaminating the clean room.
[0029] It should be understood that the heating part 5 and the sealing part 6 only need to be installed on both sides of the space partition member 3, and it is not required that the heating part 5 be close to the side of the process cavity 1. That is, the positions of the heating part 5 and the sealing part 6 can be interchanged. It should be understood that in this embodiment, the space partition member 3 refers to the partition structure set between two independent spaces. It is a physical isolation interface that can form at least two independent spatial domains, including but not limited to wall structures, floor slab components, roof partitions or other structures with space division functions.
[0030] In this embodiment, a connecting hole is formed on the space partition member 3, through which the exhaust pipe 2 can pass. The heating part 5 includes a fixing member 50 and a heating element 51 disposed on the fixing member 50. The fixing member 50 is used to detachably fix the heating part 5 to the exhaust pipe 2, and to position the heating element 51 outside the exhaust pipe 2 in the connecting hole. The heating part 5 has a split structure with symmetrical structures on both sides. The fixing member 50 has a first fixing member and a second fixing member symmetrically arranged. Both the first fixing member and the second fixing member are semi-circular structures and can be fixed to the exhaust pipe 2 by bolts. Similarly, the heating element 51 also includes two parts, which are independently disposed on the first fixing member and the second fixing member, respectively. The split design of the heater 5 makes it easier to install and disassemble.
[0031] In this embodiment, the heating element 51 is a rigid heating tube or a flexible heating wire. In other embodiments, other heating methods may also be used, such as heating lamps.
[0032] In this embodiment, a heat-reflective layer 7 is also covered on the inner wall of the connecting hole to reduce energy consumption.
[0033] In this embodiment, a temperature sensor and a controller are also included. Figure 2(Not shown in the diagram) The temperature sensor is typically installed outside the exhaust pipe in the connecting hole to detect the temperature of the exhaust pipe in the connecting hole; the controller is electrically connected to the temperature sensor, and can receive the measurement data from the temperature sensor in real time, and adjust the temperature of the heating unit 5 according to the target temperature feedback. Under normal circumstances, the heating temperature is controlled between 150-200 ℃ to reduce the occurrence of pipe blockage.
[0034] Example 2
[0035] This utility model also provides a process machine, including a process chamber and an exhaust gas pipeline. The exhaust gas pipeline is used to discharge gas from the process chamber, and an anti-clogging device for the exhaust gas pipeline as described in Embodiment 1 is provided on the exhaust gas pipeline.
[0036] The common English terms or letters used in this invention for the purpose of clarity are for illustrative purposes only and are not intended to be limiting or specific. They should not be used to limit the scope of protection of this invention based on their possible Chinese translations or specific letters.
[0037] It should also be noted that in this article, relational terms such as “first” and “second” are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations.
Claims
1. A device for preventing blockage in an exhaust pipe, characterized in that, The anti-clogging device includes a heating part and a sealing part, and the anti-clogging device is installed on the exhaust pipe; The exhaust gas pipeline is connected to the process chamber and is used to discharge the gas in the process chamber. A section of the exhaust gas pipeline passes through the space separation component. The heating element is located on one side of the space partition and is used to heat the exhaust pipe located in the space partition. The sealing element is located on the other side of the space partition.
2. The anti-clogging device for an exhaust pipe according to claim 1, characterized in that, The space partition component is a partition structure set between two independent spaces.
3. The anti-clogging device for an exhaust pipe according to claim 1, characterized in that, A connecting hole is formed on the space partition member, and the exhaust pipe passes through the space partition member through the connecting hole.
4. The anti-clogging device for an exhaust pipe according to claim 3, characterized in that, The heating part includes a fixing member and a heating element disposed on the fixing member; The fastener is used to detachably fix the heating element to the exhaust pipe and to position the heating element outside the exhaust pipe in the connecting hole.
5. The anti-clogging device for an exhaust pipe according to claim 4, characterized in that, The fixing components are a first fixing component and a second fixing component arranged symmetrically. The first fixing component and the second fixing component are semi-circular structures and can be fixedly sleeved on the exhaust pipe by bolts.
6. The anti-clogging device for an exhaust pipe according to claim 5, characterized in that, The heating element comprises two parts, which are independently disposed on the first fixing member and the second fixing member, respectively.
7. The anti-clogging device for an exhaust pipe according to claim 4, characterized in that, The heating element is a rigid heating tube or a flexible heating wire.
8. The anti-clogging device for an exhaust pipe according to claim 3, characterized in that, A heat-reflective layer is applied to the inner wall of the connecting hole.
9. The anti-clogging device for an exhaust pipe according to claim 1, characterized in that, It also includes a temperature sensor and a controller. The temperature sensor is used to detect the temperature of the exhaust pipe, and the controller is electrically connected to the temperature sensor and the heating element to adjust the temperature of the heating element.
10. A process machine tool, characterized in that, It includes a process chamber and an exhaust gas pipeline, wherein the exhaust gas pipeline is used to discharge gas from the process chamber, and an anti-clogging device for the exhaust gas pipeline as described in any one of claims 1-9 is provided on the exhaust gas pipeline.