Transfer manipulator for wafer basket

Abstract

The utility model discloses a transfer manipulator for a wafer basket, which comprises a multi-axis manipulator, a fixing frame arranged at the execution tail end of the multi-axis manipulator and a basket rotating component rotatably connected to the lower end of the fixing frame, and the execution tail end of the multi-axis manipulator is arranged to rotate around the axis of the multi-axis manipulator; the lower end of the flower basket rotating assembly is provided with a clamping module used for clamping the two sides of the flower basket. The flower basket comprises an open end for the wafer to enter and a limiting end arranged away from the open end; the flower basket rotating assembly comprises a telescopic unit and a rotating frame rotationally arranged at the lower end of the fixing frame, the upper end of the telescopic unit is hinged to the upper end of the fixing frame, the lower end of the telescopic unit is hinged to the upper end of the rotating frame, the clamping module is arranged on the rotating frame, and the rotating frame is kept at a straight position or an inclined position through telescopic action of the telescopic unit. And the flower basket is arranged to incline in a direction deviating from the open end at the inclined position so as to restrain the wafer on the limiting end.

Description

Technical Field

[0001] This utility model relates to the field of wafer transfer equipment technology, specifically to a transfer robot for wafer baskets. Background Technology

[0002] In the wafer processing, manufacturing, inspection, and cleaning processes, wafer baskets are typically used to stack multiple wafers in order to meet the quantitative transfer requirements. The baskets usually have spaced partitions for the wafers to be temporarily placed. Therefore, wafer transfer equipment also includes transfer mechanisms that hold the baskets.

[0003] In the existing technology, the transfer mechanism corresponding to the flower basket usually sets a flower basket cover to limit the wafer inside in order to prevent the flower basket from falling during the transfer process, especially at the end of the transfer path. However, in the subsequent processing, the process of removing the cover is added, which affects the transfer efficiency.

[0004] Of course, some existing technologies also use robotic arms to directly grasp the flower basket, but in the case of multi-axis movement, the wafers inside the flower basket may still tilt towards the opening of the flower basket, posing a risk of falling. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a transfer robot for wafer baskets.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a transfer robot for wafer baskets, comprising:

[0007] A multi-axis manipulator, a fixed frame disposed on the end effector of the multi-axis manipulator, and a basket rotating assembly rotatably connected to the lower end of the fixed frame, wherein the end effector of the multi-axis manipulator is configured to rotate about its axis;

[0008] The lower end of the flower basket rotating assembly is provided with a clamping module for clamping on both sides of the flower basket; the flower basket includes an open end for allowing the wafer to enter, and a limiting end disposed away from the open end;

[0009] The flower basket rotating assembly includes a telescopic unit and a rotating frame rotatably disposed at the lower end of the fixed frame. The upper end of the telescopic unit is hinged to the upper end of the fixed frame, and the lower end of the telescopic unit is hinged to the upper end of the rotating frame. The clamping module is disposed on the rotating frame. The rotating frame is maintained in a straight position or an inclined position by the telescopic movement of the telescopic unit. In the inclined position, the flower basket is set to tilt away from the open end to constrain the wafer on the limiting end.

[0010] Furthermore, the free end of the telescopic unit has a rotation axis L1 about the rotating frame, and the rotating frame has a rotation axis L2 about the fixed frame. The rotation axis L1 is parallel to the rotation axis L2, and the rotation axis L1 is located above the rotation axis L2. The rotation axis L1 is located outside the rotation axis Z of the execution end, away from the rotation axis Z of the execution end.

[0011] Furthermore, the rotating frame is provided with a second rotating seat, which has a shaft portion that cooperates with the free end of the telescopic unit. The telescopic unit is located near the outer edge of the profile of the fixed frame, and the second rotating seat is located near the outer edge of the profile of the rotating frame and is configured to rotate toward the fixed frame.

[0012] Furthermore, the first rotating base has U-shaped ears, the fixing frame is I-shaped, and the lower end of the fixing frame is inserted between the ears, and a rotating shaft passes through the fixing frame and the ears.

[0013] Furthermore, the rotating frame is provided with a second rotating seat, and the second rotating seat is provided with a shaft portion that cooperates with the free end of the telescopic unit. The telescopic unit is located near the outer edge of the outline of the fixed frame, and the second rotating seat is located near the outer edge of the outline of the rotating frame.

[0014] Furthermore, there are two rotating frames, which are arranged opposite each other in the horizontal direction. The clamping module is located at the lower end of the rotating frames, and the open ends of the flower baskets on the two rotating frames are arranged opposite each other.

[0015] Furthermore, the flower basket includes a frame body arranged opposite to each other, and a limiting stop edge arranged on the back of the frame body. The limiting stop edge defines a limiting end on the back of the frame body, and a tapering section with a diameter smaller than the outer diameter of the wafer. The frame body is provided with a cavity for inserting the outer edge of the wafer. The wafer picking space is defined between the two cavities. The tapering section is connected to the cavity.

[0016] Furthermore, the clamping module includes a clamping cylinder and a clamping block disposed on the actuating end of the clamping cylinder; the flower basket includes a clamping end disposed on one side of the limiting end and the open end, and the clamping block and the clamping end are arranged at an angle to each other.

[0017] Furthermore, the clamping block extends in the height direction of the flower basket.

[0018] Furthermore, the rotating frame is provided with a connecting plate on the side opposite to the clamping block. The connecting plate has an extension extending toward the bottom of the flower basket. The extension is provided with a presence or absence sensor, which is positioned between the two clamping blocks.

[0019] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0020] This invention utilizes a linkage design between a rotating frame and a telescopic unit, allowing the basket to actively rotate to an inclined position during transport. Gravity allows the wafer to naturally adhere to the limiting end, thus preventing the wafer from being thrown out during the rotational transport of the multi-axis robotic arm. In addition, the limiting end of the basket is equipped with a closing section and a cavity, which constrains the wafer in three dimensions within the basket, eliminating the need for disassembling and assembling the cover, improving transport efficiency by approximately 40%, and preventing wafer displacement caused by mechanical vibration. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a structural schematic diagram of the flower basket rotating assembly and fixing frame of this utility model;

[0023] Figure 3 This is a schematic diagram of the flower basket rotating assembly of this utility model in a straight position;

[0024] Figure 4 This is a schematic diagram of the flower basket rotating assembly of this utility model in the tilted position;

[0025] Figure 5 This is a top view of the flower basket and clamping block of this utility model;

[0026] Figure 6 This is a cross-sectional view of the flower basket and clamping block of this utility model;

[0027] Figure 7 This is a schematic diagram of the structure of the flower basket of this utility model;

[0028] In the diagram: 1. Multi-axis robot; 1.1. End effector; 2. Fixing frame; 2.1. Upper fixing plate; 2.2. Lower fixing plate; 2.3. Stand; 3. Flower basket rotating assembly; 3.1. Clamping module; 3.11. Clamping cylinder; 3.12. Clamping block; 3.2. Telescopic unit; 3.3. Rotating frame; 4. Flower basket; 4.1. Open end; 4.2. Limiting end; 4.3. Frame; 4.4. Limiting stop; 4.5. Closing section; 4.6. Cavity; 4.7. Material handling space; 5. Wafer; 6. First rotary seat; 6.1. Rotating shaft; 7. Second rotary seat; 7.1. Shaft; 8. Inclined surface; 9. Connecting plate; 10. Sensor presence or absence; L1. Rotation axis one; L2. Rotation axis two; Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] It should be understood that although the terms upper, middle, lower, top, one end, etc., appear in this document to describe various elements, these elements are not limited by these terms. These terms are only used to distinguish the elements from each other for ease of understanding, and are not used to define any directional or sequential restrictions.

[0031] like Figure 1-7 As shown, a transfer robot for wafer baskets includes:

[0032] The multi-axis robot 1 has a fixed frame 2 mounted on the end effector 1.1 of the multi-axis robot 1 and a basket rotation assembly 3 rotatably connected to the lower end of the fixed frame 2. The end effector 1.1 of the multi-axis robot 1 is configured to rotate around its axis, thereby adjusting the posture of the basket 4 when it is placed in the next work station.

[0033] The lower end of the flower basket rotating assembly 3 is provided with a clamping module 3.1 for clamping on both sides of the flower basket 4; the flower basket 4 includes an open end 4.1 for the wafer 5 to enter, and a limiting end 4.2 set away from the open end 4.1.

[0034] The flower basket rotating assembly 3 includes a telescopic unit 3.2 and a rotating frame 3.3 rotatably mounted on the lower end of the fixed frame 2. The upper end of the telescopic unit 3.2 serves as a fixed end and is hinged to the upper end of the fixed frame 2, while the lower end of the telescopic unit 3.2 serves as a free end and is hinged to the upper end of the rotating frame 3.3. A clamping module 3.1 is mounted on the rotating frame 3.3.

[0035] The telescopic unit 3.2 is configured as an electric or pneumatic cylinder module with active extension and retraction actions. The mounting frame 2 has an upper mounting plate 2.1 and a lower mounting plate 2.2 spaced vertically. The telescopic unit 3.2 is disposed between the upper mounting plate 2.1 and the lower mounting plate 2.2 to provide space for its arrangement. The rotating frame 3.3 is maintained in a straight or inclined position by the telescopic action of the telescopic unit 3.2.

[0036] The straight and tilted positions of the flower basket 4 correspond to the posture of the clamping module 3.1. In the straight position, it is used to release and grip the flower basket 4 at the loading and unloading positions.

[0037] from Figure 4As can be seen, the flower basket 4 is tilted away from the open end 4.1 in the tilted position. At this time, the lower end of the flower basket 4 gradually swings outward, while the upper end of the flower basket 4 is gradually tilted inward, thereby constraining the wafer 5 to the limiting end 4.2 under its own gravity.

[0038] join Figures 2 to 4 As shown, as a further arrangement of the flower basket rotating assembly 3 and the telescopic unit 3.2, the free end of the telescopic unit 3.2 has a rotation axis L1 about the rotating frame 3.3, the rotating frame 3.3 has a rotation axis L2 about the fixed frame 2, and the actuating end 1.1 has a pre-configured vertical rotation axis Z. The rotation axis L1 and rotation axis L2 are parallel. To ensure the stability of the flower basket 4 during rotation, the rotation axis L1 is located above the rotation axis L2, and the rotation axis L1 is located away from the rotation axis L2. Outside the rotation axis Z of the actuator 1.1, during the operation, the telescopic unit 3.2 extends and actuates the rotation axis L2, forcing the rotating frame 3.3 to rotate outward around the rotation axis L1. At this time, the fixed end and free end of the telescopic unit 3.2 rotate adaptively on the axis L1 of the fixed frame 2 and the rotating frame 3.3 until the rotating frame 3.3 tilts to the expected angle. The rotation axis L1 and the rotation axis L2 are misaligned in the vertical direction to form a lever-type kinematic pair, thereby compensating for the action torque.

[0039] Preferably, there are two rotating frames 3.3, which are arranged opposite each other in the horizontal direction, with the open ends 4.1 of the flower basket 4 on the two rotating frames 3.3 facing away from each other. The limiting ends 4.2 of the two rotating frames 3.3 are also arranged opposite each other. Correspondingly, there are two telescopic units 3.2 and two clamping modules 3.1, which are arranged on the rotating frames 3.3. The clamping modules are located at the lower end of the rotating frames 3.3, and each clamping module 3.1 includes at least two clamping blocks 3.12 that can move relative to each other. In the flat position, the clamping blocks 3.12 and the open ends 4.1 of the flower basket 4 are both arranged in the horizontal direction to grasp the flower basket 4 or place the flower basket 4 on the work station. During the rotation to the tilting position, the two rotating frames 3.3 and the clamping modules 3.1 drive the flower basket 4 from a level posture to a figure-eight posture that is far apart from each other.

[0040] In other embodiments, the transfer robot of the flower basket 4 needs to perform multi-angle movements on the work platform. In order to reduce the risk of interference with other components on the work platform during its movements, further spatial optimization of the flower basket rotating assembly 3 is required.

[0041] As a further embodiment of the flower basket rotating assembly 3, the upper end face of the rotating frame 3.3 is provided with a first rotating seat 6 and a second rotating seat 7 spaced apart. The rotating frame 3.3 and the fixed frame 2 are rotatably connected to each other through a first rotation. The free end of the telescopic unit 3.2 is rotatably connected to the rotating frame 3.3 through the second rotating seat 7. The second rotating seat 7 is located on the side of the first rotating seat 6 away from the fixed frame 2.

[0042] Specifically, the first rotating base 6 has an upwardly extending ear, which is U-shaped. The fixing frame 2 is I-shaped, and the lower fixing plate 2.2 of the fixing frame 2 has a downwardly extending ear, which forms the lower end of the fixing frame 2 and is placed between the ears of the first rotating base 6. A rotating shaft 6.1 is passed through the ears to realize the relative rotation of the first rotating base 6, the rotating frame 3.3 and the fixing frame 2. The actuating end of the telescopic unit 3.2 is located on the rotating frame 3.3 away from the first rotating base 6, and the actuating end of the telescopic unit 3.2 is rotatably connected to the side of the rotating frame 3.3 away from the fixing frame 2.

[0043] Specifically, the rotating frame 3.3 is provided with a second rotating seat 7, and the second rotating seat 7 is provided with a shaft portion 7.1 that cooperates with the free end of the telescopic unit 3.2. The free end of the telescopic unit 3.2 and the shaft portion 7.1 are connected by a fisheye bearing, thereby realizing the rotational connection between the telescopic unit 3.2 and the rotating frame 3.3. The telescopic unit 3.2 is located close to the outer edge of the contour of the fixed frame 2, and the second rotating seat 7 is located close to the outer edge of the contour of the rotating frame 3.3.

[0044] Preferably, the inner boundary of the second rotating seat 7 is located close to the boundary of the lower fixed plate 2.2, so that when rotating to the tilting position, the second rotating seat 7 can fold towards the first rotating seat 6 to further reduce space occupation.

[0045] Reference Figure 2 and Figure 3As shown, as a further optimization of the flower basket rotating assembly 3, the two flower basket rotating assemblies 3 are defined as a left module and a right module, with the rotation axis Z of the execution end 1.1 as the boundary. A vertically extending upright plate is provided between the upper fixed plate 2.1 and the lower fixed plate 2.2. The projection of the upper fixed plate 2.1 covers the telescopic unit 3.2, the lower fixed plate 2.2, the rotating frame 3.3, and the first rotating seat 6. The fixed end of the telescopic unit 3.2 used to actuate the rotation of the right module is located above the left module, and the fixed end of the telescopic unit 3.2 used to actuate the rotation of the left module is located above the right module. The two telescopic units 3.2 are arranged on opposite sides of the upright 2.3 of the fixed frame 2, so that... The two telescopic units 3.2 are arranged in a cross configuration within the space defined by the fixed frame 2, and the second rotating seat 7 is located on the outer edge of the outline of the rotating frame 3.3. With this arrangement, within the horizontal space, the two first rotating seats 6 are arranged between the second rotating seat 7 and the upright frame 2.3, and the second rotating seat 7 is arranged diagonally on the end face of the rotating frame 3.3. This effectively utilizes the space defined between the fixed frame 2 and the rotating frame 3.3, improves the compactness between components, and reduces the extension of the telescopic unit 3.2 in the peripheral space, thereby avoiding interference with other components on the work platform and reducing the difficulty of spatial arrangement of other components on the work platform.

[0046] like Figures 5 to 7 As shown, as a further embodiment of the flower basket 4, the flower basket 4 includes a frame 4.3 disposed opposite to each other, and a limiting stop 4.4 disposed on the back of the frame 4.3. The limiting stop 4.4 defines a limiting end 4.2 on the back of the frame 4.3, and a tapering section 4.5 with a diameter smaller than the outer diameter of the wafer 5. The frame 4.3 is provided with a cavity 4.6 for inserting the outer edge of the wafer 5, and the length of the cavity 4.6 is smaller than the diameter of the wafer 5. The two cavities 4.6 define a material handling space 4.7 for the wafer 5. The tapering section 4.5 is disposed in connection with the cavity 4.6.

[0047] Specifically, the clamping module 3.1 includes a clamping cylinder and a clamping block 3.12 disposed on the actuating end of the clamping cylinder; the flower basket 4 includes a clamping end disposed on one side of the limiting end 4.2 and the open end 4.1, the clamping block 3.12 and the opposite surface of the clamping end are set at an angle 8, and the clamping block 3.12 and the side of the frame 4.3 are engaged by the angle 8 to improve the tightness of the engagement. In some embodiments, the cavity 4.6 is provided through the side wall of the frame 4.3, so that the multiple vertical cavities 4.6 on the frame 4.3 form clamping patterns on the support side wall of the flower basket 4, further improving the tightness of the engagement between the clamping module and the side wall of the flower basket 4 based on the clamping surface of the angle 8.

[0048] Specifically, the clamping block 3.12 extends in the height direction of the basket 4 to further increase the mating area between the clamping block 3.12 and the side wall of the basket 4, thereby improving the mating stability.

[0049] Specifically, the rotating frame 3.3 is also provided with a connecting plate 9 on the side opposite to the clamping block 3.12. The connecting plate 9 has an extension extending towards the bottom of the flower basket 4. The extension extends downward and over the clamping cylinder. A presence / absence sensor 10 is provided on the extension. The presence / absence sensor 10 is positioned between the two clamping blocks 3.12 to determine whether the clamping blocks 3.12 are correctly clamping the flower basket 4. This specific embodiment is merely an explanation of the present utility model and is not a limitation thereof. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of the claims of the present utility model.

Claims

1. A robotic arm for transferring wafer baskets, characterized in that, include: A multi-axis manipulator (1), a fixed frame (2) disposed on the execution end (1.1) of the multi-axis manipulator (1), and a basket (4) rotating assembly (3) rotatably connected to the lower end of the fixed frame (2), wherein the execution end (1.1) of the multi-axis manipulator (1) is configured to rotate about its axis; The lower end of the rotating assembly (3) of the flower basket (4) is provided with a clamping module (3.1) for clamping on both sides of the flower basket (4); the flower basket (4) includes an open end (4.1) for allowing the wafer (5) to enter, and a limiting end (4.2) set away from the open end (4.1); The flower basket (4) rotating assembly (3) includes a telescopic unit (3.2) and a rotating frame (3.3) rotatably disposed at the lower end of the fixed frame (2). The upper end of the telescopic unit (3.2) is hinged to the upper end of the fixed frame (2), and the lower end of the telescopic unit (3.2) is hinged to the upper end of the rotating frame (3.3). The clamping module (3.1) is disposed on the rotating frame (3.3). The rotating frame (3.3) is maintained in a straight position or an inclined position by the telescopic action of the telescopic unit (3.2). In the inclined position, the flower basket (4) is set to tilt away from the open end (4.1) to constrain the wafer (5) on the limiting end (4.2).

2. The robotic arm for transferring wafer baskets according to claim 1, characterized in that: The free end of the telescopic unit (3.2) has a rotation axis (L1) about the rotating frame (3.3), the rotating frame (3.3) has a rotation axis (L2) about the fixed frame (2), the rotation axis (L1) is parallel to the rotation axis (L2), the rotation axis (L1) is located above the rotation axis (L2), and the rotation axis (L1) is located outside the rotation axis (L2) of the rotating end (1.1) away from the rotation axis Z of the rotating end (1.1).

3. The robotic arm for transferring wafer baskets according to claim 1, characterized in that: A first rotating seat (6) is provided between the rotating frame (3.3) and the fixed frame (2). The telescopic unit (3.2) is located on the rotating frame (3.3) away from the first rotating seat (6), and the actuating end of the telescopic unit (3.2) is rotatably connected to the side of the rotating frame (3.3) away from the fixed frame (2).

4. The transfer robot for wafer baskets according to claim 3, characterized in that: The first rotating base (6) has ears arranged in a U-shape, the fixing frame (2) is arranged in an I-shape, and the lower end of the fixing frame (2) is inserted between the ears, and a rotating shaft (6.1) passes through the fixing frame (2) and the ears.

5. A transfer robot for wafer baskets according to claim 1, characterized in that: The rotating frame (3.3) is provided with a second rotating seat (7), and the second rotating seat (7) is provided with a shaft (7.1) that cooperates with the free end of the telescopic unit (3.2). The telescopic unit (3.2) is located near the outer edge of the outline of the fixed frame (2), and the second rotating seat (7) is located near the outer edge of the outline of the rotating frame (3.3) and is configured to rotate toward the fixed frame (2).

6. The transfer robot for wafer baskets according to claim 1, characterized in that: The number of rotating frames (3.3) is two, and the two rotating frames (3.3) are arranged opposite each other in the horizontal direction. The clamping module (3.1) is arranged at the lower end of the rotating frame (3.3), and the open ends (4.1) of the flower baskets (4) on the two rotating frames (3.3) are arranged opposite to each other.

7. A transfer robot for wafer baskets according to claim 1, characterized in that: The flower basket (4) includes a frame (4.3) arranged opposite to each other, and a limiting edge (4.4) arranged on the back of the frame (4.3). The limiting edge (4.4) defines a limiting end (4.2) on the back of the frame (4.3), and a tapering section (4.5) with a diameter smaller than the outer diameter of the wafer (5). The frame (4.3) is provided with a cavity (4.6) for inserting the outer edge of the wafer (5). The two cavities (4.6) define a material handling space (4.7) for the wafer (5). The tapering section (4.5) is connected to the cavity (4.6).

8. A transfer robot for wafer baskets according to claim 1, characterized in that: The clamping module (3.1) includes a clamping cylinder and a clamping block (3.12) disposed on the actuating end of the clamping cylinder; the flower basket (4) includes a clamping end disposed on one side of the limiting end (4.2) and the open end (4.1), and the clamping block (3.12) is disposed at an angle (8) to the opposite side of the clamping end.

9. A transfer robot for wafer baskets according to claim 8, characterized in that: The clamping block (3.12) extends in the height direction of the flower basket (4).

10. A transfer robot for wafer baskets according to claim 1, characterized in that: The rotating frame (3.3) is also provided with a connecting plate (9) on the side opposite to the clamping block (3.12). The connecting plate (9) has an extension extending toward the bottom of the flower basket (4). The extension is provided with a presence or absence sensor (10), which is positioned between the two clamping blocks (3.12).

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