A feeding device and a vertical high-temperature reaction equipment

Abstract

This invention provides a feeding device and a vertical high-temperature reaction apparatus. The feeding device includes: a fixed frame, a movable frame movably sleeved on the side of the fixed frame, a heating element disposed on the top of the movable frame, and a driving assembly. Multiple material troughs are formed longitudinally inside the heating element. These troughs hold bottles containing growth sources, and the heating element heats the bottles to maintain the growth source in a liquid state. A guide rail is longitudinally arranged on the side of the fixed frame, and the movable frame is movably sleeved on the outside of the guide rail. The driving assembly drives the movable frame to move longitudinally along the guide rail to transport the bottles containing growth sources from the loading position to the target position. By adopting the solution of this invention, automated feeding of the growth source in a liquid state is achieved, enabling its application in the growth of gallium nitride crystals.

Description

Technical Field

[0001] This utility model relates to the technical field of vertical high-temperature reaction equipment, and in particular to a feeding device and a vertical high-temperature reaction equipment. Background Technology

[0002] A vertical high-temperature reactor (e.g., a vertically structured vapor phase epitaxy unit) is a vertically placed industrial heating device used for chemical reactions, material synthesis, or heat treatment in high-temperature environments (e.g., 300–3000°C). Its core feature is its vertical structure, which facilitates temperature gradient control, optimized gas / liquid flow, and saves floor space.

[0003] However, due to the vertical structure and height of the vertical high-temperature reactor, there are many inconveniences in the loading and maintenance process. Taking gallium as an example, the transportation of gallium requires manual climbing for loading, which easily leads to metal spillage. Moreover, due to the high density and weight of gallium, manual handling can easily cause fatigue and injury to personnel. At the same time, the ladders and reactor frame are mostly made of metal, which are prone to bumps and knocks during handling, causing the quartz outer tube and small tubes to break. In addition, the high temperature of the reactor poses a risk of explosion, endangering the lives of the operators.

[0004] In particular, because the workshop has a constant temperature and cold air supply and exhaust system, gallium metal will solidify and crystallize after being taken out of the oven and left for a while. It will preferentially accumulate on the side and bottom of the gallium bottle. When the reactor is fed at high altitude, the crystals will pour into the inner cavity of the reactor and damage the core components such as the quartz outer tube and the reactor. These core components are non-standard and customized, and their manufacturing and processing design costs are extremely high. Therefore, there is a problem that the components are easily damaged and increase costs.

[0005] In view of this, it is necessary to improve the existing loading and maintenance equipment to solve the above problems.

[0006] It should be noted that the above description of the background technology is only for the purpose of providing a clear and complete explanation of the technical solution of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background technology section of this utility model. Utility Model Content

[0007] The purpose of this invention is to solve the problems in the existing technology where vertical high-temperature reaction equipment has a vertical structure and is quite tall, which causes many inconveniences in the process of loading and maintenance, and affects the life safety of operators; in particular, the materials will solidify and crystallize after being left in the external environment for a while, which can easily damage the core components of the reactor when feeding materials.

[0008] To achieve the above objectives, this utility model provides a feeding device for transporting growth sources in a vertical high-temperature reaction equipment. The feeding device includes: a fixed frame, a movable frame movably sleeved on the side of the fixed frame, a heating element disposed on the top of the movable frame, and a driving assembly.

[0009] The heating element has multiple material grooves formed longitudinally inside. The material grooves are used to hold the material bottle containing the growth source. The heating element is used to heat the material bottle so that the growth source remains in a liquid state.

[0010] The fixed frame is provided with a longitudinal guide rail on its side, and the movable frame is movably sleeved on the outside of the guide rail. The driving component drives the movable frame to move longitudinally along the guide rail to transport the material bottle containing the growth source from the loading position to the target position.

[0011] As a further improvement of this utility model, the feeding device is controlled by the controller included in the vertical high-temperature reaction equipment, and the feeding device further includes:

[0012] A temperature sensor is installed at the bottom of the movable frame and is connected to the controller.

[0013] A gravity sensor is installed at the bottom of the mobile frame, and the gravity sensor and the drive assembly are connected to the controller;

[0014] The temperature sensor is used to detect the temperature of the bottle; when the temperature of the bottle exceeds a first temperature threshold, the controller controls the heating element to stop heating the bottle; when the temperature of the bottle does not reach the first temperature threshold, the controller controls the heating element to heat the bottle.

[0015] The gravity sensor is used to detect the weight of the heating element; when the weight of the heating element does not reach the weight threshold, the controller controls the drive assembly to move longitudinally downward to the loading position; when the weight of the heating element reaches the weight threshold, the controller controls the drive assembly to move longitudinally upward to the target position.

[0016] As a further improvement of this utility model, the feeding device further includes: a wire groove connecting the fixed frame and the movable frame, a signal receiver being provided in the wire groove, the signal receiver being connected to the controller, the signal receiver being used to receive transport control signals and feed them back to the controller, and the controller controlling the drive component.

[0017] As a further improvement of this utility model, the two ends of the guide rail extend laterally to form a first extension and a second extension, and a first limiting block and a second limiting block are respectively provided on the opposite sides of the first extension and the second extension.

[0018] As a further improvement of this utility model, the drive assembly includes: a synchronous pulley, a synchronous belt, a drive shaft, and a drive motor for driving the drive shaft to rotate axially, all disposed on the side of the fixed frame;

[0019] The synchronous pulley and the drive shaft are arranged sequentially along the longitudinal direction, and the two ends of the synchronous belt are respectively sleeved on the outside of the drive shaft and the synchronous pulley. The movable frame is fixedly sleeved on the outside of the synchronous belt.

[0020] The drive motor drives the drive shaft to rotate axially, which in turn causes the synchronous belt to rotate along the synchronous pulley and the outer circumference of the drive shaft, thereby causing the moving frame to move longitudinally along the guide rail.

[0021] As a further improvement of this utility model, the movable frame includes: a movable body and a linkage component that are fixedly connected;

[0022] The heating element is disposed on the top of the moving body, one end of the linkage is movably sleeved on the outside of the guide rail, the other end of the linkage is fixedly sleeved on the outside of the timing belt, and the linkage is provided with rollers on both sides of the guide rail.

[0023] As a further improvement of this utility model, the feeding device further includes: a small tube frame, an outer tube frame, and a tool box disposed on the top of the mobile body.

[0024] As a further improvement of this utility model, the feeding device further includes: a miscellaneous box disposed on the top of the mobile body and a pull-out drawer disposed at the bottom of the miscellaneous box.

[0025] As a further improvement of this utility model, the feeding device is controlled by the controller contained in the vertical high-temperature reaction equipment;

[0026] The feeding device also includes a display device and an alarm device respectively connected to the controller, or the display device and the alarm device are independently disposed on the outside of the feeding device;

[0027] When the temperature of the material bottle exceeds the first temperature threshold, the display device displays an overheat warning for the material bottle, and the alarm device sounds an alarm.

[0028] And / or, when the weight of the heating element exceeds a weight threshold, the display device displays an overload warning, and the alarm device sounds an alarm.

[0029] And / or, when the temperature of the drive component exceeds the second temperature threshold, the display device displays a power overheat warning, and the alarm device sounds an alarm.

[0030] Based on the same design concept, this utility model also provides a vertical high-temperature reaction device, including: a reaction device and a feeding device as described in any of the above, disposed on the side of the reaction device.

[0031] Compared with the prior art, the beneficial effects of this utility model are:

[0032] The feeding device provided by this utility model includes: a fixed frame, a movable frame movably sleeved on the side of the fixed frame, a heating element disposed on the top of the movable frame, and a driving assembly. Multiple material troughs are formed longitudinally inside the heating element. These troughs are used to hold bottles containing growth sources, and the heating element heats the bottles to keep the growth sources in a liquid state. A guide rail is arranged longitudinally on the side of the fixed frame, and the movable frame is movably sleeved on the outside of the guide rail. The driving assembly drives the movable frame to move longitudinally along the guide rail to transport the bottles containing growth sources from the loading position to the target position. During operation, the driving assembly drives the movable frame to move longitudinally downwards along the guide rail to the loading position, where the operator places the bottle containing the growth source into the material trough; the driving assembly then drives the movable frame to move longitudinally upwards along the guide rail to the target position, where the operator removes the bottle containing the growth source from the material trough and pours the growth source into the reaction device. The longitudinal movement of the movable frame driven by the driving assembly, and the use of guide rails, makes the longitudinal movement more stable, less prone to slippage, and ensures the safety of personnel. Meanwhile, when the flask containing the growth source is in the material tank, the heating element heats the flask to keep the growth source in a liquid state, ensuring that the growth source in the flask will not solidify into a liquid, so as to facilitate feeding and avoid damage to the core components caused by the solidification and crystallization of the growth source. Attached Figure Description

[0033] Figure 1 This is a perspective view of the feeding device shown in this utility model.

[0034] Figure 2 This is a perspective view of the feeding device shown in this utility model from another angle. Detailed Implementation

[0035] The present invention will now be described in detail with reference to the embodiments shown in the accompanying drawings. However, it should be noted that these embodiments are not intended to limit the present invention. Equivalent transformations or substitutions in function, method, or structure made by those skilled in the art based on these embodiments are all within the protection scope of the present invention.

[0036] It should be understood that in the present utility model, terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the technical solution and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the technical solution.

[0037] As shown Figures 1 to 2 in the figure, the present utility model shows a specific embodiment of a feeding device 10, which is used to transport a growth source in a vertical high-temperature reaction device 100. The growth source refers to the material source used for epitaxial deposition of a single-crystal thin film on the surface of a substrate (or wafer), such as gallium metal.

[0038] The feeding device 10 includes: a fixed frame 11, a moving frame 12 movably sleeved on the side of the fixed frame 11, a heating element 13 arranged on the top of the moving frame 12, and a driving component 14. A plurality of material grooves 31 are formed longitudinally inside the heating element 13. The material grooves 31 are used to carry a material bottle (not shown) filled with a growth source. The heating element 13 is used to heat the material bottle so that the growth source remains in a liquid state. A guide rail 111 is arranged longitudinally on the side of the fixed frame 11. The moving frame 12 is movably sleeved outside the guide rail 111. The driving component 14 drives the moving frame 12 to move longitudinally along the guide rail 111 to transport the material bottle filled with the growth source from the loading position to the target position.

[0039] It should be noted that in the present utility model, the "loading position" refers to the position of the moving frame 12 when an operator places the material bottle filled with the growth source into the material groove 31; the "target position" refers to the position of the moving frame 12 when an operator takes out the material bottle filled with the growth source from the material groove 31.

[0040] During actual operation, the driving component 14 drives the moving frame 12 to move longitudinally downward along the guide rail 111 and move to the loading position. The operator places the material bottle filled with the growth source into the material groove 31. The driving component 14 drives the moving frame 12 to move longitudinally upward along the guide rail 111 and move to the target position. The operator takes out the material bottle filled with the growth source from the material groove 31 and pours the growth source into the reaction device. The moving frame 12 moves longitudinally along the guide rail 111. Thus, the longitudinal movement is made more stable through the guide rail 111, not easy to slide, and can ensure the safety of the operator.

[0041] Compared to existing technologies, transporting gallium requires manual climbing and feeding, which easily leads to metal spillage. Furthermore, due to gallium's high density and weight, manual handling can cause fatigue and injury. Additionally, the ladders and reactor frame are mostly made of metal, making them prone to impacts during transport, causing the quartz outer tube and smaller tubes to break. The high temperature of the reactor also poses a risk of explosion, endangering the safety of workers. This invention uses a drive assembly 14 to drive the longitudinal movement of the moving frame 12, reducing the risks during operation and transportation, the risk of spillage during vertical transport, and worker fatigue. It significantly improves production efficiency, ensures worker safety, and avoids the risk of high costs due to broken quartz components.

[0042] In particular, when the growth source-containing vial is in the feed tank 31, the heating element 13 heats the vial to keep the growth source in a liquid state. Compared to the prior art, where gallium metal solidifies and crystallizes after being removed from the oven and left for a short time, this invention ensures that the growth source in the vial does not solidify into a liquid by means of the heating element 13, facilitating feeding and avoiding damage to the core components caused by solidification and crystallization of the growth source.

[0043] In one embodiment, the feeding device 10 is controlled by a controller (not shown) included in the vertical high-temperature reaction equipment, and the feeding device 10 also includes a temperature sensor 151 and a gravity sensor 152.

[0044] A temperature sensor 151 is located at the bottom of the moving frame 12 and is connected to the controller. The temperature sensor 151 detects the temperature of the bottle. When the temperature of the bottle exceeds a first temperature threshold, the controller controls the heating element 13 to stop heating the bottle. When the temperature of the bottle does not reach the first temperature threshold, the controller controls the heating element 13 to heat the bottle. A gravity sensor 152 is located at the bottom of the moving frame 12 and is connected to the controller. The gravity sensor 152 detects the weight of the heating element 13. When the weight of the heating element 13 does not reach a weight threshold, the controller controls the drive assembly 14 to move vertically downwards to the loading position. When the weight of the heating element 13 reaches the weight threshold, the controller controls the drive assembly 14 to move vertically upwards to the target position.

[0045] It should be noted that the aforementioned controller is, for example, a Proportional-Integral-Differential (PID) controller; the gravity sensor 151 utilizes the crystal deformation characteristics caused by acceleration within its internal components. This deformation generates voltage, and by calculating the relationship between the generated voltage and the applied acceleration, the acceleration can be converted into a voltage output. The temperature sensor 152 is a device capable of sensing changes in the temperature of the container and converting them into a recognizable electrical signal. This embodiment does not specifically limit the controller, gravity sensor 151, and temperature sensor 152, as long as they can achieve the corresponding functions.

[0046] Temperature sensor 151 monitors the temperature of the growth bottle in real time, and the PID controller of the PLC (Programmable Controllers) program sets the temperature parameters to maintain the bottle's temperature in real time, ensuring the growth source remains in a liquid state under safe conditions. Gravity sensor 152 monitors the weight of the heating element 13 in real time, and the PID controller of the PLC program sets the weight parameters to automatically feed the heating element 13.

[0047] In one embodiment, the feeding device 10 further includes a cable tray 15 connecting the fixed frame 11 and the movable frame 12. A signal receiver (not shown) is provided in the cable tray 15. The signal receiver is connected to the controller and is used to receive transport control information and feed it back to the controller, which then controls the drive assembly 14.

[0048] Furthermore, the controller can be controlled by a wireless or wired remote control operated by the operator. A remote control (i.e., a wireless and / or wired remote control) is a device used for remote control, utilizing radio signals to control various mechanisms at a distance. After these signals are received by a remote receiving device (e.g., a signal receiver), they can instruct or drive various corresponding mechanical or electronic devices (e.g., the aforementioned heating element 13 and drive assembly 14) to perform various operations, such as closing circuits, moving handles, or starting motors, after which these machines perform the required operations. In this invention, the drive assembly 14 can be controlled by a wireless or wired remote control to drive the longitudinal movement of the moving frame 12, thereby allowing manual control of the longitudinal movement of the moving frame 12 according to the actual process requirements, resulting in strong compatibility.

[0049] Furthermore, the feeding device 10 also includes a display device (not shown) and an alarm device (not shown) respectively connected to the controller, or the display device and the alarm device are located outside the feeding device 10.

[0050] When temperature sensor 151 detects that the temperature of the flask exceeds the first temperature threshold, it sends feedback to the controller and display device. The display device shows an overheat warning, the alarm device (which may be a buzzer) sounds an alarm, the controller shuts off the power, and the heating element 13 stops heating the flask. When the temperature of the flask does not exceed the first temperature threshold, temperature sensor 151 sends feedback to the controller and display device. The display device cancels the overheat warning, the alarm device stops sounding an alarm, and the PLC program executes a reset command to resume operation. The PLC is connected to the input terminal of temperature sensor 151, and the PLC programming program controls the PID controller to adjust the current, achieving precise control of the heating process. The ideal target temperature is set according to the melting point of the growth source. Temperature sensor 151 collects the actual temperature and feeds the data back to the PID controller. The PID controller adjusts the heating function or frequency according to the deviation between the set value and the actual value to maintain it within the appropriate temperature target range, achieving automatic temperature maintenance of the flask.

[0051] When the gravity sensor 152 detects that the weight of the heating element 13 has not reached the weight threshold (set by the operator based on the weight of the material bottle), the gravity sensor 152 sends feedback to the controller and display device. The display device displays a "growth source missing" warning, and the alarm device sounds an alarm. When the operator places the material bottle containing the growth source onto the heating element 13, and the weight of the heating element 13 reaches the weight threshold, the gravity sensor 152 sends feedback to the controller and display device. The display device then stops displaying the "material bottle missing" warning, and the alarm device stops sounding an alarm.

[0052] It should be noted that the display can be canceled via the cancel button on the wireless or wired remote control, or by directly touching the cancel icon on the display device.

[0053] Furthermore, when the display device shows a missing bottle warning and the alarm device sounds an alarm, the PLC program is triggered, causing the PID controller to control the drive assembly 14 to rotate. The encoder and other feedback devices detect the actual position, speed, and other parameters of the moving frame 12. The PID controller sends pulse signals to control the rotation angle and speed of the drive assembly 14 to achieve positioning control. When the display device shows the moving frame 12 is in a ready-to-descend state, pressing the "OK" button on the remote control controls the rotation of the drive assembly 14, causing the linkage 122 to move vertically downwards, thereby causing the moving body 121 to move vertically downwards via the rollers 123 and guide rail 111. When the display device cancels the missing bottle warning and the alarm device stops sounding an alarm, the display device shows the moving frame 12 is in a ready-to-rise state. Pressing the "OK" button on the remote control controls the rotation of the drive assembly 14, causing the linkage 122 to move vertically upwards, thereby causing the moving body 121 to move vertically upwards via the rollers 123 and guide rail 111. Therefore, by linking the PLC program, PID controller, and display device, precise automatic lifting and multi-speed control can be achieved, and accurate multi-control can be confirmed by wireless or wired remote control. This also prevents malfunctions and accidents caused by the longitudinal movement of the automatic drive component 14 driving the moving frame 12.

[0054] Specifically, the drive assembly 14 can be stopped by pressing the "Stop" button on the remote control or by directly touching the "Stop" indicator on the display device; the drive assembly 14 can be started by pressing the "Start" button on the remote control or by directly touching the "Start" indicator on the display device. When the moving frame 12 approaches the first limit block 114 and the second limit block 115, the drive assembly 14 can switch to low-speed operation and stop after encountering the first limit block 114 and the second limit block 115.

[0055] When the weight of the heating element 13 exceeds the weight threshold, the display device shows an overload warning, and the alarm device sounds an alarm. When the weight of the heating element 13 reaches the weight threshold, the display device cancels the overload warning, the alarm device stops sounding, and the PID controller executes a reset command to resume operation. This improves the safety of the feeding device 10 during operation and avoids human error. The specific process is similar to that described above regarding the weight of the heating element 13 not reaching the weight threshold and reaching the weight threshold, and will not be repeated here.

[0056] Simultaneously, when the load on the drive component 14 exceeds its rated value, the built-in overload protection system is triggered, causing the drive component 14 to stop operating. The display device shows a motor overload warning, and the alarm device sounds an alarm to prevent damage to the drive component 14. When the load on the drive component 14 does not exceed its rated value, the display device cancels the motor overload warning, the alarm device stops sounding, and the drive component 14 automatically resumes operation. When the temperature of the drive component 14 exceeds the second temperature threshold, the drive component 14 triggers overheat protection. The built-in protection mechanism is activated, causing the drive component 14 to stop operating. The display device shows a power overheat warning, and the alarm device sounds an alarm. When the temperature of the drive component 14 drops below a safe range, the display device cancels the power overheat warning, the alarm device stops sounding, and the drive component 14 automatically resumes operation.

[0057] In one implementation, the reference Figure 2 As shown, the guide rail 111 extends laterally at both ends to form a first extension 112 and a second extension 113, and a first limiting block 114 and a second limiting block 115 are respectively provided on the opposite sides of the first extension 112 and the second extension 113.

[0058] By setting a first limit block 114 and a second limit block 115 above and below the guide rail 111 respectively, limit protection is achieved. When the slide rail of the moving frame 12 is overloaded and malfunctions, and a sudden acceleration or deceleration causes a large impact on the upper and lower limits, the PID controller controls the drive assembly 14 to stop running. After the fault is cleared, the PID controller executes a reset command to resume operation. This prevents the moving frame 12 from derailing and falling from a height, which could endanger the lives of people operating below. The first limit block 114, the second limit block 115, the gravity sensor 152, and the drive assembly 14 work together to achieve dual limit protection.

[0059] More specifically, the drive assembly 14 includes: a synchronous pulley 141, a synchronous belt 143, a drive shaft 144, and a drive motor 142 that drives the drive shaft 144 to rotate axially, all disposed on the side of the fixed frame 11. The synchronous pulley 141 and the drive shaft 144 are longitudinally movable, and the two ends of the synchronous belt 143 are respectively sleeved on the outside of the drive shaft 144 and the synchronous pulley 141. The movable frame 12 is fixedly sleeved on the outside of the synchronous belt 143. The drive motor 142 drives the drive shaft 144 to rotate axially, causing the synchronous belt 143 to rotate along the outer periphery of the synchronous pulley 141 and the drive shaft 144, thereby causing the movable frame 12 to move longitudinally along the guide rail 111.

[0060] Furthermore, the movable frame 12 includes a movable body 121 and a linkage 122 fixedly connected. A heating element 13 is disposed on the top of the movable body 121. One end of the linkage 122 is movably sleeved on the outside of the guide rail 111, and the other end of the linkage 122 is fixedly sleeved on the outside of the synchronous belt 143. Rollers 123 are provided on both sides of the linkage 122 on the guide rail 111. The drive motor 142 drives the drive shaft 144 to rotate axially, causing the synchronous belt 143 to rotate along the outer periphery of the synchronous pulley 141 and the drive shaft 144, thereby causing the linkage 122 to move longitudinally along the guide rail 111, which in turn causes the movable body 121 to also move longitudinally along the guide rail 111.

[0061] In one embodiment, the feeding device 10 further includes a small tube frame 124, an outer tube frame 125, and a tool box 126 disposed on the top of the mobile body 121.

[0062] The small tube rack 124 is used to hold small tubes, and the outer tube rack 125 is used to hold outer tubes. Different molds can be customized according to different models and sizes. The small tube rack 124 and the outer tube rack 125 are reusable, highly versatile, and stable, preventing them from shaking. The small tube rack 124 and the outer tube rack 125 in this utility model can avoid the problems of existing manual ladders and reactor frames, which are mostly made of metal materials. These materials are prone to bumps and collisions during handling, causing the quartz outer tubes and small tubes to break. In addition, the high temperature heating of the reactor poses a risk of explosion, affecting the life safety of the operators.

[0063] Tool box 126 is used to store miscellaneous items in transport vehicles. It is not only convenient to carry, but also ensures safety. It reduces the risk of accidents caused by increased worker fatigue due to reduced work efficiency. It solves the problems of increased personnel burden and limited space in existing technologies that require manual climbing to maintain, assemble, and disassemble equipment while wearing tool bags, as well as the inconvenience caused by the limited capacity to carry too many tools.

[0064] In one embodiment, the feeding device 10 further includes a miscellaneous storage box 127 disposed on the top of the mobile body 121 and a pull-out drawer 128 disposed at the bottom of the miscellaneous storage box 127. The miscellaneous storage box 127 and the drawer 128 are similar to the aforementioned tool box 126 and are used to store miscellaneous items of the transport vehicle. They are not only convenient to carry but also ensure safety and reduce the risk of accidents caused by increased worker fatigue due to reduced work efficiency.

[0065] It should be noted that the small tube rack 124, outer tube rack 125, tool box 126, miscellaneous box 127, and drawer 128 are highly compatible, the mold can be disassembled at any time, and they have a large storage capacity, accommodating most of the small and fragile parts of the feeding device 10, as well as some tools used for maintenance.

[0066] In summary, this invention solves the cost problem of manual handling of the growth source by driving the moving frame 12 longitudinally through the drive component 14, thereby improving work efficiency. The weight of the heating element 13 is detected in real time by the temperature sensor 151 and fed back to the controller to control the longitudinal movement of the drive component 14. The temperature of the material bottle is detected in real time by the gravity sensor 152 and fed back to the controller to control the heating element 13 to stop or continue heating the material bottle.

[0067] Meanwhile, this utility model protects the safety of operators and vertical high-temperature reaction equipment through multiple protection functions, avoiding the problems of falling and damaging quartz components and injuring supervisors during manual transportation and high-altitude operations. Firstly, through the linkage of the remote control and signal receiver, the drive component 14 can be directly controlled via the remote control for starting, stopping, raising, lowering, confirming, and canceling operations. Secondly, the temperature sensor 151 and gravity sensor 152 monitor the status of the feeding device 10 in real time. If a malfunction occurs and the device stops working, the display device shows a corresponding prompt, and the alarm device sounds an alarm. Thirdly, a PID controller controls the operation of the drive component 14, and encoders and other feedback devices monitor the actual position, speed, and other parameters of the moving frame 12 in real time. The PID controller sends pulse signals to control the rotation and speed of the drive motor 142 to achieve positioning control. The moving frame 12 moves longitudinally through the linkage 122 and rollers 123. When the drive assembly 14 stops upon encountering the first limit block 114 and the second limit block 115, and just before encountering them, it decelerates to prevent high speed from wearing down the guide rail 111 or knocking open the first and second limit blocks 114 and 115. Fourth, when the drive assembly 14 suddenly accelerates or decelerates due to overload or other faults and impacts the upper and lower limits with great force, the gravity sensor 152 detects the signal and feeds it back to the PID controller. The controller then uses program instructions to stop the drive assembly 14, displays a corresponding prompt, and sounds an alarm. The system automatically resumes operation after the fault is cleared.

[0068] During automatic recovery, when the weight and temperature of the measured object are detected by temperature sensor 151 and gravity sensor 152 and return to normal, feedback is sent to the PID controller. The PID controller then executes a reset command to automatically recover.

[0069] In particular, in this invention, the growth source is heated during transportation, taking gallium as an example. Because the gravitational impact of gallium in its solid state is several times that in its liquid state, when feeding from a height, the liquid in the bottle may solidify and crystallize, damaging the core quartz components (including the reactor, gallium boat, inlet and outlet pipes, etc.). Therefore, the heating element 13 uses a temperature sensor 151 at the bottom of its center around the column to detect temperature changes in real time and provide feedback for PID calculation control and a reasonable temperature range to prevent gallium from solidifying and crystallizing.

[0070] Meanwhile, the feeding device 10 disclosed in this utility model has a simple structure and is easy to disassemble and maintain. The encoder, temperature sensor 151 and gravity sensor 152 and other feedback devices and drive components realize the required position, temperature, automatic recovery, fault alarm and selective lifting for automated and precise control.

[0071] Based on the same design concept, this utility model also discloses a vertical high-temperature reaction device (not shown), which includes: a reaction device (not shown) and a feeding device 10 disposed on the side of the reaction device.

[0072] In this invention, the vertical high-temperature reaction equipment can be, for example, an HVPE equipment or an MOCVD equipment, which is a semiconductor equipment for preparing nitride semiconductor materials through vapor phase epitaxial growth technology, and the specific structure of the feeding device 10 can be referred to the above description, and will not be repeated here.

[0073] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

[0074] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A feeding device for transporting growth sources in a vertical high-temperature reaction apparatus, characterized in that, The feeding device includes: a fixed frame, a movable frame movably sleeved on the side of the fixed frame, a heating element disposed on the top of the movable frame, and a driving assembly; The heating element has multiple material grooves formed longitudinally inside. The material grooves are used to hold the material bottle containing the growth source. The heating element is used to heat the material bottle so that the growth source remains in a liquid state. The fixed frame is provided with a longitudinal guide rail on its side, and the movable frame is movably sleeved on the outside of the guide rail. The driving component drives the movable frame to move longitudinally along the guide rail to transport the material bottle containing the growth source from the loading position to the target position.

2. The feeding device according to claim 1, characterized in that, The feeding device is controlled by a controller included in the vertical high-temperature reaction equipment, and the feeding device further includes: A temperature sensor is installed at the bottom of the movable frame and is connected to the controller. A gravity sensor is installed at the bottom of the mobile frame, and the gravity sensor and the drive assembly are connected to the controller; The temperature sensor is used to detect the temperature of the bottle; when the temperature of the bottle exceeds a first temperature threshold, the controller controls the heating element to stop heating the bottle; when the temperature of the bottle does not reach the first temperature threshold, the controller controls the heating element to heat the bottle. The gravity sensor is used to detect the weight of the heating element; when the weight of the heating element does not reach the weight threshold, the controller controls the drive assembly to move longitudinally downward to the loading position; when the weight of the heating element reaches the weight threshold, the controller controls the drive assembly to move longitudinally upward to the target position.

3. The feeding device according to claim 2, characterized in that, The feeding device further includes: a cable tray connecting the fixed frame and the movable frame, a signal receiver being installed in the cable tray, the signal receiver being connected to the controller, the signal receiver being used to receive transport control signals and feed them back to the controller, and the controller controlling the drive component.

4. The feeding device according to claim 1, characterized in that, The guide rail extends laterally at both ends to form a first extension and a second extension, and a first limiting block and a second limiting block are respectively provided on the opposite sides of the first extension and the second extension.

5. The feeding device according to claim 1, characterized in that, The drive assembly includes: a synchronous pulley, a synchronous belt, a drive shaft, and a drive motor that drives the drive shaft to rotate axially, all disposed on the side of the fixed frame; The synchronous pulley and the drive shaft are arranged sequentially along the longitudinal direction, and the two ends of the synchronous belt are respectively sleeved on the outside of the drive shaft and the synchronous pulley. The movable frame is fixedly sleeved on the outside of the synchronous belt. The drive motor drives the drive shaft to rotate axially, which in turn causes the synchronous belt to rotate along the synchronous pulley and the outer circumference of the drive shaft, thereby causing the moving frame to move longitudinally along the guide rail.

6. The feeding device according to claim 5, characterized in that, The mobile frame includes: a fixedly connected mobile body and a linkage component; The heating element is disposed on the top of the moving body, one end of the linkage is movably sleeved on the outside of the guide rail, the other end of the linkage is fixedly sleeved on the outside of the timing belt, and the linkage is provided with rollers on both sides of the guide rail.

7. The feeding device according to claim 6, characterized in that, The feeding device also includes: a small tube frame, an outer tube frame, and a tool box, all located on the top of the mobile body.

8. The feeding device according to claim 6, characterized in that, The feeding device further includes: a miscellaneous box located on the top of the mobile body and a pull-out drawer located at the bottom of the miscellaneous box.

9. The feeding device according to claim 1, characterized in that, The feeding device is controlled by the controller contained in the vertical high-temperature reaction equipment; The feeding device also includes a display device and an alarm device respectively connected to the controller, or the display device and the alarm device are independently disposed on the outside of the feeding device; When the temperature of the material bottle exceeds the first temperature threshold, the display device displays an overheat warning for the material bottle, and the alarm device sounds an alarm. And / or, when the weight of the heating element exceeds a weight threshold, the display device displays an overload warning, and the alarm device sounds an alarm. And / or, when the temperature of the drive component exceeds the second temperature threshold, the display device displays a power overheat warning, and the alarm device sounds an alarm.

10. A vertical high-temperature reaction device, characterized in that, include: The reaction apparatus and the feeding device provided on the side of the reaction apparatus as described in any one of claims 1 to 9.

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