Silane ground torch burner

Abstract

The utility model belongs to the technical field of waste gas combustors, and provides a silane ground torch combustor, which comprises a vertical pipe, a gas inlet pipe and a gas outlet pipe, the bent pipe is communicated with the vertical pipe, horizontally extends from the outer side wall of the circumference of the vertical pipe and then is bent upwards to form an L-shaped structure; the burning pipe is communicated with the bent pipe and is horizontally arranged; wherein a plurality of nozzles which obliquely and upwards discharge air are formed in the burning pipe in the radial direction of the burning pipe, the nozzles are divided into two groups which are equal in number and are arranged in a staggered mode in the axial direction of the burning pipe, and the two groups of nozzles are linearly arranged on the two sides of the vertical bisection face of the burning pipe at equal intervals respectively. By means of the nozzles with the two sides obliquely and upwards discharging gas, silicon dioxide generated by silane combustion can naturally fall off under the action of self gravity to achieve automatic cleaning, nozzle blockage can be effectively avoided, the manual cleaning operation frequency and potential safety hazards are reduced, meanwhile, silane-containing waste gas can be fully combusted, production safety is guaranteed, and the service life of the device is prolonged. And the waste gas combustion efficiency is greatly improved, so that harm to human health and environmental pollution are prevented.

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