An automatic loading and unloading device for a silicon wafer cleaning machine

Abstract

This utility model relates to the field of cleaning machines, and more particularly to an automatic loading and unloading device for a silicon wafer cleaning machine. It includes a machine body with a cleaning chamber on its upper surface, several casters on its lower surface, a control panel on one side, and a feeding assembly on the upper surface. The feeding assembly includes two support plates, the lower surfaces of which are fixedly connected to the upper surface of the machine body. A lead screw is rotatably connected to one side of the two support plates, which are close to each other. A servo motor is fixedly connected to one side of one of the support plates, and the output end of the servo motor is fixedly connected to one end of the lead screw. The arc surface of the lead screw is threadedly connected to the support plate, and the cross-section of the support plate is L-shaped. This utility model provides an automatic loading and unloading device for a silicon wafer cleaning machine that can automatically complete the loading and unloading of silicon wafers without the need for manual placement or removal, thus improving the ease of use of the cleaning machine and the cleaning efficiency of the silicon wafers.

Description

Technical Field

[0001] This utility model relates to the field of cleaning machines, and in particular to an automatic loading and unloading device for a silicon wafer cleaning machine. Background Technology

[0002] Silicon wafer cleaning machines are key equipment used to remove contaminants from the surface of silicon wafers, and their cleaning effect directly affects the quality of subsequent processes and device performance.

[0003] Utility model CN219899357U discloses a silicon wafer cleaning machine. Its key technical features include: multiple water tank shells and multiple filter shells; a transmission pipe is fixedly connected to one side of the inner wall of each of the multiple water tank shells; a water pump is fixedly connected to one end of each of the multiple transmission pipes; a water outlet pipe is fixedly connected to the output end of each of the multiple water pumps; perforated blocks are fixedly connected to the walls of each of the multiple water outlet pipes; a fixing port is opened on one side of each of the multiple filter shells; and the inner wall of each fixing port is fixedly connected to the surface of the perforated block. This utility model equipment has a highly efficient filtration structure. When the surface of the silicon wafer becomes turbid after repeated cleaning with the cleaning solution, the filtration device can effectively filter the cleaning solution, improving its efficiency and avoiding the drawback of needing to replace large amounts of chemical cleaning solution, reducing purchase costs, lowering equipment processing costs, and preventing waste.

[0004] Regarding the above-mentioned issues, the following technical defects were found: When cleaning silicon wafers, the silicon wafer cleaning machine cannot automatically load and unload the wafers, requiring manual loading or unloading by personnel, which reduces the ease of use and cleaning efficiency of the cleaning machine.

[0005] Therefore, it is necessary to provide a new automatic loading and unloading device for silicon wafer cleaning machines to solve the above-mentioned technical problems. Utility Model Content

[0006] The purpose of this utility model is to address the shortcomings of existing technologies by proposing an automatic loading and unloading device for a silicon wafer cleaning machine.

[0007] To solve the above-mentioned technical problems, this utility model provides an automatic loading and unloading device for a silicon wafer cleaning machine, comprising: a machine body, a cleaning chamber provided on the upper surface of the machine body, several casters mounted on the lower surface of the machine body, a control panel mounted on one side of the machine body, a feeding assembly provided on the upper surface of the machine body, the feeding assembly including two support plates, the lower surfaces of the support plates being fixedly connected to the upper surface of the machine body, a lead screw being rotatably connected to the side of the two support plates that are close to each other, a servo motor being fixedly connected to one side of one of the support plates, the output end of the servo motor being fixedly connected to one end of the lead screw, and a connecting block being threadedly connected to the arc surface of the lead screw, the cross-section of the connecting block being [insert cross-section here]. The connecting block is L-shaped, with welding plates fixedly connected to both sides of its long arm. A reel is rotatably connected to one side of the two welding plates that are close to each other. A lifting rope is fitted onto the arc surface of the reel. A motor is fixedly connected to one side of one of the welding plates, and the output end of the motor is fixedly connected to one side of the reel. The lifting rope is slidably connected to the long arm of the connecting block. One end of the lifting rope is fixedly connected to the arc surface of the reel, and the other end of the lifting rope is fixedly connected to a connecting rope. A connecting ring is fixedly connected to one end of each of the two connecting ropes. The arc surface of the connecting ring has several filter holes. A sealing plate is attached to the lower end of the connecting ring, and the size of the sealing plate matches the size of the opening at the lower end of the connecting ring.

[0008] The effect achieved by the above components is that, by setting up the feeding assembly, the automatic loading and unloading of silicon wafers can be completed when the cleaning machine is used to clean the silicon wafers, without the need for personnel to put in or take out the silicon wafers, which improves the ease of use of the cleaning machine and the cleaning efficiency of the silicon wafers.

[0009] Preferably, a waterproof electric actuator is fixedly connected to the outer wall of the connecting ring, and an ear plate is fixedly connected to the output end of the waterproof electric actuator. One side of the ear plate is fixedly connected to the arc surface of the sealing plate.

[0010] The effect achieved by the above components is that, by setting the above structure, the opening and closing state of the lower end of the connecting ring can be automatically controlled.

[0011] Preferably, a guide rod is slidably provided on the side of the connecting block, and the two ends of the guide rod are respectively fixedly connected to two support plates.

[0012] The effect achieved by the above components is that when the lead screw drives the connecting block to move, the guide rod can guide the movement of the connecting block, thereby improving the stability of the moving process of the connecting block.

[0013] Preferably, the connecting ring is a plastic ring.

[0014] The effect achieved by the above components is that by setting the connecting ring as a plastic ring, the hardness inside the connecting ring can be reduced, which can prevent the silicon wafer from being damaged by collision with the inner wall of the connecting ring during cleaning.

[0015] Preferably, the upper surface of the body is provided with a storage component, the storage component includes a connecting frame, the connecting frame is fixed to the upper surface of the body, the inner wall of the connecting frame is fitted with a storage box, the storage box is placed on the upper surface of the body, handles are fixedly connected to both sides of the outer wall of the storage box, the handles have a "U" shaped cross section, and several partitions are fixedly connected to the inner wall of the storage box, the partitions are evenly distributed on the inner wall of the storage box.

[0016] The effect achieved by the above components is as follows: by setting up the storage components, the storage box can collect the cleaned silicon wafers, and after collection, the personnel can easily disassemble and assemble the storage box, thereby facilitating the centralized transfer of silicon wafers.

[0017] Preferably, the connecting frame is a magnetic frame, and an iron ring is fixedly connected to the outer wall of the storage box, the iron ring being attracted to the connecting frame.

[0018] The effect achieved by the above components is that by setting the connecting frame as a magnetic frame and setting an iron ring on the outer wall of the storage box, the magnetic ring will attract the connecting frame after the storage box is placed inside the connecting frame, thereby making the storage box more secure.

[0019] Preferably, a positioning plate is fixedly connected to the upper surface of the body, and a positioning hole is provided on the lower surface of the storage box, the positioning hole being adapted to the size of the positioning plate.

[0020] The effect achieved by the above components is that when placing the storage box, the positioning plate fixed on the body can be inserted into the positioning hole, thereby improving the stability of the storage box after it is placed on the upper surface of the body.

[0021] Compared with related technologies, the automatic loading and unloading device for a silicon wafer cleaning machine provided by this utility model has the following beneficial effects:

[0022] By setting up a feeding component, the silicon wafers can be automatically loaded and unloaded when the cleaning machine is used to clean them, eliminating the need for personnel to feed or remove the wafers. This improves the ease of use of the cleaning machine and the cleaning efficiency of the silicon wafers.

[0023] By setting up storage components, the storage box can collect the cleaned silicon wafers, and after collection, personnel can easily disassemble and assemble the storage box, thus facilitating the centralized transfer of silicon wafers. Attached Figure Description

[0024] Figure 1This utility model provides a structural schematic diagram of an automatic loading and unloading device for a silicon wafer cleaning machine.

[0025] Figure 2 for Figure 1 The diagram shows the feeding assembly.

[0026] Figure 3 for Figure 1 The diagram shows the structure of the storage components.

[0027] Figure 4 for Figure 3 The diagram shows a partial structural disassembly of the storage component.

[0028] The diagram shows the following components: 1. Machine body; 2. Cleaning chamber; 3. Feeding assembly; 301. Support plate; 302. Lead screw; 303. Connecting block; 304. Servo motor; 305. Guide rod; 306. Welding plate; 307. Roller; 308. Motor; 309. Lifting rope; 310. Connecting rope; 311. Connecting ring; 312. Filter hole; 313. Sealing plate; 314. Waterproof electric actuator; 315. Ear plate; 4. Storage assembly; 41. Connecting frame; 42. Storage box; 43. Handle; 44. Partition; 45. Iron ring; 46. Positioning hole; 47. Positioning plate; 5. Casters; 6. Control panel. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0030] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0031] Please see Figure 1 The present invention provides an automatic loading and unloading device for a silicon wafer cleaning machine, comprising: a machine body 1, a cleaning chamber 2 provided on the upper surface of the machine body 1, a plurality of casters 5 installed on the lower surface of the machine body 1, and a control panel 6 installed on one side of the machine body 1.

[0032] The upper surface of the machine body 1 is provided with a feeding component 3 and a storage component 4.

[0033] In the embodiments of this utility model, please refer to Figure 2The feeding assembly 3 includes two support plates 301. The lower surface of the support plates 301 is fixedly connected to the upper surface of the machine body 1. A lead screw 302 is rotatably connected to one side of the two support plates 301 that is close to each other. A servo motor 304 is fixedly connected to one side of one of the support plates 301. The output end of the servo motor 304 is fixedly connected to one end of the lead screw 302. A connecting block 303 is threadedly connected to the arc surface of the lead screw 302. The cross-section of the connecting block 303 is "L" shaped. Welding plates 306 are fixedly connected to both sides of the long arm end of the connecting block 303. A winding wheel 307 is rotatably connected to one side of the two welding plates 306 that is close to each other. The arc surface of the winding wheel 307 is... The surface is equipped with a lifting rope 309. A motor 308 is fixedly connected to one side of a welding plate 306. The output end of the motor 308 is fixedly connected to one side of a reel 307. The lifting rope 309 is slidably connected to the long arm end of the connecting block 303. One end of the lifting rope 309 is fixedly connected to the arc surface of the reel 307, and the other end of the lifting rope 309 is fixedly connected to a connecting rope 310. One end of the two connecting ropes 310 is fixedly connected to a connecting ring 311. The arc surface of the connecting ring 311 has several filter holes 312. A sealing plate 313 is attached to the lower end of the connecting ring 311, and the size of the sealing plate 313 matches the size of the opening at the lower end of the connecting ring 311. By setting up the feeding assembly 3, the automatic loading and unloading of silicon wafers can be completed automatically when the cleaning machine is used to clean silicon wafers, without the need for personnel to put in or take out silicon wafers, thus improving the ease of use of the cleaning machine and the cleaning efficiency of silicon wafers. A waterproof electric actuator 314 is fixedly connected to the outer wall of the connecting ring 311. An ear plate 315 is fixedly connected to the output end of the waterproof electric actuator 314. One side of the ear plate 315 is fixedly connected to the arc surface of the sealing plate 313. When it is necessary to control the automatic movement of the sealing plate 313, the waterproof electric actuator 314 is activated first to move the ear plate 315, which in turn moves the sealing plate 313. This structure allows for automatic control of the opening and closing state of the lower end of the connecting ring 311. A guide rod 305 slides through the side of the connecting block 303. Both ends of the guide rod 305 are fixedly connected to two support plates 301. When the lead screw 302 drives the connecting block 303 to move, the guide rod 305 guides the movement of the connecting block 303, thereby improving the stability of the movement. The connecting ring 311 is specifically a plastic ring. By making the connecting ring 311 a plastic ring, the internal hardness of the connecting ring 311 can be increased, which can prevent the silicon wafer from being damaged by bumping against the inner wall of the connecting ring 311 during cleaning.

[0034] In the embodiments of this utility model, please refer to Figure 3 and Figure 4The storage component 4 includes a connecting frame 41, which is fixed to the upper surface of the body 1. A storage box 42 is attached to the inner wall of the connecting frame 41 and placed on the upper surface of the body 1. Handles 43 with a U-shaped cross-section are fixedly connected to both sides of the outer wall of the storage box 42. Several partitions 44 are fixedly connected to the inner wall of the storage box 42 and are evenly distributed. By setting up the storage component 4, the storage box 42 can collect the cleaned silicon wafers, and personnel can easily disassemble and reassemble the storage box 42 after collection, thus facilitating the centralized transfer of silicon wafers. The connecting frame 41 is a magnetic frame, and an iron ring 45 is fixedly connected to the outer wall of the storage box 42, which is attracted to the connecting frame 41. By setting the connecting frame 41 as a magnetic frame and setting an iron ring 45 on the outer wall of the storage box 42, the magnetic ring will attract the connecting frame 41 after the storage box 42 is placed inside the connecting frame 41, thereby making the storage box 42 more securely fixed. A positioning plate 47 is fixedly connected to the upper surface of the body 1, and a positioning hole 46 is opened on the lower surface of the storage box 42. The positioning hole 46 is adapted to the size of the positioning plate 47. When placing the storage box 42, the positioning plate 47 fixed on the body 1 can be inserted into the positioning hole 46, thereby improving the stability of the storage box 42 after it is placed on the upper surface of the body 1.

[0035] The working principle of the automatic loading and unloading device for a silicon wafer cleaning machine provided by this utility model is as follows: When the silicon wafer needs to be cleaned, the silicon wafer to be cleaned is first placed in the space formed by the connecting ring 311 and the sealing plate 313. Then, the servo motor 304 is started to drive the lead screw 302 to rotate. The lead screw 302 drives the connecting block 303, and the connecting block 303 drives the connecting ring 311, so that the connecting ring 311 moves to the top of the cleaning chamber 2. Then, the motor 308 is started to control the reel 307 to rotate, so that the lifting rope 30 9. The wafer detaches from the reel 307 and moves downward through the connecting block 303. The suspension rope 309 drives the connecting rope 310, which in turn drives the connecting ring 311, causing the connecting ring 311 to enter the cleaning chamber 2. It is important to ensure that the connecting ring 311 is not completely submerged in the water in the cleaning chamber 2 to prevent the silicon wafer from floating out. During the cleaning process, the servo motor 304 can be activated to continuously rotate forward and backward, causing the connecting ring 311 to continuously reciprocate laterally within the cleaning chamber 2. This allows the silicon wafers to move during the cleaning process, improving cleaning efficiency. After the silicon wafers are cleaned, the starting motor 308 drives the reel 307 to rotate in the opposite direction, causing the lifting rope 309 to wind around the arc surface of the reel 307. The lifting rope 309 drives the connecting rope 310 and the connecting ring 311, causing the connecting ring 311 to move out of the cleaning chamber 2. Then, the servo motor 304 drives the lead screw 302 to rotate, driving the connecting ring 311 to move away from above the cleaning chamber 2. Finally, the waterproof electric actuator 314 drives the ear plate 315. The ear plate 315 drives the sealing plate 313, which opens the lower end of the connecting ring 311, thereby enabling automatic material discharge. When the lead screw 302 drives the connecting block 303 to move, the guide rod 305 can guide the movement of the connecting block 303, thereby improving the stability of the movement of the connecting block 303. In addition, by setting the connecting ring 311 as a plastic ring, the hardness of the inside of the connecting ring 311 can be increased, which can prevent the silicon wafer from being damaged by collision with the inner wall of the connecting ring 311 during cleaning.

[0036] After the silicon wafers are cleaned and transported to the top of the receiving box 42 by the feeding assembly 3, the receiving box 42 can store the cleaned silicon wafers in the connecting ring 311, thus facilitating the centralized transfer of silicon wafers. The partition 44 inside the receiving box 42 can separate and arrange silicon wafers from different batches. When the receiving box 42 is full and the silicon wafers inside need to be transferred centrally, first move the handle 43 to move the receiving box 42, so that the iron frame on the receiving box 42 separates from the connecting frame 41 on the machine body 1. After separation, the handle 43 can be moved to drive the storage box 42 to centrally transfer the silicon wafers. When the storage box 42 needs to be installed, first move the storage box 42 to place it into the connecting frame 41. The magnetic frame material of the connecting frame 41 will attract the iron ore on the outer wall of the storage box 42, thereby making the storage box 42 fixed and stable. When placing the storage box 42, the positioning plate 47 fixed on the body 1 can be inserted into the positioning hole 46, thereby improving the stability of the storage box 42 after it is placed on the upper surface of the body 1.

[0037] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0038] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An automatic loading and unloading device for a silicon wafer cleaning machine, characterized in that, include: The machine body (1) has a cleaning chamber (2) on its upper surface and several casters (5) on its lower surface. A control panel (6) is installed on one side of the machine body (1). A feeding assembly (3) is provided on the upper surface of the machine body (1). The feeding assembly (3) includes two support plates (301). The lower surface of the support plates (301) is fixedly connected to the upper surface of the machine body (1). The two support plates (301) are positioned opposite each other. A lead screw (302) is rotatably connected to one side of the adjacent side. A servo motor (304) is fixedly connected to one side of one of the support plates (301). The output end of the servo motor (304) is fixedly connected to one end of the lead screw (302). A connecting block (303) is threadedly connected to the arc surface of the lead screw (302). The cross-section of the connecting block (303) is "L" shaped. Welding plates (306) are fixedly connected to both sides of the long arm end of the connecting block (303). Two welding plates (306) are rotatably connected to a reel (307) on their sides, which are close to each other. A lifting rope (309) is fitted onto the arc surface of the reel (307). A motor (308) is fixedly connected to one side of one of the welding plates (306). The output end of the motor (308) is fixedly connected to one side of the reel (307). The lifting rope (309) is slidably connected to the long arm end of the connecting block (303). One end of the lifting rope (309) is connected to... The arc surface of the reel (307) is fixedly connected, and the other end of the hoisting rope (309) is fixedly connected to a connecting rope (310). One end of each of the two connecting ropes (310) is fixedly connected to a connecting ring (311). The arc surface of the connecting ring (311) is provided with several filter holes (312). The lower end of the connecting ring (311) is fitted with a sealing plate (313). The size of the sealing plate (313) is adapted to the size of the opening at the lower end of the connecting ring (311).

2. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 1, characterized in that, A waterproof electric actuator (314) is fixedly connected to the outer wall of the connecting ring (311), and an ear plate (315) is fixedly connected to the output end of the waterproof electric actuator (314). One side of the ear plate (315) is fixedly connected to the arc surface of the sealing plate (313).

3. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 1, characterized in that, The connecting block (303) has a guide rod (305) slidably passing through its side, and the two ends of the guide rod (305) are fixedly connected to the two support plates (301) respectively.

4. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 1, characterized in that, The connecting ring (311) is specifically a plastic ring.

5. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 1, characterized in that, The upper surface of the body (1) is provided with a storage component (4). The storage component (4) includes a connecting frame (41). The connecting frame (41) is fixed to the upper surface of the body (1). The inner wall of the connecting frame (41) is fitted with a storage box (42). The storage box (42) is placed on the upper surface of the body (1). Handles (43) are fixedly connected to both sides of the outer wall of the storage box (42). The cross-section of the handle (43) is "U". Several partitions (44) are fixedly connected to the inner wall of the storage box (42). The partitions (44) are evenly distributed on the inner wall of the storage box (42).

6. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 5, characterized in that, The connecting frame (41) is a magnetic frame, and an iron ring (45) is fixedly connected to the outer wall of the storage box (42). The iron ring (45) is attracted to the connecting frame (41).

7. The automatic loading and unloading device for a silicon wafer cleaning machine according to claim 5, characterized in that, A positioning plate (47) is fixedly connected to the upper surface of the body (1), and a positioning hole (46) is provided on the lower surface of the storage box (42). The positioning hole (46) is adapted to the size of the positioning plate (47).

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