Temperature control clamping tool for magnetron sputtering coating

Abstract

The utility model relates to tooling technical field, concretely is a kind of temperature control clamping tool for magnetron sputtering coating, including fixed frame, the inside installation of fixed frame is with the heat absorption plate that substrate top is conformed, the top of heat absorption plate is installed heat conduction plate, the top of heat conduction plate is installed heat exchanger, this temperature control clamping tool for magnetron sputtering coating, setting clamping rod clamping substrate, clamping rod side face is U letter shape bending, upper end is inclined to outside, form outer expansion formula arc portion, front eight character shape symmetry distribution, constitute bifurcation support structure, so that substrate level is suspended, realize sputtering particle overall coverage, guarantee the uniformity and integrity of coating, set heat absorption plate, heat conduction plate and heat exchanger, by water cooling heat exchange, substrate can keep stable temperature in coating process, avoid the coating quality decline or substrate deformation due to temperature is too high or too low.

Description

Technical Field

[0001] This utility model relates to the field of tooling technology, specifically to a temperature-controlled clamping tooling for magnetron sputtering coating. Background Technology

[0002] The temperature-controlled clamping fixture used in magnetron sputtering coating is a specially designed sample holder whose core function is to precisely control the temperature of the substrate (workpiece to be coated) during the sputtering process.

[0003] A search revealed a Chinese patent (CN222908046U) disclosing a magnetron sputtering coating fixture and moving device, including a receiving component with a constraint groove. The constraint groove accommodates and supports a substrate, and when the substrate is located inside the constraint groove, it is tilted upwards. This invention provides a magnetron sputtering coating fixture and moving device to solve the problem in existing vertical fixtures where the substrate edges are obstructed, preventing full coating.

[0004] However, in actual use, it was found that when the substrate is on a vertical fixture, gravity causes particles to settle faster, resulting in uneven coating thickness. Furthermore, the heat dissipation path needs to be indirectly conducted through the constraint groove, which can easily lead to local overheating and coating defects. To address this, we propose a temperature-controlled clamping fixture for magnetron sputtering coating. Utility Model Content

[0005] The technical problem to be solved by this application is that when the substrate is on a vertical fixture, gravity will cause particles to settle at an accelerated rate, resulting in uneven coating thickness. Furthermore, the heat dissipation path needs to be indirectly conducted through the constraint groove, which can easily lead to local overheating and coating defects.

[0006] To solve the above-mentioned technical problems, this utility model provides a temperature-controlled clamping fixture for magnetron sputtering coating, including a fixed frame. Both ends of the bottom of the fixed frame are provided with clamping rods for clamping the substrate. The sides of the clamping rods are U-shaped and the upper ends are inclined outward to form an outwardly expanding arc-shaped part. The front of the clamping rods at both ends are symmetrically distributed in a figure-eight shape to form a bifurcated support structure. A heat-absorbing plate that fits against the top of the substrate is installed inside the fixed frame. A heat-conducting plate is installed on the top of the heat-absorbing plate, and a heat exchanger is installed on the top of the heat-conducting plate.

[0007] The heat exchanger of this invention is connected to two water inlet pipes at the top, and the two water inlet pipes extend out of the top of the fixing frame.

[0008] Both sides of the fixed frame of this utility model are provided with insert blocks, and the upper end of the clamping rod passes through the insert block and is fixed to the insert block by a fixing pin.

[0009] The fixed frame of this invention has two sides rotatably mounted with bidirectional threaded rods. The two ends of the bidirectional threaded rods are connected to sliders that are slidably connected to the inner wall of the fixed frame. The sliders are fixedly connected to the insert blocks.

[0010] An inner rod is installed on one side of the fixed frame of this utility model, and an outer rod is sleeved on the lower end of the inner rod. A fixing member for fixing the inner rod is provided on the outside of the outer rod.

[0011] The clamping rod described in this utility model is a carbon fiber and stainless steel composite structure.

[0012] The outer side of the clamping rod described in this invention is coated with tungsten disulfide.

[0013] This utility model has at least the following beneficial effects:

[0014] The substrate is held in place by clamping rods with a U-shaped bend on the side and an outward tilt at the top, forming an outwardly expanding arc-shaped section. The front side is symmetrically distributed in a figure-eight shape, forming a forked support structure that allows the substrate to be suspended horizontally, achieving full coverage of sputtered particles and ensuring the uniformity and integrity of the coating. A heat-absorbing plate, a heat-conducting plate, and a heat exchanger are installed, and water cooling heat exchange is used to maintain a stable temperature on the substrate during the coating process, avoiding a decrease in coating quality or substrate deformation due to excessively high or low temperatures. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the connection between the fixing frame and the clamping rod of this utility model;

[0016] Figure 2 This is a cross-sectional side view of the fixed frame of this utility model;

[0017] Figure 3 This is a bottom view of the structure of the fixed frame of this utility model;

[0018] Figure 4 This is a top view of the structure of the fixed frame of this utility model;

[0019] Figure 5 This utility model Figure 4 Enlarged view of the structure at point A in the middle;

[0020] Figure 6 This is a schematic diagram of the overall structure of this utility model.

[0021] In the diagram: 1. Fixed frame; 2. Clamping rod; 3. Heat absorber plate; 4. Heat conduction plate; 5. Heat exchanger; 6. Water inlet pipe; 7. Insert block; 8. Slider; 9. Bidirectional threaded rod; 10. Handle; 11. Fixing pin; 12. Inner rod; 13. Outer rod; 14. Fixing component. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example 1: Please refer to Figure 1 , Figure 2 and Figure 3 This utility model provides a technical solution: a temperature-controlled clamping fixture for magnetron sputtering coating, including a fixed frame 1. Both ends of the bottom of the fixed frame 1 are provided with clamping rods 2 for clamping the substrate. The sides of the clamping rods 2 are U-shaped and the upper end is inclined outward to form an outwardly expanding arc-shaped part. The front of the clamping rods 2 at both ends is symmetrically distributed in a figure-eight shape to form a bifurcated support structure. A heat-absorbing plate 3 that is in contact with the top of the substrate is installed inside the fixed frame 1. A heat-conducting plate 4 is installed on the top of the heat-absorbing plate 3. A heat exchanger 5 is installed on the top of the heat-conducting plate 4.

[0024] The upper end of the inner side of the clamping rod 2 contacts the outer side of the substrate to support the substrate, making the substrate horizontally suspended. Compared with the design of the inclined substrate, this optimizes the uniform distribution of plasma and reduces the defect rate of the thin film. The design of the upper end of the clamping rod 2 tilting outwards allows the substrate to adhere to the clamping rod 2 under its own weight, reducing stress concentration caused by mechanical clamping. The design of the clamping rods 2 at both ends symmetrically distributed in a figure-eight shape ensures that the clamping rod 2 does not contact the movement trajectory of the sputtered particles, so that the substrate can fully accept the coating of sputtered particles, ensuring the uniformity and integrity of the coating.

[0025] Example 2: Based on Example 1, as follows Figure 2 As shown, the top of the heat exchanger 5 is connected to two water inlet pipes 6, which extend out of the top of the fixed frame 1. One water inlet pipe 6 is connected to the inlet of the outer circulating water tank, and the other water inlet pipe 6 is connected to the outlet of the fixed water pump on the outer circulating water tank. The inlet pipe of the water pump is connected to the outlet of the circulating water tank.

[0026] Example 3: Based on Example 2, such as Figure 3 , Figure 4 and Figure 5 As shown, there are insert blocks 7 on both sides inside the fixed frame 1. The upper end of the clamping rod 2 passes through the insert block 7 and is fixed to the insert block 7 by the fixing pin 11. The insert block 7 is provided with an oblique hole that matches the size of the clamping rod 2, which is used to limit the tilt angle of the clamping rod 2. The fixing pin 11 is used to fix the clamping rod 2 and the insert block 7 to prevent the clamping rod 2 from separating from the insert block 7. The clamping rod 2 can be disassembled by the fixing pin 11.

[0027] Example 4: Based on Example 3, such as Figure 3 and Figure 4 As shown, a bidirectional threaded rod 9 is rotatably installed on both sides inside the fixed frame 1. The two ends of the bidirectional threaded rod 9 are connected to sliders 8 that are slidably connected to the inner wall of the fixed frame 1 by reverse threads. The sliders 8 are fixedly connected to the insert block 7. A handle 10 is installed at one end of the bidirectional threaded rod 9 that extends out of the fixed frame 1. The bidirectional threaded rod 9 realizes the synchronous movement of the sliders 8 at both ends, so that the clamping rods 2 at both ends are always symmetrically arranged, which is convenient for clamping both ends of the substrate.

[0028] Example 5: Based on Example 4, such as Figure 6 As shown, an inner rod 12 is installed on one side of the fixed frame 1, and an outer rod 13 is sleeved on the lower end of the inner rod 12. A fastener 14 (such as a buckle / bolt) for fixing the inner rod 12 is provided on the outside of the outer rod 13. The height of the fixed frame 1 can be adjusted by the inner rod 12 and the outer rod 13 to adapt to sputtering equipment with different cavity depths.

[0029] Example 6: Based on Example 5, such as Figure 1 , Figure 2 and Figure 3 As shown, the clamping rod 2 is a carbon fiber and stainless steel composite structure. The carbon fiber and stainless steel composite structure has high strength, high elasticity and high thermal conductivity. It can not only bend and deform, but also remain stable in the high temperature and high pressure coating environment. It also helps to uniformly transfer heat and avoid the substrate from overheating or deforming.

[0030] Example 7: Based on Example 6, as follows Figure 1 , Figure 2 and Figure 3 As shown, the outer side of the clamping rod 2 is coated with tungsten disulfide. Tungsten disulfide has a low coefficient of friction and high heat resistance, which can reduce friction with the substrate and withstand the high temperature of the sputtering cavity.

[0031] Based on the above embodiments, the following is the complete working principle of the above embodiments: During coating, the top of the substrate is attached to the heat absorption plate 3, and the two-way threaded rods 9 on both sides are rotated to drive the slider 8 and the insert block to slide, which drives the clamping rods 2 at both ends to move closer to the substrate, so that the substrate is fixed in the clamping rods 2 at both ends. When the substrate is heated or cooled, the water pump in the external circulating water tank is started to make the water circulate in the heat exchanger 5 and the circulating water tank. The heat absorption plate 3 and the heat conduction plate 4 keep the substrate at a stable temperature. After the coating is completed, the two-way threaded rods 9 are rotated in the opposite direction to disengage the clamping rods 2 at both ends from the substrate, thereby completing the disassembly of the substrate after coating.

[0032] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A temperature-controlled clamping fixture for magnetron sputtering coating, characterized in that: The device includes a fixing frame, with clamping rods for holding the substrate at both ends of the bottom of the fixing frame. The sides of the clamping rods are U-shaped and the upper ends are inclined outward to form an outwardly expanding arc-shaped part. The front of the clamping rods at both ends are symmetrically distributed in a figure-eight shape to form a bifurcated support structure. A heat-absorbing plate that fits against the top of the substrate is installed inside the fixing frame. A heat-conducting plate is installed on the top of the heat-absorbing plate, and a heat exchanger is installed on the top of the heat-conducting plate.

2. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 1, characterized in that: The top of the heat exchanger is connected to two water inlet pipes, which extend out of the top of the fixing frame.

3. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 1, characterized in that: Both sides of the fixed frame are provided with insert blocks, and the upper end of the clamping rod passes through the insert blocks and is fixed to the insert blocks by fixing pins.

4. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 3, characterized in that: Both sides inside the fixed frame are rotatably mounted with bidirectional threaded rods. The two ends of the bidirectional threaded rods are connected to sliders that are slidably connected to the inner wall of the fixed frame. The sliders are fixedly connected to the insert blocks.

5. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 1, characterized in that: An inner rod is installed on one side of the fixed frame, and an outer rod is sleeved on the lower end of the inner rod. A fixing member for fixing the inner rod is provided on the outside of the outer rod.

6. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 3, characterized in that: The clamping rod is a carbon fiber and stainless steel composite structure.

7. The temperature-controlled clamping fixture for magnetron sputtering coating according to claim 6, characterized in that: The outer side of the clamping rod is coated with tungsten disulfide.

Images