A fully automatic thermal evaporation carbon coating system

The fully automated control system and modularly designed thermal evaporation carbon coating equipment solves the problems of operational dependence, evaporation source compatibility and sample stage adaptability of existing equipment, achieving high stability and safety of coating and uniform coating for samples with complex morphology.

CN224313625UActive Publication Date: 2026-06-02SHENZHEN M&M SCI CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN M&M SCI CO LTD
Filing Date
2025-07-22
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing thermal evaporation carbon coating equipment suffers from problems such as strong reliance on manual operation, poor compatibility of evaporation sources, insufficient adaptability of sample stages, and separation of vacuum and evaporation control, which affect the uniformity and stability of the coating.

Method used

It adopts a fully automatic control system that integrates an evaporation control module and a vacuum module, supporting automatic adjustment and real-time monitoring of parameters such as evaporation pressure, voltage, and time. It features a modular evaporation source design that supports quick replacement of the evaporation source, and is equipped with an adjustable sample stage and an intelligent pressure relief system to ensure uniform coating of samples with complex morphologies.

Benefits of technology

It achieves high repeatability and stability of coating, improves operational safety, avoids the risk of human intervention, and adapts to different experimental needs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of full-automatic thermal evaporation carbon plating systems, specifically relates to vacuum coating technology field, including main casing, the main casing front end one side fixedly installed with display screen, the main casing top is provided with upper cover plate.The utility model is equipped with evaporation source and display screen and other structures, so that the utility model can realize full-automatic control, integrated evaporation control module and vacuum module, realize the automatic regulation and control and real-time monitoring of evaporation gas pressure, voltage, time and other parameters, improve plating film repeatability and stability, adopt modular evaporation source design, system supports quick replacement carbon rod evaporation source or carbon rope evaporation source, without complex disassembly, adapt to different experimental needs, with adjustable sample stage, adopt height-adjustable sample stage or optional rotary sample stage, ensure the uniform plating film of complex morphology sample, with intelligent pressure relief system, through electromagnetic valve control's pressure relief passage, improve operation safety, avoid artificial intervention risk.
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