Laser reflection module and adjustable bombardment point polymer pulsed laser vapor deposition system

Abstract

This invention provides a laser reflection module and an adjustable bombardment point system for polymer pulsed laser vapor deposition, belonging to the field of polymer film formation technology. This invention integrates the reflection module into the deposition system, achieving dynamic adjustment of the bombardment point ("manual adjustment" of a 4-DOF mechanical structure + "electrified automatic adjustment" of the final bombardment point through continuous rotation of a slightly tilted lens assembly driven by a motor, thus overcoming the limitations of traditional fixed optical paths. It avoids the problem of excessive laser energy at the same point due to fixed bombardment by pulsed lasers in existing technologies, which leads to polymer degradation and reduced product quality after film formation. This enables the vapor deposition of polymer materials and the preparation of polymer thin films.

Description

Technical Field

[0001] This invention belongs to the field of polymer film formation technology, specifically relating to a laser reflection module and a polymer pulsed laser vapor deposition system with adjustable bombardment point. Background Technology

[0002] In the field of polymer film formation technology, commonly used methods for preparing polymer thin films using vapor deposition include magnetron sputtering, molecular beam epitaxy, and pulsed laser deposition, depending on their vaporization methods.

[0003] For pulsed laser deposition, methods such as... are commonly used. Figure 14 The image shows a laser vapor deposition system for polymer materials.

[0004] Figure 14 This is a simplified schematic diagram of the structure of a laser vapor deposition system for polymer materials under existing technology.

[0005] like Figure 14 As shown, the existing polymer material laser vapor deposition system 101 includes a laser 10, a convex lens 30, a laser vapor deposition device 40, and a cooling module 50.

[0006] Laser 10 is placed on the experimental platform to emit pulsed infrared laser light in the range of 800nm ​​to 2000nm.

[0007] The convex lens 30 is fixed by an optical stage and placed on the experimental stage to focus the pulsed infrared laser emitted by the laser 10.

[0008] The laser vapor deposition apparatus 40 includes a vacuum chamber 41, a sample target 42, and a substrate 43.

[0009] The vacuum chamber 41 is used to maintain a vacuum environment and has an optical window 41a, a first viewing window (not shown in the figure), a second viewing window (not shown in the figure), and a vacuum pump flange 41b.

[0010] The optical window 41a is used to allow the pulsed infrared laser focused by the convex lens 30 to enter the vacuum cavity 41.

[0011] The first viewing window (not shown in the figure) and the second viewing window (not shown in the figure) are located on opposite side walls of the vacuum chamber 41 so that the user can observe the internal environment of the vacuum chamber 41.

[0012] Vacuum pump flange 41b is used to connect to a vacuum pump, thereby evacuating the vacuum chamber 41.

[0013] The sample target 42 is disposed in the vacuum chamber 41. The sample target 42 has a circular groove 42a for holding a frozen polymer precursor solution. The frozen polymer precursor solution in the circular groove 42a is bombarded by a pulsed infrared laser that passes through the optical window 41a. The sample target 42 and its circular groove 42a are arranged vertically.

[0014] The substrate 43 is disposed inside the vacuum cavity 41 via the substrate holder 43a and is located in front of the circular groove 42a of the sample target 42, so that the polymer generated by the pulsed infrared laser bombarding the frozen polymer precursor solution in the circular groove 42a is deposited on the substrate 43.

[0015] The cooling module 50 includes a cryogenic fluid inlet passage 51, a cryogenic fluid pipeline (not shown in the figure), and a cryogenic fluid outlet passage 52.

[0016] The cryogenic fluid inlet passage 51 passes through the wall of the vacuum chamber 41 and is used to introduce cryogenic fluid (liquid nitrogen is generally selected as the cryogenic fluid).

[0017] A cryogenic fluid pipeline (not shown in the figure) is connected to a cryogenic fluid inlet passage 51. The cryogenic fluid pipeline passes through the sample target 42 to allow cryogenic fluid to flow, thereby maintaining the polymer precursor solution in the circular groove 42a in a frozen state. The sample target 42 and the cooling module 50 are both made of high thermal conductivity metal.

[0018] The cryogenic fluid outlet passage 52 passes through the wall of the vacuum chamber 41 and is connected to the cryogenic fluid pipeline for the outflow of cryogenic fluid.

[0019] The process of using the existing polymer laser vapor deposition system 101 includes the following steps:

[0020] A01, after the polymer precursor solution is pre-frozen in the circular groove 42a of the sample target 42 by the cooling module 50, the sample target 42 is fixed in the vacuum chamber 41.

[0021] A02, turn on the vacuum pump connected to the vacuum pump flange 41b and evacuate it, turn on the cooling module 50, thereby continuously providing freezing conditions for the polymer precursor solution in the sample target 42.

[0022] A03, the user observes the internal condition of the vacuum cavity 41 through the first window (not shown in the figure) and the second window (not shown in the figure), and under visual observation, adjusts the position of the laser 10 and the direction of the emitted pulsed infrared laser, as well as the optical stage of the fixed convex lens 30, to adjust the optical path of the pulsed infrared laser formed between the laser 10, the convex lens 30, the optical window 41a and the sample target 42, so that the pulsed infrared laser emitted by the laser 10 bombards the frozen polymer precursor solution in the circular groove 42a of the sample target 42, thereby causing the bombarded polymer to be deposited on the substrate 43.

[0023] A04, Experiment complete.

[0024] The structure and usage of the existing polymer laser vapor deposition system 101 described above illustrate this. While the existing pulsed laser deposition technology using this system employs direct laser bombardment of the polymer for deposition, achieving vapor-phase film formation on the substrate 43, it suffers from the following problems during its use:

[0025] Laser 10 is placed directly on the experimental stage, and its emitted pulsed infrared laser enters the vacuum cavity 41 through optical window 41a. In step A03, the adjustment of the optical path and the final bombardment point is achieved by manually moving the position and angle of laser 10. However, since the frozen polymer precursor solution that is ultimately bombarded by the pulsed infrared laser is located in a small circular trough 42a, and the error between manually moving the position of laser 10 and the direction of its emitted pulsed infrared laser is relatively large, even a slight movement of laser 10 may cause the bombardment point of the pulsed infrared laser to fall outside the circular trough 42a and fail to bombard.

[0026] Therefore, once the optical path and final bombardment point are adjusted, the laser 10 will not be moved. Furthermore, the bombardment point of the pulsed infrared laser is generally not adjusted during the laser vapor deposition process. This means that the pulsed laser can only bombard the same point of the frozen polymer precursor solution in the circular groove 42a of the sample target 42. This results in excessive laser energy at the same point, leading to polymer degradation and failure to guarantee the chemical composition of the film after deposition, thus causing a decline in product quality. (Faced with the high-energy pulsed laser used for excitation, polymer materials with poor stability cannot maintain their original chemical composition, affecting the quality and performance of the deposited film.) Utility Model Content

[0027] This invention was developed to solve the above-mentioned problems, and aims to provide a laser reflection module and a pulsed laser vapor deposition system for polymer materials with adjustable bombardment points.

[0028] This invention provides a laser reflection module, characterized for use in a pulsed laser vapor deposition system for polymer materials, thereby enabling adjustable-angle reflection of pulsed infrared laser light from a laser. The module includes: a base, serving as the substrate of the laser reflection module, with protrusions perpendicular to its plane on its opposite side walls, designated as first limiting portions, the arrangement direction of the two first limiting portions designated as the X-axis; a first moving member, with protrusions perpendicular to its plane on its opposite side walls, designated as second limiting portions, the arrangement direction of the two second limiting portions designated as the Y-axis, the first moving member being movably mounted on the base along the X-axis and located between the two first limiting portions, the X-axis being perpendicular to the Y-axis; and a second moving member, movably mounted on the first moving member along the Y-axis and located between the two second limiting portions, the top of the second moving member having an upward-opening cylindrical embedding groove, the axial direction of the embedding groove designated as the Z-axis. The system comprises: a first rotating member perpendicular to the X-axis and Y-axis; a first rotating member having a matching fitting portion at its bottom that is embedded in a recess, allowing it to rotate relative to a second moving member about the Z-axis; and a first rotating member having two first clamping arms extending along the Z-axis at its top; a second rotating member including a mounting plate and two second clamping arms disposed on the mounting plate, the two second clamping arms being clamped or fixed to the two first clamping arms by bolts, wherein, when the corresponding bolts are loosened, the second rotating member can be rotated relative to the first rotating member, and the plane of the rotation direction is perpendicular to the plane formed by the X-axis and Y-axis; a motor disposed on the side of the mounting plate opposite to the first rotating member, and the power output shaft of the motor passing through the mounting plate; and a lens assembly disposed on the power output shaft and driven by it to rotate about the power output shaft, the lens assembly containing a reflective lens for reflecting pulsed infrared laser emitted by the laser, the angle between the axis of the reflective lens and the power output shaft being adjustable.

[0029] The laser reflection module provided by this utility model may also include a first lead screw and a second lead screw. The first lead screw includes a first gripping part, a first transmission part, and a first threaded part that are sequentially connected and coaxial. The first limiting part has a first through hole extending along the X-axis, through which the first transmission part passes. The first moving part has a first threaded hole extending along the X-axis, through which the first threaded part passes. When the user rotates the first gripping part and drives the first threaded part to rotate around its own axis through the first transmission part, the lead screw transmission structure is activated. The first moving part is displaced on the base along the X-axis; the second lead screw includes a second gripping part, a second transmission part, and a second threaded part that are connected to each other in sequence and coaxially. The second limiting part has a second through hole that passes through along the Y-axis. The second through hole is used for the second transmission part to pass through. The second moving part has a second threaded hole that passes through along the Y-axis. The second threaded hole is used for the second threaded part to pass through. When the user rotates the second gripping part and drives the second threaded part to rotate around its own axis through the second transmission part, the second moving part is displaced on the first moving part along the Y-axis through the lead screw transmission structure.

[0030] The laser reflection module provided by this utility model may also have the following features: the first limiting part has a first track hole extending along the X-axis direction, the first moving part has a second track hole extending along the X-axis direction, and the first limiting part and the first moving part are movably connected in the X-axis direction by a first connecting post passing through the first track hole and the second track hole, with both ends of the first connecting post fixed in the corresponding two first track holes; the second limiting part has a third track hole extending along the Y-axis direction, the second moving part has a fourth track hole extending along the Y-axis direction, and the second limiting part and the second moving part are movably connected in the Y-axis direction by a second connecting post passing through the third track hole and the fourth track hole, with both ends of the second connecting post fixed in the corresponding two third track holes.

[0031] The laser reflection module provided by this utility model may also have the following features: the first rotating component includes: a rotating body; a fitting part disposed at the bottom of the rotating body and coaxial with it, the outer diameter of the fitting part being larger than the outer diameter of the rotating body; and two first clamping arms extending from the top of the rotating body. The laser reflection module also includes an anti-detachment plate, which has a snap-fit ​​hole matching the outer diameter of the rotating body. When the fitting part is fitted into the embedding groove, thereby allowing the first rotating component to be rotatably disposed on the second moving component, the anti-detachment plate is fixedly disposed on the second moving component, and the snap-fit ​​hole allows the rotating body to pass through, thereby allowing the anti-detachment plate to rotatably fix the fitting part in the embedding groove.

[0032] The laser reflection module provided by this utility model may also have the following features: the lens assembly includes: a lens flange, fixed to the power output shaft and driven by it to rotate coaxially, the lens flange having two mounting holes symmetrically distributed at the edge of the lens flange; a first clamping member, which is a ring structure, having threaded holes corresponding to the two mounting holes, the first clamping member being fixed in position and angle with the lens flange by bolts passing through the threaded holes and mounting holes in sequence and being engaged with nuts, the first clamping member having a countersunk hole at its center; a reflecting lens, embedded in the countersunk hole and abutting the bottom of the countersunk hole, the outer diameter of the reflecting lens being larger than the minor diameter of the countersunk hole and less than or equal to the major diameter of the countersunk hole; and a second clamping member, which is a ring structure, fixed to the side of the first clamping member away from the lens flange, thereby cooperating with the first clamping member to clamp the reflecting lens in the countersunk hole, the second clamping member having a circular through hole, the diameter of the circular through hole being smaller than the diameter of the reflecting lens, thereby exposing the mirror surface of the reflecting lens to reflect pulsed infrared laser.

[0033] The laser reflection module provided by this utility model may also have the following features: the first limiting part has several auxiliary fixing holes that pass through along the Z-axis direction, and the base is fixed to the experimental table by bolts that pass through both the auxiliary fixing holes and the experimental table, or the base is directly placed flat on the experimental table.

[0034] The laser reflection module provided by this utility model may also have the following features: the displacement range of the first moving member between the two first limiting parts along the X-axis is 0cm to 15cm, the displacement range of the second moving member between the two second limiting parts along the Y-axis is 0cm to 12cm, the reflecting lens is a quartz lens with a diameter of 1cm to 5cm and a narrow-band high-reflection film, and the base, the first moving member, the second moving member, the first rotating member, the second rotating member, the first lead screw, the second lead screw, the first connecting post, the second connecting post, the anti-drop plate, the lens flange, the first clamping member, and the second clamping member are made of metal, thereby making the laser reflection module sturdy and durable.

[0035] This invention also provides a polymer pulsed laser vapor deposition system with adjustable bombardment point, characterized by the use of a laser reflection module of any of the aforementioned components, comprising: a laser, placed on an experimental stage, for emitting pulsed infrared laser light in the range of 800 nm to 2000 nm; a laser reflection module, whose reflecting lens is used to reflect the pulsed infrared laser light; a convex lens, fixed on the experimental stage via an optical table, for focusing the pulsed infrared laser light reflected by the reflecting lens; a laser vapor deposition apparatus containing a frozen polymer precursor solution, for receiving the pulsed infrared laser light focused by the convex lens to perform laser vapor deposition on the frozen polymer precursor solution; and a cooling module connected to the laser vapor deposition apparatus and providing continuous freezing conditions for the polymer precursor solution, wherein the laser, laser reflection module, convex lens, and laser vapor deposition apparatus are optically connected via the pulsed infrared laser light.

[0036] The adjustable bombardment point polymer pulsed laser vapor deposition system provided by this utility model may also have the following features: the laser vapor deposition device includes: a vacuum chamber for maintaining a vacuum environment, the chamber having an optical window, a first viewing window, a second viewing window, and a vacuum pump flange; the optical window for allowing pulsed infrared laser light focused by a convex lens to enter the vacuum chamber; the first and second viewing windows being disposed on opposite side walls of the vacuum chamber for the user to observe the internal environment of the vacuum chamber; and the vacuum pump flange for connecting to a vacuum pump to evacuate the vacuum chamber; a sample target disposed in the vacuum chamber, the sample target having a circular groove for holding a frozen polymer precursor solution, the frozen polymer precursor solution in the circular groove being bombarded by a pulsed infrared laser light transmitted through the optical window; and the sample target and its circular groove being arranged vertically; and a substrate disposed inside the vacuum chamber and in front of the circular groove of the sample target, such that the polymer produced by the pulsed infrared laser bombarding the frozen polymer precursor solution in the circular groove is deposited on the substrate.

[0037] The polymer pulsed laser vapor deposition system with adjustable bombardment point provided by this utility model may also have the following features: the cooling module includes: a cryogenic fluid inlet passage, which passes through the wall of the vacuum chamber for introducing cryogenic fluid; a cryogenic fluid pipeline, which is connected to the cryogenic fluid inlet passage and passes through the sample target for supplying cryogenic fluid to maintain the polymer precursor solution in the circular tank in a frozen state; wherein the sample target and the cooling module are made of thermally conductive metal; and a cryogenic fluid outlet passage, which passes through the wall of the vacuum chamber and is connected to the cryogenic fluid pipeline for discharging cryogenic fluid, wherein the cryogenic fluid is liquid nitrogen.

[0038] Functions and effects of utility models

[0039] According to the present invention, a laser reflection module and a polymer pulsed laser vapor deposition system with adjustable bombardment point are disclosed. The laser reflection module includes: a base, serving as the substrate of the laser reflection module, wherein the base has protrusions perpendicular to its plane on its opposite side walls, referred to as first limiting portions, and the arrangement direction of the two first limiting portions is referred to as the X-axis direction; a first moving member, wherein the first moving member has protrusions perpendicular to its plane on its opposite side walls, referred to as second limiting portions, and the arrangement direction of the two second limiting portions is referred to as the Y-axis direction, the first moving member being movably disposed on the base along the X-axis direction and located between the two first limiting portions, the X-axis direction being perpendicular to the Y-axis direction; and a second moving member, wherein the second moving member is movably disposed on the first moving member along the Y-axis direction and located between the two second limiting portions, the top of the second moving member having an upward-opening cylindrical embedding groove, the axial direction of the embedding groove being referred to as the Z-axis direction, the Z-axis direction being perpendicular to the X-axis direction. The system comprises: a first rotating component, the bottom of which has a matching fitting portion embedded in an embedding groove, allowing it to rotate relative to a second moving component about the Z-axis; and two first clamping arms extending along the Z-axis at the top of the first rotating component; a second rotating component, including a mounting plate and two second clamping arms disposed on the mounting plate, the two second clamping arms being clamped or fixed to the two first clamping arms by bolts, wherein, when the corresponding bolts are loosened, the second rotating component can be rotated relative to the first rotating component, and the plane of rotation is perpendicular to the plane formed by the X-axis and Y-axis directions; a motor, disposed on the side of the mounting plate opposite to the first rotating component, with the motor's power output shaft passing through the mounting plate; and a lens assembly, disposed on the power output shaft and driven by it to rotate around the power output shaft, the lens assembly containing a reflective lens for reflecting the pulsed infrared laser emitted by the laser, the angle between the reflective lens and the power output shaft being adjustable. This laser reflection module is used in a polymer pulsed laser vapor deposition system with adjustable bombardment points.

[0040] Therefore, the laser reflection module and the polymer pulsed laser vapor deposition system with adjustable bombardment point of this invention have the following beneficial effects:

[0041] (1) The translation component consisting of the base, the first moving part and the second moving part realizes 2 degrees of freedom adjustment (X-axis direction and Y-axis direction), the first rotating part realizes Z-axis rotation, and the second rotating part realizes pitch adjustment.

[0042] Before performing laser vapor deposition using the adjustable bombardment point polymer pulsed laser vapor deposition system of this invention, the entire optical path and the final bombardment point of the pulsed infrared laser need to be pre-adjusted. The entire laser reflection module, composed of the base, first moving part, second moving part, first rotating part, and second rotating part, can be precisely adjusted in four degrees of freedom (by visually observing through the first and second viewing windows and continuously trying and correcting to confirm the final bombardment point). Compared to the prior art of directly and manually moving the laser position, the optical path and bombardment point adjustment of this invention have higher precision and smaller errors (the prior art has larger errors in adjusting the placement and orientation of the laser).

[0043] (2) During the laser vapor deposition process using the adjustable bombardment point polymer pulsed laser vapor deposition system of this utility model, the entire laser reflection module consisting of the base, the first moving part, the second moving part, the first rotating part and the second rotating part can be adjusted separately in four degrees of freedom to manually fine-tune the bombardment point of the reflected laser during the laser vapor deposition process (fine-tuning is performed in conjunction with visual observation of the bombardment point through the first and second viewing windows).

[0044] (3) The adjustable angle between the axis of the reflecting lens and the power output shaft allows the reflecting lens to rotate via a motor while reflecting pulsed infrared laser, thus continuously changing the bombardment point of the pulsed infrared laser during laser vapor deposition (this requires pre-adjustment of the entire optical path and bombardment point under the user's visual observation). This avoids the problem in existing technologies where the pulsed laser bombards the same point, resulting in excessive laser energy at that point, leading to polymer degradation and a decrease in the quality of the film-forming product.

[0045] (4) The modular design of the laser reflection module simplifies the optical path adjustment process and improves experimental efficiency. Attached Figure Description

[0046] Figure 1 This is an assembly diagram of the laser reflection module according to an embodiment of the present invention;

[0047] Figure 2 This is a partially exploded view of the laser reflection module according to an embodiment of the present invention;

[0048] Figure 3 This is a perspective view of the base of an embodiment of this utility model;

[0049] Figure 4 This is a perspective view of the first movable component according to an embodiment of the present utility model;

[0050] Figure 5This is a perspective view of the second moving part according to an embodiment of the present utility model;

[0051] Figure 6 This is a perspective view of the first rotating component according to an embodiment of the present invention;

[0052] Figure 7 This is a perspective view of the anti-falling plate according to an embodiment of the present utility model;

[0053] Figure 8 This is a perspective view of the second rotating component according to an embodiment of the present invention;

[0054] Figure 9 This is a schematic diagram of the lens assembly according to an embodiment of the present invention;

[0055] Figure 10 This is an exploded view of the lens assembly according to an embodiment of the present invention;

[0056] Figure 11 The lens flange of this utility model is relative to Figure 10 A stereoscopic view from another perspective;

[0057] Figure 12 This is a side view of the lens assembly according to an embodiment of the present invention;

[0058] Figure 13 This is a schematic diagram of the structure of the polymer pulsed laser vapor deposition system with adjustable bombardment point according to an embodiment of the present invention, and a simplified diagram of the optical path connection relationship.

[0059] Figure 14 This is a simplified schematic diagram of the structure of a laser vapor deposition system for polymer materials under existing technology. Detailed Implementation

[0060] To make the technical means, creative features, objectives and effects of this utility model easy to understand, the following embodiments, in conjunction with the accompanying drawings, will specifically illustrate the laser reflection module and the adjustable bombardment point polymer material laser vapor deposition system of this utility model.

[0061] <Example>

[0062] Figure 1 This is an assembly diagram of the laser reflection module according to an embodiment of the present invention.

[0063] like Figure 1 As shown, this embodiment provides a laser reflection module 20, including a base 21, a first moving component 22, a second moving component 23, a first rotating component 24, an anti-fall plate 25, a second rotating component 26, a motor 27, and a lens assembly 28.

[0064] Figure 2 This is a partially exploded view of the laser reflection module according to an embodiment of the present invention; Figure 3 This is a perspective view of the base of an embodiment of the present invention.

[0065] like Figures 1-3 As shown, the base 21 serves as the base of the laser reflection module 20, and its material is metal. The base 21 has an upward-facing groove, denoted as mounting groove 21a.

[0066] The base 21 has protrusions perpendicular to its plane on opposite side walls of the mounting groove 21a, referred to as first limiting portions 21b. The arrangement direction of the two first limiting portions 21b is referred to as the X-axis direction. The direction perpendicular to the X-axis and parallel to the plane of the base 21 is referred to as the Y-axis direction; the direction perpendicular to the plane formed by the X-axis and Y-axis is referred to as the Z-axis direction. Specifically, in this embodiment, the distance between the two first limiting portions 21b in the X-axis direction (the length of the mounting groove 21a in the X-axis direction) is 9cm.

[0067] Both first limiting parts 21b have several auxiliary fixing holes 21c that pass through along the Z-axis direction. The base 21 is fixed to the experimental table by bolts that pass through both the auxiliary fixing holes 21c and the experimental table.

[0068] In a variation of this embodiment, the base 21 is placed directly on the experimental table without being fixed to the experimental table by bolts.

[0069] The first limiting part 21b has a first through hole 21d and a first track hole 21e extending along the X-axis direction. Specifically, in this embodiment, the number of first through holes 21d is 1, and it is located in the middle section of the first limiting part 21b in the Y-axis direction; the number of first track holes 21e is 2, and they are distributed on both sides of the first through hole 21d.

[0070] The first moving component 22 includes a first moving part 221, a first lead screw 222, and a first connecting post 223, all of which are made of metal.

[0071] Figure 4 This is a perspective view of the first movable component according to an embodiment of the present invention.

[0072] like Figures 1-4 As shown, the first movable member 221 has protrusions perpendicular to its plane on its opposite side walls, referred to as second limiting portions 221a. The first movable member 221 is disposed in the mounting groove 21a of the base 21 and located between the two first limiting portions 21b, and the arrangement direction of the two second limiting portions 221a is along the Y-axis direction. Specifically, in this embodiment, the distance between the two second limiting portions 221a in the Y-axis direction is 4cm.

[0073] The body of the first moving member 221 has a first threaded hole 221b and a second track hole 221c that extend along the X-axis. The diameter of the first threaded hole 221b is larger than the diameter of the first through hole 21d; the diameter of the second track hole 221c is the same as the diameter of the first track hole 21e.

[0074] Specifically, in this embodiment, there is one first threaded hole 221b, which is located in the middle section of the Y-axis direction of the first moving member 221; there are two second track holes 221c, which are distributed on both sides of the first threaded hole 221b. The arrangement of the first threaded hole 221b and the second track hole 221c matches the arrangement of the first through hole 21d and the first track hole 21e.

[0075] The second limiting part 221a has a second through hole 221d and a third track hole 221e that extend along the Y-axis direction. Specifically, in this embodiment, the number of second through holes 221d is 1, and it is located at the middle section of the second limiting part 221a in the X-axis direction; the number of third track holes 221e is 2, and they are distributed on both sides of the second through hole 221d.

[0076] like Figure 2 As shown, the first lead screw 222 includes a first gripping part 222a, a first transmission part 222b, and a first threaded part 222c that are connected to each other in sequence and coaxial.

[0077] The first grip portion 222a is a columnar structure with anti-slip stripes on its periphery.

[0078] like Figures 1-4 As shown, the first transmission part 222b is a columnar structure coaxially connected to the first gripping part 222a, and its diameter is smaller than that of the first gripping part 222a. The diameter and length of the first transmission part 222b match the first through hole 21d. The first transmission part 222b passes through the first through hole 21d.

[0079] The first threaded portion 222c is a threaded rod coaxially connected to the end of the first transmission portion 222b that is away from the first gripping portion 222a. Figure 2 (For ease of review, its thread structure is not shown.) The external thread on its periphery matches the internal thread in the first threaded hole 221b. The diameter of the first threaded portion 222c is larger than the diameter of the first transmission portion 222b. The first threaded portion 222c passes through the first threaded hole 221b, thereby forming a screw drive structure between the first lead screw 222, the first limiting portion 21b, and the first moving member 221. When the user rotates the first gripping portion 222a and drives the first threaded portion 222c to rotate around its own axis through the first transmission portion 222b, that is, the screw drive structure drives the first moving member 221 in the mounting groove 21a to move along the X-axis between the two first limiting portions 21b on the base 21.

[0080] The first connecting post 223 is a columnar structure, and its diameter matches the diameter of the second track hole 221c and the first track hole 21e. The length of the first connecting post 223 is the same as the length of the base 21 in the X-axis direction.

[0081] There are two first connecting posts 223, which are matched and pass through two pairs of first track holes 21e on the two first limiting parts 21b and two second track holes 221c on the first moving member 221 located between the two first limiting parts 21b, so that the first moving member 221 is more stably and movably disposed between the two first limiting parts 21b.

[0082] Specifically, in this embodiment, screws passing through both the first limiting part 21b and the first connecting post 223 along the Z-axis direction are used to fix both ends of the first connecting post 223 into the two first track holes 21e respectively. In a variation of this embodiment, the two ends of the first connecting post 223 can also be directly fixed into the two first track holes 21e using strong adhesive.

[0083] The second moving component 23 includes a second moving part 231, a second lead screw 232, and a second connecting column 233, all of which are made of metal.

[0084] Figure 5 This is a perspective view of the second movable component according to an embodiment of the present invention.

[0085] like Figures 1-5 As shown, the second moving member 231 is movably disposed on the first moving member 221 along the Y-axis and is located between the two second limiting parts 221a.

[0086] The second moving part 231 has a second threaded hole 231a and a fourth track hole 231b that extend along the Y-axis. The diameter of the second threaded hole 231a is larger than the diameter of the second through hole 221d; the diameter of the fourth track hole 231b is the same as the diameter of the third track hole 221e.

[0087] Specifically, in this embodiment, there is one second threaded hole 231a, located at the middle section of the second moving member 231 in the X-axis direction; there are two fourth track holes 231b, distributed on both sides of the second threaded hole 231a. The arrangement of the second threaded hole 231a and the fourth track hole 231b matches the arrangement of the second through hole 221d and the third track hole 221e.

[0088] The top of the second moving member 231 has an upward-opening cylindrical insert groove 231c, the axis of which is along the Z-axis.

[0089] like Figure 2 As shown, the second lead screw 232 includes a second gripping part 232a, a second transmission part 232b, and a second threaded part 232c that are connected to each other in sequence and coaxial.

[0090] The second gripping part 232a is a columnar structure with anti-slip stripes on its periphery.

[0091] like Figures 1-5 As shown, the second transmission part 232b is a columnar structure coaxially connected to the second gripping part 232a, and its diameter is smaller than that of the second gripping part 232a. The diameter and length of the second transmission part 232b match the second through hole 221d. The second transmission part 232b passes through the second through hole 221d.

[0092] The second threaded portion 232c is a threaded rod coaxially connected to the end of the second transmission portion 232b that is away from the second gripping portion 232a. Figure 2 (For ease of review, the thread structure is not shown.) The external thread on its periphery matches the internal thread in the second threaded hole 231a. The diameter of the second threaded portion 232c is larger than the diameter of the second transmission portion 232b. The second threaded portion 232c passes through the second threaded hole 231a, thereby forming a screw drive structure between the second screw 232, the second limiting portion 221a, and the second moving member 231. When the user rotates the second gripping portion 232a and drives the second threaded portion 232c to rotate around its own axis through the second transmission portion 232b, that is, the screw drive structure drives the second moving member 231 on the first moving member 221 to move between the two second limiting portions 221a along the Y-axis.

[0093] The second connecting post 233 is a columnar structure, and its diameter matches the diameter of the fourth track hole 231b and the third track hole 221e. The length of the second connecting post 233 is the same as the length of the second moving member 231 in the Y-axis direction.

[0094] There are two second connecting posts 233, which are matched and pass through two pairs of third track holes 221e on the two second limiting parts 221a and two fourth track holes 231b on the second moving member 231 located between the two second limiting parts 221a, so that the second moving member 231 is more stably and movably disposed between the two second limiting parts 221a.

[0095] Specifically, in this embodiment, screws passing through both the second limiting part 221a and the second connecting post 233 along the Z-axis direction fix both ends of the second connecting post 233 into the two third track holes 221e respectively. In a variation of this embodiment, strong adhesive can also be used to directly fix both ends of the second connecting post 233 into the two third track holes 221e respectively.

[0096] Figure 6 This is a perspective view of the first rotating component according to an embodiment of the present invention.

[0097] like Figure 6 As shown, the first rotating component 24 includes a rotating body 241, a fitting part 242, and two first clamping arms 243, all of which are made of metal.

[0098] like Figures 1-6 As shown:

[0099] The rotating main body 241 is roughly cylindrical in shape.

[0100] The fitting part 242 is a disk-shaped structure disposed at the bottom of the rotating body 241 and coaxial with it, and the outer diameter of the fitting part 242 is larger than the outer diameter of the rotating body 241. The fitting part 242 is rotatably fitted into the embedding groove 231c, and the rotation direction is around the Z-axis.

[0101] Two first clamping arms 243 extend from the top of the rotating body 241 along the Z-axis.

[0102] Figure 7 This is a perspective view of the anti-falling plate according to an embodiment of the present utility model.

[0103] like Figure 7 As shown, the anti-fall plate 25 is made of metal and has a snap-fit ​​hole 25a that matches the outer diameter of the rotating body 241.

[0104] like Figures 1 to 7 As shown, when the fitting part 242 is fitted into the embedding groove 231c, allowing the first rotating member 24 to be rotatably (spinning about the Z-axis) mounted on the second moving member 231, the four corners of the anti-detachment plate 25 are fixed to the second moving member 231 by bolts. The snap-fit ​​hole 25a allows the rotating body 241 to pass through, ultimately allowing the anti-detachment plate 25 to rotatably fix the fitting part 242 in the embedding groove 231c, preventing the first rotating member 24 from falling off the second moving member 231.

[0105] Figure 8 This is a perspective view of the second rotating component according to an embodiment of the present invention.

[0106] like Figure 8 As shown, the second rotating component 26 includes a mounting plate 261 and two second clamping arms 262, both of which are made of metal.

[0107] Mounting plate 261 is a plate-shaped structure with a through shaft hole 261a.

[0108] Two second clamping arms 262 extend integrally from the two side walls of the mounting plate 261, and the extension direction is perpendicular to the plane of the mounting plate 261.

[0109] like Figure 1 , Figure 2 , Figure 6 , Figure 8 As shown, the two second clamping arms 262 are respectively clamped and secured by the two first clamping arms 243 with bolts. When the fixing bolts are loosened, the second rotating member 26 can rotate relative to the first rotating member 24, and the plane of rotation is perpendicular to the plane formed by the X-axis and Y-axis, thus realizing the pitch adjustment of the second rotating member 26.

[0110] In a modified version of this embodiment, the two second clamping arms 262 clamp the two first clamping arms 243 with bolts. The rest of the usage and adjustment methods are the same and will not be repeated.

[0111] like Figure 1 , Figure 2 as well as Figure 8 As shown, the motor 27 is fixed to the side of the mounting plate 261 opposite to the second clamping arm 262 by bolts, and the power output shaft of the motor 27 passes through the shaft through hole 261a. The end of the power output shaft of the motor 27 has an external thread structure (not shown in the figure).

[0112] Specifically, in this embodiment, the motor 27 adopts the MS42DDC model produced by Lunqu Technology Co., Ltd. under the existing technology. It can be connected to a computer via USB serial port and through the control program provided by the company, the rotation direction (clockwise, counterclockwise) and rotation speed of the power output shaft can be manually adjusted.

[0113] like Figure 1 and Figure 2 As shown, the lens assembly 28 is connected to the power output shaft of the motor 27 and is driven to rotate by it.

[0114] Figure 9 This is an assembly diagram of the lens assembly according to an embodiment of the present invention.

[0115] like Figure 1 , Figure 2 as well as Figure 9 As shown, the lens assembly 28 includes a lens flange 281, a first clamping member 282, a reflecting lens 283, and a second clamping member 284. Except for the reflecting lens 283, all other components are made of metal.

[0116] Figure 10 This is an exploded view of the lens assembly according to an embodiment of the present invention; Figure 11 The lens flange of this utility model is relative to Figure 10 A stereoscopic image from another perspective.

[0117] like Figure 1 , Figure 2 , Figures 9-11 As shown:

[0118] The lens flange 281 is a disc-shaped structure with a coaxial protruding columnar structure on one side, referred to as the fixing part 281a. The fixing part 281a has a coaxial threaded hole, referred to as the mounting hole 281b. The diameter of the mounting hole 281b is the same as the end diameter of the power output shaft of the motor 27. The internal thread of the threaded hole of the mounting hole 281b matches the external thread of the end of the power output shaft of the motor 27. The end of the power output shaft of the motor 27 is screwed and fixed in the mounting hole 281b, thereby fixing the lens flange 281 as a whole to the end of the power output shaft of the motor 27 and making it coaxial with it.

[0119] The lens flange 281 has two mounting holes 281c, which are symmetrically distributed on the edge of the lens flange 281. The inside of the mounting holes 281c is smooth and has no internal threads.

[0120] The first clamping member 282 has a circular ring structure. The first clamping member 282 has mating threaded holes 282a (counterhead holes with internal threads) corresponding to the two mounting holes 281c. The first clamping member 282 achieves adjustable fixed position and angle with the lens flange 281 by sequentially passing bolts through the mating threaded holes 282a and the mounting threaded holes 281c and mating nuts.

[0121] Specifically, such as Figures 9-12 As shown: Bolt T1 passes through one pair of mating threaded holes 282a and mounting holes 281c, and bolt T2 passes through the other pair of mating threaded holes 282a and mounting holes 281c. After bolt T1 and / or bolt T2 pass through the mating threaded holes 282a, they are secured to the first clamping member 282 by engaging nut L1. After bolt T1 and / or bolt T2 pass through nut L2, mounting holes 281c, and nut L3 in sequence, bolt T1 and / or bolt T2 are fixed to the lens flange 281 by tightening nuts L2 and L3. (Nuts L2 and L3 are located on opposite sides of the lens flange 281.)

[0122] After bolts T1 and T2 are tightened to the first clamping member 282 via nut L1, the tightening positions of nuts L2 and L3 on bolt T1 are adjusted by forcefully rotating a wrench. This causes a slight difference between the distance x1 between the first clamping member 282 and the lens flange 281 on the side secured by bolt T1 and the distance x2 between the first clamping member 282 and the lens flange 281 on the side secured by bolt T2. This allows for fine-tuning of the planar angle between the first clamping member 282 and the lens flange 281. Specifically, as follows... Figure 12 As shown. Among them, Figure 12This is a side view of the lens assembly according to an embodiment of the present invention, illustrating the fine-tuning operation of the planar angle between the first clamping member and the lens flange. (Although all components of the lens assembly 28, as well as the bolts and nuts, are made of rigid metal, the angle adjustment target between the first clamping member 282 and the lens flange 281 in this embodiment is "fine-tuning," not involving large-scale angle adjustments. Therefore, "fine-tuning" of the angle can be achieved by forcefully rotating and adjusting the corresponding nuts with a wrench.)

[0123] The first clamping member 282 has a countersunk hole 282b at its center and three threaded holes on its periphery, referred to as the first mating holes 282c.

[0124] The reflecting lens 283 is embedded in the countersunk hole 282b and abuts against the bottom of the countersunk hole 282b. The outer diameter of the reflecting lens 283 is larger than the minor diameter of the countersunk hole 282b and smaller than or equal to the major diameter of the countersunk hole 282b. Specifically, in this embodiment, the reflecting lens 283 is a quartz lens with a diameter of 3cm, having a narrowband high-reflectivity coating with a reflectivity of >99.5% for infrared lasers with a wavelength of 1064nm. This lens is provided by Shanghai Daheng Optics & Precision Machinery Co., Ltd.

[0125] The second clamping member 284 is a circular ring structure. Three second mating holes 284a, corresponding in size and position to the first mating hole 282c, are distributed around the second clamping member 284. The second clamping member 284 is fastened to the first clamping member 282 by bolts T3 passing through the second mating holes 284a and the first mating holes 282c. This allows the second clamping member 284 and the first clamping member 282 to clamp the reflecting lens 283 in the countersunk hole 282b. (The thickness of the reflecting lens 283 is greater than the depth of the countersunk hole 282b, ensuring that the second clamping member 284 can stably clamp the reflecting lens 283 in conjunction with the first clamping member 282, preventing the reflecting lens 283 from wobbling within the countersunk hole 282b.)

[0126] The second clamping member 284 has an arc-shaped notch 284b on the outer side of its annular structure. The position and size of the arc-shaped notch 284b are adapted to the size of the threaded hole 282a and the nut of the bolt T1 through which it passes, so that the adjustment of the bolt T1 is not blocked by the second clamping member 284.

[0127] The second clamping member 284 has a circular through hole 284c at its center. The diameter of the circular through hole 284c is smaller than the diameter of the reflecting lens 283, thereby exposing the mirror surface of the reflecting lens 283 to reflect the pulsed infrared laser.

[0128] Figure 13This is a simplified diagram illustrating the structure and optical path connection of a polymer pulsed laser vapor deposition system with adjustable bombardment point according to an embodiment of this utility model.

[0129] like Figure 13 As shown, this embodiment also provides a polymer pulsed laser vapor deposition system 100 with adjustable bombardment point, including a laser 10, a laser reflection module 20, a convex lens 30, a laser vapor deposition device 40, and a cooling module 50.

[0130] Laser 10 is placed on the experimental platform to emit 1064nm pulsed infrared laser.

[0131] The laser reflection module 20 is the laser reflection module 20 described in this embodiment. The reflecting lens 283 of the laser reflection module 20 is used to reflect the pulsed infrared laser emitted by the laser 10 at an adjustable angle. The laser reflection module 20 is fixed to the experimental platform by bolts that pass through both the auxiliary fixing hole 21c on the base 21 and the experimental platform.

[0132] The convex lens 30 is fixed on the experimental stage by the optical stage and is used to focus the pulsed infrared laser reflected by the laser reflection module 20.

[0133] The laser vapor deposition apparatus 40 includes a vacuum chamber 41, a sample target 42, and a substrate 43.

[0134] The vacuum chamber 41 is used to maintain a vacuum environment and has an optical window 41a, a first viewing window (not shown in the figure), a second viewing window (not shown in the figure), and a vacuum pump flange 41b.

[0135] The optical window 41a is used to allow the pulsed infrared laser focused by the convex lens 30 to enter the vacuum cavity 41.

[0136] The first viewing window (not shown in the figure) and the second viewing window (not shown in the figure) are located on opposite side walls of the vacuum chamber 41 so that the user can observe the internal environment of the vacuum chamber 41.

[0137] Vacuum pump flange 41b is used to connect to a vacuum pump to evacuate the vacuum chamber 41.

[0138] The sample target 42 is disposed in the vacuum chamber 41. The sample target 42 has a circular groove 42a for holding a frozen polymer precursor solution. The frozen polymer precursor solution in the circular groove 42a is bombarded by a pulsed infrared laser that passes through the optical window 41a. The sample target 42 and its circular groove 42a are arranged vertically. Specifically, in this embodiment, the inner diameter of the circular groove 42a is 3 cm, and its depth is 1 cm.

[0139] The substrate 43 is disposed inside the vacuum chamber 41 via a substrate holder 43a and is located in front of the circular groove 42a of the sample target 42, so that the polymer generated by the pulsed infrared laser bombarding the frozen polymer precursor solution in the circular groove 42a is deposited on the substrate 43. Specifically, in this embodiment, the substrate 43 is a rectangle of 3cm × 4cm, and the distance between the substrate 43 and the circular groove 42a is 3cm. The substrate 43 is parallel to the sample target 42.

[0140] The cooling module 50 includes a cryogenic fluid inlet passage 51, a cryogenic fluid pipeline (not shown in the figure), and a cryogenic fluid outlet passage 52.

[0141] The cryogenic fluid inlet passage 51 passes through the wall of the vacuum chamber 41 and is used to introduce cryogenic fluid. Specifically, in this embodiment, liquid nitrogen is selected as the cryogenic fluid.

[0142] A cryogenic fluid pipeline (not shown in the figure) is connected to a cryogenic fluid inlet passage 51. The cryogenic fluid pipeline passes through the sample target 42 to allow cryogenic fluid to flow, thereby maintaining the polymer precursor solution in the circular groove 42a in a frozen state and freezing it in the circular groove 42a. The sample target 42 and the cooling module 50 are made of high thermal conductivity metal.

[0143] The cryogenic fluid outlet passage 52 passes through the wall of the vacuum chamber 41 and is connected to the cryogenic fluid pipeline for the outflow of cryogenic fluid.

[0144] The usage process of the laser reflection module 20 and the polymer pulsed laser vapor deposition system 100 with adjustable bombardment point in this embodiment:

[0145] S10, place the laser 10 on the experimental table, fix the laser reflection module 20 on the experimental table, fix the convex lens 30 on the experimental table through the optical table, and suspend the laser vapor deposition device 40 above the experimental table through a small gantry frame.

[0146] S20: After turning on the laser 10, visually observe and, in accordance with the law of reflection, adjust the optical path formed between the various components (mainly the specific positions of the laser 10, laser reflection module 20, and convex lens 30) so that the laser can ultimately enter the vacuum cavity 41 through the optical window 41a. (This operation is extremely easy for those skilled in the art to perform.)

[0147] S30, Adjustment of bombardment point, including the following sub-steps S31 to S32:

[0148] S31, the approximate position of the bombardment point is adjusted to ensure that the final bombardment point of the laser after passing through the optical path can approximately fall in the frozen polymer precursor solution in the circular tank 42a. This is achieved through the following method:

[0149] (1) Location determination: The user observes the real-time location of the laser bombardment point through the first and second viewing windows on the vacuum chamber 41 using the visual observation method.

[0150] (2) Position adjustment method: The user can adjust the X / Y axis translation position of the reflective lens 283 by adjusting the first lead screw 222 and the second lead screw 232; the user can adjust the Z axis spin angle of the reflective lens 283 by adjusting the first rotating part 24; the user can adjust the pitch angle of the reflective lens 283 by adjusting the second rotating part 26.

[0151] By using the above-mentioned position adjustment method, combined with visual observation, and through trial and error based on experience, the laser bombardment point can be roughly placed in the circular groove 42a.

[0152] S32, fine adjustment of the bombardment point, adjusting the offset angle between the axis of the reflector lens 283 and the power output shaft of the motor 27:

[0153] (1) First, ensure that the entire lens assembly 28 is assembled and mounted on the power output shaft of the motor 27.

[0154] (2) Subsequently, by forcefully rotating the nuts L2 and L3 on the adjusting bolt T1 with a wrench, the distance x1 between the first clamping member 282 and the lens flange 281 fixed by bolt T1 and the distance x2 between the first clamping member 282 and the lens flange 281 fixed by bolt T2 will be slightly different. This allows for fine-tuning of the planar angle between the first clamping member 282 and the lens flange 281, as detailed below. Figure 12 As shown. (Although all components of the lens assembly 28, as well as bolts and nuts, are made of rigid metal, the angle adjustment target between the first clamping member 282 and the lens flange 281 in this embodiment is "fine-tuning," not involving large-scale angle adjustments. Therefore, "fine-tuning" of the angle can be achieved by forcefully rotating the corresponding nut with a wrench.) In this way, the offset angle between the axis of the reflecting lens 283 in the lens assembly 28 and the power output shaft of the motor 27 is adjusted.

[0155] (3) Turn on motor 27, so that lens assembly 28 is driven to spin.

[0156] At this time, due to the offset angle between the axis of the reflecting lens 283 and the power output shaft of the motor 27, the point at which the laser strikes the circular groove 42a after passing through the optical path will change continuously.

[0157] In this step, since the lens assembly 28 and the power output shaft of the motor 27 are connected by a thread, in order to prevent the lens assembly 28 and the motor 27 from separating during rotation, the rotation direction of the power output shaft of the motor 27 is set to be the same as the direction of the thread coiling.

[0158] (4) Since the constantly changing bombardment point may not fall completely in the circular groove 42a, it is necessary to repeat the steps S31 and S32-(2). The user combines visual observation and experience to adjust the position, spin angle, pitch angle and the deflection angle of its axis and the power output shaft of the motor 27 of the reflective lens 283. Finally, the laser bombardment point can continuously change when the motor 27 drives the lens assembly 28 to rotate, while it is completely in the circular groove 42a.

[0159] S40, turn off laser 10 and motor 27.

[0160] S50, after the polymer precursor solution is pre-frozen in the circular groove 42a of the sample target 42 by the cooling module 50, the sample target 42 is fixed in the vacuum chamber 41.

[0161] S60, the vacuum pump connected to the vacuum pump flange 41b is turned on and evacuated; the cooling module 50 continuously provides freezing conditions for the polymer precursor solution in the sample target 42.

[0162] S70, turn on laser 10 and motor 27, start pulsed laser vapor deposition of polymer materials. Pulsed infrared laser bombards the frozen polymer precursor solution in sample target 42 and the bombardment site changes continuously, exciting the polymer to deposit on substrate 43.

[0163] In this step, during pulsed laser vapor deposition, the user observes the pulsed laser vapor deposition process in the vacuum chamber 41 in real time through the first and second windows, and manually adjusts the displacement / rotation angle of the corresponding first lead screw 222, second lead screw, first rotating component 24 and second rotating component 26 according to the actual situation and experimental requirements, and adjusts the speed of its power output shaft through the program in the computer connected to the motor 27.

[0164] S80, After the experiment, turn off all power-consuming components and remove the obtained polymer film.

[0165] The role and effect of the embodiments

[0166] According to this embodiment, a laser reflection module is provided, characterized in that it is used in a pulsed laser vapor deposition system for polymer materials to reflect pulsed infrared laser light from a laser at an adjustable angle. It includes: a base, serving as the substrate of the laser reflection module, the base having protrusions perpendicular to its plane on its opposite side walls, denoted as first limiting portions, the arrangement direction of the two first limiting portions denoted as the X-axis direction; a first moving member, the first moving member having protrusions perpendicular to its plane on its opposite side walls, denoted as second limiting portions, the arrangement direction of the two second limiting portions denoted as the Y-axis direction, the first moving member being movably disposed on the base along the X-axis direction and located between the two first limiting portions, the X-axis direction being perpendicular to the Y-axis direction; and a second moving member, the second moving member being movably disposed on the first moving member along the Y-axis direction and located between the two second limiting portions, the top of the second moving member having an upward-opening cylindrical embedding groove, the axial direction of the embedding groove denoted as the Z-axis direction. The system comprises: a first rotating member, the bottom of which has a matching fitting portion embedded in an embedding groove, allowing it to rotate relative to a second moving member about the Z-axis; and a second rotating member, including a mounting plate and two second clamping arms disposed on the mounting plate, the two second clamping arms being clamped or fixed to the two first clamping arms by bolts, wherein, when the corresponding bolts are loosened, the second rotating member can be rotated relative to the first rotating member, and the plane of the rotation direction is perpendicular to the plane formed by the X-axis and Y-axis; a motor, disposed on the side of the mounting plate opposite to the first rotating member, and the power output shaft of the motor passing through the mounting plate; and a lens assembly, disposed on the power output shaft and driven by it to rotate about the power output shaft, the lens assembly containing a reflecting lens for reflecting pulsed infrared laser emitted by the laser, the angle between the axis of the reflecting lens and the power output shaft being adjustable.

[0167] Therefore, the laser reflection module of this embodiment has the following beneficial effects:

[0168] (1) The translation component consisting of the base, the first moving part, and the second moving part realizes 2 degrees of freedom adjustment (X-axis and Y-axis directions), the first rotating part realizes Z-axis rotation, and the second rotating part realizes pitch adjustment. The laser reflection module can be adjusted in four degrees of freedom through the above base, the first moving part, the second moving part, the first rotating part, and the second rotating part.

[0169] (2) The angle between the axis of the reflecting lens and the power output shaft is adjustable, so that when the reflecting lens is driven to rotate by the motor, its reflected light path changes continuously.

[0170] (3) The modular design of the laser reflection module simplifies the optical path adjustment process and improves experimental efficiency.

[0171] Furthermore, the laser reflection module in this embodiment also includes a first lead screw and a second lead screw. The first lead screw includes a first gripping part, a first transmission part, and a first threaded part that are sequentially connected and coaxial. The first limiting part has a first through hole extending along the X-axis direction, which is used for the first transmission part to pass through. The first moving part has a first threaded hole extending along the X-axis direction, which is used for the first threaded part to pass through. When the user rotates the first gripping part and drives the first threaded part to rotate around its own axis through the first transmission part, the first moving part is driven by the lead screw transmission structure. The component moves along the X-axis on the base; the second lead screw includes a second gripping part, a second transmission part, and a second threaded part that are connected to each other in sequence and are coaxial. The second limiting part has a second through hole that extends along the Y-axis and is used for the second transmission part to pass through. The second moving component has a second threaded hole that extends along the Y-axis and is used for the second threaded part to pass through. When the user rotates the second gripping part and drives the second threaded part to rotate around its own axis through the second transmission part, the second moving component is moved along the Y-axis on the first moving component through the lead screw transmission structure.

[0172] This setup has the following advantages: (1) The use of a lead screw drive structure (first / second lead screw) enables convenient and precise displacement control of the X / Y axes, avoiding excessive position adjustments caused by manually pushing the first / second moving parts. (2) The grip design facilitates manual grasping and improves ease of operation.

[0173] Furthermore, the first limiting part has a first track hole extending along the X-axis direction, and the first moving part has a second track hole extending along the X-axis direction. The first limiting part and the first moving part are movably connected in the X-axis direction through a first connecting post passing through the first track hole and the second track hole. Both ends of the first connecting post are fixed in the corresponding two first track holes. The second limiting part has a third track hole extending along the Y-axis direction, and the second moving part has a fourth track hole extending along the Y-axis direction. The second limiting part and the second moving part are movably connected in the Y-axis direction through a second connecting post passing through the third track hole and the fourth track hole. Both ends of the second connecting post are fixed in the corresponding two third track holes.

[0174] This setup has the following advantages: the sliding structure of the track hole and connecting column enables stable translation of the X / Y axis at low cost, reducing the impact of mechanical vibration on the reflected light path during the adjustment process.

[0175] Furthermore, the first rotating component includes: a rotating body; a fitting portion disposed at the bottom of the rotating body and coaxial with it, the outer diameter of the fitting portion being larger than the outer diameter of the rotating body; and two first clamping arms extending from the top of the rotating body. The laser reflection module also includes an anti-detachment plate, the anti-detachment plate having a snap-fit ​​hole matching the outer diameter of the rotating body. When the fitting portion is fitted into the embedding groove, thereby allowing the first rotating component to be rotatably mounted on the second moving component, the anti-detachment plate is fixedly mounted on the second moving component, and the snap-fit ​​hole allows the rotating body to pass through, thereby allowing the anti-detachment plate to rotatably fix the fitting portion in the embedding groove.

[0176] This design has the following advantages: the anti-drop plate design confines the first rotating component in the embedded groove, preventing the component from detaching when the Z-axis rotates, thus improving mechanical stability and safety.

[0177] Furthermore, the lens assembly includes: a lens flange, fixed to the power output shaft and driven by it to rotate coaxially, the lens flange having two mounting holes symmetrically distributed at the edge of the lens flange; a first clamping member, which is an annular structure, having threaded holes corresponding to the two mounting holes, the first clamping member being fixed in position and angle with the lens flange by bolts passing through the threaded holes and mounting holes in sequence and engaging with nuts, the first clamping member having a countersunk hole at its center; a reflecting lens, embedded in the countersunk hole and abutting against the bottom of the countersunk hole, the outer diameter of the reflecting lens being larger than the minor diameter of the countersunk hole and less than or equal to the major diameter of the countersunk hole; and a second clamping member, which is an annular structure, fixed to the side of the first clamping member facing away from the lens flange, thereby engaging with the first clamping member to clamp the reflecting lens in the countersunk hole, the second clamping member having a circular through hole, the diameter of the circular through hole being smaller than the diameter of the reflecting lens, thereby exposing the mirror surface of the reflecting lens to reflect pulsed infrared laser.

[0178] This setup has the following advantages: (1) The countersunk hole + double clamping structure firmly fixes the reflective lens, supports quick replacement of lenses of different sizes, and improves system compatibility and maintenance efficiency. (2) By using bolts and nuts to install and fix the first clamping component and the lens flange, the angle between the first clamping component and the lens flange can be finely adjusted, thereby finely adjusting the offset angle between the axis of the reflective lens in the countersunk hole and the axis of the motor's power output shaft. This allows the final landing point of the pulsed infrared laser reflected by the reflective lens to continuously change when the motor's power output shaft rotates (manual fine-tuning + visual observation control can keep the final landing point of the laser within the small range required in practice).

[0179] Furthermore, the first limiting part has several auxiliary fixing holes that pass through along the Z-axis direction. The base is fixed to the experimental table by bolts that pass through both the auxiliary fixing holes and the experimental table, or the base is placed directly on the experimental table.

[0180] This design offers the following advantages: the base mounting holes support both bolt fixing and direct flat placement, adapting to different laboratory environments and enhancing the equipment's applicability.

[0181] Furthermore, the displacement range of the first moving part along the X-axis between the two first limiting parts is 0cm to 15cm, and the displacement range of the second moving part along the Y-axis between the two second limiting parts is 0cm to 12cm. The reflecting lens is a quartz lens with a diameter of 1cm to 5cm and a narrow-band high-reflection film. The base, the first moving part, the second moving part, the first rotating part, the second rotating part, the first lead screw, the second lead screw, the first connecting post, the second connecting post, the anti-drop plate, the lens flange, the first clamping part, and the second clamping part are all made of metal, thus making the laser reflecting module robust and durable.

[0182] This design has the following advantages: (1) It limits the range of key parameters (displacement range 0cm~15cm / 0cm~12cm, lens diameter ≤5cm), ensuring practicality and miniaturization. (2) The all-metal material improves high temperature resistance, mechanical strength and service life, and adapts to different environments.

[0183] According to the adjustable bombardment point polymer pulsed laser vapor deposition system provided in this embodiment, a laser reflection module of any of the aforementioned components is used, comprising: a laser, placed on an experimental stage, for emitting pulsed infrared laser light in the range of 800nm ​​to 2000nm; a laser reflection module, whose reflecting lens is used to reflect the pulsed infrared laser light; a convex lens, fixed on the experimental stage via an optical table, for focusing the pulsed infrared laser light reflected by the reflecting lens; a laser vapor deposition apparatus containing a frozen polymer precursor solution, for receiving the pulsed infrared laser light focused by the convex lens to perform laser vapor deposition on the frozen polymer precursor solution; and a cooling module connected to the laser vapor deposition apparatus and providing continuous freezing conditions for the polymer precursor solution, wherein the laser, laser reflection module, convex lens, and laser vapor deposition apparatus are optically connected via the pulsed infrared laser light.

[0184] Therefore, the polymer pulsed laser vapor deposition system with adjustable bombardment point in this embodiment has the following beneficial effects:

[0185] (1) The translation component consisting of the base, the first moving part and the second moving part realizes 2 degrees of freedom adjustment (X-axis direction and Y-axis direction), the first rotating part realizes Z-axis rotation, and the second rotating part realizes pitch adjustment.

[0186] Before performing laser vapor deposition using the adjustable bombardment point polymer pulsed laser vapor deposition system of this embodiment, the entire optical path and the final bombardment point of the pulsed infrared laser need to be pre-adjusted. The entire laser reflection module, composed of the base, first moving part, second moving part, first rotating part, and second rotating part, can be precisely adjusted in four degrees of freedom (by visually observing through the first and second viewing windows and continuously trying and correcting to confirm the final bombardment point). Compared to the prior art of directly and manually moving the laser position, the optical path and bombardment point adjustment of this invention have higher precision and smaller errors (the prior art has larger errors in adjusting the placement and orientation of the laser).

[0187] By integrating the reflection module into the deposition system, the bombardment point can be dynamically adjusted ("manual adjustment" of the 4-DOF mechanical structure + "electric automatic adjustment" of the final bombardment point, which is caused by the continuous rotation of the slightly tilted lens assembly driven by the motor, thus solving the limitations of the traditional fixed optical path).

[0188] (2) During the pulsed laser vapor deposition process using the polymer pulsed laser vapor deposition system with adjustable bombardment point in this embodiment, the entire laser reflection module consisting of the base, the first moving part, the second moving part, the first rotating part and the second rotating part can be adjusted separately in four degrees of freedom to manually fine-tune the bombardment point of the reflected laser during the laser vapor deposition process (fine-tuning is performed in conjunction with visual observation of the bombardment point through the first and second viewing windows).

[0189] (3) The adjustable angle between the axis of the reflecting lens and the power output shaft allows the reflecting lens to rotate via a motor while reflecting pulsed infrared laser, thus continuously changing the bombardment point of the pulsed infrared laser during laser vapor deposition (this requires pre-adjustment of the entire optical path and bombardment point under the user's visual observation). This avoids the problem in existing technologies where the pulsed laser bombards the same point, resulting in excessive laser energy at that point, leading to polymer degradation and a decrease in the quality of the film-forming product.

[0190] (4) Define the system composition: laser → reflection module → convex lens → deposition device + cooling module to optimize the uniformity and stability of polymer material deposition.

[0191] Furthermore, the pulsed laser vapor deposition apparatus includes: a vacuum chamber for maintaining a vacuum environment, the chamber having an optical window, a first viewing window, a second viewing window, and a vacuum pump flange; the optical window for allowing pulsed infrared laser light focused by a convex lens to enter the vacuum chamber; the first and second viewing windows being disposed on opposite side walls of the vacuum chamber for the user to observe the internal environment of the vacuum chamber; and the vacuum pump flange for connecting to a vacuum pump to evacuate the vacuum chamber; a sample target disposed within the vacuum chamber, the sample target having a circular groove for holding a frozen polymer precursor solution, the frozen polymer precursor solution in the circular groove being bombarded by a pulsed infrared laser light transmitted through the optical window; wherein the sample target and its circular groove are arranged vertically; and a substrate disposed inside the vacuum chamber via a substrate holder and located in front of the circular groove of the sample target, such that the polymer generated by the pulsed infrared laser bombarding the frozen polymer precursor solution in the circular groove is deposited on the substrate.

[0192] This setup has the following advantages: (1) The sample target and its circular groove are arranged vertically (the polymer precursor solution is frozen and fixed in it), which can avoid the solution flowing due to gravity and ensure the stability of laser bombardment. (2) The dual-window design of the first and second windows facilitates visual observation of the internal environment before laser deposition begins, when adjusting the optical path and bombardment point. It allows users to combine visual observation of the actual laser bombardment point with the reflection law relied upon by the reflecting lens to manually adjust the 5-DOF mechanical structure of the laser reflection module and the lens angle in the lens assembly. Finally, through manual adjustment, it is ensured that the pulsed infrared laser emitted by the laser passes through the optical path of laser → reflection module → convex lens → deposition device and finally bombards the frozen polymer precursor solution in the circular groove. The constantly changing bombardment point driven by the motor can still change continuously in the frozen polymer precursor solution in the circular groove (also through pre-manual mechanical structure adjustment). (3) It facilitates real-time observation of the deposition process and improves experimental controllability. (4) The vacuum chamber design ensures the purity of the deposition environment.

[0193] Furthermore, the cooling module includes: a cryogenic fluid inlet passage, penetrating the wall of the vacuum chamber for introducing cryogenic fluid; a cryogenic fluid pipeline, connected to the cryogenic fluid inlet passage and inserted into the sample target for supplying cryogenic fluid flow, thereby maintaining the polymer precursor solution in the circular groove in a frozen state, wherein the sample target and the cooling module are made of thermally conductive metal; and a cryogenic fluid outlet passage, penetrating the wall of the vacuum chamber and connected to the cryogenic fluid pipeline for discharging cryogenic fluid, wherein the cryogenic fluid is liquid nitrogen.

[0194] This setup has the following advantages: (1) The embedded liquid nitrogen cooling flow path (inlet path → sample target internal pipeline → outlet path) directly cools the sample target, maintaining the precursor solution in a continuously frozen state and improving deposition efficiency. (2) The thermally conductive metal material can optimize heat conduction and reduce temperature fluctuations.

[0195] Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A laser reflection module, characterized in that, In pulsed laser vapor deposition systems for polymer materials, the pulsed infrared laser light from a laser can be reflected at an adjustable angle, including: The base serves as the base of the laser reflection module. The base has protrusions perpendicular to its plane on its opposite side walls, which are referred to as the first limiting parts. The arrangement direction of the two first limiting parts is referred to as the X-axis direction. The first movable member has protrusions perpendicular to its plane on its opposite side walls, referred to as the second limiting part. The arrangement direction of the two second limiting parts is referred to as the Y-axis direction. The first movable member is movably disposed on the base along the X-axis direction and located between the two first limiting parts. The X-axis direction is perpendicular to the Y-axis direction. The second moving member is movably disposed on the first moving member along the Y-axis and located between the two second limiting parts. The top of the second moving member has an upward-opening cylindrical embedding groove. The axial direction of the embedding groove is denoted as the Z-axis direction, which is perpendicular to the X-axis direction and the Y-axis direction. The first rotating member has a bottom part that fits into the embedded groove, thereby allowing it to rotate about the Z-axis relative to the second moving member. The top of the first rotating member has two first clamping arms extending along the Z-axis direction. The second rotating component includes a mounting plate and two second clamping arms disposed on the mounting plate. The two second clamping arms are clamped and fixed to the two first clamping arms by bolts, or are clamped and fixed by bolts. When the corresponding bolts are loosened, the second rotating component can be rotated relative to the first rotating component, and the plane in which the rotation direction is located is perpendicular to the plane formed by the X-axis direction and the Y-axis direction. A motor is disposed on the side of the mounting plate opposite to the first rotating member, and the power output shaft of the motor passes through the mounting plate; and A lens assembly is mounted on the power output shaft and rotates around the power output shaft together with it. The lens assembly contains a reflective lens, which is used to reflect the pulsed infrared laser emitted by the laser. The angle between the axis of the reflective lens and the power output shaft is adjustable.

2. The laser reflection module according to claim 1, characterized in that, It also includes the first lead screw and the second lead screw. The first lead screw includes a first gripping part, a first transmission part, and a first threaded part that are sequentially connected and coaxial. The first limiting part has a first through hole extending along the X-axis direction, the first through hole being used for the first transmission part to pass through. The first moving member has a first threaded hole extending along the X-axis, the first threaded hole being for the first threaded portion to pass through. When the user rotates the first gripping part and drives the first threaded part to rotate around its own axis through the first transmission part, that is, the first moving part is driven to move along the X-axis direction on the base through the screw transmission structure. The second lead screw includes a second gripping part, a second transmission part, and a second threaded part that are sequentially connected and coaxial. The second limiting part has a second through hole extending along the Y-axis direction, the second through hole being for the second transmission part to pass through. The second moving member has a second threaded hole extending along the Y-axis, the second threaded hole being for the second threaded part to pass through. When the user rotates the second gripping part and drives the second threaded part to rotate around its own axis through the second transmission part, the second moving part is displaced on the first moving part along the Y-axis direction through the screw transmission structure.

3. The laser reflection module according to claim 1, characterized in that: in, The first limiting part has a first track hole that passes through the X-axis direction, and the first moving part has a second track hole that passes through the X-axis direction. The first limiting part and the first moving part are movably connected in the X-axis direction by a first connecting post that passes through the first track hole and the second track hole. Both ends of the first connecting post are fixed in the corresponding two first track holes. The second limiting part has a third track hole that passes through the Y-axis direction, and the second moving part has a fourth track hole that passes through the Y-axis direction. The second limiting part and the second moving part are movably connected in the Y-axis direction by a second connecting post that passes through the third track hole and the fourth track hole. Both ends of the second connecting post are fixed in the corresponding two third track holes.

4. The laser reflection module according to claim 1, Its features are: The first rotating component includes: Rotating main body; The fitting portion is disposed at the bottom of the rotating body and coaxial with it, and the outer diameter of the fitting portion is larger than the outer diameter of the rotating body; and Two of the first clamping arms extend from the top of the rotating body. The laser reflection module further includes an anti-detachment plate, which has a snap-fit ​​hole that matches the outer diameter of the rotating body. When the fitting part is fitted into the embedding groove so that the first rotating member is rotatably mounted on the second moving member, the anti-detachment plate is fixedly mounted on the second moving member, and the snap-fit ​​hole allows the rotating body to pass through, thereby allowing the anti-detachment plate to rotatably fix the fitting part in the embedding groove.

5. The laser reflection module according to claim 1, Its features are: The lens assembly includes: The lens flange is fixed to the power output shaft and rotates coaxially thereon. The lens flange has two mounting holes, which are symmetrically distributed on the edge of the lens flange. The first clamping member is a circular ring structure. The first clamping member has mating threaded holes corresponding to the two mounting and fixing holes. The first clamping member is fixed in position and angle with the lens flange by bolts that pass through the mating threaded holes and the mounting and fixing holes in sequence and are engaged with nuts. The first clamping member has a countersunk hole at its center. The reflecting lens is embedded in the countersunk hole and abuts against the bottom of the countersunk hole. The outer diameter of the reflecting lens is larger than the minor diameter of the countersunk hole and smaller than or equal to the major diameter of the countersunk hole. The second clamping member is a circular ring structure. The second clamping member is fixed to the side of the first clamping member opposite to the lens flange, thereby cooperating with the first clamping member to clamp the reflective lens in the countersunk hole. The second clamping member has a circular through hole with a diameter smaller than the diameter of the reflective lens, thereby exposing the mirror surface of the reflective lens to reflect the pulsed infrared laser.

6. The laser reflection module according to claim 1, characterized in that: in, The first limiting part has several auxiliary fixing holes that extend along the Z-axis direction. The base is fixed to the experimental table by bolts that pass through both the auxiliary fixing holes and the experimental table, or the base is placed directly flat on the experimental table.

7. The laser reflection module according to any one of claims 1 to 6, characterized in that: in, The displacement range of the first moving member along the X-axis between the two first limiting parts is 0 cm to 15 cm. The displacement range of the second moving member along the Y-axis between the two second limiting parts is 0 cm to 12 cm. The reflecting lens is a quartz lens with a diameter of 1 cm to 5 cm and a narrow-band high-reflection coating. The base, the first moving part, the second moving part, the first rotating part, the second rotating part, the first lead screw, the second lead screw, the first connecting column, the second connecting column, the anti-drop plate, the lens flange, the first clamping part, and the second clamping part are all made of metal, which makes the laser reflection module sturdy and durable.

8. A pulsed laser vapor deposition system for polymer materials with adjustable bombardment point, characterized in that, The laser reflection module described in any one of claims 1 to 7 is used, comprising: A laser, placed on the experimental platform, is used to emit pulsed infrared laser light in the range of 800 nm to 2000 nm. The laser reflection module has a reflecting lens used to reflect the pulsed infrared laser; A convex lens, fixed by an optical stage and placed on the experimental stage, is used to focus the pulsed infrared laser reflected by the reflecting lens; A laser vapor deposition apparatus, containing a frozen polymer precursor solution, is used to receive a pulsed infrared laser focused by a convex lens, thereby performing laser vapor deposition on the frozen polymer precursor solution; and A cooling module, connected to the laser vapor deposition apparatus, provides continuous cooling conditions for the polymer precursor solution. The laser, the laser reflection module, the convex lens, and the laser vapor deposition device are connected by the pulsed infrared laser.

9. The polymer pulsed laser vapor deposition system with adjustable bombardment point according to claim 8, Its features are: in, The laser vapor deposition apparatus includes: A vacuum chamber is used to maintain a vacuum environment. The chamber has an optical window, a first viewing window, a second viewing window, and a vacuum pump flange. The optical window is used to allow pulsed infrared laser light focused by the convex lens to enter the vacuum chamber. The first viewing window and the second viewing window are disposed on opposite side walls of the vacuum chamber so that the user can observe the internal environment of the vacuum chamber. The vacuum pump flange is used to connect to a vacuum pump to evacuate the vacuum chamber. A sample target is disposed in the vacuum chamber. The sample target has a circular groove for holding a frozen polymer precursor solution. The frozen polymer precursor solution in the circular groove is bombarded by a pulsed infrared laser that passes through the optical window. The sample target and the circular groove thereon are arranged vertically. as well as The substrate is disposed inside the vacuum cavity and in front of the circular groove of the sample target via a substrate holder, so that the polymer generated by the pulsed infrared laser bombarding the frozen polymer precursor solution in the circular groove is deposited on the substrate.

10. The polymer pulsed laser vapor deposition system with adjustable bombardment point according to claim 9, Its features are: in, The cooling module includes: A cryogenic fluid inlet passage passes through the wall of the vacuum cavity and is used to introduce cryogenic fluid. A cryogenic fluid pipeline, connected to the cryogenic fluid inlet passage, is inserted into the sample target to supply cryogenic fluid flow, thereby maintaining the polymer precursor solution in the circular groove in a frozen state. The sample target and the cooling module are made of thermally conductive metal. A cryogenic fluid outlet passage passes through the wall of the vacuum cavity and is connected to the cryogenic fluid pipeline for the discharge of cryogenic fluid, wherein the cryogenic fluid is liquid nitrogen.

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