Vacuum pump suction port structure with multi-stage buffering

The vacuum pump extraction port structure, designed with multi-stage buffer chambers and throttling channels, solves the shortcomings of existing single-buffer or non-buffered designs under complex working conditions, achieving stability and high efficiency of gas flow, and improving the operational stability and lifespan of the equipment.

CN224315111UActive Publication Date: 2026-06-02HANGZHOU BENYANG TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HANGZHOU BENYANG TECH CO LTD
Filing Date
2025-07-08
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

The existing vacuum pump pump port design lacks a multi-stage buffer structure under complex operating conditions, resulting in insufficient gas impact mitigation capabilities, which may lead to problems such as equipment vibration, increased noise, and increased energy consumption.

Method used

A vacuum pump extraction port structure with multi-stage buffering was designed, including an inlet assembly, a buffer assembly, and a flow guiding assembly. The structure reduces gas flow rate and pressure fluctuations step by step through multiple buffer chambers and throttling channels, and optimizes gas flow state by combining an elastic diaphragm, a honeycomb grid plate, and a cooling jacket.

Benefits of technology

It significantly reduces the impact of gas impact on equipment, improves the stability and efficiency of equipment operation, extends service life, and reduces noise and heat accumulation.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of vacuum pumps, in particular to a vacuum pump air exhaust structure with multiple-stage buffering, which comprises an air inlet assembly, a buffering assembly and a flow guide assembly. The air inlet assembly preliminarily disperses the gas impact through a flow divider; the buffering assembly comprises multiple buffering chambers and throttling channels, and gradually reduces the gas flow rate and pressure fluctuation; and the flow guide assembly optimizes the gas distribution to the working area of the vacuum pump. In the preferred scheme, an elastic diaphragm, a honeycomb mesh plate and a cooling jacket are arranged, so that the turbulent flow, noise and heat accumulation are effectively reduced. The application can significantly relieve the gas impact, improve the equipment operation stability, prolong the service life and be suitable for high-efficiency and stable operation under complex working conditions.
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Description

Technical Field

[0001] This utility model belongs to the field of vacuum pump technology, specifically a vacuum pump extraction port structure with multi-stage buffering. Background Technology

[0002] In the design and application of vacuum pumps, the performance of the pump port structure directly affects the equipment's operating efficiency and service life. However, most vacuum pump pump port designs on the market currently employ a single buffer or no buffer structure. This design has limited ability to mitigate gas impacts under complex operating conditions, which may lead to problems such as decreased pumping efficiency, accelerated equipment wear, and insufficient operational stability.

[0003] For example, Chinese invention patent (publication number: CN113623178B) discloses an automated control system and method for a vacuum pump operating group, published on April 18, 2023. This design reduces the gas and impurity content in the gas pumped by the vacuum pump by setting up a secondary buffer tank, thereby achieving stability in the pumping pressure reduction process and extending the service life of the vacuum pump. However, this design only provides a primary buffer function. Under high flow rate or high pressure differential conditions, its buffering effect may be insufficient to meet the requirements of higher precision and more complex operating conditions, and gas impact may still cause a decline in equipment performance.

[0004] For example, Chinese invention patent (publication number: CN112032022B) discloses a dry vacuum pump for purging gas without dead zones and its usage method, published on April 26, 2024. This design solves the problem of not being able to achieve a complete purging of gas in the prior art by optimizing the exhaust port layout and adding a fixing mechanism. However, this design mainly focuses on the effect of purging gas, while giving less consideration to the buffering function of the extraction port. In practical applications, if the extraction port lacks a multi-stage buffering structure, the gas flow rate entering the vacuum pump may be too high, leading to problems such as equipment vibration, increased noise, and increased energy consumption.

[0005] The aforementioned problems indicate that the traditional vacuum pump port designs currently on the market have certain limitations in meeting the demands for efficient buffering and stable pumping under complex operating conditions. Therefore, this invention proposes a vacuum pump port structure with multi-stage buffering to overcome these shortcomings and provide a more intelligent, efficient, and adaptable solution for changing environments. Utility Model Content

[0006] The purpose of this invention is to solve the problem of insufficient gas impact mitigation capability at the vacuum pump's extraction port under complex operating conditions due to the lack of a multi-stage buffer structure. In existing technologies, single-buffer or unbuffered designs are insufficient to effectively reduce the impact of gas impact on equipment under high flow rates and high pressure differentials, potentially leading to problems such as equipment vibration, increased noise, and higher energy consumption.

[0007] To achieve the aforementioned objectives and address the aforementioned problems, this utility model provides a vacuum pump extraction port structure with multi-stage buffering, comprising an inlet assembly, a buffer assembly, and a flow guiding assembly. The inlet assembly is located at the inlet end of the extraction port and is used to receive external gas and guide it into the buffer assembly. The buffer assembly includes multiple buffer chambers connected in sequence, with adjacent buffer chambers connected by specific throttling channels to progressively reduce gas flow rate and pressure fluctuations. The flow guiding assembly is located at the outlet end of the buffer assembly and is used to evenly distribute the buffered gas into the working area inside the vacuum pump.

[0008] The air intake assembly includes an intake pipe and a manifold. One end of the intake pipe is connected to an external pipe, and the other end is fixed to the manifold. The manifold has several guide holes on its surface, which are evenly distributed radially and gradually decrease in diameter from the center to the edge. This design allows the gas to be initially dispersed before entering the buffer assembly, thus avoiding pressure fluctuations caused by concentrated impacts.

[0009] As a preferred technical solution of this application, the buffer assembly includes a first buffer chamber, a second buffer chamber, and a third buffer chamber, which are arranged in a stepped manner, with the volume of each buffer chamber increasing sequentially. The inner wall of the first buffer chamber is provided with a spiral guide groove, along which the gas rotates and flows, further reducing the flow velocity and minimizing turbulence. An elastic diaphragm is installed in the second buffer chamber, its middle portion fixed to the inner wall of the chamber and connected to the bottom of the chamber by a spring. When gas enters the second buffer chamber, the elastic diaphragm deforms, absorbing some of the gas impact energy, while the restoring force of the spring regulates the pressure balance within the chamber. The top of the third buffer chamber is provided with a honeycomb grid plate, which consists of multiple hexagonal through-holes with a diameter ranging from 2-5 mm, used to further refine the gas flow path and stabilize the gas flow velocity.

[0010] As a preferred technical solution of this application, the throttling channel includes a tapered constriction section and a straight extension section. The inlet end of the tapered constriction section is connected to the preceding buffer chamber, and the outlet end is connected to the straight extension section. The cone angle of the tapered constriction section ranges from 30° to 45°, and the length of the straight extension section is 1.5 times the length of the tapered constriction section. This design allows the gas to undergo a gradual compression and stable release process when passing through the throttling channel, thereby effectively controlling the variation range of the gas flow rate.

[0011] As a preferred technical solution of this application, the flow guiding assembly includes a flow guide shroud and a flow rectifier plate. The flow guide shroud is frustoconical, with its large end connected to the outlet end of the third buffer chamber and its small end connected to the working chamber of the vacuum pump. The inner wall of the flow guide shroud is coated with a low-friction coefficient coating material to reduce resistance loss during gas flow. The flow rectifier plate is located inside the small end of the flow guide shroud, and its surface has multiple parallel flow guide grooves. The depth of the flow guide grooves gradually decreases from the center to both sides, so that the gas forms a uniform laminar flow state before entering the working chamber of the vacuum pump.

[0012] As a preferred embodiment of this application, the outer wall of the first buffer chamber is provided with a cooling jacket, and the interior of the cooling jacket is provided with a spiral cooling channel. The inlet end of the cooling channel is connected to an external coolant supply system, and the outlet end is connected to a coolant recovery system. The cooling jacket is designed to reduce the heat generated by the gas compression during the buffering process, thereby avoiding the impact of high temperature on equipment performance.

[0013] As a preferred technical solution of this application, the elastic diaphragm is made of a high-temperature resistant and corrosion-resistant composite material, with a thickness ranging from 0.5 to 1.5 mm. The edge of the elastic diaphragm is embedded in the inner wall groove of the second buffer chamber and sealed by a sealing ring to prevent gas leakage.

[0014] As a preferred technical solution of this application, the inner walls of the hexagonal through-holes of the honeycomb grid plate are coated with a sound-absorbing material, the thickness of which is 0.2-0.5 mm. The sound-absorbing material is selected based on its ability to absorb high-frequency noise, which can effectively reduce the noise generated during gas flow.

[0015] Compared with the prior art, the beneficial effects of this utility model are reflected in the following aspects:

[0016] First, by setting up multi-stage buffer chambers and throttling channels, the gas undergoes multiple deceleration and pressure regulation processes before entering the working chamber of the vacuum pump, which significantly reduces the impact of gas impact on the equipment and improves the stability of equipment operation.

[0017] Secondly, the design of the elastic diaphragm and the honeycomb grid plate optimizes the gas flow state from the perspectives of dynamic adjustment and physical refinement, respectively, further reducing the generation of turbulence and noise.

[0018] Finally, the introduction of the cooling jacket solved the problem of heat accumulation during gas compression, extended the service life of the equipment, and improved the working efficiency of the vacuum pump under high load conditions.

[0019] In summary, this utility model, through a series of innovative mechanical structure designs, overcomes the limitations of single or no buffer designs in the prior art, and provides a more efficient and stable solution for the vacuum pump extraction port under complex working conditions. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention, showing the connection relationship and overall layout of the air intake assembly, buffer assembly and air guide assembly.

[0021] Figure 2 This is a cross-sectional schematic diagram of the buffer assembly, showing in detail the stepped arrangement of the first buffer chamber, the second buffer chamber, and the third buffer chamber, as well as their internal structural features.

[0022] Figure 3 This is a schematic diagram of the throttling channel, showing the specific construction of the conical constriction section and the straight extension section, as well as their connection with the buffer chamber.

[0023] Figure 4 This is a schematic diagram of the flow guiding assembly, focusing on the shape of the flow guide cover and the rectifier plate, as well as the distribution of the flow guide grooves.

[0024] Figure 5 This is a schematic diagram of the cooling jacket, showing the arrangement of the spiral cooling channels and their connection with the external cooling system.

[0025] The attached figures are labeled as follows:

[0026] 1. Intake pipe; 2. Split plate; 3. First buffer chamber; 4. Second buffer chamber; 5. Third buffer chamber; 6. Elastic diaphragm; 7. Honeycomb mesh plate; 8. Throttling channel; 9. Draft shield; 10. Straightening plate; 11. Cooling jacket; 12. Spiral cooling channel. Detailed Implementation

[0027] This utility model provides a vacuum pump extraction port structure with multi-stage buffering, and its specific implementation is described in detail with reference to the accompanying drawings. Figure 1 As shown, the overall structure includes an intake assembly, a buffer assembly, and a flow guiding assembly. These components are tightly designed to achieve progressive buffering and stabilization of gas flow. The intake assembly consists of an intake pipe 1 and a flow divider 2. One end of the intake pipe 1 connects to an external pipe, while the other end is fixed to the center of the flow divider 2. The flow divider 2 is a circular flat plate structure with several radially evenly distributed flow guiding holes on its surface. The diameter of these holes gradually decreases from the center to the edge, creating a gradual gas dispersion effect. The flow divider 2 is bolted to the inlet end of the buffer assembly, ensuring that gas can smoothly enter the buffer assembly.

[0028] The buffer component is the core part of this utility model, such as Figure 2As shown, it includes a first buffer chamber 3, a second buffer chamber 4, and a third buffer chamber 5, arranged in a stepped manner with progressively increasing volumes. The first buffer chamber 3 is located at the foremost end of the buffer assembly, and its inner wall is provided with a spiral guide groove to guide the gas to rotate and flow along the inner wall of the chamber. The spiral guide groove has a semi-circular cross-section, a depth ranging from 3-5 mm, and a width ranging from 5-8 mm. This design allows the gas to move along a spiral path after entering the chamber, thereby reducing the flow velocity and minimizing turbulence. The outlet end of the first buffer chamber 3 is connected to the second buffer chamber 4 through a throttling channel 8, the specific structure of which is shown below. Figure 3 As shown, it includes two parts: a conical constriction section and a straight extension section. The inlet end of the conical constriction section is connected to the first buffer chamber 3, and its cone angle ranges from 30° to 45°. The length of the straight extension section is 1.5 times the length of the conical constriction section. This design allows the gas to undergo a gradual compression and stable release process when passing through the throttling channel 8, further controlling the range of flow rate changes.

[0029] An elastic diaphragm 6 is installed inside the second buffer chamber 4. The middle part of the elastic diaphragm 6 is fixed to the inner wall of the chamber and connected to the bottom of the chamber by a spring. The elastic diaphragm 6 is made of high-temperature resistant and corrosion-resistant composite material with a thickness ranging from 0.5 to 1.5 mm. Its edges are embedded in the grooves of the inner wall of the second buffer chamber 4 and sealed by a sealing ring to prevent gas leakage. When gas enters the second buffer chamber 4, the elastic diaphragm 6 deforms, absorbing part of the gas impact energy, and at the same time, the restoring force of the spring regulates the pressure balance in the chamber. The outlet end of the second buffer chamber 4 is also connected to the third buffer chamber 5 through a throttling channel 8. The throttling channel 8 has the same structure as described above, further ensuring a smooth transition of gas flow rate.

[0030] The top of the third buffer chamber 5 is equipped with a honeycomb mesh plate 7, which consists of multiple hexagonal through holes with a diameter ranging from 2 to 5 millimeters. The inner walls of the hexagonal through holes are coated with sound-absorbing material with a thickness of 0.2 to 0.5 millimeters. This design effectively reduces high-frequency noise generated during gas flow. Furthermore, the volume of the third buffer chamber 5 is significantly larger than the first two buffer chambers, further refining the gas flow path and stabilizing the gas velocity. The outlet of the third buffer chamber 5 is connected to a flow guide assembly, allowing the buffered gas to enter the flow guide assembly.

[0031] Flow guiding components such as Figure 4As shown, the system includes a flow guide shroud 9 and a flow rectifier plate 10. The flow guide shroud 9 is frustoconical, with its large end connected to the outlet end of the third buffer chamber 5 via a flange, and its small end connected to the working chamber of the vacuum pump. The inner wall of the flow guide shroud 9 is coated with a low-friction coefficient material to reduce resistance loss during gas flow. The flow rectifier plate 10 is located inside the small end of the flow guide shroud 9, and its surface has multiple parallel flow guide grooves. The depth of the flow guide grooves gradually decreases from the center to both sides, so that the gas forms a uniform laminar flow state before entering the working chamber of the vacuum pump. This design can avoid concentrated gas impact on the internal working area of ​​the vacuum pump, thereby improving the stability of equipment operation.

[0032] To further optimize heat management during gas flow, a cooling jacket 11 is provided on the outer wall of the first buffer chamber 3, such as... Figure 5 As shown, the cooling jacket 11 has a spiral cooling channel 12 inside. The inlet end of the cooling channel 12 is connected to the external coolant supply system, and the outlet end is connected to the coolant recovery system. The spiral cooling channel 12 has a rectangular cross-section, with a width ranging from 8-12 mm and a depth ranging from 5-8 mm. This design ensures that the coolant flows uniformly within the channel, effectively removing the heat generated during gas compression. The cooling jacket 11 is welded to the outer wall of the first buffer chamber 3 to ensure good heat conduction performance.

[0033] In practical applications, the vacuum pump extraction port structure of this invention is suitable for complex operating conditions such as high flow rate and high pressure differential. When external gas enters the flow divider plate 2 through the inlet pipe 1, the gas is first initially dispersed through the guide holes on the surface of the flow divider plate 2 to avoid pressure fluctuations caused by concentrated impact. Subsequently, the gas enters the first buffer chamber 3, the second buffer chamber 4, and the third buffer chamber 5 in sequence, undergoing a gradual deceleration and pressure regulation process in each buffer chamber. The first buffer chamber 3 reduces the gas flow velocity through a spiral guide groove, the second buffer chamber 4 absorbs impact energy and regulates pressure balance through an elastic diaphragm 6, and the third buffer chamber 5 refines the gas flow path through a honeycomb grid plate 7. Finally, the buffered gas is evenly distributed to the working area inside the vacuum pump through the guide shroud 9 and the rectifier plate 10, ensuring the high efficiency and stability of the equipment operation.

[0034] The cooling jacket 11 plays a crucial role throughout the process, especially under high-load conditions where the heat generated by gas compression increases significantly. Through the rational design of the spiral cooling channel 12, the coolant can quickly remove heat, thus preventing high temperatures from affecting equipment performance. Furthermore, the sound-absorbing material coated on the inner wall of the honeycomb mesh plate 7 effectively reduces high-frequency noise generated during gas flow, further enhancing the overall performance of the equipment.

[0035] This invention achieves multi-stage buffering and stabilization of gas flow through the aforementioned structural design, solving the problem that existing single-buffer or non-buffered designs cannot meet the requirements under complex working conditions. The close cooperation between the components and the reasonable structural layout ensure the high efficiency and stability of the gas flow process, providing a reliable solution for the application of vacuum pumps under high flow and high pressure differential conditions.

[0036] To enable those skilled in the art to fully understand and implement this utility model, the following supplementary explanation of the specific implementation principle of this utility model is provided in conjunction with a specific application scenario.

[0037] First, when external gas enters the manifold 2 through the inlet pipe 1, the gas flows through the guide holes on the surface of the manifold 2. These guide holes are evenly distributed radially, and their diameter gradually decreases from the center to the edge, thus initially dispersing the gas before it enters the buffer assembly. This design creates a gradual gas dispersion effect, avoiding pressure fluctuations caused by concentrated impacts. The manifold 2 is fixed to the inlet end of the buffer assembly with bolts, ensuring that the gas can smoothly transition to the first buffer chamber 3.

[0038] Subsequently, the gas enters the first buffer chamber 3, whose inner wall is equipped with a spiral guide groove. The gas flows in a rotating manner along the spiral guide groove. Due to the semi-circular cross-section of the guide groove and its specific depth and width range (3-5 mm depth, 5-8 mm width), the gas velocity is significantly reduced, and turbulence is effectively suppressed. The outlet end of the first buffer chamber 3 is connected to the second buffer chamber 4 through a throttling channel 8. The throttling channel 8 consists of two parts: a conical constriction section and a straight extension section. The cone angle of the constriction section ranges from 30° to 45°, and the length of the straight extension section is 1.5 times the length of the constriction section. This structure allows the gas to undergo a gradual compression and stable release process when passing through the throttling channel 8, further controlling the magnitude of velocity changes, thereby achieving a step-by-step deceleration effect.

[0039] Next, the gas enters the second buffer chamber 4, which contains an elastic diaphragm 6. The elastic diaphragm 6 is made of a high-temperature resistant and corrosion-resistant composite material, with a thickness ranging from 0.5 to 1.5 mm, and is connected to the bottom of the chamber by a spring. When the gas impacts the elastic diaphragm 6, the diaphragm deforms to absorb some of the impact energy, while the restoring force of the spring regulates the pressure balance within the chamber. This process effectively mitigates the pressure fluctuations caused by gas impact. The outlet of the second buffer chamber 4 is also connected to the third buffer chamber 5 via a throttling channel 8, ensuring a smooth transition of gas flow rate.

[0040] Then, the gas enters the third buffer chamber 5, which is topped with a honeycomb mesh plate 7. The honeycomb mesh plate 7 consists of multiple hexagonal through holes with a diameter ranging from 2 to 5 millimeters, and its inner wall is coated with sound-absorbing material (0.2 to 0.5 millimeters thick). The sound-absorbing material effectively reduces high-frequency noise generated during gas flow. In addition, the volume of the third buffer chamber 5 is significantly larger than that of the first two buffer chambers, which is used to further refine the gas flow path and stabilize the gas flow rate.

[0041] After buffering, the gas enters the working chamber of the vacuum pump through the guide shroud 9 and the rectifier plate 10. The guide shroud 9 is frustoconical, and its inner wall is coated with a low-friction coefficient material to reduce resistance loss during gas flow. The rectifier plate 10 is located inside the small end of the guide shroud 9, and its surface has multiple parallel guide grooves. The depth of the guide grooves gradually decreases from the center to both sides, so that the gas forms a uniform laminar flow state before entering the working chamber of the vacuum pump. This design avoids concentrated gas impact on the internal working area of ​​the vacuum pump, improving the stability of equipment operation.

[0042] Throughout the process, the cooling jacket 11 plays a crucial role. Located on the outer wall of the first buffer chamber 3, the cooling jacket 11 contains a spiral cooling channel 12. The cooling channel 12 has a rectangular cross-section, with a width ranging from 8-12 mm and a depth ranging from 5-8 mm, ensuring uniform flow of coolant within the channel. The coolant enters the cooling channel 12 through an external supply system and is discharged through a recovery system, carrying away the heat generated during gas compression and thus preventing high temperatures from affecting equipment performance.

[0043] In summary, this invention achieves gradual deceleration and pressure regulation of gas flow through a multi-stage buffer chamber design, solving the problem that existing single-buffer or non-buffered designs cannot meet the requirements under complex operating conditions. The close cooperation between components and the rational structural layout ensure the high efficiency and stability of the gas flow process, providing a reliable solution for vacuum pump applications under high flow rate and high pressure differential conditions.

[0044] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum pump extraction port structure with multi-stage buffering, characterized in that, It includes an air intake assembly, a buffer assembly, and a flow guiding assembly; the air intake assembly includes an air intake pipe (1) and a flow divider (2), and the flow divider (2) has a number of radially distributed flow guiding holes, the diameter of which gradually decreases from the center to the edge; the buffer assembly includes a first buffer chamber (3), a second buffer chamber (4), and a third buffer chamber (5), and adjacent buffer chambers are connected by a throttling channel (8); the flow guiding assembly includes a flow guide shroud (9) and a flow straightener (10), the large end of the flow guide shroud (9) is connected to the outlet end of the third buffer chamber (5), and the small end is connected to the working chamber of the vacuum pump.

2. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, The inner wall of the first buffer chamber (3) is provided with a spiral guide groove. The cross-section of the spiral guide groove is semi-circular, with a depth range of 3 mm to 5 mm and a width range of 5 mm to 8 mm.

3. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, An elastic diaphragm (6) is installed in the second buffer chamber (4). The middle part of the elastic diaphragm (6) is fixed to the inner wall of the chamber and connected to the bottom of the chamber by a spring. The thickness of the elastic diaphragm (6) ranges from 0.5 mm to 1.5 mm.

4. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, The top of the third buffer chamber (5) is provided with a honeycomb grid plate (7), which is composed of multiple hexagonal through holes with a diameter ranging from 2 mm to 5 mm.

5. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, The throttling channel (8) includes a tapered constriction section and a straight extension section. The cone angle of the tapered constriction section ranges from 30 degrees to 45 degrees, and the length of the straight extension section is 1.5 times the length of the tapered constriction section.

6. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, The fairing (9) is frustum-shaped and its inner wall is coated with a low-friction coefficient coating material. The rectifier plate (10) is located inside the small end of the fairing (9). The surface of the rectifier plate (10) has multiple parallel guide grooves, and the depth of the guide grooves gradually decreases from the center to both sides.

7. The vacuum pump extraction port structure with multi-stage buffering according to claim 1, characterized in that, The outer wall of the first buffer chamber (3) is provided with a cooling jacket (11), and the interior of the cooling jacket (11) is provided with a spiral cooling channel (12). The cross-section of the spiral cooling channel (12) is rectangular, with a width ranging from 8 mm to 12 mm and a depth ranging from 5 mm to 8 mm.

8. The vacuum pump extraction port structure with multi-stage buffering according to claim 4, characterized in that, The inner walls of the hexagonal through holes of the honeycomb grid plate (7) are coated with sound-absorbing material, the thickness of which is 0.2 mm to 0.5 mm.