Chemical supply apparatus with safety lock

Abstract

A chemical supply device with safety lock, comprising a housing and a safety lock. The housing has a shell plate with a first door plate and a second door plate; the safety lock has a seat, a lock rod and a positioning member. The seat is arranged on the shell plate and has a first positioning hole, a second positioning hole and a third positioning hole; the lock rod is slidably connected to the seat and has a through hole, the lock rod has two ends; the positioning member is movably arranged through the through hole and selectively inserted into any of the positioning holes; when the positioning member is inserted into the third positioning hole, the two ends block the first and second door plates, respectively; when the positioning member is inserted into the first (or second) positioning hole, the two ends block (or release) the first door plate and release (or block) the second door plate, respectively. Thus, the safety protection effect required during sampling can be achieved.

Description

Technical Field

[0001] This application relates to chemical supply equipment, and in particular to a chemical supply equipment with a safety lock. Background Technology

[0002] Chemical delivery systems (CDS) are commonly used in panel manufacturing, wafer recycling, and semiconductor manufacturing. They require chemical solutions (such as acids) to perform processes such as etching.

[0003] However, existing chemical supply equipment is prone to the following dangers when using sampling bottles to sample liquids due to a lack of safety mechanisms.

[0004] Because the chemical solutions in chemical supply equipment are highly dangerous, such as corrosive substances, if the sampling bottle is placed into the sampling space with the hand and the sampling valve located in the valve body space is accidentally opened at the same time, the chemical solution output from the sampling valve will drip onto the user's hand, which could be fatal.

[0005] Therefore, how to overcome the shortcomings of the prior art is a major issue that the inventors of this application are eager to solve. Utility Model Content

[0006] The purpose of this application is to provide a chemical supply device with a safety lock.

[0007] To achieve the above objectives, this application provides a chemical supply device with a safety lock, comprising: a housing including a housing plate having a first door plate and a second door plate adjacent to each other; and a safety lock comprising: a base disposed on the housing plate and having a plurality of positioning holes, the plurality of positioning holes including a first positioning hole, a second positioning hole and a third positioning hole located between the first positioning hole and the second positioning hole; a locking rod movably disposed on the base and having a through hole, the locking rod having two ends; and a positioning member movably passing through the through hole and selectively inserted into any of the positioning holes; wherein, when the positioning member is inserted into the third positioning hole, the two ends respectively block the first door plate and the second door plate; when the positioning member is inserted into the first positioning hole, the two ends respectively block the first door plate and release the second door plate; when the positioning member is inserted into the second positioning hole, the two ends respectively release the first door plate and block the second door plate.

[0008] Compared with the prior art, this application has the following advantages: it can ensure that the user's actions of placing his hand into the sampling bottle and opening the sampling valve cannot be performed simultaneously, thereby achieving the safety protection effect required during sampling. Attached Figure Description

[0009] Figure 1 This is a partial perspective view of this application.

[0010] Figure 2 This is a perspective view of the shell plate and safety lock in this application.

[0011] Figure 3 This is a rear-view perspective view of the safety lock in the center position in this application.

[0012] Figure 4 This is an exploded perspective view of the safety lock in this application when viewed from the front.

[0013] Figure 5 This is a three-dimensional view of the safety lock in this application when viewed from the front.

[0014] Figure 6 This is a three-dimensional view of the safety lock in this application when viewed from the rear.

[0015] Figure 7 This is a rear-view perspective view of the safety lock in this application when it is positioned at the lower end.

[0016] Figure 8 This is a frontal perspective view of the safety lock in this application when it is positioned at the lower end.

[0017] Figure 9 This is a rear-view perspective view of the safety lock in this application when it is positioned at the upper end.

[0018] Figure 10 This is a frontal perspective view of the safety lock in this application when it is positioned at the upper end.

[0019] In the attached figures, the following labels are used:

[0020] 100: Safety Lock

[0021] 1: base body

[0022] 1x: One end

[0023] 1y: The other end

[0024] 12: Guide groove

[0025] 121: First positioning hole

[0026] 122: Second positioning hole

[0027] 123: Third positioning hole

[0028] 2: Locking bar

[0029] 2x: First end

[0030] 2y: Second end

[0031] 22: Through hole

[0032] 3: Positioning components

[0033] 31: Grasping Body

[0034] 32: Rod

[0035] 600: Chemical Supply Equipment

[0036] 6: Outer shell

[0037] 61: Shell plate

[0038] 61a: Inner surface

[0039] 61b: Outer surface

[0040] 611: The First Opening

[0041] 612: Second opening

[0042] 614: Spacing section

[0043] 6141: Trench

[0044] 7: First door panel

[0045] 7a: Inner surface

[0046] 7b: Outer surface

[0047] 71: First Block

[0048] 711: Concave

[0049] 8: Second door panel

[0050] 8a: Inner surface

[0051] 8b: Outer surface

[0052] 81: Second Block

[0053] 811: Concave

[0054] D: Length direction

[0055] S1: First accommodating space

[0056] S2: Second accommodating space Detailed Implementation

[0057] The detailed description and technical content of this application are explained below with reference to the accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit this application.

[0058] like Figures 1 to 6As shown, this application provides a chemical supply device (hereinafter referred to as "chemical supply device") 600 with a safety lock, including: a housing 6 and a safety lock 100.

[0059] like Figure 1 , Figure 2 , Figure 8 and Figure 10 As shown, the outer casing 6 includes multiple panels, a first door panel 7, and a second door panel 8. The multiple panels include a shell plate 61. The shell plate 61 has an inner side 61a and an outer side 61b that face each other. The shell plate 61 also has a first opening 611 and a second opening 612 that are parallel to each other and spaced apart, forming a gap 614 between the first opening 611 and the second opening 612. The outer casing 6 has a first accommodating space S1 communicating with the first opening 611 and a second accommodating space S2 communicating with the second opening 612.

[0060] The first door panel 7 is hinged to the shell panel 61 at the first opening 611, and the second door panel 8 is hinged to the shell panel 61 at the second opening 612. Both the first and second door panels 7 and 8 can be opened towards the outer side 61b of the shell panel 61 (this application does not limit this). A groove 6141, which can be straight (this application does not limit this), is provided on the aforementioned partition 614, with its two ends facing the first door panel 7 and the second door panel 8, respectively. The first door panel 7 has an inner side 7a and an outer side 7b facing each other, and the second door panel 8 also has an inner side 8a and an outer side 8b facing each other. All the aforementioned inner sides 61a, 7a, and 8a face one direction, and all the aforementioned outer sides 61b, 7b, and 8b face the opposite direction. Furthermore, both the first door panel 7 and the second door panel 8 are equipped with a door lock (component symbol not shown).

[0061] like Figures 2 to 6 As shown, the safety lock 100 includes: a body 1, a locking rod 2, and a positioning element 3.

[0062] The base 1 is disposed in the spacer portion 614 of the shell plate 61, specifically on the inner surface 61a of the shell plate 61, but this application does not limit this. The base 1 has a plurality of positioning holes, including a first positioning hole 121, a second positioning hole 122, and a third positioning hole 123 located between the first positioning hole 121 and the second positioning hole 122. Specifically, the base 1 may also have a guide groove 12, which passes through one end 1x and the other end 1y of the base 1, with one end 1x and the other end 1y facing each other. The first positioning hole 121 is close to one end 1x, and the second positioning hole 122 is close to the other end 1y. The third positioning hole 123 is located between one end 1x and the other end 1y. In addition, the aforementioned positioning holes (121, 122, 123) are all connected to the guide groove 12. The base 1 may be a frame with a U-shaped cross-section (see Figure 4 However, this application does not limit this.

[0063] It should be noted that the two ends of the guide groove 12 face the first door panel 7 and the second door panel 8, respectively. In addition, the first positioning hole 121, the second positioning hole 122 and the third positioning hole 123 can all be threaded holes with internal threads. This application does not limit this, but in this embodiment, a threaded hole is used as an example for explanation.

[0064] The locking rod 2 has two ends and is movably disposed on the base 1. Specifically, it is slidably connected to the guide groove 12, allowing the locking rod 2 to slide relative to the base 1 under the guidance of the guide groove 12. Therefore, the two ends of the locking rod 2, a first end 2x and a second end 2y, also face the first door panel 7 and the second door panel 8, respectively. The length of the locking rod 2 is greater than the length of the base 1. Specifically, after sliding, the first end 2x and the second end 2y of the locking rod 2 protrude beyond one end 1x and the other end 1y of the base 1, respectively. In addition, a through hole 22 is provided between the first and second ends 2x and 2y of the locking rod 2. The through hole 22 can be a threaded hole with internal threads or a through hole with a smooth inner wall. This application does not limit this, but in this embodiment, a threaded hole is used as an example for description.

[0065] The positioning member 3 includes a rod 32 that can be movably passed through the through hole 22, and then inserted into any of the aforementioned positioning holes (121, 122, or 123) to position the locking rod 2. Specifically, the positioning member 3 also includes a gripping body 31 for the user to hold, and the rod 32 protrudes from the gripping body 31; the rod 32 can be a threaded rod or a smooth rod with a smooth outer wall, which is not limited in this application. In this embodiment, a threaded rod that can be screwed into the aforementioned threaded hole is used as an example for description. The rod 32 of the positioning member 3 is first screwed into the through hole 22.

[0066] In order for the locking rod 2, which is located inside the outer casing 6 along with the seat 1, to be able to block the first door panel 7 and the second door panel 8 so that they cannot be opened, such as Figure 3 As shown, a first stop 71 and a second stop 81 can be respectively provided on the inner side 7a of the first door panel 7 and the inner side 8a of the second door panel 8. The first stop 71 is close to the first positioning hole 121, and the second stop 81 is close to the second positioning hole 122. In this way, the first end 2x and the second end 2y of the locking rod 2 can be locked by blocking the first stop 71 and the second stop 81 respectively, so that the first door panel 7 and the second door panel 8 cannot be opened.

[0067] Specifically, the first stop 71 and the second stop 81 each have a recess 711 and a recess 811. Both recesses 711 and 811 can be recessed grooves (not shown in the figure) or through holes as shown in the figure; this application does not limit this. In this way, the first end 2x and the second end 2y of the locking rod 2 can respectively block the first stop 71 and the second stop 81 by extending into the recesses 711 and 811.

[0068] like Figure 2 and Figure 3 As shown, when the user operates the positioning component 3 to slide the rod 32 relative to the base 1, and the rod 32 is screwed into the centered third positioning hole 123, the first end 2x and the second end 2y of the locking rod 2 will protrude from one end 1x and the other end 1y of the base 1, respectively. This causes the first end 2x and the second end 2y to lock the first door panel 7 and the second door panel 8 by blocking the first stop 71 and the second stop 81, respectively, preventing them from being opened. In other words, the safety lock 100 is in a centered position and simultaneously locks the first door panel 7 and the second door panel 8.

[0069] like Figure 7 and Figure 8 As shown, when the user operates the positioning member 3 to slide the rod 32 relative to the base 1 (e.g., slide it downwards), and the rod 32 is screwed into the second positioning hole 122 located at the other end 1y (e.g., the lower end) of the base 1, the first end 2x of the locking rod 2 will disengage from the first stop 71 and release the first door panel 7, while the second end 2y of the locking rod 2 will insert into the second stop 81 and block the second stop 81 so that the second door panel 8 cannot be opened. In other words, at this time, the safety lock 100 is in the lower positioning state (or: the other end positioning state) where the second door panel 8 is locked and the first door panel 7 can be opened.

[0070] like Figure 9 and Figure 10As shown, when the user operates the positioning member 3 to slide the rod 32 relative to the base 1 (e.g., slide it upwards), and the rod 32 is screwed into the first positioning hole 121 located at one end 1x (e.g., the upper end) of the base 1, the second end 2y of the locking rod 2 will disengage from the second stop 81 and release the second door panel 8, while the first end 2x of the locking rod 2 will insert into the first stop 71 and block the first stop 71 so that the first door panel 7 cannot be opened. In other words, at this time, the safety lock 100 is in the upper positioning state (or: one-end positioning state) that locks the first door panel 7 and allows the second door panel 8 to be opened.

[0071] In short, under the action of the safety lock 100, there are only three ways for the door panels (7, 8) to open and close: the first is that neither the first door panel 7 nor the second door panel 8 can be opened; the second is that only the first door panel 7 can be opened; and the third is that only the second door panel 8 can be opened.

[0072] This ensures that the user's actions of placing their hand into the sampling bottle (not shown in the figure) and opening the sampling valve (not shown in the figure) cannot be performed simultaneously, thus achieving the necessary safety protection during sampling. In other words, under the safety lock 100, the user can only open the first door 7 and reach into the valve body space (i.e., the aforementioned second accommodating space S2) to open the sampling valve after placing the sampling bottle into the sampling space (i.e., the aforementioned first accommodating space S1) and closing the second door panel 8.

[0073] It should be noted that after the user completes the positioning by operating the positioning component 3, the adjusted state can be fixed by screwing its rod 32 into the selected positioning hole (121, 122 or 123): center positioning state, upper positioning state or lower positioning state.

[0074] It should also be noted that, as Figure 3 and Figure 7 As shown, the locking rod 2 has a length, and a length direction D is defined along this length. The first door panel 7, the second door panel 8, and the safety lock 100 are all located on the length direction D. The first stop 71 (or recess 711), the first end 2x, the second end 2y, the first positioning hole 121, the second positioning hole 122, and the third positioning hole 123 are also located on the length direction D. The guide groove 12 and the locking rod 2 are both arranged side by side on the length direction D.

[0075] In summary, the chemical supply device with a safety lock proposed in this application can indeed achieve the intended purpose and effect, and can solve the deficiencies of the prior art; therefore, a patent application is filed.

[0076] The above description is merely a preferred embodiment of this application and does not limit the patent scope of this application. All equivalent structural changes made based on the description and drawings of this application are also included within the scope of protection of the claims of this application and are hereby stated.

Claims

1. A chemical supply device with a safety lock, characterized in that, include: An outer casing, comprising a casing plate, the casing plate being provided with a first door panel and a second door panel adjacent to each other; as well as A safety lock, comprising: A body is disposed on the shell plate and has a plurality of positioning holes, the plurality of positioning holes including a first positioning hole, a second positioning hole and a third positioning hole located between the first positioning hole and the second positioning hole; A locking rod, movably mounted on the base and having a through hole, the locking rod having two ends; and A positioning element that can be movably passed through the through hole and selectively inserted into either of the positioning holes; When the positioning member is inserted into the third positioning hole, the two ends respectively block the first door panel and the second door panel; when the positioning member is inserted into the first positioning hole, the two ends respectively block the first door panel and release the second door panel; when the positioning member is inserted into the second positioning hole, the two ends respectively release the first door panel and block the second door panel.

2. The chemical supply device with a safety lock as described in claim 1, characterized in that, The seat is positioned between the first door panel and the second door panel. The locking rod has a length, and a length direction is defined along the length of the locking rod. The first door panel, the second door panel, and the safety lock are all located along the length direction.

3. The chemical supply device with a safety lock as described in claim 1, characterized in that, The shell plate has a gap between the first door panel and the second door panel, and the seat is disposed in the gap.

4. The chemical supply device with a safety lock as described in claim 1, characterized in that, The shell plate, the first door plate, and the second door plate each have an inner side and an outer side facing each other. The first door plate and the second door plate both open toward the outer side of the shell plate. The inner side of the first door plate and the inner side of the second door plate are respectively provided with a first stop and a second stop. The two ends can be inserted into the third positioning hole via the positioning member to stop the first stop and the second stop respectively.

5. The chemical supply device with a safety lock as described in claim 4, characterized in that, The first stop is close to the first positioning hole, and the second stop is close to the second positioning hole; both the first stop and the second stop have a recess, and the two ends can be inserted into the two recesses respectively through the positioning member into the third positioning hole.

6. The chemical supply device with a safety lock as described in claim 1, characterized in that, The base has two opposite ends and a guide groove passing through the two ends. The locking rod slides in the guide groove, and the two ends of the locking rod protrude from the two ends of the base.

7. The chemical supply device with a safety lock as described in claim 1, characterized in that, The base has two opposite ends, the third positioning hole is located between the two ends of the base, the first positioning hole and the second positioning hole are respectively close to the two ends of the base, and the through hole is located between the two ends of the locking rod.

8. The chemical supply device with a safety lock as described in claim 1, characterized in that, The positioning element includes a gripping part and a rod body connected to each other. The rod body can movably pass through the through hole and selectively insert into any of the positioning holes. The first positioning hole, the second positioning hole, and the third positioning hole are all screw holes, and the rod body is a screw that can be screwed into any of the screw holes.

9. The chemical supply device with a safety lock as described in claim 1, characterized in that, The first door panel and the second door panel are respectively provided with a first stop and a second stop, and the two ends can be inserted into the third positioning hole via the positioning member to stop the first stop and the second stop respectively.

10. The chemical supply device with a safety lock as described in claim 1, characterized in that, The through hole and each of the positioning holes are threaded holes, and the positioning member includes a rod body, which is a screw that can be screwed into the threaded hole.

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