Molecular pump test stand

Abstract

This utility model belongs to the field of molecular pump testing technology, and in particular to a molecular pump testing frame, including a base plate. A slot frame and a placement platform are fixedly connected to the upper surface of the base plate. A controller, a testing device, and two sets of sound pressure sensors are respectively arranged above the base plate. An acceleration sensor is fixedly connected to the inner top wall of the placement platform. An electric push rod is arranged inside the slot frame. A sliding frame is slidably connected inside the slot frame. Two sets of electric telescopic rods are arranged above the sliding frame. A rotating collar is arranged above the two sets of electric telescopic rods. A telescopic main tube is arranged on the upper surface of the inner ring of the rotating collar. A five-way tube frame is fixedly connected to the top of the telescopic main tube. By setting up the placement platform, the molecular pump can be stably supported. The controller can accurately control the start and stop of the equipment. At the same time, the electric telescopic rods, electric push rods, rotating collar, base plate, and sliding frame work together to enable the connector to achieve multi-dimensional movement and rotation adjustment, which facilitates quick docking with the molecular pump interface.

Description

Technical Field

[0001] This utility model belongs to the field of molecular pump testing technology, specifically relating to a molecular pump testing fixture. Background Technology

[0002] A molecular pump test stand is a specialized device used to fix and support molecular pumps and provide connection interfaces for them to various testing equipment, thereby enabling the measurement and analysis of the performance parameters of molecular pumps. Its core function is to ensure that the molecular pump maintains a fixed posture during the test through a stable mechanical structure and compatible connection components, while working with the testing system to complete performance evaluation. It is widely used in research, industrial production and aerospace fields for the research, development, quality inspection and maintenance of molecular pumps.

[0003] However, after the molecular pump is assembled, its performance indicators such as vacuum degree, noise and compression ratio need to be tested. Due to the variety of molecular pump specifications and different connection ports, the existing one-to-one testing equipment is not only cumbersome to operate, but also difficult to meet the needs of efficient testing. This testing method has obvious limitations. Due to the lack of universal adaptability design, the equipment is not convenient to use.

[0004] To address the aforementioned issues, this application proposes a molecular pump test fixture. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a molecular pump test fixture, which is capable of accommodating various pump body specifications.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a molecular pump test rack, including a base plate, on the upper surface of which a slot frame and a placement platform are fixedly connected respectively. A controller, a testing device, and two sets of sound pressure sensors are respectively arranged above the base plate. An acceleration sensor is fixedly connected to the inner top wall of the placement platform. An electric push rod is arranged inside the slot frame, and a sliding frame is slidably connected inside the slot frame. Two sets of electric telescopic rods are arranged above the sliding frame. A rotating collar is arranged above the two sets of electric telescopic rods. A telescopic main pipe is arranged on the upper surface of the inner ring of the rotating collar. A five-way pipe rack is fixedly connected to the top of the telescopic main pipe. Two sets of electric ball valves are fixedly connected to the end of the five-way pipe rack away from the telescopic main pipe. A connector is fixedly connected to the end of each electric ball valve away from the five-way pipe rack. The end of the telescopic main pipe away from the five-way pipe rack is fixedly connected to the input end of the testing device.

[0007] As a preferred embodiment of this utility model, the bottom surface of the base plate is fixedly connected to two sets of connecting columns, and the bottom end of each connecting column is fixedly connected to a support base.

[0008] As a preferred embodiment of this utility model, a connecting plate is fixedly connected to the bottom surface of the controller, and the bottom surface of the connecting plate is fixedly connected to the upper surface of the base plate.

[0009] As a preferred embodiment of this utility model, each sound pressure sensor has a support column fixedly connected to its bottom surface, and the bottom end of each support column is fixedly connected to the upper surface of the base plate.

[0010] As a preferred embodiment of this utility model, a fixing ring is fixedly connected to the outer surface of the electric push rod, and the front side of the fixing ring is fixedly connected to the inner wall of the slot frame.

[0011] As a preferred embodiment of this utility model, a reinforcing ring is fixedly connected to the bottom end of each of the electric telescopic rods, and the bottom surface of each reinforcing ring is fixedly connected to the upper surface of the sliding frame.

[0012] As a preferred technical solution of this utility model, the telescopic ends of the two sets of electric telescopic rods are fixedly connected to a support ring, and the upper surface of the support ring is fixedly connected to the bottom surface of the outer ring of the rotating collar.

[0013] As a preferred embodiment of this utility model, a support frame is fixedly connected to the outer surface of the telescopic main tube, and the bottom surface of the support frame is fixedly connected to the upper surface of the inner ring of the rotating collar.

[0014] Compared with existing technologies, the advantages of this utility model are as follows: By setting up a placement platform, the molecular pump can be stably supported, and the controller can precisely control the start and stop of the equipment. At the same time, the electric telescopic rod, electric push rod, rotating collar, base plate and sliding frame work together to enable the connector to move and rotate in multiple dimensions, which facilitates quick docking with the molecular pump interface. The testing device, together with the telescopic main pipe, five-way pipe rack, electric ball valve and connectors of different specifications, can accurately position connectors of different specifications to the molecular pump interface, realizing seamless docking of multiple pump models without frequent replacement of equipment components, significantly improving testing efficiency and versatility. In addition, the acceleration sensor at the bottom of the placement platform and the sound pressure sensor around it can simultaneously monitor the vibration and noise parameters of the molecular pump during operation, and form a multi-dimensional analysis system with the vacuum detection data of the testing device, effectively avoiding the error accumulation caused by traditional decentralized testing methods. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a cross-sectional view of the placement platform in this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the slot frame in this utility model;

[0019] Figure 4 This is a schematic diagram of the rotating collar in this utility model;

[0020] Figure 5 This is a schematic diagram of the five-way pipe rack in this utility model;

[0021] In the diagram: 1. Base plate; 2. Testing device; 3. Connecting plate; 4. Connecting column; 5. Controller; 6. Slot frame; 7. Support column; 8. Placement platform; 9. Support base; 10. Sound pressure sensor; 11. Accelerometer; 12. Fixing ring; 13. Electric push rod; 14. Sliding frame; 15. Connector; 16. Support frame; 17. Rotating collar; 18. Telescopic main pipe; 19. Support ring; 20. Electric telescopic rod; 21. Reinforcing ring; 22. Five-way pipe rack; 23. Electric ball valve. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0023] Please see Figure 1-5 The present invention provides the following technical solution: a molecular pump test rack, including a base plate 1, a slot frame 6 and a placement platform 8 are fixedly connected to the upper surface of the base plate 1, a controller 5, a test device 2 and two sets of sound pressure sensors 10 are respectively arranged above the base plate 1, an acceleration sensor 11 is fixedly connected to the inner top wall of the placement platform 8, an electric push rod 13 is arranged inside the slot frame 6, a sliding frame 14 is slidably connected inside the slot frame 6, two sets of electric telescopic rods 20 are arranged above the sliding frame 14, a rotating collar 17 is arranged above the two sets of electric telescopic rods 20, a telescopic main tube 18 is arranged on the upper surface of the inner ring of the rotating collar 17, a five-way pipe rack 22 is fixedly connected to the top of the telescopic main tube 18, two sets of electric ball valves 23 are fixedly connected to the end of the five-way pipe rack 22 away from the telescopic main tube 18, a connector 15 is fixedly connected to the end of each electric ball valve 23 away from the five-way pipe rack 22, and the end of the telescopic main tube 18 away from the five-way pipe rack 22 is fixedly connected to the input end of the test device 2;

[0024] In this embodiment, the test device 2 serves as the core component. It provides vacuum power through a pumping system combining a backing pump and a high-vacuum pump, and precisely controls the pumping path with a vacuum valve. The measurement system integrates a composite vacuum gauge and a pressure sensor, which can monitor the vacuum level and calculate the compression ratio in real time. At the same time, it measures the pumping rate through a flow meter. In addition, the rotating collar 17 adopts a separate inner and outer ring structure design. Its outer ring is fixedly connected to the support ring 19, and the inner ring can rotate freely relative to the outer ring through a bearing assembly. This structure allows the inner ring to drive the telescopic main pipe 18 and the five-way pipe bracket 22 to rotate synchronously, thereby quickly and accurately positioning the connector 15, which is compatible with different specifications, to the molecular pump interface, achieving efficient and seamless docking of multiple pump models.

[0025] Specifically, two sets of connecting columns 4 are fixedly connected to the bottom surface of the base plate 1. Each connecting column 4 is fixedly connected to a support seat 9 at its bottom end. In this embodiment, the support seat 9 can be fixed to the base plate 1 through the connecting columns 4, and the base plate 1 can be placed stably by using the support seat 9.

[0026] Specifically, a connecting plate 3 is fixedly connected to the bottom surface of the controller 5. The bottom surface of the connecting plate 3 is fixedly connected to the upper surface of the base plate 1. In this embodiment, the controller 5 can be fixed by the connecting plate 3. The controller 5 is a programmable logic controller (PLC), which is connected to the device through a digital or analog I / O interface to control the coordinated action of various components.

[0027] Specifically, each sound pressure sensor 10 has a support column 7 fixedly connected to its bottom surface, and the bottom end of each support column 7 is fixedly connected to the upper surface of the base plate 1. In this embodiment, the sound pressure sensor 10 can be fixed by the support column 7. At the same time, the sound pressure sensor 10 is a sensor used to measure the pressure change generated by sound waves in a medium and convert it into an electrical signal output.

[0028] Specifically, a fixing ring 12 is fixedly connected to the outer surface of the electric push rod 13. The front side of the fixing ring 12 is fixedly connected to the inner wall of the slot frame 6. In this embodiment, the fixing ring 12 can fix the electric push rod 13 into the slot frame 6 and enable the electric push rod 13 to extend and retract stably.

[0029] Specifically, each electric telescopic rod 20 is fixedly connected to a reinforcing ring 21 at its bottom end, and the bottom surface of each reinforcing ring 21 is fixedly connected to the upper surface of the sliding frame 14. In this embodiment, the electric telescopic rod 20 can be fixed to the sliding frame 14 through the reinforcing ring 21, so that the sliding frame 14 can drive the electric telescopic rod 20 to move.

[0030] Specifically, the telescopic ends of the two sets of electric telescopic rods 20 are fixedly connected to a support ring 19. The upper surface of the support ring 19 is fixedly connected to the bottom surface of the outer ring of the rotating collar 17. In this embodiment, the electric telescopic rod 20 can be connected to the rotating collar 17 through the support ring 19, and the electric telescopic rod 20 can drive the rotating collar 17 to move up or down.

[0031] Specifically, a support frame 16 is fixedly connected to the outer surface of the telescopic main pipe 18. The bottom surface of the support frame 16 is fixedly connected to the upper surface of the inner ring of the rotating collar 17. In this embodiment, the telescopic main pipe 18 can be fixed to the rotating collar 17 through the support frame 16. The telescopic main pipe 18 is made of soft and stretchable material, which can adaptively extend and retract with the movement of the equipment to ensure that the air passage connectivity and sealing are maintained during multi-dimensional movement and rotation.

[0032] The working principle and usage process of this utility model are as follows: First, the molecular pump to be tested is fixed on the placement platform 8, ensuring that its interface position corresponds to the initial direction of the connector 15. Then, the equipment is started via the controller 5, and the vacuum system of the testing device 2 begins pre-vacuuming. Simultaneously, the acceleration sensor 11 at the bottom of the placement platform 8 and the surrounding sound pressure sensors 10 enter real-time monitoring mode. When the position of the connector 15 needs to be adjusted, the controller 5 drives the electric push rod 13 to extend and retract, causing the sliding frame 14 in the slot frame 6 to move horizontally, bringing the connector 15 closer to the molecular pump interface in the lateral dimension. Subsequently, the electric telescopic rod 20 drives the rotating collar 17 to move up and down via the support ring 19, completing the height positioning of the connector 15. The inner ring of the rotating collar 17 is positioned relative to the outer ring via the bearing assembly. The rotation causes the telescopic main pipe 18 and the five-way pipe bracket 22 to rotate synchronously, so that the connector 15 is precisely aligned with the orientation of the molecular pump interface. After positioning is completed, the electric ball valve 23 is opened, and the telescopic main pipe 18 is connected to the molecular pump interface through the five-way pipe bracket 22. The evacuation system of the test device 2 begins to evacuate the molecular pump. At this time, the measurement system of the test device 2 monitors the vacuum degree in real time and calculates the compression ratio. The acceleration sensor 11 and the sound pressure sensor 10 synchronously collect the vibration and noise parameters of the molecular pump during operation. The data is integrated by the controller 5 to generate an analysis report. If different specifications of molecular pumps need to be tested, the corresponding connector 15 can be switched by rotating the collar 17. Seamless docking of multiple pump models can be achieved without changing equipment components, which significantly improves the testing efficiency and versatility.

[0033] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A molecular pump test fixture, characterized in that: Includes a base plate (1), on the upper surface of which a slot frame (6) and a placement platform (8) are fixedly connected respectively. A controller (5), a testing device (2) and two sets of sound pressure sensors (10) are respectively arranged above the base plate (1). An acceleration sensor (11) is fixedly connected to the inner top wall of the placement platform (8). An electric push rod (13) is arranged inside the slot frame (6). A sliding frame (14) is slidably connected inside the slot frame (6). Two sets of electric telescopic rods (20) are arranged above the sliding frame (14). A rotating collar (17) is provided above the 0). A telescopic main pipe (18) is provided on the upper surface of the inner ring of the rotating collar (17). The top end of the telescopic main pipe (18) is fixedly connected to a five-way pipe rack (22). The end of the five-way pipe rack (22) away from the telescopic main pipe (18) is fixedly connected to two sets of electric ball valves (23). The end of each electric ball valve (23) away from the five-way pipe rack (22) is fixedly connected to a connector (15). The end of the telescopic main pipe (18) away from the five-way pipe rack (22) is fixedly connected to the input end of the test device (2).

2. The molecular pump test fixture according to claim 1, characterized in that: The bottom surface of the base plate (1) is fixedly connected to two sets of connecting columns (4), and the bottom end of each connecting column (4) is fixedly connected to a support base (9).

3. The molecular pump test fixture according to claim 1, characterized in that: The bottom surface of the controller (5) is fixedly connected to a connecting plate (3), and the bottom surface of the connecting plate (3) is fixedly connected to the upper surface of the base plate (1).

4. The molecular pump test fixture according to claim 1, characterized in that: Each of the sound pressure sensors (10) has a support column (7) fixedly connected to its bottom surface, and the bottom end of each support column (7) is fixedly connected to the upper surface of the base plate (1).

5. The molecular pump test fixture according to claim 1, characterized in that: A fixing ring (12) is fixedly connected to the outer surface of the electric push rod (13), and the front side of the fixing ring (12) is fixedly connected to the inner wall of the slot frame (6).

6. The molecular pump test fixture according to claim 1, characterized in that: Each of the electric telescopic rods (20) has a reinforcing ring (21) fixedly connected to its bottom end, and the bottom surface of each reinforcing ring (21) is fixedly connected to the upper surface of the sliding frame (14).

7. The molecular pump test fixture according to claim 1, characterized in that: The telescopic ends of the two sets of electric telescopic rods (20) are fixedly connected to a support ring (19), and the upper surface of the support ring (19) is fixedly connected to the bottom surface of the outer ring of the rotating collar (17).

8. The molecular pump test fixture according to claim 1, characterized in that: The outer surface of the telescopic main tube (18) is fixedly connected to a support frame (16), and the bottom surface of the support frame (16) is fixedly connected to the upper surface of the inner ring of the rotating collar (17).

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