High-precision concrete damping platform

Abstract

This utility model discloses a high-precision concrete vibration damping table, which includes: a first vibration damping layer fitted on the upper side of a vibration damping base; a bearing base anchored on the vibration damping base at a position corresponding to the first vibration damping layer, and a second vibration damping layer fitted on the upper side of the bearing base; and an equipment base fitted on the bearing base at a position corresponding to the second vibration damping layer. The interior of the equipment base is filled with damping and vibration-damping quartz sand. This utility model utilizes the inertia of different bases to resist vibration by setting up a vibration damping base, a bearing base, and an equipment base with vibration damping layers stacked at intervals. The vibration damping layers absorb impact energy, and the different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving vibration damping for production equipment. This utility model is adaptable to various high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

Description

Technical Field

[0001] This utility model relates to the field of vibration reduction technology for high-precision production equipment, and in particular to a high-precision concrete vibration reduction table. Background Technology

[0002] For high-precision production equipment such as lithography production lines, semiconductor manufacturing, optical inspection, and scientific research experiments, the vibration requirements of the working environment are extremely high. Even the slightest vibration can lead to increased measurement errors, deviations in experimental results, and even affect the normal operation and service life of the instruments. Furthermore, with the continuous development of high-precision instruments and equipment and the increasing complexity of application scenarios, the requirements for the accuracy, stability, and adaptability of vibration damping tables are also constantly increasing. Therefore, when arranging high-precision equipment, it is necessary to set up foundation support that can effectively isolate complex vibration interference.

[0003] In existing technologies, such as CN119356234A-Vibration damping devices, workpiece stage systems, and lithography equipment, the main way to improve equipment stability is by setting a balancing mass block at the bottom of the equipment to improve dynamic stability. However, this vibration damping method has strong limitations. It needs to be repeatedly adjusted for different types of production activities and is easily affected by external environmental interference.

[0004] Therefore, existing technologies still need to be improved and developed. Utility Model Content

[0005] To address the limitations of existing technologies that improve dynamic stability by setting balancing mass blocks at the bottom of the equipment, the need for targeted adjustments for different production activities, and the susceptibility of vibration reduction effects to external environmental interference, this invention provides a high-precision concrete vibration damping table.

[0006] This utility model is achieved through the following technical solution:

[0007] A high-precision concrete vibration damping table, wherein the high-precision concrete vibration damping table comprises:

[0008] A vibration damping base, wherein a first vibration damping layer is fixedly disposed on the upper side of the vibration damping base;

[0009] A bearing base is anchored on the vibration damping base at a position corresponding to the first vibration damping layer, and a second vibration damping layer is fitted on the upper side of the bearing base;

[0010] The equipment base is fitted onto the bearing base at a position corresponding to the second vibration damping layer, and the interior of the equipment base is filled with damping and vibration-damping quartz sand.

[0011] The high-precision concrete vibration damping table, wherein the bearing base includes a first foundation groove and a second foundation groove;

[0012] The first foundation groove is anchored on the vibration damping base. A first mounting groove is provided at the center of the upper side of the first foundation groove, and the second vibration damping layer is disposed in the first mounting groove.

[0013] The second base platform is fitted into the first mounting groove. A second mounting groove is provided at the center of the upper side of the second base platform. The second mounting groove is provided with the second vibration damping layer. The second mounting groove is used to support the equipment base.

[0014] The high-precision concrete vibration damping table, wherein the first vibration damping layer is disposed at the center of the upper side of the vibration damping base, and a plurality of anchor piles are uniformly disposed on the vibration damping base along the vertical direction, and the plurality of anchor piles penetrate the first vibration damping layer and are anchored to the bearing base.

[0015] The high-precision concrete vibration damping table, wherein an adhesive layer is provided in the vibration damping base at the position corresponding to the anchor piles, and the adhesive layer is circumferentially wrapped around the anchor piles at the position inside the vibration damping base on the outside of the anchor piles.

[0016] The high-precision concrete vibration damping table includes a first vibration damping layer comprising a vibration damping pad and a damping membrane fixedly attached thereto. The vibration damping pad is a rubber pad, and the damping membrane is a PVC damping membrane. The structure of the second vibration damping layer is the same as that of the first vibration damping layer.

[0017] The high-precision concrete vibration damping table has an anti-corrosion layer on its base, which is applied to the upper side of the base after being smoothed.

[0018] The high-precision concrete vibration damping table is provided with angle steel around the side of the equipment base, and the anti-corrosion layer is wrapped around the angle steel after surface grinding.

[0019] The high-precision concrete vibration damping table, wherein the anti-corrosion layer is a two-layer cloth five-coat epoxy coating and a polyurethane coating; the flatness of the anti-corrosion layer is ±2mm.

[0020] The high-precision concrete vibration damping table, wherein the vibration damping base, the bearing base, and the equipment base are components made of concrete material.

[0021] The high-precision concrete vibration damping table, wherein the vibration damping base, the bearing base and the equipment base are provided with a steel cage inside.

[0022] The beneficial effects of this utility model are as follows: This utility model sets up a vibration-damping base, a bearing base, and an equipment base with vibration-damping layers stacked at intervals. It uses the inertia of different bases to resist vibration and absorbs impact energy through the vibration-damping layers. The different natural frequencies of multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This utility model can be adapted to a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference. Attached Figure Description

[0023] Figure 1 This is an exploded view of the structure of the high-precision concrete vibration damping table of this utility model;

[0024] Figure 2 This is a three-dimensional structural diagram of the high-precision concrete vibration damping table of this utility model.

[0025] exist Figures 1 to 2 In the middle: 100, vibration damping base; 110, first vibration damping layer; 130, anchor pile; 131, adhesive layer; 200, bearing base; 210, first foundation platform; 211, first mounting slot; 220, second foundation platform; 221, second mounting slot; 230, second vibration damping layer; 300, equipment base; 310, anti-corrosion layer; 320, angle steel. Detailed Implementation

[0026] To make the objectives, technical solutions, and effects of this utility model clearer and more explicit, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0027] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0028] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0029] In existing technologies, such as CN119356234A-Vibration damping devices, workpiece stage systems, and lithography equipment, the main way to improve equipment stability is by setting a balancing mass block at the bottom of the equipment to improve dynamic stability. However, this vibration damping method has strong limitations. It needs to be repeatedly adjusted for different types of production activities and is easily affected by external environmental interference.

[0030] In view of the above-mentioned problems in the prior art, this utility model provides a high-precision concrete vibration damping table, such as... Figure 1 As shown, the high-precision concrete vibration damping platform includes: a vibration damping base 100, on which a first vibration damping layer 110 is fitted; a bearing base 200, which is anchored on the vibration damping base 100 at a position corresponding to the first vibration damping layer 110, and on which a second vibration damping layer 230 is fitted; and an equipment base 300, which is fitted on the bearing base 200 at a position corresponding to the second vibration damping layer 230, and whose interior is filled with damping and vibration-damping quartz sand.

[0031] This invention utilizes a vibration-damping base 100, a load-bearing base 200, and an equipment base 300, which are stacked with vibration-damping layers at intervals. By using the inertia of different bases to resist vibration and absorbing impact energy through the vibration-damping layers, the different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This invention is compatible with a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0032] In the above embodiments, such as Figure 1 and Figure 2 As shown, the main body of this high-precision concrete vibration damping table consists of a vibration damping base 100, a load-bearing base 200, and an equipment base 300. The vibration damping base 100 is placed on the ground, forming the foundation of the entire vibration damping table and providing strong and stable support to ensure the overall stability of the table under various complex working conditions. The load-bearing base 200 is anchored above the vibration damping base 100 to disperse and absorb the stress generated during equipment vibration, thereby reducing the vibration amplitude. The equipment base 300 is positioned above the load-bearing base 200 and is used to install production equipment, serving to fix the equipment and transmit its vibration force.

[0033] In actual installation, the length and width dimensions of the equipment base 300 are smaller than those of the bearing base 200, and the length and width dimensions of the bearing base 200 are smaller than those of the vibration damping base 100. During installation, the equipment base 300 is installed at the center of the bearing base 200, which is then positioned at the center of the vibration damping base 100, forming a pyramid-shaped layered structure. A first vibration damping layer 110 is fitted onto the upper side of the vibration damping base 100, and the bearing base 200 is positioned at the location of the first vibration damping layer 110. A second vibration damping layer 230 is also installed above the bearing base 200, and the equipment base 300 is positioned at the location of the second vibration damping layer 230. In the specific setup, the first damping layer 110 and the second damping layer 230 are made of elastic damping material (detailed below). Therefore, the damping base 100, the bearing base 200 and the equipment base 300 after construction do not form a rigid connection, but an elastic connection. Since the length and width of the damping base 100, the bearing base 200 and the equipment base 300 are different, there are differences in weight. Therefore, static stability can be achieved. Static stability refers to the ability of the vibration table to remain stable under static self-weight load (such as the self-weight of the vibration table and the self-weight of the equipment). The concrete base with its own mass forms an inertial barrier, which effectively offsets and attenuates high and low frequency vibrations within the high and low frequency range.

[0034] The above-mentioned structural design effectively avoids resonance generated by the base during equipment operation. At the same time, the first damping layer 110 and the second damping layer 230, made of elastic damping material, also achieve the functions of vibration reduction and buffering. When subjected to vibration, the mechanical energy is converted into heat energy and dissipated through its own deformation, thereby weakening the transmission of vibration. Through the cooperation between the above structures, the dynamic stability performance of the high-precision concrete vibration damping table is improved, that is, the ability to maintain stability under dynamic loads or external vibration interference. It can absorb stress and significantly reduce the amplitude for both external influences (ground vibration) and equipment influences (vibrations generated during equipment production), thereby ensuring the accuracy requirements during the production of high-precision equipment.

[0035] Meanwhile, in the above embodiment, the equipment base 300 is also filled with damping and vibration-damping quartz sand. The working principle of damping quartz sand (usually referring to a damping device or structure filled with quartz sand) is mainly based on the friction, collision and energy dissipation between particles. It achieves the vibration reduction effect by absorbing and consuming vibration energy. The specific principle of its vibration reduction is as follows:

[0036] Firstly, it dissipates energy through particle friction: Quartz sand is composed of a large number of hard, fine particles. When subjected to vibration or impact, these particles slide, roll, and collide relative to each other. The frictional force on the particle surface and the mechanical energy generated by the collision are converted into heat energy and dissipated, thus consuming vibration energy and weakening vibration transmission. Secondly, it hinders vibration propagation: The filled quartz sand can change the stiffness and damping characteristics of the vibration system. When vibration waves pass through the quartz sand particle layer, they are dispersed, reflected, and attenuated due to the interaction between the particles, reducing the efficiency of vibration transmission to the external structure. Thirdly, it can buffer impact loads: When subjected to instantaneous impact, quartz sand particles absorb impact energy through deformation methods such as compression and misalignment, prolonging the impact time and mitigating the direct impact on equipment or structures.

[0037] With the above-described structural design, this utility model utilizes the inertia of different bases to resist vibration by setting up a vibration-damping base 100, a bearing base 200, and an equipment base 300, which are stacked with vibration-damping layers at intervals. The vibration-damping layers absorb impact energy, and the different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving the effect of vibration reduction for production equipment. This utility model is compatible with a variety of high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0038] In one specific embodiment of this utility model, the aforementioned support base 200 may include multiple layers in actual installation. The multi-layered support base 200, in addition to supporting the upper equipment base 300, also serves to dynamically eliminate stress through the multiple second damping layers 230. In one specific embodiment, such as... Figure 1 and Figure 2 As shown, the aforementioned bearing base 200 specifically includes a first base groove platform and a second base groove platform 220. The first base groove platform 210 is anchored on the aforementioned vibration damping base 100. A first mounting groove 211 is provided at the center of the upper side of the first base groove platform 210, and a second vibration damping layer 230 is provided inside the first mounting groove 211. Correspondingly, the second base groove platform 220 is fitted into the first mounting groove 211 and presses the second vibration damping layer 230 inside the first mounting groove 211. After being limited by the first mounting groove 211, the second base groove platform 220 can maintain the limiting connection with the first base groove platform 210 on the one hand, and on the other hand, when affected by vibration, it can fully transfer the stress to the second vibration damping layer 230 to achieve the reduction of the corresponding force.

[0039] A second mounting groove 221 is provided at the center of the upper side of the second base platform 220. A second vibration damping layer 230 is also provided within the second mounting groove 221. During actual installation, the equipment base 300 is fitted into the second mounting groove 221, and the second vibration damping layer 230 within the second mounting groove 221 is pressed together. The equipment base 300, after being limited by the second mounting groove 221, can maintain its limiting connection with the second base platform 220. Furthermore, when subjected to vibration, it can fully transfer stress to the second vibration damping layer 230, thereby further reducing stress. In practical applications, the specific number of layers of the bearing base 200 is not limited. Depending on the needs of high-precision equipment, those skilled in the art can configure it to have one or more layers; this application does not impose any limitation on this.

[0040] Furthermore, such as Figure 1 As shown, the first damping layer 110 is located at the center of the upper side of the damping base 100. In actual installation, a number of anchor piles 130 are also evenly arranged in the vertical direction on the damping base 100. The anchor piles 130 penetrate the first damping layer 110 and are anchored to the bearing base 200. The arrangement of the anchor piles 130 not only enhances the connection strength between the damping base 100 and the bearing base 200, but also makes the entire structure more stable.

[0041] More specifically, such as Figure 1 As shown, an adhesive layer 131 is also provided at the locations of several anchor piles 130 within the vibration damping base 100. The adhesive layer 131 is circumferentially wrapped around the anchor piles 130 and located inside the vibration damping base 100 by grouting. The adhesive layer 131 ensures that after the anchor piles 130 are fixedly connected to the bearing base 200, they can form a stable connection by engaging and limiting the anchor piles 130 with the vibration damping base 100, without forming a direct connection. Thus, the adhesive layer 131 elastically disperses the stress transmitted by the anchor piles 130, achieving dynamic stress dispersion rather than rigid stress absorption. This structural design can transfer the weight of the high-precision concrete vibration damping platform and the equipment on the platform, as well as the impact force generated by vibration, to the foundation through anchor bolts, dispersing stress, preventing excessive local stress on the vibration damping platform and thus improving its service life.

[0042] On the other hand, the installation of the adhesive layer 131 at the anchor pile 130 can enhance the vibration resistance of the high-precision concrete vibration damping platform. When encountering strong external vibrations such as ground vibration, the anchor bolt can limit the swaying amplitude of the vibration damping platform, reduce its relative displacement with the foundation, improve the overall vibration resistance of the vibration damping system, and protect the precision equipment on the platform.

[0043] In the above embodiments, the vibration damping base 100, the load-bearing base 200, and the equipment base 300 are all made of concrete, specifically high-precision concrete with a strength grade of C40 and a permeability grade of P8. In addition, a steel cage is provided inside the vibration damping base 100, the load-bearing base 200, and the equipment base 300 to improve the structural strength of each of the vibration damping base 100, the load-bearing base 200, and the equipment base 300.

[0044] In actual construction, the aforementioned vibration damping base 100 is specifically installed inside the ground, while the load-bearing base 200 and equipment base 300 are located above the ground. The entire structure is built on a floor with vibration damping requirements reaching VC-C level, and the ground load-bearing requirement is above 10T / ㎡. Reinforcing cages are also installed inside the vibration damping base 100, load-bearing base 200, and equipment base 300 to form the internal skeleton of the base, thereby improving load and structural strength. The strength grade of the reinforcing steel is HRB400. The permissible value levels of the reinforced concrete vibration damping base 100, load-bearing base 200, and equipment base 300 are VC-A, VC-B, VC-C, VC-D, VC-E, and VC-F levels.

[0045] In the above embodiments, the first damping layer 110 and the second damping layer 230 have the same structure, both specifically made of a fixedly attached anti-vibration pad and a damping pad, wherein the anti-vibration pad is a rubber pad and the damping film is a PVC damping film. The anti-vibration pad utilizes the viscoelastic properties of the rubber material to achieve vibration reduction and buffering. Its working principle is mainly based on the following aspects: First, viscoelastic energy dissipation: Rubber is a viscoelastic material, possessing both elasticity (capable of storing deformation energy generated under external force) and viscosity (capable of dissipating energy through intermolecular friction). When external vibration or impact is transmitted to the rubber pad, the rubber deforms, and the internal molecular chains rub and entangle with each other, converting mechanical energy into heat energy and dissipating it, thereby weakening the transmission of vibration. Second, changing the vibration frequency: The damping rubber pad can change the natural vibration frequency of the system, allowing the system to avoid the resonant frequency range and preventing the resonance amplification of vibration, thus playing a vibration isolation role. Third, buffering impact loads: When subjected to instantaneous impact, the rubber pad absorbs the impact energy through its own elastic deformation, prolongs the impact time, reduces the impact acceleration, and thus reduces the damage to the equipment or structure.

[0046] PVC damping pads are a type of pad material with damping properties, made primarily of polyvinyl chloride (PVC) and containing plasticizers, fillers, and other additives. They possess good chemical stability and are not easily altered with other substances, thus providing protection for vibration damping pads. Simultaneously, damping pads effectively absorb and dissipate vibration energy to reduce resonance. Furthermore, PVC material has a certain degree of weather resistance, maintaining its performance under various environmental conditions, thereby extending its service life.

[0047] Furthermore, in another possible embodiment of this utility model, such as Figure 1 and Figure 2 As shown, to protect the equipment base 300 and prevent damage to the upper layer of the equipment base 300 due to usage time, external environment, etc., which would reduce the fixing strength of the high-precision production equipment, an anti-corrosion layer 310 is also provided on the equipment base 300 in this embodiment. The anti-corrosion layer 310 is flattened and covered on the upper side of the equipment base 300. Specifically, the anti-corrosion layer 310 is a two-layer five-coat epoxy coating and a polyurethane coating. The two-layer five-coat epoxy coating is an anti-corrosion coating composed of epoxy resin and glass fiber cloth. It has excellent resistance to acid, alkali, salt, chemical solvents, oil corrosion, etc.; it has good adhesion to the substrate, strong wear resistance, impact resistance, low water permeability, strong adhesion, and high water pressure resistance, which can effectively protect the equipment base 300.

[0048] After applying a two-layer, five-coat epoxy coating to the upper side of the equipment base 300, a polyurethane coating can be further applied to achieve better vibration absorption. Polyurethane, short for polyurethane foam, is a high-molecular-weight material with excellent mechanical properties, formed by the condensation reaction of polyols and polyisocyanates. Polyurethane primarily has a thermoplastic linear structure, offering better stability, chemical resistance, resilience, and mechanical properties than PVC foam, with less compression deformation. It also provides good thermal insulation, sound insulation, shock resistance, and anti-toxic properties. Its elastomer properties fall between those of plastics and rubber; it is oil-resistant, wear-resistant, low-temperature resistant, aging-resistant, has high hardness, and is elastic, enabling it to absorb vibration stress while coping with various unexpected situations that may occur during production.

[0049] In actual installation, the anti-corrosion layer 310 should be flattened, and the flatness of the anti-corrosion layer 310 should be controlled within ±2mm to ensure the stability of the installation of high-precision production equipment.

[0050] In addition, angle steel 320 is also provided around the side of the equipment base 300. The angle steel 320 is 60*60*8. It is used to form a rim on the side of the equipment base 300. On the one hand, it protects the equipment base 300. On the other hand, it can improve the overall integrity of the equipment base 300 during the vibration reduction process.

[0051] Based on the above embodiments, the actual setup process of the high-precision concrete vibration damping table of this utility model is as follows:

[0052] First, based on the usage requirements of high-precision equipment and the site environment, determine the specific dimensions and number of layers of the vibration damping base 100, the load-bearing base 200, and the equipment base 300.

[0053] Then, the ground is measured and positioned, a vibration damping base 100 is set, an anchor pile 130 is anchored on the upper side of the vibration damping base 100, and the anchor pile 130 is fixed by grouting the adhesive layer 131. The first vibration damping layer 110 is laid on the upper side of the vibration damping base 100.

[0054] The steel cage supporting the base 200 is tied to the position of several anchor piles 130 on the vibration damping base 100, and a support formwork is set up and poured to form the vibration damping base 100. The vibration damping base 100 can be set up in one or more layers, depending on the usage requirements of the high-precision equipment.

[0055] After the bearing base 200 is completed and cured, the equipment base 300 is set on the second vibration damping layer 230 laid in the upper groove of the bearing base 200. It is then cast into shape using a steel cage and a support formwork to form a platform surface, with a reserved grouting port. After curing and drying, damping and vibration-damping quartz sand is poured into the inside of the equipment base 300, and angle steel 320 is set on the outer side of the equipment base 300. Finally, an anti-corrosion layer 310 is made, and the surface is leveled and polished to form the whole of the high-precision concrete vibration damping platform of this utility model.

[0056] In summary, this utility model provides a high-precision concrete vibration damping table, which includes: a vibration damping base, on the upper side of which a first vibration damping layer is fitted; a bearing base, anchored on the vibration damping base at a position corresponding to the first vibration damping layer, on the upper side of which a second vibration damping layer is fitted; and an equipment base, fitted on the bearing base at a position corresponding to the second vibration damping layer, the interior of which is filled with damping and vibration-damping quartz sand. This utility model, by setting up a vibration damping base, a bearing base, and an equipment base with vibration damping layers stacked at intervals, utilizes the inertia of different bases to resist vibration and absorbs impact energy through the vibration damping layers. The different natural frequencies of the multiple bases can avoid the frequencies of equipment operation and environmental vibration, preventing resonance and thus achieving vibration damping for production equipment. This utility model is adaptable to various high-precision production equipment, requires no adjustment during use, and can resist external environmental interference.

[0057] It should be understood that the application of this utility model is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A high-precision concrete vibration damping table, characterized in that, The high-precision concrete vibration damping table includes: A vibration damping base, wherein a first vibration damping layer is fixedly disposed on the upper side of the vibration damping base; A bearing base is anchored on the vibration damping base at a position corresponding to the first vibration damping layer, and a second vibration damping layer is fitted on the upper side of the bearing base; The equipment base is fitted onto the bearing base at a position corresponding to the second vibration damping layer, and the interior of the equipment base is filled with damping and vibration-damping quartz sand.

2. The high-precision concrete vibration damping table according to claim 1, characterized in that, The bearing base includes a first foundation groove and a second foundation groove; The first foundation groove is anchored on the vibration damping base. A first mounting groove is provided at the center of the upper side of the first foundation groove, and the second vibration damping layer is disposed in the first mounting groove. The second base platform is fitted into the first mounting groove. A second mounting groove is provided at the center of the upper side of the second base platform. The second mounting groove is provided with the second vibration damping layer. The second mounting groove is used to support the equipment base.

3. The high-precision concrete vibration damping table according to claim 1, characterized in that, The first vibration damping layer is located at the center of the upper side of the vibration damping base. A plurality of anchor piles are uniformly arranged on the vibration damping base along the vertical direction, and the plurality of anchor piles penetrate the first vibration damping layer and are anchored to the bearing base.

4. The high-precision concrete vibration damping table according to claim 3, characterized in that, An adhesive layer is provided at the positions corresponding to the anchor piles in the vibration damping base. The adhesive layer is circumferentially wrapped around the anchor piles and located inside the vibration damping base.

5. The high-precision concrete vibration damping table according to claim 1, characterized in that, The first vibration damping layer includes a vibration damping pad and a damping membrane that are fixedly attached to each other. The vibration damping pad is a rubber pad and the damping membrane is a PVC damping membrane. The structure of the second vibration damping layer is the same as that of the first vibration damping layer.

6. The high-precision concrete vibration damping table according to claim 1, characterized in that, The equipment base is provided with an anti-corrosion layer, which is applied to the upper side of the equipment base after being smoothed out.

7. The high-precision concrete vibration damping table according to claim 6, characterized in that, Angle steel is provided around the side of the equipment base, and the anti-corrosion layer is used to wrap the angle steel after surface grinding.

8. The high-precision concrete vibration damping table according to claim 6, characterized in that, The anti-corrosion layer is a two-layer cloth five-coat epoxy coating and a polyurethane coating; the flatness of the anti-corrosion layer is ±2mm.

9. The high-precision concrete vibration damping table according to claim 1, characterized in that, The vibration damping base, the load-bearing base, and the equipment base are components made of concrete.

10. The high-precision concrete vibration damping table according to claim 9, characterized in that, The vibration damping base, the load-bearing base, and the equipment base are all equipped with steel reinforcement cages.

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