Vertical furnace door opening and closing device

Abstract

This utility model discloses a vertical furnace door opening and closing device, comprising: a furnace door; a connecting assembly including a connecting plate and a mounting plate, one end of the connecting plate being rigidly connected to the furnace door and the other end being pivotally connected to the mounting plate; a lifting assembly configured to drive the lifting plate to move up and down vertically; and a rotating assembly including a linear drive component and a rotating bushing, the rotating bushing being rotatably fitted onto the outer peripheral wall of a support shaft, the linear drive component including a body portion and a power output portion, the body portion being pivotally connected to the lifting plate, and the power output portion being pivotally connected to the outer peripheral side of the rotating bushing. By adopting the above solution, through the coordinated transmission design of the linear drive component and the rotating bushing, a laterally compact linear drive rotation layout replaces the traditional longitudinal motor drive, significantly optimizing the longitudinal space occupation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor diffusion equipment technology, and in particular to a vertical furnace door opening and closing device. Background Technology

[0002] Currently, semiconductor diffusion equipment is a crucial piece of process equipment in integrated circuit manufacturing. It is an automated control system required to operate continuously for extended periods, possessing excellent temperature control accuracy and high reliability and stability. It is suitable for various oxidation, annealing, and thin film growth processes in integrated circuit manufacturing. Among these, the furnace door assembly of the vertical heat treatment furnace, as a critical mechanical interface, directly affects the sealing effect of the process chamber and the level of particulate contamination control due to its motion accuracy and structural layout. It is a core technological element ensuring the consistency of the heat treatment process and the long-term reliability of the equipment.

[0003] Currently, vertical furnaces generally employ a lifting-rotation hybrid motion to open and close the furnace door, reducing misalignment between sealing components and minimizing particulate contamination caused by friction. However, existing solutions mostly rely on motor-driven rotation, which presents two major technical bottlenecks: first, limited angle control precision, making it difficult for motors to achieve precise oscillation within a small angle range, easily leading to uneven stress on the sealing surface and affecting sealing stability; second, the motors and their transmission mechanisms are mostly arranged longitudinally, occupying a large space, which contradicts the current trend of compact and modular design in semiconductor equipment, limiting the integration and optimization of functional components around the cavity.

[0004] The aforementioned problems are particularly prominent in advanced process equipment. Motor systems are not only complex in structure and costly to maintain, but their inherent inertia can also induce micro-vibrations, disrupting the uniformity of the process thermal field and consequently affecting the consistency and yield of wafer processing. Therefore, there is an urgent need to develop a vertical furnace door opening and closing device that requires no motor intervention, has a compact structure, and operates with precision, in order to better meet the stringent performance requirements of high-end semiconductor manufacturing processes. Utility Model Content

[0005] The purpose of this invention is to provide a vertical furnace door opening and closing device to solve the problems of existing door opening and closing devices being unable to achieve precise swinging of the furnace door within a small angle range and insufficient utilization of longitudinal space.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows:

[0007] The vertical furnace door opening and closing device includes:

[0008] Furnace door;

[0009] The connecting assembly includes a connecting plate and a mounting plate, one end of the connecting plate being rigidly connected to the furnace door and the other end being pivotally connected to the mounting plate;

[0010] A lifting assembly includes a lifting plate and a support shaft vertically fixed to the lifting plate, the lifting assembly being configured to drive the lifting plate to move up and down in a vertical direction;

[0011] A rotating assembly includes a linear drive and a rotating bushing. The rotating bushing is rotatably fitted onto the outer peripheral wall of the support shaft. One end of the rotating bushing opposite to the lifting plate is fixedly connected to the mounting plate. The linear drive includes a body and a power output. The body is pivotally connected to the lifting plate, and the power output is pivotally connected to the outer peripheral side of the rotating bushing.

[0012] When the linear drive unit performs a telescopic action, the power output unit drives the rotating bushing to rotate around the axis of the support shaft, while the linear drive unit performs an adaptive oscillation relative to the lifting plate.

[0013] The beneficial effects of the vertical furnace door opening and closing device provided by this utility model are as follows: By using a coordinated transmission design of linear drive components and rotating bushings, a compact lateral linear drive rotation layout replaces the traditional longitudinal motor drive, significantly optimizing the longitudinal space occupation; the telescopic motion of the linear drive components is directly converted into precise micro-rotation of the rotating bushing, achieving high-precision swing control of the furnace door within a small angle range; at the same time, the pivotal connection structure between the linear drive components and the lifting plate can adaptively swing, avoiding motion interference; in addition, the design of the lifting components and hinges can avoid docking deviations between the process cavity sealing components and the process cavity of the vertical heat treatment furnace, and avoid the generation of particles due to rotational contact friction between the furnace door and the vertical heat treatment furnace, thereby comprehensively improving the motion accuracy, longitudinal space utilization, and cleanliness of the equipment.

[0014] Furthermore, a horizontal hinge shaft is provided between the connecting plate and the mounting plate, and the connecting plate and the mounting plate are hinged through the horizontal hinge shaft. A first positioning hole is opened on the side wall of the mounting plate, and a second positioning hole is opened on the side wall of the connecting plate. When the connecting plate and the mounting plate are in a parallel state, the first positioning hole and the second positioning hole are coaxially aligned.

[0015] Furthermore, it also includes a positioning pin, which can be detachably inserted into the first positioning hole and the second positioning hole when the connecting plate and the mounting plate are in a horizontal state and the first positioning hole and the second positioning hole are coaxially aligned.

[0016] Furthermore, the rotating assembly also includes a rotating connecting block and a fisheye connector. The rotating connecting block is fixedly connected to the outer peripheral side of the rotating bushing, and one end of the fisheye connector is fixedly connected to the power output part, while the other end is rotatably connected to the rotating connecting block.

[0017] Furthermore, the lifting assembly also includes:

[0018] The casing has an internal installation space.

[0019] A first cylinder is disposed within the installation space, and the power output end of the first cylinder is connected to the lifting plate to drive the lifting plate to move up and down in the height direction.

[0020] Furthermore, the lifting assembly also includes:

[0021] A linear bearing, one end of which is fixedly connected to the inner wall of the housing;

[0022] A guide shaft is set perpendicular to the lifting plate. One end of the guide shaft is fixedly connected to the lifting plate, and the other end of the guide shaft slides through the linear bearing.

[0023] Furthermore, a rotating bracket is provided on the side of the lifting plate away from the lifting assembly. The rotating bracket includes a pivoting part and a mounting part. The pivoting part is pivotally connected to the lifting plate, and the mounting part is fixedly connected to the main body.

[0024] Furthermore, a buffer block is provided on the side of the mounting plate opposite to the lifting assembly.

[0025] Furthermore, the support shaft is fixedly connected to the bottom center of the lifting plate, and a rotary bearing is sleeved on the outside of the support shaft, with the rotary shaft sleeve covering the outside of the rotary bearing.

[0026] Furthermore, the linear drive includes a second cylinder, the body portion is located on the cylinder block of the second cylinder, and the power output portion is located on the piston rod of the second cylinder. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the vertical furnace door opening and closing device of this utility model;

[0028] Figure 2 This is a schematic diagram of the furnace door in a horizontal position according to an embodiment of the present invention;

[0029] Figure 3 This is a schematic diagram of the structure of the connecting component in an embodiment of the present utility model;

[0030] Figure 4 This is a schematic diagram of the furnace door in a vertical position according to an embodiment of the present invention.

[0031] Reference numerals: 1. Furnace door; 2. Connecting assembly; 21. Connecting plate; 22. Mounting plate; 221. Buffer block; 23. Horizontal hinge shaft; 24. Positioning pin; 3. Lifting assembly; 31. Lifting plate; 32. Support shaft; 33. Housing; 34. First cylinder; 35. Linear bearing; 36. Guide shaft; 4. Rotating assembly; 41. Linear drive component; 42. Rotating bushing; 43. Rotating bracket; 44. Rotating connecting block; 45. Fisheye joint. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0033] The following is in conjunction with the appendix Figure 1-4 The specific embodiments of this utility model will be further described in detail below.

[0034] like Figures 1-2 As shown, some embodiments of this utility model provide a vertical furnace door opening and closing device, including a furnace door 1, a connecting component 2, a lifting component 3, and a rotating component 4.

[0035] The furnace door 1 in this embodiment of the present invention is used to seal the process chamber of the vertical heat treatment furnace, and should have good airtightness and cleanliness when it is open or closed.

[0036] Reference Figure 2 In some embodiments of this utility model, the connecting component 2 includes a connecting plate 21 and a mounting plate 22. One end of the connecting plate 21 is fixedly connected to the furnace door 1 to effectively transmit rotational and lifting movements to the furnace door 1 body, thereby realizing angle adjustment and position maintenance of the furnace door 1 during opening and closing. The other end of the connecting plate 21 is hinged to the mounting plate 22 through a horizontally set hinge shaft, so that the connecting plate 21 can rotate within a certain range relative to the mounting plate 22 in the direction of the hinge shaft, thereby adapting to allow the furnace door 1 to change between a parallel posture and a vertical posture, improving the flexibility of the structure and the accuracy of the sealing connection.

[0037] Reference Figure 3In some specific embodiments of this utility model, the side walls of the connecting plate 21 and the mounting plate 22 are respectively provided with a first positioning hole and a second positioning hole. When the connecting plate 21 and the mounting plate 22 are in a predetermined parallel state, the two positioning holes can be coaxially aligned. At this time, the positioning pin 24 can be inserted into the first positioning hole and the second positioning hole to mechanically lock the rotation angle of the connecting component 2. This structure can not only effectively prevent the furnace door 1 from swinging unexpectedly during the opening and closing process and ensure its angle stability, but also facilitate the temporary fixing and positioning of the furnace door 1 during equipment maintenance, cavity opening, or docking processes, thereby improving the controllability and safety of the operation. The matching design of the positioning hole and the positioning pin 24 also helps to improve the accuracy of the structure's repeated positioning, reduce the mechanical cumulative error caused by frequent opening and closing, further ensure the long-term consistency of the sealing surface of the process cavity, and meet the requirements of high cleanliness and high reliability of semiconductor equipment.

[0038] In some embodiments of this utility model, the lifting assembly 3 is mainly used to achieve precise vertical lifting movement of the furnace door 1, ensuring smooth docking and reliable separation between the furnace door 1 and the sealing structure of the process cavity, and avoiding interference or particulate contamination during opening and closing. In some specific embodiments of this utility model, the lifting assembly 3 includes a lifting plate 31, a support shaft 32, a first cylinder 34, a linear bearing 35, a guide shaft 36, and a housing 33. The housing 33 has an installation space inside, and a rotary bearing is sleeved on the outer periphery of the support shaft 32. The rotary bearing and the rotary sleeve 42 in the rotary assembly 4 form a low-friction rotating pair connection, which can ensure stable and smooth rotation of the furnace door 1 while maintaining structural rigidity, avoiding particle shedding caused by jamming or resistance fluctuations, and meeting the stringent requirements of semiconductor equipment for an ultra-clean environment. The first cylinder 34 is located inside the housing 33 of the lifting assembly 3, and its power output end is connected to the lifting plate 31 to drive the lifting plate 31 to reciprocate along the height direction. When the first cylinder 34 is supplied with a driving air source, its piston rod can drive the lifting plate 31 to reciprocate along the height direction. The guide shaft 36 is fixed to the lifting plate 31 and extends vertically into the linear bearing 35 located in the housing 33. The guide shaft 36 and the linear bearing 35 form a rigid guide pair, which can effectively prevent the lifting plate 31 from tilting, deflecting or shaking during operation and ensure the stability of the lifting path.

[0039] In some embodiments of this utility model, the rotating assembly 4 is used to adjust the angle of the furnace door 1 around the support shaft 32. The rotating assembly 4 includes a linear drive 41, a rotating bushing 42, a rotating connecting block 44, and a fisheye connector 45. The rotating bushing 42 is rotatably sleeved on the outside of the support shaft 32, and one end of it is fixedly connected to the mounting plate 22. The rotating connecting block 44 is disposed on the outer circumferential side of the rotating bushing 42 and is rotatably connected to the fisheye connector 45. The other end of the fisheye connector 45 is connected to the power output part of the linear drive 41. The body of the linear drive 41 is connected to the lifting plate 31 through a pivot structure, which can realize adaptive angle adjustment. When the linear drive 41 extends or retracts, its output end drives the fisheye connector 45 and further drives the rotating bushing 42 to rotate relative to the support shaft 32, thereby driving the mounting plate 22 and the connecting plate 21 to realize the angle swing of the furnace door 1. In this design, the linear drive component 41 is preferably an electric push rod or a pneumatic actuator. Its main body is connected to the lifting plate 31 via a pivot structure, allowing it to be freely adjusted according to the rotation angle of the furnace door 1, forming a drive device with adaptive posture. When the linear drive component 41 performs a telescopic movement, its output end pushes the fisheye connector 45 to rotate around the rotating connecting block 44, thereby driving the rotating bushing 42 to rotate around the support shaft 32, enabling the mounting plate 22 and the connecting plate 21 connected to it, as well as the furnace door 1, to achieve angle deflection adjustment. This structure converts linear displacement into rotational motion, avoiding the need to install a drive motor at the bottom of the rotating bushing 42, thus saving longitudinal installation space. In some specific embodiments of this utility model, the rotating assembly 4 uses a second cylinder as the linear drive component 41, with its cylinder body as the main body and the piston rod as the power output part.

[0040] In some embodiments of this utility model, the lifting plate 31 is further provided with a rotating bracket 43. The rotating bracket 43 is L-shaped and includes a pivoting part and a mounting part. The pivoting part is pivotally connected to the lifting plate 31, and the mounting part is fixedly connected to the body of the linear drive member 41. The pivoting part of the rotating bracket 43 has a rotating hole, and the lifting plate 31 is provided with a rotating shaft. The rotating shaft is rotatably disposed in the rotating hole to realize the horizontal swing of the rotating bracket 43, thereby providing a certain angle of movement for the linear drive member 41. This allows the linear drive member 41 to achieve adaptive swing during the rotation of the linear drive rotating bushing 42, avoiding interference with other structures.

[0041] In some embodiments of this utility model, a buffer block 221 is also provided on the side of the mounting plate 22 away from the lifting assembly 3, which is used to provide flexible buffer when the furnace door 1 is closed in place, reduce the impact force, and further improve the stability and service life of the mechanism.

[0042] In summary, this utility model, through the coordinated operation of the lifting component 3 and the rotating component 4, achieves separation and reset control of the furnace door 1 during opening and closing, significantly improving the overall operational reliability and efficiency. During opening, the furnace door 1 first moves downwards via the lifting component 3 to avoid the furnace body, and then is driven by the rotating component 4 to achieve angular swing, avoiding mechanical interference with the furnace body edge that may occur with traditional side-opening or flipping structures. During closing, the furnace door 1 returns to its coaxial position with the furnace body via the rotating component 4, and then moves upwards to complete the sealing closure. The pressure provided by the lifting component 3 further improves the sealing performance between the furnace door 1 and the furnace body. The detachable positioning pin 24, the first positioning hole, and the second positioning hole allow for switching between horizontal and vertical states of the furnace door 1 (see reference). Figure 2 and Figure 4 Furthermore, the linear drive 41, through the cooperation of the fisheye connector 45 and the rotating bracket 43, precisely converts the linear drive of the linear drive 41 into the rotation output of the furnace door 1, which not only improves the rotational motion accuracy of the furnace door 1, but also significantly compresses the longitudinal space, making it suitable for semiconductor heat treatment equipment with strict requirements for sealing and spatial integration.

[0043] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A vertical furnace door opening and closing device, characterized in that, include: Furnace door (1); The connecting assembly (2) includes a connecting plate (21) and a mounting plate (22), one end of the connecting plate (21) being rigidly connected to the furnace door (1) and the other end being pivotally connected to the mounting plate (22); The lifting assembly (3) includes a lifting plate (31) and a support shaft (32) vertically fixed to the lifting plate (31). The lifting assembly (3) is configured to drive the lifting plate (31) to move up and down in the vertical direction. The rotating assembly (4) includes a linear drive (41) and a rotating bushing (42). The rotating bushing (42) is rotatably fitted onto the outer peripheral wall of the support shaft (32). One end of the rotating bushing (42) away from the lifting plate (31) is fixedly connected to the mounting plate (22). The linear drive (41) includes a body and a power output. The body is pivotally connected to the lifting plate (31), and the power output is pivotally connected to the outer peripheral side of the rotating bushing (42). When the linear drive (41) performs a telescopic action, the power output unit drives the rotating bushing (42) to rotate around the axis of the support shaft (32), and at the same time the linear drive (41) performs an adaptive swing relative to the lifting plate (31).

2. The vertical furnace door opening and closing device according to claim 1, characterized in that, A horizontal hinge shaft (23) is provided between the connecting plate (21) and the mounting plate (22). The connecting plate (21) and the mounting plate (22) are hinged through the horizontal hinge shaft (23). A first positioning hole is opened on the side wall of the mounting plate (22), and a second positioning hole is opened on the side wall of the connecting plate (21). When the connecting plate (21) and the mounting plate (22) are in a parallel state, the first positioning hole and the second positioning hole are coaxially aligned.

3. The vertical furnace door opening and closing device according to claim 2, characterized in that, It also includes a positioning pin (24), which can be detachably inserted into the first positioning hole and the second positioning hole when the connecting plate (21) and the mounting plate (22) are in a horizontal state and the first positioning hole and the second positioning hole are coaxially aligned.

4. The vertical furnace door opening and closing device according to claim 1, characterized in that, The rotating assembly (4) further includes a rotating connecting block (44) and a fisheye connector (45). The rotating connecting block (44) is fixedly connected to the outer peripheral side of the rotating bushing (42). One end of the fisheye connector (45) is fixedly connected to the power output part, and the other end is rotatably connected to the rotating connecting block (44).

5. The vertical furnace door opening and closing device according to claim 1, characterized in that, The lifting assembly (3) also includes: The housing (33) has an installation space inside; A first cylinder (34) is disposed in the installation space. The power output end of the first cylinder (34) is connected to the lifting plate (31) to drive the lifting plate (31) to move up and down in the height direction.

6. The vertical furnace door opening and closing device according to claim 5, characterized in that, The lifting assembly (3) also includes: A linear bearing (35) is fixedly connected at one end to the inner wall of the housing (33); A guide shaft (36) is set perpendicular to the lifting plate (31). One end of the guide shaft (36) is fixedly connected to the lifting plate (31), and the other end of the guide shaft (36) slides through the linear bearing (35).

7. The vertical furnace door opening and closing device according to claim 5, characterized in that, The lifting plate (31) is provided with a rotating bracket (43) on the side away from the lifting assembly (3). The rotating bracket (43) includes a pivot part and a mounting part. The pivot part is pivotally connected to the lifting plate (31) and the mounting part is fixedly connected to the main body.

8. The vertical furnace door opening and closing device according to claim 5, characterized in that, A buffer block (221) is provided on the side of the mounting plate (22) away from the lifting assembly (3).

9. The vertical furnace door opening and closing device according to claim 8, characterized in that, The support shaft (32) is fixedly connected to the bottom center of the lifting plate (31), and a rotary bearing is sleeved on the outside of the support shaft (32), and the rotary bushing (42) is sleeved on the outside of the rotary bearing.

10. The vertical furnace door opening and closing device according to claim 9, characterized in that, The linear drive (41) includes a second cylinder, the body portion is located on the cylinder body of the second cylinder, and the power output portion is located on the piston rod of the second cylinder.

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