Non-contact product cooling device in a vacuum furnace
By designing a non-contact cooling device and utilizing adjustable air ducts and gas flow control, the problem of poor cooling effect in vacuum furnaces was solved, achieving uniform cooling of products and improved welding quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HEFEI SEMITECH TECH CO LTD
- Filing Date
- 2025-07-31
- Publication Date
- 2026-06-09
AI Technical Summary
Existing vacuum furnaces have a poor cooling effect when cooling products, resulting in uneven solder temperature gradients, which affects welding quality and product performance.
Design a non-contact cooling device that utilizes components such as a support frame, main air pipe, air duct, and adjustment pipe within the cooling chamber to achieve uniform cooling of the product through adjustable air duct exhaust ports and gas flow control.
By using a non-contact cooling method, the product cooling efficiency and uniformity are improved, welding quality is enhanced, and product performance is ensured to be stable.
Smart Images

Figure CN224340707U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of vacuum furnace technology, specifically relating to a product cooling device inside a non-contact vacuum furnace. Background Technology
[0002] When the chip is soldered to the (DBC) direct copper-clad ceramic substrate in a vacuum furnace, the solder will melt. It needs to be cooled after being removed to solidify the liquid solder into a solid state so that the chip and substrate can be soldered together.
[0003] In existing technologies, when cooling products after vacuum furnace welding, the cold plate is usually in contact with the product carrier to cool the product through heat conduction. The shortcomings of this technical solution are that the structural characteristics of some products result in a small contact surface between the carrier and the cold plate, and the product cannot be cooled evenly. This leads to a temperature gradient in the solder during the cooling process, which ultimately affects the welding quality and product performance.
[0004] There are currently no effective solutions to the problems in the relevant technologies. Utility Model Content
[0005] The purpose of this utility model is to provide a product cooling device in a non-contact vacuum furnace. The technical problem to be solved is as follows: existing vacuum furnaces have poor cooling effect during use.
[0006] The objective of this utility model can be achieved through the following technical solutions:
[0007] A product cooling device for a non-contact vacuum furnace includes a cooling chamber with multiple support frames inside. A main air pipe is fixedly connected between the tops of each support frame on the same side. Multiple air ducts are installed between two main air pipes. Exhaust ports are evenly distributed at the bottom of each air duct, and the blowing angle of each air duct is adjustable. An air inlet pipe is installed on one side of at least one main air pipe, and an air outlet pipe is provided on one side of the bottom of the cooling chamber. A cooling plate is placed on the bottom surface of the cooling chamber between each support frame.
[0008] As a further embodiment of this utility model: the support frame includes a side frame, the side frame has two parallel slots in the middle, a locking block is installed between the two slots, a main pipe frame is installed on the side of the side frame away from the locking block, and one side of the main pipe frame is welded to the main air pipe.
[0009] As a further embodiment of this utility model: a side pipe is fixedly connected to one side of the main air pipe, a locking nut is threaded to the outer side of the side pipe, an adjusting pipe is threaded to the side pipe, an adjusting nut is threaded to the outer side of the adjusting pipe, and the air duct is inserted between the two adjusting pipes and locked by the adjusting nut.
[0010] As a further embodiment of this utility model: a gas flow meter is installed on the outside of the cooling chamber of the air inlet pipe.
[0011] As a further embodiment of this utility model: the air outlet pipe includes three secondary air outlet pipes disposed on one side of the bottom of the cooling chamber, and each of the secondary air outlet pipes is fixedly connected to a main air outlet pipe. An air extraction valve is installed on one side of the main air outlet pipe, and a vacuum pump is installed at the port of the main air outlet pipe. That is, the cavity inside the cooling chamber is connected to the air outlet pipe and then to the vacuum pump. The air extraction valve controls the air extraction speed inside the cavity through the air outlet pipe so that the air inlet and outlet flow rates inside the cooling chamber reach a balanced state.
[0012] As a further embodiment of this utility model: a sealing door is installed on one side of the cooling chamber, and a handle is installed on one side of the sealing door.
[0013] The beneficial effects of this utility model are:
[0014] By setting up a cooling chamber, placing various support frames inside the cooling chamber, placing a cooling plate on the bottom of the cooling chamber, and installing two main air pipes between the support frames (the height of the main air pipes is adjustable), installing multiple air ducts between the two main air pipes, and connecting the main air pipes to the air inlet pipes, and setting an air outlet pipe at the bottom of the cooling chamber, the cooling height of the product placed on the cooling plate can be adjusted by adjusting the height of the two main air pipes between the support frames during use. This allows the product to be centrally cooled at a suitable height in a closed space with unobstructed air passages. The purpose is to improve the cooling efficiency of the product by using a centralized airflow cooling method close to the product surface.
[0015] By installing adjusting pipes and adjusting nuts between the two main air pipes, the blowing angle of the air duct exhaust port can be adjusted when installing the air duct. After adjusting the blowing angle of each air duct individually, the device can make the air blowing on each part of the product match its surface shape, thereby improving the cooling effect on the product by adjusting the blowing angle. Attached Figure Description
[0016] The present invention will be further described below with reference to the accompanying drawings.
[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0018] Figure 2 This is a schematic diagram of the internal structure of this utility model;
[0019] Figure 3 This is the utility model Figure 2 Enlarged detail view of point A in the middle;
[0020] Figure 4This is a bottom view of the internal structure of this utility model;
[0021] Figure 5 This is a utility model Figure 4 A magnified view of the details at point B in the middle.
[0022] In the diagram: 1. Cooling chamber; 2. Support frame; 21. Side frame; 22. Groove; 23. Locking block; 24. Main pipe frame; 3. Main air pipe; 4. Air duct; 5. Exhaust outlet; 6. Inlet pipe; 7. Outlet pipe; 8. Cooling plate; 9. Sealing door; 10. Side pipe; 11. Locking nut; 12. Adjusting pipe; 13. Adjusting nut; 14. Gas flow meter; 15. Extraction valve; 16. Vacuum pump. Detailed Implementation
[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0024] like Figures 1 to 5 As shown, a product cooling device for a non-contact vacuum furnace includes a cooling chamber 1. Four support frames 2 are symmetrically placed on both sides of the bottom surface of the cooling chamber 1. Two main air pipes 3 are fixedly connected between the tops of two support frames 2 on the same side. Multiple air ducts 4 are installed between the two main air pipes 3. Exhaust ports 5 are evenly arranged at the bottom of the air ducts 4. The blowing angle of the air ducts 4 is adjustable. An air inlet pipe 6 is installed through one side of one of the main air pipes 3 and an air outlet pipe 7 is arranged on one side of the bottom of the cooling chamber 1. Cooling plates 8 are placed between the support frames 2 on the bottom surface of the cooling chamber 1.
[0025] It should be noted that a sealing door 9 is installed on one side of the cooling chamber 1, and a handle is installed on the other side of the sealing door 9. After the product is taken out of the vacuum furnace, the sealing door 9 of the cooling chamber 1 is opened by the handle. A sealing strip is built into the connection between the sealing door 9 and the cooling chamber 1, thereby preventing air leakage during cooling. Using the cooling chamber 1 can ensure that the airflow does not escape during blowing, and the product is in a concentrated cooling state. The air inlet pipe 6 includes, but is not limited to, one. The main air pipe 3 on the other side can also be equipped with an air inlet pipe 6. The air inlet pipe 6 is preferably nitrogen, and the pipe opening is located outside the cooling chamber 1 and connected to a nitrogen gas source.
[0026] like Figure 2 and Figure 3As shown, the support frame 2 includes a side frame 21. Two parallel slots 22 are provided in the middle of the side frame 21. A locking block 23 is installed between the two slots 22. A main pipe frame 24 is installed on the side of the side frame 21 away from the locking block 23. The main pipe frame 24 is L-shaped and one side is welded to the main air pipe 3.
[0027] It should be noted that the locking block 23 is threadedly connected to the main tube frame 24 through the slot 22 of the side frame 21 by two bolts. Since the slot 22 is opened vertically, the height of the main tube frame 24 can be switched by adjusting the height of the locking block 23 between the two slots 22. The purpose is that the height of different products fired in the vacuum furnace is different, so the optimal height of the exhaust port 5 for cooling air blowing is different. Therefore, the air blowing height can be adjusted by adjusting the height of each main tube frame 24, thereby improving the cooling effect of the air blowing.
[0028] like Figure 4 and Figure 5 As shown, a side pipe 10 is fixedly connected to one side of the main air pipe 3. A locking nut 11 is threaded to the outside of the side pipe 10. An adjusting pipe 12 is threaded to the outside of the side pipe 10. An adjusting nut 13 is threaded to the outside of the adjusting pipe 12. The air pipe 4 is inserted between the two adjusting pipes 12 and locked by the adjusting nut 13.
[0029] It should be noted that, due to the differences in shape between different products, when installing the air duct 4, first install the adjusting pipe 12 at the two side pipes 10, and then insert the air duct 4 between the two adjusting pipes 12. First, lock the adjusting pipe 12 with the locking nut 11, then rotate the air duct 4 to adjust the exhaust angle of the exhaust port 5, and finally lock the air duct 4 and the adjusting pipe 12 with the adjusting nut 13. The purpose is to adjust the angle of the exhaust port 5 of each air duct 4 so that each air duct 4 can blow air in a specific direction to the specific position of the product placed on the cooling plate 8, thereby improving the uniformity of airflow received by the product and improving the cooling effect.
[0030] The air inlet pipe 6 is equipped with a gas flow meter 14 on the outside of the cooling chamber 1. The air outlet pipe 7 includes three air outlet sub-pipes located on one side of the bottom of the cooling chamber 1. Each air outlet sub-pipe is fixedly connected to the main air outlet pipe. An air extraction valve 15 is installed on one side of the main air outlet pipe, and a vacuum pump 16 is installed at the port of the main air outlet pipe.
[0031] It should be noted that the gas flow meter 14 is used to control the intake air volume according to the size of the product being cooled and the cooling stage. During the cooling process, in order to balance the internal air pressure of the cooling chamber 1 and expel the heated cooling nitrogen, the heated gas inside is discharged by starting the vacuum pump 16 and opening the exhaust valve 15. This forms precise control over the cooling process and ensures that the cooling chamber is always filled with unheated cooling nitrogen.
[0032] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.
Claims
1. A product cooling device for a non-contact vacuum furnace, comprising a cooling chamber (1), characterized in that, The cooling chamber (1) contains multiple support frames (2), and the tops of each support frame (2) on the same side are fixedly connected to a main air pipe (3). Multiple air ducts (4) are installed between two main air pipes (3). Air vents (5) are evenly arranged at the bottom of the air ducts (4). The blowing angle of the air ducts (4) is adjustable. An air inlet pipe (6) is installed on one side of at least one main air pipe (3). An air outlet pipe (7) is arranged on one side of the bottom of the cooling chamber (1). Cooling plates (8) are placed on the bottom surface of the cooling chamber (1) between each support frame (2).
2. The product cooling device in a non-contact vacuum furnace according to claim 1, characterized in that, The support frame (2) includes a side frame (21), which has two parallel slots (22) in the middle. A locking block (23) is installed between the two slots (22). A main pipe frame (24) is installed on the side of the side frame (21) away from the locking block (23). One side of the main pipe frame (24) is welded to the main air pipe (3).
3. The product cooling device in a non-contact vacuum furnace according to claim 1, characterized in that, The main air pipe (3) is fixedly connected to a side pipe (10) on one side. A locking nut (11) is threaded on the outside of the side pipe (10). An adjusting pipe (12) is threaded on the side pipe (10). An adjusting nut (13) is threaded on the outside of the adjusting pipe (12). The air pipe (4) is inserted between the two adjusting pipes (12) and locked by the adjusting nut (13).
4. The product cooling device in a non-contact vacuum furnace according to claim 1, characterized in that, The air inlet pipe (6) is equipped with a gas flow meter (14) on the outside of the cooling chamber (1).
5. The product cooling device in a non-contact vacuum furnace according to claim 1, characterized in that, The air outlet pipe (7) includes three air outlet sub-pipes located on one side of the bottom of the cooling chamber (1). Each air outlet sub-pipe is fixedly connected to an air outlet main pipe. An air extraction valve (15) is installed on one side of the air outlet main pipe, and a vacuum pump (16) is installed at the port of the air outlet main pipe.
6. The product cooling device in a non-contact vacuum furnace according to claim 1, characterized in that, A sealing door (9) is installed on one side of the cooling chamber (1), and a handle is installed on one side of the sealing door (9).