A laser safety shutter device suitable for shielding laser of wafer detection equipment

Abstract

The utility model provides a kind of laser safety shutter device suitable for wafer detection equipment shielding laser, including laser safety shutter, the laser safety shutter includes support seat, cylinder linkage device, laser baffle and combined bearing, the support seat is equipped with limit hole, the support seat side is equipped with cylinder support, the laser baffle inboard is fixed limit rod, the limit rod is inserted into limit hole, the cylinder linkage device includes spring, support column and cylinder, the cylinder is erected on cylinder support, the support column is fixed in laser baffle inner wall, the spring both ends are connected with laser baffle and support column respectively, the cylinder piston end is equipped with ring, the ring is set on support column. The utility model is shielded to light hole by cylinder linkage laser baffle, protects wafer piece center, prevents laser burning.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer inspection equipment technology, and in particular to a laser safety shutter device suitable for blocking lasers in wafer inspection equipment. Background Technology

[0002] In wafer inspection, the on / off state of the laser beam is controlled by a laser shutter. Both a laser safety shutter and an electrically driven laser shutter work together to block the laser beam, thereby guiding the laser beam and protecting the wafer. Laser shutters typically use a rotating shield, which controls the laser path. However, the existing rotating shield method is relatively slow, making it difficult to improve work efficiency. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a laser safety shutter device suitable for blocking laser light in wafer inspection equipment.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a laser safety shutter device suitable for blocking laser light in wafer inspection equipment, comprising a laser safety shutter, wherein the laser safety shutter includes a support base, a cylinder linkage device, a laser baffle, and a combined bearing; the support base is provided with a limiting hole, and a cylinder bracket is provided on the side of the support base; a limiting rod is fixed inside the laser baffle, and the limiting rod extends into the limiting hole; the cylinder linkage device includes a spring, a support column, and a cylinder; the cylinder is mounted on the cylinder bracket; the support column is fixed to the inner wall of the laser baffle; both ends of the spring are connected to the laser baffle and the support column, respectively; and a ring is provided at the piston end of the cylinder, and the ring is sleeved on the support column.

[0005] Preferably, the laser baffle includes a first baffle, a disk, and a second baffle. The first baffle and the second baffle are both fixed to the upper semicircular sidewall of the disk. The included angle between the first baffle and the second baffle is 90°-180°. The length of the first baffle is greater than that of the second baffle.

[0006] Preferably, the limiting hole is arc-shaped, and the diameter of the limiting rod is smaller than the width of the limiting hole.

[0007] Preferably, the inner wall of the support base is provided with a first diabolo-shaped protrusion, the inner wall of the laser baffle is provided with a second diabolo-shaped protrusion, and the two ends of the spring are respectively connected to the first diabolo-shaped protrusion and the second diabolo-shaped protrusion.

[0008] Preferably, the front end of the first baffle is a stepped platform, and light-blocking mirrors are provided on the top and side surfaces of the stepped platform. Several grooves are provided in the middle of the front wall of the first baffle.

[0009] Preferably, the combined bearing includes at least two washers, at least two ball bearings, and at least one spring washer.

[0010] Preferably, the combined bearing is a combination of washer-ball bearing-spring washer-ball bearing-washer, the combined bearing is fixed in a fixing hole, the fixing hole is located in the middle of the support base, and the outer diameter of the combined bearing is equal to the diameter of the fixing hole.

[0011] Preferably, the laser safety shutter is fixed on the base, and the base is provided with at least one laser safety shutter. A counterweight placement chamber is fixed on the top surface of one side of the base, and a fixing plate is fixed on the top surface of the other side. A counterweight is provided in the counterweight placement chamber. The side wall of the counterweight placement chamber near the fixing plate is provided with several movable holes. The movable holes are square and their tops are located at the top of the counterweight placement chamber. The head end of the first baffle passes through the movable holes and is located inside the counterweight placement chamber. Light-transmitting holes are provided on both the front and rear walls of the counterweight placement chamber. The light-blocking mirror corresponds to the position of the light-transmitting hole. The fixing plate is C-shaped.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model uses a cylinder to link a laser baffle to block the light-transmitting hole. The cylinder drives the laser baffle to rotate, and a spring connects the laser baffle and the support base. The cylinder provides negative pressure to draw in air, and the cylinder links the laser baffle to block the light-transmitting hole. When the negative pressure is removed, the laser baffle rebounds under the reaction of the spring, returning the laser baffle to its original position, protecting the center of the wafer and preventing laser burn-in. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the laser safety shutter device for blocking laser light in wafer inspection equipment according to the present invention.

[0014] Figure 2 This is a front view of the laser safety shutter device of the present invention, which is suitable for blocking laser light in wafer inspection equipment.

[0015] Figure 3 This is a rear view of the laser safety shutter device of the present invention, which is suitable for blocking laser light in wafer inspection equipment.

[0016] Figure 4 This is a top view of the laser safety shutter device of this utility model, which is suitable for blocking laser light in wafer inspection equipment.

[0017] Figure 5 This is a side view of the laser safety shutter device of the present invention, which is suitable for blocking laser light in wafer inspection equipment.

[0018] Figure 6 This is a schematic diagram of the support structure of the laser safety shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0019] Figure 7 This is a schematic diagram of the laser baffle structure of the laser safety shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0020] Figure 8 This is an exploded view of the combined bearing of the laser safety shutter device for shielding lasers in wafer inspection equipment according to this utility model.

[0021] Figure 9 This is a schematic diagram of the mounting base and the structure of the laser safety shutter device for blocking laser light in wafer inspection equipment according to this utility model.

[0022] Figure descriptions: 1. Support base, 11. Limiting hole, 12. Cylinder bracket, 13. Fixing hole, 2. Cylinder linkage device, 21. Spring, 22. Support column, 23. Cylinder, 24. First diabolo-shaped protrusion, 25. Second diabolo-shaped protrusion, 26. Ring, 3. Laser baffle, 31. Light-blocking mirror, 32. Limiting rod, 33. Groove, 34. First baffle, 35. Disc, 36. Second baffle, 4. Combined bearing, 41. Washer, 42. Ball bearing, 43. Spring washer, 5. Base, 51. Counterweight placement compartment, 52. Light transmission hole, 53. Fixing plate, 54. Movable hole, 6. Laser safety shutter. Detailed Implementation

[0023] To provide a better understanding of the purpose, structure, features, and functions of this utility model, detailed descriptions are provided below with reference to specific embodiments.

[0024] Please refer to the reference. Figure 1 , Figure 4 , Figure 5 , Figure 6 and Figure 7 This utility model discloses a laser safety shutter device for shielding lasers in wafer inspection equipment, comprising a laser safety shutter 6. The laser safety shutter 6 includes a support base 1, a cylinder linkage device 2, a laser baffle 3, and a combined bearing 4. The support base 1 is provided with a limiting hole 11, and a cylinder bracket 12 is provided on the side of the support base 1. A limiting rod 32 is fixed inside the laser baffle 3 and extends into the limiting hole 11. The cylinder linkage device 2 includes a spring 21, a support column 22, and a cylinder 23. The cylinder 23 is mounted on the cylinder bracket 12, and the support column 22 is fixed to the inner wall of the laser baffle 3. The two ends of the spring 21 are respectively connected to the laser baffle 3 and the support column 22. The piston end of the cylinder 23 is provided with a ring 26, which is sleeved on the support column 22.

[0025] The ring 26 is used to connect the cylinder 23 and the laser baffle 3, and the spring 21 is used to connect the laser baffle 3 and the support base 1. The cylinder 23 provides negative pressure to draw in air. The cylinder 23, in conjunction with the laser baffle, blocks the light-transmitting hole 52. When the negative pressure is removed, the laser baffle 3 rebounds under the reaction of the spring 21, returning to its original position to protect the center of the wafer and prevent laser burn-in.

[0026] In one embodiment, such as Figure 3 and Figure 7 As shown, the laser baffle 3 includes a first baffle 34, a disk 35, and a second baffle 36. The first baffle 34 and the second baffle 36 are both fixed to the upper semicircular sidewall of the disk 35. The included angle between the first baffle 34 and the second baffle 36 is 90°-180°. The length of the first baffle 34 is greater than that of the second baffle 36. The second baffle 36 plays a balancing role to prevent the first baffle 34 from causing excessive gravity on one side, which could lead to poor equipment operation.

[0027] In one embodiment, such as Figure 2 As shown, the limiting hole 11 is arc-shaped, the diameter of the limiting rod 32 is smaller than the width of the limiting hole 11, and the arc shape of the limiting hole 11 and the combined bearing 4 are concentric circles but have different radii, which is adapted to the movement trajectory of the laser baffle 3.

[0028] In one embodiment, such as Figure 6 and Figure 7 As shown, the inner wall of the support base 1 is provided with a first diabolo-shaped protrusion 24, and the inner wall of the laser baffle 3 is provided with a second diabolo-shaped protrusion 25. The two ends of the spring 21 are respectively connected to the first diabolo-shaped protrusion 24 and the second diabolo-shaped protrusion 25. The first diabolo-shaped protrusion 24 and the second diabolo-shaped protrusion 25 are used to fix the two ends of the spring 21, and the spring 21 plays a rebound role.

[0029] In one embodiment, such as Figure 1 , Figure 5 and Figure 7 As shown, the front end of the first baffle 34 is a trapezoidal platform. The top and side surfaces of the trapezoidal platform are equipped with light-blocking mirrors 31. The middle part of the front wall of the first baffle 34 is provided with several grooves 33. The light-blocking mirrors 31 are used to block the laser without causing significant damage to the components. The grooves 33 are used to reduce the overall weight and reduce the working pressure of the vacuum device, making the structure more stable.

[0030] In one embodiment, such as Figure 8 and Figure 9As shown, the combined bearing 4 includes at least two washers 41, at least two ball bearings 42, and at least one spring washer 43. The combined bearing 4 is a combination of washer 41-ball bearing 42-spring washer 43-ball bearing 42-washer 41. The combined bearing 4 is fixed in the fixing hole 13, which is located in the middle of the support base 1. The outer diameter of the combined bearing 4 is equal to the diameter of the fixing hole 13. The combined bearing 4 is used to ensure smooth operation while providing a certain amount of forward and backward movement space.

[0031] In one embodiment, such as Figure 9 As shown, the laser safety shutter 6 is fixed on the base 5, and the base 5 is provided with at least one laser safety shutter 6. A counterweight placement chamber 51 is fixed on the top surface of one side of the base 5, and a fixing plate 53 is fixed on the top surface of the other side. A counterweight is provided in the counterweight placement chamber 51. Several movable holes 54 are provided on the side wall of the counterweight placement chamber 51 near the fixing plate 53. The movable holes 54 are square and their tops are located at the top of the counterweight placement chamber 51. The head end of the first baffle 34 passes through the movable holes 54 and is located inside the counterweight placement chamber 51. Light-transmitting holes 52 are provided on both the front and rear walls of the counterweight placement chamber 51. The light-blocking mirror 31 is positioned corresponding to the light-transmitting holes 52. The fixing plate 53 is C-shaped and is used to fix other equipment. The counterweight placement chamber 51 is used to place the counterweight and play a balancing role. The laser is emitted through the light-transmitting holes 52, and the movable holes 54 are used to limit the range of motion of the head end of the first baffle 34.

[0032] Usage: Combine Figures 1-9 As shown, this utility model uses a cylinder 23 to block the light-transmitting hole 52 by linking the laser baffle 3. The cylinder 23 drives the laser baffle 4 to rotate. The spring 21 connects the laser baffle 3 and the support base 1. The cylinder 23 provides negative pressure to draw in air. The cylinder 23 links the laser baffle 3 to block the light-transmitting hole 52. When the negative pressure is removed, the laser baffle 3 rebounds under the reaction of the spring 21, returning to its original position, protecting the center of the wafer and preventing laser burn-in.

[0033] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. A laser safety shutter device suitable for blocking laser light in wafer inspection equipment, characterized in that: The device includes a laser safety shutter (6), which includes a support base (1), a cylinder linkage device (2), a laser baffle (3), and a combined bearing (4). The support base (1) is provided with a limiting hole (11), and a cylinder bracket (12) is provided on the side of the support base (1). A limiting rod (32) is fixed on the inner side of the laser baffle (3), and the limiting rod (32) extends into the limiting hole (11). The cylinder linkage device (2) includes a spring (21), a support column (22), and a cylinder (23). The cylinder (23) is mounted on the cylinder bracket (12), and the support column (22) is fixed on the inner wall of the laser baffle (3). The two ends of the spring (21) are connected to the laser baffle (3) and the support column (22) respectively. The piston end of the cylinder (23) is provided with a ring (26), and the ring (26) is sleeved on the support column (22).

2. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The laser baffle (3) includes a first baffle (34), a disk (35), and a second baffle (36). The first baffle (34) and the second baffle (36) are both fixed on the upper semicircular sidewall of the disk (35). The included angle between the first baffle (34) and the second baffle (36) is 90°-180°. The length of the first baffle (34) is greater than that of the second baffle (36).

3. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The limiting hole (11) is arc-shaped, and the diameter of the limiting rod (32) is smaller than the width of the limiting hole (11).

4. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The inner wall of the support base (1) is provided with a first hollow bamboo-shaped protrusion (24), and the inner wall of the laser baffle (3) is provided with a second hollow bamboo-shaped protrusion (25). The two ends of the spring (21) are respectively connected to the first hollow bamboo-shaped protrusion (24) and the second hollow bamboo-shaped protrusion (25).

5. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 2, characterized in that: The front end of the first baffle (34) is a ladder, and the top and side surfaces of the ladder are provided with light-blocking mirrors (31). The middle part of the front wall of the first baffle (34) is provided with several grooves (33).

6. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 1, characterized in that: The combined bearing (4) includes at least two washers (41), at least two ball bearings (42) and at least one spring washer (43).

7. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 6, characterized in that: The combined bearing (4) is a combination of washer (41) - ball bearing (42) - spring washer (43) - ball bearing (42) - washer (41). The combined bearing (4) is fixed in the fixing hole (13). The fixing hole (13) is located in the middle of the support seat (1). The outer diameter of the combined bearing (4) is equal to the diameter of the fixing hole (13).

8. The laser safety shutter device for blocking laser light in wafer inspection equipment as described in claim 5, characterized in that: The laser safety shutter (6) is fixed on the base (5). The base (5) is provided with at least one laser safety shutter (6). The top surface of one side of the base (5) is fixed with a counterweight placement chamber (51), and the top surface of the other side is fixed with a fixing plate (53). The counterweight placement chamber (51) is provided with a counterweight. The side wall of the counterweight placement chamber (51) near the fixing plate (53) is provided with several movable holes (54). The movable holes (54) are square and the top is located at the top of the counterweight placement chamber (51). The head end of the first baffle (34) passes through the movable hole (54) and is located inside the counterweight placement chamber (51). The front and rear walls of the counterweight placement chamber (51) are provided with light-transmitting holes (52). The position of the light-blocking mirror (31) corresponds to the position of the light-transmitting hole (52). The fixing plate (53) is C-shaped.

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