A cleaning and etching apparatus for solar cell production

Abstract

The utility model discloses a kind of cleaning etching equipment of solar cell production, including transmission module, liquid tank.The lower of transmission module entry end is equipped with pre-etching module;The pre-etching module includes at least one sub pre-etching groove, water inlet pipeline and water outlet communicated with the sub pre-etching groove.In the upper of transmission module entry end still be equipped with novel water film module.Pre-etching module has same liquid medicine with in liquid tank, can be to its lower surface before formally cleaning etching to silicon wafer first pre-cleaning, remove impurity, prevent pollution liquid medicine, to improve the quality of silicon wafer production.Water film module can on the upper surface of silicon wafer always keep water flow and form water film, to avoid the problem of the beat of water film opening caused by electric eye misjudgment.In the utility model, electric eye is only used as detection whether silicon wafer is transmitted by setting time, when electric eye finds problem, sends signal to controller and closes water film module, saves water, to improve production efficiency.

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